JP2006224223A - Cutting tool made of surface covered cemented carbide with hard covering layer displaying excellent abrasion resistance in high speed cutting work of heat resisting alloy - Google Patents

Cutting tool made of surface covered cemented carbide with hard covering layer displaying excellent abrasion resistance in high speed cutting work of heat resisting alloy Download PDF

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JP2006224223A
JP2006224223A JP2005039108A JP2005039108A JP2006224223A JP 2006224223 A JP2006224223 A JP 2006224223A JP 2005039108 A JP2005039108 A JP 2005039108A JP 2005039108 A JP2005039108 A JP 2005039108A JP 2006224223 A JP2006224223 A JP 2006224223A
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Tsutomu Ogami
強 大上
Koichi Matsumura
宏一 松村
Kazunori Sato
和則 佐藤
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Mitsubishi Materials Corp
Mitsubishi Materials Kobe Tools Corp
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Abstract

<P>PROBLEM TO BE SOLVED: To provide a cutting tool made of surface covered cemented carbide a hard covering layer of which displays excellent abrasion resistance in high speed cutting work of heat resisting alloy. <P>SOLUTION: This cutting tool made of surface covered cemented carbide is made forming the hard covering layer, on the surface of a carbide substrate by vapor deposition, which is constituted of (a) an upper layer and a lower layer both of which are made of (Cr, Al, B)N, the upper layer which has average layer thickness of 0.5 to 1.5μm and the lower layer which has average layer thickness of 2 to 6μm respectively, (b) the upper layer which has an alternately laminated structure of a thin layer A and a thin layer B single layer average layer thickness of both of which is respectively 5 to 20n (nanometer), the thin layer A and B which are constituted of a (Cr, Al, B)N layer to satisfy a specific composition formula, and (c) the lower layer which has a single phase structure and is made of the (Cr, Al, B)N layer to satisfy a composition formula: [<SB>Cr1-(X+Y)</SB>Al<SB>X</SB>B<SB>Y</SB>]N (but X shows 0.50 to 0.70 and Y shows 0.005 to 0.05 in an atomic ratio). <P>COPYRIGHT: (C)2006,JPO&NCIPI

Description

この発明は、硬質被覆層がすぐれた熱伝導性を有し、さらに高温硬さと高温強度に加えて、高温耐酸化性も具備し、したがって特に高熱発生を伴なうNi合金やCo合金、さらにTi合金などの耐熱合金の高速切削加工に用いた場合に、すぐれた耐摩耗性を発揮する表面被覆超硬合金製切削工具(以下、被覆超硬工具という)に関するものである。   In the present invention, the hard coating layer has excellent thermal conductivity, and in addition to high-temperature hardness and high-temperature strength, it also has high-temperature oxidation resistance, and therefore, particularly Ni alloys and Co alloys with high heat generation, The present invention relates to a surface-coated cemented carbide cutting tool (hereinafter referred to as a coated carbide tool) that exhibits excellent wear resistance when used for high-speed cutting of a heat-resistant alloy such as a Ti alloy.

一般に、被覆超硬工具には、各種の鋼や鋳鉄などの被削材の旋削加工や平削り加工にバイトの先端部に着脱自在に取り付けて用いられるスローアウエイチップ、前記被削材の穴あけ切削加工などに用いられるドリルやミニチュアドリル、さらに前記被削材の面削加工や溝加工、肩加工などに用いられるソリッドタイプのエンドミルなどがあり、また前記スローアウエイチップを着脱自在に取り付けて前記ソリッドタイプのエンドミルと同様に切削加工を行うスローアウエイエンドミル工具などが知られている。   In general, coated carbide tools include a throw-away tip that is attached to the tip of a cutting tool for turning and planing of various steels and cast irons, and drilling of the work material. There are drills and miniature drills used for processing, etc., and solid type end mills used for chamfering, grooving, shoulder processing, etc. of the work material. A slow-away end mill tool that performs cutting work in the same manner as a type end mill is known.

また、被覆超硬工具として、炭化タングステン(以下、WCで示す)基超硬合金または炭窒化チタン(以下、TiCNで示す)基サーメットで構成された超硬基体の表面に、単一相構造を有し、かつ、
組成式:[Cr1-X AlX]N(ただし、原子比で、Xは0.50〜0.70を示す)、
を満足するCrとAlの複合窒化物[以下、(Cr,Al)Nで示す]層からなる硬質被覆層を2〜8μmの平均層厚で蒸着形成してなる被覆超硬工具が知られており、かかる従来被覆超硬工具においては、硬質被覆層を構成する前記(Cr,Al)N層が、構成成分であるAlによって高温硬さ、同Crによって高温強度、さらにCrとAlの共存含有によってすぐれた高温耐酸化性を具備することから、切削時に相対的に高い発熱を伴うNi合金やCo合金、さらにTi合金などの耐熱合金の切削加工に用いた場合にも、すぐれた耐摩耗性を示すことも知られている。
In addition, as a coated carbide tool, a single-phase structure is formed on the surface of a cemented carbide substrate made of tungsten carbide (hereinafter referred to as WC) -based cemented carbide or titanium carbonitride (hereinafter referred to as TiCN) -based cermet. Have and
Composition formula: [Cr 1-X Al X ] N (wherein X is 0.50 to 0.70 in atomic ratio),
Coated carbide tools formed by vapor-depositing a hard coating layer composed of a composite nitride of Cr and Al [hereinafter referred to as (Cr, Al) N] layer satisfying the requirements with an average layer thickness of 2 to 8 μm are known. In such a conventional coated carbide tool, the (Cr, Al) N layer constituting the hard coating layer is hard at high temperature due to Al as a constituent component, high temperature strength due to the Cr, and coexistence of Cr and Al. Excellent wear resistance even when used for cutting heat-resistant alloys such as Ni alloys, Co alloys, and Ti alloys that generate relatively high heat during cutting. It is also known to show.

さらに、上記の被覆超硬工具が、例えば図2に概略説明図で示される物理蒸着装置の1種であるアークイオンプレーティング装置に上記の超硬基体を装入し、ヒータで装置内を、例えば500℃の温度に加熱した状態で、硬質被覆層である(Cr,Al)N層の組成に対応した組成を有するCr−Al合金がセットされたカソード電極(蒸発源)とアノード電極との間に、例えば電流:90Aの条件でアーク放電を発生させ、同時に装置内に反応ガスとして窒素ガスを導入して、例えば2Paの反応雰囲気とし、一方上記超硬基体には、例えば−100Vのバイアス電圧を印加した条件で、前記超硬基体の表面に、上記(Cr,Al)N層からなる硬質被覆層を蒸着することにより製造されることも知られている。
特許第3027502号明細書
Furthermore, the above-mentioned coated carbide tool is, for example, the above-mentioned carbide substrate is inserted into an arc ion plating apparatus which is one type of physical vapor deposition apparatus schematically shown in FIG. For example, a cathode electrode (evaporation source) in which a Cr—Al alloy having a composition corresponding to the composition of the (Cr, Al) N layer, which is a hard coating layer, is heated to a temperature of 500 ° C. and an anode electrode. In the meantime, for example, arc discharge is generated under the condition of current: 90 A, and simultaneously, nitrogen gas is introduced into the apparatus as a reaction gas to obtain a reaction atmosphere of, for example, 2 Pa. On the other hand, the carbide substrate has a bias of, for example, −100 V It is also known that it is produced by vapor-depositing a hard coating layer composed of the (Cr, Al) N layer on the surface of the cemented carbide substrate under the condition of applying a voltage.
Japanese Patent No. 3027502

近年の切削加工装置の高性能化はめざましく、一方で切削加工に対する省力化および省エネ化、さらに低コスト化の要求は強く、これに伴い、切削加工は高速化の傾向にあるが、上記の従来被覆超硬工具においては、これを切削時に相対的に高い発熱を伴うNi合金やCo合金、さらにTi合金などの耐熱合金の切削加工を通常の切削加工条件で行うのに用いる場合には、上記の通り切刃部は通常の正常摩耗形態を呈し、問題はなく、所定の耐摩耗性を発揮するが、特に前記耐熱合金の切削加工を、一段と高い熱発生を伴なう高速切削加工条件で行うのに用いた場合には、硬質被覆層である(Cr,Al)N層に偏摩耗の原因となる熱塑性変形が発生し、この結果摩耗進行が著しく促進するようになることから、比較的短時間で使用寿命に至るのが現状である。   In recent years, the performance of cutting devices has been dramatically improved, while on the other hand, there is a strong demand for labor saving, energy saving, and cost reduction for cutting, and with this, cutting tends to be faster. In a coated carbide tool, when it is used for cutting a heat-resistant alloy such as a Ni alloy or a Co alloy with a relatively high heat generation during cutting, or a Ti alloy under normal cutting conditions, the above The cutting edge part has a normal normal wear form, and there is no problem and exhibits a predetermined wear resistance. Especially, the cutting process of the heat-resistant alloy is performed under a high-speed cutting process condition with higher heat generation. When used to perform, the (Cr, Al) N layer, which is a hard coating layer, undergoes thermoplastic deformation that causes uneven wear, and as a result, the progress of wear is significantly accelerated. Short service life The it is the status quo.

そこで、本発明者等は、上述のような観点から、特に上記の耐熱合金の高速切削加工で硬質被覆層がすぐれた耐摩耗性を発揮する被覆超硬工具を開発すべく、上記の従来被覆超硬工具の硬質被覆層を構成する(Cr,Al)N層に着目し、研究を行った結果、
(a)上記の従来硬質被覆層を構成する(Cr,Al)N層において、これにB成分を含有させて、CrとAlとB(ボロン)の複合窒化物[以下、(Cr,Al,B)Nで示す]層とすると、B成分の含有に比例して層の熱伝導性が向上し、層はすぐれた抜熱効果を発揮するようになるが、前記の従来(Cr,Al)N層のもつすぐれた高温硬さおよび高温耐酸化性、さらに高温強度を損なわずに含有可能な割合は精々0.5〜5原子%程度までで、この程度のB含有割合では、耐熱合金の高速切削加工に要求される高い熱伝導性を確保することができず、これらの要求に満足に対応させるためには前記0.5〜5原子%をはるかに越えた20〜35原子%のB含有が必要であり、一方20〜35原子%のB成分を含有した(Cr,Al,B)N層を硬質被覆層として実用に供するためには、所定量のCrを含有させて所定の高温強度を確保する必要があるが、この場合Al成分の含有割合はきわめて低い状態となるのが避けられず、この結果高温硬さおよび高温耐酸化性のきわめて低いものとなること。
In view of the above, the present inventors have developed the above-mentioned conventional coating in order to develop a coated carbide tool exhibiting excellent wear resistance with a hard coating layer particularly in high-speed cutting of the above heat-resistant alloy. As a result of conducting research by focusing on the (Cr, Al) N layer that constitutes the hard coating layer of carbide tools,
(A) In the (Cr, Al) N layer constituting the conventional hard coating layer, a B component is added to this, and a composite nitride of Cr, Al and B (boron) [hereinafter referred to as (Cr, Al, B) indicated as N], the thermal conductivity of the layer is improved in proportion to the content of the B component, and the layer exhibits an excellent heat removal effect. However, the conventional (Cr, Al) The N layer has excellent high-temperature hardness and high-temperature oxidation resistance, and the proportion that can be contained without impairing the high-temperature strength is at most about 0.5 to 5 atomic%. The high thermal conductivity required for high-speed cutting cannot be ensured, and in order to satisfy these requirements satisfactorily, 20-35 atomic% of B, far exceeding the above 0.5-5 atomic%. Containment, while containing 20-35 atomic% B component (Cr, Al, ) In order to use the N layer as a hard coating layer for practical use, it is necessary to contain a predetermined amount of Cr to ensure a predetermined high-temperature strength. In this case, the content ratio of the Al component is extremely low. Inevitable, this results in extremely low high temperature hardness and high temperature oxidation resistance.

(b)上記(a)の(Cr,Al,B)N層において、B含有割合をきわめて高く、一方B成分の含有割合を高めた分、Al含有割合を低くして、
組成式:[Cr1-(E+F)Al]N(ただし、原子比で、Eは0.01〜0.06、Fは0.20〜0.35を示す)を満足する(Cr,Al,B)N層と、
Al含有割合を相対的に高く、一方B含有割合を相対的に低くして、
組成式:[Ti1-(M+N)Al]N(ただし、原子比で、Mは0.25〜0.40、Nは0.05〜0.15を示す)を満足する(Cr,Al,B)N層、
を、それぞれの一層平均層厚を5〜20nm(ナノメーター)の薄層とした状態で、交互積層すると、この結果の(Cr,Al,B)N層においては、上記薄層の交互積層構造によって、上記の高B含有の(Cr,Al,B)N層(以下、薄層Aという)のもつすぐれた熱伝導性と、相対的にB含有割合が低く、その分Al含有割合を高くした(Cr,Al,B)N層(以下、薄層Bという)のもつ所定の相対的に高い高温硬さを具備するようになること。
上記の高B含有の薄層Aによるすぐれた熱伝導性と、上記の高Al含有の薄層Bによる相対的に高い高温硬さおよび高温耐酸化性を具備するようになること。
(B) In the (Cr, Al, B) N layer of (a) above, the B content is extremely high, while the B content is increased, the Al content is decreased,
Composition formula: [Cr 1− (E + F) Al E B F ] N (wherein E is 0.01 to 0.06 and F is 0.20 to 0.35 in atomic ratio) (Cr , Al, B) N layer;
Al content ratio is relatively high, while B content ratio is relatively low,
Formula: [Ti 1- (M + N ) Al M B N] N ( provided that an atomic ratio, M is 0.25 to 0.40, N denotes the 0.05 to 0.15) satisfies (Cr , Al, B) N layer,
Are alternately laminated in a state where each layer has an average layer thickness of 5 to 20 nm (nanometers), and in the resultant (Cr, Al, B) N layer, the above-mentioned thin layer is alternately laminated. Therefore, the excellent thermal conductivity of the (Cr, Al, B) N layer (hereinafter referred to as the thin layer A) having a high B content and a relatively low B content ratio, and a correspondingly high Al content ratio. The (Cr, Al, B) N layer (hereinafter referred to as the thin layer B) has a predetermined relatively high high-temperature hardness.
It has excellent thermal conductivity due to the high B-containing thin layer A and relatively high high-temperature hardness and high-temperature oxidation resistance due to the high Al-containing thin layer B.

(c)上記(b)の薄層Aと薄層Bの交互積層構造を有する(Cr,Al,B)N層は、耐熱合金の高速切削加工で要求される、すぐれた熱伝導性と所定の高温硬さおよび高温耐酸化性を具備するものの、未だ十分満足な高温硬さおよび高温耐酸化性を有するものでないので、これを硬質被覆層の上部層として設け、一方同下部層として、熱伝導性は不十分であるが、相対的にAl成分の含有割合が高く、すぐれた高温硬さおよび高温耐酸化性を具備する上記(a)の従来硬質被覆層を構成する(Cr,Al)N層にB成分を0.5〜5原子%の割合で含有させた(Ti,Al,B)N層、すなわち、
組成式:[Cr1-(X+Y)Al]N(ただし、原子比で、Xは0.50〜0.70、Yは0.005〜0.05を示す)を満足する、単一相構造の(Cr,Al,B)N層、
を設けた構造にすると、この結果の硬質被覆層は、すぐれた熱伝導性に加えて、高温硬さと高温耐酸化性を備えたものとなるので、この硬質被覆層を蒸着形成してなる被覆超硬工具は、上記の高熱発生を伴う耐熱合金の高速切削加工でも、偏摩耗の原因となる熱塑性変形の発生なく、すぐれた耐摩耗性を長期に亘って発揮すること。
以上(a)〜(c)に示される研究結果を得たのである。
(C) The (Cr, Al, B) N layer having the alternate layered structure of the thin layer A and the thin layer B of (b) above has excellent thermal conductivity and a predetermined value required for high-speed cutting of a heat-resistant alloy. However, it does not have a sufficiently satisfactory high temperature hardness and high temperature oxidation resistance, so it is provided as an upper layer of the hard coating layer, while Although the conductivity is insufficient, the content ratio of the Al component is relatively high, and the conventional hard coating layer (a) having excellent high-temperature hardness and high-temperature oxidation resistance is formed (Cr, Al) (Ti, Al, B) N layer containing B component in a proportion of 0.5 to 5 atomic% in the N layer, that is,
Composition formula: [Cr 1- (X + Y ) Al X B Y] N ( provided that an atomic ratio, X is 0.50 to 0.70, Y denotes a 0.005 to 0.05) satisfies the single (Cr, Al, B) N layer of single phase structure,
The resulting hard coating layer has high temperature hardness and high temperature oxidation resistance in addition to excellent thermal conductivity. Carbide tools should exhibit excellent wear resistance over a long period of time without the occurrence of thermoplastic deformation that causes uneven wear, even in high-speed cutting of heat-resistant alloys with high heat generation.
The research results shown in (a) to (c) above were obtained.

この発明は、上記の研究結果に基づいてなされたものであって、超硬基体の表面に、
(a)いずれも(Cr,Al,B)Nからなる上部層と下部層で構成し、前記上部層は0.5〜1.5μm、前記下部層は2〜6μmの平均層厚をそれぞれ有し、
(b)上記上部層は、いずれも一層平均層厚が5〜20nm(ナノメ−タ−)の薄層Aと薄層Bの交互積層構造を有し、
上記薄層Aは、
組成式:[Cr1-(E+F)Al]N(ただし、原子比で、Eは0.01〜0.06、Fは0.20〜0.35を示す)を満足する(Cr,Al,B)N層、
上記薄層Bは、
組成式:[Cr1-(M+N)Al]N(ただし、原子比で、Mは0.25〜0.40、Nは0.05〜0.15を示す)を満足する(Cr,Al,B)N層、からなり、
(c)上記下部層は、単一相構造を有し、
組成式:[(Cr1-(X+Y)Al]N(ただし、原子比で、Xは0.50〜0.70、Yは0.005〜0.05を示す)を満足する(Cr,Al,B)N層、
からなる硬質被覆層を蒸着形成してなる、耐熱合金の高速切削加工で硬質被覆層がすぐれた耐摩耗性を発揮する被覆超硬工具に特徴を有するものである。
This invention was made based on the above research results, and on the surface of the carbide substrate,
(A) Both are composed of an upper layer and a lower layer made of (Cr, Al, B) N, the upper layer has an average layer thickness of 0.5 to 1.5 μm, and the lower layer has an average layer thickness of 2 to 6 μm. And
(B) Each of the upper layers has an alternate layered structure of thin layers A and thin layers B each having an average layer thickness of 5 to 20 nm (nanometer),
The thin layer A is
Composition formula: [Cr 1− (E + F) Al E B F ] N (wherein E is 0.01 to 0.06 and F is 0.20 to 0.35 in atomic ratio) (Cr , Al, B) N layer,
The thin layer B is
Composition formula: [Cr 1- (M + N ) Al M B N] N ( provided that an atomic ratio, M is 0.25 to 0.40, N denotes the 0.05 to 0.15) satisfies (Cr , Al, B) N layer,
(C) the lower layer has a single phase structure;
Composition formula: [(Cr 1- (X + Y) Al X B Y] N ( provided that an atomic ratio, X is 0.50 to 0.70, Y satisfies the showing the 0.005 to 0.05) ( Cr, Al, B) N layer,
It is characterized by a coated carbide tool that exhibits excellent wear resistance in high-speed cutting of a heat-resistant alloy formed by vapor-depositing a hard coating layer made of

つぎに、この発明の被覆超硬工具の硬質被覆層に関し、上記の通りに数値限定した理由を説明する。
(a)下部層の組成式および平均層厚
上記の通り、硬質被覆層を構成する(Cr,Al,B)N層におけるAl成分には高温硬さ、同Cr成分には高温強度を向上させると共に、AlおよびCrが共存含有した状態で高温耐酸化性を向上させ、さらに同B成分には熱伝導性を向上させる作用があり、下部層ではAl成分の含有割合を相対的に多くして、高い高温硬さと高温耐酸化性を維持するが、Alの含有割合を示すX値がCrとBとの合量に占める割合(原子比、以下同じ)で0.50未満では、所望のすぐれた高温硬さと高温耐酸化性を確保することができず、摩耗進行が急激に促進するようになり、一方Alの割合を示す同X値が同0.70を越えると、高温強度が急激に低下し、この結果チッピング(微少欠け)などが発生し易くなることから、X値を0.50〜0.70と定めた。
また、Bの割合を示すY値がCrとAlの合量に占める割合で、0.005未満では、所定の熱伝導性を確保することができず、一方同Y値が0.05を超えると、高温強度に明確な低下傾向が現れるようになることから、Y値を0.005〜0.05と定めた。
さらに、その平均層厚が2μm未満では、自身のもつすぐれた高温硬さおよび高温耐酸化性を硬質被覆層に長期に亘って付与できず、工具寿命短命の原因となり、一方その平均層厚が6μmを越えると、チッピングが発生し易くなることから、その平均層厚を2〜6μmと定めた。
Next, the reason why the numerical values of the hard coating layer of the coated carbide tool of the present invention are limited as described above will be described.
(A) Composition formula and average layer thickness of the lower layer As described above, the (Cr, Al, B) N layer constituting the hard coating layer improves the high temperature hardness for the Al component and the high temperature strength for the Cr component. At the same time, the high-temperature oxidation resistance is improved in the state where Al and Cr coexist, and the B component has the effect of improving the thermal conductivity. In the lower layer, the content ratio of the Al component is relatively increased. While maintaining high high-temperature hardness and high-temperature oxidation resistance, if the X value indicating the Al content is less than 0.50 in terms of the total amount of Cr and B (atomic ratio, the same shall apply hereinafter), the desired excellent High temperature hardness and high temperature oxidation resistance cannot be ensured, and wear progresses rapidly. On the other hand, if the X value indicating the proportion of Al exceeds 0.70, the high temperature strength rapidly increases. As a result, chipping (slight chipping) is likely to occur. Therefore, the X value was set to 0.50 to 0.70.
Further, the Y value indicating the ratio of B is the ratio of the total amount of Cr and Al, and if it is less than 0.005, the predetermined thermal conductivity cannot be ensured, while the Y value exceeds 0.05. Then, since a clear decreasing tendency appears in the high temperature strength, the Y value was set to 0.005 to 0.05.
Furthermore, if the average layer thickness is less than 2 μm, the excellent high-temperature hardness and high-temperature oxidation resistance cannot be imparted to the hard coating layer over a long period of time, resulting in a short tool life, while the average layer thickness is If it exceeds 6 μm, chipping is likely to occur. Therefore, the average layer thickness is set to 2 to 6 μm.

(b)上部層の薄層Aの組成式
上部層の薄層Aの(Cr,Al,B)NにおけるB成分には、上記の通り相対的にその含有割合を高くして、熱伝導性を向上させ、もって高熱発生を伴う耐熱合金の高速切削加工ですぐれた抜熱効果を発揮させ、偏摩耗の原因となる熱塑性変形の発生を防止する作用があるが、その含有割合を示すF値がCrとAlの合量に占める割合で、0.20未満では前記作用に所望のすぐれた効果を確保することができず、一方同F値が0.35を越えると、高温強度が急激に低下し、これが上部層全体の高温強度低下の原因となり、チッピングが発生し易くなることから、F値を0.20〜0.35と定めた。
また、Alの割合を示すE値がCrとBの合量に占める割合で、0.01未満では、最低限の高温硬さを確保することができず、摩耗促進の原因となり、一方同E値が0.06を超えると、高温強度が低下するようになり、チッピング発生の原因となることから、E値を0.01〜0.06と定めた。
(B) Composition formula of upper layer thin layer A For the B component in (Cr, Al, B) N of the upper layer thin layer A, the content ratio is relatively increased as described above, and the thermal conductivity is increased. F, which has an effect of preventing the occurrence of thermoplastic deformation that causes uneven wear, by exhibiting an excellent heat removal effect in high-speed cutting of a heat-resistant alloy with high heat generation. Is a proportion of the total amount of Cr and Al, and if it is less than 0.20, the desired excellent effect cannot be ensured for the above action, whereas if the F value exceeds 0.35, the high-temperature strength rapidly increases. The F value was set to 0.20 to 0.35, because this causes a decrease in the high-temperature strength of the entire upper layer, and chipping tends to occur.
Further, the E value indicating the proportion of Al is the proportion of the total amount of Cr and B, and if it is less than 0.01, the minimum high-temperature hardness cannot be ensured, causing wear promotion, while the E When the value exceeds 0.06, the high-temperature strength is lowered, which causes chipping. Therefore, the E value is determined to be 0.01 to 0.06.

(c)上部層の薄層Bの組成式
上部層の薄層Bにおいては、B成分の含有割合を相対的に低くし、その分Al成分の含有割合を高く維持することで、相対的に高い高温硬さと高温耐酸化性を具備せしめ、隣接する薄層Aの高温硬さの不足を補強し、もって、前記薄層Aの有するすぐれた熱伝導性と、前記薄層Bの有する高温硬さおよび高温耐酸化性を具備した上部層を形成するものであるが、組成式におけるAlの含有割合を示すM値が0.25未満では、所望の高温硬さを確保することができず、摩耗進行が促進するようになり、一方同M値が0.40を越えると、上部層全体の高温強度が低下するようになり、チッピング発生の原因となることから、M値を0.25〜0.40と定めた。
また、Bの割合を示すN値がCrとAlの合量に占める割合で、0.05未満になると、上部層全体の熱伝導性低下が避けられず、一方同N値が0.15を超えると、高温強度が急激に低下するようになることから、N値を0.05〜0.15と定めた。
(C) Composition formula of thin layer B of the upper layer In the thin layer B of the upper layer, the content ratio of the B component is relatively low, and the content ratio of the Al component is maintained high by that amount. It has high high temperature hardness and high temperature oxidation resistance, reinforces the lack of high temperature hardness of the adjacent thin layer A, so that the excellent thermal conductivity of the thin layer A and the high temperature hardness of the thin layer B However, when the M value indicating the Al content in the composition formula is less than 0.25, the desired high-temperature hardness cannot be ensured. On the other hand, if the M value exceeds 0.40, the high temperature strength of the entire upper layer decreases and causes chipping. Therefore, the M value is set to 0.25 to 0.25. It was set to 0.40.
Further, if the N value indicating the ratio of B is a ratio of the total amount of Cr and Al, and less than 0.05, a decrease in the thermal conductivity of the entire upper layer is inevitable, while the N value is 0.15. If it exceeds the upper limit, the high-temperature strength suddenly decreases, so the N value was determined to be 0.05 to 0.15.

(d)上部層の薄層Aと薄層Bの一層平均層厚
それぞれの一層平均層厚が5nm未満ではそれぞれの薄層を上記の組成で明確に形成することが困難であり、この結果上部層に所望のすぐれた熱伝導性および所定の高温硬さと高温耐酸化性を確保することができなくなり、またそれぞれの一層平均層厚が20nmを越えるとそれぞれの薄層がもつ欠点、すなわち薄層Aであれば高温硬さ不足、薄層Bであれば熱伝導性不足が層内に局部的に現れ、これが原因でチッピングが発生し易くなったり、摩耗進行が促進されるようになることから、それぞれの一層平均層厚を5〜20nmと定めた。
(D) Single layer average layer thickness of thin layer A and thin layer B of the upper layer If each layer average layer thickness is less than 5 nm, it is difficult to clearly form each thin layer with the above composition. The desired excellent thermal conductivity and predetermined high-temperature hardness and high-temperature oxidation resistance cannot be ensured for the layer, and the disadvantage of each thin layer when the average layer thickness of each layer exceeds 20 nm, that is, the thin layer If it is A, insufficient high-temperature hardness, and if it is a thin layer B, insufficient thermal conductivity appears locally in the layer, which makes it easier for chipping to occur and promotes the progress of wear. The average layer thickness of each layer was determined to be 5 to 20 nm.

(e)上部層の平均層厚
その平均層厚が0.5μm未満では、自身のもつすぐれた熱伝導性と、所定の高温硬さおよび高温耐酸化性を硬質被覆層に長期に亘って付与できず、工具寿命短命の原因となり、一方その平均層厚が1.5μmを越えると、チッピングが発生し易くなることから、その平均層厚を0.5〜1.5μmと定めた。
(E) Average layer thickness of the upper layer When the average layer thickness is less than 0.5 μm, the hard coating layer is provided with long-term thermal conductivity, predetermined high temperature hardness and high temperature oxidation resistance. However, the tool life is shortened. On the other hand, if the average layer thickness exceeds 1.5 μm, chipping tends to occur. Therefore, the average layer thickness is set to 0.5 to 1.5 μm.

この発明の被覆超硬工具は、硬質被覆層が(Cr,Al,B)N層からなるが、硬質被覆層の上部層を薄層Aと薄層Bの交互積層構造とすることによってすぐれた熱伝導性と所定の高温硬さおよび高温耐酸化性を具備せしめ、同単一相構造の下部層がすぐれた高温硬さおよび高温耐酸化性を有することから、特に高熱発生を伴なうNi合金やCo合金、さらにTi合金などの耐熱合金の高速切削加工でも、硬質被覆層がすぐれた抜熱効果を発揮し、この結果切刃部に偏摩耗の原因となる熱塑性変形の発生なく、切刃部は正常摩耗形態をとり、すぐれた耐摩耗性を長期に亘って発揮するものである。   In the coated carbide tool of the present invention, the hard coating layer is composed of the (Cr, Al, B) N layer, and the upper layer of the hard coating layer is excellent by adopting an alternate laminated structure of the thin layer A and the thin layer B. Ni with high heat generation, because it has thermal conductivity, predetermined high temperature hardness and high temperature oxidation resistance, and the lower layer of the single phase structure has excellent high temperature hardness and high temperature oxidation resistance. Even in high-speed cutting of heat-resistant alloys such as alloys, Co alloys, and Ti alloys, the hard coating layer exhibits an excellent heat removal effect, and as a result, there is no occurrence of thermoplastic deformation that causes uneven wear on the cutting edge. The blade portion takes a normal wear form and exhibits excellent wear resistance over a long period of time.

つぎに、この発明の被覆超硬工具を実施例により具体的に説明する。   Next, the coated carbide tool of the present invention will be specifically described with reference to examples.

原料粉末として、いずれも1〜3μmの平均粒径を有するWC粉末、TiC粉末、ZrC粉末、VC粉末、TaC粉末、NbC粉末、Cr32粉末、TiN粉末、TaN粉末、およびCo粉末を用意し、これら原料粉末を、表1に示される配合組成に配合し、ボールミルで72時間湿式混合し、乾燥した後、100MPaの圧力で圧粉体にプレス成形し、この圧粉体を6Paの真空中、温度:1400℃に1時間保持の条件で焼結し、焼結後、切刃部分にR:0.03のホーニング加工を施してISO規格・CNMG120408のチップ形状をもったWC基超硬合金製の超硬基体A−1〜A−10を形成した。 WC powder, TiC powder, ZrC powder, VC powder, TaC powder, NbC powder, Cr 3 C 2 powder, TiN powder, TaN powder and Co powder all having an average particle diameter of 1 to 3 μm are prepared as raw material powders. These raw material powders are blended into the composition shown in Table 1, wet mixed by a ball mill for 72 hours, dried, and then pressed into a green compact at a pressure of 100 MPa. Medium, sintered at 1400 ° C for 1 hour, after sintering, WC-based carbide with honing of R: 0.03 on the cutting edge and chip shape of ISO standard CNMG120408 Alloy carbide substrates A-1 to A-10 were formed.

また、原料粉末として、いずれも0.5〜2μmの平均粒径を有するTiCN(重量比でTiC/TiN=50/50)粉末、Mo2C粉末、ZrC粉末、NbC粉末、TaC粉末、WC粉末、Co粉末、およびNi粉末を用意し、これら原料粉末を、表2に示される配合組成に配合し、ボールミルで24時間湿式混合し、乾燥した後、100MPaの圧力で圧粉体にプレス成形し、この圧粉体を2kPaの窒素雰囲気中、温度:1500℃に1時間保持の条件で焼結し、焼結後、切刃部分にR:0.03のホーニング加工を施してISO規格・CNMG120408のチップ形状をもったTiCN基サーメット製の超硬基体B−1〜B−6を形成した。 In addition, as raw material powders, all are TiCN (weight ratio TiC / TiN = 50/50) powder, Mo 2 C powder, ZrC powder, NbC powder, TaC powder, WC powder having an average particle diameter of 0.5 to 2 μm. Co powder and Ni powder are prepared, and these raw material powders are blended in the blending composition shown in Table 2, wet mixed by a ball mill for 24 hours, dried, and then pressed into a compact at a pressure of 100 MPa. The green compact was sintered in a nitrogen atmosphere of 2 kPa at a temperature of 1500 ° C. for 1 hour, and after sintering, the cutting edge portion was subjected to a honing process of R: 0.03 to obtain ISO standard / CNMG120408. The carbide substrates B-1 to B-6 made of TiCN base cermet having the following chip shape were formed.

(a)ついで、上記の超硬基体A−1〜A−10およびB−1〜B−6のそれぞれを、アセトン中で超音波洗浄し、乾燥した状態で、図1に示されるアークイオンプレーティング装置内の回転テーブル上の中心軸から半径方向に所定距離離れた位置に外周部にそって装着し、一方側のカソード電極(蒸発源)として、それぞれ表3,4に示される目標組成に対応した成分組成をもった上部層の薄層A形成用Cr−Al−B合金、他方側のカソード電極(蒸発源)として、同じくそれぞれ表3,4に示される目標組成に対応した成分組成をもった上部層の薄層B形成用Cr−Al−B合金を前記回転テーブルを挟んで対向配置し、また前記両Cr−Al−B合金から90度ずれた位置に前記回転テーブルに沿ってカソード電極(蒸発源)として、同じくそれぞれ表3,4に示される目標組成に対応した成分組成をもった下部層形成用Cr−Al−B合金を装着し、
(b)まず、装置内を排気して0.1Pa以下の真空に保持しながら、ヒーターで装置内を500℃に加熱した後、前記回転テーブル上で自転しながら回転する超硬基体に−1000Vの直流バイアス電圧を印加し、かつ前記下部層形成用Cr−Al−B合金とアノード電極との間に100Aの電流を流してアーク放電を発生させ、もって超硬基体表面を前記Cr−Al−B合金によってボンバード洗浄し、
(c)装置内に反応ガスとして窒素ガスを導入して3Paの反応雰囲気とすると共に、前記回転テーブル上で自転しながら回転する超硬基体に−100Vの直流バイアス電圧を印加し、かつ前記下部層形成用Cr−Al−B合金とアノード電極との間に100Aの電流を流してアーク放電を発生させ、もって前記超硬基体の表面に、表3,4に示される目標組成および目標層厚の単一相構造を有する(Cr,Al,B)N層を硬質被覆層の下部層として蒸着形成し、
(d)ついで装置内に導入する反応ガスとしての窒素ガスの流量を調整して2Paの反応雰囲気とすると共に、前記回転テーブル上で自転しながら回転する超硬基体に−100Vの直流バイアス電圧を印加した状態で、前記薄層A形成用Cr−Al−B合金のカソード電極とアノード電極との間に50〜100Aの範囲内の所定の電流を流してアーク放電を発生させて、前記超硬基体の表面に所定層厚の薄層Aを形成し、前記薄層A形成後、アーク放電を停止し、代って前記薄層B形成用Cr−Al−B合金のカソード電極とアノード電極間に同じく50〜100Aの範囲内の所定の電流を流してアーク放電を発生させて、所定層厚の薄層Bを形成した後、アーク放電を停止し(この場合薄層Bの形成から開始してもよい)、再び前記薄層A形成用Cr−Al−B合金のカソード電極とアノード電極間のアーク放電による薄層Aの形成と、前記薄層B形成用Cr−Al−B合金のカソード電極とアノード電極間のアーク放電による薄層Bの形成を交互に繰り返し行い、もって前記超硬基体の表面に、層厚方向に沿って表3,4に示される目標組成および一層目標層厚の薄層Aと薄層Bの交互積層からなる上部層を同じく表3,4に示される全体目標層厚で蒸着形成することにより、本発明被覆超硬工具としての本発明表面被覆超硬製スローアウエイチップ(以下、本発明被覆超硬チップと云う)1〜16をそれぞれ製造した。
(A) Next, each of the above carbide substrates A-1 to A-10 and B-1 to B-6 was ultrasonically cleaned in acetone and dried, and then the arc ion plate shown in FIG. Attached along the outer peripheral portion at a predetermined distance in the radial direction from the central axis on the rotary table in the coating apparatus, and used as a cathode electrode (evaporation source) on one side with the target compositions shown in Tables 3 and 4, respectively. As the upper layer Cr-Al-B alloy having the corresponding component composition and the cathode electrode (evaporation source) on the other side, the component compositions corresponding to the target compositions shown in Tables 3 and 4 are also used. A Cr-Al-B alloy for forming a thin layer B as an upper layer is disposed opposite to the rotary table, and a cathode is formed along the rotary table at a position shifted by 90 degrees from both the Cr-Al-B alloys. As an electrode (evaporation source) Similarly respectively mounted Cr-Al-B alloy for the lower layer formed having a component composition corresponding to the target composition shown in Tables 3 and 4,
(B) First, the inside of the apparatus is evacuated and kept at a vacuum of 0.1 Pa or less, and the inside of the apparatus is heated to 500 ° C. with a heater, and then the carbide substrate that rotates while rotating on the rotary table is set to −1000 V. And applying a current of 100 A between the lower layer forming Cr—Al—B alloy and the anode electrode to generate an arc discharge, so that the surface of the cemented carbide substrate is covered with the Cr—Al— Bombarded with B alloy,
(C) Introducing nitrogen gas as a reaction gas into the apparatus to make a reaction atmosphere of 3 Pa, applying a DC bias voltage of −100 V to a carbide substrate rotating while rotating on the rotary table, and An arc discharge is generated by flowing a current of 100 A between the layer-forming Cr—Al—B alloy and the anode electrode, so that the target composition and target layer thickness shown in Tables 3 and 4 are formed on the surface of the cemented carbide substrate. (Cr, Al, B) N layer having a single phase structure is deposited as a lower layer of the hard coating layer,
(D) Next, the flow rate of nitrogen gas as a reaction gas introduced into the apparatus is adjusted to a reaction atmosphere of 2 Pa, and a DC bias voltage of −100 V is applied to the carbide substrate rotating while rotating on the rotary table. In the applied state, a predetermined current in a range of 50 to 100 A is passed between the cathode electrode and the anode electrode of the Cr-Al-B alloy for forming the thin layer A to generate arc discharge, and the carbide A thin layer A having a predetermined layer thickness is formed on the surface of the substrate. After the thin layer A is formed, the arc discharge is stopped, and instead, between the cathode electrode and the anode electrode of the Cr-Al-B alloy for forming the thin layer B Similarly, a predetermined current in the range of 50 to 100 A is applied to generate arc discharge to form a thin layer B having a predetermined thickness, and then the arc discharge is stopped (in this case, starting from the formation of the thin layer B). Or the thin layer A again. Formation of thin layer A by arc discharge between cathode and anode electrode of Cr-Al-B alloy for formation, and thinning by arc discharge between cathode electrode and anode electrode of Cr-Al-B alloy for formation of thin layer B The formation of the layer B is alternately repeated so that the thin layer A and the thin layer B having the target composition and the target layer thickness shown in Tables 3 and 4 along the layer thickness direction are alternately laminated on the surface of the cemented carbide substrate. An upper layer made of the same is formed by vapor deposition with an overall target layer thickness shown in Tables 3 and 4, and the surface-coated carbide throwaway tip (hereinafter referred to as the present invention coated carbide) as the present coated carbide tool. Chips) 1 to 16 were produced.

また、比較の目的で、これら超硬基体A−1〜A−10およびB−1〜B−6を、アセトン中で超音波洗浄し、乾燥した状態で、それぞれ図2に示されるアークイオンプレーティング装置に装入し、カソード電極(蒸発源)として、それぞれ表5に示される目標組成に対応した成分組成をもったCr−Al合金を装着し、まず、装置内を排気して0.1Pa以下の真空に保持しながら、ヒーターで装置内を500℃に加熱した後、前記超硬基体に−1000Vの直流バイアス電圧を印加し、かつカソード電極の前記Cr−Al合金とアノード電極との間に100Aの電流を流してアーク放電を発生させ、もって超硬基体表面を前記Cr−Al合金でボンバード洗浄し、ついで装置内に反応ガスとして窒素ガスを導入して3Paの反応雰囲気とすると共に、前記超硬基体に印加するバイアス電圧を−100Vに下げて、前記Cr−Al合金のカソード電極とアノード電極との間にアーク放電を発生させ、もって前記超硬基体A−1〜A−10およびB−1〜B−6のそれぞれの表面に、表5に示される目標組成および目標層厚の単一相構造を有する(Cr,Al)N層からなる硬質被覆層を蒸着形成することにより、従来被覆超硬工具としての従来表面被覆超硬製スローアウエイチップ(以下、従来被覆超硬チップと云う)1〜16をそれぞれ製造した。   For the purpose of comparison, these carbide substrates A-1 to A-10 and B-1 to B-6 were ultrasonically cleaned in acetone and dried, respectively, and the arc ion plate shown in FIG. A Cr—Al alloy having a component composition corresponding to the target composition shown in Table 5 was mounted as a cathode electrode (evaporation source) as a cathode electrode (evaporation source). While maintaining the following vacuum, the inside of the apparatus was heated to 500 ° C. with a heater, a DC bias voltage of −1000 V was applied to the cemented carbide substrate, and between the Cr—Al alloy of the cathode electrode and the anode electrode An arc discharge is generated by supplying a current of 100 A to the substrate, and the surface of the carbide substrate is bombarded with the Cr—Al alloy, and then nitrogen gas is introduced into the apparatus as a reaction gas to form a reaction atmosphere of 3 Pa. At the same time, the bias voltage applied to the cemented carbide substrate is lowered to -100V to generate an arc discharge between the cathode electrode and the anode electrode of the Cr-Al alloy. A hard coating layer composed of a (Cr, Al) N layer having a single phase structure having a target composition and a target layer thickness shown in Table 5 is formed on each surface of -10 and B-1 to B-6 by vapor deposition. Thus, conventional surface-coated carbide throwaway tips (hereinafter referred to as conventional coated carbide tips) 1 to 16 as conventional coated carbide tools were produced, respectively.

つぎに、上記の各種の被覆超硬チップを、いずれも工具鋼製バイトの先端部に固定治具にてネジ止めした状態で、本発明被覆超硬チップ1〜16および従来被覆超硬チップ1〜16について、
被削材:質量%で、Co−20.3%Cr−14.8%W−10.1%Ni−1.45%Mn−0.95%Si−1.04%Fe−0.12%Cの組成を有するCo合金の長さ方向等間隔4本縦溝入り丸棒、
切削速度:60m/min.、
切り込み:1.5mm、
送り:0.15mm/rev.、
切削時間:5分、
の条件(切削条件A)でのCo合金の乾式断続高速切削加工試験(通常の切削速度は30m/min.)、
被削材:質量%で、Ti−3.02%Al−2.53%Vの組成を有するTi合金の丸棒、
切削速度:70m/min.、
切り込み:2.5mm、
送り:0.2mm/rev.、
切削時間:5分、
の条件(切削条件B)でのTi合金の乾式連続高速切削加工試験(通常の切削速度は30m/min.)、
被削材:質量%で、Ni−18.7%Cr−14.3%Co−4.51%Mo−2.53%Ti−1.98%Fe−1.18%Al−0.74%Mn−0.41%Siの組成を有するNi合金の長さ方向等間隔4本縦溝入り丸棒、
切削速度:55m/min.、
切り込み:1mm、
送り:0.25mm/rev.、
切削時間:5分、
の条件(切削条件C)でのNi合金の乾式断続高速切削加工試験(通常の切削速度は30m/min.)を行い、いずれの切削加工試験でも切刃の逃げ面摩耗幅を測定した。この測定結果を表6に示した。
Next, the coated carbide tips 1-16 of the present invention and the conventional coated carbide tip 1 in the state where each of the various coated carbide tips is screwed to the tip of the tool steel tool with a fixing jig. About ~ 16
Work material: By mass, Co-20.3% Cr-14.8% W-10. 1% Ni-1.45% Mn-0.95% Si-1.04% Fe-0.12% Co-alloy having a composition of C, four longitudinally spaced round bars equally spaced in the longitudinal direction,
Cutting speed: 60 m / min. ,
Incision: 1.5mm,
Feed: 0.15 mm / rev. ,
Cutting time: 5 minutes
Dry interrupted high-speed cutting test of Co alloy under the conditions (cutting condition A) (normal cutting speed is 30 m / min.),
Work material: Round bar of Ti alloy having a composition of Ti-3.02% Al-2.53% V in mass%,
Cutting speed: 70 m / min. ,
Incision: 2.5mm,
Feed: 0.2 mm / rev. ,
Cutting time: 5 minutes
Dry continuous high-speed cutting test of Ti alloy under the conditions (cutting condition B) (normal cutting speed is 30 m / min.),
Work Material: Mass%, Ni-18.7% Cr-14.3% Co-4.51% Mo-2.53% Ti-1.98% Fe-1.18% Al-0.74% Four longitudinally-grooved round bars of Ni alloy having a composition of Mn-0.41% Si in the longitudinal direction,
Cutting speed: 55 m / min. ,
Cutting depth: 1mm,
Feed: 0.25 mm / rev. ,
Cutting time: 5 minutes
The dry interrupted high-speed cutting test (normal cutting speed is 30 m / min.) Of the Ni alloy under the above conditions (cutting condition C) was performed, and the flank wear width of the cutting edge was measured in any cutting test. The measurement results are shown in Table 6.

Figure 2006224223
Figure 2006224223

Figure 2006224223
Figure 2006224223

Figure 2006224223
Figure 2006224223

Figure 2006224223
Figure 2006224223

Figure 2006224223
Figure 2006224223

Figure 2006224223
Figure 2006224223

原料粉末として、平均粒径:5.5μmを有する中粗粒WC粉末、同0.8μmの微粒WC粉末、同1.3μmのTaC粉末、同1.2μmのNbC粉末、同1.2μmのZrC粉末、同2.3μmのCr32粉末、同1.5μmのVC粉末、同1.0μmの(Ti,W)C[質量比で、TiC/WC=50/50]粉末、および同1.8μmのCo粉末を用意し、これら原料粉末をそれぞれ表7に示される配合組成に配合し、さらにワックスを加えてアセトン中で24時間ボールミル混合し、減圧乾燥した後、100MPaの圧力で所定形状の各種の圧粉体にプレス成形し、これらの圧粉体を、6Paの真空雰囲気中、7℃/分の昇温速度で1370〜1470℃の範囲内の所定の温度に昇温し、この温度に1時間保持後、炉冷の条件で焼結して、直径が8mm、13mm、および26mmの3種の超硬基体形成用丸棒焼結体を形成し、さらに前記の3種の丸棒焼結体から、研削加工にて、表7に示される組合せで、切刃部の直径×長さがそれぞれ6mm×13mm、10mm×22mm、および20mm×45mmの寸法、並びにいずれもねじれ角30度の4枚刃スクエア形状をもったWC基超硬合金製の超硬基体(エンドミル)C−1〜C−8をそれぞれ製造した。 As raw material powders, medium coarse WC powder having an average particle diameter of 5.5 μm, fine WC powder of 0.8 μm, TaC powder of 1.3 μm, NbC powder of 1.2 μm, ZrC of 1.2 μm Powder, 2.3 μm Cr 3 C 2 powder, 1.5 μm VC powder, 1.0 μm (Ti, W) C [by mass ratio, TiC / WC = 50/50] powder, and 1 Prepare 8 .mu.m Co powder, mix these raw material powders with the composition shown in Table 7, add wax, ball mill in acetone for 24 hours, dry under reduced pressure, and then press at a pressure of 100 MPa. The green compacts were press-molded, and these green compacts were heated to a predetermined temperature in the range of 1370 to 1470 ° C. at a rate of temperature increase of 7 ° C./min in a 6 Pa vacuum atmosphere. After holding at temperature for 1 hour, sintering under furnace cooling conditions Three types of sintered carbide rod forming bodies for forming a carbide substrate having diameters of 8 mm, 13 mm, and 26 mm were formed, and further, the three types of round rod sintered bodies described above were subjected to grinding and shown in Table 7. Made of WC-base cemented carbide with a combination of 4 blade square shape with diameter and length of 6mm × 13mm, 10mm × 22mm, and 20mm × 45mm respectively, and a twist angle of 30 degrees. Carbide substrates (end mills) C-1 to C-8 were produced.

ついで、これらの超硬基体(エンドミル)C−1〜C−8の表面をアセトン中で超音波洗浄し、乾燥した状態で、同じく図1に示されるアークイオンプレーティング装置に装入し、上記実施例1と同一の条件で、表8に示される目標組成および目標層厚の単一相構造を有する(Cr,Al,B)N層からなる下部層と、同じく層厚方向に沿って表8に示される目標組成および一層目標層厚の薄層Aと薄層Bの交互積層からなる上部層を同じく表8に示される全体目標層厚で蒸着形成することにより、本発明被覆超硬工具としての本発明表面被覆超硬製エンドミル(以下、本発明被覆超硬エンドミルと云う)1〜8をそれぞれ製造した。   Then, the surfaces of these carbide substrates (end mills) C-1 to C-8 were ultrasonically cleaned in acetone and dried, and then charged into the arc ion plating apparatus shown in FIG. Under the same conditions as in Example 1, a lower layer composed of a (Cr, Al, B) N layer having a single-phase structure with the target composition and target layer thickness shown in Table 8 is also shown along the layer thickness direction. A coated carbide tool of the present invention is formed by vapor-depositing an upper layer composed of alternating layers of thin layers A and B having a target composition shown in FIG. The present invention surface-coated carbide end mills (hereinafter referred to as the present invention coated carbide end mills) 1 to 8 were produced.

また、比較の目的で、上記の超硬基体(エンドミル)C−1〜C−8の表面をアセトン中で超音波洗浄し、乾燥した状態で、同じく図2に示されるアークイオンプレーティング装置に装入し、上記実施例1と同一の条件で、同じく表9に示される目標組成および目標層厚の単一相構造を有する(Cr,Al)N層からなる硬質被覆層を蒸着することにより、従来被覆超硬工具としての従来表面被覆超硬製エンドミル(以下、従来被覆超硬エンドミルと云う)1〜8をそれぞれ製造した。   For the purpose of comparison, the surfaces of the above-mentioned carbide substrates (end mills) C-1 to C-8 are ultrasonically cleaned in acetone and dried, and the arc ion plating apparatus shown in FIG. And depositing a hard coating layer comprising a (Cr, Al) N layer having a single-phase structure with the target composition and target layer thickness shown in Table 9 under the same conditions as in Example 1 above. Conventional surface-coated carbide end mills (hereinafter referred to as conventional coated carbide end mills) 1 to 8 as conventional coated carbide tools were produced, respectively.

つぎに、上記本発明被覆超硬エンドミル1〜8および従来被覆超硬エンドミル1〜8のうち、本発明被覆超硬エンドミル1〜3および従来被覆超硬エンドミル1〜3については、
被削材−平面:100mm×250mm、厚さ:50mmの寸法、並びに質量%で、Ni−18.7%Cr−14.3%Co−4.51%Mo−2.53%Ti−1.98%Fe−1.18%Al−0.74%Mn−0.41%Siの組成を有するNi合金の板材、
切削速度:45m/min.、
溝深さ(切り込み):2mm、
テーブル送り:250mm/分、
の条件でのNi合金の乾式高速溝切削加工試験(通常の切削速度は25m/min.)、本発明被覆超硬エンドミル4〜6および従来被覆超硬エンドミル4〜6については、
被削材−平面:100mm×250mm、厚さ:50mmの寸法、並びに質量%で、Co−20.3%Cr−14.8%W−10.1%Ni−1.45%Mn−0.95%Si−1.04%Fe−0.12%Cの組成を有するCo合金の板材、
切削速度:60m/min.、
溝深さ(切り込み):3.5mm、
テーブル送り:280mm/分、
の条件でのCo合金の乾式高速溝切削加工試験(通常の切削速度は30m/min.)、本発明被覆超硬エンドミル7,8および従来被覆超硬エンドミル7,8については、
被削材−平面:100mm×250mm、厚さ:50mmの寸法、並びに質量%で、Ti−3.02%Al−2.53%Vの組成を有するTi合金の板材、
切削速度:40m/min.、
溝深さ(切り込み):5mm、
テーブル送り:200mm/分、
の条件でのTi合金の乾式高速溝切削加工試験(通常の切削速度は20m/min.)をそれぞれ行い、いずれの溝切削加工試験でも切刃部の外周刃の逃げ面摩耗幅が使用寿命の目安とされる0.1mmに至るまでの切削溝長を測定した。この測定結果を表8,9にそれぞれ示した。
Next, of the present invention coated carbide end mills 1-8 and conventional coated carbide end mills 1-8, the present invention coated carbide end mills 1-3 and conventional coated carbide end mills 1-3 are as follows:
Work Material-Plane: 100 mm × 250 mm, Thickness: 50 mm, and Mass%, Ni-18.7% Cr-14.3% Co-4.51% Mo-2.53% Ti-1. A plate of Ni alloy having a composition of 98% Fe-1.18% Al-0.74% Mn-0.41% Si,
Cutting speed: 45 m / min. ,
Groove depth (cut): 2 mm,
Table feed: 250 mm / min,
The dry high-speed grooving test of Ni alloy under the conditions (normal cutting speed is 25 m / min.), The coated carbide end mills 4 to 6 of the present invention and the conventional coated carbide end mills 4 to 6 are as follows:
Work Material-Plane: 100 mm × 250 mm, Thickness: 50 mm in Dimensions and Mass%, Co-20.3% Cr-14.8% W-10. 1% Ni-1.45% Mn-0. A plate material of Co alloy having a composition of 95% Si-1.04% Fe-0.12% C;
Cutting speed: 60 m / min. ,
Groove depth (cut): 3.5 mm,
Table feed: 280 mm / min,
With respect to the dry high-speed grooving test of Co alloy under the conditions (normal cutting speed is 30 m / min.), The coated carbide end mills 7 and 8 of the present invention and the conventional coated carbide end mills 7 and 8 are as follows:
Work material-plane: 100 mm x 250 mm, thickness: 50 mm, as well as mass%, Ti-3.02% Al-2.53% V Ti alloy plate,
Cutting speed: 40 m / min. ,
Groove depth (cut): 5 mm,
Table feed: 200 mm / min,
A dry high-speed grooving test of the Ti alloy under the conditions (normal cutting speed is 20 m / min.) Is performed, and the flank wear width of the outer peripheral edge of the cutting edge is the service life in any grooving test. The cutting groove length up to 0.1 mm as a standard was measured. The measurement results are shown in Tables 8 and 9, respectively.

Figure 2006224223
Figure 2006224223

Figure 2006224223
Figure 2006224223

Figure 2006224223
Figure 2006224223

上記の実施例2で製造した直径が8mm(超硬基体C−1〜C−3形成用)、13mm(超硬基体C−4〜C−6形成用)、および26mm(超硬基体C−7、C−8形成用)の3種の丸棒焼結体を用い、この3種の丸棒焼結体から、研削加工にて、溝形成部の直径×長さがそれぞれ4mm×13mm(超硬基体D−1〜D−3)、8mm×22mm(超硬基体D−4〜D−6)、および16mm×45mm(超硬基体D−7、D−8)の寸法、並びにいずれもねじれ角30度の2枚刃形状をもったWC基超硬合金製の超硬基体(ドリル)D−1〜D−8をそれぞれ製造した。   The diameters produced in Example 2 above were 8 mm (for forming carbide substrates C-1 to C-3), 13 mm (for forming carbide substrates C-4 to C-6), and 26 mm (for carbide substrates C-). 7, for C-8 formation), from these three types of round bar sintered bodies, the diameter x length of the groove forming portion is 4 mm x 13 mm (by grinding), respectively. Carbide substrates D-1 to D-3), 8 mm × 22 mm (Carbide substrates D-4 to D-6), and 16 mm × 45 mm (Carbide substrates D-7 and D-8), and all Carbide substrates (drills) D-1 to D-8 made of a WC-base cemented carbide having a two-blade shape with a twist angle of 30 degrees were produced.

ついで、これらの超硬基体(ドリル)D−1〜D−8の切刃に、ホーニングを施し、アセトン中で超音波洗浄し、乾燥した状態で、同じく図1に示されるアークイオンプレーティング装置に装入し、上記実施例1と同一の条件で、表10に示される目標組成および目標層厚の単一相構造を有する(Cr,Al,B)N層からなる下部層と、同じく層厚方向に沿って表10に示される目標組成および一層目標層厚の薄層Aと薄層Bの交互積層からなる上部層を同じく表10に示される全体目標層厚で蒸着形成することにより、本発明被覆超硬工具としての本発明表面被覆超硬製ドリル(以下、本発明被覆超硬ドリルと云う)1〜8をそれぞれ製造した。   Next, the cutting edges of these carbide substrates (drills) D-1 to D-8 are subjected to honing, ultrasonically cleaned in acetone and dried, and the arc ion plating apparatus shown in FIG. 1 is also used. A lower layer composed of a (Cr, Al, B) N layer having a single phase structure with a target composition and a target layer thickness shown in Table 10 under the same conditions as in Example 1 and the same layer By vapor-depositing an upper layer composed of alternating layers of the thin layer A and the thin layer B having the target composition shown in Table 10 and a single target layer thickness along the thickness direction, with the overall target layer thickness also shown in Table 10, The surface coated carbide drills (hereinafter referred to as the present invention coated carbide drills) 1 to 8 as the present invention coated carbide tools were produced, respectively.

また、比較の目的で、上記の超硬基体(ドリル)D−1〜D−8の表面に、ホーニングを施し、アセトン中で超音波洗浄し、乾燥した状態で、同じく図2に示されるアークイオンプレーティング装置に装入し、上記実施例1と同一の条件で、同じく表11に示される目標組成および目標層厚の単一相構造を有する(Cr,Al)N層からなる硬質被覆層を蒸着することにより、従来被覆超硬工具としての従来表面被覆超硬製ドリル(以下、従来被覆超硬ドリルと云う)1〜8をそれぞれ製造した。   For comparison purposes, the surfaces of the above-mentioned carbide substrates (drills) D-1 to D-8 are honed, ultrasonically cleaned in acetone, and dried, and the arc shown in FIG. A hard coating layer comprising a (Cr, Al) N layer having a single-phase structure with the target composition and target layer thickness shown in Table 11 under the same conditions as in Example 1 above, charged in the ion plating apparatus The conventional surface-coated carbide drills (hereinafter referred to as conventional coated carbide drills) 1 to 8 as conventional coated carbide tools were produced, respectively.

つぎに、上記本発明被覆超硬ドリル1〜8および従来被覆超硬ドリル1〜8のうち、本発明被覆超硬ドリル1〜3および従来被覆超硬ドリル1〜3については、
被削材−平面:100mm×250、厚さ:50mmの寸法、並びに質量%で、Ti−3.02%Al−2.53%Vの組成を有するTi合金の板材、
切削速度:40m/min.、
送り:0.15mm/rev、
穴深さ:8mm、
の条件でのTi合金の湿式高速穴あけ切削加工試験(通常の切削速度は20m/min.)、本発明被覆超硬ドリル4〜6および従来被覆超硬ドリル4〜6については、
被削材−平面:100mm×250mm、厚さ:50mmの寸法、並びに質量%で、Co−20.3%Cr−14.8%W−10.1%Ni−1.45%Mn−0.95%Si−1.04%Fe−0.12%Cの組成を有するCo合金の板材、
切削速度:50m/min.、
送り:0.2mm/rev、
穴深さ:13mm、
の条件でのCo合金の湿式高速穴あけ切削加工試験(通常の切削速度は25m/min.)、本発明被覆超硬ドリル7,8および従来被覆超硬ドリル7,8については、
被削材−平面:100mm×250mm、厚さ:50mmの寸法、並びに質量%で、Ni−18.7%Cr−14.3%Co−4.51%Mo−2.53%Ti−1.98%Fe−1.18%Al−0.74%Mn−0.41%Siの組成を有するNi合金の板材、
切削速度:60m/min.、
送り:0.1mm/rev、
穴深さ:28mm、
の条件でのNi合金の湿式高速穴あけ切削加工試験(通常の切削速度は30m/min.)、をそれぞれ行い、いずれの湿式高速穴あけ切削加工試験(水溶性切削油使用)でも先端切刃面の逃げ面摩耗幅が0.3mmに至るまでの穴あけ加工数を測定した。この測定結果を表8にそれぞれ示した。
Next, of the present invention coated carbide drills 1-8 and conventional coated carbide drills 1-8, the present invention coated carbide drills 1-3 and conventional coated carbide drills 1-3 are as follows:
Work material-plane: 100 mm × 250, thickness: 50 mm, and a Ti alloy plate material having a composition of Ti-3.02% Al-2.53% V, and mass%,
Cutting speed: 40 m / min. ,
Feed: 0.15mm / rev,
Hole depth: 8mm,
With regard to the wet high-speed drilling test of Ti alloy under the conditions (normal cutting speed is 20 m / min.), The present invention coated carbide drills 4-6 and the conventional coated carbide drills 4-6,
Work Material-Plane: 100 mm × 250 mm, Thickness: 50 mm in Dimensions and Mass%, Co-20.3% Cr-14.8% W-10. 1% Ni-1.45% Mn-0. A plate material of Co alloy having a composition of 95% Si-1.04% Fe-0.12% C;
Cutting speed: 50 m / min. ,
Feed: 0.2mm / rev,
Hole depth: 13mm,
For the Co alloy wet high-speed drilling cutting test under the conditions (normal cutting speed is 25 m / min.), The present coated carbide drills 7 and 8 and the conventional coated carbide drills 7 and 8,
Work Material-Plane: 100 mm × 250 mm, Thickness: 50 mm, and Mass%, Ni-18.7% Cr-14.3% Co-4.51% Mo-2.53% Ti-1. A plate of Ni alloy having a composition of 98% Fe-1.18% Al-0.74% Mn-0.41% Si,
Cutting speed: 60 m / min. ,
Feed: 0.1 mm / rev,
Hole depth: 28mm,
The Ni alloy wet high speed drilling cutting test (normal cutting speed is 30 m / min.) Was performed, and any wet high speed drilling cutting test (using water-soluble cutting oil) The number of drilling processes until the flank wear width reached 0.3 mm was measured. The measurement results are shown in Table 8, respectively.

Figure 2006224223
Figure 2006224223

Figure 2006224223
Figure 2006224223

この結果得られた本発明被覆超硬工具としての本発明被覆超硬チップ1〜16、本発明被覆超硬エンドミル1〜8、および本発明被覆超硬ドリル1〜8の(Cr,Al,B)Nからなる硬質被覆層を構成する上部層の薄層Aおよび薄層B、さらに同下部層の組成、並びに従来被覆超硬工具としての従来被覆超硬チップ1〜16、従来被覆超硬エンドミル1〜8、および従来被覆超硬ドリル1〜8の(Cr,Al)Nからなる硬質被覆層の組成を、透過型電子顕微鏡を用いてのエネルギー分散型X線分析法により測定したところ、それぞれ目標組成と実質的に同じ組成を示した。   (Cr, Al, B) of the coated carbide tips 1 to 16 of the present invention, the coated carbide end mills 1 to 8 of the present invention, and the coated carbide drills 1 to 8 of the present invention. ) Upper thin layer A and thin layer B constituting the hard coating layer made of N, composition of the lower layer, conventional coated carbide tips 1 to 16 as a conventional coated carbide tool, conventional coated carbide end mill 1 to 8 and the composition of the hard coating layer made of (Cr, Al) N of the conventional coated carbide drills 1 to 8 were measured by energy dispersive X-ray analysis using a transmission electron microscope. The composition was substantially the same as the target composition.

また、上記の硬質被覆層の構成層の平均層厚を透過型電子顕微鏡を用いて断面測定したところ、いずれも目標層厚と実質的に同じ平均値(5ヶ所の平均値)を示した。   Further, when the average layer thickness of the constituent layers of the hard coating layer was subjected to cross-sectional measurement using a transmission electron microscope, all showed the same average value (average value of five locations) as the target layer thickness.

表3〜11に示される結果から、本発明被覆超硬工具は、いずれも硬質被覆層が、一層平均層厚がそれぞれ5〜20nmの薄層Aと薄層Bの交互積層構造を有する上部層と、単一相構造の下部層からなり、かつ前記薄層Aと薄層B、さらに下部層はそれぞれ組成の異なる(Cr,Al,B)Nで構成され、前記下部層がすぐれた高温硬さおよび高温耐酸化性を有し、さらに前記上部層がすぐれた熱伝導性と所定の高温硬さおよび高温耐酸化性を有し、この結果硬質被覆層はこれらのすぐれた特性を兼ね備えたものとなるので、高熱発生を伴なうNi合金やCo合金、さらにTi合金などの耐熱合金の高速切削加工でも、前記硬質被覆層が前記上部層によってすぐれた抜熱効果を発揮し、切刃部に偏摩耗の原因となる熱塑性変形の発生なく、正常摩耗形態をとり、すぐれた耐摩耗性を発揮するの対して、硬質被覆層が単一相構造の(Cr,Al)N層からなる従来被覆超硬工具は、特に硬質被覆層の熱伝導性不足が原因で切刃部に熱塑性変形が発生し、これによって摩耗形態が偏摩耗形態をとるようになることから、摩耗の進行が速くなり、比較的短時間で使用寿命に至ることが明らかである。   From the results shown in Tables 3 to 11, each of the coated carbide tools of the present invention has an upper layer in which the hard coating layer has an alternately laminated structure of thin layers A and B each having an average layer thickness of 5 to 20 nm. And the thin layer A, the thin layer B, and the lower layer are composed of (Cr, Al, B) N having different compositions, and the lower layer is excellent in high-temperature hardening. In addition, the upper layer has excellent thermal conductivity and predetermined high temperature hardness and high temperature oxidation resistance, so that the hard coating layer has these excellent characteristics. Therefore, even in high-speed cutting of heat-resistant alloys such as Ni alloys, Co alloys, and Ti alloys with high heat generation, the hard coating layer exhibits an excellent heat removal effect by the upper layer, and the cutting edge portion Without the occurrence of thermoplastic deformation that causes uneven wear. The conventional coated carbide tool, in which the hard coating layer is composed of a (Cr, Al) N layer having a single-phase structure, takes the form of wear and exhibits excellent wear resistance, in particular, the thermal conductivity of the hard coating layer. Due to the shortage, the cutting edge part will undergo thermoplastic deformation, and this will cause the wear form to become an uneven wear form, so it is clear that the progress of wear will be accelerated and the service life will be reached in a relatively short time. is there.

上述のように、この発明の被覆超硬工具は、特に各種の鋼や鋳鉄などの通常の切削条件での切削加工は勿論のこと、特にNi合金やCo合金、さらにTi合金などの耐熱合金の高熱発生を伴なう高速切削加工でもすぐれた耐摩耗性を発揮し、長期に亘ってすぐれた切削性能を示すものであるから、切削加工装置の高性能化、並びに切削加工の省力化および省エネ化、さらに低コスト化に十分満足に対応できるものである。   As described above, the coated carbide tool of the present invention is not limited to cutting under normal cutting conditions such as various steels and cast irons, particularly Ni alloys, Co alloys, and heat resistant alloys such as Ti alloys. It exhibits excellent wear resistance even in high-speed cutting with high heat generation and exhibits excellent cutting performance over a long period of time. It is possible to cope with the reduction of cost and cost.

本発明被覆超硬工具を構成する硬質被覆層を形成するのに用いたアークイオンプレーティング装置を示し、(a)は概略平面図、(b)は概略正面図である。The arc ion plating apparatus used for forming the hard coating layer which comprises this invention coated carbide tool is shown, (a) is a schematic plan view, (b) is a schematic front view. 通常のアークイオンプレーティング装置の概略説明図である。It is a schematic explanatory drawing of a normal arc ion plating apparatus.

Claims (1)

炭化タングステン基超硬合金または炭窒化チタン基サーメットで構成された超硬基体の表面に、
(a)いずれもCrとAlとB(ボロン)の複合窒化物からなる上部層と下部層で構成し、前記上部層は0.5〜1.5μm、前記下部層は2〜6μmの平均層厚をそれぞれ有し、
(b)上記上部層は、いずれも一層平均層厚がそれぞれ5〜20nm(ナノメ−タ−)の薄層Aと薄層Bの交互積層構造を有し、
上記薄層Aは、
組成式:[Cr1-(E+F)Al]N(ただし、原子比で、Eは0.01〜0.06、Fは0.20〜0.35を示す)を満足するCrとAlとBの複合窒化物層、
上記薄層Bは、
組成式:[Cr1-(M+N)Al]N(ただし、原子比で、Mは0.25〜0.40、Nは0.05〜0.15を示す)を満足するCrとAlとBの複合窒化物層、からなり、
(c)上記下部層は、単一相構造を有し、
組成式:[Cr1-(X+Y)Al]N(ただし、原子比で、Xは0.50〜0.70、Yは0.005〜0.05を示す)を満足するCrとAlとBの複合窒化物層、
からなる硬質被覆層を蒸着形成してなる、耐熱合金の高速切削加工で硬質被覆層がすぐれた耐摩耗性を発揮する表面被覆超硬合金製切削工具。
On the surface of the cemented carbide substrate composed of tungsten carbide based cemented carbide or titanium carbonitride based cermet,
(A) Both are composed of an upper layer and a lower layer made of a composite nitride of Cr, Al, and B (boron), the upper layer being an average layer of 0.5 to 1.5 μm, and the lower layer being an average layer of 2 to 6 μm Each has a thickness,
(B) Each of the upper layers has an alternately laminated structure of thin layers A and B each having an average layer thickness of 5 to 20 nm (nanometer),
The thin layer A is
Composition formula: [Cr 1− (E + F) Al E B F ] N (wherein, in terms of atomic ratio, E represents 0.01 to 0.06, F represents 0.20 to 0.35) and Cr A composite nitride layer of Al and B;
The thin layer B is
Composition formula: [Cr 1− (M + N) Al M B N ] N (wherein, M is 0.25 to 0.40 and N is 0.05 to 0.15 in atomic ratio) and Cr A composite nitride layer of Al and B,
(C) the lower layer has a single phase structure;
Composition formula: [Cr 1− (X + Y) Al X B Y ] N (wherein, in terms of atomic ratio, X represents 0.50 to 0.70, Y represents 0.005 to 0.05) and Cr A composite nitride layer of Al and B;
A surface-coated cemented carbide cutting tool that exhibits excellent wear resistance in high-speed cutting of heat-resistant alloys, formed by vapor-depositing a hard coating layer made of
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