JP2006156369A5 - - Google Patents
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- Publication number
- JP2006156369A5 JP2006156369A5 JP2005320229A JP2005320229A JP2006156369A5 JP 2006156369 A5 JP2006156369 A5 JP 2006156369A5 JP 2005320229 A JP2005320229 A JP 2005320229A JP 2005320229 A JP2005320229 A JP 2005320229A JP 2006156369 A5 JP2006156369 A5 JP 2006156369A5
- Authority
- JP
- Japan
- Prior art keywords
- electrode layer
- layer
- emitting device
- light
- forming
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000010410 layer Substances 0.000 claims 70
- 239000010408 film Substances 0.000 claims 25
- 239000011229 interlayer Substances 0.000 claims 13
- ZOKXTWBITQBERF-UHFFFAOYSA-N Molybdenum Chemical group [Mo] ZOKXTWBITQBERF-UHFFFAOYSA-N 0.000 claims 8
- 150000002484 inorganic compounds Chemical class 0.000 claims 8
- 229910010272 inorganic material Inorganic materials 0.000 claims 8
- 229910052750 molybdenum Inorganic materials 0.000 claims 8
- 239000011733 molybdenum Substances 0.000 claims 8
- 239000010409 thin film Substances 0.000 claims 8
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 claims 7
- 229910052799 carbon Inorganic materials 0.000 claims 7
- 150000002894 organic compounds Chemical class 0.000 claims 7
- 229910000838 Al alloy Inorganic materials 0.000 claims 5
- 230000003796 beauty Effects 0.000 claims 4
- 238000000034 method Methods 0.000 claims 4
- 239000004065 semiconductor Substances 0.000 claims 4
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 claims 3
- 229910052782 aluminium Inorganic materials 0.000 claims 3
- XLOMVQKBTHCTTD-UHFFFAOYSA-N Zinc monoxide Chemical compound [Zn]=O XLOMVQKBTHCTTD-UHFFFAOYSA-N 0.000 claims 2
- 238000004519 manufacturing process Methods 0.000 claims 2
- 238000004544 sputter deposition Methods 0.000 claims 2
- GWEVSGVZZGPLCZ-UHFFFAOYSA-N Titan oxide Chemical compound O=[Ti]=O GWEVSGVZZGPLCZ-UHFFFAOYSA-N 0.000 claims 1
- XHCLAFWTIXFWPH-UHFFFAOYSA-N [O-2].[O-2].[O-2].[O-2].[O-2].[V+5].[V+5] Chemical compound [O-2].[O-2].[O-2].[O-2].[O-2].[V+5].[V+5] XHCLAFWTIXFWPH-UHFFFAOYSA-N 0.000 claims 1
- 229910000476 molybdenum oxide Inorganic materials 0.000 claims 1
- QGLKJKCYBOYXKC-UHFFFAOYSA-N nonaoxidotritungsten Chemical compound O=[W]1(=O)O[W](=O)(=O)O[W](=O)(=O)O1 QGLKJKCYBOYXKC-UHFFFAOYSA-N 0.000 claims 1
- PQQKPALAQIIWST-UHFFFAOYSA-N oxomolybdenum Chemical compound [Mo]=O PQQKPALAQIIWST-UHFFFAOYSA-N 0.000 claims 1
- DYIZHKNUQPHNJY-UHFFFAOYSA-N oxorhenium Chemical compound [Re]=O DYIZHKNUQPHNJY-UHFFFAOYSA-N 0.000 claims 1
- RVTZCBVAJQQJTK-UHFFFAOYSA-N oxygen(2-);zirconium(4+) Chemical compound [O-2].[O-2].[Zr+4] RVTZCBVAJQQJTK-UHFFFAOYSA-N 0.000 claims 1
- 229910003449 rhenium oxide Inorganic materials 0.000 claims 1
- 229910001925 ruthenium oxide Inorganic materials 0.000 claims 1
- WOCIAKWEIIZHES-UHFFFAOYSA-N ruthenium(iv) oxide Chemical compound O=[Ru]=O WOCIAKWEIIZHES-UHFFFAOYSA-N 0.000 claims 1
- OGIDPMRJRNCKJF-UHFFFAOYSA-N titanium oxide Inorganic materials [Ti]=O OGIDPMRJRNCKJF-UHFFFAOYSA-N 0.000 claims 1
- 229910001930 tungsten oxide Inorganic materials 0.000 claims 1
- 229910001935 vanadium oxide Inorganic materials 0.000 claims 1
- 239000011787 zinc oxide Substances 0.000 claims 1
- 229910001928 zirconium oxide Inorganic materials 0.000 claims 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2005320229A JP4689439B2 (ja) | 2004-11-04 | 2005-11-03 | 発光装置 |
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2004320381 | 2004-11-04 | ||
| JP2004320381 | 2004-11-04 | ||
| JP2005320229A JP4689439B2 (ja) | 2004-11-04 | 2005-11-03 | 発光装置 |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2006156369A JP2006156369A (ja) | 2006-06-15 |
| JP2006156369A5 true JP2006156369A5 (enExample) | 2008-09-18 |
| JP4689439B2 JP4689439B2 (ja) | 2011-05-25 |
Family
ID=36634336
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2005320229A Expired - Fee Related JP4689439B2 (ja) | 2004-11-04 | 2005-11-03 | 発光装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP4689439B2 (enExample) |
Families Citing this family (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR101276662B1 (ko) | 2006-06-30 | 2013-06-19 | 엘지디스플레이 주식회사 | 유기전계 발광소자와 그 제조방법 |
| JP2010135300A (ja) * | 2008-11-10 | 2010-06-17 | Kobe Steel Ltd | 有機ｅｌディスプレイ用の反射アノード電極およびその製造方法 |
| KR100965259B1 (ko) | 2008-12-18 | 2010-06-22 | 삼성모바일디스플레이주식회사 | 유기전계발광표시장치 및 그의 제조방법 |
| US8169137B2 (en) * | 2009-07-14 | 2012-05-01 | Semiconductor Energy Laboratory Co., Ltd. | Light source and device using electroluminescence element |
| JP5218917B2 (ja) * | 2009-07-17 | 2013-06-26 | 日本精機株式会社 | 有機ｅｌパネルの製造方法 |
| JP5969216B2 (ja) * | 2011-02-11 | 2016-08-17 | 株式会社半導体エネルギー研究所 | 発光素子、表示装置、照明装置、及びこれらの作製方法 |
| JP5857333B2 (ja) * | 2012-01-11 | 2016-02-10 | 株式会社Ｊｏｌｅｄ | 有機ｅｌ素子とその製造方法 |
| KR20150043136A (ko) | 2013-10-14 | 2015-04-22 | 삼성디스플레이 주식회사 | 유기 발광 표시 장치 및 이의 제조 방법 |
| AT14576U1 (de) * | 2014-08-20 | 2016-01-15 | Plansee Se | Metallisierung für ein Dünnschichtbauelement, Verfahren zu deren Herstellung und Sputtering Target |
Family Cites Families (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH10209160A (ja) * | 1997-01-21 | 1998-08-07 | Casio Comput Co Ltd | 配線及びそれを用いた表示装置 |
| JPH10275683A (ja) * | 1997-03-28 | 1998-10-13 | Fuji Electric Co Ltd | 薄膜積層型導電体 |
| JPH11251067A (ja) * | 1998-03-02 | 1999-09-17 | Junji Kido | 有機エレクトロルミネッセント素子 |
| JP4713010B2 (ja) * | 2000-05-08 | 2011-06-29 | 株式会社半導体エネルギー研究所 | 発光装置及びその作製方法 |
| JP4152665B2 (ja) * | 2001-07-11 | 2008-09-17 | 株式会社半導体エネルギー研究所 | 発光装置及びその作製方法 |
| JP2003089864A (ja) * | 2001-09-18 | 2003-03-28 | Mitsui Mining & Smelting Co Ltd | アルミニウム合金薄膜及びその薄膜を有する配線回路並びにその薄膜を形成するターゲット材 |
| JP2004171943A (ja) * | 2002-11-20 | 2004-06-17 | Semiconductor Energy Lab Co Ltd | 発光装置の作製方法 |
| US7452257B2 (en) * | 2002-12-27 | 2008-11-18 | Semiconductor Energy Laboratory Co., Ltd. | Method of manufacturing a display device |
-
2005
- 2005-11-03 JP JP2005320229A patent/JP4689439B2/ja not_active Expired - Fee Related
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