JP2019074692A - Magnifying observation device - Google Patents

Abstract

To make it possible to reduce the size and weight of a revolver to which a plurality of objective lenses are attached.SOLUTION: A plurality of objective lenses are formed by including first lenses each having an optical lens, and second lenses each having a ring illumination attached to the periphery of the optical lens. On an under surface of the revolver, one or more first attachment holes for attaching the first lenses and two or more second attachment holes for attaching the second lenses are respectively arranged at an equal interval along the circumference concentric with the central axis of the revolver, and the first attachment holes are each arranged between the second attachment holes in the circumferential direction.SELECTED DRAWING: Figure 12

Description

  BACKGROUND OF THE INVENTION Field of the Invention The present invention relates to a magnifying observation apparatus that magnifies an observation object and enables observation.

  Heretofore, a magnifying observation apparatus provided with a plurality of objective lenses has been known. In this magnification observation apparatus, the magnification and the like are different for each objective lens, and the objective lens used for observation is changed by rotating a revolver to which the objective lens is attached.

  Patent Document 1 describes an example of such a revolver. Specifically, the revolver described in Patent Document 1 is configured to rotate around a predetermined central axis (rotation center), and the plurality of objective lenses are arranged along a circle concentric with the central axis. It is lined up at equal intervals.

JP 2000-330034 A

  As described in Patent Document 1, when attaching a plurality of objective lenses to a revolver, for example, it is conceivable to arrange the objective lenses in order of magnification along the above-mentioned circumferential direction.

  By the way, in a general magnifying observation apparatus, it is required to irradiate light toward the observation target. In this case, so-called ring illumination is known as a light irradiation method.

  Ring illumination irradiates ring-shaped light from the outer periphery of an objective lens, and is generally used in low-magnification objective lenses. Therefore, while ring illumination is adopted for the objective lens on the low magnification side, ring illumination is not adopted for the objective lens on the high magnification side, and it is conceivable to adopt only other methods such as coaxial epi-illumination. In this case, as described above, when the objective lenses are arranged in order of magnification, the objective lenses adopting ring illumination are adjacent to each other in the circumferential direction.

  However, when ring illumination is employed, it is necessary to attach a separate illumination unit around the optical lens forming the objective lens, or to provide a ring-shaped optical path around the optical lens to form a so-called dark field objective lens. Therefore, the size of the objective lens is increased in the radial direction.

  Therefore, if a plurality of objective lenses are arranged at equal intervals and the objective lenses adopting ring illumination are adjacent to each other, the objective lens not employing ring illumination is used to suppress interference between the lenses. And all the objective lenses are required to be separated.

  However, if all the objective lenses are separated, the size and weight of the revolver may be increased. This is not preferable considering vibration suppression of the revolver.

  The present invention has been made in view of the above-mentioned point, and an object of the present invention is to make it possible to reduce the size and weight of the revolver.

  In order to achieve the above object, according to a first aspect of the present invention, in a magnifying observation apparatus that magnifies and enables observation of an observation object, a mounting table for mounting the observation object and light directed to the observation object And a viewing optical system having a plurality of objective lenses that can be attached to the revolver, and the relative position between the viewing optical system and the mounting table Vertical movement mechanism capable of changing distance, height information detection means for detecting height information, light receiving element for imaging an observation object via the observation optical system, and the relative distance by the vertical movement mechanism And focus searching means for performing a focus search based on the height information detected by the height information detecting means and the image obtained by the light receiving element corresponding to the plurality of objective lenses including an optical lens. And a second lens having an optical path provided around the optical lens using the observation illumination as a light source, and the first lens is mounted on the lower surface of the revolver. And one or more first mounting holes and two or more second mounting holes for mounting the second lens are arranged at equal intervals along a circle concentric with the central axis, and the circle In the circumferential direction, the first mounting hole is disposed between the second mounting holes.

  According to this configuration, the second lens has a diameter larger than that of the first lens by the amount of the optical path using the observation illumination as the light source. And by arranging the first attachment hole and the second attachment hole as described above, it is possible to arrange the first lens between the two second lenses while arranging the objective lenses at equal intervals. Become. Such a configuration allows the mounting holes to be as close as possible to each other as compared to the configuration in which the second lenses are adjacent when the objective lenses are arranged at equal intervals, so the size reduction of the revolver and Weight reduction can be realized.

  A second aspect of the present invention is a magnification observation apparatus that magnifies and enables observation of an observation object, including a mounting table for mounting the observation object, observation illumination for irradiating light toward the observation object, An observation optical system having a revolver rotating around a predetermined central axis and a plurality of objective lenses attachable to the revolver, and a vertical movement mechanism capable of changing the relative distance between the observation optical system and the mounting table , Height information detecting means for detecting height information, a light receiving element for imaging an observation object via the observation optical system, and the height information corresponding to the relative distance by the vertical movement mechanism A focus searching unit for performing a focus search based on height information detected by the detecting unit and an image acquired by the light receiving element, the plurality of objective lenses comprising a first lens having an optical lens, and the observation And a second lens having an optical path using the illumination as a light source provided around the optical lens, and one or more first mounting holes for attaching the first lens to the lower surface of the revolver. And two or more second attachment holes for attaching the second lens, which are arranged at non-uniform intervals along a circumference concentric with the central axis.

  According to this configuration, by arranging the first mounting hole and the second mounting hole as described above, for example, the distance between the adjacent second mounting holes (in particular, the distance between the central axes of the second mounting holes) ) While ensuring that adjacent first mounting holes can be brought close to each other. As a result, downsizing and weight reduction of the revolver can be realized.

  According to a third aspect of the present invention, there is provided an observation unit for rotatably supporting the revolver, and a configuration provided on the observation unit to contact and separate from the side with respect to the revolver and an objective lens attached to the revolver. A revolver stopper, and the revolver stopper is connected to a locking portion for locking the revolver and an electrode provided on a side of the objective lens through the electrode. And a terminal configured to supply power to the observation light.

  Here, if the revolver stopper and the terminal are separately provided, a separate mechanism for moving the terminal is required, which may lead to an increase in the size of the apparatus.

  On the other hand, according to the above-mentioned composition, a magnifying observation device can be compactly constituted by providing a terminal in a revolver stopper.

  A fourth invention is characterized in that positioning protrusions or positioning holes for positioning an optical path using the observation illumination as a light source in the second lens are formed on the lower surface of the revolver.

  A fifth invention is characterized in that the second lens is attached to the revolver by a magnetic force.

  According to a sixth aspect of the invention, the revolver and the second lens are complementarily formed by a first positioning portion formed on one of the revolver and the second lens and a second positioning portion formed on the other. It is characterized in that the magnet is positioned by the concavo-convex shape and at least one of the first positioning portion and the second positioning portion is provided with a magnet for attaching the second lens to the revolver by a magnetic force.

  According to a seventh aspect of the present invention, the revolver and the second lens are complemented by a first positioning portion formed on one of the revolver and the second lens, and a second positioning portion formed on the other. The second lens is positioned by the concavo-convex shape, and the second lens is fitted to the revolver via the concavo-convex shape.

  In an eighth aspect of the invention, the optical lens constituting the second lens is screwed to the lower surface of the revolver, and the optical path of the second lens using the observation illumination as a light source is the unevenness It is characterized in that it is positioned via a shape.

  A ninth invention is characterized in that the revolver has the light for observation, which is provided outside the second lens, as a light source, and has an optical path passing through the revolver.

  A tenth invention is characterized in that a light source of the observation illumination is accommodated in the second lens.

  According to the present invention, downsizing and weight reduction of a revolver can be realized.

It is a schematic diagram which shows the system configuration | structure of the expansion observation apparatus which concerns on embodiment of this invention. It is a perspective view of an observation unit. It is a schematic diagram which shows the optical system and illumination system of an observation unit. It is a block diagram of a magnifying observation apparatus. It is a figure which shows the relationship of the position of Z direction of an observation target object, and light reception intensity | strength in one pixel. It is a flowchart which shows the procedure at the time of measurement. It is a side view showing a revolver in the state where a plurality of objective lenses were attached. It is a figure which shows the revolver in the state to which several objective lenses were attached, seeing from a downward direction. It is a side view showing a revolver in the state where a plurality of objective lenses were removed. It is a figure which shows the revolver in the state from which several objective lenses were removed seeing from lower direction. The upper drawing is a view showing the objective lens with ring illumination from above, and the lower drawing is a view showing the objective lens with ring illumination from the front. It is a figure which shows roughly arrangement | positioning of a 1st and 2nd attachment hole. FIG. 7 is a view showing a release state and a hold state of the revolver stopper as viewed from below. It is a figure which sees the release state and hold state of a revolver stopper from a side. FIG. 13 is a view corresponding to FIG. 12 showing the second embodiment. It is a figure which shows roughly the modification of 1st and 2nd embodiment.

First Embodiment
Hereinafter, a first embodiment for carrying out the present invention (hereinafter simply referred to as "embodiment" or "first embodiment") will be described in detail based on the drawings. The following description of the preferred embodiments is merely illustrative in nature, and is not intended to limit the present invention, its applications, or its applications.

(Overall configuration of the magnifying observation apparatus 1)
FIG. 1 is a schematic view showing a system configuration of a magnifying observation apparatus 1 according to an embodiment of the present invention. The magnifying observation apparatus 1 is an apparatus for magnifying the observation object SP so as to be observable, and can be called, for example, a microscope, a digital microscope, a scanning microscope, or the like. Further, as will be described later, the three-dimensional shape of the observation object SP can be acquired, and hence it can be called a three-dimensional shape measuring machine.

  Although the magnifying observation apparatus 1 can be configured by the observation unit 2 and the external unit 3, the external unit 3 can be integrated into the observation unit 2. When the magnifying observation device 1 is configured by the observation unit 2 and the external unit 3, the external unit 3 can be provided with the power supply device 3 a that supplies power to the observation unit 2. The observation unit 2 and the external unit 3 are connected by a wire 2a.

  In addition, the operation terminal 4 can be connected to the magnifying observation device 1. The communication unit 3 b (shown in FIG. 4) incorporated in the external unit 3 enables connection of the operation terminal 4. The operation terminal 4 includes a display unit 5, a keyboard 6, a mouse 7 and a storage device 8. The operation terminal 4 can be integrated into the observation unit 2 or the external unit 3 and integrated to form a component of the magnifying observation apparatus 1. In this case, the operation terminal 4 may be called a control unit or the like instead of the operation terminal. Although it is possible, in this embodiment, the observation unit 2 and the external unit 3 are separated.

  The display unit 5, the keyboard 6, the mouse 7 and the storage device 8 can also be incorporated into the observation unit 2 and the external unit 3 respectively and integrated to form a component of the magnifying observation apparatus 1. That is, the operation terminal 4, the display unit 5, the keyboard 6, the mouse 7 and the storage device 8 can also be part of the magnifying observation apparatus 1, for example, the magnifying observation apparatus 1 with the display unit 5, the keyboard 6 and the mouse It can also be set as the magnifying observation apparatus 1 with 7 (operation part).

  The keyboard 6 and the mouse 7 are conventionally well-known devices for computer operation, are operation units for operating the operation terminal 4, and can operate the magnifying observation apparatus 1 by these. By the operation of the keyboard 6 and the mouse 7, it is possible to perform input and selection operation of various information, selection operation of an image, area designation, position designation and the like. The keyboard 6 and the mouse 7 are an example as an operation unit, and in place of the keyboard 6 and the mouse 7 or in addition to the keyboard 6 and the mouse 7, for example, computer operations such as various pointing devices, voice input devices, touch operation panels Equipment can also be used.

  The display unit 5 is configured of, for example, a display device capable of color display, such as a liquid crystal display panel or an organic EL panel. A touch operation panel as an operation unit may be incorporated in the display unit 5.

  Moreover, each member, a means, an element, a unit etc. which are mentioned later may be provided in any of the observation unit 2, the external unit 3, and the terminal 4 for operation.

  In addition to the devices and devices described above, the magnifying observation device 1 can also be connected with devices for performing operations and controls, printers, computers for performing various other processes, storage devices, peripheral devices, and the like. The connection in this case is, for example, serial connection such as IEEE1394, RS-232x or RS-422, USB, etc., parallel connection, or electrical or magnetic via a network such as 10BASE-T, 100BASE-TX, 1000BASE-T, etc. And optical connection methods can be mentioned. In addition to wired connection, IEEE 802. A wireless LAN such as x, a radio wave such as Bluetooth (registered trademark), an infrared ray, a wireless connection using optical communication, or the like may be used. Furthermore, as a storage medium used for a storage device for exchanging data and storing various settings, for example, various memory cards, magnetic disks, magneto-optical disks, semiconductor memories, hard disks and the like can be used. The magnifying observation apparatus 1 can also be referred to as a magnifying observation system, a digital microscope system, etc. by combining the observation unit 2 and the external unit 3 with the various units, devices and devices other than them.

(Overall configuration of observation unit 2)
The external shape of the observation unit 2 is as shown in FIG. 2 and the like, and a base 20 placed on a workbench or the like, a support 21 extending upward from the back side of the base 20, and a support 21 And a head portion 22 provided at the top of the head. The observation unit 2 rotatably supports an electric revolver 28, which will be described later, via a head portion 22. Incidentally, the labor side of the observation unit 2 is the side closer to the worker when the operator (observer) faces the observation unit 2 in the normal operation posture, and the back side of the observation unit 2 When the worker faces the observation unit 2 in the normal operation posture, the worker is far from the worker. This is only defined for the convenience of description, and does not limit the actual use state.

  The observation unit 2 includes a horizontal motorized mounting table 23 for mounting the observation object SP, and coaxial epi-illumination light 24 and a ring as observation illumination for irradiating light toward the observation object SP shown in FIG. The illumination 25, the laser output unit 26 as a point light source, the non-confocal observation optical system 30 and the confocal observation optical system 40 as an observation optical system, the imaging device (light receiving device) 50, the photomultiplier tube (light receiving device And 51). The observation optical system is a telecentric optical system.

  The motorized mounting table 23 can be moved in the vertical direction by the rotation operation of the lift dial 23a shown in FIG. 1 and FIG. The user rotates the elevation dial 23a in accordance with the thickness and height of the observation object SP, as in the other optical microscopes.

(Configuration of non-confocal observation optical system 30)
The non-confocal observation optical system 30 can be configured similarly to the basic structure of an optical system conventionally used in an optical microscope, and uses the coaxial epi-illumination 24 and the ring illumination 25 as light sources for observation The light reflected from the object SP is configured to be received by the imaging device 50. Specifically, the non-confocal observation optical system 30 includes an objective lens 27 disposed in order from the observation object SP side to the imaging device 50 side, an electric revolver (revolver) 28 which is an electric variable magnification mechanism, At least the first half mirror 31 and the second half mirror 32 are provided. The first half mirror 31 can be a non-polarization half mirror. The first half mirror 31 and the second half mirror 32 are disposed on the observation light path of the objective lens 27. When the observation object SP is illuminated, the light L1 reflected by the observation object SP is an objective light. The light is received by the imaging device 50 through the lens 27, the first half mirror 31 and the second half mirror 32.

  The imaging element 50 images the observation target SP via the non-confocal observation optical system 30 in order to acquire an image of the observation target SP. Specifically, the imaging device 50 may use an imaging device such as a charge-coupled device (CCD) or a complementary metal oxide semiconductor (CMOS) that converts the intensity of light obtained through the non-confocal observation optical system 30 into an electrical signal. Image sensors can be used, but are not limited thereto. The imaging device 50 is a sensor that can also acquire color information. Further, the exposure time of the imaging device 50 can be arbitrarily adjusted.

(Configuration of coaxial epi-illumination 24)
The coaxial epi-illumination 24 is an illumination unit serving as a light source for illuminating the observation object SP via the objective lens 27. The coaxial epi-illumination 24 observes the observation object SP such that the illumination light path is positioned on the optical axis of the objective lens 27. Illuminate the surface. The coaxial epi-illumination light 24 has a light emitter 24a such as an LED, and also has a collector 24b on which the light of the light emitter 24a is incident, a relay lens 24c, a mirror 24d and a lens 24e. The light of the light emitter 24a passes through the collector 24b and the relay lens 24c, is redirected by the mirror 24d, and then enters the lens 24e. The light emitted from the lens 24 e is converted in the direction of the observation object SP by the first half mirror 31 and then irradiated on the observation light axis of the objective lens 27, and illuminates the observation object SP through the objective lens 27. The coaxial epi-illumination light 24 is controlled by the control unit 72 described later to control the amount of light during ON / OFF and ON.

  The coaxial epi-illumination 24 is suitable for observing a mirror surface or a viewing surface close to the mirror surface, and has an advantage that the difference in reflectance of the viewing surface can be observed with high contrast.

(Configuration of ring light 25)
The ring illumination 25 is a non-coaxial epi-illumination disposed so as to surround the objective lens 27 as schematically shown in FIG. Light up. As shown in FIG. 7, in the motorized revolver 28, a plurality of mounting holes 28a, 28b for mounting the objective lens 27 are formed at intervals around the rotation center line, and each of the mounting holes 28a, 28b is provided. The objective lenses 27A and 27B having different magnifications are attached to the lens. The objective lens 27A is configured of an optical lens (hereinafter, may simply be referred to as a “lens”) that does not have the ring illumination 25. On the other hand, in the objective lens 27B, a ring illumination 25 is attached to the outer periphery of the optical lens 27a (see FIG. 11). As described below, an optical path for light emitted from the light source housed in the case 25a of the ring illumination 25 is provided around the optical lens 27a constituting the objective lens 27B.

  In the following description, in order to distinguish the two types of objective lenses 27, the objective lens 27A not having the ring illumination 25 is referred to as the "first lens" 27A, while the objective lens 27B having the ring illumination 25 is It may be called "2 lens" 27B.

  Of the plurality of mounting holes 28a and 28b, the mounting hole 28a for mounting the first lens 27A is referred to as a "first mounting hole" 28a, while the mounting hole 28b for mounting the second lens 27B is 2 Mounting hole "28b" may be called.

  The ring illumination 25 has a ring-shaped case 25a accommodating light sources (not shown) such as a plurality of LEDs, and a light transmitting member 25b provided at the lower part of the case 25a. The case 25a is formed so as to surround the periphery of the lens of the objective lens 27B, and the plurality of light sources accommodated inside are disposed so as to surround the periphery of the lens of the objective lens 27B. The light emitted from the light source is condensed by the light transmitting member 25 b and directed toward the observation object SP mounted on the motorized mounting table 23. When the rotational position of the electric revolver 28 is at the position where the objective lens 27A is selected as the present observation objective lens, the ring illumination 25 does not function, but the objective lens 27B is selected as the present observation objective lens If so, the ring light 25 can be functional. The light quantity at the time of ON / OFF and the ON time of the ring illumination 25 is controlled by the illumination control unit 72c described later.

  In addition to the ring illumination 25, side illumination for illuminating the observation surface of the observation object SP from the periphery of the objective lens 27, and dark for illuminating the observation surface of the observation object SP from the periphery of the optical axis of the objective lens 27. Field illumination can also be used. Since these illuminations are illuminations conventionally used for a microscope, detailed explanation is omitted.

  In the case of ring illumination 25, side illumination and dark field illumination, it is suitable for observing diffusers such as paper or observation surfaces with large irregularities, and to illuminate light from around the objective lens 27 or around the optical axis. The coaxial epi-illumination 24 has the advantage of being able to brightly illuminate an inclined surface which does not return light. Dark field objectives can also be used.

  In the principle of focus composition, whether or not the observation surface of the observation object SP is in focus is used as a determination means of the height of the point, so the ring illumination 25 (side illumination and Darkfield illumination may be suitable.

(Configuration of Confocal Observation Optical System 40)
The confocal observation optical system 40 shown in FIG. 3 can be configured in the same manner as the basic structure of an optical system conventionally used in a confocal microscope, and uses the laser output unit 26 as a light source. The photomultiplier tube 51 receives the reflected light. The photomultiplier tube 51 is a component for measuring the observation object SP via the confocal observation optical system 40.

  The confocal observation optical system 40 includes the objective lens 27 and the motorized revolver 28 of the non-confocal observation optical system 30. Therefore, the objective lens 27 and the motorized revolver 28 include the confocal observation optical system 40 and the non-confocal observation optical system 40. The confocal observation optical system 30 is commonly used.

  Furthermore, the confocal observation optical system 40 includes a dichroic prism 41, a first lens 42, an XY scanner unit 43, a quarter wavelength plate 44, a polarization beam splitter 45, a pinhole lens 46, and a pinhole plate. 47 and at least a neutral density filter (ND filter) 48. The dichroic prism 41 is a conventionally known member configured to reflect light of a specific wavelength and transmit light of other wavelengths, and is disposed on the observation light axis of the objective lens 27. In this embodiment, the dichroic prism 41 is configured to reflect the light emitted from the laser output unit 26.

  A first lens 42 is disposed on the reflected light axis of the dichroic prism 41. The XY scanner unit 43 is disposed between the first lens 42 and the wave plate 44. Further, a pinhole lens 46, a pinhole plate 47, and a neutral density filter 48 are disposed between the photomultiplier tube 51 and the polarization beam splitter 45. The laser output unit 26 is disposed to emit light toward the polarization beam splitter 45. The neutral density filter 48 is used to attenuate the laser light L2 incident on the photomultiplier tube 51. Therefore, when the laser beam L2 incident on the photomultiplier tube 51 is sufficiently weak, the light reduction filter 48 may not be provided. The light reduction filter 48 is controlled by the control unit 60, and can change the light reduction rate.

  The XY scanner unit 43 has a galvano mirror 43a and a resonator 43b. The galvano mirror 43a and the resonator 43b are conventionally used when scanning light, so detailed description will be omitted. The light emitted from the laser output unit 26 passes through the polarization beam splitter 45 and the wave plate 44 and enters the XY scanner unit 43. The light incident on the XY scanner unit 43 is two-dimensionally scanned (X direction and Y direction) on the observation surface of the observation object SP by the operation of the galvano mirror 43 a and the resonance 43 b. The X direction can be the left and right direction of the observation unit 2, and the Y direction can be the depth direction of the observation unit 2. However, the X direction and the Y direction may be arbitrarily set. Can.

  The XY scanner unit 43 may be a unit configured to scan light two-dimensionally on the observation surface of the observation object SP, and is not limited to the above-described structure. For example, a galvano scanner system in which two galvano mirrors are combined, a piezoelectric element is adhered to an acoustooptic medium made of glass, an electrical signal is input to this piezoelectric element to generate an ultrasonic wave, and a laser passes through the acoustooptic medium A photoacoustic element system (resonant system) that diffracts light and deflects the light, or a disk that has one or many rows of pinholes in a spiral and rotates the light to pass through the pinhole is the observation surface of the observation object SP It may be a Nipou disc system or the like configured to scan the upper side.

  The laser beam L2 reflected by the observation object SP passes through the objective lens 27 and the first half mirror 31 and is then reflected by the second half mirror 32 to be reflected by the first lens 42, the XY scanner unit 43, and the wavelength plate The light beam is reflected by the polarization beam splitter 45 through the light 44 toward the pinhole lens 46. The laser beam L2 incident on the pinhole lens 46 is condensed by the pinhole lens 46 and travels in the direction of the pinhole formed in the pinhole plate 47, and the laser beam L2 passing through the pinhole is a light reduction filter The light beam passes through 48 and enters the photomultiplier tube 51. Note that, instead of the photomultiplier tube 51, it is also possible to use an imaging device as described above, or a light receiving device composed of a photodiode and an amplifier. Also, the exposure time of the photomultiplier tube 51 can be arbitrarily adjusted.

  In the confocal observation optical system 40, a pinhole is disposed in front of the photomultiplier tube 51 at a position conjugate with the observation surface of the observation object SP, and the pinhole is extremely small. Therefore, when the laser light L2 emitted from the laser output unit 26 is focused on the observation surface of the observation object SP, the reflected light from the observation surface is formed on the pinhole plate 47 after passing through the pinhole lens 46. The light is collected by the pinholes, and the amount of light received by the photomultiplier tube 51 becomes significantly large, and the light intensity value (luminance value) becomes large. On the other hand, if the laser light L2 does not focus on the observation surface of the observation object SP, the reflected light from the observation surface is blocked by the pinhole plate 47 and hardly passes through the pinhole. The amount of light received by the light-emitting

  Therefore, in the two-dimensional scanning region (imaging region, measurement region) of the laser beam L2 by the XY scanner unit 43, the portion in focus on the observation surface of the observation object SP is bright, while the other high It becomes dark about the part of The confocal observation optical system 40 can acquire luminance information excellent in resolution because it is an optical system using a point light source.

(Configuration of laser output unit 26)
The laser output unit 26 is a device that generates and emits a laser beam for illuminating the observation object SP via the objective lens 27, and serves as a light source for the confocal observation optical system 40. The laser output unit 26 can use, for example, a He-Ne gas laser or a semiconductor laser. Further, instead of the laser output unit 26, various light sources capable of generating a point light source can be used, and for example, a combination of a high brightness lamp and a slit may be used. Also, the light source may be a point light source or a light source that generates a strip of beam light.

(Configuration of Z-axis moving mechanism)
The observation unit 2 detects height information and a Z-axis drive unit (vertical movement mechanism) 52 (shown schematically in FIGS. 1 and 3) capable of changing the relative distance between the objective lens 27 and the motorized mounting table 23. And a height information detection unit (height information detection means) 53 (shown in FIG. 4). The Z-axis drive unit 52 includes, for example, a stepping motor and a motion conversion mechanism that converts rotation of an output shaft of the stepping motor into linear motion in the vertical direction, and is provided to the head unit 22. By rotating the stepping motor of the Z-axis drive unit 52, the electric revolver 28 moves in the vertical direction, whereby the relative distance between the objective lens 27 and the electric mounting table 23 can be changed. The Z-axis drive unit 52 has such an accuracy that the change pitch of the relative distance between the objective lens 27 and the motorized mounting table 23 can be set to about 1 nm at the minimum.

  The height information detection unit 53 is configured of a linear scale (linear encoder) or the like that can detect the relative distance between the objective lens 27 and the motorized mounting table 23. The height information detection unit 53 is configured to be able to detect even if the change in relative distance between the objective lens 27 and the motorized mounting table 23 is 1 nm. In this embodiment, the motorized mounting table 23 is movable in the Z-axis direction, and the objective lens 27 is also movable in the Z-axis direction. Then, at the time of focus search, the objective lens 27 is driven in the Z-axis direction with the motorized mounting table 23 fixed, so that the relative distance between the objective lens 27 and the motorized mounting table 23 changes. The height information can be detected by detecting the position of the objective lens 27 in the Z-axis direction at that time using a linear scale. The objective lens 27 may be fixed so as not to move in the Z-axis direction, and the motorized mounting table 23 may be driven in the Z-axis direction during focus search. In this case, height information can be detected by detecting the position of the motorized mounting table 23 in the Z-axis direction with a linear scale. That is, height information can be detected by the height information detection unit 53 even if either the motorized mounting table 23 or the objective lens 27 is driven in the Z-axis direction at the time of focus search.

  The observation optical system is provided with an autofocus mechanism for focusing on the observation object SP. The autofocusing mechanism can be configured by the Z-axis drive unit 52. That is, since the relative distance between the objective lens 27 and the observation object SP mounted on the motorized mounting table 23 can be changed by the Z-axis drive unit 52, an algorithm similar to the known contrast AF etc. is used. The automatic focusing mechanism can be realized by moving the objective lens 27 in the vertical direction by the Z-axis drive unit 52 until the object to be observed SP is focused.

(Configuration of stage drive unit 54)
The stage drive unit 54 is a device for moving the motorized mounting table 23 in the horizontal direction (X direction and Y direction). That is, the motorized mounting table 23 is separated from the mounting table support member 23A shown in FIG. 1, and is supported movably in the horizontal direction with respect to the mounting table support member 23A. The motorized mounting table 23 includes, for example, an actuator such as a linear motor, and the actuator can move the motorized mounting table 23 in the X direction and the Y direction within a predetermined range in the mounting table support member 23A.

(Configuration of control unit 60)
The observation unit 2 has a control unit 60. The control unit 60 may be provided in the external unit 3 or may be provided in the operation terminal 4. The control unit 60 is a unit for controlling each part of the magnifying observation apparatus 1 and performing various calculations and processes, and can be configured by a CPU, an MPU, a system LSI, a DSP, a dedicated hardware, or the like. The control unit 60 incorporates various functions as described later, but these may be realized by a logic circuit or may be realized by executing software. The control unit 60 will be described in detail below.

  The control unit 60 includes a laser output unit 26, coaxial incident illumination 24, ring illumination 25, electric revolver 28, XY scanner unit 43, attenuation filter 48, image sensor 50, photomultiplier tube 51, Z-axis drive unit 52, high The height information detection unit 53 and the stage drive unit 54 are connected. By the control unit 60, the laser output unit 26, coaxial incident illumination 24, ring illumination 25, electric revolver 28, XY scanner unit 43, attenuation filter 48, image sensor 50, photomultiplier tube 51, Z axis drive unit 52, and stage drive The unit 54 is controlled, and the output signals of the imaging device 50, the photomultiplier tube 51, and the height information detection unit 53 are input to the control unit 60.

(Configuration of electric revolver control unit 61)
The control unit 60 includes a revolver control unit (magnifying mechanism control unit) 61 that controls the electric revolver 28 in order to change the magnification of the observation optical system. The electric revolver control unit 61 rotates the electric revolver 28 to make the desired objective lens 27 the objective lens 27 of the non-confocal observation optical system 30 and the confocal observation optical system 40. When the user selects a desired objective lens 27 from the plurality of objective lenses 27 previously attached to the motorized revolver 28 by operating the switch, the keyboard 6, the mouse 7, etc., the selected objective lens 27 is not The electric revolver control unit 61 rotates the electric revolver 28 so as to be the objective lens 27 of the focus observation optical system 30 and the confocal observation optical system 40, and then stops the electric revolver 28.

  As shown in FIG. 7, the objective lenses 27A and 27B having different magnifications are attached to the electric revolver 28, and to which attachment holes 28a and 28b of the electric revolver 28 are attached which objective lenses 27A and 27B are It is memorized by storage part 73 which control unit 60 has. Therefore, the electric revolver control unit 61 can control the electric revolver 28 as described above based on the information stored in the storage unit 73 and the selection information by the user. The user may input which objective lens 27A, 27B is attached to which attachment hole 28a, 28b of the electric revolver 28 from the operation terminal 4, or the objective lens 27 is detected by the sensor of the electric revolver 28. It may be made to recognize automatically.

  By controlling the motorized revolver 28, the magnifications of the non-confocal observation optical system 30 and the confocal observation optical system 40 can be changed. In addition to the electric revolver 28 or in place of the electric revolver 28, an objective lens (not shown) made of an electric zoom lens may be provided. The motorized zoom lens is a motorized zooming mechanism, and the magnification of the non-confocal observation optical system 30 and the confocal observation optical system 40 can be changed by operating the motorized zoom lens. In this case, the part that controls the electric zoom lens is the zooming mechanism control unit. The magnification change mechanism control unit controls the electric zoom lens based on the information selected by the user, whereby a desired magnification can be obtained.

  The electric revolver 28 can be operated through a user interface displayed on the display unit 5 or can be operated with a switch or the like provided in the observation unit 2. By using the electric revolver 28, there is no need for the user to turn the revolver by hand, so that dust etc. will not fall on the observation object SP when turning the revolver.

(Configuration of loading table control unit 62)
As shown in FIG. 4, the control unit 60 has a mounting table control unit 62 that changes the horizontal position of the motorized mounting table 23. The mounting table control unit 62 can change the horizontal position of the motorized mounting table 23 by controlling the stage driving unit 54. The horizontal position of the motorized mounting table 23 can be designated by, for example, the X coordinate and the Y coordinate of the central portion of the motorized mounting table 23. When the mounting table control unit 62 changes the horizontal position of the motorized mounting table 23, for example, when acquiring a navigation image newly described later, acquiring a navigation image again, acquiring a navigation image additionally, etc. may be performed. However, not only in these cases, the mounting table control unit 62 can control the horizontal position of the motorized mounting table 23 so that the designated range can be observed even when the user specifies the observation range or position. change.

(Configuration of focus search means)
The control unit 60 performs a focus search based on height information detected by the height information detection unit 53 in accordance with the relative distance by the Z-axis drive unit 52 and an image acquired by the imaging device 50. A second search is performed based on the search means 63, the height information detected by the height information detection unit 53 corresponding to the relative distance by the Z-axis drive unit 52, and the signal acquired by the photomultiplier tube 51. And a focus searching means 64. Here, the relative distance is a distance obtained based on the height information detected by the height information detection unit 53. This relative distance may be the distance between the tip end surface of the objective lens 27 and the upper surface of the motorized mounting table 23, but the present invention is not limited to this, a predetermined portion of the objective lens 27 and the motorized mounting table 23 It can be set as the vertical distance from the predetermined part.

  The first focus searching means 63 illuminates the observation object SP with at least one of the coaxial epi-illumination 24 and the ring illumination 25, and executes the focus search based on the image acquired by the imaging device 50. Specifically, the Z-axis drive unit 52 is controlled to change the relative distance between the objective lens 27 and the motorized mounting table 23, and the observation target SP is focused based on the image acquired by the imaging device 50. The relative distance obtained based on the height information detected by the height information detection unit 53 when the subject is in focus is stored in the storage unit 73. This is the focus position (in-focus position) acquired by the first focus search means 63.

  The second focus searching means 64 illuminates the observation object SP by the laser output unit 26, and executes the focus search based on the signal acquired by the photomultiplier tube 51. Specifically, the Z-axis drive unit 52 is controlled to change the relative distance between the objective lens 27 and the motorized mounting table 23, while focusing on the observation object SP based on the signal acquired by the photomultiplier tube 51. . At this time, as described above, when the amount of light received by the photomultiplier tube 51 is maximized, it can be determined that the observation object SP is in focus. Details of this determination procedure will be described later. The relative distance obtained based on the height information detected by the height information detection unit 53 when the subject is in focus is stored in the storage unit 73. This is the focus position (in-focus position) acquired by the second focus search means 64.

(Configuration of three-dimensional shape measuring means)
The control unit 60 is searched by the first three-dimensional shape measuring means 65 for measuring the three-dimensional shape of the observation object SP based on the focus position searched by the first focus searching means 63, and by the second focus searching means 64. And a second three-dimensional shape measurement means 66 for measuring the three-dimensional shape of the observation object SP based on the focus position. The three-dimensional shape of the observation object SP can also be called the surface shape or texture of the observation object SP.

  The first three-dimensional shape measuring means 65 acquires an image capable of grasping the three-dimensional shape of the observation surface of the observation object SP using the principle of focus combination. The image acquired by the first three-dimensional shape measurement means 65 can also be referred to as a depth composite image. When the height difference of the measurement target portion of the observation object SP exceeds the depth of field of the objective lens 27, the depth-synthesized image is focused out of the images separately captured by the imaging device 50 with different height directions. It is the image which extracted and synthesize | combined only the part (pixel) which matched. In order to generate a depth synthesized image, depth synthesis processing may be performed. In this depth synthesis processing, a plurality of still images are moved while the objective lens 27 is moved in the Z axis direction (height direction) by the Z axis drive unit 52 The image pickup device 50 picks up an image of the image by the image pickup element 50, and synthesizes an in-focus area to synthesize an image in focus on the entire screen. In this case, several tens to several hundreds of still images are used depending on the range in the Z-axis direction, the change pitch for changing the position in the Z-axis direction, and the like.

  Since color information can be acquired by the imaging device 50, the first three-dimensional shape measuring means 65 can acquire a color image indicating the observation object SP.

  The second three-dimensional shape measurement means 66 acquires an image capable of grasping the three-dimensional shape of the observation surface of the observation object SP using the principle of laser confocal. The second three-dimensional shape measuring means 66 generates confocal image data as follows. The confocal image data is performed for each unit region on the observation object SP. The unit area is determined by the magnification of the objective lens 27.

  First, in a state where the position of the observation object SP in the Z direction is constant, the laser beam L2 is scanned in the X direction at the end in the Y direction by the XY scanner unit 43. When scanning in the X direction is completed, the laser beam L2 is moved by the XY scanner unit 43 in the Y direction by a constant interval. In this state, the laser beam L2 is scanned in the X direction. The scanning in the X direction and the Y direction of the unit area is completed by repeating the scanning in the X direction and the movement in the Y direction of the laser beam L2 in the unit area. Next, the objective lens 27 is moved in the Z-axis direction by the Z-axis drive unit 52. As a result, the position of the objective lens 27 in the Z direction is different from the previous one, and in this state, scanning of the unit region in the X and Y directions is performed. Thereafter, the position of the objective lens 27 in the Z direction is moved at a predetermined change pitch described later, and scanning of the unit area in the X direction and Y direction is performed. This is repeated.

  The number of pixels in the X direction of the confocal image data is determined by the scanning speed in the X direction of the laser beam L2 by the XY scanner unit 43 and the sampling period. The number of samplings in one X-direction scan (one scan line) is the number of pixels in the X-direction. Further, the number of pixels in the Y direction is determined by the displacement amount of the laser light L2 in the Y direction by the XY scanner unit 43 every time scanning in the X direction is completed. The number of scanning lines in the Y direction is the number of pixels in the Y direction.

  When scanning of the unit area in the X direction and Y direction is completed, the mounting table control unit 62 controls the stage driving unit 54 to move the motorized mounting table 23 in the X direction or Y direction, and similarly X in another unit area. Scan in the direction and Y direction. This is repeated to perform scanning in the X direction and Y direction for a plurality of unit areas. The obtained confocal image data of each unit area can be connected to one confocal image data.

  FIG. 5 is a view showing the relationship between the position in the Z direction of the observation object SP and the light reception intensity (light reception amount) of the photomultiplier tube 51 in one pixel. As described above, in the confocal observation optical system 40, when the observation surface of the observation object SP is at the focal position of the objective lens 27, the laser light L2 reflected by the observation surface of the observation object SP is a pinhole plate The light is collected at a pinhole 47 formed. Thereby, most of the laser beam L2 reflected by the observation surface of the observation object SP passes through the pinhole formed in the pinhole plate 47 and enters the photomultiplier tube 51, so that the light reception of the photomultiplier tube 51 is performed. Strength is maximized. Therefore, the voltage value of the light reception signal output from the photomultiplier tube 51 is maximized.

  On the other hand, when the observation surface of the observation object SP is at a position deviated from the focal position of the objective lens 27, the laser beam L2 reflected by the observation surface of the observation object SP is formed in the pinhole plate 47. Since the light is collected before or after, the voltage value of the light reception signal output from the photomultiplier tube 51 becomes much lower.

  As described above, a sharp peak appears in the light reception intensity distribution of the photomultiplier tube 51 in a state where the observation surface of the observation object SP is at the focal position of the objective lens 27. A light reception intensity distribution in the Z direction can be obtained for each pixel from confocal image data of each unit area. Thereby, the peak position (Z coordinate) of the light reception intensity distribution and the peak light reception intensity can be obtained for each pixel.

  Data indicating the peak position in the Z direction for each pixel can be referred to as height image data (three-dimensional shape data). An image displayed based on the height image data can be called a height image. The height image is an image capable of grasping the three-dimensional shape of the observation surface of the observation object SP.

  That is, according to the principle of laser confocal, the amount of light received by the photomultiplier tube 51 is maximized at the time of focusing by selective light blocking means such as a pinhole, and the amount of light received by the photoelectron multiplier tube 51 is Using the sharp decrease, it is determined that the peak position of the amount of light received by the photomultiplier tube 51 when the relative distance is changed for each pixel is the in-focus position.

  On the other hand, according to the principle of focus composition, a focus value indicating the degree of focusing for each pixel is calculated from the image acquired by the imaging device 50 based on the contrast, high spatial frequency components, etc. It is determined that the peak position of the focus value when changing.

  Here, "not in focus" means that the difference in luminance between adjacent pixels disappears (the luminance ratio approaches 1), and conversely, in focus means that the luminance between adjacent pixels is not The difference (brightness ratio) is larger than when the focus is not in focus.

  That is, the principle of focus composition and the principle of laser confocal only differ in the method of focus determination, and the relative distance at which the image in focus at each point on the observation plane was taken is To obtain a height image (three-dimensional shape image) to be taken as height, or to “combine an image that is most in focus at each point on the observation surface, and obtain a depth composite image that is in focus at each point” It does not change about the thing.

(Measurement procedure)
FIG. 6 is a flowchart showing a procedure for measuring and observing the observation object SP using the magnifying observation apparatus 1. After the magnifying observation apparatus 1 is activated, the observation object SP is mounted on the motorized mounting table 23 in step SA1. Thereafter, in step SA2, a measurement point (observation point) of the observation object SP is searched. At step SA3, the measurement point of the observation object SP is focused. This can be done by the autofocus mechanism described above.

  After focusing, the objective lens 27 is selected in step SA4. When the objective lens 27 is selected, the motorized revolver 28 rotates and observation with the selected objective lens 27 becomes possible. Next, in step SA5, the measurement principle is selected. The measurement principle is focus synthesis and laser confocal, and one of them is selected. In step SA6, various parameters are set. Then, in step SA7, the measurement point of the observation object SP is measured.

  As described above, a plurality of objective lenses 27 having different magnifications are attached to the motorized revolver 28 in order to observe the observation object SP at an appropriate magnification, and these objective lenses 27 have the ring illumination 25. The first lens 27 </ b> A and the second lens 27 </ b> B having the ring illumination 25 are configured. Hereinafter, the configuration of the electric revolver 28 will be described in detail.

(Configuration of the electric revolver 28)
As shown in FIGS. 7 to 8, six objective lenses 27 are attached to the lower surface of the electric revolver 28 rotating around a predetermined central axis C. The six objective lenses 27 are composed of three first lenses 27A and three second lenses 27B.

  Specifically, the electric revolver 28 is formed in a substantially disc shape as shown in FIGS. 9 to 10, and by rotating around the central axis C, the objective lens 27 used for observation can be selected. .

  Six attachment holes 28 a and 28 b are opened in the lower surface of the electric revolver 28. The six mounting holes 28a, 28b are equally spaced along the circumference concentric with the central axis C, and are for mounting the first mounting hole 28a for mounting the first lens 27A and the second lens 27B. Three second attachment holes 28b are provided. The first mounting hole 28 a and the second mounting hole 28 b have substantially the same diameter.

  Here, the “interval” is the interval between the central axes of the mounting holes 28 a and 28 b, and in particular, indicates the interval along the circumference concentric with the central axis C of the electric revolver 28. As shown in FIG. 12, the intervals between adjacent mounting holes 28a and 28b are all equal (r1 = r2 = r3 = r4 = r5 = r6).

  Specifically, as shown in FIG. 10, the first mounting holes 28a and the second mounting holes 28b are alternately arranged along a circle concentric with the central axis C. That is, in the circumferential direction, one first mounting hole 28a is disposed between the two second mounting holes 28b.

  The first lens 27A is formed of an optical lens that does not have the ring illumination 25, and is screwed to the first mounting hole 28a.

  In contrast, as described above, the second lens 27B includes the optical lens 27a (see FIG. 11) and the ring illumination 25 provided on the outer peripheral portion of the optical lens 27a. The optical lens 27a and the ring illumination 25 are configured to be separable, and after the optical lens 27a is screwed to the second attachment hole 28b, the ring illumination 25 is mounted around the optical lens 27a. It is supposed to be.

  Incidentally, as shown in FIG. 11, an electrode 25c is provided on the side surface of the case 25a forming the ring illumination 25. By connecting a terminal 85 (described in detail later) to the electrode 25c from the side, power can be supplied to the ring illumination 25.

  Thus, when the terminal 85 is connected to the electrode 25c from the side, the angular position of the second lens 27B (especially the ring illumination 25) (specifically, when the optical axis of the optical lens 27a is the rotation center A mechanism is required to more accurately position the angular position of

  Therefore, the electric revolver 28 and the second lens 27B are complementarily formed by a first positioning portion formed on one of the electric revolver 28 and the second lens 27B and a second positioning portion formed on the other. It is positioned by the uneven shape. In the second lens 27B, the optical path relating to the ring illumination 25 can be positioned via such a concavo-convex shape.

  Specifically, on the lower surface of the electric revolver 28, a positioning projection (hereinafter simply referred to as a "projection") 28i as shown in FIG. 10 is provided. The protrusions 28i are provided two by two around the respective second attachment holes 28b, and each constitute a first positioning portion. The two protrusions 28i project substantially downward from the lower surface of the electric revolver 28, and when viewed from below, the second mounting hole 28b is radially oriented (specifically, centered on the central axis C) It is arranged to be sandwiched from both sides of the radial direction). A metal is provided at the tip of each protrusion 28i. The metal may be exposed from the tip of the projection 28i or may be incorporated in the projection 28i.

  On the other hand, at the top of the second lens 27B, a positioning hole (hereinafter simply referred to as a "recess") 27d as shown in FIG. 11 is provided. Two recesses 27d are provided on the upper surface of each case 25a, and each constitutes a second positioning portion. The two recesses 27d have a diameter larger than that of each protrusion 28i, and as shown in the lower part of FIG. 13, the peripheral edge of the opening end tapers upward in a tapered manner. In addition, the magnet 27e is embed | buried under the bottom face of each recessed part 27d.

  Therefore, when the ring illumination 25 is attached to the optical lens 27a screwed to the electric revolver 28, the recesses 27d on the ring illumination 25 side are inserted into the projections 28i on the electric revolver 28 side. Thereby, the ring illumination 25 is positioned in the angular direction. The ring illumination 25 and hence the second lens 27B are attached to the electric revolver 28 by the magnetic force acting between the metal of each protrusion 28i and the magnet of each recess 27d. With such a configuration, even if a general purpose product is used as the optical lens 27a forming the second lens 27B, it is possible to position the ring illumination 25 more accurately.

  The configurations of the first and second positioning units can be changed as appropriate.

  For example, the projection 28i as a positioning projection may be formed on the ring illumination 25, while the recess 27d as a positioning hole may be formed on the lower surface of the electric revolver 28. Alternatively, the magnet 27e may be embedded at the tip of the projection 28i, while metal may be provided at the bottom of the recess 27d.

  Also, while the fitting shape is formed on the surface of the protrusion 28i, the fitting shape may be formed on the inner surface of the recess 27d. In this case, the second lens 27B and the electric revolver 28 are fitted to each other by the complementary uneven shape including the first positioning portion and the second positioning portion.

Also, in the first place, both the protrusion 28i and the recess 27d are not essential. If the projection 28i is not provided, the first attachment hole 28a and the second attachment hole 28b substantially match in appearance. In that case, the first mounting hole 28a and the second mounting hole 28b are displayed to the worker.
The layout of the first and second mounting holes 28a and 28b may be displayed on the display unit 5 in order to make the user visually recognize.

  Thus, the layout shown in FIG. 7 to FIG. 8 is realized by attaching the corresponding objective lens 27 to each of the mounting holes 28a, 28b. As understood from the arrangement of the mounting holes 28a and 28b, the six objective lenses 27 are arranged at equal intervals along the circumference concentric with the above-mentioned central axis C with respect to the lower surface of the motorized revolver 28. And the first lens 27A is positioned between the second lenses 27B in the circumferential direction.

  If the electric lens revolver 28 is to attach the second lens 28B to both of the adjacent first and second attachment holes 28a and 28b even if the recess 27d and the projection 28i are not provided, The layout is such that the two lenses 28B collide with each other and interfere with each other. That is, the distance between the adjacent first and second mounting holes 28a and 28b (specifically, the length of a straight line connecting the centers of the adjacent mounting holes 28a and 28b) is twice the radius of the second lens 27B. It is shorter than the length.

  On the other hand, the distance between the adjacent first and second mounting holes 28a and 28b is longer than the sum of the radius of the first lens 27A and the radius of the second lens 27B. That is, as shown in FIGS. 7 to 8, even if the first lens 27A and the second lens 27B are attached to each of the adjacent first and second attachment holes 28a and 28b, the two lenses collide with each other. It does not interfere.

  As described above, the motorized revolver 28 is adapted to select the objective lens 27 used for observation by rotating around the central axis C. In order to carry out such an operation precisely, it is required to position the electric revolver 28 as precisely as possible with respect to the head portion 22.

  Therefore, on the side surface of the electric revolver 28, a positioning portion 81 for positioning the electric revolver 28 is provided. The positioning portion 81 constitutes a fixing mechanism of the electric revolver 28 together with the revolver stopper 82 provided on the head portion 22. The engagement of the positioning portion 81 and the revolver stopper 82 enables the electric revolver 28 to be positioned in the rotational direction.

  Specifically, as shown in FIGS. 9 to 10, one set of positioning portions 81 is provided corresponding to each of the mounting holes 28a and 28b, each along a circumference concentric with the central axis C. It is lined up at equal intervals. Each positioning portion 81 includes one revolver side protrusion 81 a and one revolver side insertion portion 81 b.

  On the other hand, the revolver stopper 82 is provided at the tip of a rotating shaft 83 driven by a DC motor (not shown), and is formed in a plate shape rotatable integrally with the rotating shaft 83. The revolver stopper 82 is supported in a posture along the side surface of the electric revolver 28, and receives the power from the DC motor to rotate the rotating shaft 83, thereby holding the holding state shown by the solid line in FIG. The posture can be switched between the release state indicated by a dotted line.

  Further, as shown in one side of FIG. 13, the revolver stopper 82 is provided with a locking portion 84 configured to lock the electric revolver 28 via the above-mentioned positioning portion 81.

  The locking portion 84 is configured of a revolver stopper side groove 84a and a revolver stopper side protrusion 84b. Both the revolver stopper side groove 84 a and the revolver stopper side protrusion 84 b are disposed to face the side surface of the electric revolver 28.

  Specifically, the revolver stopper-side groove 84 a is formed in a groove shape having a substantially V-shaped cross section, which is formed to be cut in a direction away from the side surface of the electric revolver 28. The revolver stopper groove 84a is separated from the side surface of the electric revolver 28 and the revolver side protrusion 81a in the release state as shown in FIG. 13, while the electric revolver 28 is in the hold state. By coming close to the side surface of the lower case, the revolver side protrusion 81 a can be engaged.

  The revolver stopper side protrusion 84 b is formed to protrude toward the side surface of the electric revolver 28. As shown in FIG. 13, the revolver stopper-side protrusion 84 b is separated from the side surface of the electric revolver 28 in the release state, and against the side surface of the electric revolver 28 in the hold state. By coming close, the revolver side insertion portion 81 b can be immersed.

  The revolver stopper 82 also includes the terminal 85 described above. The terminal 85 is configured to supply power to the ring illumination 25 via the electrode 25 c by being connected to the electrode 25 c of the ring illumination 25.

  Specifically, the terminal 85 is disposed in the vicinity of the swinging end of the revolver stopper 82, and protrudes in the direction opposite to the electric revolver 28, as shown in FIG. The terminal 85 is separated from the objective lens 27 attached to the motorized revolver 28 in the release state as shown in FIG. 14, and is close to the objective lens 27 in the hold state. Thus, the electrode 25 c of the ring illumination 25 can be immersed.

  Here, as shown in step SA4 of FIG. 6, when the objective lens 27 is selected, the control unit 72 moves the electric revolver 28 upward via the Z-axis drive unit 52. Then, the control unit 72 causes the revolver stopper 82 to be in the released state by rotating the rotating shaft 83 via the DC motor. In the released state, the electric revolver 28 can be rotated around the central axis C without causing the parts to interfere with each other.

  Subsequently, the control unit 72 rotates the electric revolver 28 so as to select the desired objective lens 27. Subsequently, the control unit 72 puts the revolver stopper 82 in the hold state by rotating the rotation shaft 83 via the DC motor. In the hold state, power can be supplied to the ring illumination 25 through the terminal 85 while positioning the electric revolver 28 in the rotational direction.

  Subsequently, the control unit 72 drives the Z-axis drive unit 52 again to move the electric revolver 28 downward. When the processing described above is completed, the control unit 72 proceeds from step SA4 to step SA5 in FIG.

(Operation and effect of the first embodiment)
According to this embodiment, it is possible to realize a measurement method using the principle of focus synthesis and a measurement method using the principle of laser confocal.

  Further, as shown in FIGS. 7 to 8, the second lens 27 </ b> B has a diameter larger than that of the first lens 27 </ b> A by the light path of the ring illumination 25. And although each objective lens 27 is arranged at equal intervals, it is laid out so that the 1st lens 27A may be located between two 2nd lenses 27B. With such a layout, the mounting holes 28a and 28b can be made close to each other. As a result, downsizing and weight reduction of the electric revolver 28 can be realized.

  In addition, if the revolver stopper 82 and the terminal 85 are separately provided, a mechanism for moving the terminal 85 is separately required, which may lead to an increase in the size of the apparatus. On the other hand, as shown in FIG. 14, the magnifying observation device 1 can be made compact by providing the terminal 85 on the revolver stopper 82.

  Further, the terminal 85 is configured to contact and separate from the side with respect to the electrode 25 c by the rotation of the rotary shaft 83. With such a configuration, for example, wear of the electrode 25c can be suppressed and the durability of the electrode 25c can be advantageously secured, as compared with a configuration in which the terminal 85 and the electrode 25c are connected by a slide method, for example. Become.

(Modification of the first embodiment)
The embodiments described above are merely illustrative in every respect and should not be construed as limiting. Furthermore, all variations and modifications that fall within the equivalent scope of the claims fall within the scope of the present invention.

  FIG. 16A shows a modification V1 of the first embodiment. In this modification V1, a single circle indicates the first attachment hole, and a double circle indicates the second attachment hole (the same applies to later-described modifications V2 to V4). Even if the number of the first attachment holes and the second attachment holes is changed as in this modification V1, the same function and effect as those of the embodiment can be obtained.

Second Embodiment
Hereinafter, a second embodiment for carrying out the present invention (hereinafter, simply referred to as “second embodiment”) will be illustrated based on the drawings. Further, in the following description, the same reference numerals as those in the first embodiment or the corresponding components will be used with reference numerals with "'".

  FIG. 15 shows a second embodiment of the present invention. As shown in this figure, a first attachment hole 28a 'for attaching the first lens 27A and a second attachment for attaching the second lens 27B on the lower surface of the electric revolver 28' shown in the second embodiment. The holes 28 b ′ and the holes 28 b ′ are arranged along the circumference concentric with the central axis C at non-uniform intervals.

  Specifically, as shown by r1 'to r6' in FIG. 15, the distance between the first attachment holes 28a 'is smaller than the distance between the first attachment holes 28a' and the second attachment holes 28b '(for example, r1 '<R3'). Further, the distance between the first mounting hole 28a 'and the second mounting hole 28b' is smaller than the distance between the second mounting holes 28b '(e.g., r3' <r4 ').

  By adopting the layout as shown in FIG. 15, the size and weight of the electric revolver 28 can be realized as in the first embodiment.

(Modification of the second embodiment)
The embodiments described above are merely illustrative in every respect and should not be construed as limiting. Furthermore, all variations and modifications that fall within the equivalent scope of the claims fall within the scope of the present invention.

  For example, as in the modified examples V2 to V4 shown in FIGS. Also in these modifications V2 to V4, the same function and effect as those of the second embodiment can be obtained.

Other Embodiments
In the first and second embodiments, the ring illumination 25 is used as the observation illumination. However, as described above, in addition to the ring illumination 25, the observation object SP from the periphery of the objective lens 27 is Side illumination can be used to illuminate the viewing surface.

  In general, when side oblique illumination is used, the observation illumination is not accommodated in the ring illumination 25 constituting the second lens 27B as in the first and second embodiments, but the second lens 27B is used. (E.g., inside the housing of the observation unit 2). In this case, the motorized revolver 28 has an optical path which uses the observation illumination as a light source and penetrates the motorized revolver 28. The above-described configuration is effective in realizing the reduction in size and weight of the electric revolver 28, even in the case of using the side oblique illumination instead of the ring illumination 25.

  As described above, the present invention can be applied to a magnifying observation apparatus.

Reference Signs List 1 magnifying observation apparatus 5 display unit 23 motorized mounting table 24 coaxial epi-illumination 25 ring illumination (observation illumination)
25c electrode 27 objective lens 27a optical lens 27d recess (positioning hole)
27e Magnet 27A 1st lens 27B 2nd lens 28 electric revolver (revolution)
28a first mounting hole 28b second mounting hole 28i protrusion (positioning protrusion, first positioning portion)
30 Non-confocal observation optical system (observation optical system)
40 Confocal observation optical system (observation optical system)
50 imaging device (light receiving device)
51 Photomultiplier tube (light receiving element)
52 Z-axis drive (vertical movement mechanism)
53 Height information detector (distance detector)
54 stage driving unit 62 mounting table control unit 63 first focus searching unit 64 second focus searching unit 65 first three-dimensional shape measuring unit 66 second three-dimensional shape measuring unit 72 control unit 82 revolver stopper 84 locking unit 85 terminal C Central axis SP Measurement object

Claims (10)

In a magnifying observation apparatus that magnifies an observation object and enables observation,
A mounting table for mounting an observation object;
Observation illumination for irradiating light to an observation object;
An observation optical system having a revolver rotating around a predetermined central axis, and a plurality of objective lenses attachable to the revolver;
A vertical movement mechanism capable of changing the relative distance between the observation optical system and the table;
Height information detection means for detecting height information;
A light receiving element for imaging an observation target via the observation optical system;
And focus search means for performing a focus search based on the height information detected by the height information detection means and the image acquired by the light receiving element in accordance with the relative distance by the vertical movement mechanism.
The plurality of objective lenses include a first lens having an optical lens, and a second lens having an optical path with the observation illumination as a light source provided around the optical lens,
A circumference of the lower surface of the revolver is concentric with the central axis, with one or more first attachment holes for attaching the first lens, and two or more second attachment holes for attaching the second lens. And the first attachment holes are arranged between the second attachment holes in the circumferential direction, and the first attachment holes are arranged in the circumferential direction. In a magnifying observation apparatus that magnifies an observation object and enables observation,
A mounting table for mounting an observation object;
Observation illumination for irradiating light to an observation object;
An observation optical system having a revolver rotating around a predetermined central axis, and a plurality of objective lenses attachable to the revolver;
A vertical movement mechanism capable of changing the relative distance between the observation optical system and the table;
Height information detection means for detecting height information;
A light receiving element for imaging an observation target via the observation optical system;
And focus search means for performing a focus search based on the height information detected by the height information detection means and the image acquired by the light receiving element in accordance with the relative distance by the vertical movement mechanism.
The plurality of objective lenses include a first lens having an optical lens, and a second lens having an optical path with the observation illumination as a light source provided around the optical lens,
A circumference of the lower surface of the revolver is concentric with the central axis, with one or more first attachment holes for attaching the first lens, and two or more second attachment holes for attaching the second lens. The magnifying observation apparatus characterized in that they are arranged at non-uniform intervals along the line. In the magnifying observation apparatus according to claim 1 or 2,
An observation unit rotatably supporting the revolver;
And a revolver stopper provided on the observation unit and configured to contact and separate from the lateral side with respect to the objective lens attached to the revolver,
The revolver stopper is
A locking portion for locking the revolver;
And a terminal configured to supply power to the observation illumination through the electrode by being connected to an electrode provided on the side of the objective lens. . In the magnifying observation apparatus according to any one of claims 1 to 3,
A positioning projection or positioning hole for positioning an optical path using the observation illumination as a light source in the second lens is formed on the lower surface of the revolver. In the magnifying observation apparatus according to any one of claims 1 to 4,
The second lens is attached to the revolver by a magnetic force. In the magnifying observation apparatus according to claim 5,
The revolver and the second lens are positioned by a complementary uneven shape including a first positioning portion formed on one of the revolver and the second lens, and a second positioning portion formed on the other.
A magnifying observation apparatus characterized in that at least one of the first positioning unit and the second positioning unit is provided with a magnet for attaching the second lens to the revolver by a magnetic force. In the magnifying observation apparatus according to any one of claims 1 to 4,
The revolver and the second lens are positioned by a complementary uneven shape including a first positioning portion formed on one of the revolver and the second lens, and a second positioning portion formed on the other.
The said 2nd lens is fitted with respect to the said revolver via the said uneven | corrugated shape, The magnifying observation apparatus characterized by the above-mentioned. In the magnifying observation apparatus according to claim 6 or 7,
The optical lens constituting the second lens is screwed to the lower surface of the revolver, while the optical path in the second lens using the observation illumination as a light source is positioned through the concavo-convex shape Observation apparatus characterized in that The magnifying observation apparatus according to any one of claims 1 to 8
The magnifier is characterized in that the revolver uses the observation illumination provided outside the second lens as a light source and has an optical path passing through the revolver. The magnifying observation apparatus according to any one of claims 1 to 8
The light source of the illumination for observation is accommodated in the second lens.

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