JP2006210623A5 - - Google Patents

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Publication number
JP2006210623A5
JP2006210623A5 JP2005020401A JP2005020401A JP2006210623A5 JP 2006210623 A5 JP2006210623 A5 JP 2006210623A5 JP 2005020401 A JP2005020401 A JP 2005020401A JP 2005020401 A JP2005020401 A JP 2005020401A JP 2006210623 A5 JP2006210623 A5 JP 2006210623A5
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JP
Japan
Prior art keywords
optical system
illumination
reticle
exposure apparatus
illuminated surface
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
JP2005020401A
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English (en)
Japanese (ja)
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JP2006210623A (ja
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Publication date
Application filed filed Critical
Priority to JP2005020401A priority Critical patent/JP2006210623A/ja
Priority claimed from JP2005020401A external-priority patent/JP2006210623A/ja
Publication of JP2006210623A publication Critical patent/JP2006210623A/ja
Publication of JP2006210623A5 publication Critical patent/JP2006210623A5/ja
Withdrawn legal-status Critical Current

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JP2005020401A 2005-01-27 2005-01-27 照明光学系及びそれを有する露光装置 Withdrawn JP2006210623A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2005020401A JP2006210623A (ja) 2005-01-27 2005-01-27 照明光学系及びそれを有する露光装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2005020401A JP2006210623A (ja) 2005-01-27 2005-01-27 照明光学系及びそれを有する露光装置

Publications (2)

Publication Number Publication Date
JP2006210623A JP2006210623A (ja) 2006-08-10
JP2006210623A5 true JP2006210623A5 (https=) 2008-03-21

Family

ID=36967126

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2005020401A Withdrawn JP2006210623A (ja) 2005-01-27 2005-01-27 照明光学系及びそれを有する露光装置

Country Status (1)

Country Link
JP (1) JP2006210623A (https=)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5653182B2 (ja) * 2003-05-22 2015-01-14 キヤノン株式会社 露光方法、露光装置及びデバイス製造方法
JP6147058B2 (ja) * 2013-04-01 2017-06-14 キヤノン株式会社 ノズルチップの製造方法
KR20180010242A (ko) * 2015-05-21 2018-01-30 칼 짜이스 에스엠티 게엠베하 마이크로리소그래픽 투영 장치의 작동 방법

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