JP2006208359A5

JP2006208359A5 -

Info

Publication number: JP2006208359A5
Application number: JP2005285586A
Authority: JP
Filing date: 2005-09-29
Publication date: 2009-06-04
Anticipated expiration: 2025-09-29

Claims

A substrate formed of a light-transmitting material so as to include at least one of a coupler that allows light to enter inside under predetermined conditions or a decoupler that emits light from inside under predetermined conditions;
A polymer resin material formed adjacent to the main surface of the substrate on which the coupler or the decoupler is formed, having a thickness of 3 μm or more and 300 μm or less and having a higher refractive index than the material constituting the substrate. An optical waveguide layer,
Is formed on the optical waveguide layer, and in accordance with the introduced sample, the sensing membrane to produce a reaction product having an absorption against evanescent wave of the light or the light,
An optical waveguide type biochemical sensor chip comprising:

2. The optical waveguide biochemical sensor according to claim 1, wherein the coupler or the decoupler is formed of a grating formed of a material having a refractive index higher by 0.3 or more than a refractive index of the optical waveguide layer. Chip.

The material forming the grating includes at least one material selected from titanium oxide, tantalum oxide, indium oxide, tin oxide, zinc oxide, aluminum oxide, and silicon nitride. Optical waveguide type biochemical sensor chip.

The optical waveguide biochemical sensor chip according to any one of claims 1 to 3 , wherein a length of the light propagation region of the optical waveguide layer portion is 3 mm or more.

The optical waveguide layer according to any one of claims 1 to 4, wherein the optical waveguide layer has a thickness that is five times or more the wavelength of the light, and guides the light in a multimode. Biochemical sensor chip.

The optical waveguide biochemical sensor chip according to any one of claims 1 to 5 , wherein the light is divergent light or convergent light.

The light guide according to any one of claims 1 to 6 , wherein a polymer resin layer having the same material and thickness as the optical waveguide layer is further formed on the other main surface of the substrate. Waveguide-type biochemical sensor chip.

The optical waveguide biochemical according to any one of claims 1 to 7 , wherein a protective film made of a material having a lower refractive index than the optical waveguide layer is formed on the surface of the optical waveguide layer. Sensor chip.

To any one of claims 1-8, characterized in that the frame structure film made of a material of the optical waveguide layer from the lower refractive index which is open so as to surround the sensing film is formed on the optical waveguide layer surface An optical waveguide biochemical sensor chip according to the description.

The sensing membrane, 3,3 ', optical waveguide type biochemical sensor chip according to any one of claims 1-9, characterized in that it comprises 5,5'-tetramethylbenzidine (TMBZ).

The optical waveguide biochemical sensor chip according to claim 1, wherein the optical waveguide layer has a thickness of 3 μm or more and 50 μm or less.

Forming at least one of a coupler or a decoupler for entering or emitting light into the substrate on the main surface of the substrate having translucency;
A step of the polymeric resin material is applied having a refractive index higher than that of the substrate to the main surface of the substrate and dried, the thickness to form the following optical waveguide layer 3 [mu] m or more 300μm containing the coupler or said de-coupler,
Forming a sensing film in a predetermined region on the optical waveguide layer,
A method for producing an optical waveguide type biochemical sensor chip comprising:

Forming at least one of a coupler or a decoupler for entering or emitting light into the substrate on the main surface of the substrate having translucency;
A step of the polymeric resin material is applied having a refractive index higher than that of the substrate to the main surface of the substrate and dried, the thickness to form the following optical waveguide layer 3 [mu] m or more 300μm containing the coupler or said de-coupler,
A polymer resin layer having a thickness of 3 μm or more and 300 μm or less coated with a polymer resin having a higher refractive index than that of the substrate on a main surface different from the surface on which the coupler or the decoupler is formed. Forming a step;
Applying the same polymer resin as the polymer resin layer to the main surface of the substrate containing the coupler or decoupler, and drying to form an optical waveguide layer having the same thickness as the polymer resin layer;
Forming a sensing film on the surface of the optical waveguide layer;
A method for producing an optical waveguide type biochemical sensor chip comprising:

The method includes forming a protective film with a material having a refractive index lower than that of the material forming the optical waveguide so as to include at least a region where a coupler or decoupler is formed on the surface of the optical waveguide. 14. A method for producing an optical waveguide biochemical sensor chip according to 12 or 13 .

So as to open surrounds the area where sensing film is formed, claim 12 or characterized by having a step of forming a protective film of the frame structure of a material of lower refractive index than the material forming the optical waveguide 14. A method for producing an optical waveguide biochemical sensor chip according to 13 .

The method for producing an optical waveguide type biochemical sensor chip according to any one of claims 12 to 15 , wherein the substrate is cut after the optical waveguide layer is formed.

The method of manufacturing an optical waveguide type biochemical sensor chip according to any one of claims 12 to 16, wherein the thickness of the optical waveguide layer is 3 µm or more and 50 µm or less.