JP2006228793A - Apparatus and method of mounting electronic part - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To improve the mounting quality of an electronic part by detecting the front surface height of a substrate in high accuracy in the state that the substrate is installed on an XY table. <P>SOLUTION: The apparatus of mounting the electronic part which mounts the electronic part on the substrate positioned on the XY table by lowering a nozzle for holding the electronic part includes a control means for determining the amount of declining of the nozzle based on the detected values of a plurality of sensors for continuously detecting the surface heights of the substrate continuously without contact. The plurality of the sensors are arranged and provided adjustably at an interval in one direction, and configured to be provided so that the relative displacement might become possible to the substrate in the direction different from the arrangement direction. <P>COPYRIGHT: (C)2006,JPO&NCIPI

Description

  The present invention relates to an electronic component mounting apparatus and an electronic component mounting method for mounting an electronic component on a substrate.

  2. Description of the Related Art Conventionally, for example, a mounting apparatus that automatically mounts an electronic component (hereinafter, appropriately abbreviated as a component) on a substrate is known. According to this, after the component supplied from the component supply device is sucked and held by the suction nozzle mounted on the mounting head and transferred to a predetermined position, the suction nozzle is placed at a predetermined position on the substrate fixed to the XY table. It is lowered and attached to the board. This mounting apparatus is provided with a highly accurate positioning mechanism for accurately mounting electronic components at predetermined positions on the substrate. For example, the position of a so-called alignment mark formed on the substrate is recognized by a camera or the like, and by detecting the amount of deviation from the set position, the mounting position of the electronic component can be corrected and optimized.

  On the other hand, since the thickness of the component usually varies depending on the type, accurate component mounting cannot be performed if the lowering amount of the suction nozzle is always constant. For this reason, the lowering amount of the nozzle is stored in advance according to the type of the component, and the lowering amount of the nozzle is controlled for each component based on these data.

  In addition, a substrate such as a printed circuit board may be warped or deformed due to distortion during processing. For example, if the board surface of the board installed in the mounting device is recessed below the reference board height, the solder printed on the board surface is not given sufficient pressing force from the component, and the mounting position There is a risk of misalignment and component collapse. On the other hand, if the substrate surface is convex upward, the pressing force applied to the solder becomes excessive, and there is a possibility that the solder will spread too far or the parts may be damaged.

  Thus, for example, a method is disclosed in which the amount of warping of the printed circuit board is measured during the standby state until the board is carried into the XY table, and the component mounting height is controlled based on the measurement result (Patent Document). 1).

  Also, after the board is loaded into the XY table, the vertical distance between the component holding position and the mounting position on the board before the suction nozzle is lowered is measured, and the mounting height of the component is controlled based on this measurement result Is disclosed (see Patent Document 2).

JP 2004-71641 A (page 7-8, FIG. 4) Japanese Patent Laid-Open No. 11-145682 (page 4-5, FIG. 1)

  By the way, the substrate placed on the XY table is normally constrained by an external force from the three axis (XYZ) directions in the vertical and horizontal height directions. For this reason, there exists a possibility that curvature deformation may generate | occur | produce in a board | substrate with the magnitude | size of the force concerning a board | substrate. That is, as shown in Patent Document 1, even if the amount of warpage of the substrate is detected during standby of loading of the substrate, if the warpage occurs on the positioning table, the mounting height of the components cannot be optimized. May be reduced.

  On the other hand, according to Patent Document 2, in order to measure the vertical distance between the component holding position and the mounting position on the board, the board positioning control is performed using the XY table, and then the vertical distance is measured. Based on this, the lowering amount of the nozzle is determined and the lowering operation is performed. For this reason, there is a problem that the processing speed is lowered as compared with the conventional method in which the substrate positioning control and the suction nozzle lowering amount control are simultaneously performed.

  Further, according to the previous Patent Document 1, in order to recognize the position of the alignment mark of the substrate on the XY table, when the substrate is moved relative to the camera, the surface height on the diagonal line of the substrate is measured, A method for obtaining the amount of warpage of the substrate based on the measurement result is disclosed. According to this, since the amount of warpage can be measured while the substrate is fixed to the XY table and the amount of warpage can be measured during the alignment mark recognition work, it is possible to improve the mounting quality of components and suppress the decrease in processing speed. it can.

  However, the warping of the substrate may cause a complicated deformation under the influence of external force. In this case, as shown in Patent Document 1, the surface height at various locations on the substrate surface cannot be accurately grasped only by the measurement on the diagonal line. In particular, in the mounting of minute parts, the influence of the mounting height error on the board surface on the quality is great.

  An object of the present invention is to detect the surface height of a substrate with high accuracy in a state where the substrate is placed on an XY table, and to improve the mounting quality of electronic components.

  In order to solve the above-described problems, an electronic component mounting apparatus according to the present invention is a device that mounts an electronic component on a substrate positioned on an XY table by lowering a nozzle that holds the electronic component, and the surface height of the substrate. A plurality of sensors that continuously detect non-contact and a control unit that determines the amount of descent of the nozzle based on the detection value of the sensors, and the plurality of sensors can be adjusted in one direction in each direction. It is provided in an array, and is provided so as to be movable relative to the substrate in a direction different from the array direction.

  That is, by relatively moving a plurality of sensors in a predetermined direction on the substrate at predetermined intervals, the surface height can be continuously measured over the entire surface of the substrate by one scanning of the sensors. According to this, since the surface height of an arbitrary position on the substrate can be measured with the substrate placed on the XY table, the surface height can be detected with high accuracy even if the substrate is deformed unevenly. It is possible to improve the mounting quality of electronic components.

  In this case, the sensor adjusts the sensor interval so as to scan at least a setting region on the substrate on which the electronic component is mounted. According to this, since the surface height in the component mounting area can be accurately grasped, the component mounting quality can be further improved.

  In addition, it has data that defines whether or not to correct the amount of descent based on the surface height of the substrate according to the type of electronic component, and controls the amount of descent based on information obtained by recognizing the type of electronic component Is preferred. That is, for example, when mounting a micro component among electronic components, the lowering amount of the nozzle is controlled based on the surface height of the substrate. However, the control of the lowering amount is not necessarily required for other components. do not do. Therefore, for example, it is stored as component data so that it can correspond to both a component mounted with a preset nozzle descending amount and a component that controls the descending amount based on the surface height measurement result, Only for the target component, the nozzle lowering amount is determined based on the measured value of the surface height of the substrate. According to this, the mounting process time can be shortened.

  In such a component mounting apparatus, first, in order to read the position of the alignment mark on the substrate, for example, in the process of moving the XY table and positioning it at an arbitrary X coordinate, and subsequently moving only the Y table. It is preferable that the surface height of the substrate is continuously detected along a plurality of different X coordinates, and the amount of lowering of the nozzle is determined based on the detected value. According to this, since the surface height of the substrate is detected during the work of recognizing the alignment mark of the substrate, the mounting process time can be increased.

  ADVANTAGE OF THE INVENTION According to this invention, the surface height of a board | substrate can be detected with a high precision in the state in which the board | substrate was installed in the XY table, and the mounting quality of an electronic component can be improved.

  Hereinafter, an embodiment of an electronic component mounting apparatus to which the present invention is applied will be described with reference to the drawings. FIG. 1 is a schematic top view of an electronic component mounting apparatus to which the present invention is applied. FIG. 2 is a partial side view of an electronic component mounting apparatus to which the present invention is applied. FIG. 3 is a top view schematically showing a state in which the substrate is mounted on the XY table of the electronic component mounting apparatus to which the present invention is applied.

  As shown in FIGS. 1 and 2, the electronic component mounting apparatus 1 according to the present embodiment includes a supply system 3 that supplies a chip-shaped electronic component (hereinafter referred to as a component A) with a device body 2 interposed therebetween, and a component. A mounting system 4 for mounting A on the substrate B is disposed in parallel to face the mounting system 4. The apparatus main body 2 includes an index unit 6 that is a main body of the drive system, a rotary table 7 connected thereto, and a plurality (for example, twelve) of mounting heads 8 disposed on the outer periphery of the rotary table 7. It is prepared for.

  The supply system 3 includes a number of tape cassettes 16 for each type of component A. Each tape cassette 16 is detachably mounted side by side with respect to a supply base 15 that is slidably supported by a pair of guide rails 20. A ball screw 18 is screwed in the slide direction of the supply base 15, and the feed motor 17 connected to one end of the ball screw 18 rotates forward and backward, thereby moving on the guide rail 20. Each tape cassette 16 is mounted with a reel on which the tape is wound, and the carrier tape C fed out from the reel is intermittently fed out at a predetermined length, whereby a number of the tapes 16 mounted on the carrier tape C at predetermined intervals. The parts A are intermittently supplied to the predetermined position of the turntable 7 one by one.

  The rotary table 7 is driven to rotate via the index unit 6 by driving a motor (not shown). The turntable 7 is provided with mounting heads 8 on the outer periphery at equal intervals, and is intermittently rotated in accordance with these intermittent pitches. Thus, the parts A supplied from the supply system 3 are sequentially transferred to the mounting system 4 by the rotation of the rotary table 7 while being sucked and held by the suction nozzle 9 provided at the lower end of the mounting head 8.

  The mounting system 4 includes an XY table 13 on which the substrate B is placed and moved in the X-axis direction and the Y-axis direction, a substrate carry-in conveyance path 23 and a substrate carry-out conveyance path 24 disposed before and after the XY table 13, A substrate transfer device 25 is provided which carries the substrate B onto the XY table 13 from the substrate carry-in conveyance path 23 and carries the substrate B onto the substrate carry-out conveyance path 24 from the XY table 13.

  The XY table 13 is mounted on the Y table 11 that can be moved in the Y direction by driving the Y axis motor 12, and the X table 13 a that is mounted on the Y table 11 and can be moved in the X direction by driving the X axis motor 14. It has. That is, the X table 13a has a function of the XY table 13 that moves substantially in the XY direction.

  In such a configuration, the substrate B which has been sent to the downstream end of the substrate carry-in transport path 23 is carried onto the XY table 13 by the substrate transfer device 25, and at the same time, on the XY table 13 where the mounting of the component A is completed. The substrate B is unloaded to the substrate unloading / conveying path 24 by the substrate transfer device 25. After the substrate B introduced onto the XY table 13 is fixed by fixing means described later, the substrate B is transferred by the XY table 13 so that the mounting portion on which the component A is mounted is arranged at a predetermined mounting position. When the XY table 13 stops and the substrate B is placed at a predetermined position, the component A transferred by the rotary table 7 is mounted on the mounting portion of the substrate B by the lowering of the suction nozzle 9.

  In the present embodiment, the component A is sucked and held by the suction nozzle 9 provided at the lower end of the mounting head 8. The suction nozzle 9 is always urged by a compression spring (not shown) in the direction of lowering with respect to the mounting head 8, and the mounting nozzle 9 contacts the substrate B in a state where the component A is sucked, and the mounting head 8 is lowered by a predetermined amount. Then, the spring is compressed to absorb the impact, and the component A is pressed against the substrate B with a predetermined pressure.

  On the other hand, positioning pins 31 are provided on the upper surface side of the XY table 13 as shown in FIG. 3, and the end surface of the substrate B abuts against the positioning pins 31, thereby positioning in the X direction. Furthermore, the substrate B is positioned in the Y direction by including a Y clamp 26 that functions as both a guide in the X direction and a clamp in the Y direction. The Y clamp 26 has a fixed Y clamp 26a and a movable Y clamp 26b, and is provided with a guide groove having a U-shaped cross section facing each other. The movable side Y clamp 26b is provided with an air cylinder in the guide groove, and presses and fixes the substrate B between the fixed side Y clamp 26a and the movable side Y clamp by positioning in the Y direction and the action of the air cylinder. It has become.

  A plate-like Z clamp plate (not shown) is provided between the fixed side Y clamp 26a and the movable side Y clamp 26b, and this Z clamp plate is connected to a lifting device (not shown) so as to be movable in the Z direction. ing. That is, the substrate B can be fixed in the Z direction by pressing the substrate B from below at the upper surface side of the guide groove, that is, in the Z direction. A table base 26c is installed below the Z clamp plate. The table base 26c is formed with a number of set holes 26 for erecting cylindrical backup pins (not shown). The backup pins support the substrate B from below. For example, when a rigid substrate B is introduced, the substrate B is supported only by the Z clamp plate instead. The table base 26 c is integrated with the XY table 13. As described above, the substrate B is integrally supported by the Y clamp 26 on the XY table 13 and can be moved in the Z direction on the table base 26c.

  A symbol MC on the Y table 11 represents a mounting position where the mounting head 8 is lowered and the component A is mounted. Further, M1 and M2 formed diagonally on the substrate B represent a first alignment mark and a second alignment mark, respectively. That is, by recognizing each alignment mark position by a method to be described later, the mounting position of the component A on the board B is determined.

  Above the XY table 13, a sensor group 27 for detecting the surface height of the substrate B is disposed. The sensor group 27 is configured by arranging a plurality of non-contact sensors side by side at a predetermined interval. Here, the sensor group 27 is provided independently of the operation in the Y direction of the XY table 13, and the substrate B is fixed above the substrate B when moving in the Y direction along with the operation of the XY table 13. The substrate surface height of an arbitrary X coordinate is measured in a line by the sensor group 27 arranged in a line.

  FIG. 4 is an enlarged perspective view showing the sensor group 27. In the sensor group 27, as shown in the figure, sensor attachment jigs 28a to 28c are slidably attached to two pairs of rods 31, and sensors 29a to 29c are attached to the sensor attachment jigs 28a to 28c, respectively. It is fixed downward. The sensors 29a to 29c are, for example, optical elements that detect the height from the principle of triangulation by irradiating the surface of the substrate B with a laser beam (O) in the form of a beam and receiving (P) a scattered image from the substrate B. A type sensor is used. The two pairs of rod-shaped members 31 are arranged so as to be parallel to the X-axis of the XY table 13, and the sensors 29a to 29c slide in the X direction along the rod-shaped member 31 and are positioned at arbitrary positions. It has become. In the present embodiment, the intervals of the sensors 29 are set in accordance with these intervals so that the heights at the positions of the lines L1 to L3 shown in the drawing can be measured.

  Next, an operation for transferring the component A supplied from the supply system 3 onto the substrate B will be described. As shown in FIG. 1, the rotary table 7 rotates intermittently and sequentially transfers the parts A to the mounting system 4. First, when the mounting head 8 reaches the position of the suction station I, the suction nozzle 9 moves up and down, and the suction nozzle 9 sucks and holds the component A supplied from the carrier tape C. Next, when the mounting head 8 comes to the position of the recognition station II, the part A sucked by the suction nozzle 9 is picked up from below by the camera, and the part recognition device 21 shifts the angular position of the part A based on the picked up result. Recognize Subsequently, when the mounting head 8 comes to the position of the angle correction station III, the head rotating device 22 rotates the mounting head 8 a predetermined amount in the θ direction in order to correct the angular position shift due to the recognition result of the component recognition device 21. Move. Here, the θ direction indicates a direction of rotation around the axis of the suction nozzle 9 extending in the vertical direction. Subsequently, when the mounting head 8 comes to the position of the mounting station IV, the mounting head 8 is lowered and the component A is mounted on the substrate B.

  Next, an operation for fixing the substrate B on the XY table 13 will be described. The substrate B transferred from the substrate carry-in transport path 23 hits the positioning pin 31 via the guide groove of the XY table 13 and is positioned in the X direction. At this time, the substrate B is disposed at a position higher than the mounting reference height position of the electronic component together with the fixed side Y clamp 26a and the movable side Y clamp 26b. Then, when moving to the actual mounting reference height position by the lifting device, the positioning of the movable side Y clamp 26b is operated, and then the air cylinder is operated to fix the substrate B in the width direction. Subsequently, when the Z clamp plate is actuated to support the substrate B in the height direction, the backup pin supports the substrate B immovably from below with the completion of the lowering operation of the lifting device. Note that the backup pin actually faces the substrate B with a slight gap. In this state, the component A is mounted on the substrate B. When all the mounting is completed, the substrate B is unfixed in the reverse procedure to the above, and the substrate B is transferred to the substrate carry-in transport path 24.

  Next, a method for measuring the surface height of the substrate B will be described. First, FIG. 5 schematically shows an example of the actual height measurement result of the actual substrate. As shown in the figure, the unevenness on the surface of the substrate does not deform uniformly over the entire substrate, and may cause uneven warping deformation due to the influence of external force or the like. When such a deformation occurs, for example, the surface heights of all the component mounting positions cannot be accurately grasped only by measuring the surface height of the board surface diagonally. In particular, in the case of a micro component, the influence of the error in the surface height of the substrate surface on the quality is great.

  In this embodiment, paying attention to the fact that the unevenness of the substrate surface continuously changes in the X direction and the Y direction, the surface height of the substrate B at any component mounting position is controlled based on the nearby substrate height information. Like to do.

FIG. 6 is a diagram for explaining a component mounting area of the board B and a method for measuring the height of the board surface. As shown in the figure, on the board B, mounting areas W _{1 to} W ₉ on which the component A is mounted are shown. When the component A is mounted in these mounting areas, the mounting height is controlled based on the surface height information of the substrate B. Therefore, in each of the mounting regions W _{1 to} W ₉ , the X coordinates (X 1, X 2, X 3) that pass through the substantially central position are set as lines L ₁ , L ₂ , L ₃ , respectively. In order to continuously measure the surface height along the lines L _{1 to} L ₃ , the sensors 29 a to 29 c positioned at predetermined intervals in the X direction are moved relative to the substrate B in the Y direction. To do. Then, based on the measurement result of the line _L 1 ~L _3, carrying out the component mounting in the region of the mounting section _W 1 _~W 4, _{W 5} and _{W 6, W} 7 ~W _9.

Next, a method for determining the surface height of the substrate B from the measurement information of the line L1 will be described. Measured value of the surface height of the substrate B in the L ₃ in FIG. 6, for example, consider the case where obtained as curve data as shown in FIG. Here, FIG. 7 is a diagram illustrating the mounting area of the substrate and the measured values of the surface height thereof.

In the mounting areas W _{7 to} W _{9 for the} component A, the widths in the X direction of the respective areas are YL ₁ , YL ₂ , and YL ₃ , respectively, and the widths in the Y direction are all XL ₁ . The surface heights of the substrates in the mounting regions W _{7 to} W ₉ are determined using LINE ₁ , LINE ₂ , and LINE ₃ of measurement data, respectively. For example, when mounting the components A to P1 _{(Xt 1,} Yt 1) in the _{W 9} uses a surface height data corresponding to the height _{H 1} of the measurement data LINE ₃ of surface height. Similarly, when the component A is mounted on P2 (Xt ₂ , Yt ₂ ), the surface height data corresponding to the height H ₂ of the surface height measurement data LINE ₂ is used. Further, when the part A is mounted on P3 (Xt ₃ , Yt ₃ ), since Yt ₃ = Yt ₃ , the height data corresponding to the surface height H ₂ of the same measurement data LINE ₁ as P ₂ is obtained. Can be used.

In addition, as a method of determining the surface height of an arbitrary mounting position in the mounting regions W _{7 to} W ₉ based on the measurement data of LINE _{1 to} LINE ₃ corresponding to the mounting region W, for example, each LINE ₁ The approximate curve may be first calculated by LINE ₃ and the surface height of the substrate may be obtained from this calculation formula.

Thus, in the present embodiment, the relative movement sensor 29a~29c in the Y direction of the substrate B along any of the X-coordinate _X 1 to X ₃ passing through each mounting area _W 1 to _W-9 on the substrate A Thus, the surface height of the lines L _{1 to} L ₃ is measured, and the mounting height of the component A is controlled based on the measurement result.

  On the other hand, the substrate B may be deformed in the plane direction in addition to the height direction due to warp deformation or the like. In general, the mounting position of the component B on the board B is determined with reference to a reference hole provided on the board, that is, an alignment mark. That is, when the substrate B is mounted and fixed on the XY table 13, the camera recognizes the positions of the first alignment mark M1 and the second alignment mark M2, and sets the mounting position (XY coordinates) prior to mounting the component B. Correct and determine. In the present embodiment, the surface height of the substrate B is measured during the alignment mark recognition operation.

FIG. 8 is a flowchart of alignment mark recognition work process and substrate height measurement. The coordinates (XtM ₁ , YtM ₁ ) and (XtM ₂ , YtM ₂ ) in the coordinate system of the XY table 13 are the substrates when they are correctly installed (or set as reference positions) on the optical axis of the camera (not shown) and the XY table. B represents the position where the centers of the alignment marks M1 and M2 coincide. In the present embodiment, in order to measure the surface height of the substrate B during the recognition operations of the alignment mark, when the XY table 13 is set to the X coordinate XTM _1, sensor 29a~29c are each detection point of P1~P3 Is fixed by positioning in the X direction so as to be on L _{1 to} L ₃ on the substrate B. Hereinafter, the flowchart of FIG. 8 will be described.

First, in step S1, X-coordinate of the XY table 13 so that the XTM _1, positioning control only X-axis. Next, in step S2, the Y-axis coordinate of the XY table 13 so that the YTM _1, positioning control only the Y-axis. In this embodiment, when the XY table 13 is moved in the Y direction, the surface height of the substrate B is continuously detected along the lines L1 to L3 by the sensors 29a to 29c as shown in step S6. . Subsequently, in step S3, the alignment mark M1 of the substrate B on the XY table 13 is recognized by the camera.

Next, in step S4, the X and Y axes are simultaneously positioned and controlled so that the XY coordinates of the XY table 13 are (XtM ₂ , YtM ₂ ). The B alignment mark M1 is recognized.

  On the other hand, based on the height measurement value measured in step S6, the surface height data of the substrate B is corrected and determined in step S7, and the result is stored. Since the data processing in step S7 is performed in parallel in the positioning and recognition processing (steps S3, S4, S5) of the XY table 13, apparently no operating time is wasted as a whole apparatus.

  FIG. 9 shows a storage format of mounting component data stored in the electronic component mounting apparatus of the present embodiment. In the figure, “G-No” and “W-No” respectively indicate the group number and the mounting area of the height measurement line in FIG. “Installed parts” in FIG. 9 is part identification data received from the supply system 3 during automatic operation, and two types of R1 and R2 are shown.

  Here, for example, when a component is mounted on the board B, a small component is mainly controlled as a mounting height, and the mounting height is not necessarily required for other components. Therefore, in the case of R1, as shown in the drawing, the surface height of the substrate B is measured, and the amount of lowering of the component A is corrected based on the information, and mounting is executed. On the other hand, in the case of R2, the surface height is not measured and is mounted with a predetermined lowering amount (S0). As shown in the drawing, among the parts Nos. 1 to 18, 4, 5, 9, 10, 16 and 17 do not measure the surface height. Thus, the processing time can be shortened by measuring the minimum necessary substrate surface height.

  As described above, according to the electronic component mounting apparatus of the present embodiment, the surface height in the component mounting region of the board B is measured, and the mounting height of each component B in the mounting region is based on the measurement data. That is, the lowering amount of the suction nozzle 9 can be optimized. Thereby, stable components can be mounted without being affected by the deformation state of the substrate B. In the present embodiment, since the surface height of the substrate B can be measured at a position different from the mounting position of the component B, the non-contact sensor 29 can be disposed without interfering with the mounting head 8. It becomes possible. Furthermore, in the present embodiment, since the surface height of the substrate B is detected when the XY table 13 is moved during the alignment mark recognition work for the substrate B, high-speed mounting that does not affect the mounting throughput can be realized.

  In the present embodiment, when the component A is mounted at a predetermined position of the substrate B on the XY table 13, the XY table 13 is moved with respect to the lowered position of the mounting head 8 fixed at a fixed position. Although the example in which the positions of the mounting head 8 and the substrate B are set has been described, the present invention is not limited to this. For example, the mounting head 8 is moved in the horizontal direction with respect to the XY table 8 fixed at a fixed position. You may comprise.

1 is a schematic top view of an electronic component mounting apparatus to which the present invention is applied. It is a partial side view of the electronic component mounting apparatus to which the present invention is applied. It is a top view which shows typically the state by which the board | substrate was mounted | worn by the XY table of the electronic component mounting apparatus to which this invention is applied. It is a perspective view which expands and shows the sensor group of the electronic component mounting apparatus to which this invention is applied. It is a figure explaining the component mounting area | region of a board | substrate, and the height measuring method of a board | substrate surface. It is a figure explaining the component mounting area | region of a board | substrate, and the height measuring method of a board | substrate surface. It is a figure shown about the component mounting area | region of a board | substrate, and its surface height measurement value. It is a flowchart of an alignment mark recognition operation process and substrate height measurement. 2 shows a storage format of mounting component data stored in an electronic component mounting apparatus to which the present invention is applied.

Explanation of symbols

1 electronic component mounting apparatus 3 supply system 4 mounted system 8 mounting head 9 the suction nozzle 11 Y table 13 XY table 26c table base 28a, 28b, 28c sensor mounting jig 29a, 29b, 29c sensor W ₁ to _W-9 attached area L ₁ ~ L ₃ line

Claims (4)

In the electronic component mounting apparatus for mounting the electronic component on the substrate positioned on the XY table by lowering the nozzle holding the electronic component,
A plurality of sensors that continuously detect the surface height of the substrate in a non-contact manner, and a control unit that determines a descent amount of the nozzle based on a detection value of the sensors; The electronic component mounting apparatus is characterized by being arranged in such a manner that the distance between each other can be adjusted, and can be moved relative to the substrate in a direction different from the arrangement direction. The electronic component mounting apparatus according to claim 1, wherein the sensor scans at least a setting area on the substrate on which the electronic component is mounted. According to the type of electronic component, the data defines whether or not the amount of downward correction is corrected based on the surface height of the substrate, and the amount of downward movement is determined based on information obtained by recognizing the type of electronic component. The electronic component mounting apparatus according to claim 1, wherein the electronic component mounting apparatus is controlled. In the electronic component mounting method of mounting the electronic component on the substrate positioned on the XY table by lowering the nozzle holding the electronic component,
In order to read the position of the alignment mark on the substrate, the XY table is moved and positioned at an arbitrary X coordinate, and in the process of moving only the Y table, the surface height of the substrate along a plurality of different X coordinates. Is detected continuously, and the amount of lowering of the nozzle is determined based on the detected value.

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