CN1277113C - Device for checking chip - Google Patents
Device for checking chip Download PDFInfo
- Publication number
- CN1277113C CN1277113C CNB031569439A CN03156943A CN1277113C CN 1277113 C CN1277113 C CN 1277113C CN B031569439 A CNB031569439 A CN B031569439A CN 03156943 A CN03156943 A CN 03156943A CN 1277113 C CN1277113 C CN 1277113C
- Authority
- CN
- China
- Prior art keywords
- removable frame
- substrate
- lifting gear
- lifting
- ball
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
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Classifications
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05B—ELECTRIC HEATING; ELECTRIC LIGHT SOURCES NOT OTHERWISE PROVIDED FOR; CIRCUIT ARRANGEMENTS FOR ELECTRIC LIGHT SOURCES, IN GENERAL
- H05B6/00—Heating by electric, magnetic or electromagnetic fields
- H05B6/64—Heating using microwaves
- H05B6/6408—Supports or covers specially adapted for use in microwave heating apparatus
- H05B6/6411—Supports or covers specially adapted for use in microwave heating apparatus the supports being rotated
Abstract
Apparatus for inspecting a substrate set to a desired position for defects, including a base, a stage for placing the substrate to be inspected thereon, a movable frame having the stage rotatably mounted thereon, and a parallel manipulator having six elevating actuators each movable up/down by a predetermined amount, the elevating actuator having a lower end connected to the base to be rotatable in any direction, an upper end connected To the movable frame to be rotatable in any direction, for moving the movable frame in a desired direction, thereby permitting setting the substrate to a desired position and simplifying the system.
Description
Technical field
The present invention relates to be used to check the device of substrate, relate in particular to a kind of like this device that is used to check substrate, adopt a kind of operation repetitive device that can carry out multifreedom motion in this device, so that when checking substrate surface, easily LCD (LCD) substrate or analog are placed on desired location.
Background technology
As everyone knows, when a glass substrate tilts with different angles and/or rotates, macroscopical substrate detects (inspection) device makes defectives such as the spot of substrate surface or crackle along with the variation of light can be observed, so that check out the defective of LCD or PDP (plasma display) substrate surface.
A kind of macroscopical substrate detection device of prior art comprises a system, and in this system, a kind of X-Y-Z-θ mechanism is fixed on substrate on the platform, and at X, Y, the Z direction moves this substrate linearly and rotate this substrate in the θ angle, so that move this substrate in different angles.The operating rod of user's manipulation outside device that move through of this platform finished.
Yet, macroscopical substrate detection device of prior art, not only complex structure, and bulky, its reason is that a table apparatus need provide the driving mechanism of a directions X, the driving mechanism of a Y direction respectively, the driving mechanism of the driving mechanism of a Z direction and a θ direction.
Simultaneously, because this X-Y-Z-θ driving mechanism only provides four degree of freedom, the degree of freedom of this platform activity is limited, and the result needs more time to be used for detecting, again because this platform can not be arranged on the position that the observer needs, so be difficult to find the defective of substrate surface.
Summary of the invention
Correspondingly, the present invention relates to a kind of device that is used to check substrate, this device has been eliminated the one or more problems that produce owing to the limitation of prior art and shortcoming basically.
An object of the present invention is to provide a kind of device that is used to check substrate, this device can be fixed on substrate the position of needs, and has simple system structure.
Another object of the present invention provides a kind of device that is used to check substrate, and this device has enough intensity when being fixed in a position, so that supporting substrate stably.
Other characteristics of the present invention and advantage will be described in the explanation of back, and those of ordinary skills are by reading the following description or can partly understanding these characteristics and advantage by implementing the present invention.The structure that illustrates in the instructions that these purposes of the present invention and other advantages can be by the application, the application's protection domain and the accompanying drawing realizes and obtains.
In order to realize these purposes and other advantages, and according to purpose of the present invention, as introduce in the embodiment and institute's general description here, be used to check that the device of the defective of the substrate that is placed on a target location comprises: a base; A platform that is used to place the substrate that to check; A removable frame (movable frame), this platform is rotating be installed in removable frame above; With an operation repetitive device (parallel manipulator) with six lifting gears, each lifting gear can be upwards/down mobile by predetermined amount, this lifting gear have be connected with base can be in the lower end that either direction is rotated, with be connected with removable frame can be in the upper end that either direction is rotated, so that move this removable frame at target direction.
Be appreciated that above-mentioned explanation of the present invention and following detailed description all are illustrative and indicative, its purpose is to provide further explanation to the scope of protection of present invention.
Description of drawings
The present invention is further detailed by accompanying drawing, and these accompanying drawings describe embodiments of the invention with instructions in conjunction with in this application and constitute the application's a part, illustrate inventive concept of the present invention.In the accompanying drawings:
Fig. 1 is a schematic front view that is used to check the device of substrate according to the preferred embodiment of the invention;
Fig. 2 is the side view that is used to check the device of substrate among Fig. 1;
Fig. 3 is the planimetric map of a removable frame that is used for fixing the platform of the device that is used to check substrate among Fig. 1;
Fig. 4 is the cut-open view of critical component of structure of lifting gear of device that is used for checking substrate of displayed map 1;
Fig. 5 is the front view of typical operation state that is used to check the device of substrate among Fig. 1; With
Fig. 6 is the front view of typical operation state that is used to check the device of substrate among Fig. 1.
Embodiment
Now will be in detail with reference to the preferred embodiments of the present invention, in conjunction with the accompanying drawings content of the present invention is elaborated.Fig. 1-4 schematically illustrates the system that is used to check the device of substrate of the present invention.
As shown in the figure, removable frame 2 be installed in the Substrate checking device base 1 above, a platform 3 that is used for placing substrate to be checked thereon is installed in rotation on removable frame 2, an operation repetitive device is arranged between base 1 and removable frame 2, this operation repetitive device has six independently lifting gears 10, is used at the mobile removable frame of required direction (target direction).And, a pair of relative vibroshock 9 is arranged between base 1 and removable frame 2, be used for by handling this operation repetitive device, change this removable frame 2 the position during, support this load that comprises this removable frame 2 above vibroshock 9.
Simultaneously, this removable frame 2 comprises: a horizontal structure 21 that links to each other with lifting gear 10, with the vertical stratification 22 on the relative limit of this horizontal structure 21; And the opposite end of this platform 3 is installed in the relative top of vertical stratification 22 respectively, movably by turning axle 6.
In order to make this platform 3 rotate to the angle of needs, one side at the electric rotating machine 7 that has of this vertical stratification 22 with respect to removable frame 2.Correspondingly, when the rotating force of this electric rotating machine 7 was transported to turning axle 6, this platform 3 can turn to required angle with respect to this vertical stratification 22.
The fixture 23 of three intervals, 120 degree is arranged on the horizontal structure 21 of removable frame 2, and each fixture links to each other with the upper end of two lifting gears 10.The lower end of this lifting gear 10 is connected on the base 1, and the lower end that is connected the adjacent lifting gear 10 on other fixtures 23 like this is by (side by side) placement side by side.Like this, adjacent lifting gear 10 forms ' V ' type.
This arrangement mode of lifting gear 10 can provide the motion of six-freedom degree effectively, guarantees that simultaneously this removable frame 1 has enough rigidity (intensity).In other words, the above-mentioned arrangement mode of lifting gear 10 provide one effectively load distribute, reason is, when this removable frame 2 banking the time, with adjacent lifting gear 10 support load, form a pair of support at the gearing 10 of the side that tilts there.
Simultaneously, this lifting gear 10 can use a kind of like this mechanism, and the control signal that this mechanism can response external goes up/descend to move the distance of a scheduled volume linearly.
For example, referring to Fig. 4, this lifting gear 10 comprises: a fixed part 11, this fixed part have the upper surface that a lower end is connected base 1, so that with arbitrarily angled rotation; One is installed in ball-screw 12 in the fixed part 11 along last/following direction; A nut part 13, when ball-screw rotated, nut part can move along ball-screw; A LM guide 14 is installed in the fixed part 11 along last/following direction, is used for the motion of guiding nut parts 13; With a lifting piece 15, this lifting piece one end is fixed on the nut part 13, and the other end rotatably is connected with removable frame 2, when moving with convenient nut part 13 on/move down.
Side at fixed part 11 has a drive motor 16, is used at both direction rotation ball leading screw 12 selectively.This drive motor 16 is with (timingbelt shows among the figure) to be connected with the bottom of ball-screw 12 synchronously by one, be used for rotating force is transferred to ball-screw 12.
This operational circumstances that is used to check the device of substrate will explain according to Fig. 5 and 6.
Before substrate is placed on the platform 3, this platform 3 and removable frame 2 maintenance levels.When the mechanical hand (not shown) of outside carrier is transported to substrate to be checked ' G ' above the platform 3, and this substrate is placed on the platform 3, these electric rotating machine 7 runnings make platform 3 rotations, substrate ' G ' is placed on one tilts or vertical position.
Then, when the workman from control gear of peripheral operation, for example when an operating rod (not shown) or a controller, manipulation control signal from control gear is provided to a control device (not shown), the operation of this control device control lifting gear 10, and the position that this control device calculates the removable frame 2 of these control signal needs according to a preset program, and a motor signal of the position that calculated is offered the drive motor 16 of this lifting gear 10.
Correspondingly, operation along with this drive motor 16, when ball-screw 12 when a fixed-direction (counterclockwise) or reverse direction (regurgitation (suitable) clockwise) rotate scheduled volume, this lifting gear 10 makes removable frame 2 move to the position of needs, and when this ball-screw 12 rotates, on this nut part 13/move down.
For example, referring to Fig. 5, watch accompanying drawing (overlooking) from above, when operating personnel plan substrate ' G ' to the device left side the time, along with drive motor 16 at fixed-direction rotation ball leading screw 12, the lifting gear 10 of this device right part moves up, make nut part 13 respectively and move up with the fixing lifting piece 15 of nut part 13, and along with this drive motor 16 rotates in an opposite direction ball-screw 12, lifting gear 10 in device left side is moved down, and makes nut part 13 respectively and moves down with the fixing lifting piece 15 of nut part 13.
In this case, because this lifting gear 10 is in opposite direction motion, lifting gear 10 on the device right side is moved upwards up to the position, upper right side in fact, and meanwhile, lifting gear 10 in the device left side is moved down into obliquity, and this removable frame 2 is tilted to the left.
In contrast, as shown in Figure 6, watch accompanying drawing (overlooking) from above, when operating personnel plan substrate ' G ' when the right side of device tilts, lifting piece 15 at the lifting gear 10 on the left of the device moves on to the position, upper right side in fact, and is moved downwardly into obliquity at the lifting piece 15 of the lifting gear 10 that installs the right side.
In addition, though do not show among the figure, the substrate ' G ' if operating personnel's plan is tilted forward or backward, by handling lifting gear 10 with the similar method of said method, removable frame 2 and platform 3 can be tilted needed angle.
Certainly, because motion is independently gone up/descended to this lifting gear 10, make the motion on six-freedom degree become possibility, this can make removable frame 2 carry out a kind of compound motion on a left side/right side and front/rear direction, so this operation repetitive device that has six lifting gears 10 can be placed into any desired position with substrate ' G '.
Simultaneously, because this lifting gear 10 forms ' V ' shape framework mutually, the enough intensity that has this lifting gear 10 supports the load of this removable frame 2 in the target location, and the vibroshock 9 on removable frame 2 both sides guarantees that also device has good security.
As mentioned above, because the device that is used to check substrate of the present invention can be controlled the platform that is placed with substrate on it and have the position of the removable frame of operation repetitive device, can carry out the motion of six-freedom degree, make and utilize a simple system that the substrate inspection that is placed on the target location is become possibility, thereby allow almost ideal ground to find the defective and the spot of substrate surface at short notice.
In addition, because the arrangement mode of the top and bottom of the lifting gear adjacent one another are in the operation repetitive device allows to load in the position supported weight that is provided with of removable frame, and stably change the position, so of the present inventionly be used to check that the device of substrate can improve reliability.
The above is the preferred embodiments of the present invention only, is not limited to the present invention, and for a person skilled in the art, the present invention can have various changes and variation.Within the spirit and principles in the present invention all, any modification of being done, be equal to replacement, improvement etc., all should be included within protection scope of the present invention.
Claims (3)
1. device that is used to check the defective of the substrate that is placed on the target location comprises:
A base;
A platform that is used to place substrate to be checked;
A removable frame, described platform are installed in rotation on the described removable frame; With
An operation repetitive device, described operation repetitive device has six lifting gears, each lifting gear can be above/move predetermined amount down, described lifting gear has one and is connected with described base so that in lower end that either direction is rotated, be connected so that in the upper end that either direction is rotated, described operation repetitive device is used for moving described removable frame at target direction with described removable frame with one;
Vibroshock, one end of described vibroshock is connected with described base so that can rotate in either direction, the other end is connected with described removable frame so that can rotate in either direction, described vibroshock is used for cushioning the motion of described removable frame when described removable frame moves by described lifting gear;
Wherein said lifting gear comprises: the fixed part with the lower end that is rotationally connected with described base, one is installed in the ball-screw in the described fixed part along last/following direction, a drive motor that is used on both direction, optionally rotating described ball-screw, the nut part that can move along described ball-screw along with the rotation of described ball-screw, one is installed together along last/following direction and described fixed part and is used to guide guide that described nut part moves and one one end to be fixed in described nut part and lifting piece that the other end and described removable frame are rotationally connected is used for when nut part moves/moves down.
2. device according to claim 1, wherein said removable frame comprise the fixture of three intervals, 120 degree, and each fixture is connected with two lifting gears.
3. device according to claim 2, the lower end of wherein said lifting gear is connected with described base, and the lower end of the adjacent lifting gear that links to each other with other fixtures is by placed side by side like this.
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| KR1020030031632A KR20040099600A (en) | 2003-05-19 | 2003-05-19 | Apparatus for inspection of substrate |
| KR1020030031632 | 2003-05-19 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN1550775A CN1550775A (en) | 2004-12-01 |
| CN1277113C true CN1277113C (en) | 2006-09-27 |
Family
ID=34374105
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CNB031569439A Expired - Fee Related CN1277113C (en) | 2003-05-19 | 2003-09-15 | Device for checking chip |
Country Status (3)
| Country | Link |
|---|---|
| KR (1) | KR20040099600A (en) |
| CN (1) | CN1277113C (en) |
| TW (1) | TWI225926B (en) |
Families Citing this family (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR100931601B1 (en) * | 2006-07-24 | 2009-12-14 | 주식회사 에이디피엔지니어링 | Board Bonding Device with Alignment Unit |
| CN102573992B (en) | 2009-09-24 | 2016-04-27 | 皇家飞利浦电子股份有限公司 | High intensity focused ultrasound positioning mechanism |
| US9435626B2 (en) * | 2011-08-12 | 2016-09-06 | Corning Incorporated | Kinematic fixture for transparent part metrology |
-
2003
- 2003-05-19 KR KR1020030031632A patent/KR20040099600A/en not_active Application Discontinuation
- 2003-09-09 TW TW092124872A patent/TWI225926B/en not_active IP Right Cessation
- 2003-09-15 CN CNB031569439A patent/CN1277113C/en not_active Expired - Fee Related
Also Published As
| Publication number | Publication date |
|---|---|
| KR20040099600A (en) | 2004-12-02 |
| CN1550775A (en) | 2004-12-01 |
| TW200426360A (en) | 2004-12-01 |
| TWI225926B (en) | 2005-01-01 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C06 | Publication | ||
| PB01 | Publication | ||
| C10 | Entry into substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20060927 Termination date: 20150915 |
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| EXPY | Termination of patent right or utility model |