JP2006231601A - Laminated nozzle plate, droplet discharge head, and laminated nozzle plate manufacturing method - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a laminated nozzle plate which can restrain a surplus liquid from flowing into nozzles and a droplet discharge head with the laminated nozzle plate and a laminated nozzle plate manufacturing method to flatten a water repellent film around the nozzles. <P>SOLUTION: The nozzle plate 14 is provided with nozzles 20 to discharge an ink. A protective plate 12 is provided with step difference holes 22 to externally expose the nozzles 20. The side wall 22a of the stepped hole 22 is not provided with water repellent film 18, the water repellent film 18 is formed at the bottom 22b of the stepped hole 22. <P>COPYRIGHT: (C)2006,JPO&NCIPI

Description

  The present invention relates to a droplet discharge head that records an image by discharging droplets, a multilayer nozzle plate that is a component of the droplet discharge head, and a method of manufacturing the multilayer nozzle plate.

  2. Description of the Related Art Conventionally, there is an ink jet recording apparatus as a liquid droplet ejecting apparatus that ejects liquid droplets from a plurality of nozzles and prints on a recording medium such as paper. The ink jet recording apparatus is small, inexpensive, and quiet. Are widely available on the market. In particular, piezo inkjet systems that eject ink droplets by changing the pressure in the pressure chamber using piezoelectric elements and thermal inkjet recording devices that eject ink droplets by expanding the ink by the action of thermal energy are high-speed printing. It has many advantages such as high resolution.

  In such an ink jet recording apparatus, a water-repellent film is applied to the nozzle surface in order to prevent ink droplets from adhering to the periphery of the nozzles when ink droplets are ejected from a plurality of nozzles. However, this water-repellent film suffers from scratch damage due to paper rubbing when the paper floats due to jam, etc., and the ink ejection performance deteriorates, such as the inclination of the ink ejection direction and variations in the ink droplet diameter and speed. To do.

  As a countermeasure against this, for example, an ink jet recording head has been proposed in which a circular step is provided around the nozzle formed on the nozzle plate. This ink jet recording head forms a circular step around the nozzle by adhering a metal plate having a circular opening corresponding to the nozzle to the nozzle plate on which the nozzle is formed. The sheet is prevented from contacting the film (for example, see Patent Document 1).

However, in the ink jet recording head described in Patent Document 1, it is considered that the water repellent treatment layer covers the entire step portion, and the ink around the nozzle is repelled by the water repellent treatment layer and flows into the nozzle. . In Patent Document 1, it is considered that the water-repellent treatment layer is formed after the stepped portion is formed by joining the head substrate and the metal plate. Therefore, it is difficult to form a water-repellent treatment layer in the recess, and it is possible that the water-repellent treatment layer is uneven, resulting in variations in ink ejection characteristics.
Japanese Patent No. 3108771

  The present invention has been made in view of the above problems, and provides a laminated nozzle plate capable of suppressing an excess liquid or the like from flowing into the nozzle, and a droplet discharge head including the laminated nozzle plate. In addition, an object of the present invention is to provide a method for producing a laminated nozzle plate in which the water repellent film around the nozzle is flat.

  In order to achieve the above object, the laminated nozzle plate according to claim 1 is laminated on a nozzle plate on which a nozzle for ejecting liquid droplets is formed and on a liquid droplet ejection side of the nozzle plate. A protective plate having a stepped hole that allows the nozzle to communicate with the outside through a large opening and to expose the periphery of the nozzle on the droplet discharge side of the nozzle plate to the outside, and is exposed to the outside by the stepped hole. A water repellent film is formed on the step surface of the nozzle plate, and a water repellent film is not formed on the side wall of the step hole formed in the thickness direction of the protective plate.

  In the laminated nozzle plate according to the first aspect, the nozzle is formed on the nozzle plate, and the protective plate is laminated on the droplet discharge side of the nozzle plate. The protective plate is formed with a step hole which allows the nozzle to communicate with the outside and exposes the periphery of the nozzle on the droplet discharge side surface to the outside.

  In the present invention, the water-repellent film is formed on the step surface of the nozzle plate exposed to the outside by the step hole, and the water-repellent film is not formed on the side wall of the step hole formed in the thickness direction of the protective plate. The liquid repelled by the water repellent film adheres to the side wall where the water repellent film is not formed. Therefore, the inflow of the liquid to the nozzle can be suppressed.

  The stacked nozzle plate according to claim 2 is stacked on a droplet discharge side of the nozzle plate on which nozzles for discharging droplets are formed, and communicates the nozzles with the outside through an opening larger than the nozzles. And a protective plate having a step hole that exposes the periphery of the nozzle on the droplet discharge side surface of the nozzle plate to the outside, and a step surface of the nozzle plate that is exposed to the outside by the step hole. A water repellent film region disposed around the nozzle in contact with the nozzle and formed with a water repellent film, and a non-water repellent film region disposed away from the nozzle and not formed with a water repellent film. It is characterized by having.

  According to a second aspect of the present invention, a nozzle is formed on the nozzle plate, and a protective plate is laminated on the droplet discharge side of the nozzle plate. The protective plate is formed with a step hole which allows the nozzle to communicate with the outside and exposes the periphery of the nozzle on the droplet discharge side surface to the outside.

  In the present invention, on the step surface of the nozzle plate exposed to the outside by the step hole, the water repellent film region is formed around the nozzle in contact with the nozzle and the water repellent film is formed. And a non-water-repellent film region where no water film is formed. Therefore, the liquid repelled by the water-repellent film adheres to the non-water-repellent film area where the water-repellent film is not formed. Therefore, the inflow of the liquid to the nozzle can be suppressed.

  The multilayer nozzle plate according to claim 3 is the multilayer nozzle plate according to claim 1 or 2, wherein the non-water-repellent film region is disposed along an inner periphery of the step hole. It is said.

  Thus, the non-water-repellent film region can be easily formed by arranging the non-water-repellent film region along the inner periphery of the step hole.

  A droplet discharge head according to a fourth aspect includes the multilayer nozzle plate according to any one of the first to third aspects.

  According to the droplet discharge head of the fourth aspect, since the inflow of the liquid to the nozzles of the stacked nozzle plate is suppressed, it is possible to suppress the deterioration of the liquid discharge directionality.

  The method of manufacturing a laminated nozzle plate according to claim 5 includes: a nozzle plate on which nozzles for discharging droplets are formed; a protective plate on which step holes are formed that allow the nozzles to communicate with the outside through openings larger than the nozzles; , A water repellent film forming step for forming a water repellent film at a position corresponding to the stepped hole on the nozzle surface of the nozzle plate, and the droplets on the nozzle plate A bonding step of aligning and bonding the protective plate so that the water-repellent film is disposed inside the step hole on the discharge side surface; and a nozzle forming step of forming a nozzle on the nozzle plate; have.

  In the laminated nozzle plate manufacturing method of the present invention, first, in the water repellent film forming step, a water repellent film is formed at a position corresponding to the stepped hole on the nozzle surface of the nozzle plate. The position corresponding to the step hole on the nozzle surface is a portion where the step hole is open and the protective plate is not joined. Next, in the joining step, the protective plate is aligned and joined to the surface of the nozzle plate on the droplet discharge side so that the water repellent film is disposed inside the step hole. And a nozzle is formed in a nozzle plate at a nozzle formation process.

  In this way, by forming the water repellent film at a position corresponding to the stepped hole on the nozzle surface before joining the nozzle plate and the protective plate, the water repellent film can be formed in a flat state without a recess. Compared with the case where the water-repellent film is formed in the concave portion, the water-repellent film has no irregularities and can be made flat.

  A multilayer nozzle plate manufacturing method according to a sixth aspect is characterized in that, in the multilayer nozzle plate manufacturing method according to the fifth aspect, the water-repellent film is formed smaller than the diameter of the stepped hole.

  Thus, if the water repellent film is formed smaller than the diameter of the step hole, a non-water repellent film region in which the surface of the nozzle plate is exposed along the inner periphery of the step hole is formed. Since the liquid repelled by the water repellent film adheres to the non-water repellent film region, the inflow of the liquid to the nozzle can be suppressed.

  The method for producing a laminated nozzle plate according to claim 7 is the method for producing a laminated nozzle plate according to claim 5 or 6, wherein a water repellent film is formed on the protective plate before the joining step. It is characterized by.

  Thus, by forming a water-repellent film on the protective plate before the bonding step, it is possible to suppress ink from adhering to the surface of the protective plate.

  The method for producing a laminated nozzle plate according to claim 8 is the method for producing a laminated nozzle plate according to claim 5 to claim 7, wherein the joining step includes a heat fusion treatment between the nozzle plate and the protective plate. It is characterized by including.

  According to the above joining step, the nozzle plate and the protective plate are joined by heat fusion, so that the joining can be performed efficiently without using an adhesive.

  According to the laminated nozzle plate of the present invention, since it is configured as described above, it is possible to prevent excess liquid or the like from flowing into the nozzle. Further, according to the method for producing a laminated nozzle plate of the present invention, the water repellent film around the nozzle can be formed flat.

  Hereinafter, embodiments of the present invention will be described in detail with reference to the drawings.

[First Embodiment]
FIG. 1 is a cross-sectional view showing an ink jet recording head 40 having the laminated nozzle plate 10 of the first embodiment.

  As shown in FIG. 1, the ink jet recording head 40 includes a laminated nozzle plate 10 including a protection plate 12, a nozzle plate 14, and a pool plate 16. A water repellent film 18 is applied to the surface of the protective plate 12. Further, communication hole plates 30, 32, a pressure chamber plate 34, and a vibration plate 36 are aligned and stacked above the pool plate 16 constituting the stacked nozzle plate 10.

  The nozzle plate 14 constituting the laminated nozzle plate 10 is formed with nozzles 20 for ejecting ink. A protective plate 12 is laminated on the ink ejection side surface of the nozzle plate 14, and a step hole 22 having a diameter larger than the opening of the nozzle 20 and exposing the nozzle 20 to the outside is formed in the protective plate 12. As shown in FIG. 2, the water repellent film 18 is not formed on the side wall 22 a of the step hole 22 formed in the thickness direction of the protective plate 12, and the water repellent film 18 is formed on the bottom 22 b of the step hole 22. Is formed.

  The stepped hole 22 causes the nozzle surface 23 around the nozzle 20 to recede from the plate surface 19 of the protective plate 12 (the surface of the protective plate 12 coated with the water repellent film 18) in a concave shape. As a result, the recording medium P that has floated during printing does not come into contact with the bottom portion 22b, and the water repellent film 18 formed around the nozzle 20 on the bottom portion 22b is not damaged. The water repellent film 18 prevents ink from adhering to the periphery of the nozzle 20, and ink droplets ejected from the nozzle 20 are always ejected perpendicular to the plate surface 19 by the water repellent film 18. .

  The water repellent film 18 is formed on the bottom 22b of the step hole 22 but not on the side wall 22a. Therefore, as shown in FIG. 3, excess ink I is attracted toward the side wall 22a. Inflow to the nozzle 20 can be prevented.

  On the other hand, as shown in FIG. 1, a communication hole 24 that is in communication with the nozzle 20 is formed in the pool plate 16 that constitutes the laminated nozzle plate 10. In addition, communication holes 41 and 43 are formed in the communication hole plates 30 and 32, respectively, and a pressure chamber 45 is formed in the pressure chamber plate 34. The nozzle 20, the communication hole 24, and the communication holes 41 and 43 communicate with each other in a state where the stacked nozzle plate 10, the pool plate 16, and the communication hole plates 30 and 32 are stacked, and a pressure chamber formed in the pressure chamber plate 34. 45.

  In addition, an ink pool 25 is formed in the pool plate 16 and stores ink supplied from an ink supply hole (not shown). Further, supply holes 42 and 44 are formed in the communication hole plates 30 and 32 so as to be connected to the ink pool 25, respectively. The ink pool 25, the supply holes 42 and 44, and the pressure chamber 45 communicate with each other in a state where the pool plate 16, the communication hole plates 30 and 32, and the pressure chamber plate 34 are stacked. Although not shown, a single plate type piezoelectric element as a pressure generating means is attached above the pressure chamber 45 above the diaphragm 36 so that a driving voltage is applied from a flexible wiring board (not shown). It is configured.

  In such an ink jet recording head 40, a continuous ink passage is formed from the ink pool 25 to the supply holes 42 and 44, the pressure chamber 45, the communication holes 43 and 41, the communication hole 24, and the nozzle 20. The ink supplied from the ink supply hole (not shown) and stored in the ink pool 25 is filled into the pressure chamber 45 through the supply holes 42 and 44. When a driving voltage is applied to the piezoelectric element (not shown), the diaphragm 36 is flexibly deformed together with the piezoelectric element to expand or compress the pressure chamber 45. As a result, a volume change occurs in the pressure chamber 45, and a pressure wave is generated in the pressure chamber 45. The ink moves by the action of the pressure wave, and ink droplets are ejected from the nozzle 20 to the outside.

  Next, a method for manufacturing the laminated nozzle plate 10 constituting the ink jet recording head 40 will be described.

  As shown in FIG. 4A, a water repellent film 18 is formed on the plate-like nozzle plate 14 before the nozzle 20 is formed. The water repellent film 18 can be formed by a spin coat method or the like. Since the water repellent film is formed on the surface of the flat nozzle plate 14 without unevenness, the water repellent film 18 can also be formed flat.

  In addition, as the water repellent film 18, tetrafluoroethylene-6 fluoropropylene copolymer (FEP), tetrafluoroethylene resin (PTFE), tetrafluoroethylene-perfluoroalkoxyethylene copolymer resin (PFA), Fluorine resins such as vinylidene fluoride resin and vinyl fluoride resin can be used. In particular, tetrafluoroethylene resin (PTFE) and tetrafluoroethylene-perfluoroalkoxyethylene copolymer resin (PFA) are preferable.

  Next, as shown in FIG. 4B, the water repellent film 18 is removed except for the portion corresponding to the step hole 22. Thereby, the water-repellent film 18 in the region to be bonded to the protective plate 12 is removed, and a good bonding between the nozzle plate 14 and the protective plate 12 is obtained.

  Next, as shown in FIG. 4C, the protective plate 12 on which the water-repellent film 18 is formed in advance is bonded to the nozzle plate 14 by thermal fusion. At this time, the nozzle plate 14 and the protection plate 12 are aligned and joined so that the water repellent film 18 formed on the nozzle plate 14 is disposed inside the step hole 22 formed on the protection plate 12. .

  Next, as shown in FIG. 4D, the pool plate 16 is joined to the surface of the nozzle plate 14 opposite to the surface to which the protective plate 12 is joined by thermal fusion.

  As described above, the nozzle plate 14, the protection plate 12, and the pool plate 16 can be bonded efficiently by bonding without using an adhesive by thermal fusion. In addition, it is preferable to use the synthetic resin excellent in mechanical strength, chemical-resistance, and thin film formation for the nozzle plate 14, and polyimide etc. can be used for it. By using polyimide, there is an advantage that it is easier to process than conventional SUS and that crosstalk is suppressed by a damper effect when ejection energy is given to the ink. As the protective plate 12 and the pool plate 16, a metal plate such as SUS, a resin film, a liquid crystal film, or a resin plate can be used.

  Then, as shown in FIG. 4E, nozzles 20 are formed on the nozzle plate 14. The nozzle 20 can be formed by drilling from the back of the pool plate 16 with an excimer laser or the like. The nozzle 20 is formed to have a smaller diameter than that of the step hole 22. For example, the diameter of the nozzle can be set to about 25 μm, and the diameter of the step hole 22 can be set to 100 μm to 400 μm. A plurality of such nozzles 20, step holes 22, and communication holes 24 are formed in a predetermined pattern, whereby the laminated nozzle plate 10 is completed.

  Thereafter, the communication hole plates 30 and 32 and the pressure chamber plate 34 are joined to the pool plate 16 side, and the diaphragm 36 is joined so as to cover the opening of the pressure chamber plate 34.

  In the present embodiment, the laminated nozzle plate in which the water-repellent film 18 is formed on the surface of the protective plate 12 has been described. However, the water-repellent film 18 is not necessarily formed on the surface of the protective plate 12. There is no. As shown in FIG. 5, the water-repellent film 18 is formed only on the bottom portion 22 b of the step hole 22 and may be configured as a laminated nozzle plate that is not formed on the surface of the protective plate 12.

[Second Embodiment]
Next, 2nd Embodiment of this invention is described based on drawing. The same parts as those in the first embodiment are denoted by the same reference numerals, and detailed description thereof is omitted.

  FIG. 6 is a cross-sectional view showing an ink jet recording head 80 having the laminated nozzle plate 81 of the second embodiment.

  As shown in FIG. 6, the ink jet recording head 80 includes a laminated nozzle plate 81 composed of a protection plate 12, a nozzle plate 14, and a pool plate 16. Further, communication hole plates 30, 32, a pressure chamber plate 34, and a vibration plate 36 are aligned and stacked above the pool plate 16 constituting the stacked nozzle plate 81.

  A nozzle 20 for ejecting ink is formed on the nozzle plate 14 constituting the laminated nozzle plate 81, and a step hole 22 is formed on the protective plate 12. As shown in FIG. 7, the water repellent film 18 is not formed on the side wall 22 a of the step hole 22 formed in the thickness direction of the protective plate 12. The water repellent film 18 is formed in the water repellent film region 23a continuous from the nozzle 20 at the bottom 23 of the step hole 22, and the water repellent film region 23b outside the water repellent film region 23a is formed in the water repellent film region 23b. 18 is not formed. The non-water-repellent film region 23 b is formed along the inner periphery of the step hole 22.

  In addition, the width D1 of the non-water-repellent region 23b can be 10 μm to 50 μm, and preferably 20 μm to 30 μm.

  As described above, the water repellent film 18 is formed in the water repellent film area 23a around the nozzle 20 and is not formed in the non-water repellent film area 23b away from the nozzle 20, as shown in FIG. Further, excess ink can be attached to the non-water-repellent film region 23 b and can be prevented from flowing into the nozzle 20.

  Next, a method for manufacturing the laminated nozzle plate 81 constituting the ink jet recording head 80 will be described.

  As shown in FIG. 9A, a water repellent film 18 is formed on a plate-like nozzle plate 14 before the nozzle 20 is formed. The water repellent film 18 can be formed by a spin coat method or the like. Since the water-repellent film is formed on the surface of the flat nozzle plate 14 without unevenness, the water-repellent film 18 can also be formed flat.

  Next, as shown in FIG. 9B, the water repellent film 18 is removed except for the portion corresponding to the step hole 22. At this time, the water repellent film 18 has a size slightly smaller than the bottom portion 22b. Thereby, the region bonded to the protective plate 12 and the water repellent film 18 in the non-water repellent film region E2 are removed.

  Next, as shown in FIG. 9C, the protective plate 12 on which the water-repellent film 18 is formed in advance is bonded to the nozzle plate 14 by thermal fusion. At this time, the nozzle plate 14 and the protection plate 12 are arranged such that the water repellent film 18 formed on the nozzle plate 14 is disposed inside the step hole 22 formed in the protection plate 12, and the inner periphery of the side wall 22 a and the water repellent film Positioning and joining so as to form a gap between the two. The gap here becomes the non-water repellent film region E2, and the portion where the water repellent film 18 is formed becomes the water repellent film region E1. Since the water repellent film region E1 is smaller than the step hole 22, it is easy to align the water repellent film region E1 so as to correspond to the step hole 22.

  Next, as shown in FIG. 9D, the pool plate 16 is joined to the surface of the nozzle plate 14 opposite to the surface to which the protective plate 12 is joined by thermal fusion.

  Then, as shown in FIG. 9E, nozzles 20 are formed on the nozzle plate 14. The nozzle 20 can be formed by drilling from the back of the pool plate 16 with an excimer laser or the like. The nozzle 20 is formed to have a smaller diameter than that of the step hole 22. For example, the diameter of the nozzle can be set to about 25 μm, and the diameter of the step hole 22 can be set to 100 μm to 400 μm. A plurality of such nozzles 20, step holes 22, and communication holes 24 are formed in a predetermined pattern, whereby the laminated nozzle plate 10 is completed.

  Thereafter, the communication hole plates 30 and 32 and the pressure chamber plate 34 are joined to the pool plate 16 side, and the diaphragm 36 is joined so as to cover the opening of the pressure chamber plate 34.

  In the present embodiment, the laminated nozzle plate in which the water-repellent film 18 is formed on the surface of the protective plate 12 has been described. However, the water-repellent film 18 is not necessarily formed on the surface of the protective plate 12. There is no. As shown in FIG. 10, the water-repellent film 18 may be formed only on the bottom 22 b of the step hole 22 and may be configured as a laminated nozzle plate that is not formed on the surface of the protective plate 12.

  In the present embodiment, the configuration in which the water repellent film 18 is not formed on the side wall 22a of the step hole 22 has been described. However, as shown in FIG. 11, the water repellent film 18 may be formed on the side wall 22a.

[Third Embodiment]
Next, 3rd Embodiment of this invention is described based on drawing.

  FIG. 12 is a perspective view showing a laminated nozzle plate 90 according to the third embodiment of the present invention. In addition, the same code | symbol is attached | subjected to the member same as 1st, 2nd embodiment, and the overlapping description is abbreviate | omitted.

  In the laminated nozzle plate 90, a step hole 94 is formed in the protective plate 92 so as to surround a nozzle region 95 in which a plurality of nozzles 20 are formed in a row. As shown also in FIG. 13, the water repellent film 18 is not formed on the side wall 94 a of the step hole 94 formed in the thickness direction of the protective plate 92, and the nozzle region 95 constituting the bottom of the step hole 94 is formed. A water repellent film 18 is formed.

  The diameter of the nozzle 20 can be set to about 25 μm, and the width of the nozzle region 95 in the short direction can be set to about 100 μm to 400 μm. The total length of the nozzle region 95 in the longitudinal direction can be set to about 50 mm, for example. The depth of the step hole 94 can be set to 5 μm to 20 μm.

  Due to the step hole 94, the nozzle region 95 around the nozzle 20 is recessed from the plate surface 96 of the protection plate 92 (the surface of the protection plate 92 coated with the water repellent film 18). Thereby, the recording medium P that has floated during printing does not come into contact with the nozzle region 95, and the water repellent film 18 around the nozzle 20 is not damaged.

  The water repellent film 18 prevents ink from adhering to the periphery of the nozzle 20, and ink droplets ejected from the nozzle 20 are always ejected perpendicular to the plate surface 96 by the water repellent film 18. The

  The water repellent film 18 is formed on the bottom 94b of the step hole 94 but not on the side wall 94a. Therefore, excess ink is drawn toward the side wall 94a and flows into the nozzle 20. Can be prevented.

  The laminated nozzle plate 90 is configured such that a wiper (not shown) that wipes the surface of the nozzle 20 moves in the longitudinal direction of the nozzle region 95.

  The laminated nozzle plate 90 of this embodiment can be manufactured in the same process as the laminated nozzle plate 10 of the first embodiment.

  In the present embodiment, the step hole 94 of the laminated nozzle plate 90 is formed in a wide range of the protection plate 92, and the plurality of nozzles 20 are formed in the nozzle region 95 inside the step hole 94. Compared with the case of creating the step hole, it is not necessary to adjust the position of the step hole 94 with high accuracy.

  In the laminated nozzle plate 90 of the present embodiment, a plurality of nozzles 20 are formed in one row. However, the present invention is not limited to such a configuration, and the nozzles 20 are formed in a plurality of rows (two or more rows). Also good.

[Fourth Embodiment]
Next, 4th Embodiment of this invention is described based on drawing.

  FIG. 14 is a perspective view showing a laminated nozzle plate 100 according to the fourth embodiment of the present invention. In addition, the same code | symbol is attached | subjected to the member same as 1st-3rd embodiment, and the overlapping description is abbreviate | omitted.

  In the laminated nozzle plate 100, a step hole 94 is formed in the protective plate 92 so as to surround a nozzle region 95 in which a plurality of nozzles 20 are formed in a row. As shown in FIG. 15, the water repellent film 18 is not formed on the side wall 94 a of the step hole 94 formed in the thickness direction of the protective plate 92. In the nozzle region 95 constituting the bottom of the step hole 94, the water repellent film 18 is formed in the water repellent film region 95a continuous from the nozzle 20, and the non-water repellent film region 95b outside the water repellent film region 95a is formed. The water repellent film 18 is not formed. The non-water-repellent film region 95 b is formed along the inner periphery of the step hole 94. That is, the water repellent film region 94 a is smaller than the step hole 94.

  In addition, the width D2 of the non-water-repellent film region 95b can be 10 μm to 50 μm, and preferably 20 μm to 30 μm.

  In the present embodiment, the water repellent film 18 is formed in the water repellent film region 95a around the nozzle 20 and is not formed in the non-water repellent film region 95b away from the nozzle 20, thereby removing excess ink. It can be adhered to the water-repellent film region 95 b and can be prevented from flowing into the nozzle 20.

  The laminated nozzle plate 100 of the present embodiment can be manufactured in the same process as the laminated nozzle plate 10 of the second embodiment.

  In the present embodiment, the step hole 94 of the laminated nozzle plate 100 is formed in a wide range of the protective plate 92, and the plurality of nozzles 20 are formed in the nozzle region 95 inside the step hole 94. Compared with the case of creating the step hole, it is not necessary to adjust the position of the step hole 94 with high accuracy.

  Further, since the water repellent film region 95 a is smaller than the step hole 94, it is easy to align the water repellent film region 95 a so as to correspond to the step hole 94.

  The ink jet recording head described in the first to fourth embodiments described above records an image (including characters) on the recording medium P, but the liquid droplet ejection head of the present invention is not limited to this. It is not something. That is, the recording medium is not limited to paper, and the liquid to be ejected is not limited to ink. For example, it is industrially useful to create color filters for displays by discharging ink onto polymer films or glass, or to form bumps for component mounting by discharging solder in a welded state onto a substrate. The present invention can be applied to all droplet discharge apparatuses used.

It is sectional drawing which shows the inkjet recording head of 1st Embodiment. FIG. 2 is an enlarged perspective view showing the vicinity of a step hole of a laminated nozzle plate of the ink jet recording head shown in FIG. 1. It is a figure which shows that the excess ink I is drawn near to the side wall side in the lamination | stacking nozzle plate of 1st Embodiment. It is a figure explaining the manufacturing method of the lamination nozzle plate of a 1st embodiment. It is a modification of the lamination | stacking nozzle plate of 1st Embodiment. It is sectional drawing which shows the inkjet recording head of 2nd Embodiment. It is an expansion perspective view which shows the level | step difference hole vicinity of the lamination | stacking nozzle plate of the inkjet recording head shown in FIG. It is a figure which shows that the excess ink I is adhering to the non-water-repellent film area | region in the lamination | stacking nozzle plate of 2nd Embodiment. It is a figure explaining the manufacturing method of the lamination | stacking nozzle plate of 2nd Embodiment. It is a modification of the lamination | stacking nozzle plate of 2nd Embodiment. It is another modification of the lamination | stacking nozzle plate of 2nd Embodiment. It is a perspective view by the side of the nozzle surface of the inkjet recording head of 3rd Embodiment. FIG. 4 is a partial cross-sectional view of an ink jet recording head according to a second embodiment. It is a perspective view by the side of the nozzle surface of the inkjet recording head of 4th Embodiment. FIG. 10 is a partial cross-sectional view of an ink jet recording head of a fifth embodiment.

Explanation of symbols

DESCRIPTION OF SYMBOLS 10 Laminated nozzle plate 12 Protective plate 14 Nozzle plate 16 Pool plate 18 Water repellent film 20 Nozzle 22a Side wall 22 Step hole 22b Bottom 23 Bottom 40 Inkjet recording head 80 Inkjet recording head 81 Laminated nozzle plate 84 Stepped hole 90 Laminated nozzle plate 92 Protective plate 94a Side wall 94 Step hole 95 Nozzle region 100 Stacked nozzle plate 23a Water-repellent film region 23b Non-water-repellent film region 95a Water-repellent film region 95b Non-water-repellent film region

Claims (8)

A nozzle plate on which nozzles for discharging droplets are formed;
Stepped holes are formed on the droplet discharge side of the nozzle plate to allow the nozzle to communicate with the outside through an opening larger than the nozzle and to expose the periphery of the nozzle on the droplet discharge side of the nozzle plate to the outside. Protective plate,
With
A water repellent film is formed on the step surface of the nozzle plate exposed to the outside by the step hole, and a water repellent film is not formed on the side wall of the step hole formed in the thickness direction of the protective plate. A laminated nozzle plate that is characterized. A nozzle plate on which nozzles for discharging droplets are formed;
Stepped holes are formed on the droplet discharge side of the nozzle plate to allow the nozzle to communicate with the outside through an opening larger than the nozzle and to expose the periphery of the nozzle on the droplet discharge side of the nozzle plate to the outside. Protective plate,
With
On the step surface of the nozzle plate exposed to the outside by the step hole, a water repellent film region is formed around the nozzle in contact with the nozzle and formed with a water repellent film, and is disposed at a position away from the nozzle. A laminated nozzle plate, comprising: a non-water-repellent film region in which a water film is not formed.   The multilayer nozzle plate according to claim 2, wherein the non-water-repellent film region is disposed along an inner periphery of the step hole.   A droplet discharge head comprising the multilayer nozzle plate according to any one of claims 1 to 3. A method for producing a laminated nozzle plate in which a nozzle plate in which nozzles for discharging droplets are formed and a protective plate in which a step hole is formed that communicates the nozzle with the outside through an opening larger than the nozzle. And
A water repellent film forming step of forming a water repellent film at a position corresponding to the step hole on the nozzle surface of the nozzle plate;
A bonding step of aligning and bonding the protective plate so that the water-repellent film is disposed inside the step hole on the surface of the nozzle plate on the droplet discharge side;
A nozzle forming step of forming nozzles in the nozzle plate;
A method for producing a laminated nozzle plate.   The method for producing a laminated nozzle plate according to claim 5, wherein the water repellent film is formed smaller than a diameter of the step hole.   The method for producing a laminated nozzle plate according to claim 5 or 6, wherein a water repellent film is formed on the protective plate before the joining step.   The method of manufacturing a laminated nozzle plate according to any one of claims 5 to 7, wherein the joining step includes a heat fusion treatment between the nozzle plate and the protective plate.

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