JP2006179892A - Panel feeder of flat display panel inspection device and subtable used for this - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a panel feeder of flat display panel inspection device which can tilt a panel of flat display panel at a desired angle with little power, in such a way that interference with ambient structure is lessened by decreasing a volume share of equipment. <P>SOLUTION: The device comprises a fixing plate 310; a tilting plate 320; a tilting means 330; an up/down plate 340; an up/down means, prepared between the tilting plate 320 and the up/down plate 340, for heightening/lowering the up/down plate 340; a subtable 400 which is arranged at an upper side of the up/down plate 340, in such a manner that it can rotate, and lines the flat display panel supplied in a row by supporting, equipped with a panel lining means variable in entire length at lining time; and a rotating means arranged at a lower portion of the up/down plate 340 so that it may rotate the subtable 400. <P>COPYRIGHT: (C)2006,JPO&NCIPI

Description

  The present invention relates to a panel supply device that transmits a panel to be inspected by a flat panel display panel inspection device to a panel transfer device, and is particularly capable of automatic alignment corresponding to various sizes of flat panel display panels. The present invention relates to a panel supply device for a flat panel display panel inspection apparatus that can be finely tilted with a small amount of power.

  A flat panel display panel inspection apparatus generally known performs a lighting inspection using a probe unit for a disconnection inspection and a hue inspection of a line of a flat display panel, and performs a visual inspection using an external microscope.

  As shown in FIG. 1, the conventional flat panel display panel inspection apparatus is horizontally aligned with the flat panel display inspection apparatus main body 100, the panel supply apparatus 10 provided on one side of the flat panel display inspection apparatus main body 100, and the panel supply apparatus 10. The structure includes an inspection unit 30 provided in the structure, and a panel transfer device 40 to which a flat panel display panel is supplied from the panel supply device 10 and causes the inspection unit 30 to load and unload.

  Here, the panel supply device 10 rests a flat panel display panel transmitted from a panel loading device (not shown) such as a robot on the sub-table 20 and then passes through a predetermined alignment step and then at a predetermined angle. It is rotated. Then, after the panel transfer device 40 clamps the flat display panel, the flat display panel is transferred onto a work table (not shown) provided in the inspection unit 30. Thereafter, the flat display panel placed on the work table is subjected to lighting inspection for disconnection inspection and hue inspection by a lighting inspection device (not shown) provided in the inspection unit 30.

  2A and 2B are schematic configuration diagrams of a conventional panel supply apparatus 10.

  As shown in FIG. 2A or FIG. 2B, the conventional panel supply apparatus 10 includes air that is hinge-coupled to a base plate 11 and a first hinge structure 16 provided on the base plate 11. A cylinder 12, a piston rod 18 that expands and contracts by the air cylinder 12, and a square plate type link stage that is hinged to the end of the piston rod 18 and hinged to a second hinge structure 17 provided on the base plate 11. 13, a moving bar 14 having one end coupled to the upper end side of the link stage 13, and a sub-table 20 coupled to the other end of the moving bar 14 to support the flat panel display panel and perform alignment. .

  With the structure as described above, the conventional panel supply apparatus 10 is fixed on the sub-table 20 by receiving a flat display panel from a panel loading apparatus (not shown) such as a robot. Then, the sub-table 20 supports the flat panel display panel and aligns the flat panel display panel by alignment means (not shown). This will be described later with reference to FIG.

  When the alignment of the flat display panel is completed, the flat panel display panel is tilted at a predetermined angle so that it can be clamped by the panel transfer device 40 described with reference to FIG.

  2A shows a panel supply device before tilting, and FIG. 2B shows a panel supply device after tilting.

  In order to be tilted from the state shown in FIG. 2A to the state shown in FIG. 2B, the following operation is performed.

  First, air is supplied to the air cylinder 12 and the piston rod 18 is extended by a certain length. Then, the link stage 13 hinged to the end of the piston rod 18 receives a force in the extending direction of the piston rod 18. At this time, since one end of the link stage 13 is coupled to the second hinge structure 17 provided on the base plate 11, the link stage 13 rotates with respect to the second hinge structure 17.

  Then, the moving bar 14 and the sub table 20 coupled in order to the upper end side of the link stage 13 also rotate.

  As described above, when the sub-table 20 is tilted by the air cylinder 12, it is difficult to precisely control the tilting angle. As described above, when the link stage 13 is rotated by the air cylinder 12, the second stage 20 is rotated. Since the distance between the hinge structure 17 and the end of the piston rod 18 is short, a lot of power is required and the stability of the structure is lowered.

  FIGS. 3A and 3B are schematic configuration diagrams showing a sub-table of the conventional panel supply apparatus.

  As shown in FIGS. 3 (a) and 3 (b), the conventional sub-table 20 has a basic plate composed of four guide plates 21 and panel supporters 22a and 22b provided at predetermined positions of the basic plate. , 22c, 22d and four panel alignment means provided on the respective guide plates 21.

  The panel aligning means includes an L / M guide 23 provided in parallel on the guide plate 21, a moving plate 24 provided with a guide block (not shown) that meshes with the L / M guide 23, and a moving plate. A panel fixing base 25 that is fixedly provided on 24 and fixes a side portion of the flat display panel, and a nut combined body (not shown) provided at the center of the lower surface of the moving plate 24 provided on the moving plate 24. The ball screw 26 that is coupled and rotated, the motor 27 that rotates the ball screw 26, the first pulley 28 that is coupled to the shaft of the motor 27, and the power generated from the motor 27 that is coupled to the first pulley 28 and the belt. And a second pulley 29 that transmits the torque to the ball screw 26.

  The conventional sub-table having the above-described structure supports and aligns the flat display as follows.

  First, a flat display panel is transmitted from a panel loading device (not shown) such as a robot and is seated on the panel support tables 22a, 22b, 22c and 22d of the sub-table 20. Then, in order to align and fix the flat display seated on the panel support bases 22a, 22b, 22c and 22d, the panel fixing base 25 is moved to the side of the flat display panel as shown in FIG. Let

  In order to move the panel fixing base 25 to the side of the flat display, the ball screw 26 is rotated by the rotating means 27, 28, and 29. Then, the moving body 24 having a nut combined body (not shown) meshing with the ball screw 26 and attached to the lower surface moves along the L / M guide 23 provided in parallel to the guide plate 21. As a result, the panel fixing base 25 fixedly provided on the moving body 24 moves to the side of the flat display panel to fix the flat display panel at the same time as alignment.

  The panels of the flat panel display are aligned by the above-described operation, rotated by a predetermined angle by the above-described tilting operation, clamped by the panel transfer device, and transmitted to the inspection unit.

  According to the conventional panel supply apparatus described above, the size and length of the guide plate provided with the panel aligning means are manufactured to be larger than necessary, so that interference with structures existing around the panel supply apparatus can occur. There is.

  In addition, according to the conventional panel supply apparatus, the guide plate provided with the L / M guide occupies the same space regardless of the size of the flat display panel. There is a problem that causes an increase.

  In addition, since an air cylinder is used to tilt the flat display panel fixedly supported on the sub-table to a predetermined angle, it is difficult to tilt to a desired angle, and there is a balance and stable tilting. There is a problem that is difficult to expect.

  Moreover, since the conventional panel supply apparatus has a complicated structure and is composed of multiple parts, multiple tools are required for setting, and skill is required. And even if it is set by a skilled person, there is a problem that much effort and time are required.

  In addition, since the flat display is tilted by rotating the heavy link stage connected to the hinge structure by the air cylinder, there is a problem that excessive power is required.

  The technical problem of the present invention is that when the size of the flat display panel is small by simplifying the structure of the sub-table, the space occupancy of the equipment is reduced to reduce interference with surrounding structures in the equipment, and the flat display panel is desired. It is an object to provide a panel supply device for a flat panel display panel inspection apparatus that can be tilted to a small angle and a small power.

  The present invention for achieving the above-described technical problem provides a panel supply apparatus for a flat panel display inspection apparatus. According to one aspect of the present invention, a panel supply device includes a fixed plate that is fixed to a predetermined portion inside the inspection device, and a tilting plate that is hinged to both upper sides of the fixed plate and is provided on the upper side of the fixed plate. The tilting plate and the tilting plate are provided at predetermined portions to tilt the tilting plate at a predetermined angle, and the upper side of the tilting plate along the hole-shaped guide provided on the outer periphery of the tilting plate. The up / down plate that is moved up and down and is inserted and fixed in the guide is attached to the lower part, and the up / down plate is installed between the tilting plate and the up / down plate. Down means and up and down plate In comprising a sub-table for aligning the panel supplying rotatably provided in the support to a rotating means provided in the lower portion of the up-down plate to rotate the sub-table, the.

  According to an example, the tilting means includes a first moving body that is hinged to one end of the tilting plate, a tilting ball screw that is supported by the first moving body and rotates, and is provided in a vertical direction. A second moving body that meshes with and interlocks with the tilting ball screw and is hinged to one end of the fixed plate, and a tilting power means provided below the fixed plate for transmitting rotational power to the tilting ball screw. And including.

  According to one example, the sub-table is composed of a base plate made up of four arm arms, panel support means coupled to each arm and the central portion of the base plate, and an X axis provided on the base plate. Two X-axis panel alignment means provided in parallel along the directional arm, and two Y-axis panel alignment means provided in the lower portion of the base plate and provided in parallel along the Y-axis arm.

  According to an example, the panel support means provided in each arm is provided at a side end portion of each arm, and is provided so that the respective panel support means are not adjacent to each other.

  According to one example, rails facing each other are provided on each arm in the X-axis direction, and the two X-axis panel alignment means are arranged at the side power of one side arm of the two arms. Means, an alignment ball screw rotated by alignment power means, a long cuboid X-axis transfer body that is screwed to the alignment ball screw and moves in the longitudinal direction of the arm along the rail, and an upper end of the X-axis transfer body And an alignment bar fixedly provided on.

  According to one example, the two X-axis panel alignment means are provided symmetrically to each other.

  According to one example, the X-axis transfer body is provided in a hollow shape so that a nut coupling body is provided at one end to be threaded and interlocked with the alignment ball screw, and can receive the alignment ball screw.

  According to an example, rails facing each other are provided at the lower part of each arm in the Y-axis direction, and the two Y-axis panel alignment means are arranged to be fixedly provided at a side end portion of one arm among the two arms. A power means, an alignment ball screw that is rotated by the alignment power means, a long cuboid Y-axis transfer body that is screwed to the alignment ball screw and moves in the longitudinal direction of the arm along the rail, and an end of the Y-axis transfer body And an alignment bar provided so as to face the upper side of the arm.

  According to one example, the two Y-axis panel alignment means are provided symmetrically to each other.

  According to an example, the Y-axis transport body is provided in a hollow shape so that a nut coupling body is provided at one end for screwing and interlocking with the alignment ball screw, and can receive the alignment ball screw.

  According to one example, the alignment power means is connected to the first pulley coupled to the alignment ball screw, the first pulley and the second pulley coupled with the belt, and the second pulley is coupled to the power. And an alignment motor.

  In addition, the present invention provides a sub-table that is used in a panel supply apparatus of a flat panel display panel inspection apparatus and supports and aligns substrates. According to one aspect of the present invention, the sub-table is provided by being coupled to the base plate, the panel support means for supporting the panel, and the panel supported by the panel support means, and the overall length is variable. Panel aligning means.

  According to one example, the panel alignment means includes an alignment ball screw provided on the base plate, a transfer body screwed to the alignment ball screw to be moved along the alignment ball screw by rotation of the alignment ball screw, and a transfer body. And an alignment bar that pushes the side of the panel by movement of the transfer body. When the transfer body moves, the total length of the transfer body and the alignment ball screw combined is variable.

  According to one example, the panel alignment means includes first axial panel alignment means for aligning the panels supported by the panel support means in a first axial direction. The first axial panel aligning means includes an alignment ball screw disposed along the first axial direction, and a nut combination screwed to the alignment ball screw therein. A transfer body that moves forward and backward along one axial direction, and an alignment bar that is fixedly coupled to each of the transfer bodies and that pushes the side surface of the panel by the movement of the transfer body. The length at which the alignment ball screw is inserted into the transfer body gradually changes as the transfer body moves so that the combined total length of the screws is variable.

  According to one example, the alignment ball screw includes a first alignment ball screw and a second alignment ball screw, and the transfer body includes a first transfer body and a second transfer body coupled to the first alignment ball screw. A second transfer body coupled to the alignment ball screw, wherein the alignment bar is fixedly coupled to the first transfer body and the second alignment body is fixedly coupled to the second transfer body. And an alignment bar. The first transfer body and the second transfer body are coupled to the first alignment ball screw and the second alignment ball screw so as to move in opposite directions, and the first alignment bar and the second alignment bar are connected to each other. Push the opposite sides of each panel.

  According to an example, the first alignment ball screw and the second alignment ball screw are spaced apart from each other in a direction perpendicular to the first axial direction.

  According to one example, the panel alignment means further includes second axial panel alignment means for aligning the panels supported by the panel support means in a second axial direction perpendicular to the first axial direction.

  According to one example, the second axial panel alignment means is threadably coupled with an alignment ball screw disposed along the second axial direction and an alignment ball screw of the second axial panel alignment means therein. A transfer body formed with a nut combination and advanced and moved backward along the second axial direction by rotation of an alignment ball screw of the second axial panel alignment means; and a transfer body of the second axial panel alignment means And an alignment bar fixedly coupled to each other and configured to push the side surface of the panel by movement of the transfer body of the second axial panel alignment means. The second axial panel alignment means is moved by moving the transfer body of the second axial panel alignment means so that the combined length of the transfer body of the second axial panel alignment means and the alignment ball screw is variable. The length by which the alignment ball screw is inserted into the transfer body of the second axial panel alignment means is gradually changed. The alignment ball screw of the second axial panel alignment means includes a third alignment ball screw and a fourth alignment ball screw, and the transfer body of the second axial panel alignment means has the third alignment ball screw. The alignment bar of the second axial panel alignment means includes a third transfer body coupled to the ball screw and a fourth transfer body coupled to the fourth alignment ball screw. A third alignment bar fixedly coupled to the fourth transfer body and a fourth alignment bar fixedly coupled to the fourth transfer body, wherein the third transfer body and the fourth transfer body move in opposite directions. The third alignment bar and the fourth alignment bar are coupled to the third alignment ball screw and the fourth alignment ball screw, respectively, and push the opposite side surfaces of the panel.

  According to an example, the first to fourth transfer bodies have a rod shape, and the base plate is provided along the first axial direction to form a rail for guiding the movement of the first transfer body. A first arm formed in a direction opposite to the first arm along the first axial direction and formed with a rail for guiding the movement of the second transfer body, and a second arm A third arm formed with a rail for guiding the movement of the third transfer body provided along the axial direction of the second arm, and provided in a direction opposite to the third arm along the second axial direction. And a fourth arm formed with a rail for guiding the movement of the four transfer bodies.

  According to one example, the rails provided to the first arm and the second arm are provided on the upper surface of the first arm and the second arm, and the rails provided to the third arm and the fourth arm. Are provided on the lower surfaces of the third arm and the fourth arm.

  According to the panel supply device of the flat panel display inspection apparatus of the present invention having the above-described configuration and operation and the preferred embodiment, since there is no guide plate and only optimum parts are used, the overall size and weight of the equipment are provided. Has the effect of reducing.

  In addition, the size of the flat display panel is reduced, so the space occupancy of the sub-table is correspondingly reduced, so that the space use efficiency can be increased, and the equipment can be installed without interfering with surrounding structures. It has the effect of preventing damage.

  In addition, since the tilting means applies force to the side edge of the tilting plate to tilt the equipment, a small amount of power is required, and the tilting motor and the tilting ball screw are used to tilt the desired angle. Can be tilted, is stable, and has an effect of being able to perform precise tilting.

  In addition, since the four panel aligning means can be individually operated, there is an advantage that a minute change of the flat display panel can be quickly dealt with.

  Hereinafter, an operation and a preferred embodiment of the panel supply apparatus of the flat panel display panel inspection apparatus according to the present invention including the above-described components will be described in detail with reference to the accompanying drawings.

  FIG. 4 is a block diagram showing a panel supply apparatus 300 of the flat panel display panel inspection apparatus according to the present invention.

  As shown in FIG. 4, the panel supply device 300 of the flat panel display inspection apparatus according to the present invention includes a fixed plate 310 fixed to a predetermined internal portion of the flat panel display inspection apparatus, and a till hinged to the fixed plate 310. Tilting plate 320, tilting means 330 for tilting tilting plate 320, up / down plate 340 provided on the upper side of tilting plate 320 so as to be vertically movable, and up / down means for up / down the up / down plate 340 And a sub-table 400 that supports / aligns a flat panel display panel that is rotatably provided on the upper side of the up / down plate 340, and a rotating unit that rotates the sub-table 400.

  The fixed plate 310 is fixedly provided at a predetermined portion where the panel supply device 300 of the flat panel display panel inspection apparatus is provided, and a tilting plate 320 is provided on the upper side of the fixed plate 310.

  The fixed plate 310 and the tilting plate 320 are hinge-coupled by a hinge coupling body 311 provided on both upper sides of the stationary plate 310. Accordingly, the tilting plate 320 can be rotated at a predetermined angle on the fixed plate 310 fixedly provided at a predetermined portion inside the flat panel display panel inspection apparatus.

  The tilting plate 320 can be rotated by a tilting means 330 provided at a predetermined portion of the fixed plate 310 and the tilting plate 320.

  The tilting means 330 capable of rotating the tilting plate 320 at a predetermined angle on the fixed plate 310 includes a first moving body 331 hinged to one end of the tilting plate 320, and a first moving body 331. A tilting ball screw 332 provided in a vertical direction to rotate while being coupled to and supported by the moving body 331, and a first hinge end coupled to one end of the fixed plate 310 to interlock with and interlock with the tilting ball screw 332 2, and a tilting motor 334 provided below the fixed plate 310 to transmit rotational power to the tilting ball screw 332.

  In the state shown in FIG. 5A, when the tilting motor 334 generates power and transmits it to the motor pulley 335, the ball screw pulley 337 coupled and interlocked by the motor pulley 335 and the belt 336 rotates. The tilting ball screw 332 coupled with the screw pulley 337 also rotates. Then, the tilting plate 320 is tilted while one side of the tilting plate 320 that is hinged to the first moving body 331 is standing up, and the state shown in FIG. 5B is obtained.

  On the upper side of the tilting plate 320, an up / down plate 340 that moves up and down by an up / down means is provided. The up / down means is provided at a predetermined portion between the tilting plate 320 and the up / down plate 340 so that the up / down plate 340 moves vertically in a state parallel to the tilting plate 320.

  Four hole-shaped guides 321 are provided on the outer periphery of the tilting plate 320 so that the up / down plate 340 can move vertically in a stable state on the tilting plate 320, and a hole-shaped guide 321 is provided below the up / down plate 340. An up / down shaft 323 which is inserted into the guide 321 and can move is attached and fixed. Therefore, the up / down plate 340 can be vertically moved along the guide 321 on the tilting plate 320 by driving up / down means (not shown).

  A sub-table 400 is provided above the up / down plate 340 so as to be rotated by a rotating means (not shown). Rotating means (not shown) is provided at a predetermined lower portion of the up / down plate 340 for rotating the sub-table 400.

  The sub-table 400 supports the flat display panel to be supplied and performs an operation of aligning and fixing the supported flat display panel.

  FIG. 6 is an overall configuration diagram showing the sub-table 400.

  As shown in FIG. 6, the sub-table 400 includes a base plate 410 composed of four arms 410a, 410b, 410c, 410d, and a panel support that is coupled to the center of each arm 410a, 410b, 410c, 410d and the base plate 410. The means 420a, 420b, 420c, 420d, 420e and the panel support means 420a, 420b, 420c, 420d, 420e are arranged to align the panels supported by the panel support means 420a, 420b, 420c, 420d, 420e. ,including.

  The panel aligning means has first axial panel aligning means for aligning the panels along the first axial direction and second axial panel aligning means for aligning the panels along the second axial direction. When the panel has a rectangular shape, the first axial direction and the second axial direction are perpendicular to each other. Hereinafter, the first axis is referred to as the X axis, and the second axis is referred to as the Y axis.

  Accordingly, the panel aligning means is provided at the lower part of the base plate 410 and two X axis direction panel aligning means 430a and 430b provided at the upper part of the base plate 410 and provided in parallel along the arms 410a and 410c in the X axis direction. Two Y-axis direction panel alignment means 440a and 440b provided in parallel along the Y-axis direction arms 410b and 410d.

  The base plate 410 is composed of four short arms 410a, 410b, 410c, 410d so as to have a minimum size and weight. In addition, panel support means 420a, 420b, 420c, 420d having the same height are provided at the central portion of the base plate 410 where the arms 410a, 410b, 410c, 410d and the arms 410a, 410b, 410c, 410d intersect. 420e is provided.

  Panel support means 420a, 420b, 420c, 420d, 420e provided on the respective arms 410a, 410b, 410c, 410d are provided on the side end portions of the respective arms 410a, 410b, 410c, 410d. It is preferable to be provided so as not to be adjacent to each other for support, enhance spatial utilization, and easy installation.

  The two X-axis direction panel alignment means 430a and 430b and the two Y-axis direction panel alignment means 440a and 440b have the same configuration. However, in order to improve spatial utilization by providing the base plate 410 with a small size and weight, the two X-axis direction panel alignment means 430a and 430b are provided symmetrically with each other on the upper part of the base plate 410, The two Y-axis direction panel alignment means 440 a and 440 b are provided symmetrically with each other at the lower part of the base plate 410.

  Accordingly, only the structure and operation of the X-axis direction panel alignment means 430a and 430b will be described below, and the structure and operation of the Y-axis direction panel alignment means 440a and 440b follow the structure and operation of the X-axis panel alignment means 430a and 430b.

  FIG. 7 is an exploded perspective view showing the X-axis direction panel alignment means 430.

  As shown in FIG. 7, rails 411 facing each other are provided on the arms 410a and 410c in the X-axis direction. The rail 411 is not formed long because the lengths of the arms 410a and 410c constituting the base plate 410 are short, but is formed only to such an extent that an X-axis direction transfer body 432 described later can slide and move. Is done.

  The two X-axis direction panel alignment means 430a and 430b provided symmetrically with each other include an alignment power means 439 fixedly provided at a side end portion of the one side arm 410a or 410c, and an alignment power means among the two arms 410a and 410c. An alignment ball screw 431 rotated by 439, an X-axis direction transfer body 432 having a long hexahedron shape that is screw-coupled to the alignment ball screw 431 and moves in the longitudinal direction of the arms 410a and 410c along the rail 411, and an X-axis direction An alignment bar 433 that is fixedly provided on the upper end of the transfer body 432 and that aligns with the end of the flat panel display panel. The two X-axis direction transfer bodies 432 are coupled to the respective alignment ball screws 431 so as to move in opposite directions, and the two alignment bars 433 are opposed to each other of the panel by approaching the X-axis direction transfer bodies 432. Push the side. The two X-axis direction panel alignment means 430a and 430b are spaced apart from each other in the Y-axis direction in order to increase the space utilization.

  The alignment power means 439 can be constituted by an air cylinder (not shown) and a shaft (not shown), but in the present invention, it is constituted by a motor drive for precise and quick alignment. That is, as shown in FIG. 7, the first pulley 437 connected to the alignment ball screw 431, the second pulley 436 interlocked by the first pulley 437 and the belt 438, and the second pulley 436 are connected. And an alignment motor 435 for generating power.

  The X-axis direction transfer body 432 that is threadedly coupled to the alignment ball screw 431 and is slid along the rail 411 provided on the arms 410a and 410c has a long thread along the inner longitudinal direction. In addition, a nut coupling body 434 that can be coupled and interlocked with the alignment ball screw 431 is provided only at one end coupled to the alignment ball screw 431. The X-axis direction transfer body 432 is preferably manufactured in a hollow shape so as to not only receive the alignment ball screw 431 but also reduce the weight. When the transfer body 432 moves in the X-axis direction according to the above-described structure, the length of the alignment ball screw 431 inserted into the X-axis transfer body 432 changes gradually, and the X-axis transfer body 432 and the alignment ball screw are changed. The total length of the combined 431 is variable.

  When the alignment motor 435 is driven with the above-described structure, the second pulley 436 and the first pulley 437 connected to the belt 438 rotate, and the alignment ball screw 431 also rotates. If it does so, the X-axis direction transfer body 432 which includes the nut coupling body 434 screw-coupled with the alignment ball screw 431 at one end will slide and move along the rail 411 provided on the arms 410a and 410c. As a result, the alignment bar 433 fixedly provided on the upper portion of the X-axis direction transfer body 432 moves to the side end portion of the flat display panel placed on the panel support means 420a, 420b, 420c, 420d, 420e and aligns. Carry out.

  The overall operation of the panel supply apparatus 300 described above can be summarized as follows.

  First, flat display panels of various sizes supplied to the inspection unit are transmitted from a panel loading device such as a robot and placed on the panel support means 420a, 420b, 420c, 420d, and 420e of the sub-table 400.

  Then, the four alignment bars 433 are moved by the alignment power means 439 provided at the side ends of the arms 410a, 410b, 410c, 410d constituting the base plate 410 of the sub-table 400, and the panel support means 420a, 420b, The flat display panels placed on 420c, 420d, and 420e are fixed simultaneously with the alignment.

  In order to supply the flat panel display panel supported and fixed by the sub-table 400 to the panel transfer device in this state, the sub-table 400 is rotated at a constant angle by the rotating means. Thereafter, the flat display panel is tilted at a predetermined angle by the tilting means 330.

  Thereafter, the flat display panel is raised by a predetermined position so that the flat panel display panel can be clamped by the panel transfer device by the up / down means of the panel supply device 300. Then, the panel transfer device transmits the flat display panel to the inspection unit.

  In the above-described embodiment, it has been described that the panel alignment means includes an alignment ball screw for linearly moving the transfer body. However, this is only an example, and an oil / pneumatic cylinder provided with a rod for pushing the transfer body to linearly move the transfer body or a link mechanism for moving the transfer body linearly can be provided.

It is a block diagram of a general flat panel display panel inspection apparatus. It is a block diagram of the conventional panel supply apparatus. It is a block diagram of the conventional subtable. It is a block diagram of the panel supply apparatus applied to this invention. FIG. 6 is an exemplary diagram illustrating a tilting state according to an exemplary embodiment of the present invention. It is a block diagram of the subtable applied to this invention. FIG. 5 is an exploded perspective view of a panel alignment unit according to an embodiment of the present invention.

Explanation of symbols

DESCRIPTION OF SYMBOLS 300 Panel supply apparatus 310 Fixed plate 311 Hinge coupling body 320 Tilting plate 330 Tilting means 331 1st moving body 332 Tilting ball screw 333 2nd moving body 334 Tilting motor 340 Up / down plate 400 Subplate

Claims (21)

A panel supply device for a flat panel display panel inspection device,
A fixing plate fixed to a predetermined portion inside the inspection device;
A tilting plate that is hinged to both upper sides of the fixed plate and is provided on the upper side of the fixed plate;
A tilting means provided at a predetermined portion of the fixed plate and the tilting plate to tilt the tilting plate at a predetermined angle;
Up-down that moves up and down on the upper side of the tilting plate along a hole-shaped guide provided on the outer periphery of the tilting plate, and an up-down shaft that is inserted into the guide and moves is attached to the lower part Plates,
Up / down means provided between the tilting plate and the up / down plate to up and down the up / down plate;
A sub-table provided with panel alignment means for supporting and aligning a flat display panel that is rotatably provided on the upper side of the up / down plate and is arranged, and whose overall length is variable during alignment;
Rotating means provided below the up / down plate for rotating the sub-table, and a panel supply device for a flat panel display panel inspection apparatus. The tilting means includes
A first moving body hinged to one end of the tilting plate;
A tilting ball screw which is supported by the first moving body and rotates, and is provided in a vertical direction;
A second moving body meshing with and interlocking with the tilting ball screw and hinged to one end of the fixed plate;
Tilting power means provided below the fixed plate for transmitting rotational power to the tilting ball screw;
The panel supply device for a flat panel display panel inspection apparatus according to claim 1, comprising: The sub-table is
A base plate consisting of four arms with a predetermined shape;
Panel support means provided coupled to the respective arms and the central portion of the base plate;
Two X-axis panel alignment means provided on the top of the base plate and provided in parallel along an arm in the X-axis direction;
Two Y-axis panel alignment means provided at a lower portion of the base plate and provided in parallel along an arm in the Y-axis direction;
The panel supply device for a flat panel display panel inspection apparatus according to claim 1, comprising:   The flat panel display according to claim 3, wherein the panel support means provided on each arm is provided at a side end of each arm so that the panel support means are not adjacent to each other. Panel supply device for panel inspection equipment. Rails facing each other are provided on each arm in the X-axis direction,
The two X-axis panel alignment means are:
Alignment power means fixedly provided at the side end of one arm in the two arms,
An alignment ball screw rotated by the alignment power means;
A long cuboid X-axis transfer body that is screw-coupled to the alignment ball screw and moves in the longitudinal direction of the arm along the rail;
The panel supply device of the flat panel display panel inspection apparatus according to claim 3, further comprising an alignment bar fixedly provided at an upper end of the X-axis transfer body.   6. The panel supply device of a flat panel display panel inspection apparatus according to claim 5, wherein the two X-axis panel alignment means are provided symmetrically to each other.   The X-axis transfer body is screw-coupled to the alignment ball screw to be interlocked with each other, so that a nut coupling body is provided at one end thereof, and is hollow so as to receive the alignment ball screw. Item 6. A panel supply device for a flat panel display panel inspection device according to Item 5. Rails facing each other are provided at the bottom of each arm in the Y-axis direction,
The two Y-axis panel alignment means are:
Alignment power means fixedly provided on the side end of one arm of the two arms,
An alignment ball screw rotated by the alignment power means;
A long hexahedron-shaped Y-axis transfer body that is screw-coupled to the alignment ball screw and moves in the longitudinal direction of the arm along the rail;
4. A panel supply device for a flat panel display panel inspection apparatus according to claim 3, further comprising an alignment bar fixedly provided at an end of the Y-axis transfer body and provided so as to face the upper side of the arm. .   The panel supply device of a flat panel display panel inspection apparatus according to claim 8, wherein the two Y-axis panel alignment means are provided symmetrically to each other.   The Y-axis transfer body is provided with a nut coupling body at one end so as to be coupled with the alignment ball screw by screw connection, and is hollow so as to receive the alignment ball screw. The panel supply apparatus of the flat panel display panel inspection apparatus according to claim 8. The alignment power means includes:
A first pulley coupled to the alignment ball screw;
A second pulley coupled to the first pulley by a belt;
An alignment motor connected to the second pulley to generate power;
The flat panel display panel inspection apparatus panel supply apparatus according to claim 5 or 8, characterized by comprising: The panel alignment means includes
An alignment ball screw provided on the base plate;
A transfer body screwed to the alignment ball screw to be moved along the alignment screw by rotation of the alignment ball screw;
An alignment bar fixedly coupled to the transfer body and pushing the side of the panel by movement of the transfer body;
The panel supply device of the flat panel display panel inspection apparatus according to claim 1, wherein when the transfer body is moved, a total length of the transfer body and the alignment ball screw coupled is variable. A sub-table that is used in a panel supply device of a flat panel display panel inspection device and supports and aligns a substrate,
A base plate;
Panel support means provided to be coupled to the base plate and supporting the panel;
A sub-table comprising: panel aligning means for aligning the panels supported by the panel supporting means and having a variable overall length. The panel alignment means includes
An alignment ball screw provided on the base plate;
A transfer body screwed to the alignment ball screw to be moved along the alignment ball screw by rotation of the alignment ball screw;
An alignment bar fixedly coupled to the transfer body and pressing a side surface of the panel by movement of the transfer body;
The sub-table according to claim 13, wherein when the transfer body is moved, the total length of the transfer body and the alignment ball screw coupled is variable. The panel alignment means includes first axial panel alignment means for aligning the panel supported by the panel support means in a first axial direction,
The first axial panel alignment means comprises:
An alignment ball screw disposed along the first axial direction;
A nut assembly that is screw-coupled to the alignment ball screw is formed therein, and a transfer body that moves forward and backward along the first axial direction by rotation of the alignment ball screw;
An alignment bar fixedly coupled to the transfer body and pushing the side of the panel by movement of the transfer body;
The length at which the alignment ball screw is inserted into the transfer body is gradually changed by the movement of the transfer body so that the total combined length of the transfer body and the alignment ball screw is variable. The sub-table according to claim 13, characterized in that it is a sub-table. The alignment ball screw has a first alignment ball screw and a second alignment ball screw;
The transfer body has a first transfer body coupled to the first alignment ball screw and a second transfer body coupled to the second alignment ball screw;
The alignment bar has a first alignment bar fixedly coupled to the first transfer body and a second alignment bar fixedly coupled to the second transfer body;
The first transfer body and the second transfer body are coupled to the first alignment ball screw and the second alignment ball screw so as to be moved in directions opposite to each other. The sub-table according to claim 15, wherein the second alignment bars push the opposite side surfaces of the panel.   The sub-table according to claim 16, wherein the first alignment ball screw and the second alignment ball screw are spaced apart from each other in a direction perpendicular to the first axial direction.   The panel alignment means further includes second axial panel alignment means for aligning a panel supported by the panel support means in a second axial direction perpendicular to the first axial direction. The sub-table according to claim 15. The second axial panel alignment means comprises:
An alignment ball screw disposed along the second axial direction;
A nut assembly is formed in the second axial panel alignment means and screwed with the alignment ball screw. The rotation of the alignment ball screw of the second axial panel alignment means causes the second axial panel alignment means to rotate in the second axial direction. A transfer body that is moved forward and backward along,
An alignment bar fixedly coupled to each of the transfer bodies of the second axial panel alignment means and pressing a side surface of the panel by movement of the transfer body of the second axial panel alignment means;
The transfer body of the second axial panel alignment means is moved so that the combined length of the transfer body of the second axial panel alignment means and the alignment ball screw is varied, thereby moving the first axial panel alignment means. The length by which the alignment ball screw of the second axial panel alignment means is inserted into the transfer body of the second axial panel alignment means is gradually changed;
The alignment ball screw of the second axial panel alignment means comprises a third alignment ball screw and a fourth alignment ball screw,
The transport body of the second axial panel alignment means has a third transport body coupled to the third alignment ball screw and a fourth transport body coupled to the fourth alignment ball screw. And
The alignment bar of the second axial panel alignment means includes a third alignment bar fixedly coupled to the third transfer body and a fourth alignment bar fixedly coupled to the fourth transfer body. ,
The third transfer body and the fourth transfer body are coupled to the third alignment ball screw and the fourth alignment ball screw so as to be moved in directions opposite to each other. The sub-table according to claim 18, wherein the fourth alignment bars respectively push the opposite side surfaces of the panel. The first to fourth transfer bodies have a rod shape,
The base plate is
A first arm provided along the first axial direction and formed with a rail for guiding the movement of the first transfer body;
A second arm provided in a direction opposite to the first arm along the first axial direction and formed with a rail for guiding the movement of the second transfer body;
A third arm formed with a rail for guiding the movement of the third transfer body provided along the second axial direction;
A fourth arm provided in a direction opposite to the third arm along the second axial direction and formed with a rail for guiding the movement of the fourth transfer body;
The sub-table according to claim 18, characterized by comprising: The rail provided to the first arm and the second arm is provided on an upper surface of the first arm and the second arm;
21. The sub of claim 20, wherein the rails provided to the third arm and the fourth arm are provided on lower surfaces of the third arm and the fourth arm. table.

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