JP2006186437A - High frequency line-waveguide converter - Google Patents

High frequency line-waveguide converter Download PDF

Info

Publication number
JP2006186437A
JP2006186437A JP2004375030A JP2004375030A JP2006186437A JP 2006186437 A JP2006186437 A JP 2006186437A JP 2004375030 A JP2004375030 A JP 2004375030A JP 2004375030 A JP2004375030 A JP 2004375030A JP 2006186437 A JP2006186437 A JP 2006186437A
Authority
JP
Japan
Prior art keywords
ground conductor
waveguide
layer
conductor layer
line
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2004375030A
Other languages
Japanese (ja)
Other versions
JP4243584B2 (en
Inventor
Yoshinobu Sawa
義信 澤
Takashi Kimura
貴司 木村
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Kyocera Corp
Original Assignee
Kyocera Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Kyocera Corp filed Critical Kyocera Corp
Priority to JP2004375030A priority Critical patent/JP4243584B2/en
Publication of JP2006186437A publication Critical patent/JP2006186437A/en
Application granted granted Critical
Publication of JP4243584B2 publication Critical patent/JP4243584B2/en
Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Images

Landscapes

  • Waveguide Connection Structure (AREA)
  • Waveguides (AREA)

Abstract

<P>PROBLEM TO BE SOLVED: To provide a high frequency line-waveguide converter exhibiting excellent transmission characteristics and high conversion efficiency by preventing generation of an unwanted mode effectively at the joint of a high frequency line and a waveguide. <P>SOLUTION: The high frequency line-waveguide converter comprises a first dielectric layer 2, a high frequency line 1 consisting of a line conductor 3 and a flush ground conductor layer 4, a slot 5 coupled electromagnetically with the line conductor 3, a lower ground conductor layer 8 formed on the lower surface of the first dielectric layer 2 in frame-shape surrounding the slot 5 in the plan view and being connected with a waveguide 6 at the outer circumferential part, and a shield conductor 7 formed to surround one end of the line conductor 3 and the slot 5 in the plan view and to connect the flush ground conductor layer 4 and the lower ground conductor layer 8 electrically wherein an upper ground conductor layer 9 is formed in frame-shape on the upper major surface of a second dielectric layer 10 having a dielectric constant smaller than that of the first dielectric layer 2, and the upper ground conductor layer 9 is soldered to the lower ground conductor layer 8 while opposing the openings to each other. <P>COPYRIGHT: (C)2006,JPO&NCIPI

Description

本発明は、マイクロ波やミリ波の領域において使用される、高周波回路を形成するコプレーナ線路またはグランド付きコプレーナ線路等の高周波線路を導波管に変換し、高周波回路とアンテナあるいは高周波回路間の接続を導波管で行なうことにより、システムの実装、評価を容易に行なえる高周波線路−導波管変換器に関するものである。   The present invention converts a high-frequency line such as a coplanar line forming a high-frequency circuit or a coplanar line with a ground, which is used in a microwave or millimeter wave region, into a waveguide, and connects the high-frequency circuit and the antenna or the high-frequency circuit. The present invention relates to a high-frequency line-waveguide converter that can easily mount and evaluate a system by performing the above-described process using a waveguide.

近年、情報伝達に用いられる高周波信号は、マイクロ波領域からミリ波領域の周波数までを活用することが検討されている。例えば、ミリ波の高周波信号を用いた応用システムとして車間レーダーが提案されている。このような高周波用のシステムにおいては、高周波信号の周波数が高いことにより、回路を構成する高周波線路による高周波信号の減衰が大きくなるという問題点がある。   In recent years, high-frequency signals used for information transmission have been studied to utilize frequencies from the microwave region to the millimeter wave region. For example, an inter-vehicle radar has been proposed as an application system using millimeter-wave high-frequency signals. In such a high frequency system, there is a problem that the high frequency signal is attenuated by the high frequency line constituting the circuit due to the high frequency of the high frequency signal.

このようなマイクロストリップ線路構造等の高周波線路に比較して、導波管では高周波信号の伝送損失は小さいことが知られている。例えば、マイクロストリップ線路等による通常の高周波線路のインピーダンス(50Ω)に比較して、導波管のインピーダンス(周波数によって変化するが概略500Ωのオーダーで設計される)は大きく、通常の高周波線路では伝送される信号に対して誘電体中を伝送する電界の寄与が大きいのに対し、導波管ではその誘電体として誘電正接がほぼ0の空気を用いていること、相対的に小さい磁気エネルギーのもととなる導波管の管壁を流れる電流が小さくて良いこと、かつその電流が導波管の管壁の比較的広い面積に流れるため電気抵抗が小さくなり導体損が小さくなる構造になっていることによるものである。   It is known that a transmission loss of a high-frequency signal is small in a waveguide as compared with a high-frequency line such as a microstrip line structure. For example, compared to the impedance (50Ω) of a normal high-frequency line such as a microstrip line, the impedance of the waveguide (which varies depending on the frequency but is designed on the order of about 500Ω) is large. The contribution of the electric field transmitted through the dielectric to the generated signal is large, whereas the waveguide uses air having a dielectric loss tangent of almost zero as its dielectric, The current flowing through the waveguide tube wall can be small, and since the current flows in a relatively large area of the waveguide tube wall, the electrical resistance is reduced and the conductor loss is reduced. Is due to being.

また、導波管同士は通常、ねじで接続される。そのため着脱を容易に行なうことができるため、高周波回路モジュールとアンテナとの接続に導波管を用いれば、組み立て前にそれぞれの導波管ポートを用いてそれぞれの検査を行ない、良品同士を組み合わせて高周波フロントエンドを組み立てることができ、その製造の歩留まりを上げることができる。これらのことから従来、特に伝送距離が長くなることが多い高周波回路モジュールとアンテナとの間の伝送に導波管を用いたフロントエンドが多く採用されてきた。   The waveguides are usually connected with screws. Therefore, since it can be easily attached and detached, if a waveguide is used for the connection between the high-frequency circuit module and the antenna, each inspection is performed using each waveguide port before assembly, and non-defective products are combined. A high-frequency front end can be assembled, and the manufacturing yield can be increased. For these reasons, a front end using a waveguide for transmission between a high-frequency circuit module and an antenna, which often has a long transmission distance, has been conventionally used.

図2は、高周波フロントエンドの構造を説明するための断面図である。図2によれば、フロントエンド60は、モジュール61とアンテナ62とが導波管部材63で接続されて構成されている。モジュール61は、導波管開口64を有する金属シャーシ65上に搭載されている。また、このフロントエンド60には、高周波線路としてのマイクロストリップ線路が形成されたマイクロストリップ基板66と、導波管開口部64および短絡終端部材67で構成される導波管とから成る高周波線路−導波管変換器68が構成されている。マイクロストリップ基板66のマイクロストリップ線路には、高周波部品が搭載された配線基板69がワイヤボンディングで接続されている。   FIG. 2 is a cross-sectional view for explaining the structure of the high-frequency front end. According to FIG. 2, the front end 60 is configured by connecting a module 61 and an antenna 62 with a waveguide member 63. The module 61 is mounted on a metal chassis 65 having a waveguide opening 64. The front end 60 has a high-frequency line composed of a microstrip substrate 66 on which a microstrip line as a high-frequency line is formed, and a waveguide composed of a waveguide opening 64 and a short-circuit termination member 67. A waveguide converter 68 is configured. A wiring board 69 on which high-frequency components are mounted is connected to the microstrip line of the microstrip board 66 by wire bonding.

このフロントエンド60における高周波線路−導波管変換器68は、短絡終端部材67の短絡終端面から高周波信号によって励起された電磁波の導波管内における波長(管内波長)の1/4の距離だけ離れた位置において、導波管の側面からマイクロストリップ基板66上に形成されたプローブ(線路導体は延設されているが接地導体は形成されていない部分)を信号波長の略1/4の長さ分挿入したタイプのものである。
特開2001−177312号公報 国際公開第96/27913号パンフレット
The high-frequency line-waveguide converter 68 in the front end 60 is separated from the short-circuit termination surface of the short-circuit termination member 67 by a distance of 1/4 of the wavelength (intra-wavelength wavelength) of the electromagnetic wave excited by the high-frequency signal in the waveguide. The probe formed on the microstrip substrate 66 from the side surface of the waveguide (the portion where the line conductor is extended but the ground conductor is not formed) is approximately 1/4 of the signal wavelength. It is the type of inserted part.
JP 2001-177712 A International Publication No. 96/27913 Pamphlet

しかしながら、この従来の高周波線路−導波管変換器68は、管内波長の1/4の長さ分の線路導体が導波管に挿入された状態となるように組み立てていため、各部材の位置ずれにより電磁結合のばらつきが生じて高周波線路−導波管変換器の変換損失が大きくなりやすく、その場合に組み立て不良となり用いた部材のすべてが無駄になるという問題点を有していた。   However, this conventional high-frequency line-waveguide converter 68 is assembled so that a line conductor corresponding to a quarter of the guide wavelength is inserted into the waveguide. Due to the deviation, electromagnetic coupling variation occurs, and the conversion loss of the high-frequency line-waveguide converter is likely to increase. In this case, there is a problem that assembly is poor and all the used members are wasted.

また、高周波線路−導波管変換器68は、管内波長の1/4の長さ分の線路導体が導波管に挿入された状態となるので、高周波線路−導波管変換器68は大きくなるという問題点を有していた。   Further, the high-frequency line-waveguide converter 68 is in a state in which a line conductor corresponding to ¼ of the in-tube wavelength is inserted into the waveguide. Therefore, the high-frequency line-waveguide converter 68 is large. Had the problem of becoming.

このような問題を解決するために、例えば誘電体層と、その表面に形成した線路導体およびその両側に配置された同一面接地導体層から成るコプレーナ線路と、このコプレーナ線路の先端に形成したアンテナとして機能するスロットと、誘電体層の裏面のスロットと対向する位置に接続した導波管と、誘電体層の内部に導波管および同一面接地導体層を接続するように形成したシールド導体部とを具備する高周波線路−導波管変換器が提案されている。   In order to solve such a problem, for example, a dielectric layer, a coplanar line composed of a line conductor formed on the surface of the dielectric layer, and a coplanar ground conductor layer disposed on both sides thereof, and an antenna formed at the tip of the coplanar line , A waveguide connected to a position facing the slot on the back surface of the dielectric layer, and a shield conductor formed so as to connect the waveguide and the same grounded conductor layer inside the dielectric layer There has been proposed a high-frequency line-waveguide converter comprising:

この構成によれば、コプレーナ線路とスロットとが同一面内に形成されることとなり、両者の相対的な位置関係が変動しにくく、スロットに対する線路導体の突出部分の長さのばらつきを小さくすることができるため、電磁結合のばらつきを小さくすることができるというものである。   According to this configuration, the coplanar line and the slot are formed in the same plane, the relative positional relationship between the two is less likely to change, and the variation in the length of the protruding portion of the line conductor with respect to the slot is reduced. Therefore, variation in electromagnetic coupling can be reduced.

なお、このコプレーナ線路の同一面接地導体層は、コプレーナ線路の接地として機能するとともに、スロットから放射され誘電体層と導波管内部との界面で反射してスロット側に戻ってきた電磁波(反射波)を再度反射する反射板としても機能する。   The coplanar line ground plane conductor layer functions as a ground for the coplanar line, and the electromagnetic wave radiated from the slot is reflected at the interface between the dielectric layer and the inside of the waveguide and returns to the slot side (reflection). It also functions as a reflector that reflects the wave again.

この変換器によれば、スロットから誘電体層と導波管内部との界面までの距離を誘電体層を伝送する電磁波の波長の1/4に設定することにより、スロットから放射され、誘電体層と導波管内部との界面で反射して同一面接地導体層で再度反射して界面に到達した反射波と、スロットから直接界面まで伝送してきた電磁波(直接波)との行路差が電磁波の波長の1/2と等しくなり、反射波の磁界が誘電体層と導波管内部との界面で反射する際に位相が反転することから、界面では直接波と反射波が同位相になって強め合い、導波管へ伝播していくこととなる。   According to this converter, by setting the distance from the slot to the interface between the dielectric layer and the inside of the waveguide to be ¼ of the wavelength of the electromagnetic wave transmitted through the dielectric layer, The path difference between the reflected wave reflected at the interface between the layer and the inside of the waveguide, reflected again from the ground conductor layer on the same plane and reaching the interface, and the electromagnetic wave transmitted directly from the slot to the interface (direct wave) Since the phase is inverted when the reflected wave magnetic field is reflected at the interface between the dielectric layer and the inside of the waveguide, the direct wave and the reflected wave are in phase at the interface. Will propagate to the waveguide.

すなわち、スロットと導波管との間に介在する、厚さを電磁波の波長の1/4に設定した誘電体層は、インピーダンスが互いに異なるスロットと導波管との整合器として機能することになる。   That is, the dielectric layer interposed between the slot and the waveguide and having a thickness set to ¼ of the wavelength of the electromagnetic wave functions as a matching unit between the slot and the waveguide having different impedances. Become.

しかし、この構成ではコプレーナ線路と誘電体層とから成る整合器とが接しているため、コプレーナ線路を伝送する信号の電磁波の一部が整合器中に分布し、これが整合器中に不要な電磁波分布(ここではモードと呼ぶ)を発生して、高周波信号の導波管への伝送を阻害しやすいという問題点を有していた。   However, in this configuration, since the coplanar line and the matching unit made of the dielectric layer are in contact, a part of the electromagnetic wave of the signal transmitted through the coplanar line is distributed in the matching unit, which is an unnecessary electromagnetic wave in the matching unit. There is a problem in that a distribution (referred to as a mode here) is generated and transmission of a high-frequency signal to the waveguide is likely to be hindered.

たとえばコプレーナ線路の線路導体直下では、信号による磁界は誘電体層表面と平行になる。この磁界は整合器を誘電体導波管としたときの共振モードであるTMモードを励起し、伝送モードであるTEモードの信号エネルギーがTMモードに移行して共振して信号が反射するので、導波管への変換を良好に行なうことができなくなるという問題点を有していた。   For example, just below the line conductor of the coplanar line, the magnetic field due to the signal is parallel to the surface of the dielectric layer. This magnetic field excites the TM mode, which is the resonance mode when the matching device is a dielectric waveguide, and the signal energy of the TE mode, which is the transmission mode, shifts to the TM mode and resonates to reflect the signal. There has been a problem that conversion to a waveguide cannot be performed satisfactorily.

本発明は上記問題点に鑑み案出されたもので、その目的は高周波線路と導波管との接続部での不要モードの発生を有効に防止して伝送特性に優れ、変換効率が高い高周波線路−導波管変換器を提供することにある。   The present invention has been devised in view of the above problems, and its purpose is to effectively prevent the generation of unnecessary modes at the connection portion between the high-frequency line and the waveguide, thereby improving the transmission characteristics and high conversion efficiency. It is to provide a line-waveguide converter.

本発明の高周波線路−導波管変換器は、第一の誘電体層と、該第一の誘電体層の上面の外周部から中央部に向かう線路導体および前記第一の誘電体層の上面で前記線路導体を取り囲むように形成された同一面接地導体層から成る高周波線路と、前記同一面接地導体層に前記線路導体の一端部と直交するように形成されて前記線路導体と電磁的に結合されたスロットと、前記第一の誘電体層の下面に平面透視で前記スロットを取り囲むように枠状に形成されるとともに外周部に導波管が接続される下部接地導体層と、平面透視で前記線路導体の前記一端部および前記スロットを取り囲むとともに前記同一面接地導体層および前記下部接地導体層を電気的に接続するように形成されたシールド導体部とを具備している高周波線路−導波管変換器であって、前記第一の誘電体層よりも誘電率の低い第二の誘電体層の上側主面に枠状の上部接地導体層を形成するとともに、該上部接地導体層を前記下部接地導体層に互いの開口を対向させてろう付けしたことを特徴とする。   The high-frequency line-waveguide converter of the present invention includes a first dielectric layer, a line conductor from the outer periphery of the upper surface of the first dielectric layer toward the center, and the upper surface of the first dielectric layer. A high-frequency line composed of the same-surface ground conductor layer formed so as to surround the line conductor, and formed on the same-surface ground conductor layer so as to be orthogonal to one end portion of the line conductor, and electromagnetically with the line conductor. A coupled slot, a lower ground conductor layer formed in a frame shape so as to surround the slot on the lower surface of the first dielectric layer, and having a waveguide connected to the outer periphery thereof; And a shield conductor formed to surround the one end of the line conductor and the slot and to electrically connect the coplanar ground conductor layer and the lower ground conductor layer. With a wave tube converter And forming a frame-like upper ground conductor layer on the upper principal surface of the second dielectric layer having a lower dielectric constant than the first dielectric layer, and the upper ground conductor layer being the lower ground conductor layer. Are characterized by being brazed with their openings facing each other.

本発明の高周波線路−導波管変換器は、第一の誘電体層よりも誘電率の低い第二の誘電体層の上側主面に枠状の上部接地導体層を形成するとともに、この上部接地導体層を下部接地導体層に互いの開口を対向させてろう付けしたことから、誘電体層に生じる共振モードであるTMモードの最も磁界が強い、導波管の内部と接している第二の誘電体層下部と、高周波線路が形成された第一の誘電体層および第二の誘電体層上部とを内部接地導体層によって分離することができるので、高周波線路を伝送する電磁界モードであるTEモードとTMモードとが結合して高周波線路を伝送する信号エネルギーがTMモードへ移行するのを有効に防止することができる。その結果、共振による信号反射を有効に防止して高周波線路から導波管への良好な信号変換を行なうことができる。   The high-frequency line-waveguide converter of the present invention forms a frame-like upper ground conductor layer on the upper main surface of the second dielectric layer having a lower dielectric constant than the first dielectric layer, and Since the ground conductor layer is brazed to the lower ground conductor layer with the openings facing each other, the TM mode, which is a resonance mode generated in the dielectric layer, has the strongest magnetic field and is in contact with the inside of the waveguide. The dielectric layer lower portion and the first dielectric layer and the second dielectric layer upper portion where the high frequency line is formed can be separated by the internal ground conductor layer, so that the electromagnetic field mode for transmitting the high frequency line can be used. It is possible to effectively prevent the signal energy transmitted through the high-frequency line from being combined with a certain TE mode and TM mode from shifting to the TM mode. As a result, signal reflection due to resonance can be effectively prevented, and good signal conversion from the high-frequency line to the waveguide can be performed.

また、第一および第二の誘電体層が接合されているので、これらを一体に作製したものに比べ、所望の厚みに調整した第二の誘電体層を接合させるだけでよく、第二の誘電体層の厚み、特に内部接地導体層より下側の第二の誘電体層下部の厚みばらつきが生じて不良となるのを有効に防止して製造歩留まりを向上させることができるとともに、第二の誘電体層下部の厚みを非常に精度のよいものとすることができる。その結果、スロットから放射されて第二の誘電体層の下側主面と導波管内部との界面で反射し、内部接地導体層で再度反射して再び第二の誘電体層の下側主面と導波管内部との界面に戻ってきた反射波と、スロットから直接第二の誘電体層の下側主面と導波管内部との界面まで伝送してきた直接波との行路差がばらつくのを有効に防止し、直接波と反射波とが重なって導波管に導波される電磁波の伝送性のばらつきをきわめて小さくすることができる。   In addition, since the first and second dielectric layers are joined, it is only necessary to join the second dielectric layer adjusted to a desired thickness as compared with the case where these are integrally manufactured. The thickness of the dielectric layer, in particular, the thickness variation of the lower portion of the second dielectric layer below the internal ground conductor layer can be effectively prevented from causing a defect and the manufacturing yield can be improved. The thickness of the lower part of the dielectric layer can be made very accurate. As a result, it is radiated from the slot, reflected at the interface between the lower main surface of the second dielectric layer and the inside of the waveguide, reflected again by the internal ground conductor layer, and again below the second dielectric layer. Path difference between the reflected wave returning to the interface between the main surface and the inside of the waveguide and the direct wave transmitted directly from the slot to the interface between the lower main surface of the second dielectric layer and the inside of the waveguide It is possible to effectively prevent the dispersion of the electromagnetic wave, and to extremely reduce the variation in the transmission property of the electromagnetic wave guided to the waveguide by overlapping the direct wave and the reflected wave.

さらに、第二の誘電体層の周囲を導波管で隙間無く覆っているので、導波管により接地性をより良好にすることができ、第二の誘電体層中を伝送する電磁波の伝送性をより良好にすることができる。   Furthermore, since the periphery of the second dielectric layer is covered with a waveguide without a gap, the grounding property can be improved by the waveguide, and the electromagnetic wave transmitted through the second dielectric layer can be transmitted. The property can be made better.

また、第一の誘電体層の誘電率よりも第二の誘電体層の誘電率を低くしたことにより、スロットから導波管に伝送する際、容量成分を漸次変化させることができ、インピーダンスの急激な変化を緩和することができる。よって、高周波線路と導波管との接続部における伝送性を有効に向上させ、かつ帯域を広げることができる。   In addition, since the dielectric constant of the second dielectric layer is lower than the dielectric constant of the first dielectric layer, the capacitance component can be gradually changed when transmitting from the slot to the waveguide. Rapid changes can be mitigated. Therefore, it is possible to effectively improve the transmission performance at the connection portion between the high-frequency line and the waveguide and to widen the band.

次に、本発明における第一の発明を添付資料に基づき詳細に説明する。図1(a)は本発明の高周波線路−導波管変換器の実施の形態の一例を示す平面図であり、(b)は図1(a)の高周波線路−導波管変換器のA−A’線断面図である。図1において、1は高周波線路、2は第一の誘電体層、3は線路導体、4は同一面接地導体層、5は同一面接地導体層4に形成されたスロット、6は導波管、7はシールド導体部、8は下部接地導体層、9は上部接地導体層、10は第二の誘電体層であり、これらにより高周波線路−導波管変換器が形成される。   Next, the first invention in the present invention will be described in detail based on the attached material. FIG. 1A is a plan view showing an example of an embodiment of a high-frequency line-waveguide converter according to the present invention, and FIG. 1B is a diagram of A of the high-frequency line-waveguide converter of FIG. FIG. In FIG. 1, 1 is a high-frequency line, 2 is a first dielectric layer, 3 is a line conductor, 4 is a common ground conductor layer, 5 is a slot formed in the common ground conductor layer 4, and 6 is a waveguide. , 7 is a shield conductor portion, 8 is a lower ground conductor layer, 9 is an upper ground conductor layer, and 10 is a second dielectric layer, which form a high-frequency line-waveguide converter.

高周波線路1は、第一の誘電体層2の上面に形成された線路導体3と、線路導体3を取り囲むように形成された同一面接地導体層4とによってコプレーナ線路状に形成されている。また、第一の誘電体層2の上面の同一面接地導体層4にはスロット5が設けられており、線路導体3の一端と電磁的に結合されている。これにより、高周波線路1に伝送された高周波信号は、スロット5から電磁波として、下方に延びるように配置された導波管6内に放射される。   The high-frequency line 1 is formed in a coplanar line shape by a line conductor 3 formed on the upper surface of the first dielectric layer 2 and a coplanar ground conductor layer 4 formed so as to surround the line conductor 3. Further, a slot 5 is provided in the same grounded conductor layer 4 on the upper surface of the first dielectric layer 2 and is electromagnetically coupled to one end of the line conductor 3. Thereby, the high frequency signal transmitted to the high frequency line 1 is radiated from the slot 5 as an electromagnetic wave into the waveguide 6 arranged to extend downward.

また、第一の誘電体層2は、第一の誘電体層2の側面に形成された側面導体または図1のような第一の誘電体層2の内部に配された貫通導体から成るシールド導体部7によりシールドされており、スロット5から第一の誘電体層2中に放射された電磁波や第二の誘電体層10の下側主面と導波管6内部との界面で反射した電磁波が漏れ出すことを防ぎ、変換効率が低下することを防止している。なお、シールド導体部7は、平面透視でスロット5を取り囲むように一定間隔(高周波線路1を伝送する信号の波長の1/4倍以下)を空けて形成されている。   The first dielectric layer 2 is a shield composed of a side conductor formed on the side surface of the first dielectric layer 2 or a through conductor disposed inside the first dielectric layer 2 as shown in FIG. Shielded by the conductor 7 and reflected at the interface between the electromagnetic wave radiated from the slot 5 into the first dielectric layer 2 and the lower main surface of the second dielectric layer 10 and the inside of the waveguide 6. Electromagnetic waves are prevented from leaking out and conversion efficiency is prevented from decreasing. In addition, the shield conductor part 7 is formed at a constant interval (less than 1/4 times the wavelength of the signal transmitted through the high-frequency line 1) so as to surround the slot 5 in a plan view.

また、第一の誘電体層2の下面には平面透視でスロット5を取り囲むように形成された枠状の下部接地導体層8が配され、同一面接地導体層4と下部接地導体層8は接続導体7で接続されている。さらに、この下部接地導体層8に、上側主面に枠状の上部接地導体層9が形成された第二の誘電体層10がAu−Snろう材等によりろう付けされており、この上部接地導体層9の開口と下部接地導体層8の開口が対向している。   Further, a frame-like lower ground conductor layer 8 formed so as to surround the slot 5 in a plan view is disposed on the lower surface of the first dielectric layer 2, and the same-surface ground conductor layer 4 and the lower ground conductor layer 8 are The connection conductor 7 is connected. Further, a second dielectric layer 10 having a frame-like upper ground conductor layer 9 formed on the upper main surface is brazed to the lower ground conductor layer 8 with an Au—Sn brazing material or the like. The opening of the conductor layer 9 and the opening of the lower ground conductor layer 8 face each other.

このような構造とすることにより、誘電体層に生じる共振モードであるTMモードの最も磁界が強い、導波管6の内部に接している第二の誘電体層10と、高周波線路1が形成された第一の誘電体層2とを上部接地導体層9および下部接地導体層8によって分離することができるので、高周波線路1を伝送する電磁界モードであるTEモードとTMモードとが結合して高周波線路1を伝送する信号エネルギーがTMモードへ移行するのを有効に防止することができる。その結果、共振による信号反射を有効に防止して高周波線路1から導波管6への良好な信号変換を行なうことができる。   By adopting such a structure, the second dielectric layer 10 in contact with the inside of the waveguide 6 having the strongest magnetic field of the TM mode, which is a resonance mode generated in the dielectric layer, and the high-frequency line 1 are formed. Since the first dielectric layer 2 formed can be separated by the upper ground conductor layer 9 and the lower ground conductor layer 8, the TE mode and the TM mode, which are electromagnetic field modes that transmit the high-frequency line 1, are coupled. Thus, it is possible to effectively prevent the signal energy transmitted through the high-frequency line 1 from shifting to the TM mode. As a result, it is possible to effectively prevent signal reflection due to resonance and perform good signal conversion from the high-frequency line 1 to the waveguide 6.

第一および第二の誘電体層2,10を形成する誘電体材料としては、酸化アルミニウム,窒化アルミニウム,窒化珪素,ムライト等を主成分とするセラミック材料、ガラス、ガラスとセラミックフィラーとの混合物を焼成して形成されたガラスセラミック材料、エポキシ樹脂,ポリイミド樹脂,四フッ化エチレン樹脂を始めとするフッ素系樹脂等の有機樹脂系材料、有機樹脂−セラミック(ガラスも含む)複合系材料等が用いられる。   Examples of the dielectric material forming the first and second dielectric layers 2 and 10 include ceramic materials mainly composed of aluminum oxide, aluminum nitride, silicon nitride, mullite, glass, and a mixture of glass and ceramic filler. Used are glass ceramic materials formed by firing, organic resin materials such as epoxy resins, polyimide resins, fluororesins such as tetrafluoroethylene resin, and organic resin-ceramic (including glass) composite materials. It is done.

本発明においては、第二の誘電体層10は第一の誘電体層2よりも誘電率が低い。好ましくは、第二の誘電体層10の誘電率を第一の誘電体層2の誘電率の0.2倍〜0.9倍とするのがよい。0.2倍未満であると、スロット5から導波管6に伝送する際、容量成分を漸次変化させることが困難となり、インピーダンスの急激な変化を緩和し難くなる。また、0.9倍を超えると第一の誘電体層2と第二の誘電体層10との間でインピーダンスの急激な変化が生じやすくなる。   In the present invention, the second dielectric layer 10 has a lower dielectric constant than the first dielectric layer 2. Preferably, the dielectric constant of the second dielectric layer 10 is 0.2 to 0.9 times that of the first dielectric layer 2. If it is less than 0.2 times, it is difficult to gradually change the capacitance component during transmission from the slot 5 to the waveguide 6, and it is difficult to mitigate a rapid change in impedance. On the other hand, if it exceeds 0.9 times, an abrupt change in impedance tends to occur between the first dielectric layer 2 and the second dielectric layer 10.

線路導体3,同一面接地導体層4,貫通導体等のシールド導体部7,下部接地導体層8ならびに上部接地導体層9を形成する導体材料としては、タングステン,モリブデン,金,銀,銅等を主成分とするメタライズ、あるいは金,銀,銅,アルミニウム等を主成分とする金属箔等が用いられる。   As the conductor material for forming the line conductor 3, the same-surface ground conductor layer 4, the shield conductor portion 7 such as the through conductor, the lower ground conductor layer 8, and the upper ground conductor layer 9, tungsten, molybdenum, gold, silver, copper, etc. Metallization having a main component or metal foil having gold, silver, copper, aluminum or the like as a main component is used.

特に、高周波線路−導波管変換器を、高周波部品を搭載する配線基板に内蔵する場合は、第一および第二の誘電体層2,10を形成する誘電体材料として、誘電正接が小さく、かつ気密封止が可能であることが望ましい。このような誘電体材料としては、酸化アルミニウム質焼結体や窒化アルミニウム質焼結体などのセラミックスやガラスセラミック材料が挙げられる。このような硬質系材料で構成すれば、誘電正接が小さく、かつ搭載した高周波部品を気密に封止することができるので、搭載した高周波部品の信頼性を高める上で好ましい。この場合、導体材料としては、誘電体材料との同時焼成が可能なメタライズ導体を用いることが、気密封止性と生産性を高める上で望ましい。   In particular, when the high-frequency line-waveguide converter is built in a wiring board on which high-frequency components are mounted, the dielectric tangent is small as the dielectric material forming the first and second dielectric layers 2 and 10, And it is desirable that airtight sealing is possible. Examples of such a dielectric material include ceramics and glass ceramic materials such as an aluminum oxide sintered body and an aluminum nitride sintered body. Such a hard material is preferable in terms of improving the reliability of the mounted high-frequency component because the dielectric loss tangent is small and the mounted high-frequency component can be hermetically sealed. In this case, it is desirable to use a metallized conductor capable of co-firing with a dielectric material as the conductor material in order to improve hermetic sealing and productivity.

本発明の高周波線路−導波管変換器は以下のようにして作製される。例えば誘電体材料に酸化アルミニウム質焼結体を用いる場合であれば、まず酸化アルミニウム,酸化珪素,酸化マグネシウム,酸化カルシウム等の原料粉末に適当な有機溶剤,溶媒を添加混合してスラリー状にし、これを周知のドクターブレード法やカレンダーロール法によりシート状に成形してセラミックグリーンシートを作製する。また、タングステンやモリブデン等の高融点金属,酸化アルミニウム,酸化珪素,酸化マグネシウム,酸化カルシウム等の原料粉末に適当な溶剤,溶媒を添加混合してメタライズペーストを作製する。   The high-frequency line-waveguide converter of the present invention is manufactured as follows. For example, when an aluminum oxide sintered body is used as a dielectric material, first, an appropriate organic solvent or solvent is added to and mixed with raw material powders such as aluminum oxide, silicon oxide, magnesium oxide, and calcium oxide to form a slurry. This is formed into a sheet shape by a known doctor blade method or calendar roll method to produce a ceramic green sheet. Further, a metallized paste is prepared by adding and mixing an appropriate solvent and solvent to a raw material powder such as refractory metal such as tungsten or molybdenum, aluminum oxide, silicon oxide, magnesium oxide, calcium oxide or the like.

次に、第一および第二の誘電体層2,10となるセラミックグリーンシートに、例えば打ち抜き法により貫通導体であるシールド導体部7を形成するための貫通孔を形成し、例えば印刷法によりその貫通孔にメタライズペーストを埋め込み、続いて線路導体3や同一面接地導体層4,下部接地導体層8,上部接地導体層9の形状にメタライズペーストを印刷する。また、第一および第二の誘電体層2,10が複数の誘電体層の積層構造からなる場合には、同様にメタライズペーストが印刷されたり貫通孔に埋め込まれたセラミックグリーンシートを積層し、加圧して圧着してもよい。   Next, through holes are formed in the ceramic green sheets to be the first and second dielectric layers 2 and 10 for forming the shield conductor portion 7 as a through conductor by, for example, a punching method, A metallized paste is embedded in the through hole, and then the metallized paste is printed in the shape of the line conductor 3, the same-surface ground conductor layer 4, the lower ground conductor layer 8, and the upper ground conductor layer 9. Further, when the first and second dielectric layers 2 and 10 have a laminated structure of a plurality of dielectric layers, similarly, a ceramic green sheet printed with a metallized paste or embedded in a through hole is laminated, You may pressurize and pressure-bond.

そして、これらの第一および第二の誘電体層2,10となるセラミックグリーンシートをそれぞれ高温(約1600℃)で焼成する。さらに、必要に応じて、線路導体3や同一面接地導体層4,下部接地導体層8,上部接地導体層9等のように上下面に露出する導体の表面に、例えば、ニッケルめっきおよび金めっきを被着させる。   The ceramic green sheets to be the first and second dielectric layers 2 and 10 are fired at a high temperature (about 1600 ° C.). Furthermore, if necessary, the surface of the conductor exposed on the upper and lower surfaces, such as the line conductor 3, the same-surface ground conductor layer 4, the lower ground conductor layer 8, the upper ground conductor layer 9, and the like, for example, nickel plating and gold plating Adhere.

しかる後、第一の誘電体層2の下部接地導体層8と第二の誘電体層10の上部接地導体層9とをろう付けし、下部接地導体層8の外周部に第二の誘電体層10を取り囲むようにして導波管6を接続することにより高周波線路−導波管変換器が完成する。   Thereafter, the lower ground conductor layer 8 of the first dielectric layer 2 and the upper ground conductor layer 9 of the second dielectric layer 10 are brazed, and the second dielectric is formed on the outer periphery of the lower ground conductor layer 8. By connecting the waveguide 6 so as to surround the layer 10, a high-frequency line-waveguide converter is completed.

本発明のシールド導体部7は、スロット5を取り囲むよう第一の誘電体層2の側面または内部に配され、同一面接地導体層4と下部接地導体層8とを電気的に接続している。   The shield conductor portion 7 of the present invention is disposed on the side surface or the inside of the first dielectric layer 2 so as to surround the slot 5 and electrically connects the same-surface ground conductor layer 4 and the lower ground conductor layer 8. .

なお、シールド導体部7は、同一面接地導体層4と下部接地導体層8とを電気的に接続できれば良く、側面導体や貫通導体等、種々の手段が用いられる。例えば、第一の誘電体層2の側面に被着された導体や、第一の誘電体層2の側面の切り欠き部の内壁に導体層が被着されたいわゆるキャスタレーション導体、貫通孔の内壁に導体層が被着されたいわゆるスルーホール導体、貫通孔の内部が導体で充填されたいわゆるビア導体などが挙げられる。   The shield conductor 7 only needs to be able to electrically connect the same-surface ground conductor layer 4 and the lower ground conductor layer 8, and various means such as a side conductor and a through conductor are used. For example, a conductor deposited on the side surface of the first dielectric layer 2, a so-called castellation conductor in which a conductor layer is deposited on the inner wall of the cutout portion on the side surface of the first dielectric layer 2, A so-called through-hole conductor in which a conductor layer is deposited on the inner wall, a so-called via conductor in which the inside of the through hole is filled with a conductor, and the like can be given.

導波管6の形状は特に制約はなく、例えば方形導波管として規格化されているWRシリーズを用いると、測定用校正キットが充実しているので種々の特性評価が容易になるが、使用する高周波信号の周波数に応じてシステムの小型軽量化のために導波管のカットオフが発生しない範囲で小型化した方形導波管を用いてもよい。また、円形導波管を用いてもよい。   The shape of the waveguide 6 is not particularly limited. For example, when a WR series standardized as a rectangular waveguide is used, a variety of measurement calibration kits are available, so that various characteristics can be easily evaluated. In order to reduce the size and weight of the system in accordance with the frequency of the high-frequency signal, a rectangular waveguide that is miniaturized within a range in which the waveguide is not cut off may be used. A circular waveguide may be used.

導波管6は、金属または内面に金属層が形成された誘電体等で構成することができ、例えば、金属を管状に成型したり、セラミックスや樹脂等の誘電体を必要な導波管形状に成型した後に内面を金属で被覆したものが用いられる。なお、電流による導体損低減や腐食防止のために導波管6の内面を金,銀等の貴金属で被覆するとよい。導波管6の下部接地導体層8への取り付けは、ろう材による接合やねじによる締め付け等によって行なわれ、導波管6と下部接地導体層8とが電気的に接続される。   The waveguide 6 can be composed of a metal or a dielectric having a metal layer formed on the inner surface. For example, the waveguide 6 can be formed into a tubular shape or a dielectric such as ceramics or resin is required. In this case, the inner surface is coated with a metal after being molded. The inner surface of the waveguide 6 may be covered with a noble metal such as gold or silver in order to reduce conductor loss due to current or prevent corrosion. The waveguide 6 is attached to the lower ground conductor layer 8 by joining with a brazing material, tightening with a screw or the like, and the waveguide 6 and the lower ground conductor layer 8 are electrically connected.

ろう材によって導波管6を下部接地導体層8へ取り付けるためには、同一面接地導体層4およびシールド導体部7と電気的に接続された下部接続用導体層を、取り付けられる導波管6の開口に合わせて形成しておくとよい。例えば、図1に示したように、第一の誘電体層2の下面に、シールド用貫通導体から成るシールド導体部7と接続されたメタライズ層から成る下部接地導体層8を形成しておくとよい。このような下部接地導体層8を形成しておくと、導波管6を高周波線路−導波管変換器へ取り付けた際の導波管6とシールド導体部7および同一面接地導体層4との電気的接続がより確実なものとなるので、信頼性の高い高周波線路−導波管変換器を構成することができる点で好ましいものとなる。   In order to attach the waveguide 6 to the lower ground conductor layer 8 with the brazing material, the lower connection conductor layer electrically connected to the same-surface ground conductor layer 4 and the shield conductor portion 7 is attached to the waveguide 6. It is good to form it according to the opening. For example, as shown in FIG. 1, a lower ground conductor layer 8 made of a metallized layer connected to a shield conductor portion 7 made of a shielding through conductor is formed on the lower surface of the first dielectric layer 2. Good. If such a lower ground conductor layer 8 is formed, the waveguide 6, the shield conductor portion 7 and the coplanar ground conductor layer 4 when the waveguide 6 is attached to the high-frequency line-waveguide converter, Therefore, it is preferable in that a highly reliable high-frequency line-waveguide converter can be configured.

また、第二の誘電体層10の厚みは高周波線路1を伝送する信号の波長の1/2倍以下であるのがよい。これにより、スロット5から放射されて第二の誘電体層10の下側主面と導波管6内部との界面で反射し、上部接地導体層9で再度反射して再び第二の誘電体層10の下側主面と導波管6内部との界面に戻ってきた反射波と、スロット5から直接第二の誘電体層10の下側主面と導波管6内部との界面まで伝送してきた直接波とを同位相にすることができ、反射波と直接波とが強め合うために高周波線路1から導波管6への変換効率をより高めることができる。   The thickness of the second dielectric layer 10 is preferably not more than ½ times the wavelength of the signal transmitted through the high-frequency line 1. As a result, the light is radiated from the slot 5 and reflected at the interface between the lower main surface of the second dielectric layer 10 and the inside of the waveguide 6, reflected again by the upper ground conductor layer 9, and again reflected by the second dielectric. The reflected wave returning to the interface between the lower main surface of the layer 10 and the inside of the waveguide 6, and directly from the slot 5 to the interface between the lower main surface of the second dielectric layer 10 and the inside of the waveguide 6 The transmitted direct wave can be in phase, and the reflected wave and the direct wave are intensified, so that the conversion efficiency from the high-frequency line 1 to the waveguide 6 can be further increased.

なお、上部接地導体層9の開口面積は、下部接地導体層8の開口面積よりも大きくてもよく、小さくてもよい。または、同じでもよい。好ましくは、上部接地導体層9の開口面積が下部接地導体層8の開口面積よりも大きいのがよい。これにより、電磁波が高周波線路1に形成されたスロット5から導波管6に伝送する際のインピーダンスの急激な変化を開口面積が漸次大きくなった接地導体層で緩和することができ、高周波線路1と導波管6との接続部における伝送性を有効に向上させることができる。   The opening area of the upper ground conductor layer 9 may be larger or smaller than the opening area of the lower ground conductor layer 8. Or it may be the same. Preferably, the opening area of the upper ground conductor layer 9 is larger than the opening area of the lower ground conductor layer 8. Thus, a sudden change in impedance when electromagnetic waves are transmitted from the slot 5 formed in the high-frequency line 1 to the waveguide 6 can be mitigated by the ground conductor layer whose opening area is gradually increased. Therefore, it is possible to effectively improve the transmission performance at the connection portion between the waveguide 6 and the waveguide 6.

より好ましくは、上部接地導体層9の開口面積は、下部接地導体層8の開口面積の1.1倍以上であるのがよい。1.1倍未満であると上部接地導体層9と下部接地導体層8とをろう付けする際に位置ずれによって下部接地導体層8と上部接地導体層9とが接合された状態での開口面積がばらつきやすくなり、変換効率のばらつきが生じやすくなる。   More preferably, the opening area of the upper ground conductor layer 9 is 1.1 times or more than the opening area of the lower ground conductor layer 8. When the upper ground conductor layer 9 and the lower ground conductor layer 8 are brazed to be less than 1.1 times, the opening area in a state where the lower ground conductor layer 8 and the upper ground conductor layer 9 are joined due to misalignment Tends to vary, and variations in conversion efficiency are likely to occur.

また、下部接地導体層8の内側に露出した第一の誘電体層2の下面と上部接地導体層9の内側に露出した第二の誘電体層10の上側主面との間は、空隙となっているのがよい。これにより、スロット5から放射されて第二の誘電体層10の下側主面と導波管6内部との界面で反射した電磁波を、上部接地導体層9の内側の第二の誘電体層10と上記隙間との界面で良好に反射させることができ、変換効率をより向上させることができる。   Further, there is a gap between the lower surface of the first dielectric layer 2 exposed inside the lower ground conductor layer 8 and the upper main surface of the second dielectric layer 10 exposed inside the upper ground conductor layer 9. It is good to be. As a result, the electromagnetic wave radiated from the slot 5 and reflected at the interface between the lower main surface of the second dielectric layer 10 and the inside of the waveguide 6 is reflected to the second dielectric layer inside the upper ground conductor layer 9. 10 and the gap can be favorably reflected, and the conversion efficiency can be further improved.

好ましくは、下部接地導体層8の内側に露出した第一の誘電体層2の下面と上部接地導体層9の内側に露出した第二の誘電体層10の上側主面との間の間隔は1〜15μmであるのがよい。1μm未満であると変換効率をより向上させる効果が小さくなりやすい。また15μmを超えるとインピーダンスの変化が大きくなって損失が生じやすくなる。   Preferably, the distance between the lower surface of the first dielectric layer 2 exposed inside the lower ground conductor layer 8 and the upper main surface of the second dielectric layer 10 exposed inside the upper ground conductor layer 9 is It is good that it is 1-15 μm. If it is less than 1 μm, the effect of further improving the conversion efficiency tends to be small. On the other hand, if it exceeds 15 μm, the change in impedance becomes large and loss tends to occur.

なお、この下部接地導体層8の内側に露出した第一の誘電体層2の下面や上部接地導体層9の内側に露出した第二の誘電体層10の上側主面に誘電体を被着させてもよい。これにより、第一の誘電体層2と第二の誘電体層10との間の誘電損失を漸次変化させることができ、反射損失などが生じるのを有効に抑制できる。   A dielectric is deposited on the lower surface of the first dielectric layer 2 exposed inside the lower ground conductor layer 8 and the upper main surface of the second dielectric layer 10 exposed inside the upper ground conductor layer 9. You may let them. Thereby, the dielectric loss between the 1st dielectric material layer 2 and the 2nd dielectric material layer 10 can be changed gradually, and it can control effectively that a reflective loss etc. arise.

例えば、図1では高周波線路1がコプレーナ線路構造の場合の例を示したが、たとえば第一の誘電体層2の上にさらに誘電体層を積層し、この誘電体層の上面に線路導体3を覆うように接地導体層を設けたグランド付きコプレーナ線路構造としてもよい。   For example, FIG. 1 shows an example in which the high-frequency line 1 has a coplanar line structure. For example, a dielectric layer is further laminated on the first dielectric layer 2, and the line conductor 3 is formed on the upper surface of the dielectric layer. It is good also as a coplanar line structure with a ground which provided the grounding conductor layer so that may be covered.

(a)は本発明の高周波線路−導波管変換器の実施の形態の例を示す平面図、(b)は、(a)の高周波線路−導波管変換器のA−A’線における断面図である。(A) is a top view which shows the example of embodiment of the high frequency line-waveguide converter of this invention, (b) is in the AA 'line of the high frequency line-waveguide converter of (a). It is sectional drawing. 従来の高周波線路−導波管変換器の例を示す断面図である。It is sectional drawing which shows the example of the conventional high frequency track-waveguide converter.

符号の説明Explanation of symbols

1・・・・・高周波線路
2・・・・・第一の誘電体層
3・・・・・線路導体
4・・・・・同一面接地導体層
5・・・・・スロット
6・・・・・導波管
7・・・・・シールド導体部
8・・・・・下部接地導体層
9・・・・・上部接地導体層
10・・・・第二の誘電体層
DESCRIPTION OF SYMBOLS 1 ... High frequency line 2 ... 1st dielectric material layer 3 ... Line conductor 4 ... Same surface grounding conductor layer 5 ... Slot 6 ... ································································································ 9

Claims (1)

第一の誘電体層と、該第一の誘電体層の上面の外周部から中央部に向かう線路導体および前記第一の誘電体層の上面で前記線路導体を取り囲むように形成された同一面接地導体層から成る高周波線路と、前記同一面接地導体層に前記線路導体の一端部と直交するように形成されて前記線路導体と電磁的に結合されたスロットと、前記第一の誘電体層の下面に平面透視で前記スロットを取り囲むように枠状に形成されるとともに外周部に導波管が接続される下部接地導体層と、平面透視で前記線路導体の前記一端部および前記スロットを取り囲むとともに前記同一面接地導体層および前記下部接地導体層を電気的に接続するように形成されたシールド導体部とを具備している高周波線路−導波管変換器であって、前記第一の誘電体層よりも誘電率の低い第二の誘電体層の上側主面に枠状の上部接地導体層を形成するとともに、該上部接地導体層を前記下部接地導体層に互いの開口を対向させてろう付けしたことを特徴とする高周波線路−導波管変換器。 A first dielectric layer, a line conductor extending from the outer periphery of the upper surface of the first dielectric layer toward the center, and the same interview formed so as to surround the line conductor on the upper surface of the first dielectric layer; A high-frequency line composed of a ground conductor layer; a slot formed on the same-surface ground conductor layer so as to be orthogonal to one end of the line conductor and electromagnetically coupled to the line conductor; and the first dielectric layer A lower ground conductor layer which is formed in a frame shape so as to surround the slot in a plan view and is connected to a waveguide on the outer periphery, and surrounds the one end portion and the slot of the line conductor in a plan view. And a shield conductor portion formed so as to electrically connect the coplanar ground conductor layer and the lower ground conductor layer, wherein the first dielectric Dielectric than body layer A frame-like upper ground conductor layer is formed on the upper main surface of the second low dielectric layer, and the upper ground conductor layer is brazed with the lower ground conductor layer facing each other's openings. A high-frequency line-waveguide converter.
JP2004375030A 2004-12-24 2004-12-24 High frequency line-waveguide converter Expired - Fee Related JP4243584B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2004375030A JP4243584B2 (en) 2004-12-24 2004-12-24 High frequency line-waveguide converter

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2004375030A JP4243584B2 (en) 2004-12-24 2004-12-24 High frequency line-waveguide converter

Publications (2)

Publication Number Publication Date
JP2006186437A true JP2006186437A (en) 2006-07-13
JP4243584B2 JP4243584B2 (en) 2009-03-25

Family

ID=36739243

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2004375030A Expired - Fee Related JP4243584B2 (en) 2004-12-24 2004-12-24 High frequency line-waveguide converter

Country Status (1)

Country Link
JP (1) JP4243584B2 (en)

Also Published As

Publication number Publication date
JP4243584B2 (en) 2009-03-25

Similar Documents

Publication Publication Date Title
JP5094871B2 (en) High frequency module and wiring board
JP2004153415A (en) High frequency line-waveguide converter
JP4199796B2 (en) High frequency line-waveguide converter
JP2006279199A (en) High-frequency line/waveguide converter
JP2009171488A (en) Waveguide connecting structure, waveguide connecting plate, and waveguide converter
JP4463000B2 (en) High frequency line-waveguide converter
JP4247999B2 (en) High frequency line-waveguide converter
JP4243584B2 (en) High frequency line-waveguide converter
JP4002527B2 (en) High frequency package
JP2006262138A (en) High-frequency line/waveguide converter
JP4749234B2 (en) Aperture antenna
JP2006279473A (en) High-frequency line/waveguide converter
JP2005328188A5 (en)
JP4606351B2 (en) High frequency line-waveguide converter
JP2006197479A (en) High-frequency line/waveguide converter
JP4439423B2 (en) antenna
JP2006238055A (en) High-frequency line/waveguide converter
JP2005286435A (en) High-frequency line waveguide converter
JP2006203816A (en) High frequency line-waveguide converter
JP4663351B2 (en) Electronic equipment
JP2007235234A (en) Aperture antenna
JP5004826B2 (en) High frequency line-waveguide converter
JP2006279198A (en) High frequency line - waveguide converter
JP2003347809A (en) High-frequency line to waveguide converter
JP2006262137A (en) High-frequency line/waveguide converter and electronic device

Legal Events

Date Code Title Description
A621 Written request for application examination

Free format text: JAPANESE INTERMEDIATE CODE: A621

Effective date: 20071019

A131 Notification of reasons for refusal

Free format text: JAPANESE INTERMEDIATE CODE: A131

Effective date: 20080924

A521 Written amendment

Free format text: JAPANESE INTERMEDIATE CODE: A523

Effective date: 20081112

TRDD Decision of grant or rejection written
A01 Written decision to grant a patent or to grant a registration (utility model)

Free format text: JAPANESE INTERMEDIATE CODE: A01

Effective date: 20081209

A01 Written decision to grant a patent or to grant a registration (utility model)

Free format text: JAPANESE INTERMEDIATE CODE: A01

A61 First payment of annual fees (during grant procedure)

Free format text: JAPANESE INTERMEDIATE CODE: A61

Effective date: 20090105

FPAY Renewal fee payment (event date is renewal date of database)

Free format text: PAYMENT UNTIL: 20120109

Year of fee payment: 3

R150 Certificate of patent or registration of utility model

Free format text: JAPANESE INTERMEDIATE CODE: R150

FPAY Renewal fee payment (event date is renewal date of database)

Free format text: PAYMENT UNTIL: 20120109

Year of fee payment: 3

FPAY Renewal fee payment (event date is renewal date of database)

Free format text: PAYMENT UNTIL: 20130109

Year of fee payment: 4

FPAY Renewal fee payment (event date is renewal date of database)

Free format text: PAYMENT UNTIL: 20140109

Year of fee payment: 5

LAPS Cancellation because of no payment of annual fees