JP2006224392A - Method for controlling functional liquid feeding apparatus, functional liquid feeding apparatus, liquid droplet delivering apparatus, method for manufacturing electrooptic apparatus, electrooptic apparatus and electronic instrument - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a method for controlling a functional liquid feeding apparatus and so on capable of feeding a functional liquid held within a definite pressure range to a functional liquid droplet delivering head from a functional liquid tank by a relatively simple constitution without providing a sub-tank. <P>SOLUTION: The method for controlling the functional liquid feeding apparatus and so on are provided. The method comprises a pressure detecting process for detecting whether the pressure in the functional liquid tank 81 reaches lower limit pressure or not, a pressurized volume measuring process for measuring a pressurized volume, an air feeding amount measuring process for measuring an air feeding amount per unit time of a pressurizing pump 112, an additional pressurizing time calculating process for calculating an additional pressurizing time up to reaching upper limit pressure from the lower limit pressure by driving a pressurizing pump 112 based on the results of measurements by the pressurized volume measuring process and the air feeding amount measuring process, and a pump driving process for driving the pressurizing pump 112 for the additional pressurizing time calculated when the pressure of the functional liquid tank 81 is lowered and reaches the lower limit pressure. <P>COPYRIGHT: (C)2006,JPO&NCIPI

Description

  In the present invention, the functional liquid tank is initially pressurized to a predetermined upper limit pressure by a pressure pump, and then the pressure pump is intermittently driven to pressurize and pressurize the functional liquid tank. Control method for functional liquid supply device for supplying functional liquid within a pressure range from a predetermined lower limit pressure to an upper limit pressure, a functional liquid supply device, a droplet discharge device, and electro-optics The present invention relates to a device manufacturing method, an electro-optical device, and an electronic apparatus.

  Conventionally, ink that pressurizes an ink tank (functional liquid tank) using an air pump to pressurize and supply ink (functional liquid) stored in the ink tank to an ink jet recording head (functional liquid droplet ejection head) A supply apparatus (functional liquid supply apparatus) is known. In such an ink supply device, a sub tank is interposed between the ink tank and the ink jet recording head, and the ink pumped from the ink tank is once stored in the sub tank and then supplied to the ink jet recording head. It has become.

The sub tank is provided with a displacement detection means for detecting the remaining amount of ink, and ink is supplied from the ink tank according to the remaining amount of ink in the sub tank. As a result, the pressure in the sub-tank is kept within a certain range, and the pressure fluctuation of the ink supplied to the ink jet recording head is suppressed.
JP 2001-162834 A

  However, if it is necessary to provide a sub-tank in addition to the ink tank in order to suppress fluctuations in the pressure of the ink supplied to the ink-jet recording head, an increase in the number of parts and a space problem occur, and the ink-jet recording head from the ink tank This causes a problem that the ink in the ink tank cannot be used efficiently because the ink flow path (functional liquid flow path) leading to is long.

  Therefore, the present invention provides a control method for a functional liquid supply apparatus capable of supplying a functional liquid maintained in a certain pressure range from a functional liquid tank to a functional liquid droplet ejection head with a relatively simple configuration without providing a sub tank. It is an object of the present invention to provide a functional liquid supply device, a droplet discharge device, a method for manufacturing an electro-optical device, an electro-optical device, and an electronic apparatus.

  In the present invention, in order to maintain a predetermined operating pressure, the pressurizing pump is driven when the operating pressure drops to the lower limit pressure after the functional liquid tank is initially pressurized to the upper limit operating pressure by the pressurizing pump. Then, the function liquid supply apparatus pressurizes and pressurizes the function liquid to the function liquid droplet discharge head for discharging function liquid droplets from the function liquid tank. A pressure detection step for detecting whether or not the pressure in the functional liquid tank has reached the lower limit pressure, and a pressurized volume obtained by subtracting the volume of the functional liquid remaining in the functional liquid tank from the total volume of the functional liquid tank Based on the measurement results of the pressurized volume measuring step, the air supply amount measuring step for measuring the air supply amount per unit time of the pressure pump, and the pressurized volume measuring step and the air supply amount measuring step, Drive The additional pressurization time calculation process for calculating the additional pressurization time until the upper limit pressure is reached from the lower limit pressure, and the calculated additional addition when the pressure of the functional fluid tank drops and reaches the lower limit pressure. And a pump driving process for driving the pressurizing pump.

  Further, the present invention provides a pressurizing pump when the operating pressure drops to the lower limit pressure after the functional liquid tank is initially pressurized to the upper limit pressure of the operating pressure by the pressurizing pump in order to maintain a predetermined operating pressure. Is a functional liquid supply device that pressurizes and supplies a functional liquid with an operating pressure to a functional liquid droplet discharge head that discharges functional liquid droplets from the functional liquid tank. Pressure detecting means for detecting whether or not the pressure in the liquid tank has reached the lower limit pressure, and an additional means for measuring the pressurized volume obtained by subtracting the volume of the functional liquid remaining in the functional liquid tank from the total volume of the functional liquid tank. A pressure volume measuring means; an air supply amount measuring means for measuring an air supply amount per unit time of the pressure pump; and a control means for controlling the drive of the pressure pump. Means and air supply Based on the measurement result by the volume measuring means, the additional pressure time from the lower limit pressure to the upper limit pressure is calculated by driving the pressurization pump, and the pressure of the functional liquid tank drops and reaches the lower limit pressure. In this case, the pressurizing pump is driven for the calculated additional pressurizing time.

According to these configurations, since the additional pressurization time is calculated by actually driving the pressurization pump, the lower limit pressure of the operating pressure is detected, and the pressurization pump is turned on based on the calculated additional pressurization time. It is possible to pressurize (follow) up to the upper limit of the operating pressure with a relatively simple configuration of driving (following pressurization). That is, the pressure variation immediately after the additional pressurization can be suppressed.
Moreover, since the pressurization pump is actually driven and the air supply amount per unit time is measured, it is possible to grasp the actual performance of the pressurization pump. In other words, even if the performance of the pressurization pump deteriorates with time, or even if the performance of the pressurization pump has manufacturing variations, the performance can be grasped. The pressure can be increased to the upper limit pressure. Therefore, the operating pressure does not drop frequently to the lower limit pressure due to insufficient additional pressurization, and the drive frequency of the pressurization pump can be made appropriate.

  In this case, the air supply amount measurement process includes a time measurement process for measuring the time from the start of initial pressurization to reaching the lower limit pressure, and pressurization from the start of initial pressurization until the lower limit pressure is reached. Based on the reference supply measurement process that measures the reference air supply supplied by the pump, the measurement time in the time measurement process, and the reference air supply in the reference supply measurement process, the air supply per unit time is calculated. It is preferable to have a calculation step for calculating.

  Further, in this case, the air supply amount measuring means is a time measuring means for measuring the time from the start of initial pressurization to reaching the lower limit pressure, and from the start of initial pressurization until the lower limit pressure is reached. Air supply per unit time based on the reference supply amount measurement means for measuring the reference air supply amount supplied by the pressure pump, the measurement time by the time measurement means, and the reference air supply amount by the reference supply amount measurement means And calculating means for calculating the amount.

  According to these configurations, by measuring the time from the start of initial pressurization until reaching the lower limit pressure, and by measuring the reference air amount actually supplied by the pressurization pump within the measurement time, An air supply amount per unit time indicating the air supply performance of the pump can be calculated.

  In this case, the air supply amount measurement step includes the cumulative drive time measurement step for measuring the cumulative drive time of the pressure pump, and the air supply amount information relating the cumulative drive time and the air supply amount per unit time of the pressure pump. And a calculation step of calculating an air supply amount per unit time based on the measured cumulative drive time.

  Further, in this case, the air supply amount measuring means includes the cumulative driving time measuring means for measuring the cumulative driving time of the pressurizing pump, and the air supply relating the cumulative driving time and the air supply amount per unit time of the pressurizing pump. It is preferable to have calculation means for calculating an air supply amount per unit time based on the amount information and the measured cumulative driving time.

  According to these configurations, if the cumulative driving time of the pressurizing pump is measured, the unit is calculated using the air supply amount information relating the cumulative driving time of the pressurizing pump and the air supply amount per unit time. The air supply amount per hour can be calculated and grasped.

  In this case, it is preferable that the functional liquid supply port of the functional liquid tank is disposed so that the height position is lower than the nozzle surface of the functional liquid droplet ejection head.

  According to this configuration, it is possible to grasp the actual air supply state of the pressure pump and perform additional pressure, so the functional liquid tank is disposed at a position lower than the nozzle surface of the functional liquid droplet ejection head. In this case, the functional liquid can be appropriately supplied to the functional liquid droplet ejection head.

  In this case, it is preferable that a pressure adjusting valve for adjusting the pressure of the functional liquid fed from the functional liquid tank is interposed between the functional liquid tank and the functional liquid droplet ejection head.

  According to this configuration, a predetermined operating pressure can be maintained, and the pressure adjusting valve is interposed, so that the pressure of the functional liquid supplied from the functional liquid droplet ejection head can be made extremely stable.

  According to the present invention, a functional liquid droplet is ejected by driving the functional liquid droplet ejection head while moving the functional liquid droplet ejection head relative to the drawing object, and a predetermined drawing pattern is formed on the drawing object. A liquid droplet ejection apparatus for drawing is characterized by including any one of the functional liquid supply apparatuses described above.

  According to this configuration, the functional liquid having a predetermined operating pressure can be supplied to the functional liquid droplet ejection head, so that the functional liquid droplet ejection state of the functional liquid droplet ejection head can be stabilized and accurate drawing can be performed. Can be realized.

  A method for manufacturing an electro-optical device according to the present invention is characterized in that a film-forming portion made of functional droplets is formed on a substrate using the above-described droplet discharge device.

  In addition, an electro-optical device according to the present invention is characterized in that the above-described droplet discharge device is used to form a film forming portion using functional droplets on a substrate.

  According to these configurations, since it is manufactured using a droplet discharge device capable of realizing high-precision drawing, it is possible to manufacture a highly reliable electro-optical device. As the electro-optical device (flat panel display), a color filter, a liquid crystal display device, an organic EL device, a PDP device, an electron emission device, and the like are conceivable. The electron emission device is a concept including a so-called FED (Field Emission Display) or SED (Surface-conduction Electron-Emitter Display) device. Further, as the electro-optical device, devices including metal wiring formation, lens formation, resist formation, light diffuser formation, and the like are conceivable.

  An electronic apparatus according to the present invention includes the above-described electro-optical device.

  In this case, examples of the electronic device include a mobile phone and a personal computer equipped with a so-called flat panel display, and various electric products.

  Hereinafter, an inkjet printer according to a first embodiment of the present invention will be described with reference to the accompanying drawings. This ink jet printer is a large color printer that is used by connecting to a host computer such as a personal computer, and performs printing on roll paper as a printing object by an ink jet method based on print data transferred from the host computer. .

  As shown in FIGS. 1 and 2, the ink jet printer 1 includes a printer main body 2 having an ink jet head 41 (described later), and a support stand 3 that supports the printer main body 2.

The printer main body 2 is covered with an apparatus case 11, and a roll paper cover 12 for attaching and detaching the roll paper R is provided on the upper rear side of the printer body 2 so as to be openable and closable. From the front of the printer main body 2, an open / close cover 13 that opens the interior is provided detachably. The device case 11 is also formed with a cartridge cover 17 for attaching and detaching the ink cartridge 81. Further, on the front surface of the printer main body 2, a paper discharge port 14 for discharging the printed roll paper R is formed below the opening / closing cover 13.
Inside the roll paper cover 12, a roll paper storage portion 15 for detachably storing the roll paper R is formed, and a supply reel 16 for loading and feeding the roll paper R is provided.
On the other hand, a feed path (not shown) for feeding the fed roll paper R to the paper discharge port 14 is formed inside the opening / closing cover 13, and printing is performed on the roll paper R along this feed path. Printing means 21 is provided.

  The ink jet printer 1 has an ink jet head 41 as a basic configuration, a printing means 21 for printing on the roll paper R, a feed means 22 for feeding the roll paper R along a feed path, and an ink cartridge. 81, the ink supply means 23 for supplying ink to the ink jet head 41, the maintenance means 24 for maintenance of the ink jet head 41, and controlling these means in relation to each other, thereby controlling the entire ink jet printer 1 And control means 25 for controlling (see FIG. 7). An image is printed on the roll paper R by driving the printing unit 21 and the feeding unit 22 in synchronization while supplying ink to the inkjet head 41 by the ink supply unit 23.

  The printing unit 21 includes a head unit 31 on which an inkjet head 41 is mounted, and a head moving mechanism 32 that supports the head unit 31 so as to be movable and moves the head unit 31.

  The head unit 31 is configured by mounting a plurality of inkjet heads 41 that eject ink (droplets) on a carriage 42. As shown in FIG. 3, the inkjet head 41 is connected to an ink introduction part 51 provided with a connection needle 52 that receives ink supply from the ink supply means 23, and under the ink introduction part 51, and discharges the supplied ink. And a head main body 53 for causing the The head main body 53 is composed of a nozzle plate 54 having a nozzle surface 56 having a large number (360) of discharge nozzles 57 and a case 55 in which a piezoelectric element is incorporated. Ink droplets are ejected from the ejection nozzle 57 by contraction of the piezoelectric element.

  The ink jet head 41 according to the present embodiment shown in FIG. 3 is a so-called double head, and the ink introduction part 51 is provided with two connection needles 52 to which ink is individually supplied, In the nozzle plate 54 (nozzle surface 56), two nozzle rows to which ink is individually supplied from each connection needle 52 are formed. Each nozzle row has a large number (180) of discharge nozzles 57 arranged at an equal pitch, and is formed so as to be displaced from each other by a half pitch (about 70 μm). Therefore, in the inkjet head 41, it is possible to supply different types of ink to each nozzle row and eject two types of ink, or to combine the two nozzle rows and eject ink at half-pitch intervals. (High-resolution drawing can be performed).

  The carriage 42 holds a plurality of inkjet heads 41 in a positioned state. When the plurality of inkjet heads 41 are positioned and fixed to the carriage 42, a predetermined drawing line composed of nozzle rows of each inkjet head 41 is provided on the carriage 42. Is formed. The drawing line is an array of nozzle rows (ejection nozzles 57) that are continuous in the feed direction (Y-axis direction) of the roll paper R and to which ink of the same color is supplied. In the present embodiment, the ink supply means 23 is used. The four drawing lines are formed on the carriage 42 corresponding to the four colors (four) of ink supplied in step S2.

  The head moving mechanism 32 is for moving the head unit 31 (carriage 42) in the X-axis direction (main scanning direction) perpendicular to the feed direction (Y-axis direction) of the roll paper R, and is a carriage motor (not shown). ), A power transmission mechanism (not shown) that transmits the power of the carriage motor to move the head unit 31 in the X-axis direction, and supports the head unit 31 slidably with respect to the X-axis direction. And a guide member 62 which extends to guide the movement.

  The carriage motor is composed of a DC servo motor that can rotate forward and backward. The power transmission mechanism includes a pair of pulleys and a timing belt that is spanned between the pair of pulleys and that fixes the base of the carriage 42 so that the nozzle surface 56 of the inkjet head 41 is parallel to the feed path. (Both are not shown). A carriage motor is connected to one pulley, and when the carriage motor rotates forward and backward, power is transmitted to the head unit 31 via the timing belt, and the carriage 42 moves in the X-axis direction using the guide member 62 as a guide. Reciprocates.

  The head moving mechanism 32 is configured to reciprocate the head unit 31 within a preset head moving area 64. In the present embodiment, the position corresponding to the right end of the head moving area 64 in the drawing is set as the home position of the head unit 31, and the moving position of the head unit 31 is grasped with this position as a reference position.

  Specifically, the inkjet printer 1 is provided with a home position detection sensor 65 that detects the home position of the head unit 31, and is provided in parallel with the photo sensor mounted on the carriage 42 and the guide member 62. An X-axis linear encoder 66 comprising a linear scale extending in the X-axis direction is provided, and the home position of the head unit 31 is detected by the home position detection sensor and then provided to the linear scale by a photo sensor. By sequentially detecting a large number of detection lines, the movement position of the head unit 31 moving in the head movement area 64 is grasped.

  The feed means 22 is for feeding the roll paper R stored in the roll paper storage unit 15 and for feeding the roll paper R along the feed path, and a drive source for feeding and feeding the roll paper R. A feed motor (not shown) and a feed roller (not shown) that is disposed facing the feed path and is connected to the feed motor via a power transmission mechanism (not shown) to feed and feed the roll paper R And. In the head moving area 64, a printing area is set corresponding to the width of the set roll paper R. The roll paper R is sent by the feeding means 22 so as to pass through the printing area. go.

  In this ink jet printer 1, a plurality of ink jet heads 41 are selectively driven while driving the head moving mechanism 32 to move the head unit 31 in the X-axis direction, thereby ejecting ink droplets onto the roll paper R. A desired image is drawn on the roll paper R by repeatedly performing the scan and the sub-scan that is the feed of the roll paper R performed by driving the feeding means 22.

  As shown in FIG. 4, the ink supply means 23 includes four ink cartridges 81 each storing yellow (Y), magenta (M), cyan (C), and black (B) ink, and four ink cartridges 81, respectively. A cartridge holder 82 that accommodates the ink cartridge 81, a pressurizing unit 83 that pressurizes the ink cartridge 81 by supplying air to each ink cartridge 81, and pressurizes and feeds the ink in each ink cartridge 81; A plurality of (four in the present embodiment) liquid supply tubes 84 that pipe-connect the ink cartridges 81 and the plurality of inkjet heads 41.

  As shown in FIG. 5, each ink cartridge 81 includes an ink pack 91 that stores ink and a cartridge case 93 that stores the ink pack 91. The ink pack 91 is formed by attaching a resin supply port 92 for supplying ink to a bag-like one obtained by heat-sealing two rectangular (flexible) film sheets. It is configured. The cartridge case 93 contains the ink pack 91 in a sealed state, and is provided with an air supply port (not shown) that communicates with an air pipe 113 (described later) of the pressurizing means 83. That is, when the air supply port supplies air into the cartridge case 93, air is supplied around the ink pack 91 and pressurizes the ink pack from the outside.

  The cartridge holder 82 is fixedly installed at a position lower than the nozzle surface of the inkjet head 41. The cartridge holder 82 has four cartridge mounting portions 101 for mounting ink cartridges 81 of a predetermined color. Each cartridge mounting portion 101 is provided with a connection adapter (not shown). When the ink cartridge 81 is mounted on the cartridge mounting portion 101, the air pipe 113 and the cartridge case 93 are in an airtight state via the connection adapter. Connected.

  The pressurizing unit 83 includes an air supply mechanism 111 that supplies air to each ink cartridge 81 (cartridge case 93). The air supply mechanism 111 supplies air to each ink cartridge 81 and pressurizes the ink cartridge 81, and an air pipe 113 (air flow path) connecting the pressure pump 112 and each ink cartridge 81. And a regulator 114 interposed in the air pipe 113 and an air pipe 113 located on the downstream side of the regulator 114. By detecting the pressure in the air flow path, the pressure applied to the ink pack 91 is increased. And a pressure sensor 115 for detection.

  The pressurizing pump 112 is a diaphragm type pump. By transmitting the power of the pump motor (stepping motor) to the diaphragm constituting a part of the pump chamber through the power transmission mechanism, the pump is used. Air is sucked and supplied by increasing or decreasing the volume of the chamber (both not shown). When the pressurizing pump 112 is driven, air is supplied through the air pipe 113 and the inside of the cartridge case 93 is pressurized. As a result, the ink pack 91 accommodated in the ink cartridge 81 is pressurized, and the ink stored in the ink pack 91 is pressurized and supplied.

  The air pipe 113 has one end connected to the pressurizing pump 112 and the other end connected in series to four connection adapters arranged in each cartridge mounting portion 101, so that a single pressurizing pump Air supplied from 112 is supplied to each of the four ink cartridges 81 (cartridge case 93) via the connection adapter.

  The regulator 114 is a safety valve (relief valve) for preventing the pressure in the air flow path (the pressure applied to the cartridge case 93) from exceeding a predetermined upper limit pressure due to the air supply of the pressurizing pump 112. ). The regulator 114 is provided with a solenoid 114a, and is configured to open the air flow path to the atmosphere when the ink jet printer 1 is not in operation or the like.

  The pressure sensor 115 is an ON / OFF sensor composed of a photocoupler or the like, and detects whether or not the pressure in the air flow path has reached a set pressure. Although details will be described later, the pressure sensor 115 is connected to the control unit 25, and is supplied from the ink cartridge 81 when the control unit 25 drives the pressurizing pump 112 based on the detection result of the pressure sensor 115. The ink supply pressure of the ink is maintained within a predetermined operating pressure.

  Each liquid supply tube 84 has one end connected to the connection needle 52 of the inkjet head 41 and the other end connected to the supply port 92 of the ink cartridge 81. The four liquid supply tubes 84 are collectively accommodated in a cable carrier (cable bear: registered trademark), not shown, and move following the movement of the head unit 31 (carriage 42).

  As shown in FIG. 4, the carriage 42 on which the inkjet head 41 is mounted is equipped with a plurality of pressure adjustment valves 121 for adjusting the pressure of ink supplied from the ink cartridge 81, and a liquid supply tube 84 is provided with a pressure regulating valve 121.

  As shown in FIG. 6, the pressure regulating valve 121 includes a primary chamber 123 connected to the ink cartridge 81, a secondary chamber 124 connected to the inkjet head 41, a primary chamber 123, and a secondary chamber 124 in the valve housing 122. And a diaphragm 126 (resin film) is provided on one surface of the secondary chamber 124 so as to face the outside, and the communication channel 125 is opened and closed by the diaphragm 126. An operating valve element 127 is provided.

  The functional liquid introduced from the ink cartridge 81 into the primary chamber 123 is supplied to the inkjet head 41 via the secondary chamber 124. At this time, the atmospheric pressure acting on the diaphragm 126 is used as the adjustment reference pressure, and the communication flow The pressure in the secondary chamber 124 is adjusted by opening and closing the valve body 127 provided in the passage 125. In this case, ink on the ink pack 91 side (primary side) is selected according to the area ratio between the valve body main body 127a that is in contact with the opening edge of the communication flow path on the secondary chamber 124 side serving as a valve seat and the diaphragm 126. Therefore, the ink jet head 41 can be supplied with ink having a stable pressure with very little pressure fluctuation. That is, the supply pressure of the ink supplied from the ink cartridge 81 is maintained at a predetermined operating pressure, but the pressure fluctuation amount can be further reduced by the pressure adjustment valve 121. In addition, since the pulsation of ink generated on the ink pack 91 side is also cut off by the valve body 127, it can be absorbed (damper function).

  The maintenance unit 24 includes a suction unit 131 that sucks the inkjet head 41 and a flushing unit 132 that receives discharge from the inkjet head 41.

  The suction means 131 forcibly discharges ink from the discharge nozzle 57 by applying a suction force from a suction pump or the like to the inkjet head 41 via a cap 141 configured to be in close contact with the nozzle surface of the inkjet head 41. It is used to eliminate / prevent clogging of the discharge nozzle 57. The suction means 131 (cap 141) is also used to store the ink jet head 41. When the ink jet printer 1 is not in operation, the cap 141 is brought into close contact with the nozzle surface 56 of the ink jet head 41 to discharge nozzles 57. Prevent drying. The suction means 131 is disposed facing the home position, and the cap 141 can be brought into close contact with the inkjet head 41 of the head unit 31 facing the home position (see FIG. 4). ).

  The flushing means 132 has a flushing receiving portion 151 that receives ejection from the inkjet head 41. The flushing receiving portion 151 is a concave groove provided so as to encompass the movement locus of the inkjet head 41 over the head movement area 64 except for the installation area of the suction means 131, and the head unit 31 is located at any position. Even when facing, the ink jet head 41 is configured to receive the discharge. As a result, not only ink droplets discarded and discharged from the inkjet head 41 but also ink droplets protruding from the end of the roll paper R can be received by the flushing receiving portion 151 (see FIG. 4).

  Here, “discarding discharge” is for discharging ink having increased viscosity (due to vaporization or the like) in the discharge nozzle 57 of the inkjet head 41 and supplying new ink in good condition to the discharge nozzle 57. In addition, ink is ejected from the (all) ejection nozzles 57 of the inkjet head 41, and the inkjet head 41 can be maintained in an appropriate state by performing discard ejection.

  The control means 25 is connected to each means of the inkjet printer 1 and controls the entire inkjet printer 1 in an integrated manner. Further, the control means 25 is provided with a display (not shown), various indicators and the like as an interface with the user.

  Next, the main control system of the inkjet printer 1 will be described with reference to FIG. As shown in the figure, the ink jet printer 1 has a printer interface 161 and inputs print data (image data and print control data) and various commands transmitted from a host computer, and various data in the ink jet printer 1. A data input / output unit 162 for outputting the data to the host computer, the X-axis linear encoder 66, the pressure sensor 115, and the like, a detection unit 163 for performing various detections, a printing unit 21, and a feeding unit 22. A printing unit 164 for printing on the roll paper R, an ink supply means 23, an ink supply unit 165 for supplying ink under pressure, a head driver 171 for driving the inkjet head 41, and a carriage motor. Motor driver 172 for driving the motor, feed motor A drive unit 166 having various drivers for driving each unit, such as a feed motor driver 173 for driving, a pump drive driver 174 for driving the pressure pump 112, and the like, and a control for controlling the entire inkjet printer 1 connected to these units. Part 167.

  The control unit 167 includes a storage area that can be temporarily stored, a RAM 181 that is used as a work area for control processing, and various storage areas, and includes control programs and control data (color conversion tables and character modification). A peripheral control circuit (in which a ROM 182 for storing a table and the like), a CPU 183 for arithmetic processing of various data, a logic circuit for handling interface signals with peripheral circuits, and a timer 185 for performing time control are incorporated. P-CON) 184 and a bus 186 for connecting them to each other.

  The RAM 181 stores various data (for example, a pressurizable volume of the cartridge case 93 and an ink volume per unit ink droplet number) used in a method for calculating the additional pressure described later, and each discharge nozzle. An ink droplet counter (not shown) for counting the number of ink droplets ejected from 57 is provided. The ROM 182 stores a drive control program for driving and controlling the pressurization pump 112, and the additional pressurization time is calculated according to the drive control program.

  The control unit 167 causes the CPU 183 to perform arithmetic processing on various data input from each unit via the P-CON 184 and various data in the RAM 181 in accordance with a control program stored in the ROM 182, and the processing result is transmitted via the P-CON 184. Each part is controlled by outputting to each part.

  For example, the pressure sensor 115 of the pressurizing unit 83 is connected to the control unit 167, and the control unit 167 intermittently operates the air supply mechanism 111 (the pressurization pump 112) based on the detection result of the pressure sensor 115. , The pressure applied to the ink cartridge 81, that is, the supply pressure of the ink supplied from the ink cartridge 81 is adjusted within a preset operating pressure (Pmin to Pmax).

  More specifically, the pressure sensor 115 is set to detect the lower limit pressure Pmin of the operating pressure, and the control unit 167 detects the lower limit pressure Pmin, including the initial pressurization. After (pressure detection step), the pressurization time T (following the time from the lower limit pressure Pmin of the operating pressure to the upper limit pressure Pmax of the operating pressure is reached by driving the pressurizing pump 112. sec). Then, the pressurizing pump 112 is driven for the calculated additional pressurizing time (pump driving process), thereby adjusting the pressurizing force of the ink cartridge 81 to the operating pressure.

  In the inkjet head 41, a compensation pressure range is set in advance as the pressure of the functional liquid that compensates for the discharge of a predetermined amount (volume) of functional droplets, and the operating pressure satisfies this compensation pressure range. Is set to

  Here, a method for calculating the additional pressurizing time will be described. In the present embodiment, the quotient of the air supply amount A (ml / sec) per unit time of the pressurizing pump 112 and the necessary air amount B (ml) necessary for the lower limit pressure Pmin to reach the upper limit pressure Pmax. The additional pressurizing time T is calculated, and the additional pressurizing time calculating method needs to calculate the air supply amount measuring step for measuring the air supply amount A per unit time and the necessary air amount B. And an additional air pressure calculating step for calculating an additional air pressure time T based on the measured air supply amount A per unit time and the calculated required air amount B.

  In the air supply amount measurement step, in the initial pressurization in which the pressurizing pump 112 pressurizes the cartridge case 93 opened to the atmosphere up to the upper limit pressure Pmax, the pressurization force of the cartridge case 93 is changed to the lower limit pressure Pmin after the initial pressurization starts The air supply amount A per unit time is calculated by dividing the arrival time t (sec) until reaching the air supply amount a (ml) supplied by the pressurizing pump 112 during the arrival time t. .

  For the arrival time t, the pressure sensor 115 detects the lower limit pressure Pmin after the start of driving of the pressurization pump 112 for initial pressurization using the timer 185 incorporated in the control unit 167 (P-CON184). The time until this is measured as time t.

  The air supply amount a is calculated based on the pressurized volume of the cartridge case 93 at the start of the initial pressurization and the pressure change amount of the applied pressure within the arrival time t according to Boyle-Charles' law. The pressurization volume remains in the ink pack 91 at the start of initial pressurization from the pressurizable volume (ml) of the cartridge case 93 (that is, the volume of the ink cartridge 91 subtracted from the volume of the cartridge case 93). Calculated by subtracting the ink volume (ml). In this case, the ink volume remaining in the ink pack 91 is calculated by a calculation process based on a preset (stored) ink volume when the ink is full, an ink volume per unit ink droplet number, and a counter value of the ink counter. The

  In the present embodiment, the air supply amount measurement step is performed every time the power of the inkjet printer 1 is turned on.

  The required air amount calculation step is the same as the calculation method of the air supply amount a, and calculates the pressurization volume V of the cartridge case 93 when the lower limit pressure Pmin is detected. A necessary air amount B required for the pressure to reach the upper limit pressure Pmax is calculated based on Boyle-Charles' law.

  In the additional pressurization time calculation step, the additional pressurization time T is calculated by dividing the calculated air supply amount A per unit time and the calculated required air amount B. Note that the air supply amount A per unit time calculated in the air supply amount measurement step is stored in the RAM 181, and after the initial pressurization, the air supply amount A stored in the RAM 181 is used. The additional pressurizing time T is calculated. In this case, the air supply amount A stored in the RAM 181 is updated every time the air supply amount measurement step is performed.

  Thus, in the inkjet printer 1 of the present embodiment, when the lower limit pressure Pmin is detected, the air supply amount A per unit time of the pressurization pump 112 and the pressurization volume V when the lower limit pressure Pmin is detected. Based on this, the additional pressurizing time T is calculated, and the pressurizing pump 112 is driven for the calculated additional pressurizing time T. Therefore, the pressurizing force of the cartridge case 93 can be maintained at a predetermined operating pressure. Ink can be supplied from the ink cartridge 81 at a supply pressure of a predetermined operating pressure.

  In the present embodiment, the air supply amount A per unit time of the pressurizing pump 112 is periodically measured, and the additional pressurizing time T is calculated while reflecting the value. Since the additional pressurizing time T is set while measuring the pump performance, the pump of the pressurizing pump 112 is provided with a relatively simple configuration such as providing the pressure sensor 115 for detecting the lower limit pressure Pmin of the operating pressure. The pressurizing force immediately after the additional pressurization does not vary due to performance deterioration over time, and the drive frequency of the pressurization pump 112 can be made appropriate.

  Next, a modified example of the above-described additional pressurization time calculation method will be described. The pump performance (air supply amount A per unit time) of the pressurizing pump 112 decreases with time (in the case of a diaphragm pump, due to leaks from check valves provided in the air intake and exhaust sections) It is known). Therefore, in the modified example, the air supply amount measurement process described above is modified, and the air supply amount set by relating the cumulative drive time of the pressurization pump 112 and the air supply amount per unit time of the pressurization pump 112. The air supply amount A per unit time was calculated using the information.

  The air supply amount information is obtained by experimentally determining and associating the cumulative drive time of the pressurization pump 112 and the air supply amount per unit time. The relationship shown in FIG. 9 is obtained between the air supply amount per hour and this relationship is expressed as a table or a relational expression.

  The RAM 181 of the control unit 167 stores air supply amount information and is provided with a counter that counts up the cumulative driving time of the pressurizing pump 112. The controller 167 uses the timer 185 to measure the driving time each time the pressure pump 112 is driven, and adds the measurement result to the counter (counts up), thereby accumulating the pressure pump 112. The driving time is calculated.

  In the air supply amount measurement process of the modified example, when the lower limit pressure Pmin is detected by the pressure sensor 115, the cumulative driving time of the pressurizing pump 112 at the time of detecting the lower limit pressure Pmin is acquired from the counter, and the acquired cumulative driving time is calculated. By applying the air supply amount information, the air supply amount A per unit time of the pressurizing pump 112 corresponding to the detection of the lower limit pressure Pmin is calculated. In this case, the air supply amount measurement step can be performed at an arbitrary frequency. For example, the air supply amount measurement step may be performed only at the time of initial pressurization or each time the additional pressurization time T is calculated. Good.

  Next, a droplet discharge device according to a second embodiment of the present invention will be described. This droplet discharge device is incorporated into a so-called flat display production line, and a functional liquid in which a functional material is dissolved in a solvent is introduced into a functional droplet discharge head, and a droplet discharge method (an inkjet method is applied). ) To form a color layer of a color filter of a liquid crystal display device composed of three colors of R (red), G (green), and B (blue), a light emitting element that becomes each pixel of an organic EL device, and the like. .

  As shown in FIG. 10, the droplet discharge device 201 is mounted on the machine base 202, the drawing device 203 having a functional liquid droplet discharge head 252 widely mounted on the entire area of the machine base 202, and drawing on the machine base 202. A head maintenance device 204 attached to the device 203, a functional liquid supply device 205 for supplying a functional liquid to the functional liquid droplet ejection head 252, and a control device 206 (not shown) for controlling each device are provided. In the droplet discharge device 201, based on the control by the control device 206, the drawing device 203 performs drawing processing on the workpiece introduced from the workpiece transfer robot (not shown), and the head maintenance device 204 Maintenance processing (maintenance) is appropriately performed on the functional liquid droplet ejection head 252.

  The drawing apparatus 203 includes an X-axis table 211 extending in the main scanning direction (X-axis direction), a Y-axis table 212 orthogonal to the X-axis table 211, and a main carriage 213 movably attached to the Y-axis table 212. And a head unit 214 that is supported by the main carriage 213 and on which (a plurality of) functional liquid droplet ejection heads 252 are mounted.

  The X-axis table 211 is configured by movably mounting a set table 222 for setting a workpiece W on an X-axis slider 221 that drives an X-axis motor (not shown) that constitutes a drive system in the X-axis direction. The set table 222 includes a suction table 223 for sucking and setting the work W, and a θ table 224 for correcting the position of the work W set on the suction table 223 in the θ-axis direction. The machine base 202 is provided with an X-axis linear sensor 225 for grasping the movement position of the set table 222 that moves in the X-axis direction.

  The Y-axis table 212 is configured in substantially the same manner as the X-axis table 211, has a Y-axis motor (not shown) driving Y-axis slider 231 that constitutes a Y-axis direction drive system, and the main carriage 213 is It is mounted so as to be movable in the axial direction. In addition, a Y-axis linear sensor 232 for grasping the movement position of the head unit 214 that moves in the Y-axis direction is provided so as to be arranged in parallel with the Y-axis table 212. The Y-axis table 212 is disposed so as to straddle the X-axis table 211 and the head maintenance device 204 disposed on the machine base 202 via the left and right support columns 235 erected on the machine base 202. The area where the X-axis table 211 and the Y-axis table 212 intersect is the drawing area where the workpiece W is drawn, and the area where the Y-axis table 212 and the head maintenance device 204 intersect is the maintenance area where the functional liquid droplet ejection head 252 is maintained. It has become.

  The main carriage 213 includes a carriage main body 241 that supports the head unit 214, a θ rotation mechanism 242 for correcting the position of the head unit 214 in the θ direction via the carriage main body 241, and a θ rotation mechanism 242. A substantially I-shaped suspension member (not shown) for supporting the carriage main body 241 (head unit 214) on the Y-axis table 212 is configured.

  The head unit 214 is configured by mounting a functional liquid droplet ejection head 252 on a head plate 251 via a head holding member (not shown). Since the functional liquid droplet ejection head 252 is configured in the same manner as the ink jet head 41 described above, description thereof will be omitted here.

  A series of operations of the drawing apparatus 203 during the drawing process will be described. First, the position of the head unit 214 is corrected via the θ rotation mechanism 242, and the work W set on the set table 222 via the θ table 224 is described. Position correction is performed. Next, the X-axis table 211 is driven to reciprocate the workpiece W in the main scanning (X-axis) direction. In synchronization with the forward movement of the work W, the plurality of functional liquid droplet ejection heads 252 are driven, and the functional liquid droplets are selectively ejected onto the work W. When the forward movement of the workpiece W is completed, the Y-axis table 212 is driven to move the head unit 214 in the sub-scanning (Y-axis) direction. Then, the work W is moved back in the main scanning direction and the functional liquid droplet ejection head 252 is driven again. As described above, in the drawing process, the movement of the workpiece W in the X-axis direction, the ejection driving (main scanning) of the functional liquid droplet ejection head 252 synchronized therewith, and the movement of the head unit 214 in the Y-axis direction (sub-scanning). ) And alternately, a predetermined drawing pattern is drawn on the workpiece W.

  The head maintenance device 204 includes a moving table 261 mounted on the machine base 202, a flushing unit 262, a suction unit 263, and a wiping unit 264. The moving table 261 is configured to be movable in the X-axis direction. The suction unit 263 and the wiping unit 264 are installed on the moving table 261 side by side in the X-axis direction. When the functional liquid droplet ejection head 252 is maintained, the moving table 261 is driven, and the suction unit 263 and the wiping unit 264 are moved. It is configured to face the maintenance area as appropriate.

  The flushing unit 262 discards the functional liquid discharged from the all-function liquid droplet ejection head 252 of the head unit 214 during a series of drawing processes on the (single) workpiece W, and the workpiece W from the workpiece W during the drawing process. For receiving the protruding functional liquid, the suction table 223 has a pair of drawing flushing boxes 271 provided along a pair of sides (peripheries) parallel to the Y-axis direction. Therefore, when the workpiece W is reciprocated in the X-axis direction via the suction table 223 (either immediately before the head unit 214 faces the workpiece W or immediately after the head unit 214 is separated from the workpiece W by one main scanning). In this case as well, the all-function liquid droplet ejection head 252 of the head unit 214 can sequentially face the drawing flushing box 271 and appropriately receive the functional liquid for waste ejection performed immediately before and after the drawing operation on the workpiece W. be able to.

  The suction unit 263 corresponds to the suction unit 131 described above, and has a cap 281 that is in close contact with the nozzle surface of the functional liquid droplet ejection head 252 and a single that can suck the functional liquid droplet ejection head 252 through the cap 281. Equipped with a suction pump.

  The wiping unit 264 is for wiping off dirt adhering to the nozzle surface of the functional liquid droplet ejection head 252 with the wiping sheet 291 sprayed with the cleaning liquid. The wiping unit 264 winds up the wiping sheet 291 wound in a roll shape. A winding unit 292 is provided, a cleaning liquid supply unit 293 that sprays the cleaning liquid onto the wiping sheet 291 that has been fed out, and a wiping unit 294 that wipes the nozzle surface with the wiping sheet 291 sprayed with the cleaning liquid.

  The functional liquid supply device 205 includes three functional liquid tanks 301 corresponding to the three functional liquids of R, G, and B, a tank holder 302 that accommodates the three functional liquid tanks 301, and a functional liquid in the functional liquid tank 301. A plurality of (three in this embodiment) liquid supply pipes connecting the pressurizing means 303 for pressurizing and feeding the liquid to the functional liquid droplet ejection head 252, the three functional liquid tanks 301, and the functional liquid droplet ejection head 252. A tube 304 and a pressure adjustment valve 305 that is configured in the same manner as that of the inkjet printer 1 and is interposed in each liquid supply tube 304 are provided.

  The functional liquid supply device 205 is configured in substantially the same manner as the above-described ink supply means, and the functional liquid tank 301 is of a cartridge type. The tank holder 302 is provided with a functional liquid storage section (not shown) for storing each functional liquid tank 301, and a connection adapter (illustrated) for connecting the functional liquid tank 301 and the air pipe 323 to each functional liquid storage section. Is omitted). The pressurizing means 303 has an air supply mechanism 321 that supplies air to each functional liquid tank 301 via a connection adapter, and when a single pressurization pump 322 constituting the air supply mechanism 321 is driven, Air is supplied to each functional liquid tank 301 via the pipe 323. Also in this case, a regulator 324 with a solenoid and a pressure sensor 325 are interposed in the air pipe 323 so that the inside of the air pipe 323 is maintained at a predetermined operating pressure.

  The control device 206 is configured by a personal computer or the like, and includes an input means (keyboard or the like) for performing data input and various settings, a display for visually confirming input data and various setting states, and the like (both illustrated). (Omitted).

  The main control system of the droplet discharge device 201 will be described with reference to FIG. The droplet discharge device 201 includes a drawing unit 331 having a drawing device 203, a head maintenance unit 332 having a head maintenance device 204, a functional liquid supply unit 333 having a functional liquid supply device 205, a drawing device 203, and a head maintenance device. 204 and a functional liquid supply device 205, each of which includes a detection unit 334 that performs various detections, and various drivers that drive each unit (the drawing driver 341 for driving the drawing device 203, and the head maintenance device 204). A drive unit 335 having a head maintenance driver 342, a functional liquid supply driver 343 for driving the functional liquid supply device, and the like, and a control unit 336 (control device) connected to each unit and controlling the entire droplet discharge device 201 206).

  The control unit 336 stores an interface 351 for connecting the drawing device 203 and the head maintenance device 204, and various data from the drawing device 203, the head maintenance device 204, and the functional liquid supply device 205, and stores various data. The RAM 353, ROM 354, CPU 355, timer 356, and internal bus 357 are configured in substantially the same manner as the control unit 336 of the inkjet printer 1 except that the hard disk 352 for storing a program for processing is provided. I have.

  As in the case of the inkjet printer 1 described above, the control unit 336 controls the supply pressure of the functional liquid supplied from the functional liquid tank 301 based on the detection result of the pressure sensor 325 so as to adjust the pressure within the preset operating pressure. The pressure pump 322 is driven and controlled. That is, first, when the pressurizing pump 322 is driven to initially pressurize the functional liquid tank 301 to the upper limit pressure of the operating pressure, and the lower limit pressure set by the pressure sensor 325 is detected, per unit time of the pressurizing pump 322. The additional pressurization time is calculated based on the air supply amount and the pressurization volume when the lower limit pressure is detected, and the pressurization pump 322 is driven for the calculated additional pressurization time. The method for calculating the additional pressurizing time is also in accordance with the above-described inkjet printer 1, and the same effect as the above-described inkjet printer 1 can be obtained.

  Next, as an electro-optical device (flat panel display) manufactured using the droplet discharge device 201 of the present embodiment, a color filter, a liquid crystal display device, an organic EL device, a plasma display (PDP device), an electron emission device ( FED devices, SED devices), and active matrix substrates formed in these display devices will be described as an example for their structures and manufacturing methods. Note that an active matrix substrate refers to a substrate on which a thin film transistor, a source line electrically connected to the thin film transistor, and a data line are formed.

First, a method for manufacturing a color filter incorporated in a liquid crystal display device, an organic EL device or the like will be described. FIG. 12 is a flowchart showing the manufacturing process of the color filter, and FIG. 13 is a schematic cross-sectional view of the color filter 600 (filter base body 600A) of this embodiment shown in the order of the manufacturing process.
First, in the black matrix forming step (S101), a black matrix 602 is formed on a substrate (W) 601 as shown in FIG. The black matrix 602 is formed of metal chromium, a laminate of metal chromium and chromium oxide, or resin black. In order to form the black matrix 602 made of a metal thin film, a sputtering method, a vapor deposition method, or the like can be used. Further, when forming the black matrix 602 made of a resin thin film, a gravure printing method, a photoresist method, a thermal transfer method, or the like can be used.

Subsequently, in a bank formation step (S102), a bank 603 is formed in a state of being superimposed on the black matrix 602. That is, first, as shown in FIG. 13B, a resist layer 604 made of a negative transparent photosensitive resin is formed so as to cover the substrate 601 and the black matrix 602. Then, an exposure process is performed with the upper surface covered with a mask film 605 formed in a matrix pattern shape.
Further, as shown in FIG. 13C, the resist layer 604 is patterned by etching an unexposed portion of the resist layer 604 to form a bank 603. When the black matrix is formed from resin black, it is possible to use both the black matrix and the bank.
The bank 603 and the black matrix 602 below the bank 603 become partition wall portions 607b for partitioning the pixel regions 607a, and in the subsequent colored layer forming step, the colored liquid layers (film forming portions) 608R, 608G, When forming 608B, the landing area of the functional droplet is defined.

The filter substrate 600A is obtained through the above black matrix forming step and bank forming step.
In the present embodiment, as the material of the bank 603, a resin material whose surface is lyophobic (hydrophobic) is used. Since the surface of the substrate (glass substrate) 601 is lyophilic (hydrophilic), the droplets into each pixel region 607a surrounded by the bank 603 (partition wall portion 607b) in the colored layer forming step described later. The landing position accuracy is improved.

  Next, in the colored layer forming step (S103), as shown in FIG. 13D, functional droplets are ejected by the functional droplet ejection head 252, and each pixel region 607a surrounded by the partition wall portion 607b is disposed. Let it land. In this case, the functional liquid droplet ejection head 252 is used to introduce functional liquids (filter materials) of three colors of R, G, and B to eject functional liquid droplets. Note that the three-color arrangement pattern of R, G, and B includes a stripe arrangement, a mosaic arrangement, and a delta arrangement.

Thereafter, the functional liquid is fixed through a drying process (a process such as heating) to form three colored layers 608R, 608G, and 608B. If the colored layers 608R, 608G, and 608B are formed, the process proceeds to the protective film forming step (S104), and as shown in FIG. A protective film 609 is formed so as to cover the upper surface.
That is, after the protective film coating liquid is discharged over the entire surface of the substrate 601 where the colored layers 608R, 608G, and 608B are formed, the protective film 609 is formed through a drying process.
Then, after forming the protective film 609, the color filter 600 proceeds to a film forming process such as ITO (Indium Tin Oxide) which becomes a transparent electrode in the next process.

  FIG. 14 is a cross-sectional view of a principal part showing a schematic configuration of a passive matrix liquid crystal device (liquid crystal device) as an example of a liquid crystal display device using the color filter 600 described above. By attaching auxiliary elements such as a liquid crystal driving IC, a backlight, and a support to the liquid crystal device 620, a transmissive liquid crystal display device as a final product can be obtained. Since the color filter 600 is the same as that shown in FIG. 13, the corresponding parts are denoted by the same reference numerals, and the description thereof is omitted.

The liquid crystal device 620 is roughly constituted by a color filter 600, a counter substrate 621 made of a glass substrate, and a liquid crystal layer 622 made of an STN (Super Twisted Nematic) liquid crystal composition sandwiched between them. The filter 600 is arranged on the upper side (observer side) in the figure.
Although not shown, polarizing plates are disposed on the outer surfaces of the counter substrate 621 and the color filter 600 (surfaces opposite to the liquid crystal layer 622 side), and the polarizing plates positioned on the counter substrate 621 side are also provided. A backlight is disposed outside.

On the protective film 609 of the color filter 600 (on the liquid crystal layer side), a plurality of strip-shaped first electrodes 623 elongated in the left-right direction in FIG. 14 are formed at predetermined intervals. The color of the first electrode 623 A first alignment film 624 is formed so as to cover the surface opposite to the filter 600 side.
On the other hand, a plurality of strip-shaped second electrodes 626 elongated in a direction orthogonal to the first electrode 623 of the color filter 600 are formed on the surface of the counter substrate 621 facing the color filter 600 at a predetermined interval. A second alignment film 627 is formed so as to cover the surface of the two electrodes 626 on the liquid crystal layer 622 side. The first electrode 623 and the second electrode 626 are made of a transparent conductive material such as ITO.

The spacer 628 provided in the liquid crystal layer 622 is a member for keeping the thickness (cell gap) of the liquid crystal layer 622 constant. The sealing material 629 is a member for preventing the liquid crystal composition in the liquid crystal layer 622 from leaking to the outside. Note that one end portion of the first electrode 623 extends to the outside of the sealing material 629 as a lead-out wiring 623a.
A portion where the first electrode 623 and the second electrode 626 intersect with each other is a pixel, and the color layers 608R, 608G, and 608B of the color filter 600 are located in the portion that becomes the pixel.

  In a normal manufacturing process, patterning of the first electrode 623 and application of the first alignment film 624 are performed on the color filter 600 to create a portion on the color filter 600 side. Patterning of the electrode 626 and application of the second alignment film 627 are performed to create a portion on the counter substrate 621 side. Thereafter, a spacer 628 and a sealing material 629 are formed in the portion on the counter substrate 621 side, and the portion on the color filter 600 side is bonded in this state. Next, liquid crystal constituting the liquid crystal layer 622 is injected from the inlet of the sealing material 629, and the inlet is closed. Thereafter, both polarizing plates and the backlight are laminated.

  The droplet discharge device 201 according to the embodiment applies, for example, the spacer material (functional liquid) constituting the cell gap, and before the portion on the color filter 600 side is bonded to the portion on the counter substrate 621 side, the sealing material The liquid crystal (functional liquid) can be uniformly applied to the region surrounded by 629. In addition, the above-described sealing material 629 can be printed by the functional liquid droplet ejection head 252. Further, the first and second alignment films 624 and 627 can be applied by the functional liquid droplet ejection head 252.

FIG. 15 is a cross-sectional view of an essential part showing a schematic configuration of a second example of a liquid crystal device using the color filter 600 manufactured in the present embodiment.
The liquid crystal device 630 is significantly different from the liquid crystal device 620 in that the color filter 600 is arranged on the lower side (the side opposite to the observer side) in the figure.
The liquid crystal device 630 is generally configured by sandwiching a liquid crystal layer 632 made of STN liquid crystal between a color filter 600 and a counter substrate 631 made of a glass substrate or the like. Although not shown, polarizing plates and the like are provided on the outer surfaces of the counter substrate 631 and the color filter 600, respectively.

On the protective film 609 of the color filter 600 (on the liquid crystal layer 632 side), a plurality of strip-shaped first electrodes 633 elongated in the depth direction in the figure are formed at predetermined intervals, and the liquid crystal of the first electrodes 633 is formed. A first alignment film 634 is formed so as to cover the surface on the layer 632 side.
A plurality of strip-shaped second electrodes 636 extending in a direction orthogonal to the first electrode 633 on the color filter 600 side are formed on the surface of the counter substrate 631 facing the color filter 600 at a predetermined interval. A second alignment film 637 is formed so as to cover the surface of the second electrode 636 on the liquid crystal layer 632 side.

The liquid crystal layer 632 is provided with a spacer 638 for keeping the thickness of the liquid crystal layer 632 constant, and a sealing material 639 for preventing the liquid crystal composition in the liquid crystal layer 632 from leaking to the outside. Yes.
Similarly to the liquid crystal device 620 described above, a portion where the first electrode 633 and the second electrode 636 intersect with each other is a pixel, and the colored layers 608R, 608G, and 608B of the color filter 600 are located in the portion that becomes the pixel. Is configured to do.

FIG. 16 shows a third example in which a liquid crystal device is configured using a color filter 600 to which the present invention is applied. FIG. 16 is an exploded perspective view showing a schematic configuration of a transmissive TFT (Thin Film Transistor) type liquid crystal device. It is.
In the liquid crystal device 650, the color filter 600 is arranged on the upper side (observer side) in the drawing.

The liquid crystal device 650 includes a color filter 600, a counter substrate 651 disposed so as to face the color filter 600, a liquid crystal layer (not shown) sandwiched therebetween, and an upper surface side (observer side) of the color filter 600. The polarizing plate 655 is generally configured by a polarizing plate 655 and a polarizing plate (not shown) disposed on the lower surface side of the counter substrate 651.
A liquid crystal driving electrode 656 is formed on the surface of the protective film 609 of the color filter 600 (the surface on the counter substrate 651 side). The electrode 656 is made of a transparent conductive material such as ITO, and is a full surface electrode that covers the entire region where a pixel electrode 660 described later is formed. An alignment film 657 is provided so as to cover the surface of the electrode 656 opposite to the pixel electrode 660.

  An insulating layer 658 is formed on a surface of the counter substrate 651 facing the color filter 600, and the scanning lines 661 and the signal lines 662 are formed on the insulating layer 658 so as to be orthogonal to each other. A pixel electrode 660 is formed in a region surrounded by the scanning lines 661 and the signal lines 662. Note that in an actual liquid crystal device, an alignment film is provided over the pixel electrode 660, but the illustration is omitted.

  In addition, a thin film transistor 663 including a source electrode, a drain electrode, a semiconductor, and a gate electrode is incorporated in a portion surrounded by the cutout portion of the pixel electrode 660 and the scanning line 661 and the signal line 662. . The thin film transistor 663 is turned on / off by application of a signal to the scanning line 661 and the signal line 662 so that energization control to the pixel electrode 660 can be performed.

  The liquid crystal devices 620, 630, and 650 of the above examples have a transmissive configuration, but a reflective layer or a semi-transmissive reflective layer is provided to form a reflective liquid crystal device or a transflective liquid crystal device. You can also.

  Next, FIG. 17 is a cross-sectional view of a main part of a display region of the organic EL device (hereinafter simply referred to as a display device 700).

The display device 700 is schematically configured with a circuit element portion 702, a light emitting element portion 703, and a cathode 704 laminated on a substrate (W) 701.
In this display device 700, light emitted from the light emitting element portion 703 to the substrate 701 side is transmitted through the circuit element portion 702 and the substrate 701 and emitted to the observer side, and the light emitting element portion 703 is opposite to the substrate 701. After the light emitted to the side is reflected by the cathode 704, the light passes through the circuit element portion 702 and the substrate 701 and is emitted to the observer side.

  A base protective film 706 made of a silicon oxide film is formed between the circuit element portion 702 and the substrate 701, and an island-like semiconductor film 707 made of polycrystalline silicon is formed on the base protective film 706 (on the light emitting element portion 703 side). Is formed. In the left and right regions of the semiconductor film 707, a source region 707a and a drain region 707b are formed by high concentration cation implantation, respectively. A central portion where no cation is implanted is a channel region 707c.

  In the circuit element portion 702, a transparent gate insulating film 708 covering the base protective film 706 and the semiconductor film 707 is formed, and a position corresponding to the channel region 707c of the semiconductor film 707 on the gate insulating film 708 is formed. For example, a gate electrode 709 made of Al, Mo, Ta, Ti, W or the like is formed. A transparent first interlayer insulating film 711 a and second interlayer insulating film 711 b are formed on the gate electrode 709 and the gate insulating film 708. Further, contact holes 712a and 712b are formed through the first and second interlayer insulating films 711a and 711b and communicating with the source region 707a and the drain region 707b of the semiconductor film 707, respectively.

A transparent pixel electrode 713 made of ITO or the like is patterned and formed on the second interlayer insulating film 711b in a predetermined shape, and the pixel electrode 713 is connected to the source region 707a through the contact hole 712a. .
A power line 714 is disposed on the first interlayer insulating film 711a, and the power line 714 is connected to the drain region 707b through the contact hole 712b.

  Thus, the driving thin film transistors 715 connected to the pixel electrodes 713 are formed in the circuit element portion 702, respectively.

The light emitting element portion 703 includes a functional layer 717 stacked on each of the plurality of pixel electrodes 713, and a bank portion 718 provided between each pixel electrode 713 and the functional layer 717 to partition each functional layer 717. It is roughly structured.
The pixel electrode 713, the functional layer 717, and the cathode 704 provided on the functional layer 717 constitute a light emitting element. Note that the pixel electrode 713 is formed by patterning in a substantially rectangular shape in plan view, and a bank portion 718 is formed between the pixel electrodes 713.

Bank unit 718, for example SiO, and SiO _2, the inorganic bank layer is formed of an inorganic material such as TiO _2, 718a (first bank layer), stacked on the inorganic bank layer 718a, an acrylic resin, such as polyimide resin It is composed of an organic bank layer 718b (second bank layer) having a trapezoidal cross section formed of a resist having excellent heat resistance and solvent resistance. A part of the bank portion 718 is formed on the peripheral edge of the pixel electrode 713.
Between each bank portion 718, an opening 719 that gradually expands upward with respect to the pixel electrode 713 is formed.

The functional layer 717 includes a hole injection / transport layer 717a formed on the pixel electrode 713 in a stacked state in the opening 719 and a light emitting layer 717b formed on the hole injection / transport layer 717a. Has been. Note that another functional layer having other functions may be further formed adjacent to the light emitting layer 717b. For example, it is possible to form an electron transport layer.
The hole injection / transport layer 717a has a function of transporting holes from the pixel electrode 713 side and injecting them into the light emitting layer 717b. The hole injection / transport layer 717a is formed by discharging a first composition (functional liquid) containing a hole injection / transport layer forming material. A known material is used as the hole injection / transport layer forming material.

  The light emitting layer 717b emits light in red (R), green (G), or blue (B), and discharges a second composition (functional liquid) containing a light emitting layer forming material (light emitting material). Is formed. As the solvent (nonpolar solvent) of the second composition, a known material insoluble in the hole injection / transport layer 717a is preferably used, and such a nonpolar solvent is used as the second composition of the light emitting layer 717b. By using the light emitting layer 717b, the light emitting layer 717b can be formed without re-dissolving the hole injection / transport layer 717a.

  The light emitting layer 717b is configured such that holes injected from the hole injection / transport layer 717a and electrons injected from the cathode 704 are recombined in the light emitting layer to emit light.

  The cathode 704 is formed so as to cover the entire surface of the light emitting element portion 703, and plays a role of flowing current to the functional layer 717 in a pair with the pixel electrode 713. Note that a sealing member (not shown) is disposed on the cathode 704.

Next, a manufacturing process of the display device 700 will be described with reference to FIGS.
As shown in FIG. 18, the display device 700 includes a bank part forming step (S111), a surface treatment step (S112), a hole injection / transport layer forming step (S113), a light emitting layer forming step (S114), It is manufactured through an electrode formation step (S115). In addition, a manufacturing process is not restricted to what is illustrated, and when other processes are removed as needed, it may be added.

First, in the bank part forming step (S111), as shown in FIG. 19, an inorganic bank layer 718a is formed on the second interlayer insulating film 711b. The inorganic bank layer 718a is formed by forming an inorganic film at a formation position and then patterning the inorganic film using a photolithography technique or the like. At this time, a part of the inorganic bank layer 718 a is formed so as to overlap with the peripheral edge of the pixel electrode 713.
When the inorganic bank layer 718a is formed, an organic bank layer 718b is formed on the inorganic bank layer 718a as shown in FIG. This organic bank layer 718b is also formed by patterning using a photolithography technique or the like, similarly to the inorganic bank layer 718a.
In this way, the bank portion 718 is formed. Accordingly, an opening 719 that opens upward with respect to the pixel electrode 713 is formed between the bank portions 718. The opening 719 defines a pixel region.

In the surface treatment step (S112), a lyophilic process and a lyophobic process are performed. The regions to be subjected to the lyophilic treatment are the first stacked portion 718aa of the inorganic bank layer 718a and the electrode surface 713a of the pixel electrode 713. These regions are made lyophilic by plasma treatment using, for example, oxygen as a treatment gas. Is done. This plasma treatment also serves to clean the ITO that is the pixel electrode 713.
In addition, the lyophobic treatment is performed on the wall surface 718s of the organic bank layer 718b and the upper surface 718t of the organic bank layer 718b. )
By performing this surface treatment process, when forming the functional layer 717 using the functional liquid droplet ejection head 252, the functional liquid droplets can be landed more reliably on the pixel area. It is possible to prevent the functioning liquid droplets from overflowing from the opening 719.

  The display device base 700A is obtained through the above steps. The display device base 700A is placed on the set table 222 of the droplet discharge device 201 shown in FIG. 10, and the following hole injection / transport layer forming step (S113) and light emitting layer forming step (S114) are performed. .

  As shown in FIG. 21, in the hole injection / transport layer forming step (S113), the first composition containing the hole injection / transport layer forming material is transferred from the functional liquid droplet ejection head 252 to each opening 719 that is a pixel region. Discharge inside. Thereafter, as shown in FIG. 22, a drying process and a heat treatment are performed to evaporate the polar solvent contained in the first composition, and a hole injection / transport layer 717a is formed on the pixel electrode (electrode surface 713a) 713.

Next, the light emitting layer forming step (S114) will be described. In this light emitting layer forming step, as described above, in order to prevent re-dissolution of the hole injection / transport layer 717a, a hole injection / transport layer 717a is used as a solvent for the second composition used in forming the light emitting layer. A non-polar solvent insoluble in.
However, since the hole injection / transport layer 717a has a low affinity for the nonpolar solvent, the hole injection / transport layer 717a has a low affinity even if the second composition containing the nonpolar solvent is discharged onto the hole injection / transport layer 717a. There is a possibility that the injection / transport layer 717a and the light emitting layer 717b cannot be adhered to each other or the light emitting layer 717b cannot be applied uniformly.
Therefore, in order to increase the surface affinity of the hole injection / transport layer 717a with respect to the nonpolar solvent and the light emitting layer forming material, it is preferable to perform a surface treatment (surface modification treatment) before forming the light emitting layer. In this surface treatment, a surface modifying material which is the same solvent as the non-polar solvent of the second composition used in forming the light emitting layer or a similar solvent is applied on the hole injection / transport layer 717a, and this is applied. This is done by drying.
By performing such a treatment, the surface of the hole injection / transport layer 717a is easily adapted to the nonpolar solvent, and in the subsequent process, the second composition containing the light emitting layer forming material is added to the hole injection / transport layer. It can be uniformly applied to 717a.

  Then, as shown in FIG. 23, the second composition containing the light-emitting layer forming material corresponding to one of the colors (blue (B) in the example of FIG. 23) is used as a functional droplet as a pixel region ( A predetermined amount is driven into the opening 719). The second composition driven into the pixel region spreads on the hole injection / transport layer 717a and fills the opening 719. Even if the second composition deviates from the pixel region and lands on the upper surface 718t of the bank portion 718, the upper composition 718t is subjected to the liquid repellent treatment as described above, and thus the second composition An object is easy to roll into the opening 719.

  Thereafter, by performing a drying process or the like, the discharged second composition is dried, the nonpolar solvent contained in the second composition is evaporated, and as shown in FIG. 24, a hole injection / transport layer 717a is obtained. A light emitting layer 717b is formed thereon. In the case of this figure, a light emitting layer 717b corresponding to blue (B) is formed.

  Similarly, using the functional liquid droplet ejection head 252, as shown in FIG. 25, the same steps as in the case of the light emitting layer 717b corresponding to the blue (B) described above are sequentially performed, and other colors (red (R) and red (R) and A light emitting layer 717b corresponding to green (G)) is formed. Note that the order in which the light-emitting layers 717b are formed is not limited to the illustrated order, and may be formed in any order. For example, the order of formation can be determined according to the light emitting layer forming material. Further, the arrangement pattern of the three colors R, G, and B includes a stripe arrangement, a mosaic arrangement, a delta arrangement, and the like.

  As described above, the functional layer 717, that is, the hole injection / transport layer 717 a and the light emitting layer 717 b are formed on the pixel electrode 713. And it transfers to a counter electrode formation process (S115).

In the counter electrode forming step (S115), as shown in FIG. 26, a cathode 704 (counter electrode) is formed on the entire surface of the light emitting layer 717b and the organic bank layer 718b by, for example, vapor deposition, sputtering, CVD, or the like. In the present embodiment, the cathode 704 is configured, for example, by laminating a calcium layer and an aluminum layer.
On top of the cathode 704, an Al film and an Ag film as electrodes, and a protective layer such as SiO ₂ and SiN for preventing oxidation thereof are provided as appropriate.

  After forming the cathode 704 in this way, the display device 700 is obtained by performing other processing such as sealing processing and wiring processing for sealing the upper portion of the cathode 704 with a sealing member.

Next, FIG. 27 is an exploded perspective view of a main part of a plasma display device (PDP device: hereinafter simply referred to as a display device 800). In the figure, the display device 800 is shown with a part thereof cut away.
The display device 800 includes a first substrate 801, a second substrate 802, and a discharge display portion 803 formed between the first substrate 801 and the second substrate 802, which are disposed to face each other. The discharge display unit 803 includes a plurality of discharge chambers 805. Among the plurality of discharge chambers 805, the three discharge chambers 805 of the red discharge chamber 805R, the green discharge chamber 805G, and the blue discharge chamber 805B are arranged to form one pixel.

Address electrodes 806 are formed in stripes at predetermined intervals on the upper surface of the first substrate 801, and a dielectric layer 807 is formed so as to cover the address electrodes 806 and the upper surface of the first substrate 801. On the dielectric layer 807, partition walls 808 are provided so as to be positioned between the address electrodes 806 and along the address electrodes 806. The partition 808 includes one extending on both sides in the width direction of the address electrode 806 as shown, and one not shown extending in a direction orthogonal to the address electrode 806.
A region partitioned by the partition 808 is a discharge chamber 805.

  A phosphor 809 is disposed in the discharge chamber 805. The phosphor 809 emits red (R), green (G), or blue (B) fluorescence, and the red phosphor 809R is located at the bottom of the red discharge chamber 805R, and the green discharge chamber 805G. A green phosphor 809G and a blue phosphor 809B are disposed at the bottom and the blue discharge chamber 805B, respectively.

On the lower surface of the second substrate 802 in the figure, a plurality of display electrodes 811 are formed in stripes at predetermined intervals in a direction orthogonal to the address electrodes 806. A dielectric layer 812 and a protective film 813 made of MgO or the like are formed so as to cover them.
The first substrate 801 and the second substrate 802 are bonded so that the address electrodes 806 and the display electrodes 811 face each other in a state of being orthogonal to each other. The address electrode 806 and the display electrode 811 are connected to an AC power source (not shown).
When the electrodes 806 and 811 are energized, the phosphor 809 emits light in the discharge display portion 803, and color display is possible.

In the present embodiment, the address electrode 806, the display electrode 811, and the phosphor 809 can be formed using the droplet discharge device 201 shown in FIG. Hereinafter, a process of forming the address electrode 806 in the first substrate 801 will be exemplified.
In this case, the following steps are performed with the first substrate 801 placed on the set table 222 of the droplet discharge device 201.
First, a liquid material (functional liquid) containing a conductive film wiring forming material is landed on the address electrode formation region as a functional liquid droplet by the functional liquid droplet ejection head 252. This liquid material is obtained by dispersing conductive fine particles such as metal in a dispersion medium as a conductive film wiring forming material. As the conductive fine particles, metal fine particles containing gold, silver, copper, palladium, nickel, or the like, a conductive polymer, or the like is used.

  When the replenishment of the liquid material is completed for all the address electrode formation regions to be replenished, the address material 806 is formed by drying the discharged liquid material and evaporating the dispersion medium contained in the liquid material. .

By the way, although the formation of the address electrode 806 has been exemplified in the above, the display electrode 811 and the phosphor 809 can also be formed through the above steps.
In the case of forming the display electrode 811, as in the case of the address electrode 806, a liquid material (functional liquid) containing a conductive film wiring forming material is landed on the display electrode formation region as a functional droplet.
In the case of forming the phosphor 809, a liquid material (functional liquid) containing a fluorescent material corresponding to each color (R, G, B) is ejected as droplets from the functional liquid droplet ejection head 252, and this is handled. Land in the color discharge chamber 805.

Next, FIG. 28 is a cross-sectional view of an essential part of an electron emission device (also referred to as an FED device or an SED device: hereinafter simply referred to as a display device 900). In the figure, a part of the display device 900 is shown as a cross section.
The display device 900 is schematically configured to include a first substrate 901 and a second substrate 902 that are arranged to face each other, and a field emission display portion 903 formed therebetween. The field emission display unit 903 includes a plurality of electron emission units 905 arranged in a matrix.

  A first element electrode 906a and a second element electrode 906b constituting the cathode electrode 906 are formed on the upper surface of the first substrate 901 so as to be orthogonal to each other. In addition, a conductive film 907 having a gap 908 is formed in a portion partitioned by the first element electrode 906a and the second element electrode 906b. In other words, the first element electrode 906a, the second element electrode 906b, and the conductive film 907 constitute a plurality of electron emission portions 905. The conductive film 907 is made of, for example, palladium oxide (PdO), and the gap 908 is formed by forming after forming the conductive film 907.

  An anode electrode 909 facing the cathode electrode 906 is formed on the lower surface of the second substrate 902. A lattice-shaped bank portion 911 is formed on the lower surface of the anode electrode 909, and a phosphor 913 is disposed in each downward opening 912 surrounded by the bank portion 911 so as to correspond to the electron emission portion 905. Yes. The phosphor 913 emits fluorescence of any color of red (R), green (G), and blue (B), and each opening 912 has a red phosphor 913R, a green phosphor 913G, and a blue color. The phosphors 913B are arranged in the predetermined pattern described above.

  The first substrate 901 and the second substrate 902 configured as described above are bonded together with a minute gap. In this display device 900, electrons that jump out of the first element electrode 906 a or the second element electrode 906 b serving as the cathode through the conductive film (gap 908) 907 are formed on the phosphor 913 formed on the anode electrode 909 serving as the anode. When excited, it emits light and enables color display.

  Also in this case, as in the other embodiments, the first element electrode 906a, the second element electrode 906b, the conductive film 907, and the anode electrode 909 can be formed using the droplet discharge device 201 and each color. The phosphors 913R, 913G, and 913B can be formed using the droplet discharge device 201.

  The first element electrode 906a, the second element electrode 906b, and the conductive film 907 have the planar shape shown in FIG. 29A. When these are formed, as shown in FIG. In addition, the bank portion BB is formed (photolithographic method), leaving portions where the first element electrode 906a, the second element electrode 906b, and the conductive film 907 are previously formed. Next, the first element electrode 906a and the second element electrode 906b were formed in the groove portion constituted by the bank portion BB (inkjet method using the droplet discharge device 201), and the solvent was dried to form a film. After that, a conductive film 907 is formed (an ink jet method using the droplet discharge device 201). Then, after forming the conductive film 907, the bank portion BB is removed (ashing peeling process), and the process proceeds to the above forming process. As in the case of the organic EL device described above, it is preferable to perform a lyophilic process on the first substrate 901 and the second substrate 902 and a lyophobic process on the bank portions 911 and BB.

  As other electro-optical devices, devices such as metal wiring formation, lens formation, resist formation, and light diffuser formation are conceivable. By using the droplet discharge device 201 described above for manufacturing various electro-optical devices (devices), various electro-optical devices can be efficiently manufactured.

1 is an external perspective view of an inkjet printer according to a first embodiment of the present invention. 1 is an external perspective view of an inkjet printer according to a first embodiment of the present invention when a roll paper cover, an opening / closing cover, and a cartridge cover are opened. It is an external appearance perspective view of an inkjet head (functional droplet discharge head). It is a model explanatory drawing of an inkjet printer. It is explanatory drawing of an ink cartridge. It is a schematic explanatory drawing of a pressure regulating valve. It is a control block diagram of an inkjet printer. It is explanatory drawing about the drive method of a pressurization pump. It is explanatory drawing which showed the relationship between the cumulative drive time of a pressurization pump, and the air supply amount per unit time. It is the model top view which showed typically the droplet discharge apparatus concerning 2nd Embodiment of this invention. It is. It is the block diagram explaining the main control system of the droplet discharge apparatus. It is a flowchart explaining a color filter manufacturing process. (A)-(e) is a schematic cross section of the color filter shown to the manufacturing process order. It is principal part sectional drawing which shows schematic structure of the liquid crystal device using the color filter to which this invention is applied. It is principal part sectional drawing which shows schematic structure of the liquid crystal device of the 2nd example using the color filter to which this invention is applied. It is principal part sectional drawing which shows schematic structure of the liquid crystal device of the 3rd example using the color filter to which this invention is applied. It is principal part sectional drawing of the display apparatus which is an organic electroluminescent apparatus. It is a flowchart explaining the manufacturing process of the display apparatus which is an organic electroluminescent apparatus. It is process drawing explaining formation of an inorganic bank layer. It is process drawing explaining formation of an organic substance bank layer. It is process drawing explaining the process in which a positive hole injection / transport layer is formed. It is process drawing explaining the state in which the positive hole injection / transport layer was formed. It is process drawing explaining the process in which a blue light emitting layer is formed. It is process drawing explaining the state in which the blue light emitting layer was formed. It is process drawing explaining the state in which the light emitting layer of each color was formed. It is process drawing explaining formation of a cathode. It is a principal part disassembled perspective view of the display apparatus which is a plasma type display apparatus (PDP apparatus). It is principal part sectional drawing of the display apparatus which is an electron emission apparatus (FED apparatus). It is the top view (a) around the electron emission part of a display apparatus, and the top view (b) which shows the formation method.

Explanation of symbols

DESCRIPTION OF SYMBOLS 1 Inkjet printer 23 Ink supply means 25 Control means 41 Inkjet head 81 Ink cartridge 112 Pressure pump 115 Pressure sensor 121 Pressure adjustment valve 167 Control part

Claims (12)

In order to maintain a predetermined operating pressure, after the initial pressurization of the functional fluid tank to the upper limit pressure of the operating pressure by the pressurizing pump, the pressurizing pump is driven when the operating pressure drops to the lower limit pressure. This is a control method of the functional liquid supply device that pressurizes and supplies the functional liquid to the functional liquid droplet ejection head for ejecting the functional liquid droplets from the functional liquid tank by applying pressure to the functional liquid tank. And
A pressure detection step of detecting whether or not the pressure in the functional liquid tank has reached the lower limit pressure;
A pressurized volume measuring step for measuring a pressurized volume obtained by removing the volume of the functional liquid remaining in the functional liquid tank from the total volume of the functional liquid tank;
An air supply amount measuring step for measuring an air supply amount per unit time of the pressure pump;
Based on the measurement results of the pressurized volume measuring step and the air supply amount measuring step, by driving the pressurizing pump, it is possible to calculate the additional pressurizing time until the upper limit pressure is reached from the lower limit pressure. Pressurization time calculation step;
A functional liquid supply comprising: the additional pressurization time calculated when the pressure of the functional liquid tank drops and reaches the lower limit pressure; and a pump driving step of driving the pressurization pump. Control method of the device. The air supply amount measurement step includes a time measurement step of measuring a time from the start of the initial pressurization until the lower limit pressure is reached,
A reference supply amount measurement step for measuring a reference air supply amount supplied by the pressurization pump from the start of the initial pressurization until the lower limit pressure is reached;
A calculation step of calculating the air supply amount per unit time based on the measurement time in the time measurement step and the reference air supply amount in the reference supply amount measurement step. The method for controlling a functional liquid supply apparatus according to claim 1. The air supply amount measuring step includes a cumulative driving time measuring step of measuring a cumulative driving time of the pressure pump,
Calculation for calculating the air supply amount per unit time based on the air supply amount information relating the cumulative drive time and the air supply amount per unit time of the pressurizing pump and the measured cumulative drive time The method for controlling a functional liquid supply apparatus according to claim 1, further comprising: a step. In order to maintain a predetermined operating pressure, after the initial pressurization of the functional fluid tank to the upper limit pressure of the operating pressure by the pressurizing pump, the pressurizing pump is driven when the operating pressure drops to the lower limit pressure. A functional liquid supply device that pressurizes and supplies the functional liquid to the functional liquid droplet discharge head that discharges functional liquid droplets from the functional liquid tank by applying additional pressure to the functional liquid tank;
Pressure detecting means for detecting whether or not the pressure in the functional liquid tank reaches the lower limit pressure;
A pressurized volume measuring means for measuring a pressurized volume obtained by removing the volume of the functional liquid remaining in the functional liquid tank from the total volume of the functional liquid tank;
An air supply amount measuring means for measuring an air supply amount per unit time of the pressure pump;
Control means for controlling the drive of the pressurization pump, the control means by driving the pressurization pump based on the measurement results by the pressurization volume measurement means and the air supply amount measurement means, Calculate the additional pressurization time until the upper limit pressure is reached from the lower limit pressure,
When the pressure of the functional liquid tank drops and reaches the lower limit pressure, the functional liquid supply device drives the pressure pump for the calculated additional pressurization time. The air supply amount measuring means is a time measuring means for measuring a time from the start of the initial pressurization until the lower limit pressure is reached;
A reference supply amount measuring means for measuring a reference air supply amount supplied by the pressurizing pump from the start of the initial pressurization until the lower limit pressure is reached;
Calculating means for calculating the air supply amount per unit time based on the measurement time by the time measurement means and the reference air supply amount by the reference supply amount measurement means. The functional liquid supply apparatus according to claim 4. The air supply amount measuring means is a cumulative driving time measuring means for measuring a cumulative driving time of the pressure pump;
Calculation for calculating the air supply amount per unit time based on the air supply amount information relating the cumulative drive time and the air supply amount per unit time of the pressurizing pump and the measured cumulative drive time The functional liquid supply device according to claim 4, further comprising: means.   7. The functional liquid supply port of the functional liquid tank is disposed so that a height position thereof is lower than a nozzle surface of the functional liquid droplet ejection head. The functional liquid supply device described in 1.   The pressure adjusting valve for adjusting the pressure of the functional liquid fed from the functional liquid tank is interposed between the functional liquid tank and the functional liquid droplet ejection head. The functional liquid supply apparatus according to any one of 4 to 7. A functional liquid droplet is ejected by driving the functional liquid droplet ejection head while moving the functional liquid droplet ejection head relative to the drawing object, thereby drawing a predetermined drawing pattern on the drawing object. In the droplet discharge device,
A liquid droplet ejection apparatus comprising the functional liquid supply apparatus according to claim 4.   10. A method of manufacturing an electro-optical device, wherein the droplet discharge device according to claim 9 is used to form a film forming portion with functional droplets on the drawing object.   An electro-optical device using the droplet discharge device according to claim 9, wherein a film forming portion is formed by functional droplets on the drawing object.   An electronic apparatus comprising the electro-optical device manufactured by the method for manufacturing the electro-optical device according to claim 10 or the electro-optical device according to claim 11.

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