JP2006235250A - Measuring microscope - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a measuring microscope efficiently measuring a height of a test substance. <P>SOLUTION: The measuring microscope comprises: a white light source 4; a confocal disk 8 consisting of an optical transmitter 8a which light can freely pass through, and a Nipkow disk 8c in which confocal pinholes 8b of a plurality of small holes are arranged only to transmit the light of a predetermined color (for example, a color with a low-level focus depth like red), and which rotates around a rotation axis 8d at a predetermined rotation speed; an illumination optical system 2 which irradiates the illumination light from the white light source 4 to the test substance through the confocal disk 8 and a predetermined lens system; a measurement optical system 3 (confocal optical systems); and an image pickup device 12 which receives a returned light from the test substance 14 through the confocal optical systems 2 and 3, and obtains an image of the test substance 14. The image of the test substance 14 obtained by the image pickup device 12 is composed in such a manner that the bright-field image of the test substance 14 obtained by the transmission of the returned light through the transmitter 8a, and the confocal image of the test substance obtained by the transmission through the Nipkow disk 8c, are overlapped. <P>COPYRIGHT: (C)2006,JPO&NCIPI

Description

  The present invention relates to a measurement microscope that measures the surface height, shape, and the like of a test object using a confocal optical system.

  As a measurement microscope that performs image processing of an image projected by irradiating light from a light source onto the test object and measures the surface height and shape of the test object, for example, an optical system on the surface of the test object There is one that uses a confocal optical system that focuses and acquires information on the height at that time (see, for example, Patent Document 1). The confocal optical system has a pinhole on the image plane side of the objective lens. Through this pinhole, for example, light (usually a laser beam) emitted from a light source is irradiated to the test object and passes through the pinhole. A typical configuration is one in which return light from the surface of the object to be detected is detected by an image sensor such as a CCD camera.

In the confocal optical system having such a configuration, when the object surface is on the object surface side of the object lens, the brightness (light quantity) of the return light detected through the pinhole is maximized, and the object surface is detected. If the object plane is slightly displaced from the focal plane on the object side of the objective lens in the direction of the optical axis, the return light to the pinhole is largely blocked, so the brightness of the return light detected by the image sensor decreases sharply. It has the property to do. Therefore, by utilizing such properties of the confocal optical system, the height of the test object surface and the surface shape in a specific region can be measured by detecting the amount of return light from the test object surface. It has become.
JP-A-10-221607

  However, in the measurement microscope using the confocal optical system as described above, it is difficult to find the measurement position desired by the user because the depth of focus of the obtained image of the object surface is shallow, and it takes a lot of time for the height measurement. There was a problem that it took.

  This invention is made | formed in view of such a problem, and it aims at providing the measurement microscope which can perform the height measurement of a test object efficiently.

  In order to achieve such an object, according to the present invention, a white light source, a transmissive portion through which light can be freely transmitted, and a plurality of small holes (for example, the confocal pinhole 8b in the present embodiment) are formed. A disk that is formed with a filter that transmits only light of the color of the film, and a disk that rotates at a predetermined rotational speed around the rotation axis (for example, the confocal disk 8 in the present embodiment); A non-confocal optical system formed from a transmission part and a predetermined lens system, and a confocal optical system formed from a Nipkow disk part of the disk and a predetermined lens system (for example, the illumination optical system 2 and the measurement optical system in this embodiment) System 3) and observation means for observing the test object through the non-confocal optical system or the confocal optical system with the return light from the test object illuminated by the white light source. The observation means includes a bright field image of the test object obtained by transmitting the return light through the non-confocal optical system by rotation of the disk, and the object obtained by transmitting through the confocal optical system. An observation image on which a confocal image of a specimen is superimposed can be observed.

  In addition, the present invention includes a white light source, a second light source that emits light of a predetermined color, a transmission part through which light can freely pass, and a nippo disk part in which a plurality of small holes are formed. A first disk that rotates at a predetermined rotation speed at the center, and is provided between the white light source and the first disk, has the same shape as the first disk, and is synchronized with the first disk The non-shared light that irradiates the test object through the second disk that rotates and the illumination light from the white light source through the second disk and through a predetermined lens system from the transmission part of the first disk. A confocal system in which illumination light from the second light source is reflected by the second disk together with the focus optical system, and is irradiated on the test object from the tip disk part of the first disk through the predetermined lens system. An optical system comprising an optical system (for example, a book Observation in which the illumination optical system 2 ′ and the measurement optical system 3 ′) in the embodiment and the return light from the test object are observed through the non-confocal optical system or the confocal optical system. And the observation means includes the bright field image of the test object obtained by transmitting the return light through the non-confocal optical system and the test obtained by transmitting through the confocal optical system. An observation image in which a confocal image of an object is superimposed can be observed.

  Further, the present invention comprises a white light source, a transmissive portion through which light can freely pass, and a nipou disc portion on which a plurality of small holes are formed and a filter that transmits only light of a predetermined color is formed, A disk that rotates at a predetermined rotation speed around a rotation axis, a non-confocal optical system formed from a transmission part of the disk and a predetermined lens system, and a tip disk part of the disk and a predetermined lens system A confocal optical system (for example, the illumination optical system 2 and the measurement optical system 3 in this embodiment) and return light from the test object illuminated by the white light source are converted into the non-confocal optical system or the confocal light. Imaging means (for example, the imaging device 12 in the present embodiment) that receives light via an optical system and acquires an image of the test object, and the image of the test object acquired by the imaging means is the disk A bright field image of the test object obtained by transmitting the return light through the non-confocal optical system by rotation and a confocal image of the test object obtained by transmitting through the confocal optical system are superimposed. Is configured to be a processed image.

  In addition, the present invention includes a white light source, a second light source that emits light of a predetermined color, a transmission part through which light can freely pass, and a nippo disk part in which a plurality of small holes are formed. A first disk that rotates at a predetermined rotation speed at the center, and is provided between the white light source and the first disk, has the same shape as the first disk, and is synchronized with the first disk The non-shared light that irradiates the test object through the second disk that rotates and the illumination light from the white light source through the second disk and through a predetermined lens system from the transmission part of the first disk. A confocal system in which illumination light from the second light source is reflected by the second disk together with the focus optical system, and is irradiated on the test object from the tip disk part of the first disk through the predetermined lens system. Optical system (for example, in this embodiment An optical system comprising a bright optical system 2 ′ and a measurement optical system 3 ′) and return light from the test object is received via the non-confocal optical system or the confocal optical system and An imaging means for acquiring an image of the object (for example, the image sensor 12 in the present embodiment), and the image of the test object acquired by the imaging means has the return light transmitted through the non-confocal optical system. The bright field image of the test object obtained in this way and the confocal image of the test object obtained by transmitting through the confocal optical system are superimposed images.

  It is desirable that a filter that transmits only light of a predetermined color is formed on the first disk and the second disk.

  In this invention, you may comprise the said nipa disc part so that it may have a fan shape centering on the said rotating shaft.

  In the present invention, when the plurality of small holes are spirally arranged at a predetermined interval, the nipou disc portion may be configured to have a shape along the same.

  As described above, according to the present invention, an image obtained by superimposing a bright field image having a deep focal depth of the test object on a confocal image having a shallow focus depth of the test object can be obtained. This makes it easy to grasp the overall condition of the test object at the time point, and can quickly find the measurement location, and can perform focusing with high accuracy according to the intensity of the light, making it possible to efficiently measure the height and shape of the test object. A microscope could be realized.

  Hereinafter, preferred embodiments of the present invention will be described with reference to the drawings. As shown in FIG. 1, the measurement microscope 1 of the present invention is composed of an illumination optical system 2, a measurement optical system 3, and other measurement control devices.

  The illumination optical system 2 is located to the side of the measurement optical system 3, and is configured by arranging a white light source 4, a collector lens 5, and an illumination half mirror 6 in that order on the optical axis. On the other hand, the measurement optical system 3 has, in order on its optical axis, a first imaging optical system 7 composed of an objective lens, a confocal disc 8, an illumination half mirror 6, and a second connection composed of a relay lens. An image optical system 10, an imaging half mirror 11, an imaging element 12, and an eyepiece lens 13 are included.

  The test object 14 is placed on the XY stage 15 and disposed below the first imaging optical system 7 in the measurement optical system 3, and the X direction (direction indicated by the arrow 21) and Y direction (arrows) of the table. By adjusting the position in the direction indicated by 22), the region to be measured can be brought into the field of view.

  A so-called non-confocal / confocal optical system comprising the illumination optical system 2 and the measurement optical system 3 is provided in the lens barrel 1a of the microscope 1 and is in the Z direction (the direction indicated by the arrow 23 ( It can be moved in the height direction)). In other words, the non-confocal / confocal optical system is movable in the Z direction with respect to the test object 14 placed on the XY table 15. The relative amount of movement in the Z direction between the lens barrel portion 1a and the base portion 1b can be detected by the linear scale 16, and will be described in detail later. 14 The height of each part can be measured.

  Illumination light (for example, a halogen lamp or a xenon lamp) emitted from the white light source 4 is converted into parallel light by the collector lens 5 and applied to the illumination half mirror 6. The illumination half mirror 6 transmits about half of the light and reflects the remaining light, and the illumination light emitted from the white light source 4 is reflected perpendicularly downward in the optical axis direction of the measurement optical system 3. The illumination light reflected by the illumination half mirror 6 irradiates a range conjugate with the visual field range on the upper surface of the confocal disc 8 (so-called Koehler illumination is performed).

  As shown in FIG. 2A, the confocal disc 8 is formed in a thin disk shape, and includes a transmission portion 8a through which light can freely pass and a plurality of small holes penetrating in the plate thickness direction. A confocal pinhole 8b is formed and a Nipkow disk portion 8c on which a filter that transmits only light of a predetermined color (for example, a color with a shallow depth of focus such as red, or a complementary color such as green) is formed. The An antireflection film is formed on the entire surface of the confocal disc 8 so that the light reflected by the Niipou disc portion 8 c does not easily reach the second imaging optical system 10. However, the present invention is not limited to this. For example, a polarizing plate may be used so that the reflected light does not reach the second imaging optical system 10. Although one confocal pinhole 8b is shown in FIG. 1, it is not shown in FIG.

  The confocal disc 8 is sufficiently fast with respect to a predetermined rotation speed around the rotation axis 8d by the motor M, that is, the response time of the observer's pupil 17 and the accumulation time of the image sensor 12, and the confocal pinhole 8b Rotates at a rotational speed that does not cause uneven scanning of the pattern. As a result, in the measurement microscope 1, the illumination light that has passed through the confocal pinhole 8b formed on the disk 8 scans the object plane O of the test object 14 as spot light, and the confocal pinhole 8b (spot Light) is detected by the image sensor 12, and height information in a certain region of the test object 14 can be acquired.

  In addition, when the transmission part 8a of the confocal disc 8 exists in the observation optical path, a non-confocal optical system is formed and a non-confocal image is observed (captured). Further, when the tip disk portion 8c of the non-focal disc 8 exists in the observation optical path, a confocal optical system is formed and a confocal image is observed (captured). In the confocal disc 8, the ratio of the brightness of the confocal image to the brightness of the bright field image is set in advance to the angle ratio (area ratio) of the Niipou disc portion 8c with respect to the transmission portion when the rotation axis 8d is the center. Has been. In the confocal disc 8, if the area ratio of the Niipou disc portion 8c to the transmitting portion 8a is the same, the performance of the discs is basically regarded as equivalent. For example, the shape of the Niipou disc portion 8 having the same diameter is used. 2A, even if it has a fan shape 8c centered on the rotating shaft 8d, a plurality of confocal pinholes 8b, which are small holes, are predetermined as shown in FIG. When formed in a spiral manner at intervals, it may have a shape along this.

  The confocal disc 8 having such a configuration is disposed so as to be orthogonal to the optical axis of the measurement optical system 3 so as to block light rays (illumination light or the like) passing through the measurement optical system 3. The illumination light that has passed through the confocal pinhole 8b formed on is focused on the object 14 placed on the stage 15 by the first imaging optical system 7 as an image of the confocal pinhole 8b. Irradiated. The image of the confocal pinhole 8b focused and irradiated on the test object 14 is reflected by the surface of the test object 14 (hereinafter referred to as the object plane O) and is incident on the first imaging optical system 7 again. Then, the light is condensed by the first imaging optical system 7, formed as a reflected image on the confocal disk 8, and further passes through the confocal pinhole 8 b. Then, after passing through the illumination half mirror 6, it is imaged again by the second imaging optical system 10, and proceeds in the direction of the image sensor 12 and in the direction of the eyepiece 13 through the imaging half mirror 11. Divided into things. Of these divided lights, the light traveling in the direction of the eyepiece 13 forms an image at the visual field position of the pupil 17 of the observer and is used for visual observation. On the other hand, the light traveling in the direction of the imaging element 12 is received on the imaging surface of the element 12 and subjected to photoelectric conversion, and an imaging signal corresponding to the intensity (brightness) of the light detected by the imaging element 12 is output. The The imaging signal is stored as a confocal image after being converted into a digital signal.

  The image recognized by the imaging element 12 and the observer's pupil 17 includes a bright field image (non-confocal image) formed when the return light from the test object 14 passes through the transmission part 8a, and the Niipou disk part 8c. For example, a confocal image (reflected image) shining with a predetermined color such as red, which is formed when transmitting, is superimposed. This is because, as described above, the confocal disc 8 is formed with a transmission portion 8a through which light can freely pass and a plurality of small holes (confocal pinballs 8b) to transmit only light of a predetermined color. This is due to the fact that the filter is composed of the formed Nipkow disk portion 8c and is rotated sufficiently faster than the accumulation time of the imaging device 12 and the response time of the observer's pupil around the rotation shaft 8d by the motor M. .

  Here, the bright field image obtained when passing through the transmission part 8a has a higher resolution when the focal plane of the first imaging optical system 7 coincides with the object plane O, and the object plane O is positioned on the optical axis. When the direction deviates from the focal plane, the resolution decreases, but the brightness hardly changes regardless of the in-focus state. Therefore, the entire state of the test object 14 in the visual field can be easily obtained from the bright field image having a deep focal depth.

  The confocal image of the test object 14 obtained when passing through the Niipou disc portion 8c is a predetermined color (for example, red) only when the focal plane of the first imaging optical system 7 coincides with the object plane O. When the object plane O deviates from the focal plane in the optical axis direction, the image appears dark. That is, the surface height of the test object 14 is displayed like a contour line. Therefore, in the measurement microscope 1, the intensity changes according to the movement of the focal plane in the optical axis direction, so that the height from the confocal image obtained by the imaging element 12 receiving the return light from the test object 14 is increased. You can ask for information. Hereinafter, a specific method for measuring the height of the test object 14 using the measurement microscope 1 according to the present embodiment will be described.

As shown in FIG. 1, the lens barrel 1a including the illumination optical system 2 and the measurement optical system 3 is configured to be movable up and down along the optical axis direction. Therefore, the lens barrel 1a by vertically moving, moving in the optical axis direction at the focal position of the first imaging optical system 7 the object plane O near ₁ (Z0), the optical axis of the lens barrel portion 1a As shown in FIG. 3, the relationship between the position Z and the light intensity I of the confocal image detected by the image sensor 12 is such that the focal plane of the first imaging optical system 7 and the object plane O of the object 14 to be inspected. In the position Z0 where the two coincide with each other, the distribution is such that the light intensity I is maximized (hereinafter, the maximum value of the light intensity is referred to as “IZ peak value”). Similarly, when the focal position of the imaging optical system 7 is moved to near the object plane O ₂ (Z1) of the test object 14, the light intensity I of the confocal image shows the maximum value as shown in FIG. Therefore, the lens barrel 1a is moved from the object plane O ₁ to O ₂ in the optical axis direction, seeking IZ peak value of the signal detected by the image sensor 12, the optical axis direction position Z In this case the barrel section 1a If (Z0) is read by the linear scale 16, the height information of the test object 14 can be obtained.

  Since the confocal disc 8 is rotated at a predetermined speed and light of a predetermined color is scanned on the object plane O of the test object 14, height information for a large number of points on the object plane O is simultaneously obtained. Can be measured. At this time, the measurement range on the object plane O corresponds to the imaging field of view of the imaging surface of the imaging device 12, and the measurement range of the height information of the test object 14 corresponds to the movement range in the optical axis direction of the lens barrel 1a.

  The non-confocal / confocal optical system including the illumination optical system 2 and the measurement optical system 3 is configured to be movable in a direction perpendicular to the XY stage 15 on which the test object 14 is placed. . For this reason, by moving the non-confocal / confocal optical systems 2 and 3 with respect to the XY stage 15, the test object 14 is moved in a direction perpendicular to the optical axis to a desired or arbitrary position. If the object plane O is irradiated, the height of the test object 14 can be measured over a wide range.

  As described above, in the measurement microscope 1 of the present invention, the bright field image (non-confocal image) having a deep focal depth formed when the return light from the test object 14 passes through the transmission part 8a, and the Nippon disk part. An image in which a confocal image (reflected image) with a shallow depth of focus formed by passing through 8c is superimposed, that is, a focused portion is brightly highlighted with a predetermined color, and the other focus is not in focus. For the portion, an image having a color close to the actual color of the test object 14 can be obtained.

  As a result, according to the present invention, even if the test object 14 is difficult to perform focusing only by conventional visual observation, such as a low-contrast object such as a transparent body, a fringed edge or a bump top, etc. The person can easily measure the height and surface shape of the test object 14 by improving the working efficiency because the person can easily focus at a desired measurement location by using the in-focus position that is bright and bright and emphasized. be able to.

  Further, in a measurement microscope using a conventional confocal optical system, when measuring the height of the test object 14, whether or not the object is in focus is determined by looking at a confocal image that shines in a predetermined color. However, in the present invention, by superimposing the bright field image on the confocal image, the observer can easily grasp the state in the field of view and the current measurement location, and the measurement operation can be performed smoothly.

  Furthermore, since the observer can grasp the in-focus state with a confocal image with a shallow depth of focus while observing the entire state of the test object 14 with a bright field image with a deep depth of focus, when performing manual height measurement In addition, the height of the test object 14 can be measured more accurately and efficiently than when focusing only by looking at the contrast of the bright field image.

  The present invention as described above is not limited to the above embodiment, and can be improved as appropriate without departing from the gist of the present invention.

  In the above-described embodiment, the white light source 4 serves as both a bright-field image confocal image and a confocal image illumination light source. However, for example, these illumination light sources can be made independent to constitute a measurement microscope. The second embodiment will be described below with reference to FIG. In addition, about the thing which has the same function as the said embodiment, the same number is attached | subjected and the description is abbreviate | omitted.

  As shown in FIG. 4, the measurement microscope 30 of the second embodiment includes an illumination optical system 2 ′, a measurement optical system 3, and other measurement control devices.

  The illumination optical system 2 ′ is located on the side of the measurement optical system 3, and in order on the optical axis of the white light source 4 for the bright field image, the collector lens 5 a, the second confocal disk 8 ′, the collector lens 5 b, The illumination half mirror 6 is disposed, and the collector lens 5c, the wavelength selection filter 32, and the second confocal disc 8 are sequentially arranged on the optical axis of the second light source 31 (here, a white light source) for confocal images. 'Is arranged.

  Thus, by making the light source for the bright-field image and the confocal image independent, the illumination intensity can be dimmed independently. Further, by arranging the wavelength selection filter 32 on the optical path of the second light source 31, the light emitted from the second light source 31 can be changed to an arbitrary color. However, the configuration is not limited to this, and a light source having a specific wavelength such as a colored light source (for example, fluorescent color generation) may be used instead of the combination of the second light source 31 and the wavelength selection filter 32.

  On the other hand, the measurement optical system 3 is arranged in order on the optical axis thereof by a first imaging optical system 7 composed of an objective lens, a first confocal disc 8, an illumination half mirror 6, and a relay lens. 2 imaging optical system 10, imaging half mirror 11, imaging element 12, and eyepiece lens 13. In addition, the test object 14 is placed on the XY stage 15 and disposed below the first imaging optical system 7 in the measurement optical system 3, and the X direction (direction indicated by the arrow 21) and Y direction of the table. By adjusting the position in the direction indicated by the arrow 22, the measurement target site can be put in the field of view.

  Such a non-confocal / confocal optical system including the illumination optical system 2 ′ and the measurement optical system 3 is provided in the lens barrel 1a of the microscope 30 and is in the Z direction (arrow) with respect to the base 1b. 23 (direction (height direction)). In other words, the non-confocal / confocal optical system is movable in the Z direction with respect to the test object 14 placed on the XY table 15. The relative movement amount in the Z direction between the lens barrel portion 1a and the base portion 1b can be detected by the linear scale 16, and the height of each part of the test object 14 is determined from the difference in the focal position of the test object 14. Measurement is possible.

  The illumination light emitted from the white light source 4 is converted into parallel light by the collector lens 5a, is converted again into parallel light by the collector lens 5b via the second confocal disk 8 ', and is irradiated onto the illumination half mirror 6. The The light emitted from the second light source 31 is converted into parallel light by the collector lens 5c, converted into light of a predetermined color by the wavelength selection filter 32, reflected by the second confocal disk 8 ', and collected by the collector. The light is converted into parallel light by the lens 5b and applied to the illumination half mirror 6. The illumination light from the white light source 4 and the second light source 31 is reflected at a right angle downward in the optical axis direction of the measurement optical system 3. Here, the illumination light reflected by the illumination half mirror 6 is irradiated in a range conjugate with the visual field range on the upper surface of the confocal disk 8 (so-called Koehler illumination is performed).

  The first and second confocal discs 8 and 8 'have the same shape. In other words, a light-transmitting portion 8a that is formed in a thin disk shape and is capable of transmitting light freely and a confocal pinhole 8b that is a plurality of small holes penetrating in the plate thickness direction are formed. And a Nipkow disc portion 8c on which a filter that transmits only the film is formed. In the present embodiment, an antireflection film is formed on the entire surface of the confocal disc 8 so that the light reflected by the tip disk portion 8c does not easily reach the second imaging optical system 10. In FIG. 4, one confocal pinhole 8b is shown. Here, in the case where a monochromatic laser light source (for example, fluorescent color generation) is used as the second light source 31, if the intensity of the irradiated light is adjusted, unlike the above-described embodiment, the Nipkow disc having no filter formed thereon. It is also possible to use a confocal disc with a section.

  The first and second confocal discs 8 and 8 'are synchronously rotated at predetermined speeds around the rotation shafts 8d and 8d' by motors M and M '(not shown), respectively. Here, the predetermined speed indicates a rotation speed that is sufficiently fast with respect to the response time of the observer's pupil 17 and the accumulation time of the image sensor 12 and does not cause uneven scanning of the pattern of the confocal pinhole 8b.

  Such a first confocal disc 8 is disposed perpendicular to the optical axis of the measurement optical system 3 that blocks light (illumination light, etc.) passing through the measurement optical system 3, and the second confocal disc 8 '. Are inclined so as to transmit the light from the white light source 4 and reflect the light from the second light source 31.

  Illumination light that has passed through the confocal pinhole 8b formed in the first confocal disk 8 is applied to the test object 14 placed on the stage 15 by the first imaging optical system 7 to the confocal pinhole 8b. It is condensed and irradiated as an image. The image of the confocal pinhole 8b focused and irradiated on the test object 14 is reflected by the surface of the test object 14 (hereinafter referred to as the object plane O) and is incident on the first imaging optical system 7 again. Then, the light is condensed by the first imaging optical system 7 and formed as a reflected image on the first confocal disk 8 and further passes through the confocal pinhole 8b. Then, after passing through the illumination half mirror 6, it is imaged again by the second imaging optical system 10, and proceeds in the direction of the image sensor 12 via the imaging half mirror 11 and in the direction of the eyepiece 13. Divided into things to advance. Of these divided lights, the light traveling in the direction of the eyepiece lens 13 forms an image at the visual field position of the observer's pupil 17 and is used for visual observation. On the other hand, the light traveling in the direction of the imaging element 12 is received on the imaging surface of the element 12 and subjected to photoelectric conversion, and an imaging signal corresponding to the intensity (brightness) of the light detected by the imaging element 12 is output. The The imaging signal is stored as a confocal image after being converted into a digital signal.

  As a result, in the measurement microscope 1 in the second embodiment, the bright light of the test object 14 obtained by the return light from the test object 14 transmitted through the transmission part 8a in the observer's pupil 17 and the image sensor 12 is obtained. An image in which the field image and the confocal image of the test object 14 obtained by transmitting through the Niipou disc portion 8c can be obtained, and the height of the test object 14 can be efficiently obtained as in the first embodiment. Measurements can be made.

It is a block diagram of the measurement microscope which concerns on embodiment of this invention. It is a top view of the confocal disc arrange | positioned at the measuring microscope which concerns on embodiment of this invention, (a) is what formed the Niipou disc part in the fan shape, (b) is a confocal pinhole in the surface of a Nipo disc. It is a figure which shows what was formed in the shape along this, when is formed in spiral. It is a figure which shows the relationship between the position Z of the optical axis direction of a lens-barrel part, and the intensity | strength I of the light detected by an imaging means. It is a block diagram of the measurement microscope which concerns on other embodiment of this invention.

Explanation of symbols

1 Measuring microscope 2 Illumination optical system (confocal optical system)
3 Measurement optical system (confocal optical system)
4 white light source 5 collector lens 6 illumination half mirror 7 first imaging optical system 8 confocal disk 10 second imaging optical system 11 imaging half mirror 12 imaging element (imaging means)
DESCRIPTION OF SYMBOLS 13 Eyepiece 14 Test object 15 XY stage 16 Linear scale 8a Transmission part 8b Confocal pinhole (small hole)
8c Nipou disc part 8d Rotating shaft M Motor

Claims (7)

A white light source,
It consists of a transmission part that allows light to freely pass through and a Niipou disk part on which a plurality of small holes are formed and a filter that transmits only light of a predetermined color is formed. A rotating disc,
A non-confocal optical system formed from a transmission part of the disk and a predetermined lens system;
A confocal optical system formed from a Nipkow disk portion of the disk and a predetermined lens system;
Observing means for observing the test object through the non-confocal optical system or the confocal optical system with return light from the test object illuminated by the white light source;
The observation means includes a bright field image of the test object obtained by transmitting the return light through the non-confocal optical system by rotation of the disk, and the test obtained by transmitting through the confocal optical system. A measuring microscope characterized by being able to observe an observation image superimposed with a confocal image of an object. A white light source,
A second light source that emits light of a predetermined color;
A first disk that consists of a transmission part through which light can freely pass and a nipou disk part in which a plurality of small holes are formed, and that rotates at a predetermined rotational speed about a rotation axis;
A second disk provided between the white light source and the first disk, having the same shape as the first disk, and rotating synchronously with the first disk;
Along with the non-confocal optical system that transmits the illumination light from the white light source through the second disk and irradiates the test object from the transmission part of the first disk through a predetermined lens system. An optical system comprising a confocal optical system that reflects illumination light from the light source of the first light source on the second disk and irradiates the object to be inspected from the Nipou disk portion of the first disk via the predetermined lens system; ,
Observation means for observing the test object through the non-confocal optical system or the confocal optical system with the return light from the test object,
The observation means includes a bright field image of the test object obtained by transmitting the return light through the non-confocal optical system, and a confocal image of the test object obtained by transmitting through the confocal optical system. A measurement microscope characterized by being able to observe an observation image in which and are superimposed. A white light source,
It consists of a transmission part that allows light to freely pass through and a Niipou disk part on which a plurality of small holes are formed and a filter that transmits only light of a predetermined color is formed. A rotating disc,
A non-confocal optical system formed from a transmission part of the disk and a predetermined lens system;
A confocal optical system formed from a Nipkow disk portion of the disk and a predetermined lens system;
An imaging means for receiving the return light from the object illuminated by the white light source via the non-confocal optical system or the confocal optical system and acquiring an image of the object;
The image of the test object acquired by the imaging means includes a bright-field image of the test object obtained by transmitting the return light through the non-confocal optical system by the rotation of the disk, and the confocal optics. A measurement microscope, wherein the measurement microscope is an image on which a confocal image of the test object obtained by passing through a system is superimposed. A white light source,
A second light source that emits light of a predetermined color;
A first disk that consists of a transmission part through which light can freely pass and a nipou disk part in which a plurality of small holes are formed, and that rotates at a predetermined rotational speed about a rotation axis;
A second disk provided between the white light source and the first disk, having the same shape as the first disk, and rotating synchronously with the first disk;
Along with the non-confocal optical system that transmits the illumination light from the white light source through the second disk and irradiates the test object from the transmission part of the first disk through a predetermined lens system. An optical system comprising a confocal optical system that reflects illumination light from the light source of the first light source on the second disk and irradiates the object to be inspected from the Nipou disk portion of the first disk via the predetermined lens system; ,
An imaging means for receiving return light from the test object via the non-confocal optical system or the confocal optical system and acquiring an image of the test object;
The image of the test object acquired by the imaging means is transmitted through the confocal optical system and a bright field image of the test object obtained by transmitting the return light through the non-confocal optical system. A measurement microscope, wherein the obtained confocal image of the test object is an superimposed image.   The measurement microscope according to claim 4, wherein a filter that transmits only light of a predetermined color is formed on the first disk and the second disk.   The measuring microscope according to claim 1, wherein the Nipkow disc portion has a fan shape centered on the rotation axis.   The measurement microscope according to claim 1, wherein, when the plurality of small holes are formed so as to be spirally arranged at a predetermined interval, the Nipkow disk portion has a shape along the same. .

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