JP2006213154A - Conveying truck, conveyance system using it, and semiconductor device manufacturing method using them - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a technique for increasing the speed of and stabilizing conveyance, regarding the conveyance of an FOUP by a conveying truck traveling a track provided to the ceiling side in a clean room used when manufacturing a semiconductor device. <P>SOLUTION: The passive type conveying truck 1 conveys the FOUP 10 as an article to be conveyed while loading it and travels the track provided to the ceiling side. A part of the FOUP 10 has a positioning hole 15 for a bottom conveyor rail 13 fixed to the conveying truck 1. A fixture 5a for fixing the positioning hole 15 is provided to a part of the conveying truck 1. A clamp mechanism 5 for fixing and releasing the positioning hole 15 is provided to a part of the fixture 5a. <P>COPYRIGHT: (C)2006,JPO&NCIPI

Description

  The present invention relates to a transport cart and transport technology using the same, and more particularly to transporting FOUP (Front Opening Unified Pod) by a transport cart traveling on a track provided on a ceiling side in a clean room used in manufacturing technology of a semiconductor device. It is related to effective technology when applied.

  Manufacture of electronic components such as semiconductor devices and liquid crystals is performed in a clean room in which a predetermined cleanliness is ensured. In this clean room, a related processing device group is arranged for each process, and the arranged areas (hereinafter referred to as “between bays”) are connected by a track provided on the ceiling side of the clean room. For example, the semiconductor device manufacturing process includes a transporting process in which a transported carriage such as a FOUP is mounted and transported on a transport cart that is self-propelled along such a track. In the conveyance of the object to be conveyed, it is demanded not only to convey the object stably but also to improve the conveying ability.

Patent Document 1 describes a processing apparatus that can improve the conveyance speed of FOUP during processing in the processing apparatus and can stably convey the FOUP by supporting the FOUP with a pin provided in the load port of the processing apparatus. .
JP 2004-296646 A

  The contents examined by the inventors when completing the present invention will be described below with reference to FIGS. FIG. 17 is a side view schematically showing the configuration of the transport carriage examined by the present inventors. FIG. 18 is a top view schematically showing the transport carriage shown in FIG. FIG. 19 is an enlarged view schematically showing the main part of the object to be transported mounted on the transport carriage shown in FIG.

  The semiconductor device is manufactured in a clean room in which a predetermined cleanliness is ensured, and on the ceiling side, for example, a track for traveling a transport carriage carrying and transporting an object to be transported such as FOUP is secured. That is, a ceiling transport track system (hereinafter referred to as “transport system”) that transports the FOUP with a transport cart that runs along the track is constructed.

  With the increase in the size of clean rooms, the total track length of such transport systems tends to be longer, and it is not uncommon for the total length to extend to several kilometers. In addition, semiconductor wafers accommodated in the FOUP (hereinafter simply referred to as “wafer”) for reasons such as a small variety of semiconductor devices and an improvement in the operating rate of processing apparatuses disposed in a clean room. FOUP may be transported even if there are several. For this reason, it is important to improve the conveyance capability, and it is conceivable to run the conveyance carriage at a high speed as one of means for solving the conveyance capability.

  By the way, there are an active type transport cart having a transfer mechanism for fixing an object to be transported by a robot, and a passive type transport cart having no transfer mechanism. Passive transport carts are superior to active transport carts in terms of transport system capacity, cost, maintenance, etc., but they simply run with a transported object on the loading platform, so there are the following problems: is there.

  As shown in FIG. 17, the passive transfer carriage 101 includes a loading platform 103 on which a FOUP (object to be transferred) 102 containing a wafer is mounted, a traveling mechanism 104 that constitutes a self-running function of the transfer carriage 101, and A wheel 106 rotating on the track 105 is included.

  Further, as shown in FIGS. 17 and 18, a guide 107 that prevents the FOUP 102 from being displaced at the time of conveyance is formed in the loading platform 103 of the conveyance cart 101. Further, as shown in FIG. 19, positioning pins 108 for positioning the FOUP 102 are formed on the loading platform 103. When the transport cart 101 transports the FOUP 102, the positioning pins 108 serve as the bottom conveyor of the FOUP 102. It will be inserted into the positioning hole 110 of the rail 109.

  In such a transport system using the transport cart 101, a plurality of transport carts 101 traveling on the track 105 may collide on the track 105. Due to this collision, there arises a problem that the FOUP 102 mounted on the transport carriage 101 is shifted. Further, as a means for improving the transport capability of the transport system, when the transport cart 101 is run at a high speed, the FOUP 102 mounted on the transport cart 101 is used at the time of sudden acceleration, sudden stop, and when the transport carts 101 collide with each other. There arises a problem that the FOUP 102 is dropped from the loading platform 103.

  For these problems, the above-described guide 107 has a function of preventing the displacement of the FOUP 102, but cannot be said to have a function of stably transporting the FOUP 102. When a collision applied to the FOUP 102 occurs, the FOUP 102 may fall from the loading platform 103. In addition, the positioning pin 108 is fitted into the positioning hole 110 formed in the bottom conveyor rail 109 of the FOUP 102 at the time of conveyance. The FOUP 102 may fall from 103. Further, in order to prevent the FOUP 102 from falling, it is conceivable to prevent the FOUP 102 from falling by providing, for example, a cover or the like on the loading platform 103 of the transport carriage 101. However, the possibility of dropping is completely cut off. I can't say that.

  The object of the present invention relates to a transport cart and transport technology using the transport cart, and more particularly, to a FOUP transport by a transport cart traveling on a track provided on a ceiling side in a clean room used for manufacturing a semiconductor device. It is to provide a technique that can be realized.

  The above and other objects and novel features of the present invention will be apparent from the description of this specification and the accompanying drawings.

  Of the inventions disclosed in the present application, the outline of typical ones will be briefly described as follows.

  The transport cart of the present invention is a passive transport cart that carries and transports a transported object and travels on a track provided on the ceiling side, and is engaged with and fixed to a part of the transported object. Means.

  Further, the transport system of the present invention is a transport system having a track on the ceiling side for running a passive transport cart that carries and transports a transported object, and the transport cart is a part of the transported object. Means for engaging and securing.

  Further, a method for manufacturing a semiconductor device according to the present invention is a method for manufacturing a semiconductor device having a transporting step of transporting a transported object mounted on a passive transport cart that travels on a track provided on the ceiling side. The transport carriage includes means for engaging and fixing a part of the transported object.

  Among the inventions disclosed in the present application, effects obtained by typical ones will be briefly described as follows.

  It is possible to speed up and stabilize the transport of the FOUP by the transport cart that travels on the track provided on the ceiling side in the clean room used when manufacturing semiconductor devices and the like.

  Hereinafter, embodiments of the present invention will be described in detail with reference to the drawings. Note that components having the same function are denoted by the same reference symbols throughout the drawings for describing the embodiment, and the repetitive description thereof will be omitted.

(Embodiment 1)
First, the conveyance system shown in this embodiment will be described with reference to FIG. FIG. 1 is a configuration diagram illustrating an example of a transport system according to the present embodiment.

  As shown in FIG. 1, the transfer system shown in the present embodiment is used in, for example, a semiconductor device manufacturing technique and is performed in a clean room 20 in which a predetermined cleanliness is ensured. A track 21 for traveling the passive transport carriage 1 that carries and transports the object to be transported is secured. That is, a transport system (ceiling transport track system) that transports the object to be transported by the transport cart 1 that runs along the track 21 is constructed. In the following description, the conveyed object is described as FOUP.

  The track 21 is laid in a loop on the ceiling side in the clean room 20. In the loop, a plurality of processing device groups A, B, and C in which a series of processing devices necessary for various processes of, for example, a semiconductor device manufacturing process are arranged. In each of the processing apparatus groups A, B, and C, a semiconductor wafer (hereinafter simply referred to as “wafer”) between the processing apparatuses is transported in the bay between the processing apparatuses by the floor transport carriage 22 that runs on the floor.

  For example, the wafers that have been processed in the processing apparatus group A are transferred into the bay by the floor transfer carriage 22 while being stored in the FOUP, and are placed on the stocker 23 a connected to the track 21. The FOUP placed on the stocker 23a is then placed on the transport carriage 1 and transported to the processing device group B that performs the next process. The FOUP is placed on the stocker 23b from the transport carriage 1 and further transported to each processing apparatus by the on-floor transport carriage 22 in the processing apparatus group B. The wafer is appropriately taken out from the FOUP and required processing is performed on the wafer. The

  The wafers that have been processed in the processing apparatus group B are transported in the bay by the floor transport carriage 22 while being stored in the FOUP, and are placed on the stocker 23 b connected to the track 21. The FOUP placed in the stocker 23b is then placed on the transport carriage 1 and transported to the processing device group C that performs processing of the next process. The FOUP is placed on the stocker 23c from the transport carriage 1 and further transported to each processing apparatus by the on-floor transport carriage 22 in the processing apparatus group C. The wafer is appropriately taken out from the FOUP, and the required processing is performed on the wafer. The

  Next, an outline of the passive transport carriage shown in this embodiment will be described with reference to FIGS. FIG. 2 is a side view schematically showing the configuration of the transport carriage 1 in the present embodiment, and shows a state where the FOUP 10 is mounted. FIG. 3 is a front view schematically showing the configuration of the transport carriage 1 shown in FIG. In addition, although the guide which prevents the shift | offset | difference of FOUP10 at the time of conveyance is formed in the loading platform part 2 of the conveyance trolley | bogie 1 shown in FIG. 2 and FIG. 3, it is not illustrated.

  Here, in the present embodiment, as shown in FIGS. 2 and 3, the x direction is the direction in which, for example, a wafer stored in the FOUP 10 is taken out, the y direction is the direction in which the transport carriage 1 travels, and the z direction is the track surface. It is perpendicular to the direction. The same applies to the x, y, and z directions in the drawings shown below.

  As shown in FIGS. 2 and 3, the transport cart 1 includes a loading platform 2 on which a FOUP 10 containing one or a plurality of wafers is mounted, a travel mechanism 3 that constitutes a self-running function of the transport cart 1, and a track 21. It has wheels 4 that rotate on top. Although not shown, the traveling mechanism unit 3 is supplied with electricity in a non-contact manner from a power supply line laid along the track 21 so as to face the permanent magnet row provided along the track 21. A linear motor that generates thrust between the permanent magnet array is provided. With such a linear motor, the transport carriage 1 can run independently. Therefore, the wheel 4 plays a role of supporting the transport carriage 1 on the track 21 and is not configured as a drive wheel driven by a motor or the like.

  As shown in the front view of FIG. 3, the track 21 has a shape in which side walls 21 b are raised on both sides of a track surface 21 a including a traveling surface on which the wheels 4 travel, and is generally box-shaped as a whole, and has a concave shape with an upper opening. It is formed in a duct shape.

  Here, the FOUP 10 will be described with reference to FIGS. 4 is a top view schematically showing the configuration of the FOUP 10 in the present embodiment, FIG. 5 is a side view schematically showing the configuration of the FOUP 10 shown in FIG. 4, and FIG. 6 is the configuration of the FOUP 10 shown in FIG. It is a bottom view which shows typically. Note that the FOUP 10 shown in the present embodiment is one that conforms to SEMI (Semiconductor Equipment and Materials Institute) standards.

  As shown in FIG. 4 to FIG. 6, this FOUP 10 has a lid 11 for carrying in and out of the wafer to and from the inside of the FOUP 10 that is a hermetic container on one side of the FOUP 10. . The FOUP 10 has a flange 12 on the top of the FOUP 10. For example, in the case of conveyance by an active conveyance carriage having a transfer mechanism, the flange 12 is gripped by the robot of the transfer mechanism, and the FOUP 10 is fixed to the active conveyance carriage.

  The FOUP 10 has a bottom conveyor rail 13 and a side fork-lift flange 14 on two opposing side surfaces. The bottom conveyor rail 13 has a positioning hole 15 when the FOUP 10 is disposed on the loading platform 2 of the transport carriage 1, for example. Further, the side forklift flange 14 has a V-groove 16 for positioning in the case of conveyance by RGV (Rail Guided Vehicle), for example.

  The FOUP 10 has a front retaining feature 17 and a center retaining feature 18 on the back surface thereof. For example, when the FOUP 10 is placed on a load port of the processing apparatus, the front retaining feature 17 and the center retaining feature 18 are fixed to the FOUP 10 by inserting pins of a transport mechanism of the processing apparatus. .

  Next, the clamp mechanism 5 of the transport carriage 1 shown in the present embodiment will be described with reference to FIGS. FIG. 7 is an enlarged view schematically showing the main part of the side surface of the transport cart 1 shown in FIGS. 2 and 3 and the FOUP 10 mounted on the transport cart 1, and the clamp mechanism 5 fixes the FOUP 10 (fixed state). L) shows the state. FIG. 8 is an enlarged view schematically showing the main part of the side surface of the transport cart 1 shown in FIGS. 2 and 3 and the FOUP 10 mounted on the transport cart 1, and the clamp mechanism 5 releases the FOUP 10 (in the released state). U) Indicates the state of being. FIG. 9 is an explanatory diagram showing the timing at which the clamp mechanism 5 is fixed. FIG. 10 is an explanatory diagram showing the timing when the clamp mechanism 5 is released.

  As shown in FIG. 7, the clamp mechanism 5 of the transport carriage 1 clamps the bottom conveyor rail 13 of the FOUP 10, that is, the transport carriage 1 and the FOUP 10 are fixed (fixed state L). In the present embodiment, the pin-shaped jig 5a has a clamp mechanism 5 whose tip is movable by a rotating shaft 6 driven by an electric motor. The jig 5a is fitted into the positioning hole 15 of the bottom conveyor rail 13 of the FOUP 10, and the tip of the jig 5a is automatically tilted by the rotating shaft 6 driven by the electric motor, and the bottom conveyor rail 13 is fixed. Will be. In other words, the FOUP 10 has a positioning hole 15 of the bottom conveyor rail 13 which is a fixed portion fixed to the transport carriage 1, and the transport carriage 1 has a jig 5a, and a part of the jig 5a The clamp mechanism 5 that fixes the positioning hole 15 of the bottom conveyor rail 13 is provided.

  On the other hand, as shown in FIG. 8, the clamp mechanism 5 in the released state does not fix (clamp) the bottom conveyor rail 13 of the FOUP 10, that is, releases the transport carriage 1 and the FOUP 10 (released state U). In this embodiment, since the clamp mechanism 5 whose tip is movable by the rotating shaft 6 driven by the electric motor is used, the tip of the jig 5a is automatically driven by the rotating shaft 6 driven by the electric motor. This causes the bottom conveyor rail 13 to be released from being fixed.

  Here, a method of automatically fixing / releasing the transport carriage 1 by the clamp mechanism 5 will be described. For example, when the passive transport carriage 1 performs transfer with an active device such as the stocker 23a shown in FIG. 1, as shown in FIGS. 9 and 10, SEMI standard E84 (enhanced carrier transfer parallel I / O In general, the interface is taken in a sequence conforming to the interface specification. In the present embodiment, the clamping mechanism 5 is automatically fixed / released by using a method of taking an interface in this sequence.

  Specifically, fixing / releasing of the clamp mechanism 5 will be described. When the load sequence is performed between the transport carriage 1 and an active device such as the stocker 23a illustrated in FIG. 1, the load sequence illustrated in FIG. 9 is performed. Upon completion of this sequence, the transport carriage 1 automatically fixes the clamp mechanism 5 of the transport carriage 1 and fixes the FOUP 10 to the transport carriage 1 (see FIG. 7). In the case of the unload sequence, the unload sequence shown in FIG. 10 is performed. The transport carriage 1 automatically releases the clamp mechanism at the first timing of this sequence, and releases the FOUP 10 from the fixation of the transport carriage 1 (see FIG. 8).

  Therefore, the passive transport carriage 1 that carries and transports the FOUP 10 that is the transported object and travels on the track provided on the ceiling side is engaged and fixed to the bottom conveyor rail 13 that is a part of the FOUP 10. Therefore, the FOUP 10 can be fixed and run on the track at high speed and stably. Furthermore, conveyance capability can be improved by using the conveyance carriage 1 shown in this Embodiment. That is, the conveyance of the FOUP 10 in the conveyance system can be speeded up and stabilized. In addition, the product TAT in the semiconductor device manufacturing method employing such a transfer system can be shortened, and productivity can be improved.

(Embodiment 2)
In the present embodiment, a clamp mechanism of a transport carriage that fixes the bottom conveyor rail itself of the FOUP will be described with reference to FIG. FIG. 11 is an enlarged view schematically showing a main part of the side surface of the transport cart 1 shown in FIGS. 2 and 3 and the FOUP 10 mounted on the transport cart 1, and the clamp mechanism 5 fixes the FOUP 10 (fixed state). L) and released (released state U). In addition, in the transfer technique shown in the first embodiment, the transfer carriage shown in the present embodiment can be applied.

  As shown in FIG. 11, the clamp mechanism 5 of the transport carriage 1 clamps the bottom conveyor rail 13 of the FOUP 10, that is, the transport carriage 1 and the FOUP 10 are fixed (fixed state L). In the present embodiment, the pin-shaped jig 5b has a clamp mechanism 5 whose tip is movable by a rotating shaft 6 driven by an electric motor. The tip of the jig 5b is automatically tilted by the rotating shaft 6 driven by the electric motor, and the bottom conveyor rail 13 itself is fixed. In other words, the FOUP 10 has a bottom conveyor rail 13 that is a fixed portion fixed to the transport carriage 1, and the transport carriage 1 has a jig 5b, and the bottom conveyor rail 13 is part of the jig 5b. Is provided with a clamp mechanism 5 for fixing the.

  On the other hand, FIG. 11 also shows that the clamp mechanism 5 in the released state does not fix (clamp) the bottom conveyor rail 13 of the FOUP 10, that is, the release of the transport carriage 1 and the FOUP 10 (released state U). In the present embodiment, the clamp mechanism 5 uses the clamp mechanism 5 whose tip is movable by the rotary shaft 6 driven by the electric motor. Therefore, the rotary shaft is driven by the electric motor at the tip of the jig 5b. By automatically waking up at 6, the bottom conveyor rail 13 is released from the fixed state.

  The method of automatically fixing / releasing the transport carriage 1 by the clamp mechanism 5 conforms to SEMI standard E84 (enhanced carrier transfer parallel I / O interface specification) as described in the first embodiment. The clamping mechanism 5 is automatically fixed / released using a method of taking an interface in a sequence.

  Therefore, the passive transport carriage 1 that carries and transports the FOUP 10 that is the transported object and travels on the track provided on the ceiling side is engaged and fixed to the bottom conveyor rail 13 that is a part of the FOUP 10. Therefore, the FOUP 10 can be fixed and run on the track at high speed and stably. Furthermore, conveyance capability can be improved by using the conveyance carriage 1 shown in this Embodiment. That is, the conveyance of the FOUP 10 in the conveyance system can be speeded up and stabilized. In addition, the product TAT in the semiconductor device manufacturing method employing such a transfer system can be shortened, and productivity can be improved.

(Embodiment 3)
In the present embodiment, a clamp mechanism for a transport carriage that fixes the front retaining feature of the FOUP will be described with reference to FIGS. FIG. 12 is an enlarged view schematically showing the main part of the side surface of the transport cart 1 shown in FIGS. 2 and 3 and the FOUP 10 mounted on the transport cart 1, and the clamp mechanism 5 is fixed (fixed state L). And the state which is canceled (released state U) is shown through. FIG. 13 is an enlarged view schematically showing a main part of the bottom surface of the FOUP 10 shown in FIG. 12, and shows a state in which the clamp mechanism 5 fixes (fixed state L) and releases (released state U) the FOUP 10. Show.

  As shown in FIGS. 12 and 13, the clamp mechanism 5 of the transport carriage 1 clamps the front retaining feature 17 of the FOUP 10, that is, the transport carriage 1 and the FOUP 10 are fixed (fixed state L). In the present embodiment, a jig 5 c that can be fixed / released by a rotating shaft 6 driven by an electric motor is used for the clamp mechanism 5. The jig 5c is automatically moved by the rotating shaft 6 driven by the electric motor, and the front retaining feature 17 is fixed. In other words, the FOUP 10 has a front retaining feature 17 that is a fixed portion fixed to the transport carriage 1, and the transport cart 1 has a jig 5 c that is a clamp mechanism 5 that fixes the front retaining feature 17. Will be doing.

  On the other hand, in FIGS. 12 and 13, the clamp mechanism 5 in the released state does not fix (clamp) the front retaining feature 17 of the FOUP 10, that is, a state in which the transport carriage 1 and the FOUP 10 are released (released state U). Is also shown. In the present embodiment, the hook-shaped jig 5c has a clamp mechanism 5 that is movable by a rotating shaft 6 that is driven by an electric motor. By automatically moving the clamp mechanism 5 by the rotating shaft 6 driven by the electric motor, the front retaining feature 17 is released from the fixed state.

  The method of automatically fixing / releasing the transport carriage 1 by the clamp mechanism 5 conforms to SEMI standard E84 (enhanced carrier transfer parallel I / O interface specification) as described in the first embodiment. The clamping mechanism 5 is automatically fixed / released using a method of taking an interface in a sequence.

  Accordingly, the passive transport carriage 1 that carries and transports the FOUP 10 that is the transported object and travels on the track provided on the ceiling side is engaged with the front retaining feature 17 that is a part of the FOUP 10 and Since the fixing means is provided, the FOUP 10 can be fixed and the vehicle can travel at high speed and stably on the track. Furthermore, conveyance capability can be improved by using the conveyance carriage 1 shown in this Embodiment. That is, the conveyance of the FOUP 10 in the conveyance system can be speeded up and stabilized. In addition, the product TAT in the semiconductor device manufacturing method employing such a transfer system can be shortened, and productivity can be improved.

(Embodiment 4)
In the present embodiment, a clamp mechanism of a transport carriage that fixes the center retaining feature of the FOUP will be described with reference to FIGS. FIG. 14 is an enlarged view schematically showing the main part of the side surface of the transport cart 1 shown in FIGS. 2 and 3 and the FOUP 10 mounted on the transport cart 1, and the clamp mechanism 5 is fixed (fixed state L). / The state of being released (released state U) is shown through. FIG. 15 is an enlarged view schematically showing a main part of the bottom surface of the FOUP 10 shown in FIG. 14, and shows a state in which the clamp mechanism 5 fixes the FOUP 10 (fixed state L).

  As shown in FIGS. 14 and 15, the clamp mechanism 5 of the transport carriage 1 clamps the center retaining feature 18 of the FOUP 10, that is, the transport carriage 1 and the FOUP 10 are fixed (fixed state L). In the present embodiment, the hook-shaped jig 5d has a clamp mechanism 5 that is fixed / released by the rotary shaft 6 driven by an electric motor. The jig 5d is automatically moved by the rotating shaft 6 driven by the electric motor, and the center retaining feature 18 is fixed. In other words, the FOUP 10 has a center retaining feature 18 that is a fixed portion fixed to the transport carriage 1, and the transport carriage 1 has a jig 5d, and the center retaining feature is part of the jig 5d. A clamp mechanism 5 for fixing the feature 18 is provided.

  On the other hand, FIG. 15 also shows a state where the clamp mechanism 5 in the released state does not fix (clamp) the center retaining feature 18 of the FOUP 10, that is, releases the transport carriage 1 and the FOUP 10 (released state U). ing. In the present embodiment, since the clamp mechanism 5 movable by the rotating shaft 6 driven by the electric motor is used, the jig 5d is automatically moved by the rotating shaft 6 driven by the electric motor. The center retaining feature 18 is released from the fixed state.

  The method of automatically fixing / releasing the transport carriage 1 by the clamp mechanism 5 conforms to SEMI standard E84 (enhanced carrier transfer parallel I / O interface specification) as described in the first embodiment. The clamp mechanism 5 is automatically fixed / released using a method of taking an interface in a sequence.

  Accordingly, the passive transport carriage 1 that carries and transports the FOUP 10 that is the transported object and travels on the track provided on the ceiling side is engaged with the center retaining feature 18 that is a part of the FOUP 10 and Since the fixing means is provided, the FOUP 10 can be fixed and the vehicle can travel at high speed and stably on the track. Furthermore, conveyance capability can be improved by using the conveyance carriage 1 shown in this Embodiment. That is, the conveyance of the FOUP 10 in the conveyance system can be speeded up and stabilized. In addition, the product TAT in the semiconductor device manufacturing method employing such a transfer system can be shortened, and productivity can be improved.

(Embodiment 5)
In the present embodiment, a clamp mechanism of a transport carriage that fixes a side fork flange of the FOUP will be described with reference to FIG. FIG. 16 is an enlarged view schematically showing main portions of the side surfaces of the transport carriage 1 shown in FIGS. 2 and 3 and the FOUP 10 mounted on the transport carriage 1, and the clamp mechanism 5 is fixed (fixed state L). / Indicates the state of being released (released state U).

  As shown in FIG. 16, the clamp mechanism 5 of the transport carriage 1 clamps the side forklift flange 14 of the FOUP 10, that is, the transport carriage 1 and the FOUP 10 are fixed (fixed state L). In the present embodiment, a pin-shaped jig 5e having a clamp mechanism 5 whose tip is movable by a rotating shaft 6 driven by an electric motor is used. The tip of the jig 5e is automatically tilted by the rotating shaft 6 driven by the electric motor, and the side forklift flange 14 itself is fixed. In other words, the FOUP 10 has a side forklift flange 14 that is a fixed portion fixed to the transport carriage 1, and the transport carriage 1 has a jig 5e, and the side forklift flange 14 is part of the jig 5e. Is provided with a clamp mechanism 5 for fixing the.

  On the other hand, FIG. 16 also shows that the clamp mechanism 5 in the released state does not fix (clamp) the side forklift flange 14 of the FOUP 10, that is, the release between the transport carriage 1 and the FOUP 10 (released state U). In this embodiment, since the clamp mechanism 5 whose tip is movable by the rotary shaft 6 driven by the electric motor is used, the tip of the jig 5e is automatically driven by the rotary shaft 6 driven by the electric motor. As a result, the side forklift flange 14 is released from the fixed state.

  The method of automatically fixing / releasing the transport carriage 1 by the clamp mechanism 5 conforms to SEMI standard E84 (enhanced carrier transfer parallel I / O interface specification) as described in the first embodiment. The clamp mechanism 5 is automatically fixed / released using a method of taking an interface in a sequence.

  Therefore, the passive transport carriage 1 that carries and transports the FOUP 10 that is the transported object and travels on the track provided on the ceiling side is engaged and fixed to the side fork flange 14 that is a part of the FOUP 10. Therefore, the FOUP 10 can be fixed and run on the track at high speed and stably. Furthermore, conveyance capability can be improved by using the conveyance carriage 1 shown in this Embodiment. That is, the conveyance of the FOUP 10 in the conveyance system can be speeded up and stabilized. In addition, the product TAT in the semiconductor device manufacturing method employing such a transfer system can be shortened, and productivity can be improved.

  As mentioned above, the invention made by the present inventor has been specifically described based on the embodiment. However, the present invention is not limited to the embodiment, and various modifications can be made without departing from the scope of the invention. Needless to say.

  For example, in the above-described embodiment, the case where the FOUP is applied as the transported object has been described. However, the present invention can also be applied to a reticle pad or a SMIF (Standard of Mechanical Interface) pad.

  Further, for example, in the above-described embodiment, the case where the transport carriage is applied to the manufacturing technology of the semiconductor device has been described. However, the present invention can also be applied to the manufacturing technology of the liquid crystal device and the optical disk device.

  INDUSTRIAL APPLICABILITY The present invention can be widely used in the manufacturing industry in general by a transport cart and a transport technology using the transport cart, and can be used particularly in the manufacturing industry of semiconductor devices.

It is a lineblock diagram showing an example of a conveyance system in an embodiment of the invention. It is a side view which shows typically the structure of the conveyance trolley in embodiment of this invention. It is a front view which shows typically the structure of the conveyance trolley shown in FIG. It is a top view which shows typically the structure of FOUP in embodiment of this invention. It is a side view which shows typically the structure of FOUP shown in FIG. It is a bottom view which shows typically the structure of FOUP shown in FIG. It is an enlarged view which shows typically the side principal part of the conveyance trolley in this Embodiment 1, and FOUP mounted in the conveyance trolley. It is an enlarged view which shows typically the side principal part of the conveyance trolley in this Embodiment 1, and FOUP mounted in the conveyance trolley. It is explanatory drawing which showed the timing which the clamp mechanism in embodiment of this invention fixes. It is explanatory drawing which showed the timing which the clamp mechanism in embodiment of this invention cancels | releases. It is an enlarged view which shows typically the side principal part of the conveyance trolley in this Embodiment 2, and FOUP mounted in the conveyance trolley. It is an enlarged view which shows typically the side principal part of the conveyance trolley in this Embodiment 3, and FOUP mounted in the conveyance trolley. It is an enlarged view which shows typically the bottom face principal part of FOUP shown in FIG. It is an enlarged view which shows typically the side principal part of the conveyance trolley in this Embodiment 4, and FOUP mounted in the conveyance trolley. It is an enlarged view which shows typically the bottom face principal part of FOUP shown in FIG. It is an enlarged view which shows typically the side principal part of the conveyance trolley in this Embodiment 5, and FOUP mounted in the conveyance trolley. It is a side view which shows typically the structure of the conveyance trolley which this inventor examined. It is a top view which shows typically the conveyance trolley | bogie shown in FIG. It is an enlarged view which shows typically the principal part of the to-be-conveyed object mounted in the conveyance trolley shown in FIG.

Explanation of symbols

DESCRIPTION OF SYMBOLS 1 Carriage cart 2 Loading platform part 3 Traveling mechanism part 4 Wheel 5 Clamp mechanism 5a Jig 5b Jig 5c Jig 5d Jig 5e Jig 6 Rotating shaft driven by an electric motor 7 Clamp mechanism 10 FOUP (conveyed object)
11 Lid 12 Flange 13 Bottom Conveyor Rail 14 Side Fork Lift Flange 15 Positioning Hole 16 V Groove 17 Front Retaining Feature 18 Center Retaining Feature 20 Clean Room 21 Track 21a Track Surface 21b Side Wall 22 Floor Transport Cart 23a Stocker 23b Stocker 23c Stocker 101 Transport Cart 102 FOUP (conveyed object)
103 loading platform 104 traveling mechanism 105 track 106 wheel 107 guide 108 positioning pin 109 bottom conveyor rail 110 positioning hole A processing unit group B processing unit group C processing unit group L fixed state U release state

Claims (8)

It is a passive type transport carriage that carries and transports an object to be transported and travels on a track provided on the ceiling side,
A conveying cart characterized by comprising means for engaging and fixing a part of the object to be conveyed. A transport system having a track on the ceiling side for running a passive transport carriage that carries and transports an object to be transported,
A transport system comprising: means for engaging and fixing the transport carriage with a part of the transported object. The conveyed object is a FOUP,
The conveyance system according to claim 2, wherein a part of the object to be conveyed is a positioning hole of a bottom conveyor rail. The conveyed object is a FOUP,
The conveyance system according to claim 2, wherein a part of the object to be conveyed is a bottom conveyor rail. The conveyed object is a FOUP,
The transport system according to claim 2, wherein a part of the transported object is a front retaining feature. The conveyed object is a FOUP,
The transport system according to claim 2, wherein a part of the transported object is a center retaining feature. The conveyed object is a FOUP,
The transport system according to claim 2, wherein a part of the transported object is a side forklift flange. A manufacturing method of a semiconductor device having a transporting process of mounting and transporting an object to be transported on a passive transport cart that travels on a track provided on a ceiling side,
A method of manufacturing a semiconductor device, comprising means for engaging and fixing a part of the object to be transported by the transport carriage.

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