JP2007307791A - Manufacturing method of liquid droplet discharge head - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a manufacturing method of a liquid droplet discharge head by which the droplet discharge head excellent in the adhesiveness of a nozzle plate and a pool plate, excellent in stability of the discharge direction of droplets, and excellent in liquid discharging property during maintenance can be effectively manufactured. <P>SOLUTION: The liquid droplet discharge head is manufactured by the steps including a first step for connecting a planar shape convex portion plate 9 onto the front face of the nozzle plate 2, a second step for connecting the planar shape pool plate 3 onto the rear face of the nozzle plate 2, a third step for forming convex portion 9a in the periphery of the region where a nozzle 2a of the front face of the nozzle plate 2 is formed, a fourth step for forming the communicating hole 3a communicating with the nozzle 2a in the pool plate 3, a fifth step of forming water repellent film 10 on the front faces of the nozzle plate 2 and the convex portion plate 9, and the sixth step for forming the nozzle 2a by boring the through hole in the nozzle plate 2 through the communication hole 3a of the pool plate side from the rear face of the nozzle plate 2. <P>COPYRIGHT: (C)2008,JPO&INPIT

Description

  The present invention relates to a method of manufacturing a droplet discharge head including a nozzle plate having a nozzle and a water repellent film formed on a surface thereof, and a pool plate having a communication hole communicating with the nozzle.

  As an inkjet head for recording an image by ejecting ink in the form of fine droplets from a nozzle, in general, a nozzle plate in which a nozzle is formed and a water-repellent film is formed on the surface, and a nozzle The thing provided with the pool plate in which the communicating hole which connects was formed. In this way, the formation of the water-repellent film on the surface of the nozzle plate prevents the ink droplets from adhering to the droplet discharge side surface of the nozzle plate, increases the uniformity of the droplet discharge surface of the nozzle plate, This is to stabilize the discharge directionality. Further, in order to protect such a water-repellent film from mechanical abrasion due to paper jam or the like, a convex portion is formed around the nozzle.

  As an ink jet recording head in which convex portions are formed around such nozzles, for example, a nozzle that ejects ink and a substrate on which the nozzle is formed are formed by laminating a metal material and repelling the surface. An ink jet recording head is disclosed which has a recess that has been subjected to water treatment, and the recess is formed by bonding a metal plate in which a hole corresponding to the nozzle is formed on a substrate on which the nozzle is formed. (See Patent Document 1).

  However, in the case of the ink jet recording head disclosed in Patent Document 1, it is difficult to discharge ink during maintenance because the convex portions are individually formed so as to surround the peripheral portion of the nozzle. There is an inconvenience.

In order to cope with the above-described inconvenience, the shape of the concave portion complementary to the convex portion is formed in a predetermined pattern shape by communicating the peripheral edge portions of a plurality of adjacent nozzles, and the shape of the convex portion is determined by each nozzle. It has been studied to form so as not to surround the peripheral edge portion.
Japanese Patent No. 3108771 (Claims 1 and 2)

  However, when a liquid droplet ejection head is manufactured using a nozzle plate having a convex portion having the above-described shape as in a conventional ink jet recording head, a communication hole is formed on the back surface of the nozzle plate having the convex portion. When joining the formed pool plate, since the nozzle plate and the pool plate are each a plate having an uneven shape, a joining failure due to insufficient joining pressure occurs in the joint details between the pool plate and the nozzle plate, As a result, there is a problem in that pressure leaks at adjacent pools (communication holes) and discharge characteristics deteriorate.

  The present invention has been made in view of the above-described problems, and has excellent adhesion between the nozzle plate and the pool plate, excellent stability in the discharge direction of droplets, and excellent liquid discharge during maintenance. It is an object of the present invention to provide a method for manufacturing a droplet discharge head capable of efficiently manufacturing the droplet discharge head.

  In order to achieve the above object, one aspect of the present invention provides the following method for manufacturing a droplet discharge head.

[1] In a method of manufacturing a droplet discharge head including a nozzle plate on which nozzles for discharging droplets are formed, a convex plate for forming a convex portion around the nozzle is formed on the surface of the nozzle plate. Corresponding to the first step of joining, the second step of joining the pool plate for forming a communication hole communicating with the nozzle on the back surface of the nozzle plate, and the periphery of the nozzle of the convex plate A third step of forming the convex portion in a region to be formed, a fourth step of forming the communication hole in a region corresponding to the nozzle of the pool plate, a surface of the nozzle plate, and a side surface of the convex portion; A fifth step of forming a water repellent film on the surface, and a through hole is formed in the nozzle plate from the back surface side of the nozzle plate through the communication hole of the pool plate. Method for manufacturing a droplet discharge head, characterized in that it comprises a sixth step of forming a nozzle.

  With this configuration, it is possible to improve the adhesion between the nozzle plate and the pool plate and the stability of the droplet discharge direction, and also improve the liquid discharge during maintenance.

[2] The method for manufacturing a droplet discharge head according to [1], wherein the convex plate and the pool plate are made of SUS. By comprising in this way, a convex part plate, a pool plate, and a nozzle plate can be joined by heating-pressing collectively 3 layers on the same conditions.

[3] In the third and fourth steps, the convex portion and the communicating hole are formed by simultaneously etching the convex portion plate and the pool plate joined to both sides of the nozzle plate from both sides. The method for manufacturing a droplet discharge head according to the above [1] or [2], wherein: By doing so, the time can be shortened as compared with the case of etching one side at a time, and it is not necessary to mask one when etching one, and the process can be simplified.

[4] In a method of manufacturing a droplet discharge head including a nozzle plate on which nozzles for discharging droplets are formed, a convex plate for forming a convex portion around the nozzle is formed on the surface of the nozzle plate. A first step of joining, a second step of joining the pool plate in which a communication hole communicating with the nozzle is formed on the back surface of the nozzle plate, and an area corresponding to the periphery of the nozzle of the pool plate From the third step of forming the convex portion on the surface, the fifth step of forming a water repellent film on the surface of the nozzle plate, the side surface and the surface of the convex portion, and the back surface side of the nozzle plate, the pool And a sixth step of forming the nozzle by forming a through hole in the pool plate through the communication hole of the plate.

  With this configuration, the adhesion between the nozzle plate and the pool plate and the stability of the liquid droplet ejection direction can be improved, and the liquid discharge during maintenance can be improved. As the degree of freedom increases, quality and yield can be improved.

[5] The third step includes a step of forming a pool protective layer on the entire surface of the pool plate opposite to the joint surface with the nozzle plate prior to the formation of the convex portion. The method for manufacturing a droplet discharge head according to the above [4]. By configuring in this way, when the convex portion 9a is formed, when the convex plate 9 made of SUS is patterned with a resist or the convex plate 9 is etched, the pool plate 3 made of the same SUS is the same. It can be prevented from being eroded.

[6] The nozzle plate is formed with a plurality of the nozzles, and in the third step, the shape of the concave portion complementary to the convex portion is a peripheral edge of a portion that becomes the plurality of adjacent nozzles. [1] or [4], wherein the convex portions are formed so that the portions communicate with each other and the shape of the convex portions does not surround the peripheral portion of each of the nozzle portions. A manufacturing method of a droplet discharge head described in 1. When configured in this manner, the above-described effects can be exhibited most remarkably.

[7] The method for manufacturing a droplet discharge head according to [1] or [4], wherein the first and second steps are performed simultaneously. By comprising in this way, the working efficiency at the time of joining can be improved. Further, the positional accuracy between the plates at the time of joining can be improved.

[8] A step of preparing a first laminate including the nozzle plate in which the convex portions are formed around the nozzle and the pool plate joined to the back surface of the nozzle plate;
B step of preparing a second laminate having a pressure generation chamber configured to join a plurality of plates and supplying a liquid to the nozzle through the communication hole, and the back surface of the first laminate on the back side The method for manufacturing a droplet discharge head according to [1] or [4], further including a C step of bonding the second stacked body. By comprising in this way, the working efficiency of the whole manufacturing process can be improved.

[9] The method for manufacturing a droplet discharge head according to [4], wherein the convex plate is made of SUS. With this configuration, the rigidity of the nozzle plate is increased and handling in each process is facilitated, and even when the paper contacts the convex portion due to a paper jam, the convex portion is not damaged and has high reliability. Sex can be obtained.

[10] The method for manufacturing a droplet discharge head according to [4], wherein the convex plate is made of resin. In this way, when the convex portion is a resin, when the nozzle plate and the second laminate are joined, the stress applied to the nozzle plate during joining is relieved by the elasticity of the resin, so even under high temperature and high pressure during joining. Generation of cracks and wrinkles in the nozzle plate is suppressed. Accordingly, it is possible to suppress a decrease in ejection characteristics due to cracks and wrinkles in the nozzle plate.

  According to the present invention, it is possible to efficiently produce a droplet discharge head that has excellent adhesion between the nozzle plate and the pool plate, excellent stability of the droplet discharge direction, and excellent liquid discharge during maintenance. It becomes.

[First Embodiment]
(Configuration of droplet discharge head)
1 and 2 show a droplet discharge head according to an embodiment of the present invention. FIG. 1 is a plan view, FIG. 2A is a cross-sectional view taken along line AA in FIG. 1, and FIG. It is the B section detailed drawing of Fig.2 (a).

  As shown in FIG. 1, the droplet discharge head 1 includes a substantially parallelogram-shaped diaphragm 7, a plurality of piezoelectric elements 8 disposed on the diaphragm 7, and positions facing the plurality of piezoelectric elements 8. It has a plurality of nozzles 2a formed and by driving the piezoelectric element 8, the liquid stored inside is ejected as droplets from the nozzle 2a. Reference numeral 7 a denotes a supply hole that is provided in the diaphragm 7 and through which liquid is supplied from a liquid tank (not shown) into the head 1.

  Further, as shown in FIG. 2A, the droplet discharge head 1 has a nozzle plate 2 on which nozzles 2a are formed, and communicates with a surface (back surface) opposite to the discharge side of the nozzle plate 2. Pool plate 3 having hole 3a and liquid pool 3b, supply hole plate 4 having communication hole 4a and supply hole 4b, supply path plate 5 having communication hole 5a and supply path 5b, and pressure having pressure generation chamber 6a The generation chamber plate 6, the diaphragm 7, and the piezoelectric element 8 are sequentially stacked. The liquid pool 3b communicates with the pressure generation chamber 6a via the supply hole 4b and the supply path 5b, and the pressure generation chamber 6a communicates with the nozzle 2a via the communication holes 5a, 4a and 3a.

  Further, as shown in FIG. 2B, the droplet discharge head 1 has a convex plate 9 on the discharge side surface (front surface) of the nozzle plate 2 so that a convex portion 9a is formed around the nozzle 2a. The water repellent film 10 including the base layer 10a and the water repellent layer 10b is formed on the surface around the nozzle 2a of the nozzle plate 2 and on the surface and side surfaces of the convex portion 9a. By forming the water repellent film 10 around the nozzle 2a, the liquid droplets discharged from the nozzle 2a are discharged in a direction perpendicular to the opening surface of the nozzle 2a. Further, by providing the convex portion 9a around the nozzle 2a, the water repellent film 10 around the nozzle 2a can be protected from mechanical abrasion due to paper jam or the like.

  In the piezoelectric element 8, electrodes are formed on the upper surface and the lower surface by sputtering or the like, and the electrodes on the lower surface are electrically connected to the diaphragm 7 by a conductive adhesive and are grounded via the diaphragm 7. The electrode on the upper surface of the piezoelectric element 8 is connected to a conductive pattern of a flexible printed board (not shown) by solder. The piezoelectric element 8 is bonded to the portion of the diaphragm 7 corresponding to the pressure generating chamber 6a at least in the area required for discharging droplets.

  1 and 2 show one droplet discharge head 1, but a plurality of droplet discharge heads 1 are combined to form a droplet discharge head unit (not shown), and a plurality of droplet discharge heads. The units can be arranged and used as a droplet discharge head array (not shown).

(Method for manufacturing droplet discharge head)
FIG. 3 shows the entire manufacturing process of the first embodiment of the present invention. As shown in FIG. 3, the entire manufacturing process of the present embodiment includes a nozzle plate 2 having a nozzle 2 a, a communication hole 3 a, and a pool plate 3 having a liquid pool 3 b by processes including first to sixth processes. Step A (see FIG. 2A, FIG. 4A, FIG. 4B, FIG. 4C (h)) for preparing the first laminate S1 composed of the convex plate 9 having the convex portions 9a and the water repellent film 10 ), And a B step (FIGS. 2A and 4C) for preparing a second laminated body S2 composed of the supply hole plate 4, the supply path plate 5, the pressure generation chamber plate 6, the vibration plate 7 and the piezoelectric element 8. (I)) and a C step (see FIG. 2A and FIG. 4C (j)) for joining the first stacked body S1 and the second stacked body S2. Hereinafter, steps A to C will be described in detail.

(1) Process A <1> for preparing the first laminate S1 <1> First process As shown in FIG. 4A (a), on the surface of the nozzle plate 2 for forming the nozzle 2a, around the nozzle 2a. The convex part plate 9 for forming the convex part 9a is joined.

  The nozzle plate 2 is preferably made of a synthetic resin because the nozzle 2a can be easily formed. For example, a polyimide resin, a polyethylene terephthalate resin, a liquid crystal polymer, an aromatic polyamide resin, a polyethylene naphthalate resin, or a polysulfone resin is preferable. Etc. Among these, a self-bonding polyimide resin is preferable. The thickness of the nozzle plate 2 is preferably 10 to 100 μm.

  As a specific method for joining the nozzle plate 2 and the convex plate 9, for example, a flat convex plate made of a metal such as SUS on the nozzle plate 2 made of a self-bonding polyimide film. It can mention joining by heating-pressing 9 (300-350 degreeC, 250-450 kgf). Further, a film made of a photosensitive resin such as polyimide or epoxy as the convex plate 9 is heated and pressurized under normal pressure or low pressure (80 to 150) on the nozzle plate 2 made of self-bonding polyimide film. Bonding may be performed at 5 ° C. and 5 to 10 kgf).

<2> Second Step Next, as shown in FIG. 4A (b), the pool plate 3 for forming the communication hole 3a communicating with the nozzle 2a is joined to the back surface of the nozzle plate 2.

  The material of the pool plate 3 can be exemplified by a material made of SUS from the viewpoint of ink resistance and the like, and the thickness thereof is preferably 25 to 150 μm.

  As a specific method for joining the back surface of the nozzle plate 2 and the surface of the pool plate 3, for example, the surface of the pool plate 3 is heated on the back surface of the nozzle plate 2 made of a self-bonding polyimide film. Examples of the bonding method include pressure (280 to 350 ° C., 250 to 450 kgf). When a self-bonding polyimide film is not used as the nozzle plate 2, an adhesive or the like may be used.

When the nozzle plate 2 and the convex plate 9 and the nozzle plate 2 and the pool plate 3 are bonded with an adhesive, a thermoplastic resin such as polyimide or polystyrene, or a thermosetting resin such as phenol resin or epoxy resin is used as the adhesive. Can be used.
Here, the bonding of the convex plate 9 to the nozzle plate 2 is divided as the first step, and the bonding of the nozzle plate 2 and the pool plate 3 is divided as the second step. However, the nozzle plate 2 is divided into the convex plate 9 and the pool plate. It is also possible to carry out the joining at once by sandwiching at 3.

<3> Third and Fourth Steps Next, as shown in FIGS. 4A (c) and (d), the nozzle 2a on the surface of the nozzle plate 2 is made to correspond to the formation pattern of the communication holes 3a of the pool plate 3. Protrusions 9a are formed around the area to be formed.

  In the present embodiment, the nozzle plate 2 is set so that a plurality of nozzles 2a are formed, and the shape of the concave portion complementary to the convex portion 9a communicates with the peripheral portion of the portion that becomes the adjacent plurality of nozzles 2a. Thus, the shape of the convex portion 9a is formed so as not to surround the peripheral portion of the portion serving as the individual nozzle 2a. It is preferable because it can be remarkably exhibited. In this case, according to the wiping direction, that is, to form the shape in the longitudinal direction of the convex portion 9a or the concave portion so as to be parallel or oblique to the wiping direction, in order to improve the liquid discharging property, Further, it is preferable for protecting the water repellent film 10 from mechanical abrasion due to paper jam or the like.

  First, as shown in FIG. 4A (c), the resist 14 is patterned on the convex plate 9 by a photolithography method so as to have a desired shape.

  Next, similarly, the resist 15 is patterned on the pool plate 3 by photolithography so as to have a desired shape.

  Next, as shown in FIG. 4A (d), the convex plate 9 and the pool plate 3 are etched using the patterned resists 14 and 15 as a mask to form the convex portion 9a on the surface of the nozzle plate 2, The communication hole 3a and the liquid pool 3b are formed in the pool plate. As for the height of the convex part 9a, 10-20 micrometers is preferable. In FIG. 4A (b), only the periphery of the communication hole 3a is shown.

  Next, as shown in FIG. 4A (d), the resists 14 and 15 are removed.

<4> Fourth Step Next, as shown in FIG. 4B (e), a water repellent film 10 is formed on the surfaces of the nozzle plate 2 and the convex plate 9.

  Examples of the water repellent film 10 include a fluorine-based water repellent film, a silicon-based water repellent film, a plasma polymerization protective film, and polytetrafluoroethylene (PTFE) nickel eutectoid plating. The thickness of the water repellent film 10 is preferably 40 to 130 nm in terms of wear resistance and workability.

  Specific methods for forming the water-repellent film 10 include, for example, a method of vapor-depositing or applying a fluorine-containing resin solution, a method of depositing or applying a fluorine-containing resin dispersion, and performing a heat-melt treatment, and a silicon-containing resin. Examples thereof include a method of coating, a method of forming a plasma polymerization protective film, and a method of performing polytetrafluoroethylene (PTFE) nickel eutectoid plating. Among these, those formed by vapor-depositing a fluorine-containing resin are preferable in that the adhesion of the water-repellent film 10 can be improved. Examples of the fluorine-containing resin include Nanos (manufactured by T & K Corporation).

  As shown in FIG. 4B (e), the water repellent film 10 is composed of a base layer 10a formed on the surface side of the nozzle plate 2 and a water repellent layer 10b formed on the base layer 10a. It is preferable to use it because the adhesion of the water-repellent film can be further improved.

Specifically, for example, a silicon oxide film such as SiO, SiO ₂ or SiO _x or a silicon nitride film such as Si ₂ N ₃ or SiN _x having a thickness of 30 to 100 μm is used as the base layer 10a. In addition to being excellent in ink resistance, it is also preferable because it has excellent adhesion to a resin such as polyimide used for the nozzle plate 2 and a fluorine-based water repellent material used for the water repellent layer 10b. As the water repellent layer 10b, a layer having a thickness of 10 to 30 nm, which is the same as that in the water repellent film 10 described above, can be used.

  Specific methods for forming the water repellent film 10 or the base layer 10a and the water repellent layer 10b include, for example, a vapor deposition method, a sputtering method, a CVD method, and the like. Especially, it is preferable to use what was formed by vapor deposition as the water-repellent film 10, or the base layer 10a and the water-repellent layer 10b, since adhesiveness, such as a water-repellent film, can be improved. In the case where the underlayer 10a is formed by the sputtering method, the adhesion between the nozzle plate 2 and the underlayer 10a is obtained by treating the surface of the nozzle plate 2 by reverse sputtering in the sputtering apparatus before forming the underlayer 10a. Can be improved. Further, it is preferable to form, for example, a fluorine-based water-repellent layer as the water-repellent layer 10b in the same chamber after forming the base layer 10a. However, before the water repellent layer 10b is formed, particularly when the base layer 10a is taken out of the chamber after the base layer 10a is formed, the surface state of the base layer 10a is improved by performing ultraviolet cleaning (treatment by UV irradiation). Can be recovered.

  Next, as shown in FIG. 4B (f), the surface of the water repellent film 10 is covered with a protective layer 11.

  Examples of the protective layer 11 include a layer made of sheet-like pressure-sensitive adhesive tapes, thermoplastic resins, and the like. As adhesive tapes, for example, those obtained by applying an adhesive such as an acrylic adhesive or a rubber adhesive on a substrate made of polyethylene terephthalate resin, polypropylene resin, polyethylene resin, vinyl chloride resin, polyimide resin, etc. Can be mentioned. In addition, examples of the thermoplastic resins include polyester resins, ethylene acrylic acid copolymers, polyamide resins, polyethylene resins, and the like. These may be used alone, or those applied to a base film are used. Also good. The thickness of the protective layer 11 is preferably 10 to 200 μm.

  Specific methods for coating the surface of the water-repellent film 10 with the protective layer 11 include a method of applying the above-mentioned adhesive tape in the form of a sheet to the surface of the water-repellent film 10 in a vacuum, and the above-mentioned thermoplasticity. The method etc. which apply | coat resin can be mentioned. In this case, it is preferable to coat by applying and applying in a vacuum. Moreover, when sticking, it is still more preferable that it is the state heated and pressurized (80-150 degreeC, 5-10 kgf).

<5> Fifth Step Next, as shown in FIG. 4B (g), a nozzle 2a is formed by drilling a through hole from the back side of the nozzle plate 2.

  In the present embodiment, as a specific method for forming the through hole (forming the nozzle 2a), for example, as shown in FIG. Laser processing by irradiation can be mentioned as a suitable example. The laser used for such laser processing may be a gas laser or a solid laser. Examples of the gas laser include an excimer laser, and examples of the solid laser include a YAG laser. Among these, the use of an excimer laser is preferable from the viewpoint of nozzle processing quality.

  In addition, as a timing which drills a through-hole (forms nozzle 2a), after forming nozzle 2a in nozzle plate 2, nozzle plate 2 and pool plate 3 may be joined.

  Next, as shown in FIG. 4C (h), the protective layer 11 is peeled off. The first stacked body S1 is formed as described above.

(2) Step B for Preparing Second Laminate S2 As shown in FIG. 4C (i), the supply hole plate 4, the supply path plate 5, the pressure generation chamber plate 6, the vibration plate 7 and the piezoelectric element 8 are joined. Thus, the second stacked body S2 is formed.

  Of the supply hole plate 4, the supply path plate 5, the pressure generation chamber plate 6, the vibration plate 7, and the piezoelectric element 8 constituting the second laminate S 2, at least the pool plate 3 constituting the first laminate S 1 is joined The supply hole plate 4 is made of a metal such as SUS. In the third step to be described later, the first and second stacked bodies S1 and S2 are joined (specifically, The temperature of the pool plate 3 in the first laminate S1 on which the water-repellent film 10 is formed and the supply hole plate 4 of the second laminate S2) is equal to or lower than the heat-resistant temperature of the water-repellent film 10. This is preferable because it can easily prevent deterioration of the film quality of the water-repellent film 10.

  Examples of a method for forming the second laminate S2 by joining the supply hole plate 4, the supply path plate 5, the pressure generation chamber plate 6, and the vibration plate 7 include a thermoplastic resin such as polyimide and polystyrene, and phenol. An adhesive such as a thermosetting resin such as a resin or an epoxy resin can be used.

(3) Step C for joining the first laminate S1 and the second laminate Next, as shown in FIG. 4C (j), the pool plate 3 and the second laminate of the first laminate S1 The supply hole plate 4 of S2 is joined using an adhesive at a temperature lower than the heat resistant temperature of the water repellent film 10 to obtain the droplet discharge head 1.

  The heat-resistant temperature of the water-repellent film 10 varies depending on the material constituting the water-repellent film 10, but is, for example, 250 ° C. when the material is Nanos and 300 ° C. when the material is NR-100 (manufactured by Daikin Industries). Therefore, it is preferable that the bonding is performed at a temperature equal to or lower than the respective heat-resistant temperature corresponding to the material constituting the water-repellent film 10.

(Operation of droplet discharge head)
Next, the operation when the droplet discharge head is applied to an inkjet head will be described. The liquid pool 3b is filled with ink supplied from an ink tank (liquid tank) (not shown), and the ink is supplied from the liquid pool 3b to the pressure generating chamber 6a through the supply hole 4b and the supply path 5b to generate pressure. Ink is stored in the chamber 6a. When the plurality of piezoelectric elements 8 are selectively driven according to the image signal, the diaphragm 13 bends as the piezoelectric elements 8 are deformed. As a result, the volume in the pressure generation chamber 6a changes, and the pressure generation chamber 6a is changed. The stored ink is ejected as droplets from the nozzle 2a through the communication holes 5a, 4a, and 3a onto a printed material such as paper, cloth, or film, and an image is recorded on the printed material.

  A plurality of droplet discharge heads 1 are arranged in the horizontal direction of the paper surface of FIG. 1 and a droplet discharge head unit having a length corresponding to the width of the substrate is used to fix the droplet discharge head unit and Can be moved in a direction perpendicular to the longitudinal direction of the head unit to record an image on the entire substrate. The droplet discharge head unit may be moved without moving the substrate.

  Also, a liquid in which four droplet discharge head units that discharge ink droplets corresponding to yellow (Y), magenta (M), cyan (C), and black (K) are arranged in a direction perpendicular to the longitudinal direction of the head unit. By using the droplet discharge head array, a color image can be recorded on the substrate.

(Effects of the first embodiment)
According to the manufacturing method of the droplet discharge head of the first embodiment described above, the following effects can be obtained.
(A) In the present embodiment, a flat convex plate 9 having no irregularities before the convex portion 9a is formed is joined to the surface of the nozzle plate 2 in the first step, and the nozzle in the second step. Since the pool plate 3 is joined to the back surface of the plate 2, the adhesion between the nozzle plate 2 and the pool plate 3 can be improved, and the droplet discharge direction can be stabilized.
(B) The shape of the concave portion complementary to the convex portion 9a is formed in a predetermined pattern shape through the peripheral edge portions of the adjacent nozzles 2a, and the shape of the convex portion 9a is determined by each nozzle. Since it is formed so as not to surround the peripheral portion of 2a, it is possible to improve the liquid dischargeability during maintenance.
(D) Further, after the formation of the water repellent film 10, the first stacked body S <b> 1 and the second stacked body S <b> 2 are joined using a metal such as SUS as the supply hole plate 4 in the process C, for example. In this case, the metal plates (pool plate 3 and supply hole plate 4) are bonded with an adhesive, and the bonding temperature at this time is the nozzle plate 2 made of polyimide resin by utilizing the self-bonding property of polyimide resin. And a pool plate 3 made of a metal such as SUS, the temperature can be lowered by 50 ° C. or more (it can be joined at a temperature lower than the heat resistant temperature of the water repellent film 10). Thermal damage to the water film 10 can be suppressed.

[Second Embodiment]
5A to 5E are cross-sectional views schematically showing a method for manufacturing a droplet discharge head according to the second embodiment of the present invention. As shown in FIG. 5B, in the second embodiment, when the pool plate 3 is joined to the back surface of the nozzle plate 2 in the first step, the communication hole 3a is formed in the pool plate 3 in advance. Join.

  Next, as shown in FIG. 5C, the pool protective layer 12 is formed on the entire surface of the pool plate 3 opposite to the joint surface with the nozzle plate 2. This is because, when the convex portion 9a is formed, when the convex plate 9 made of SUS is patterned with a resist or the convex plate 9 is etched, the pool plate 3 made of the same SUS is similarly eroded. It is for preventing.

  Next, as shown in FIG. 5D, a resist is patterned on the convex plate 9 by photolithography so as to have a desired shape. As shown in FIG. The convex plate 9 is etched using 13 as a mask to form a convex portion 9 a on the surface of the nozzle plate 2. Thereafter, the resist 13 and the pool protective layer 12 are peeled off. Subsequent steps are the same as those in the first embodiment, and thus description thereof is omitted.

  According to the second embodiment, since the pool plate 3 is formed independently, the degree of freedom in shape is high and stable quality can be obtained. In addition, since the pool protective layer 12 is formed on the back surface of the pool plate 3 before forming the convex portions 9a in the third step, when forming the convex portions 9a on the convex plate 9, the convex plate 9 It is possible to prevent the pool plate 3 made of the same SUS from being eroded.

[Third Embodiment]
6A to 6D are cross-sectional views schematically showing a method for manufacturing a droplet discharge head according to the third embodiment of the present invention. As shown in FIG. 6A, in the third embodiment, the convex plate 9 is joined to the surface of the nozzle plate 2 in the first step, and the back surface of the nozzle plate 2 in the second step. The pool plate 3 is joined at the same time. The rest is the same as in the case of the first embodiment. For example, the form shown in FIG. 6B is the same as the form shown in FIG. 5C in the case of the second embodiment. By comprising in this way, the working efficiency at the time of joining can be improved. Further, the positional accuracy between the plates at the time of joining can be improved.

  The method for manufacturing a droplet discharge head according to the present invention is applicable to various industrial fields in which high-definition image information patterns are required to be formed by discharging droplets, such as an inkjet method on a polymer film or glass surface. Electrical and electronic industries such as forming color filters for displays by ejecting ink using solder, forming bumps for component mounting by ejecting solder paste onto the substrate, forming circuit board wiring, etc. It is effectively used in the medical field for producing a biochip for inspecting a reaction with a sample by discharging a reaction reagent onto a glass substrate or the like.

1 is a plan view of a droplet discharge head according to a first embodiment of the present invention. (A) is the sectional view on the AA line of FIG. 1, (b) is the B section detailed drawing of (a). FIG. 5 is a process diagram showing a whole manufacturing method of the droplet discharge head according to the first embodiment of the present invention. (A)-(d) is sectional drawing which shows typically the manufacturing method of the droplet discharge head which concerns on the 1st Embodiment of this invention. (E)-(g) is sectional drawing which shows typically the manufacturing method of the droplet discharge head which concerns on the 1st Embodiment of this invention. (H)-(j) is sectional drawing which shows typically the manufacturing method of the droplet discharge head which concerns on the 1st Embodiment of this invention. (A)-(e) is sectional drawing which shows typically the manufacturing method of the droplet discharge head which concerns on the 2nd Embodiment of this invention. (A)-(d) is sectional drawing which shows typically the manufacturing method of the droplet discharge head which concerns on the 3rd Embodiment of this invention.

Explanation of symbols

DESCRIPTION OF SYMBOLS 1 Droplet discharge head 2 Nozzle plate 2a Nozzle 3 Pool plate 3a Communication hole 3b Liquid pool 4 Supply hole plate 4a Communication hole 4b Supply hole 5 Supply path plate 5a Communication hole 5b Supply path 6 Pressure generation chamber plate 6a Pressure generation chamber 7 Vibration Plate 7a Supply hole 8 Piezoelectric element 9 Protruding plate 9a Protruding portion 10a Underlayer 10b Water repellent layer 11 Protective layer 12 Pool protective layer 13 Resist 14 First resist 15 Second resist 10 Water repellent film S1 First laminated body S2 Second laminate

Claims (10)

In a method for manufacturing a droplet discharge head including a nozzle plate on which nozzles for discharging droplets are formed,
A first step of bonding a convex plate for forming a convex portion around the nozzle to the surface of the nozzle plate;
A second step of joining the pool plate for forming a communication hole communicating with the nozzle on the back surface of the nozzle plate;
A third step of forming the convex portion in a region corresponding to the periphery of the nozzle of the convex plate;
A fourth step of forming the communication hole in a region corresponding to the nozzle of the pool plate;
A fifth step of forming a water repellent film on the surface of the nozzle plate, and on the side surface and surface of the convex portion;
And a sixth step of forming the nozzle by forming a through hole in the nozzle plate from the back surface side of the nozzle plate through the communication hole of the pool plate. Production method.   The method of manufacturing a droplet discharge head according to claim 1, wherein the convex plate and the pool plate are made of SUS.   In the third and fourth steps, the convex portion and the communication hole are formed by simultaneously etching the convex portion plate and the pool plate joined to both surfaces of the nozzle plate from both sides. A manufacturing method of a droplet discharge head according to claim 1 or 2. In a method for manufacturing a droplet discharge head including a nozzle plate on which nozzles for discharging droplets are formed,
A first step of bonding a convex plate for forming a convex portion around the nozzle to the surface of the nozzle plate;
A second step of joining the pool plate in which a communication hole communicating with the nozzle is formed on the back surface of the nozzle plate;
A third step of forming the convex portion in a region corresponding to the periphery of the nozzle of the pool plate;
A fifth step of forming a water repellent film on the surface of the nozzle plate, and on the side surface and surface of the convex portion;
And a sixth step of forming the nozzle by forming a through hole in the pool plate from the rear surface side of the nozzle plate through the communication hole of the pool plate. Production method.   The third step includes a step of forming a pool protective layer on the entire surface of the pool plate opposite to the joint surface with the nozzle plate prior to the formation of the convex portion. Item 5. A method for manufacturing a droplet discharge head according to Item 4. The nozzle plate is formed with a plurality of the nozzles,
In the third step, the shape of the concave portion complementary to the convex portion communicates with the peripheral edge portions of the adjacent portions serving as the nozzles, and the shape of the convex portions becomes the individual nozzles. The method of manufacturing a droplet discharge head according to claim 1, wherein the convex portion is formed so as not to surround a peripheral portion of the portion.   5. The method of manufacturing a droplet discharge head according to claim 1, wherein the first and second steps are performed simultaneously. A step of preparing a first laminate including the nozzle plate in which the convex portion is formed around the nozzle and the pool plate bonded to the back surface of the nozzle plate;
B step of preparing a second laminate having a pressure generating chamber configured to join a plurality of plates and supplying a liquid to the nozzle through the communication hole;
5. The method of manufacturing a droplet discharge head according to claim 1, further comprising a C step of bonding the second stacked body to a back surface of the first stacked body.   The method of manufacturing a droplet discharge head according to claim 4, wherein the convex plate is made of SUS.   The method of manufacturing a droplet discharge head according to claim 4, wherein the convex plate is made of resin.

Images