JP2006202788A - Method for manufacturing multilayer polyimide flexible circuit board - Google Patents

Method for manufacturing multilayer polyimide flexible circuit board Download PDF

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JP2006202788A
JP2006202788A JP2005009697A JP2005009697A JP2006202788A JP 2006202788 A JP2006202788 A JP 2006202788A JP 2005009697 A JP2005009697 A JP 2005009697A JP 2005009697 A JP2005009697 A JP 2005009697A JP 2006202788 A JP2006202788 A JP 2006202788A
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polyimide
circuit board
flexible circuit
conductor foil
layer
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Teru Matsuura
輝 松浦
Yasumasa Nagao
保正 長尾
Wataru Ishii
渡 石井
Miyoshi Hirai
美佳 平井
Yukio Maruyama
幸雄 丸山
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Soliton R & D Kk
FUJIFILM ELECTRONIC MATERIALS
Fujifilm Electronic Materials Co Ltd
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Soliton R & D Kk
FUJIFILM ELECTRONIC MATERIALS
Fujifilm Electronic Materials Co Ltd
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Abstract

<P>PROBLEM TO BE SOLVED: To provide a void-free multilayer polyimide flexible circuit board. <P>SOLUTION: In a method for manufacturing the multilayer polyimide flexible circuit board, the conductor foil surface of a conductive foil application substrate with a polyimide resin as a base and the polyimide layer of another similar conductive foil application substrate are overlapped so that they are in contact each other via a precured polyimide film, and are cured at high temperature in a pressurized state. In this case, conductor foil that becomes an inner layer is coated with polyimide 230, which is soft-baked at 100-150°C for 20-90 minutes, and is precured for 20-90 minutes at 170-250°C. The conductor foil having the precured imide layer and the imide layer of another conductor foil-spread substrate are overlapped so that they are in contact each other, and are cured at a high temperature of 250-350°C for 20-240 minutes in a pressurized state. <P>COPYRIGHT: (C)2006,JPO&NCIPI

Description

本発明は、多層ポリイミドフレキシブル回路基板の製造方法に関し、より詳しくは、ポリイミド以外の絶縁層を有さず、ボイドのほとんどない、スルーホール信頼性、耐熱性、品質安定性に優れた多層ポリイミドフレキシブル回路基板の製造方法に関する。   The present invention relates to a method for producing a multilayer polyimide flexible circuit board, and more specifically, a multilayer polyimide flexible film having no insulating layer other than polyimide, having almost no voids, and having excellent through-hole reliability, heat resistance, and quality stability. The present invention relates to a method for manufacturing a circuit board.

従来の多層ポリイミドフレキシブルプリント基板は、ポリイミドフィルムと導体層を接着剤によって接着した基板間にアクリル系やエポキシ変性したポリイミド系のフィルム接着剤を挿入し熱圧着することにより多層フレキシブルプリント回路板を製造していた。   A conventional multilayer polyimide flexible printed circuit board is manufactured by inserting an acrylic or epoxy-modified polyimide film adhesive between the polyimide film and conductor layer bonded with an adhesive and thermocompression bonding. Was.

しかし、これらの多層基板は、用いられているエポキシ、アクリル等の接着剤層の耐薬品性、耐熱性等の諸特性が接着剤層以外の絶縁層に用いられているポリイミド層に比べて著しく劣るためスルーホールを形成する際、ドリル加工時の熱により発生するスミアの問題、過マンガン酸カリウムによるデスミア処理時の膨潤の問題をかかえており製品歩留りが悪い、スルーホール周りの信頼性が低いといった問題点を有していた。   However, these multilayer substrates are notable for various chemical properties and heat resistance properties of the epoxy and acrylic adhesive layers used compared to the polyimide layers used for insulating layers other than the adhesive layers. Because it is inferior, when forming a through hole, it has a problem of smear caused by heat during drilling and a problem of swelling during desmear treatment with potassium permanganate, resulting in poor product yield and low reliability around the through hole. The problem was.

このような問題を解決する提案として、金属箔の対向面の少なくとも一方にポリイミドワニスを塗布し、乾燥し、これら金属箔を重ねて熱風乾燥炉内で回転する圧着ローラーにより圧着、貼り合わせる、あるいは、重ね合わせられる複数の金属箔の間にポリイミドフィルムを挟み、これらを熱風乾燥炉内で回転する圧着ローラーにより圧着、貼り合わせる多層ポリイミドフレキシブルプリント回路基板の製造方法の提案がある(例えば、特許文献1参照。)。このローラーによる圧着は245℃、75kgf/cm(7355kPa)で、30分間加熱、圧着している。 As a proposal to solve such a problem, polyimide varnish is applied to at least one of the opposing surfaces of the metal foil, dried, and these metal foils are stacked and pressed and bonded together by a pressing roller rotating in a hot air drying furnace, or In addition, there is a proposal for a method for producing a multilayer polyimide flexible printed circuit board in which a polyimide film is sandwiched between a plurality of metal foils to be superposed, and these are crimped and bonded together by a pressure roller rotating in a hot air drying furnace (for example, patent literature) 1). The pressure bonding with this roller is performed by heating and pressure bonding at 245 ° C. and 75 kgf / cm 2 (7355 kPa) for 30 minutes.

特開平5−299848号公報JP-A-5-299848

しかし、従来から用いられているポリイミドワニスはポリアミド酸溶液であり、このポリアミド酸を塗布してから、完全に溶剤を除去してイミド化したものは接着性に乏しく、このため、アミド酸を一部残存させた状態で貼り合わせを行い、貼り合わせ後のポストキュアーで完全イミド化を行っている。このため、得られる積層体の接着層にはイミド化に伴う副生物残存、溶剤蒸発によるボイドの存在が避けられず、ボイドによる品質の低下、ロット間の品質のばらつきがあり、この解決が望まれていた。   However, the polyimide varnish conventionally used is a polyamic acid solution, and the one obtained by applying this polyamic acid and then imidizing it by completely removing the solvent has poor adhesiveness. Bonding is carried out with the remaining part, and complete imidization is performed by post-cure after bonding. For this reason, the by-product residue accompanying imidization and the presence of voids due to solvent evaporation are unavoidable in the adhesive layer of the resulting laminate, and there is a decrease in quality due to voids and variations in lot-to-lot quality. It was rare.

このような状況にかんがみ、本発明者らはボイドフリーの多層ポリイミドフレキシブル回路基板につき鋭意検討の結果、本発明に到達した。   In view of such a situation, the inventors of the present invention have reached the present invention as a result of intensive studies on a void-free multilayer polyimide flexible circuit board.

すなわち、本発明の多層ポリイミドフレキシブル回路基板の製造方法は、ポリイミドを基材とした導体箔張り基板の導体箔面と他の同様の導体箔張り基板のポリイミド層とをプレキュアーされたポリイミド膜を介して接するように重ね合わせ、加圧状態で高温キュアーする多層ポリイミドフレキシブル回路基板の製造方法であって、内層となる導体箔の上にポリイミドを塗布し、100〜150℃で20〜90分ソフトベークした後、170〜250℃で20〜90分プレキュアーし、このプレキュアーしたイミド層を有する導体箔と他の導体箔張り基板のイミド層とを接するように重ね、加圧状態において、250〜350℃で20〜240分高温キュアーすることを特徴とする。   That is, the method for producing a multilayer polyimide flexible circuit board according to the present invention comprises a polyimide film in which a conductor foil surface of a polyimide-based conductor foil-clad substrate and a polyimide layer of another similar conductor foil-clad substrate are precured. Is a method for producing a multilayer polyimide flexible circuit board, which is superposed so as to be in contact with each other and cured at a high temperature in a pressurized state, wherein polyimide is applied on the conductor foil as the inner layer, and soft baking is performed at 100 to 150 ° C. for 20 to 90 minutes. After that, it is precured at 170 to 250 ° C. for 20 to 90 minutes, and the conductor foil having this precured imide layer and the imide layer of another conductor foil-clad substrate are stacked so as to contact each other, and in a pressurized state, 250 to 350 ° C. And high temperature curing for 20 to 240 minutes.

本発明の方法によれば、樹脂層がすべてポリイミドからなるため、従来の接着剤層による耐薬品性、耐熱性の問題がなく、また、接着層にボイドがないので、ボイドに起因する電気特性などの品質の低下がなく、品質の安定性に優れる。   According to the method of the present invention, since the resin layer is entirely made of polyimide, there is no problem of chemical resistance and heat resistance due to the conventional adhesive layer, and since there is no void in the adhesive layer, electrical characteristics due to the void are present. There is no degradation of quality, etc., and the stability of quality is excellent.

本発明におけるポリイミド樹脂を基材とした導体箔張り基板としては、通常のアクリル系やエポキシ系の接着剤層を持たないポリイミドと導体箔層からなるものなら製造方法は、キャスティング法で作製されたものでもメッキ法で製造されたものでもよい。本基板に通常の方法により回路加工することによりパターン加工されたフレキシブルプリント回路板を得ることができる。導体箔を構成する導体としては、通常回路基板に用いられる導体であればいずれも用いることができ、具体例としては、銅箔、アルミ箔、ニッケル箔、SUS箔等をあげることができる。   As a conductive foil-clad substrate based on a polyimide resin in the present invention, a manufacturing method is prepared by a casting method if it is composed of a polyimide and a conductive foil layer without a normal acrylic or epoxy adhesive layer. Or manufactured by a plating method. A pattern-processed flexible printed circuit board can be obtained by subjecting the substrate to circuit processing by an ordinary method. As the conductor constituting the conductor foil, any conductor that is usually used for a circuit board can be used, and specific examples include copper foil, aluminum foil, nickel foil, SUS foil, and the like.

ポリイミド樹脂は、環状イミド基を含む高分子であり、通常ジアミンと酸無水物とを反応後、加熱もしくは化学的にイミド化させることにより得られ、一般にジアミンとしては、フェニレンジアミン、ジアミノジフェニルメタン、ジアミノジフェニルスルホン、ジアミノジフェニルエ−テルなどを、酸無水物としては、トリメリット酸無水物、ピロメリット酸二無水物、ビフェニルテトラカルボン酸二無水物、ベンゾフェノンテトラカルボン酸二無水物などが用いられているが、本発明の製造方法において用いられるポリイミド樹脂としては、ポリアミド酸を残していない状態でも貼り付け可能なものであることが好ましく、このようなポリイミド樹脂として、ポリアミドイミド樹脂を挙げることができる。   A polyimide resin is a polymer containing a cyclic imide group, and is usually obtained by reacting a diamine with an acid anhydride and then heating or chemically imidizing. Generally, diamines include phenylenediamine, diaminodiphenylmethane, and diamino. Diphenyl sulfone, diaminodiphenyl ether, etc. are used as acid anhydrides, such as trimellitic acid anhydride, pyromellitic dianhydride, biphenyltetracarboxylic dianhydride, benzophenone tetracarboxylic dianhydride, etc. However, the polyimide resin used in the production method of the present invention is preferably one that can be attached even in a state where no polyamic acid is left, and examples of such a polyimide resin include a polyamideimide resin. .

このポリアミドイミド樹脂の中では、耐熱性、絶縁性、電気的特性に優れること、耐薬品性(耐メッキ性)に優れること、キュアーでの熱収縮が小さいこと、経時安定性が良好で室温保存が可能であることなどから、下記で示される繰り返し単位を有するポリイミド樹脂が好ましい。   Among these polyamide-imide resins, it has excellent heat resistance, insulation and electrical properties, excellent chemical resistance (plating resistance), low thermal shrinkage at cure, good stability over time, and storage at room temperature Therefore, a polyimide resin having a repeating unit shown below is preferable.

Figure 2006202788
Figure 2006202788

このようなポリイミド樹脂としては、例えば、Durimide D10A(商品名、富士フィルムエレクトロニクスマテリアルズ社製)をあげることができる。   An example of such a polyimide resin is Durimide D10A (trade name, manufactured by Fuji Film Electronics Materials Co., Ltd.).

以下に、図1を用い、導体箔張り基板として、銅張りポリイミド基板を用いた場合を例にとり、本発明の製造方法を説明する。
まず、銅張り基板(A)、本発明においては、図1(b)に示すように一方の銅張り基板(B)200の銅箔210の上に液状ポリイミド230を塗布する。この液状のポリイミドは硬化させると、銅張り基板を構成するポリイミド120、220と同じになるものであることが好ましい。
銅張り基板(B)200の銅箔は、当然、回路形成工程により回路パターンを形成したものでもよい。
このポリイミド230の塗布厚は、キュアー後の厚みが1〜10μmであることが好ましい。塗布厚が10μmを超えると、ボイドが発生しやすくなるので好ましくない。塗布厚が1μm未満であると、多層基板の層間の接着強度が不充分となる場合も生ずる。
In the following, the manufacturing method of the present invention will be described with reference to FIG. 1, taking as an example a case where a copper-clad polyimide substrate is used as the conductive foil-clad substrate.
First, a copper-clad substrate (A), in the present invention, a liquid polyimide 230 is applied on a copper foil 210 of one copper-clad substrate (B) 200 as shown in FIG. When this liquid polyimide is cured, it is preferably the same as the polyimides 120 and 220 constituting the copper-clad substrate.
Of course, the copper foil of the copper-clad substrate (B) 200 may have a circuit pattern formed by a circuit formation process.
The thickness of the polyimide 230 applied is preferably 1 to 10 μm after curing. If the coating thickness exceeds 10 μm, voids are likely to occur, which is not preferable. If the coating thickness is less than 1 μm, the adhesive strength between the layers of the multilayer substrate may be insufficient.

次いで、塗布したポリイミドを好ましくは数100torr(数100×133.3Pa)の減圧下、例えば200〜500torr(26700〜66700Pa)の圧力下、100〜150℃で20〜90分ソフトベークを行う。このソフトベークにより液状ポリイミドに含まれる溶剤の大部分を除去する。これにより、次工程でプレキュアーを行っても溶剤揮発によるボイドが生成することはない。   Next, the applied polyimide is soft-baked at 100 to 150 ° C. for 20 to 90 minutes, preferably under a reduced pressure of several hundred torr (several hundred × 133.3 Pa), for example, 200 to 500 torr (26700 to 66700 Pa). This soft baking removes most of the solvent contained in the liquid polyimide. Thereby, even if pre-curing is performed in the next step, voids due to solvent volatilization are not generated.

次いで、ソフトベークしたイミド層232を好ましくは数100torr(数100×133.3Pa)の減圧下、170℃〜250℃で20〜90分プレキュアーする。この段階で、液状ポリイミドに含まれていた溶剤はほぼすべて除去されているが、加圧下での高温キュアーでポリイミド120と接着可能な状況となる。   Next, the soft-baked imide layer 232 is preferably precured at 170 to 250 ° C. for 20 to 90 minutes under a reduced pressure of several hundred torr (several 100 × 133.3 Pa). At this stage, almost all of the solvent contained in the liquid polyimide is removed, but the polyimide 120 can be bonded by high-temperature curing under pressure.

次いで、図1(e)に示すように、このプレキュアーしたポリイミド234が積層された銅張り基板(B)200のプレキュアーしたポリイミド層234の上にもう一方の銅張り基板(A)100のポリイミド層120が接するように重ね、必要に応じてピン、ハトメ等通常の方法で位置合わせし、減圧雰囲気下、250〜350℃であって、プレキュアー温度より高い温度で真空プレス等の高温プレス可能なプレス300により、35〜80kg/cmで20〜240分高温キュアーを行う。これにより、ボイドフリーの二層ポリイミドフレキシブル回路基板が得られる。この工程を繰り返し行えば、任意の層数の多層ポリイミドフレキシブル回路基板を得ることができる。 Next, as shown in FIG. 1E, the polyimide layer of the other copper-clad substrate (A) 100 is placed on the pre-cured polyimide layer 234 of the copper-clad substrate (B) 200 on which the precured polyimide 234 is laminated. 120, contact with each other, align as necessary with pins, eyelets, etc., as required, press at a high temperature such as a vacuum press at 250-350 ° C under a reduced pressure atmosphere at a temperature higher than the pre-curing temperature 300, high temperature curing is performed at 35-80 kg / cm 2 for 20-240 minutes. Thereby, a void-free two-layer polyimide flexible circuit board is obtained. By repeating this process, a multilayer polyimide flexible circuit board having an arbitrary number of layers can be obtained.

積層前後の過程において所望の形状の回路形成工程を入れてパターニングを行い、また、必要に応じてスルーホール(Through Hole TH)やインナーバイヤーホール(Inner Via Hole IVH)、ブラインドバイヤーホール(Blind Via Hole BVH)などを設けることもできる。   Patterning is performed by adding a circuit formation process of the desired shape before and after the stacking, and if necessary, through holes (Through Hole TH), inner buyer holes (Inner Via Hole IVH), blind buyer holes (Blind Via Hole) BVH) etc. can also be provided.

(実施例1)
ポリイミドとして、Durimide D10A(商品名、富士フィルムエレクトロニクスマテリアルズ社製)を用いて、銅箔上に厚さ10μmの硬化ポリイミド層を形成した銅張り基板を準備し、銅箔面に所定の回路加工を施し、フレキシブル回路基板を得た。
この基板の銅箔上にポリイミドD10AのN−メチルピロリドン(NMP)65wt%溶液をイミド化後の膜厚が3μmになるように塗布した。この基板(B)を約100torr(13300Pa)の減圧下におき、100〜150℃で約1時間ソフトベークし、低沸点成分をとばした。
Example 1
Using polyimide D10A (trade name, manufactured by Fuji Film Electronics Materials Co., Ltd.) as a polyimide, a copper-clad substrate having a 10 μm thick cured polyimide layer formed on a copper foil is prepared, and predetermined circuit processing is performed on the copper foil surface. The flexible circuit board was obtained.
A 65 wt% N-methylpyrrolidone (NMP) solution of polyimide D10A was applied onto the copper foil of this substrate so that the film thickness after imidization was 3 μm. The substrate (B) was placed under a reduced pressure of about 100 torr (13300 Pa), and soft-baked at 100 to 150 ° C. for about 1 hour to skip low boiling point components.

次いで、この基板を同様の減圧下で、約220℃で約90分間プレキュアーしてNMPをとばした。   The substrate was then precured at about 220 ° C. for about 90 minutes under the same vacuum to skip NMP.

この回路基板と、同様の銅箔上に厚さ10μmの硬化ポリイミド層を形成した銅張り基板とを、同様の減圧下で、回路基板のプレキュアーしたイミド層と銅張り基板のイミド層が接するように、重ねあわせ、プレスを用い、70kgf/cm(6865kPa)の圧力下、350℃まで徐々に温度を上げ、350℃で1時間高温キュアーを行った。この基板に更にドリル加工、スルーホールメッキ、パターン形成を行い、2層のポリイミドフレキシブル回路基板を得た。この基板にスルーホールのためにドリル加工しても、仕上がり状態が良くスミアもほとんど発生していないためデスミア処理が必要なかった。また、デスミア処理に対応する処理として、過マンガン酸カリウム処理をしても耐薬品性に極めて優れるため絶縁層が溶出するようなことはなかった。また、この回路基板を切断して3μm厚のプレキュアー、高温キュアーしたポリイミド層を観察したところ、ボイドは全く観察されなかった。 The circuit board and a copper-clad board in which a cured polyimide layer having a thickness of 10 μm is formed on the same copper foil are brought into contact with the imide layer of the circuit board and the imide layer of the copper-clad board under the same reduced pressure. The temperature was gradually raised to 350 ° C. under a pressure of 70 kgf / cm 2 (6865 kPa) using a press, and high temperature curing was performed at 350 ° C. for 1 hour. This substrate was further subjected to drilling, through-hole plating, and pattern formation to obtain a two-layer polyimide flexible circuit board. Even if this substrate was drilled for through holes, the finished state was good and there was almost no smear, so desmear treatment was not necessary. Further, as a treatment corresponding to the desmear treatment, even when the potassium permanganate treatment was performed, the chemical resistance was extremely excellent, so that the insulating layer was not eluted. Moreover, when this circuit board was cut and a 3 μm thick precured and high temperature cured polyimide layer was observed, no voids were observed.

本実施例では2層の例を示したが、この操作を繰り返して行えば任意の層数の多層回路板を得ることができる。   In this embodiment, an example of two layers is shown, but a multilayer circuit board having an arbitrary number of layers can be obtained by repeating this operation.

(比較例1)
塗工機を用いて、市販の厚さ18μmの銅箔に、ポリアミド酸溶液を均一かつ連続的に直接流延塗布し、150℃の熱風で乾燥し、ポリアミドイミド塗布金属箔を得、それを巻き取って二本のコイルとした。このポリアミドイミド塗布金属箔の厚さは28μmであった。
(Comparative Example 1)
Using a coating machine, the polyamic acid solution was uniformly and continuously cast onto a commercially available copper foil having a thickness of 18 μm, and dried with hot air at 150 ° C. to obtain a polyamideimide-coated metal foil. It was wound up into two coils. The thickness of this polyamideimide coated metal foil was 28 μm.

この二本のポリイミド塗布金属箔コイルを使用し、それぞれのポリイミド層が接するようにして、温度220℃、線圧力20kgf/cm(1960N/cm)の条件でラミネートし、245℃、75kgf/cm(7355kPa)の条件で1時間プレスし、金属箔ポリイミド積層板を得た。この積層板を切断して、ラミネート部分を観察したところ、多数のボイドが観察された。 Using these two polyimide-coated metal foil coils, the respective polyimide layers were in contact with each other, laminated under the conditions of a temperature of 220 ° C. and a linear pressure of 20 kgf / cm (1960 N / cm), and 245 ° C. and 75 kgf / cm 2. It pressed for 1 hour on conditions (7355kPa), and obtained the metal foil polyimide laminated board. When this laminate was cut and the laminate portion was observed, a large number of voids were observed.

本発明によれば、耐熱性に優れ、ボイドがないため電気特性の安定した多層ポリイミドフレキシブル回路基板を得ることができ、耐熱性、高密度実装が要求される各種電子部品用基板として有用である。   INDUSTRIAL APPLICABILITY According to the present invention, a multilayer polyimide flexible circuit board having excellent heat resistance and no voids can be obtained, and is useful as a substrate for various electronic components that require heat resistance and high-density mounting. .

多層フレキシブル回路基板の製造工程を示す概略図である。It is the schematic which shows the manufacturing process of a multilayer flexible circuit board.

符号の説明Explanation of symbols

100:銅張り基板(A)、 200:銅張り基板(B)
110,210:銅箔、 120,220:ポリイミド層
230:塗布された液状ポリイミド、 232:ソフトベークされたポリイミド
234:プレキュアー後のポリイミド
130:高温キュアー後のポリイミドとポリイミド120が一体化されたポリイミド層
100: Copper-clad substrate (A), 200: Copper-clad substrate (B)
110, 210: Copper foil, 120, 220: Polyimide layer 230: Applied liquid polyimide, 232: Soft baked polyimide 234: Precured polyimide 130: High temperature cured polyimide and polyimide 120 integrated layer

Claims (4)

ポリイミドを基材とした導体箔張り基板の導体箔面と他の同様の導体箔張り基板のポリイミド層とをプレキュアーされたポリイミド膜を介して接するように重ね合わせ、加圧状態で高温キュアーする多層ポリイミドフレキシブル回路基板の製造方法であって、内層となる導体箔の上にポリイミドを塗布し、100〜150℃で20〜90分ソフトベークした後、170〜250℃で20〜90分プレキュアーし、このプレキュアーしたイミド層を有する導体箔と他の導体箔張り基板のイミド層とを接するように重ね、加圧状態において、250〜350℃で20〜240分高温キュアーすることを特徴とする多層ポリイミドフレキシブル回路基板の製造方法。   Multilayer that superimposes the conductor foil surface of a polyimide-based conductor foil-clad substrate and the polyimide layer of another similar conductor foil-clad substrate via a precured polyimide film, and cures at high temperature under pressure It is a manufacturing method of a polyimide flexible circuit board, and after applying polyimide on a conductor foil which becomes an inner layer, soft baking at 100 to 150 ° C. for 20 to 90 minutes, precuring at 170 to 250 ° C. for 20 to 90 minutes, The multilayer polyimide is characterized in that the conductor foil having the precured imide layer and the imide layer of another conductor foil-clad substrate are stacked so as to be in contact with each other and cured under high pressure at 250 to 350 ° C. for 20 to 240 minutes. A method of manufacturing a flexible circuit board. ソフトベーク、プレキュアー、高温キュアーのそれぞれが減圧雰囲気下で行われることを特徴とする請求項1記載の多層ポリイミドフレキシブル回路基板の製造方法。   2. The method for producing a multilayer polyimide flexible circuit board according to claim 1, wherein each of soft baking, pre-curing, and high-temperature curing is performed under a reduced pressure atmosphere. 液状ポリイミド膜の塗布厚みが1〜10μmであることを特徴とする請求項1または2記載の多層ポリイミドフレキシブル回路基板の製造方法。   The method for producing a multilayer polyimide flexible circuit board according to claim 1, wherein the coating thickness of the liquid polyimide film is 1 to 10 μm. ポリイミドが下記で示される繰り返し単位を有するポリイミドであることを特徴とする請求項1〜3のいずれか1項に記載の多層ポリイミドフレキシブル回路基板の製造方法。
Figure 2006202788
The method for producing a multilayer polyimide flexible circuit board according to any one of claims 1 to 3, wherein the polyimide is a polyimide having a repeating unit shown below.
Figure 2006202788
JP2005009697A 2005-01-17 2005-01-17 Method for manufacturing multilayer polyimide flexible circuit board Withdrawn JP2006202788A (en)

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