JP4406873B2 - Scan measurement inspection equipment - Google Patents

Description

  The present invention relates to a scan measurement inspection apparatus that measures the height information of an object with a high-precision wide field of view, and more particularly, a scan that can measure height information and two-dimensional information by an optical path switching mirror. The present invention relates to a measurement inspection apparatus.

  Along with the high integration of semiconductor devices, the circuit pattern is miniaturized, and a high-performance inspection apparatus is required. For example, it is necessary to accurately measure the shape and height of the bump electrode, and a confocal height measuring device is used for such measurement. This confocal height measuring device uses illumination light as spot light through a confocal pinhole and irradiates a test object (for example, a bump electrode). The reflected image of this spot light passes through the confocal pinhole. Thus, the height of the test object can be obtained with high accuracy by the sectioning effect (see, for example, Patent Document 1).

International Publication WO02 / 23248 Pamphlet

  By the way, in the manufacture of semiconductor devices, it is necessary to acquire not only the height information of the test object but also two-dimensional information (for example, two-dimensional length measurement), and when measuring such two-dimensional information. Needs to increase the horizontal pixel resolution. However, in height information measurement, it is necessary to increase the numerical aperture and observe with a wide field of view in order to increase the throughput, and to increase the horizontal pixel resolution in order to measure two-dimensional information using the same optical system. In addition, there is a problem that it is difficult to simultaneously satisfy this and increasing the numerical aperture in order to measure height information.

  The present invention has been made in view of such a problem. By inserting and removing an optical path switching mirror on the optical path, the height measuring optical system and the two-dimensional measuring optical system are switched to change the height of the test object. An object of the present invention is to provide a scan measurement inspection apparatus capable of acquiring information and two-dimensional information.

In order to solve the above problems, a scan measurement inspection apparatus according to a first aspect of the present invention includes a light source (for example, the first illumination light source 16 in the embodiment), a confocal disc having a confocal pinhole, An objective lens that irradiates the confocal disc with a light beam and collects and irradiates the light beam that has passed through the confocal pinhole onto the test object to form an image of the confocal pinhole (for example, in the first embodiment, Objective lens 7) and height information detection means (for example, the height in the embodiment) for detecting the reflected image of the confocal pinhole reflected by the test object through the objective lens and the confocal pinhole. A height measuring optical system having a sensitivity CF camera 14 and a low sensitivity CF camera 15), and an optical path switching mirror (for example, inserted into and extracted from the optical path between the objective lens and the confocal disc) The zoom lens system extending in the optical path of the switching mirror when the optical path switching mirror is inserted into the optical path of the height measurement optical system, and the zoom lens system And a two-dimensional measurement optical system having a two-dimensional information detection means (for example, a bright field camera 25 in the embodiment) for detecting the image of the test object that has been scaled by the optical path switching mirror. When extracted from the optical path of the optical system, the height information detecting means acquires the height information of the test object, and the optical path switching mirror is inserted on the optical path of the height measuring optical system. In some cases, the two-dimensional information detection means is configured to acquire two-dimensional information of the test object.

In the scan measurement inspection apparatus having the above-described configuration, the optical path switching mirror includes a first mirror that is inserted into and removed from the optical path of the height measurement optical system, and a second mirror that is disposed to face the first mirror. It is preferable that the optical path of the two-dimensional measurement optical system extends substantially parallel to the optical path of the height measurement optical system. Further, at this time, it is preferable that the first mirror and the second mirror move together so that the first mirror is inserted and removed from the optical path of the height measuring optical system. Moreover, it is preferable that the telecentricity of the position where the said optical path switching mirror is inserted is 0.04 radians or less.

Further, the scan measurement inspection apparatus according to the second aspect of the present invention includes an objective lens that collects the light beam reflected by the test object, and an image of the test object that is reflected by the test object and passes through the objective lens. A zoom lens system for zooming, a two-dimensional measurement optical system having a two-dimensional information detecting means for detecting an image of the test object scaled by the zoom lens system, the objective lens, and the zoom lens system An optical path switching mirror inserted into and extracted from the optical path between the light source, a confocal disc having a confocal pinhole, and a light beam from the light source irradiated to the confocal disc and passed through the confocal pinhole The confocal pinhole reflected by the test object after being reflected by the objective lens and reflected by the optical path switching mirror inserted on the optical path of the two-dimensional measurement optical system. Reflection image of Serial and a height measuring optical system having an objective lens and the height information detection means for detecting by passing the confocal pinhole, the optical path switching mirror is withdrawn from the optical path of the two-dimensional measurement optical system When the two-dimensional information detecting means acquires the two-dimensional information of the test object, and the optical path switching mirror is inserted into the optical path of the two-dimensional measuring optical system, the height information detecting means It is comprised so that the height information of the said test object may be acquired.

In the scan measurement inspection apparatus having the above-described configuration, the optical path switching mirror includes a first mirror that is inserted into and extracted from the optical path of the two-dimensional measurement optical system, and a second mirror that is disposed to face the first mirror. It is preferable that the optical path of the height measuring optical system extends substantially parallel to the optical path of the two-dimensional measuring optical system. Further, at this time, it is preferable that the first mirror and the second mirror move together so that the first mirror is inserted and removed from the optical path of the two-dimensional measurement optical system. Moreover, it is preferable that the telecentricity of the position where the said optical path switching mirror is inserted is 0.04 radians or less.

  When the scan measurement inspection apparatus according to the first and second aspects of the present invention is configured as described above, the height measurement optical system having a wide field of view with one apparatus and the two-dimensional measurement optical system having a high lateral pixel resolution are provided. Since it can implement | achieve with high precision, the measurement and test | inspection of a test object can be performed efficiently.

Further, by forming the first optical path switching mirror the scanning measurement and inspection apparatus according to the present invention so that insertion into the optical path between the objective lens and the confocal disk scanning measurement and inspection according to the second aspect of the present invention In the apparatus, the optical path switching mirror is configured to be inserted into and extracted from the optical path between the objective lens and the zoom lens system, so that the height measuring optical system and the two-dimensional measuring optics are not greatly affected by other optical members. The system can be switched. At this time, by setting the telecentricity at the position where the optical path switching mirror is inserted to 0.04 radians or less, the two-dimensional measurement optical system does not become larger than necessary.

  Since the optical path switching mirror is composed of the first mirror and the second mirror, the optical path of the height measurement optical system and the two-dimensional measurement optical system can be made substantially parallel, so the scan measurement inspection according to the present invention. The apparatus can be miniaturized. Furthermore, by configuring the first mirror and the second mirror so as to move together, the two-dimensional measurement optical system can measure the two-dimensional information of the test object with high accuracy.

  Hereinafter, preferred embodiments of the present invention will be described with reference to the drawings. FIG. 1 shows a scan measurement inspection apparatus 1 according to the present invention, which is a height measurement optical system 2 that measures a wide field of view with a single scan, and two-dimensional measurement of a position to be obtained by zooming with high accuracy. The two-dimensional measurement optical system 3 is configured.

  The height measuring optical system 2 is arranged on the optical axis from the test object 5, and includes a ¼λ plate 6, a first objective lens 7, a second objective lens 8, a confocal disk 9, a first polarizing beam splitter 11, The first relay lens 12, the half prism 13, and the high sensitivity CF camera 14 are provided, the low sensitivity CF camera 15 is provided on the side of the half prism 13, and the side of the first polarization beam splitter 11 is provided. A first condenser lens 17 and a first illumination light source 16 are provided.

  In the height measuring optical system 2, the light beam emitted from the first illumination light source 16 is converted into parallel light by the first condenser lens 17, and enters the first polarization beam splitter 11. The first polarization beam splitter 11 has a property of transmitting P-polarized light and reflecting S-polarized light among the incident light beams, and the reflected light beam (S-polarized light) is irradiated on the upper surface of the confocal disk 9. .

  The confocal disc 9 is formed in a thin disc shape, and a large number of confocal pinholes 9a penetrating in the thickness direction are formed in a spiral shape (the confocal disc having such a configuration is also called a nippo disc), It arrange | positions so that it may orthogonally cross with respect to the optical axis of the height measurement optical system 2 so that the light ray (illumination light) reflected by the 1st polarizing beam splitter 11 may be interrupted | blocked. The confocal disc 9 is rotated at a predetermined rotational speed by a motor 10, and the illumination light that has passed through the confocal pinhole 9 a is placed on the stage by the second objective lens 8 and the first objective lens 7. The object 5 is condensed and irradiated as an image of the confocal pinhole 9a. In FIG. 1, two confocal pinholes 9a are shown.

  The image of the confocal pinhole 9a focused and irradiated on the test object 5 is reflected by the surface of the test object 5 (hereinafter referred to as “object plane O”) and is incident on the first objective lens 7 again. Then, the light is condensed by the first objective lens 7 and the second objective lens 8 to form an image of the surface of the test object 5 on the lower surface of the confocal disc 9, and further passes through the confocal pinhole 9a. At this time, the illumination light (S-polarized light) emitted from the first illumination light source 16 and passed through the confocal pinhole 9a is 1 / 4λ disposed between the first objective lens 7 and the test object 5. Since it passes through the plate 6 twice, it is converted to P-polarized light. Therefore, it can be transmitted through the first polarizing beam splitter 11, and after passing through the first polarizing beam splitter 11, it is condensed by the first relay lens 12, and a part of the light passes through the half prism 13 to increase the height. The image is formed on the imaging surface of the sensitivity CF camera 14 as a reflected image of the confocal pinhole 9a. Further, the remaining light beam is reflected by the half prism 13 and formed on the imaging surface of the low-sensitivity CF camera 15 as a reflected image of the confocal pinhole 9a. The half prism 13 is configured to reflect about 70% of light and transmit about 30% of light.

  The test object 10 to be inspected in the scan measurement inspection apparatus 1 according to the present embodiment may have a difference of about 200 times in the reflectance of the illumination light on the object plane O due to the difference in material. It is difficult to efficiently measure the reflected image of the confocal pinhole 9a with one camera. Therefore, two cameras (high-sensitivity CF camera 14 and low-sensitivity CF camera 15) having different detection sensitivities according to the material (reflectance) of the test object 5 are divided into transmitted light and reflected light by the half prism 13. It is comprised so that it may detect by switching. The reflected image signals detected by the cameras 14 and 15 are passed to the processing device 18.

  Further, the surface of the optical member closer to the test object than the first polarizing beam splitter 11 is configured by converting the S-polarized light into P-polarized light by the ¼λ plate 6 and transmitting it through the first polarizing beam splitter 11. Is blocked by the first polarization beam splitter 11 so that it does not enter the cameras 14 and 15 (this flare light is S-polarized light because it does not pass through the quarter-λ plate 6). And the accuracy of height measurement can be improved.

  Thus, by rotating the confocal disc 9 in which the confocal pinhole 9a is formed at a predetermined speed by the motor 10, the illumination light that has passed through the confocal pinhole 9a is used as spot light as the test object 5. The object plane O is scanned, and the reflected image of the confocal pinhole 9a (spot light) is detected by the high-sensitivity CF camera 14 or the low-sensitivity CF camera 15 and processed by the processing device 18, thereby The height information of the object 5 can be obtained.

  The reflected image of the confocal pinhole 9a (spot light) formed on the imaging surfaces of the cameras 14 and 15 appears bright only when the focal plane of the first objective lens 7 coincides with the object plane O. When O deviates from the focal plane in the optical axis direction, it appears dark. Therefore, in the scan measurement inspection apparatus 1 according to the present embodiment, the first objective lens 7 is moved in the optical axis direction, the light intensity change of the reflected image is acquired by the cameras 14 and 15, and the height information is obtained. It is configured. Hereinafter, a specific method will be described.

  The first objective lens 7 is configured to be movable up and down along the optical axis with respect to the test object 5 by the drive unit 19. Therefore, when the first objective lens 7 is moved up and down so that the object plane O of the test object 5 is positioned in the vicinity of the focal plane of the first objective lens 7, the optical axis direction position Z of the first objective lens 7 is reached. 2 and the intensity I of the reflected image detected by the cameras 14 and 15, as shown in FIG. 2, at a position Z0 where the focal plane of the first objective lens 7 and the object plane O coincide, The distribution is such that the intensity I is the largest (hereinafter, the maximum value of the light intensity I is referred to as “IZ peak value”). Therefore, the processing unit 18 controls the drive unit 19 to move the first objective lens 7 in the optical axis direction, and obtains the IZ peak value of the signal detected by the cameras 14 and 15, thereby obtaining the first value at that time. The height information of the test object 5 can be obtained from the position Z (Z0) of the objective lens 7 in the optical axis direction. At this time, by forming the imaging optical system including the first objective lens 7 and the second objective lens 8 so that the object 5 side is telecentric, the first objective lens 7 is moved and defocused. Since there is no magnification variation in this imaging optical system, a reflected image can be measured at the same magnification, and measurement accuracy is not affected.

  As described above, since the object 5 is scanned by rotating the confocal disk 9 at a predetermined speed at a high speed, the height information for many points on the object 5 (object plane O) is scanned. Can be measured simultaneously. At this time, the measurement range on the object plane O corresponds to the imaging field of view of the imaging surfaces of the cameras 14 and 15, and the measurement range of the height information of the test object 5 is the movement of the first objective lens 7 in the optical axis direction. Corresponds to the range. Further, when the object plane O is inclined with respect to the optical axis of the height measuring optical system 2, reflected light (reflected image of the confocal pinhole 9 a) reflected by the object plane O enters the first objective lens 7. Cannot measure without. Therefore, the range of the inclination of the object plane O in which the height information can be measured is determined by the numerical aperture of the first objective lens 7.

  Next, the two-dimensional measurement optical system 3 will be described. The two-dimensional measurement optical system 3 is configured by inserting and removing a first mirror 20 between the second objective lens 8 and the confocal disk 9 on the optical axis of the height measurement optical system 2. Thus, the test object 5 can be measured. Therefore, the two-dimensional measurement optical system 3 is arranged in order from the test object 5 on the first objective lens 7, the second objective lens 8, the first mirror 20, and the side of the first mirror 20. The second mirror 21 that is opposed to the second mirror 21, the second polarizing beam splitter 22 disposed above the second mirror 21, the second relay lens 23, and the two relay lenses 23 are disposed between the two lenses. The zoom optical system 24 and the bright field camera 25 are configured. A second condenser lens 27 and a second illumination light source 26 are provided on the side of the second polarizing beam splitter 22. The first objective lens 7 and the second objective lens 8 are shared with the height measuring optical system 2.

  In the two-dimensional measurement optical system 3, the light beam emitted from the second illumination light source 26 is converted into parallel light by the second condenser lens 27 and enters the second polarization beam splitter 22. The second polarizing beam splitter 22 also has a property of transmitting P-polarized light among the incident light rays and reflecting S-polarized light, and the reflected light rays (S-polarized light) enter the second mirror 21. Then, the light beam reflected laterally by the second mirror 21 is further reflected downward by the first mirror 20, condensed by the second objective lens 8 and the first objective lens 7, and irradiated on the test object 5. . The light beam reflected by the test object 5 is collected by the first objective lens 7 and the second objective lens 8, reflected by the first mirror 20 and the second mirror 21, and emitted upward to the second polarizing beam splitter 22. Incident.

  Also in the two-dimensional measurement optical system 3, the S-polarized light beam reflected by the second polarizing beam splitter 22 is transmitted twice through the ¼λ plate 6 and converted into a P-polarized light beam. The illumination light reflected by the object 5 can pass through the second polarization beam splitter 22. Therefore, flare light generated on the surface of the optical member closer to the test surface than the second polarization beam splitter 22 is blocked by the second polarization beam splitter 22, so that a clear image of the test object 5 can be acquired. it can. The light beam that has passed through the second polarization beam splitter 22 is scaled by the second relay lens 23 and the zoom optical system 24 and is formed on the imaging surface of the bright field camera 25 as a reflected image of the test object 5. The signal detected by the bright field camera 25 is passed to the processing device 18.

  In the two-dimensional measurement optical system 3 as well, focusing is performed by moving the first objective lens 7 up and down along the optical axis by controlling the drive unit 19 from the processing device 18. The two-dimensional measurement optical system 3 includes a focus optical system 4 in order to move the first objective lens 7 and adjust the focus. The focus optical system 4 includes a focus light source 28, a focus condenser lens 29, a focus relay lens 30, a dichroic mirror 31 disposed in an afocal system between the first objective lens 7 and the second objective lens 8, and a focus A focusing mirror 32, a focusing objective lens 33, and a focusing CCD camera 34 are arranged on the optical axis between the condenser lens 29 and the focusing relay lens 30.

  The focus light source 28 emits a light beam for focusing, for example, emits infrared rays. In the focus optical system 4, the light beam emitted from the focus light source 28 is converted into parallel light by the focus condenser lens 29. Half of the pupil of the light beam converted into parallel light is shielded by a light shielding plate (not shown), and the other half is incident on the relay lens 30 and relayed to enter the dichroic mirror 31. The dichroic mirror 31 is configured to reflect light in a predetermined wavelength band and transmit other light (for example, configured to reflect infrared light and transmit visible light). Therefore, the illumination light for focusing (infrared rays) incident on the dichroic mirror 31 is reflected downward and focused on the object 5 by the first objective lens 7. As described above, since the dichroic mirror 31 reflects only infrared rays, the illumination light (visible light) of the height measurement optical system 2 and the two-dimensional measurement optical system 3 is transmitted to measure the height and the two-dimensional measurement. Will not interfere.

  The focusing light beam applied to the test object 5 is reflected by the test object 5, collimated by the first imaging lens 7, and reflected laterally by the dichroic mirror 31. Then, the light is reflected upward by the focusing mirror 32 through the relay lens 30. The focusing mirror 32 is arranged on the side shielded by the above-described light shielding plate so that it does not interfere with the light beam emitted from the focusing illumination light source 28. The light beam reflected by the focus mirror 32 is imaged by the focus objective lens 33 and imaged on the imaging surface of the focus CCD camera 34, and the detected signal is passed to the processing device 18.

  Therefore, when the first objective lens 7 is moved up and down and its focal point coincides with the upper surface of the test object 5, the intensity of the signal (light intensity) detected by the focusing CCD camera 34 is maximized. A clear image in which the object 5 is focused by the two-dimensional measuring optical system 3 when the focusing optical system 4 is configured and the intensity of the signal detected by the focusing CCD camera 34 becomes maximum. By using the detection signal of the focusing CCD camera 34, the processing unit 18 can control the drive unit 19 to perform autofocusing.

  In the two-dimensional measurement optical system 3, the lens of the zoom optical system 24 is moved in the direction of the optical axis, and the image of the test object 5 acquired by the bright field camera 25 is scaled (enlarged / reduced). It is configured as follows. Therefore, two-dimensional measurement of the position desired to be obtained by zooming can be performed with high accuracy. Due to the characteristics of the zoom optical system 24, the numerical aperture of the first objective lens 7 is maximized when the magnification is maximized. However, in the height measuring optical system 2, it is necessary to measure the height of a wide range with high accuracy, and it is preferable that the numerical aperture is large as described above. Therefore, it is difficult to integrally configure the height measuring optical system 2 and the two-dimensional measuring optical system 3, but by switching the optical path with respect to the test object 5 with the first mirror 20 as in this embodiment, The measurement according to each use can be performed efficiently.

  At this time, the telecentricity at the position where the first mirror 20 is inserted is preferably 0.04 radians or less. This is because if it is larger than this telecentricity, the light flux of the light beam reflected by the first mirror 20 becomes larger than necessary, and accordingly, the two-dimensional measurement optical system 3 becomes larger than necessary.

  In this embodiment, the two-dimensional measurement optical system 3 is configured to extend substantially parallel to the height measurement optical system 2 by using the first mirror 20 and the second mirror 21, so that a scan measurement inspection apparatus is provided. 1 is made compact, but the second mirror 21 is not used, but is reflected by the first mirror 20 so that the two-dimensional measurement optical system 3 extends laterally with respect to the height measurement optical system 2. Is also possible.

  As shown in FIG. 1, when the first mirror 20 and the second mirror 21 are used, the height measuring optical system 2 is obtained by inserting and removing the first mirror 20 with respect to the height measuring optical system 2. It is possible to switch between the measurement by the two-dimensional measurement optical system 3 and the measurement by the two-dimensional measurement optical system 3. However, when the first mirror 20 is moved, the positions of the first mirror 20 and the second mirror 21 are accurately matched to each other. It is difficult to accurately form the image 5 on the imaging surface of the bright field camera 25. Therefore, it is desirable that the first mirror 20 and the second mirror 21 are fixed by a housing or the like (not shown) and moved together so that the first mirror 20 is inserted and removed from the optical path. If comprised in this way, since the position of the 1st mirror 20 and the 2nd mirror 21 is fixed, the image of the test object 5 can be accurately imaged on the imaging surface of the bright field camera 25.

  In the present embodiment, the first mirror 20 is configured to be inserted into and extracted from the optical path between the confocal disc 9 and the second objective lens 8, but by configuring in this way, other optical members are configured. The height measuring optical system 2 and the two-dimensional measuring optical system 3 can be arranged with the least influence on the design. However, the first mirror 20 is configured to be inserted / removed on the optical path between the second objective lens 8 and the dichroic mirror 31 and on the optical path between the confocal disk 9 and the first polarizing beam splitter 11. Is also possible. When the first mirror 20 is disposed between the confocal disk 9 and the first polarizing beam splitter 11, the depth of focus in the two-dimensional measurement optical system 3 becomes shallow, but there is no particular problem in obtaining two-dimensional information. . In this case, the confocal disc 9 needs to be rotated.

  Further, in the present embodiment, the scan measurement apparatus configured to perform two-dimensional measurement by inserting a mirror in the optical path of the height measurement optical system has been described. However, the two-dimensional measurement is performed at the position of the height measurement optical system 2 in FIG. The measurement optical system 3 is arranged, and the height measurement optical system 2 is arranged at the position of the two-dimensional measurement optical system 3, so that a height is measured by inserting a mirror in the optical path of the two-dimensional measurement optical system. You can also In this case, the optical path switching mirror is disposed between the second objective lens 8 and the second polarizing beam splitter 22 or between the dichroic mirror 31 and the second objective lens 8.

It is a block diagram which shows the scan measurement inspection apparatus which concerns on this invention. It is a graph which shows the relationship between the 1st objective-lens position in height measurement, and the intensity | strength of light.

Explanation of symbols

DESCRIPTION OF SYMBOLS 1 Scan measurement inspection apparatus 2 Height measurement optical system 3 Two-dimensional measurement optical system 5 Test object 7 1st objective lens 9 Confocal disk 9a Confocal pinhole 14 High sensitivity CF camera 15 Low sensitivity CF camera 16 For 1st illumination Light source 20 First mirror 21 Second mirror 24 Zoom lens system 25 Bright field camera

Claims (7)

A confocal disk having a light source, a confocal pinhole, a light beam from the light source irradiating the confocal disk, and condensing and irradiating a light beam that has passed through the confocal pinhole to the test object. And a height information detecting means for detecting a reflected image of the confocal pinhole reflected by the test object through the objective lens and the confocal pinhole. Measuring optical system,
An optical path switching mirror inserted into and extracted from an optical path between the objective lens and the confocal disk;
When the optical path switching mirror is inserted on the optical path of the height measuring optical system, a zoom lens system extending on the optical path of the switching mirror, and an image of the test object scaled by the zoom lens system A two-dimensional measurement optical system having a two-dimensional information detection means for detecting
When the optical path switching mirror is extracted from the optical path of the height measuring optical system, the height information detecting means obtains the height information of the test object,
A scan characterized in that when the optical path switching mirror is inserted on the optical path of the height measuring optical system, the two-dimensional information detecting means acquires two-dimensional information of the test object. Measurement inspection equipment. The optical path switching mirror includes a first mirror that is inserted into and extracted from the optical path of the height measurement optical system, and a second mirror that is disposed to face the first mirror;
The scan measurement inspection apparatus according to claim 1, wherein the optical path of the two-dimensional measurement optical system is configured to extend substantially parallel to the optical path of the height measurement optical system.   The said 1st mirror and the said 2nd mirror move integrally, The said 1st mirror is comprised so that it may insert / extract from on the optical path of the said height measurement optical system, The structure of Claim 2 characterized by the above-mentioned. Scan measurement inspection equipment. An objective lens that collects the light beam reflected by the test object, a zoom lens system that changes the image of the test object that is reflected by the test object and passes through the objective lens, and a zoom lens system that changes the magnification. A two-dimensional measurement optical system having a two-dimensional information detection means for detecting a doubled image of the test object;
An optical path switching mirror inserted into and extracted from an optical path between the objective lens and the zoom lens system;
A light source, a confocal disk having a confocal pinhole, and a light beam that has passed through the confocal pinhole by irradiating the light beam from the light source to the confocal disk is inserted into the optical path of the two-dimensional measurement optical system The reflected light of the confocal pinhole reflected by the optical path switching mirror and focused on the object by the objective lens and reflected by the object is reflected by the objective lens and the confocal pinhole. A height measuring optical system having height information detecting means for detecting by passing through ,
When the optical path switching mirror is extracted from the optical path of the two-dimensional measurement optical system, the two-dimensional information detecting means acquires the two-dimensional information of the test object,
A scan configured to acquire height information of the test object by the height information detecting means when the optical path switching mirror is inserted into the optical path of the two-dimensional measurement optical system. Measurement inspection equipment. The optical path switching mirror includes a first mirror that is inserted into and extracted from the optical path of the two-dimensional measurement optical system, and a second mirror that is disposed to face the first mirror;
The scan measurement inspection apparatus according to claim 4, wherein an optical path of the height measurement optical system is configured to extend substantially parallel to an optical path of the two-dimensional measurement optical system.   The said 1st mirror and the said 2nd mirror move integrally, and it has comprised so that the said 1st mirror may be inserted / extracted from the optical path of the said two-dimensional measuring optical system. Scan measurement inspection equipment.   The scan measurement inspection apparatus according to claim 1, wherein a telecentricity at a position where the optical path switching mirror is inserted is 0.04 radians or less.

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