JP2006209964A5 - - Google Patents

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JP2006209964A5
JP2006209964A5 JP2006085468A JP2006085468A JP2006209964A5 JP 2006209964 A5 JP2006209964 A5 JP 2006209964A5 JP 2006085468 A JP2006085468 A JP 2006085468A JP 2006085468 A JP2006085468 A JP 2006085468A JP 2006209964 A5 JP2006209964 A5 JP 2006209964A5
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magnetic
terminal
magnetic recording
slider
recording element
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JP2006085468A
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JP2006209964A (en
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Priority to JP2006085468A priority Critical patent/JP2006209964A/en
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Claims (13)

スライダ基板と、この基板上に形成された磁気記録素子と磁気再生素子とを備えた磁気ヘッドスライダであって、前記磁気記録素子と接地電位に電気的に接続する中継端子を流出面端面に備えた磁気ヘッドスライダ。 A slider substrate, a magnetic head slider and a magnetic recording element and the magnetic read element formed on the substrate, the outflow surface facet relay terminal electrically connected to a ground potential the magnetic recording element Magnetic head slider provided. 前記中継端子は、前記磁気記録素子の下部磁極と導通接続している請求項1記載の磁気ヘッドスライダ。 The relay terminal, a magnetic head slider according to claim 1 wherein the conductive connected to the lower pole of the magnetic recording element. 前記中継端子は、加熱体である通電部の端子である請求項１または２に記載の磁気ヘッドスライダ。 The relay terminal, a magnetic head slider according to claim 1 or 2 is a terminal of the conduction portion is a heating member. 前記通電部は、前記スライダ基板上に形成された下地絶縁膜と、この下地絶縁膜上に形成された前記磁気再生素子の下部磁気シールドとの間に形成されている請求項３記載の磁気ヘッドスライダ。 4. The magnetic head according to claim 3, wherein the energizing portion is formed between a base insulating film formed on the slider substrate and a lower magnetic shield of the magnetic reproducing element formed on the base insulating film. slider. スライダ基板と、この基板上に形成された磁気記録素子と磁気再生素子とスライダの一部を加熱する加熱体と、前記磁気記録素子と記録端子とを導通接続する第一の配線と、前記磁気再生素子の電極と再生端子とを導通接続する第二の配線と、前記加熱体の端子と前記磁気記録素子とを導通接続する第三の配線とを備えたヘッドスライダ。A slider substrate; a magnetic recording element formed on the substrate; a magnetic reproducing element; a heating body for heating a part of the slider; a first wiring for electrically connecting the magnetic recording element and the recording terminal; A head slider comprising: a second wiring that conductively connects an electrode of the reproducing element and a reproducing terminal; and a third wiring that conductively connects the terminal of the heating element and the magnetic recording element. スライダ基板と、この基板上に形成された磁気記録素子と磁気再生素子とスライダの一部を加熱する加熱体と、前記磁気記録素子と一対の記録端子とを導通接続する一対の第一の配線と、前記磁気再生素子の一対の電極と一対の再生端子とを導通接続する一対の第二の配線と、前記加熱体の一対の中継端子の一方と前記磁気記録素子とを接続する第三の配線とを備えたヘッドスライダ。A slider substrate, a magnetic recording element formed on the substrate, a magnetic reproducing element, a heating body for heating a part of the slider, and a pair of first wirings for electrically connecting the magnetic recording element and a pair of recording terminals A pair of second wires that electrically connect the pair of electrodes of the magnetic reproducing element and the pair of reproducing terminals, and a third that connects one of the pair of relay terminals of the heating body and the magnetic recording element Head slider with wiring. 前記第一の配線は前記磁気記録素子のコイルと前記記録端子とを導通接続し、前記第三の配線は前記磁気記録素子の下部磁極と前記加熱体の端子とを導通接続している請求項５または６に記載の磁気ヘッドスライダ。The first wiring electrically connects a coil of the magnetic recording element and the recording terminal, and the third wiring electrically connects a lower magnetic pole of the magnetic recording element and a terminal of the heating body. 5. A magnetic head slider according to 5 or 6. 前記加熱体は、前記スライダ基板上に形成された下地絶縁膜と、この下地絶縁膜上に形成された前記磁気再生素子の下部磁気シールドとの間に形成されている請求項５または６に記載の磁気ヘッドスライダ。 7. The heating body is formed between a base insulating film formed on the slider substrate and a lower magnetic shield of the magnetic reproducing element formed on the base insulating film. Magnetic head slider . スライダ基板と、この基板上に形成された下部磁極を有する磁気記録素子と磁気再生素子と、前記磁気記録素子の端子及び前記磁気再生素子の端子と共に前記スライダ基板の流出側端面に形成された加熱体の端子とを有する薄膜磁気ヘッドスライダと、この薄膜磁気ヘッドスライダを支持するサスペンションとを備え、前記加熱体の端子は前記サスペンションの配線及び前記磁気記録素子と導通接続している磁気ヘッド支持機構。  A slider substrate, a magnetic recording element having a lower magnetic pole formed on the substrate, a magnetic reproducing element, a terminal of the magnetic recording element and a terminal of the magnetic reproducing element, and heating formed on an end surface on the outflow side of the slider substrate A magnetic head support mechanism comprising: a thin film magnetic head slider having a body terminal; and a suspension for supporting the thin film magnetic head slider, wherein the heating body terminal is electrically connected to the suspension wiring and the magnetic recording element. . スライダ基板と、この基板上に形成された磁気記録素子と磁気再生素子とスライダ基板の一部を加熱する加熱体と、前記磁気記録素子と記録端子とを導通接続する第一の配線と、前記磁気再生素子の電極と再生端子とを導通接続する第二の配線と、前記加熱体の端子と前記磁気記録素子とを導通接続する第三の配線とを備えたヘッドスライダと、A slider substrate, a magnetic recording element and a magnetic reproducing element formed on the substrate, a heating body for heating a part of the slider substrate, a first wiring for electrically connecting the magnetic recording element and the recording terminal, A head slider comprising: a second wiring for electrically connecting the electrode of the magnetic reproducing element and the reproducing terminal; and a third wiring for electrically connecting the terminal of the heating body and the magnetic recording element;
前記記録端子、前記再生端子、及び前記加熱体の端子とにそれぞれ対応して導通接続される配線を備え、これら配線のうち前記中継端子に対応して導通接続される配線を中央に配置したサスペンションと、を備えた磁気ヘッド支持機構。  Suspension in which wiring connected to correspond to each of the recording terminal, the reproduction terminal, and the terminal of the heating body is provided, and wiring connected to correspond to the relay terminal among these wirings is arranged in the center. And a magnetic head support mechanism. 基板上に形成した絶縁膜上に加熱体である通電部を形成し、この通電部上に絶縁層を形成する工程と、  Forming a current-carrying part that is a heating element on the insulating film formed on the substrate, and forming an insulating layer on the current-carrying part;
前記絶縁層上に下部シールド膜と下部ギャップ膜とを形成し、磁気再生素子と、この磁気再生素子の磁気信号を引き出す一対の電極を形成する工程と、  Forming a lower shield film and a lower gap film on the insulating layer, forming a magnetic reproducing element, and a pair of electrodes for extracting magnetic signals of the magnetic reproducing element;
前記磁気再生素子上に上部ギャップ膜と上部シールド膜と上部シールド絶縁膜とを形成し、この上部シールド絶縁膜上に磁気記録素子の下部磁極を形成する工程と、  Forming an upper gap film, an upper shield film and an upper shield insulating film on the magnetic reproducing element, and forming a lower magnetic pole of the magnetic recording element on the upper shield insulating film;
この下部磁極の上に磁気ギャップ膜、前記磁気記録素子の上部磁極を形成し、この上部磁極に磁界を発生させる電流を流すコイル、及び、絶縁膜を形成する工程と、  Forming a magnetic gap film on the lower magnetic pole, an upper magnetic pole of the magnetic recording element, a coil for passing a current for generating a magnetic field in the upper magnetic pole, and an insulating film;
前記電極から引き出された再生用引き出し線と、前記コイルから引き出された記録用引き出し線とを形成する工程と  Forming a reproducing lead line drawn from the electrode and a recording lead line drawn from the coil;
前記コイルへ電流を外部より入力する前記磁気記録素子の一対の端子と磁気信号を外部へ伝達する前記磁気再生素子の一対の端子とを形成する工程と、  Forming a pair of terminals of the magnetic recording element for inputting a current from the outside to the coil and a pair of terminals of the magnetic reproducing element for transmitting a magnetic signal to the outside;
前記磁気記録素子の洗浄工程で用いる水溶液中における前記磁気記録素子の標準電極電位を不働態領域にずらす電位の材料からなる導体を用い前記通電部の一対の端子を形成する工程と、  Forming a pair of terminals of the current-carrying portion using a conductor made of a material that shifts the standard electrode potential of the magnetic recording element in the aqueous solution used in the cleaning step of the magnetic recording element to a passive region;
前記通電部のいずれか一方の端子と前記下部磁極或いは前記下部シールド膜とを導通接続する工程と、  A step of conductively connecting any one terminal of the energization part and the lower magnetic pole or the lower shield film;
磁気記録媒体に対向する浮上面を研磨加工及び洗浄する工程と備えた磁気ヘッドスライダの製造方法。  A method of manufacturing a magnetic head slider, comprising: polishing and cleaning an air bearing surface facing a magnetic recording medium. 基板上に形成した絶縁膜上に加熱体である通電部と、磁気記録素子の下部磁極と、上部磁極に磁界を発生させる電流を流すコイルへ電流を外部より入力する前記磁気記録素子の一対の端子と、磁気再生素子の磁気信号を外部へ伝達する前記磁気再生素子の一対の端子と、前記磁気記録素子の洗浄工程で用いる水溶液中における前記磁気記録素子の標準電極電位を不働態領域にずらす電位の導体からなる前記通電部の一対の端子とを備えた薄膜磁気ヘッドスライダの前記通電部と前記下部磁極或いは前記磁気記録再生素子の下部シールド膜とを導通接続する工程と、  A pair of magnetic recording elements that externally input current to a current-carrying portion that is a heating element on an insulating film formed on the substrate, a lower magnetic pole of the magnetic recording element, and a coil that supplies a current that generates a magnetic field in the upper magnetic pole. A terminal, a pair of terminals of the magnetic reproducing element for transmitting a magnetic signal of the magnetic reproducing element to the outside, and a standard electrode potential of the magnetic recording element in an aqueous solution used in a cleaning process of the magnetic recording element is shifted to a passive region Electrically connecting the current-carrying part of the thin-film magnetic head slider comprising a pair of terminals of the current-carrying part made of a potential conductor and the lower magnetic pole or the lower shield film of the magnetic recording / reproducing element;
磁気記録媒体に対向する浮上面を研磨加工及び洗浄する工程と、  Polishing and cleaning the air bearing surface facing the magnetic recording medium;
前記薄膜磁気ヘッドスライダをこの薄膜磁気ヘッドスライダを支持するサスペンションと接着し、前記通電部のいずれか一方の端子とこのサスペンションの配線とを導通接続した後に洗浄する工程を備えた磁気ヘッド支持機構の製造方法。  A magnetic head support mechanism comprising a step of bonding the thin film magnetic head slider to a suspension supporting the thin film magnetic head slider, and cleaning the conductive film after electrically connecting any one of the terminals of the current-carrying portion and the wiring of the suspension. Production method. 前記サスペンションの配線と導通接続後の洗浄工程において、前記通電部の一対の端子は、前記サスペンションを構成する金属とは電気的に絶縁して洗浄を行う請求項１２に記載の磁気ヘッド支持機構の製造方法。  13. The magnetic head support mechanism according to claim 12, wherein the pair of terminals of the current-carrying portion is electrically insulated from the metal constituting the suspension in the cleaning process after the suspension wiring is electrically connected. Production method.
JP2006085468A 2006-03-27 2006-03-27 Magnetic disk device Pending JP2006209964A (en)

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Cited By (3)

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US8400734B2 (en) 2007-08-22 2013-03-19 Kabushiki Kaisha Toshiba Magnetic recording head and magnetic recording apparatus
US8547662B2 (en) 2007-08-22 2013-10-01 Kabushiki Kaisha Toshiba Magnetic recording head and magnetic recording apparatus
US8654480B2 (en) 2007-09-25 2014-02-18 Kabushiki Kaisha Toshiba Magnetic head with spin torque oscillator and magnetic recording head

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JP2008277586A (en) 2007-04-27 2008-11-13 Toshiba Corp Magnetic element, magnetic recording head and magnetic recording apparatus
KR20080108016A (en) 2007-06-07 2008-12-11 가부시끼가이샤 도시바 Magnetic recording head and magnetic recording device
JP4919901B2 (en) 2007-09-04 2012-04-18 株式会社東芝 Magnetic recording head and magnetic recording apparatus
JP2009080878A (en) 2007-09-25 2009-04-16 Toshiba Corp Magnetic recording head and magnetic recording device
JP2010003353A (en) 2008-06-19 2010-01-07 Toshiba Corp Magnetic recording head, magnetic head assembly, and magnetic recorder
JP5377893B2 (en) 2008-06-19 2013-12-25 株式会社東芝 Magnetic head assembly and magnetic recording / reproducing apparatus
JP5361259B2 (en) 2008-06-19 2013-12-04 株式会社東芝 Spin torque oscillator, magnetic recording head, magnetic head assembly, and magnetic recording apparatus
JP2010040126A (en) 2008-08-06 2010-02-18 Toshiba Corp Magnetic recording head, magnetic head assembly, and magnetic recording device
JP5173750B2 (en) 2008-11-06 2013-04-03 株式会社東芝 Spin torque oscillator, magnetic recording head, magnetic head assembly, and magnetic recording apparatus
JP5558698B2 (en) 2008-11-28 2014-07-23 株式会社東芝 Magnetic recording head, magnetic head assembly, magnetic recording apparatus, and magnetic recording method
JP5606482B2 (en) 2012-03-26 2014-10-15 株式会社東芝 Magnetic head, magnetic head assembly, magnetic recording / reproducing apparatus, and magnetic head manufacturing method

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US8400734B2 (en) 2007-08-22 2013-03-19 Kabushiki Kaisha Toshiba Magnetic recording head and magnetic recording apparatus
US8547662B2 (en) 2007-08-22 2013-10-01 Kabushiki Kaisha Toshiba Magnetic recording head and magnetic recording apparatus
US8654480B2 (en) 2007-09-25 2014-02-18 Kabushiki Kaisha Toshiba Magnetic head with spin torque oscillator and magnetic recording head

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