CN108169933A - A kind of liquid crystal panel detecting method and system - Google Patents

A kind of liquid crystal panel detecting method and system Download PDF

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Publication number
CN108169933A
CN108169933A CN201711345630.2A CN201711345630A CN108169933A CN 108169933 A CN108169933 A CN 108169933A CN 201711345630 A CN201711345630 A CN 201711345630A CN 108169933 A CN108169933 A CN 108169933A
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CN
China
Prior art keywords
liquid crystal
crystal display
display panel
detected
check bit
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Pending
Application number
CN201711345630.2A
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Chinese (zh)
Inventor
陈文源
韩传云
王俊
陈铭
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SUZHOU HYC ELECTRONIC TECHNOLOGY Co Ltd
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SUZHOU HYC ELECTRONIC TECHNOLOGY Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
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Priority to CN201711345630.2A priority Critical patent/CN108169933A/en
Publication of CN108169933A publication Critical patent/CN108169933A/en
Pending legal-status Critical Current

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    • GPHYSICS
    • G02OPTICS
    • G02FOPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • G02F1/1306Details
    • G02F1/1309Repairing; Testing

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  • Physics & Mathematics (AREA)
  • Nonlinear Science (AREA)
  • Chemical & Material Sciences (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Liquid Crystal (AREA)

Abstract

A kind of the step of liquid crystal panel detecting method in the embodiment of the present application, this method, includes:By a liquid crystal display panel to be detected is moved in multiple default check bits, any one is in and does not detect the check bit of state and be detected;It is spaced to schedule, next liquid crystal display panel to be detected is moved in multiple default check bits and is detected in the check bit for not detecting state;Until all liquid crystal display panel movements to be detected finish or all default check bits are in detection state, then stop liquid crystal display panel to be detected moving to default check bit.Herein described technical solution is matched based on more check bits with manipulator, replaces the artificial detection of conventional manual or semi-automation, realizes the quick testing goal of fully automatically more liquid crystal display panels while on-line checking;So as to shorten detection time, human cost is reduced, improves production efficiency.

Description

A kind of liquid crystal panel detecting method and system
Technical field
This application involves liquid crystal module detection field more particularly to one kind based on more check bits and the matched liquid of manipulator Crystal panel rapid detection method and system.
Background technology
As the extensive of mobile phone was popularized in recent years, requirement of the people to handset capability is also higher and higher.Due to Mobile phone type Number and function different mobile phone screens performance and size also have very big difference.
Core component of the liquid crystal display panel as mobile phone screen directly affects the performance and quality of mobile phone screen.But due to The output of liquid crystal display panel is larger, and artificial detection and semi-automatic artificial inspection are usually also rested on for the detection of liquid crystal display panel The stage of survey leverages the output efficiency of liquid crystal display panel, also greatly consumes cost of labor, when wasting the effective output Between.
Invention content
In order to solve the above technical problems, this application provides a kind of liquid crystal panel detecting method, the step of this method, includes:
By a liquid crystal display panel to be detected is moved in multiple default check bits, any one is in and does not detect the inspection of state Location is detected;
It is spaced to schedule, next liquid crystal display panel to be detected is moved to be in multiple default check bits and is not detected The check bit of state is detected;
Until all liquid crystal display panels to be detected movements finish or all default check bits are in detection state, then stop by Liquid crystal display panel to be detected moves to default check bit.
Preferably, described predetermined time interval t=0 seconds, 1 second, 2 seconds ..., m seconds, m is natural number.
Preferably, it is described to move to next liquid crystal display panel to be detected in multiple default check bits in not detecting state Include after the step of check bit is detected:
If a certain check bit completes the detection of liquid crystal display panel in multiple default check bits, the liquid crystal display panel that detection is finished Remove check bit;If no check bit completes the detection of liquid crystal display panel, continue to move to liquid crystal display panel to be detected to be in not detect The check bit of state.
Preferably, the liquid crystal display panel removal check bit finished will be detected, is placed in precalculated position.
Preferably, by liquid crystal display panel to be detected, multiple default check bits are moved to according to preset order.
Preferably, one that a liquid crystal display panel to be detected is moved in multiple default check bits is not in detecting shape Include before the step of check bit of state is detected:Liquid crystal display panel to be detected is adjusted to predetermined posture.
In order to solve the above technical problems, the application further provides a kind of liquid crystal display panel detecting system, which includes:
Liquid crystal display panel to be detected based on control instruction is moved into, is moved to check bit by manipulator;Or, referred to based on control is removed It enables, the liquid crystal display panel that detection is finished removes check bit;
Multiple check bits, for carrying out performance detection to liquid crystal display panel to be detected;
The monitoring modular being arranged in each check bit monitors the use state of check bit in real time, if check bit is in not Detection state then sends out the first signal;Or, the detection state of check bit is monitored in real time, if check bit has detected liquid crystal display panel Finish, then send out second signal;
Based on the first signal, the immigration control that liquid crystal display panel to be detected is moved to check bit is sent to manipulator for control unit System instruction;Or, based on second signal, the removal control of liquid crystal display panel removal check bit 3 finished will be detected by being sent to manipulator Instruction.
Preferably, which further comprises:Adjust platform;Liquid crystal display panel to be detected is adjusted to pre- by adjusting platform Determine posture;And/or
Blanking station;Manipulator will be detected after the liquid crystal display panel that finishes removes check bit, by liquid crystal display panel be placed on it is described under Material station.
Preferably, the manipulator is spaced to schedule, previous piece and latter piece of liquid crystal display panel is moved to respectively more It is detected in a default check bit in the check bit for not detecting state;
The predetermined time interval:T=0 seconds, 1 second, 2 seconds ..., m seconds, m is natural number.
Preferably, which includes five check bits;Described control unit control machinery hand will be to be checked according to predetermined order Survey liquid crystal display panel moves to five check bits and is detected respectively;Described control unit control machinery hand will detect the liquid crystal surface finished Plate is removed from five check bits.
Beneficial effects of the present invention are as follows:
Herein described technical solution is matched based on more check bits with manipulator, replace conventional manual or semi-automation Artificial detection realizes the quick testing goal of fully automatically more liquid crystal display panels while on-line checking;So as to shorten detection time, Human cost is reduced, improves production efficiency.
Description of the drawings
Attached drawing described herein is used for providing further understanding of the present application, forms the part of the application, this Shen Illustrative embodiments and their description please do not form the improper restriction to the application for explaining the application.In the accompanying drawings:
Fig. 1 shows the schematic diagram of liquid crystal panel detecting method described in this programme;
Fig. 2 shows the schematic diagrames of liquid crystal display panel detecting system described in this programme.
Drawing reference numeral
1st, platform is adjusted, 2, manipulator, 3, check bit, 4, blanking station, 5, supporting rack.
Specific embodiment
In order to which the technical solution of the application and advantage is more clearly understood, below in conjunction with attached drawing to the exemplary of the application Embodiment is described in more detail, it is clear that described embodiment be only the application part of the embodiment rather than The exhaustion of all embodiments.And in the absence of conflict, the feature in the embodiment and embodiment in this explanation can be mutual It is combined.
The core thinking of this programme is using automatic technology, and manipulator 2 is matched with multiple check bits 3, by certainly Dynamic control, on-line checking while realizing multiple liquid crystal display panels are real so as to replace the artificial detection of conventional manual or semi-automation Now fully automatically more liquid crystal display panels simultaneously on-line checking quick testing goal.
As shown in Figure 1, this programme discloses a kind of liquid crystal panel detecting method, this method includes:
Based on automated handling technology, a liquid crystal display panel to be detected is moved to any one in multiple default check bits 3 It is a to be detected in the check bit 3 for not detecting state;
It is spaced to schedule, next liquid crystal display panel to be detected is moved to be in multiple default check bits 3 and is not examined The check bit 3 of survey state is detected;
If a certain check bit 3 completes the detection of liquid crystal display panel in multiple default check bits 3, the liquid crystal surface that detection is finished Plate removes check bit 3;If no check bit 3 completes the detection of liquid crystal display panel, continue to move to liquid crystal display panel to be detected in not The check bit 3 of detection state;
Until all liquid crystal display panel movements to be detected finish or all default check bits 3 are in detection state, then stop Liquid crystal display panel to be detected is moved into default check bit 3.
Manipulator 2 is preferably used in this programme, based on above-mentioned steps by liquid crystal display panel to be detected move to one by one check bit 3 into Row detection, after detection, then by manipulator 2 by liquid crystal display panel remove check bit 3, be placed in a predetermined position, treated without manually picking up It detects liquid crystal display panel and carries out single detection, realize that automation pickup, orientation are carried and multiple liquid crystal display panels detect simultaneously.
In the present solution, described predetermined time interval t=0 seconds, 1 second, 2 seconds ..., m seconds, m is natural number.Preferably, institute It is 2 to 4 seconds to state predetermined time interval.It resets or carries out flexible and rotary motion time in this way, manipulator 2 can be given, It can guarantee the carrying to another piece of liquid crystal display panel in linking again.
In the present solution, for the order that ensures to carry and handle, it is preferable that control machinery hand 2 is by liquid crystal surface to be detected Plate is moved in multiple default check bits 3 according to predetermined order and is detected.For example, first piece of liquid crystal display panel to be detected is moved to No.1 check bit 3 is detected, and second piece of liquid crystal display panel to be detected is moved to No. two check bits 3 and is detected, and so on.Begin Add, detect and remove liquid crystal display panel in sequence eventually.
In the present solution, in order to ensure liquid crystal display panel detection when orientation accuracy, can be first by liquid crystal display panel tune to be detected Whole to predetermined posture, then liquid crystal display panel is moved to by check bit 3 by manipulator 2 and is detected, without manually adjusting liquid crystal The posture of panel, and can ensure that liquid crystal display panel keeps correct test pose and orientation.
As shown in Fig. 2, this programme further discloses a kind of liquid crystal display panel detecting system, which includes:Manipulator 2, Multiple check bits 3 for being arranged on predetermined station, the monitoring modular being arranged in each check bit 3 and control unit.Monitor mould Block monitors the use state of check bit 3 in real time, if check bit 3, which is in, does not detect state, sends out the first signal;Control unit connects The first signal is received, then knows which check bit 3 is in and does not detect state, according to preset priority orders, to manipulator 2 Send the immigration control instruction that liquid crystal display panel to be detected is moved to check bit 3;Manipulator 2 is based on moving into control instruction, according to pre- Liquid crystal display panel to be detected shifting check bit 3 is detected by fixed sequence.Monitoring modular also in real time carries out the detection state of check bit 3 Monitoring if check bit 3 finishes liquid crystal display panel detection, sends out second signal;Control unit receives second signal, then which is known A check bit 3 finishes after testing, and according to preset priority orders, the liquid crystal finished will be detected by being sent to manipulator 2 Panel removes the removal control instruction of check bit 3;Manipulator 2 is based on removing control instruction, and the liquid crystal display panel that detection is finished moves Go out check bit 3, be placed into precalculated position.
In the present solution, during in order to ensure liquid crystal display panel detection orientation accuracy, further setting adjustment is flat in systems Platform 1 adjusts liquid crystal display panel to be detected to predetermined posture by adjusting platform 1, then liquid crystal display panel is moved to inspection by manipulator 2 Location 3 is detected, and without manually adjusting the posture of liquid crystal display panel, and can ensure that liquid crystal display panel keeps correctly detection Posture and orientation.
In the present solution, further setting blanking station 4 in systems, moved by manipulator 2 by the liquid crystal display panel finished is detected After going out check bit 3, the blanking station 4 is placed on, moves to subsequent handling.
Manipulator 2 can be spaced the carrying for carrying out liquid crystal display panel to schedule in the system, so as to ensure system just Normal logic operation mechanism prevents from running and too fast cause maloperation or ran slow influence transporting velocity;Between the predetermined time Every:T=0 seconds, 1 second, 2 seconds ..., m seconds, m is natural number.
As shown in Fig. 2, manipulator 2, multiple check bits 3, adjustment platform 1 and blanking station 4 are preferably fixed on by this programme On one supporting rack 5;Preferably, it is multiple check bits are placed side by side, it adjusts platform 1 and blanking station 4 is separately positioned on supporting rack 5 Both sides, convenient for feeding and blanking;Manipulator 2 is driven by crawler belt and sliding rail, and can check bit 3, adjustment platform 1 and under It is moved back and forth between material station 4.
In the present solution, each liquid crystal display panel detecting system can be used as a working cell, multiple working cells are arranged In the production line, you can realize large-scale liquid crystal display panel detection work.
This programme is described further below by one group of example.
Existing single monitor station is 30 seconds to the time that liquid crystal display panel detects, in this 30 seconds, next liquid crystal surface to be detected Plate needs after monitor station detects the liquid crystal display panel for being currently in detection, can just be detected, i.e., single detection Platform can only ensure the detection of one piece of liquid crystal display panel.Detection efficiency is too low, moreover, every equipment also needs to manually be supervised Control, to prevent from occurring in detection process abnormal conditions, consumption manpower is excessive.
This example provides a kind of quick detection scheme of liquid crystal display panel, and there are five by detecting for setting in a working cell The check bit 3 that jig is formed, each check bit 3 are configured with detection circuit, which can be relay switch, sensor Or logic gates, the judgement signal of check bit 3 whether is accessed by liquid crystal display panel, trigger relay switchs or sensor The first signal is sent out, control unit can judge whether check bit 3 has accessed liquid crystal display panel according to the first signal;It can also utilize The state triggering low and high level that detection state and detection finish, so as to which logic gates be made to send out second signal, control unit can To know whether check bit 3 finishes liquid crystal display panel detection according to second signal.This programme is not limited only to examples detailed above, similar control Mode processed may be incorporated for this programme.In the present solution, described control unit can be integrated in manipulator 2, can also individually set It puts and is arranged in control room as controller.
Before using mobile liquid crystal panel, first pass through the upper discharge position of adjustment correction and be optimal high-volume position, make to be checked It surveys liquid crystal display panel and be in preset bearing or posture and then utilization manipulator 2 by liquid crystal display panel to be detected, according to scheduled suitable Sequence is carried to five one detected in jigs and is detected, and after to be detected, is carried to liquid crystal display panel using manipulator 2 Blanking station 4.
The course of work of the program:After adjustment platform 1 is adjusted liquid crystal display panel to be detected, the crawl adjustment of manipulator 2 Liquid crystal display panel to be detected afterwards is positioned over first detection jig, and manipulator 2 is back to home position immediately, without waiting for first A detection jig detects liquid crystal display panel, as long as adjustment platform 1 completes the adjustment of next liquid crystal display panel to be detected, captures at once Liquid crystal display panel to be detected is positioned on second detection jig, and so on, until piling five check bits 3.I.e. manipulator 2 according to It is secondary that liquid crystal display panel to be detected is transferred to the first check bit 3, the second check bit 3, third check bit 3, the 4th check bit 3 and the 5th Check bit 3, the feeding that 5 jigs are completed with this control.
After control unit receives the feedback signal that the detection of the first check bit 3 is completed, the crawl detection of control machinery hand 2 finishes Liquid crystal display panel, be positioned over blanking station 4, then manipulator 2 returns to adjustment platform 1 and captures product to be measured and be positioned over the first inspection immediately Measurement fixture is detected liquid crystal display panel to be detected, and so on, other check bits 3 are also to carry out liquid crystal display panel by this method It carries and detects, so as to reach cycle feeding control.Manipulator 2 is until production line is stopped or all check bits 3 are in During detection state, stop to wait for carrying in situ always and detect the liquid crystal display panel finished or be moved to liquid crystal display panel to be detected Check bit 3.
Assuming that detection liquid crystal display panel needs 30 seconds, placed 4 seconds as long as manipulator 2 is completed once to capture, adjustment platform 1 adjusts As long as 2 seconds or so.If there is sufficient product to be measured, adjustment platform 1 can be completed to move in 4 seconds that manipulator 2 acts completely Make, realize that seamless waiting picks and places material, the completion of manipulator 2, which picks and places material 5 times, can control at 20 seconds.It is final to realize First material 30 In second detection time, complete five detection jig feedings and complete.By using a working cell, you can to ensure in 30 seconds Continuously five liquid crystal display panels to be detected are detected, according to the work effect of multiple this working cells, then the entire production line Rate will be promoted significantly, so as to shorten detection time, be reduced human cost, be improved production efficiency.
It should be understood by those skilled in the art that, embodiments herein can be provided as method, system or computer program Product.Therefore, the reality in terms of complete hardware embodiment, complete software embodiment or combination software and hardware can be used in the application Apply the form of example.Moreover, the computer for wherein including computer usable program code in one or more can be used in the application The computer program production that usable storage medium is implemented on (including but not limited to magnetic disk storage, CD-ROM, optical memory etc.) The form of product.
The application is with reference to the flow according to the method for the embodiment of the present application, equipment (system) and computer program product Figure and/or block diagram describe.It should be understood that it can be realized by computer program instructions every first-class in flowchart and/or the block diagram The combination of flow and/or box in journey and/or box and flowchart and/or the block diagram.These computer programs can be provided The processor of all-purpose computer, special purpose computer, Embedded Processor or other programmable data processing devices is instructed to produce A raw machine so that the instruction performed by computer or the processor of other programmable data processing devices is generated for real The device of function specified in present one flow of flow chart or one box of multiple flows and/or block diagram or multiple boxes.
These computer program instructions, which may also be stored in, can guide computer or other programmable data processing devices with spy Determine in the computer-readable memory that mode works so that the instruction generation being stored in the computer-readable memory includes referring to Enable the manufacture of device, the command device realize in one flow of flow chart or multiple flows and/or one box of block diagram or The function of being specified in multiple boxes.
These computer program instructions can be also loaded into computer or other programmable data processing devices so that counted Series of operation steps are performed on calculation machine or other programmable devices to generate computer implemented processing, so as in computer or The instruction offer performed on other programmable devices is used to implement in one flow of flow chart or multiple flows and/or block diagram one The step of function of being specified in a box or multiple boxes.
It these are only the embodiment of the present invention, be not intended to restrict the invention, it is all in the spirit and principles in the present invention Within, any modification, equivalent substitution, improvement and etc. done, be all contained in apply pending scope of the presently claimed invention it It is interior.

Claims (10)

1. a kind of liquid crystal panel detecting method, which is characterized in that the step of this method includes:
By a liquid crystal display panel to be detected is moved in multiple default check bits, any one is in and does not detect the check bit of state It is detected;
It is spaced to schedule, next liquid crystal display panel to be detected is moved to be in multiple default check bits and does not detect state Check bit be detected;
Until all liquid crystal display panel movements to be detected finish or all default check bits are in detection state, then stopping will be to be checked It surveys liquid crystal display panel and moves to default check bit.
2. detection method according to claim 1, which is characterized in that described predetermined time interval t=0 seconds, 1 second, 2 Second ..., m seconds, m is natural number.
3. detection method according to claim 1, which is characterized in that it is described next liquid crystal display panel to be detected is moved to it is more Include after the step of being detected in a default check bit in the check bit for not detecting state:
If a certain check bit completes the detection of liquid crystal display panel in multiple default check bits, the liquid crystal display panel that detection is finished removes Check bit;If no check bit completes the detection of liquid crystal display panel, continue to move to liquid crystal display panel to be detected to be in not detect state Check bit or be waited for.
4. detection method according to claim 3, which is characterized in that the liquid crystal display panel for finishing detection removes check bit, It is placed in precalculated position.
5. detection method according to claim 1, which is characterized in that by liquid crystal display panel to be detected, moved according to preset order To multiple default check bits.
6. detection method according to claim 1, which is characterized in that it is described a liquid crystal display panel to be detected is moved to it is multiple One in default check bit in the check bit for not detecting state be detected the step of before include:
Liquid crystal display panel to be detected is adjusted to predetermined posture.
7. a kind of liquid crystal display panel detecting system, which is characterized in that the system includes:
Liquid crystal display panel to be detected based on control instruction is moved into, is moved to check bit by manipulator;It, will or, based on control instruction is removed It detects the liquid crystal display panel finished and removes check bit;
Multiple check bits, for carrying out performance detection to liquid crystal display panel to be detected;
The monitoring modular being arranged in each check bit monitors the use state of check bit in real time, is not detected if check bit is in State then sends out the first signal;Or, the detection state of check bit is monitored in real time, if check bit finishes liquid crystal display panel detection, Send out second signal;
Control unit, based on the first signal, the immigration control that liquid crystal display panel to be detected is moved to check bit to manipulator transmission refers to It enables;Or, based on second signal, the removal control instruction of liquid crystal display panel removal check bit finished will be detected by being sent to manipulator.
8. detecting system according to claim 7, which is characterized in that the system further comprises:Adjust platform;Pass through tune Leveling platform adjusts liquid crystal display panel to be detected to predetermined posture;And/or
Blanking station;After the liquid crystal display panel that manipulator finishes detection removes check bit, liquid crystal display panel is placed on the blanking station.
9. detecting system according to claim 7, which is characterized in that the manipulator is spaced to schedule, by before One piece and latter piece of liquid crystal display panel are moved in multiple default check bits and are detected in the check bit for not detecting state respectively;
The predetermined time interval:T=0 seconds, 1 second, 2 seconds ..., m seconds, m is natural number.
10. detecting system according to claim 7, which is characterized in that the system includes five check bits;The control is single Liquid crystal display panel to be detected is moved to five check bits according to predetermined order and is detected respectively by first control machinery hand;The control is single First control machinery hand removes the liquid crystal display panel that detection finishes from five check bits.
CN201711345630.2A 2017-12-15 2017-12-15 A kind of liquid crystal panel detecting method and system Pending CN108169933A (en)

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Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN108748078A (en) * 2018-06-25 2018-11-06 丰汉电子(上海)有限公司 Robot transportation system
CN109238653A (en) * 2018-08-17 2019-01-18 张家港康得新光电材料有限公司 A kind of detection method, device, computer readable storage medium and computer equipment
CN110906980A (en) * 2019-11-14 2020-03-24 深圳市华星光电半导体显示技术有限公司 Detection system and detection method
CN114735467A (en) * 2022-02-25 2022-07-12 杭州长川科技股份有限公司 Feeding method and system for multilayer detection equipment

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CN105372856A (en) * 2015-12-14 2016-03-02 武汉精测电子技术股份有限公司 Multi-station aligning method and device for detecting large-screen panel based on mechanical arm
CN106546903A (en) * 2016-10-14 2017-03-29 歌尔科技有限公司 A kind of frock test system and frock test control method

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Publication number Priority date Publication date Assignee Title
CN1786720A (en) * 2004-12-06 2006-06-14 飞而康公司 Plate supply device for testing unit of plate display and sub-working table thereof
CN101165751A (en) * 2006-10-18 2008-04-23 富士迈半导体精密工业(上海)有限公司 Panel detector and its detection method
CN105372856A (en) * 2015-12-14 2016-03-02 武汉精测电子技术股份有限公司 Multi-station aligning method and device for detecting large-screen panel based on mechanical arm
CN106546903A (en) * 2016-10-14 2017-03-29 歌尔科技有限公司 A kind of frock test system and frock test control method

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN108748078A (en) * 2018-06-25 2018-11-06 丰汉电子(上海)有限公司 Robot transportation system
CN109238653A (en) * 2018-08-17 2019-01-18 张家港康得新光电材料有限公司 A kind of detection method, device, computer readable storage medium and computer equipment
CN110906980A (en) * 2019-11-14 2020-03-24 深圳市华星光电半导体显示技术有限公司 Detection system and detection method
CN114735467A (en) * 2022-02-25 2022-07-12 杭州长川科技股份有限公司 Feeding method and system for multilayer detection equipment

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Application publication date: 20180615

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