JP2006123135A - Linear motion mechanism and carrier robot using the mechanism - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a linear motion mechanism capable of realizing a further accurate linear motion stroke with a simple constitution; a carrier robot using this mechanism; and also a carrier robot for enhancing carrying efficiency of a work by having two hands. <P>SOLUTION: This linear motion mechanism B1 has a guide member 1, moving members 2A, 2B movable along a horizontal straight line-shaped moving stroke set on this guide member 1, and driving mechanisms 3A and 3B for driving these moving members 2A and 2B. The driving mechanism 3A is arranged by sandwiching the moving stroke GL, and includes a pair of synchronously driven reciprocating mechanisms. The moving member 2A is connected to the pair of reciprocating mechanisms in a pair of connecting members 24a separating by sandwiching the moving stroke. <P>COPYRIGHT: (C)2006,JPO&NCIPI

Description

  The present invention relates to a linear movement mechanism and a transfer robot using the same, and more particularly to a transfer robot that can transfer a thin plate-like workpiece such as a substrate in a straight line.

  Among transfer robots, a robot having a mechanism for moving a hand along a linear movement process (linear movement mechanism) is simpler and less expensive than a so-called articulated robot. In a manufacturing process or a manufacturing process of a liquid crystal display panel, it is frequently used as a robot for loading or unloading a wafer or a thin plate workpiece such as a glass substrate into each processing chamber.

  Such a linear movement mechanism in a transfer robot is generally a combination of two parallelogram links with respect to the base as shown in Patent Document 1 and as shown in FIG. It is. That is, with regard to the configuration shown in FIG. 11, the first main link arm 92 is swingably supported about the axis O11 with respect to the base plate 91 fixed to the base, and the first centered about the axis O12. The sub link arm 93 is supported to be swingable. An intermediate plate 96 is connected to the tips of the first main link arm 92 and the first sub link arm 93 so as to be swingable about the axis O13 and the axis O14, thereby forming a first parallelogram link. A second main link arm 94 is connected to the intermediate plate 96 so as to be swingable about the axis O13, and a second sub link arm 95 is supported so as to be swingable about the axis O15. At the tips of the second main link arm 94 and the second sub link arm 95, a second parallelogram link is formed in which a moving plate 97 is connected so as to be swingable about the axis O16 and the axis O17. A hand 98 capable of mounting and holding the thin plate workpiece W is attached to the moving plate 97.

  According to such a configuration, even if the two parallelogram links are deformed, the direction of the moving plate 97 or the hand 98 is maintained constant. Further, the lengths of the first main link arm 92 and the second main link arm 94 are set to be the same, and when the first main link arm 92 is rotated about the axis O11, the rotation is performed. A mechanism for rotating the second main link arm 94 about the axis O13 at a double angular velocity in the direction opposite to the direction is incorporated. Thus, when the first main link arm 92 is rotationally driven, the moving plate 97 or the hand 98 moves along the linear movement stroke GL while maintaining the directionality thereof constant.

Japanese Patent Laid-Open No. 10-6258

  By the way, recently, for example, the outer diameter of a wafer handled in semiconductor manufacturing has increased, and in the manufacture of a liquid crystal display panel, the panel size tends to increase. Along with this, the size of the hand in the transfer robot and the work to be placed and transferred is increased, and the length of the moving process is also required to be increased. Then, in the linear movement mechanism that combines the two parallelogram links shown in FIG. 11, the weight of the workpiece and the hand that supports it deflects the entire link arm in the vertical direction, especially when the link arm is extended. As a result, there is a problem that it is difficult to secure an accurate linear movement process.

  In order to solve this problem without changing the basic configuration, it is necessary to increase the rigidity of each part or to adopt a more accurate and expensive bearing, which is a significant cost. Leading up. Further, when a desired linear movement process is realized by the link mechanism, basically, as the movement process becomes longer, it becomes difficult to ensure accurate linearity of the movement process without increasing the cost. . For example, in the case of the linear movement mechanism shown in FIG. 11, when the heated workpiece W is placed on the hand 98, the second main link arm 94 is heated more than the first main link arm 92 by radiant heat from the workpiece W. Easy to swell. When this happens, a slight difference occurs between the lengths of the second main link arm 94 and the first main link arm 92, so that the second main link arm 94 and the first main link arm 92 cannot move smoothly along the linear movement stroke. Further, the length of the moving stroke varies depending on the length of the first main link arm 92 and the length of the second main link arm 94, but in the design specification in which the lengths of these arms are equal, only one arm is lengthened. Inevitably, both arms must be lengthened to lengthen the travel.

  Further, such a transfer robot is used to carry a workpiece into or out of a process chamber in a manufacturing process of a semiconductor device or a liquid crystal display panel. For example, loading and unloading of workpieces to and from each process chamber is performed by placing a vacuum transfer module between the atmospheric transfer module and each process chamber and transferring the workpiece through the vacuum transfer module. The vacuum transfer module includes a transport chamber in which a plurality of process chambers are arranged at the periphery, and a load lock connecting the atmospheric transfer module and the transport chamber, and the vacuum transfer module is operable in a vacuum atmosphere in the transport chamber. A kind of straight-forward transfer robot is arranged. The straight transfer robot receives the work in the load lock and transfers it into the transport chamber, then loads the work into one of the process chambers, receives the processed work from the process chamber, and transfers it into the load lock. It operates like doing.

  Since the transfer robot shown in FIG. 11 has only one hand, there is a difficulty in efficiently transferring the workpiece in the vacuum transfer module as described above.

  The present invention has been conceived under such circumstances, and with a simple configuration, a linear movement mechanism capable of realizing a more accurate linear movement process, a transport robot using the same, and a hand. An object of the present invention is to provide a transfer robot that improves the transfer efficiency of workpieces by providing two.

  In order to solve the above problems, the present invention employs the following technical means.

  The linear movement mechanism provided by the first aspect of the present invention drives a guide member, a movement member that can move along a horizontal linear movement stroke set on the guide member, and the movement member. A linear movement mechanism including a drive mechanism, wherein the drive mechanism includes a pair of reciprocating mechanisms that are arranged with the movement stroke in between and are synchronously driven, and the movement member is the movement mechanism A pair of connecting members that are spaced apart from each other are connected to the pair of reciprocating mechanisms.

  According to such a configuration, the driving force that is synchronized with each other acts on the moving member that is spaced apart from the moving step. For this reason, when the moving member is moved, a force that tilts the moving member with respect to the moving step does not act, and the moving member does not move. Therefore, the moving member can be moved smoothly. In addition, for example, the moving member does not need to be further rigid in order to prevent twisting movement. Therefore, the moving member can be reduced in weight, and the moving speed and stopping accuracy of the moving member can be improved.

  In a preferred embodiment, the drive mechanism includes a pair of output belts that are arranged with the movement stroke interposed therebetween and are driven in synchronization with each other, and the movement stroke of the pair of output belts is changed. The pair of reciprocating mechanisms are constituted by a pair of reciprocating sections that are spaced apart from each other and reciprocate along parallel lines of the moving stroke.

  In a preferred embodiment, the drive mechanism includes a pair of drive pulleys that rotate synchronously in opposite directions, and each of the pair of output belts is connected to one of the pair of drive pulleys. By being wound around, the sections are synchronously rotated in opposite directions, and are located on both outer sides of the pair of output belts with respect to the travel stroke, and extend along parallel lines of the travel stroke. Is the pair of reciprocating sections.

  In a preferred embodiment, the pair of drive pulleys are arranged side by side on the movement stroke, and each of the drive pulleys is connected to a gear arranged on the same axis, and these gears are also connected. Are engaged with each other so that the pair of drive pulleys are synchronously rotated in opposite directions.

  According to such a configuration, the drive mechanism can have a relatively simple structure while allowing the moving member to be driven smoothly, which is advantageous for weight reduction and cost reduction.

  In a preferred embodiment, the moving member includes a first moving member and a second moving member supported by the guide member so as to be movable without interfering with each other along the moving stroke. The drive mechanism includes a first drive mechanism and a second drive mechanism provided on the guide member so as to drive the first moving member and the second moving member, respectively, and the first drive mechanism is The pair of output belts and the pair of drive pulleys.

  In a preferred embodiment, the guide member movably supports the first moving member, and the pair of first guide rails positioned on the movement stroke and the second moving member are movable. A pair of second guide rails that are supported and positioned on the inner side of the pair of first guide rails with the travel stroke in between.

  In a preferred embodiment, each of the first moving member and the second moving member includes a main plate portion, and the main plate portion of the first moving member is higher than the main plate portion of the second moving member. And the first moving member is connected to the pair of first guides via a pair of support arms extending from both side portions of the main plate portion so as to bypass both side portions of the main plate portion of the second moving member. Supported by rails.

  In a preferred embodiment, the guide member has a structure having an upper housing and a lower housing which are partitioned from each other, and the first drive mechanism is housed in the lower housing, while the second drive The mechanism is housed in the upper housing.

  According to such a configuration, it is possible to appropriately realize a linear moving mechanism including two moving members that are overlapped in the vertical direction. In the guide member, the first drive mechanism and the second drive mechanism can be arranged without interfering with each other. Further, the structure having the upper housing and the lower housing allows the linear movement mechanism to be unduly bulky in plan view and is suitable for space saving.

  The transfer robot provided by the second aspect of the present invention is configured so that the linear movement mechanism provided by the first aspect of the present invention is centered on a vertical turning axis on the movement stroke with respect to the fixed base. The guide member is supported so as to be able to turn, and the moving member is provided with a hand on which a plate-like workpiece can be placed.

  In a preferred embodiment, the linear movement mechanism is also supported so as to be able to move up and down along the pivot axis with respect to the fixed base.

  According to such a configuration, for example, a workpiece or the like can be conveyed accurately and at high speed using the linear movement mechanism described above. Further, by rotating the linear movement mechanism as appropriate with respect to the fixed base, for example, a plurality of process chambers arranged radially with respect to the fixed base of the transfer robot can work on any process chamber. Can be delivered.

  The conveyance robot provided by the third aspect of the present invention is configured such that the linear movement mechanism provided by the first aspect of the present invention has the guide centered on the vertical turning axis on the movement stroke with respect to the fixed base. The member is supported so as to be able to turn, and the first moving member and the second moving member are each provided with a hand on which a plate-like workpiece can be placed and provided in the fixed base. A first drive shaft and a second drive source; a first transmission shaft and a second drive shaft for transmitting a driving force from the first drive source and the second drive source to the first drive mechanism and the second drive mechanism; A transmission shaft is provided, and one of the first transmission shaft and the second transmission shaft is inserted into the other so that the pivot axis is the central axis.

  According to such a configuration, the linear movement mechanism is appropriately rotated from the first drive source and the second drive source to the first drive mechanism and the second drive mechanism while turning with respect to the fixed base. It is possible to transmit a driving force. In particular, since the first drive source and the second drive source are housed in the fixed base, for example, when the transport robot according to the present embodiment is used under vacuum, the first drive source and the second drive source are The second drive source can be placed in an atmosphere of atmospheric pressure that is airtight from the vacuum region, which is suitable for reducing the cost of the transfer robot.

  In a preferred embodiment, the first transmission shaft is inserted through the second transmission shaft, and includes a third transmission shaft that is partially located in both the upper housing and the lower housing. A portion of the third transmission shaft located in the upper housing is provided with a pulley for transmitting a driving force from the first transmission shaft via a belt, and the third transmission shaft One of the pair of drive pulleys of the first drive mechanism is provided in the portion located in the lower housing, while the portion of the second transmission shaft located in the upper housing is A belt constituting the second drive mechanism is wound around.

  According to such a configuration, for example, when maintaining the transfer robot according to the present embodiment, when adjusting the state of transmission of the driving force from the first transmission shaft and the second transmission shaft, the upper housing If the operation can be performed with the opening, the adjustment work can be performed on the first transmission shaft and the second transmission shaft. Therefore, it is suitable for improving the workability of this transfer robot.

  In a preferred embodiment, the linear movement mechanism is also supported so as to be able to move up and down along the pivot axis with respect to the fixed base.

  Other features and advantages of the present invention will become more apparent from the detailed description given below with reference to the drawings.

  Hereinafter, preferred embodiments of a linear movement mechanism and a transfer robot using the same according to the present invention will be described in detail with reference to the drawings.

  1 to 8 show a transfer robot according to a first embodiment of the present invention. As shown in FIGS. 1 to 4, the transfer robot A <b> 1 according to the first embodiment is generally supported by the fixed base 200 so as to be capable of turning and raising and lowering about the turning axis Os. B1 is provided. The linear movement mechanism B1 generally includes a table-shaped guide member 1, and a first movement member 2A and a second movement member that are movable along a horizontal linear movement stroke GL set on the guide member 1. 2B. The first moving member 2A and the second moving member 2B are attached with hands 21a and 21b that can place and hold a thin plate-like work W such as a glass substrate for a liquid crystal panel, for example.

  As clearly shown in FIG. 5, the fixed base 200 includes a housing 200 </ b> A having a bottom wall portion 201, a cylindrical side wall portion 202, and a ceiling wall 203 having a substantially columnar outer shape. A central opening 204 is formed in 203. An elevating base 210 is supported inside the fixed base 200 so as to be movable up and down. The elevating base 210 has a cylindrical portion 211 having an outer diameter smaller than the central opening 204 and having a predetermined dimension in the vertical direction, and an outward flange portion 212 formed at the lower end of the cylindrical portion 211. . A plurality of vertical guide rails 220 in the vertical direction are attached to the inner wall of the cylindrical side wall 202 of the housing 200 </ b> A, and a plurality of guide members 221 provided on the outward flange portion 212 of the elevating base 210 are connected to the linear guide rail 220. On the other hand, it is supported so as to be slidable in the vertical direction. Thereby, the elevating base 210 can move in the vertical direction in the figure with respect to the fixed base 200. At this time, the upper part of the cylindrical portion 211 of the elevating base 210 protrudes and appears from the central opening 204 of the housing 200A. Between the ceiling wall 203 of the fixed base 200 and the outward flange portion 212 of the lifting base 210, both ends of a bellows 230 disposed so as to surround the cylindrical portion 211 of the lifting base 210 are connected. 230 hermetically seals between the ceiling wall 203 of the fixed base 200 and the outward flange portion 212 of the lifting base 210 regardless of the vertical movement of the lifting base 210.

  Also inside the fixed base 200, outside the bellows 230, a screw shaft 241 arranged in the vertical direction and rotating, and screwed to the screw shaft 241 and penetrating into the outward flange portion 212 of the elevating base 210 A ball screw mechanism 240 composed of a fixed nut member 242 is disposed. The screw shaft 241 is linked to the motor M1 by a belt 244 wound around a pulley 243 attached to the lower end thereof, and is rotated in the forward and reverse directions by the driving of the motor M1. By rotating the screw shaft 241 in this manner, the elevating base 210 is raised and lowered.

  The linear movement mechanism B1 is supported by the elevating base 210 so as to be rotatable about a vertical rotation axis Os. A cylindrical portion 15 is formed in the lower part of the linear movement mechanism B1, and this cylindrical portion 15 is rotatably supported inside a cylindrical portion 211 of the lifting base 210 via a bearing 302. Thus, a pulley 15a is integrally formed at the lower end portion of the cylindrical portion 15 of the linear movement mechanism B1, and is provided on the output shaft of the motor M2 supported on the intermediate wall 213 of the cylindrical portion 211 of the lifting base 210. A belt 305 is wound around the attached pulley 304. Thus, by driving the motor M2, the linear movement mechanism B1 is turned about the turning axis Os.

  A seal mechanism 306 positioned above the bearing 302 is interposed between the cylindrical portion 211 of the elevating base 210 and the cylindrical portion 15 of the linear movement mechanism B1. The space below the seal mechanism 306 communicates with the space inside the fixed base 200 on the outer peripheral side of the bellows 230, whereby such a communication space becomes a closed space hermetically sealed with respect to the outside. .

  A first transmission shaft 251 and a second transmission shaft 252 for transmitting driving force to the first driving mechanism 3A and the second driving mechanism 3B are coaxially inserted in the cylindrical portion 15 of the linear movement mechanism B1. . More specifically, the second transmission shaft 252 is a cylindrical shaft, is rotatably supported inside the cylindrical portion 15 via a bearing 253, and the second transmission shaft 252 includes a second shaft. One transmission shaft 251 is rotatably supported via a bearing 254. The lower end of the first transmission shaft 251 is connected to the output shaft of the motor M3 supported by the intermediate wall 213 of the lifting base 210. A pulley 255 is provided at the lower end of the second transmission shaft 252, and a belt 257 is wound around the pulley 256 attached to the output shaft of the motor M 4 supported by the intermediate wall 213 of the elevating base 210. Yes. A seal mechanism 306 is interposed above the bearings 253 and 254. The motor M3 and the motor M4 correspond to an example of the first drive source and the second drive source referred to in the present invention. In addition, since all of the motors M1, M2, M3, and M4 are placed in a space that is airtight from the vacuum region, it is not necessary to use a special motor such as a vacuum application, and it is assumed that the motor is used at atmospheric pressure. A general motor can be used.

  As shown in FIG. 5, the linear movement mechanism B1 includes a guide member 1, a pair of first guide rails 4A provided on the guide member 1, and a pair of second guide rails 4B. 5 and 6 show the transfer robot A1 in which both the first moving member 2A and the second moving member 2B are positioned above the fixed base 200, unlike FIG. The guide member 1 has a rectangular shape in plan view having a longitudinal axis (movement stroke GL) extending in the horizontal direction, and includes a bottom wall 11, a side wall 12, an inner wall 13, and a cover 14. The pair of first guide rails 4A are arranged on the bottom wall 11 of the guide member 1 in parallel with the movement stroke GL at a predetermined interval from each other. The pair of second guide rails 4B are arranged in parallel with the movement stroke GL on the inner side of the pair of first guide rails 4A. A first moving member 2A is supported by the first guide rail 4A so as to be movable along a moving stroke GL via a slider 22a provided at a lower portion thereof, and the second moving member 2B is supported by the second guide rail 4B. The slider 22b is supported so as to be movable along the movement stroke GL. The upper part of each guide rail 4A, 4B is covered with a cover 14.

  As shown in FIGS. 1 and 2, the first moving member 2 </ b> A and the second moving member 2 </ b> B include horizontal plate-like main plate portions 20 a and 20 b extending a predetermined length in the width direction of the guide member 1. . As shown in FIGS. 3 and 4, these main plate portions 20 a and 20 b are positioned so as to overlap with each other via a gap, and can move along the movement stroke GL without interfering with each other.

  As shown in FIG. 5, the main plate portion 20b of the second moving member 2B includes a pair of second plates via a support arm 23b formed in the lower portion thereof and a pair of left and right sliders 22b provided on the lower surface of the support arm 23b. It is supported by the guide rail 4B. On the other hand, the main plate portion 20a of the first moving member 20A is provided on a pair of support arms 23a extending from both ends in the width direction so as to bypass both sides of the main plate portion 20a of the second moving member 2A, and the support arms 23a. It is supported by the pair of first guide rails 4A via the slider 22a. Accordingly, the first moving member 2A and the second moving member 2B can move along the moving stroke GL without interfering with each other as a whole, and the main plate portion 20a of the first moving member 2A can be moved. Is supported by the first guide rail 4 </ b> A in a doubly supported manner, a stable support state can be obtained. In the first moving member 2 </ b> A, a pair of support arms 23 a penetrates a slit 14 a formed between the side wall 12 of the guide member 1 and the cover 14. The pair of support arms 23a is provided with a pair of connecting members 24a, and these connecting members 24a pass through a pair of slits 13a formed in the inner wall 13 to form the first drive mechanism 3A. It is connected to. The second moving member 2B is coupled to the second drive mechanism 3B via a coupling member 24b extending from a support arm 23b that passes through the slit 14b.

  As shown in FIGS. 1 to 3, hawk-like hands 21 a and 21 b extending in the longitudinal direction of the guide member 1 are integrally formed on the main plate portions 20 a and 20 b, and these hands 21 a are formed. , 21b, a relatively large thin plate workpiece W such as a glass substrate for manufacturing a liquid crystal display panel is placed and held.

  The first driving mechanism 3A and the second driving mechanism 3B for moving the first moving member 2A and the second moving member 2B, respectively, along the moving stroke GL of the guide member 1 as described above are described below. It is configured.

  That is, the first drive mechanism 3A and the second drive mechanism 3B are accommodated in the guide member 1 as shown in FIGS. The guide member 1 has a structure partitioned into an upper housing 10a and a lower housing 10b. The first drive mechanism 3A is housed in the lower housing 10b, and the second drive mechanism 3B is housed in the upper housing 10a.

  As shown in FIG. 8, the first drive mechanism 3A includes a third transmission shaft 31, a fourth transmission shaft 32, and a pair of output belts 41a and 41b. As shown in FIG. 6, a belt 40 is wound around a pulley 251a provided at the upper end of the first transmission shaft 251 and a pulley 31b provided at the upper end of the third transmission shaft 31 in the upper housing 10a. ing. Thereby, the driving force from the first transmission shaft 251 is transmitted to the third transmission shaft 31. The third transmission shaft 31 is supported on the middle wall 13 via a bearing 37 so as to be rotatable about the vertical O1 on the movement stroke GL. The lower end of the third transmission shaft 31 is located in the lower housing 10b. The fourth transmission shaft 32 is supported on the middle wall 13 via a bearing 38 so as to be rotatable about a vertical axis O2 on the travel stroke GL. As described above, the third transmission shaft 31 and the fourth transmission shaft 32 are arranged side by side on the movement stroke GL, and project by substantially the same dimension into the lower housing 10b.

  Drive pulleys 31 a and 32 b and gears 31 c and 32 c are formed at the lower ends of the third transmission shaft 31 and the fourth transmission shaft 32. The gears 31c and 32c are meshed with each other, whereby the third transmission shaft 31 and the fourth transmission shaft 32 are rotated in synchronization with each other in the opposite directions by the driving force from the first transmission shaft 251. ing. Output belts 41a and 41b are wound around the drive pulleys 31a and 32a, respectively. The output belts 41a and 41b are also wound around a pair of pulleys 33a, 33b, 34a and 34b, respectively. The pair of pulleys 33a and 33b are arranged symmetrically along the side wall 12 with the moving process GL interposed therebetween. In addition, each of the pair of pulleys 33a and 33b is spaced apart from both longitudinal ends of the lower housing 10b. The pair of pulleys 34a and 24b are disposed away from the third transmission shaft 31 and the fourth transmission shaft 32 in the direction perpendicular to the moving step GL. The output belts 41a and 41b are wound around so as to include a pair of pulleys 33a and 33b inside. On the other hand, the pair of pulleys 34a and 34b is located outside the output belts 41a and 41b. The output belts 41a and 41b are drawn around the third transmission shaft 31 and the fourth transmission shaft 32 by being hung around these pulleys 34a and 34b, and are hung around the drive pulleys 31a and 32a. Yes. As a result, the sections of the output belts 41a and 41b that are hung between the pair of pulleys 33a and 33b are spaced apart from each other with the movement stroke GL interposed therebetween, while the sections 3Aa and 3Aa extending along the parallel line of the movement stroke GL. 3 Ab. When the driving force is transmitted to the third transmission shaft 31 and the fourth transmission shaft 32, the drive pulleys 31a and 32a are rotated in synchronization with opposite directions R1 and R2. At this time, in the sections 3Aa and 3Ab, the traveling directions of the output belts 41a and 41b are both the same direction as the direction N1. As described above, the sections 3Aa and 3Ab constitute a pair of reciprocating mechanisms in which the output belts 41a and 41b reciprocate synchronously in the same direction while being separated with the movement stroke GL interposed therebetween. A pair of connecting members 24a of the first moving member 2A are connected to portions of the output belts 41a and 41b in the sections 3Aa and 3Ab, whereby the first moving member 2A is moved by the first drive mechanism 3A. It is possible to move along the stroke GL.

  As shown in FIG. 7, the second drive mechanism 3B includes an output belt 42 and a pair of pulleys 35 and 36, and is housed in the upper housing 10a as shown in FIG. A pulley 252 a is provided at the upper end of the second transmission shaft 252. An output belt 42 shown in FIG. 7 is wound around the pulley 252a. The output belt 42 is also wound around a pair of pulleys 35 and 36 in the upper housing 10a. The pair of pulleys 35 are arranged apart from each other in the longitudinal direction of the upper housing 10a between the moving step GL and the second guide rail 4B. The pair of pulleys 36 are disposed so as to follow the second transmission shaft 252 and are separated from the second transmission shaft 252 in a direction perpendicular to the moving step GL. The output belt 42 is wound around so as to include a pair of pulleys 35 inside thereof. On the other hand, the pair of pulleys 36 are located outside the output belt 42. The output belt 2 is pulled around the second transmission shaft 252 by being wound around the pair of pulleys 36 and is wound around the pulley 252a of the second transmission shaft 252. As a result, a section of the output belt 42 that is hung between the pair of pulleys 35 on the outer side with respect to the travel stroke GL is a section that is parallel to this while being separated from the travel stroke GL. When the driving force is transmitted from the second transmission shaft 252 to the output belt 42, the output belt 42 is rotated and reciprocates along a parallel line of the movement stroke GL in a section between the pair of pulleys 35. It will be. A connecting member 24b of the second moving member 2B is connected to a portion of the output belt 42 between the pair of pulleys 42. Thus, the second moving member 2B is movable along the moving stroke GL by the second drive mechanism 2B.

  Next, the operation of the transfer robot A1 having the above configuration will be described.

  As described above, when the driving force of the motor M3 shown in FIG. 5 is transmitted to the first driving mechanism 3A via the first transmission shaft 251, the first moving member 2A shown in FIG. 8 moves along the moving stroke GL. On the other hand, when the driving force of the motor M4 shown in FIG. 5 is transmitted to the second driving mechanism 3B via the second transmission shaft 252, the second moving member 2B shown in FIG. 7 moves along the moving stroke GL. Moved. Further, the first moving member 2A and the second moving member 2B are prevented from interfering with each other. Accordingly, the movement of the first moving member 2A and the second moving member 2B can be performed independently. For example, as shown in FIG. 1, when the first moving member 2A is placed at the standby position above the fixed base 200 and the second moving member 2B is moved along the moving stroke GL and placed at the advanced position, the second moving member The workpiece W can be transferred by 2B. In this state, it is also possible to hold another workpiece W on the first moving member 2A. On the contrary, it is possible to transfer the workpiece W at the forward movement position with the first moving member 2A and to hold another workpiece W with the second moving member 2B at the standby position. As described above, according to the transfer robot A1, it is possible to hold the two workpieces W at the same time, and to transfer each of them independently, and to transfer the wafer in the semiconductor manufacturing process and the manufacturing process of the liquid crystal display panel. The glass substrate can be transported flexibly and manufacturing efficiency can be improved.

  Further, in the transfer robot A1, the linear movement mechanism B1 can turn and move up and down with respect to the fixed base 200. For example, in a manufacturing apparatus including a transport chamber and a plurality of process chambers radially connected around the transport chamber, the fixed base 200 of the transfer robot A1 is installed in the transport chamber. According to such a configuration, the linear movement mechanism B1 of the transfer robot A1 is appropriately turned to allow the hands 21a and 21b to enter any of the plurality of process chambers, and to deliver the workpiece W. It can be performed. Further, in each process chamber, the workpiece W can be appropriately raised and lowered according to the height of each process. Therefore, according to the transfer robot A1, it is suitable for space saving of the manufacturing apparatus and multi-functionalization and high efficiency of the manufacturing process.

  In the present embodiment, the first moving member 2A has a relatively large frame shape in order to avoid interference with the second moving member 2B. Unlike the present embodiment, when the first moving member 2A having such a configuration is supported on only one place and moved on the movement stroke GL, the first moving member 2A may be twisted unless the place on the movement stroke GL is supported. Moves. Such movement impedes accurate handling. Moreover, in order to suppress such a movement, there is a means for increasing the rigidity of the entire first moving member 2A. However, since the weight of the first moving member 2A increases, the moving speed of the first moving member is increased. And a decrease in stop accuracy become a problem. In the present embodiment, the first moving member 2A is supported by the pair of connecting members 24a at almost symmetrical positions with the moving stroke GL interposed therebetween, and therefore, the first moving member 2A is prevented from twisting and moving on the moving stroke GL. Can move smoothly. Therefore, it is possible to improve the moving speed and stopping accuracy while avoiding an increase in the weight of the entire first moving member 2A.

  In this embodiment, in order to extend the moving distance of the first moving member 2A and the second moving member 2B, the first guide rail 4A and the second guide rail of the first driving mechanism 2A and the second driving mechanism 2B are used. 4B and the output belts 41a, 41b, 42 can be easily accommodated by lengthening them. Even if such extension is performed, since the first moving member 2A and the second moving member 2B are supported by the first guide rail 4A and the second guide rail 4B, their rigidity can be increased. It is possible to avoid a decrease in moving speed and operation accuracy.

  The first drive mechanism 3A includes a pair of output belts 41a and 41b that are synchronously rotated in opposite directions, thereby synchronizing the first moving member 2A along the parallel lines of the movement stroke GL in the sections 3Aa and 3Ab. It can be driven. Therefore, there is no risk of relative displacement occurring between the pair of connecting members 24a of the first moving member 2A when the first moving member 2A is moved, which is suitable for smoothly moving the first moving member 2A. . In addition, since the first moving member 2A is driven through a pair of connecting members 24a that are spaced apart from each other with the moving step GL interposed therebetween, the first moving member 2A can be smoothly moved without increasing the rigidity in the width direction of the first moving member 2A. Movement is possible. Therefore, it is suitable for reducing the weight of the first moving member 2A. In addition, by using the pair of drive pulleys 31a and 32a, it is possible to easily achieve such synchronized driving and to avoid the first drive mechanism 3A from becoming complicated.

  Further, in the present embodiment, the first drive mechanism 2A and the second drive mechanism 2B are relatively compact in the guide member 1 while allowing the first moving member 2A and the second moving member 2B to be driven independently of each other. It is stored in. In particular, by storing the first drive mechanism 2A and the second drive mechanism 2B independently in the lower housing 10b and the upper housing 10a, it can be prevented from being unduly bulky in plan view. Further, the first drive mechanism 3A is configured to be connected to the first moving member 2A in the sections 2Aa and 2Ab located on both outer sides of the moving step GL in the pair of output belts 41a and 41b. There is no significant protrusion in the width direction from the first moving member 2A, and space saving can be achieved. In addition to these, since the upper ends of both the first transmission shaft 251 and the second transmission shaft 252 are in the upper housing 10a, the first transmission shaft 251 is removed by removing the cover 14 during maintenance of the transfer robot A1, for example. In addition, the belt 40 and the output belt 42 wound around the second transmission shaft 252 can be easily adjusted.

  Since the first drive mechanism 3A and the second drive mechanism 3B are covered with the cover 14, for example, even if the workpiece W is at a relatively high temperature, it does not receive the radiant heat directly, and thermal expansion or the like hardly occurs. Therefore, even if it is a case where it is used for the manufacturing process in which the workpiece | work W becomes high temperature, the conveyance robot A1 of this embodiment can implement | achieve high operation accuracy.

  FIG. 9 shows a second embodiment of the linear movement mechanism and the transfer robot according to the present invention. In the illustrated linear movement mechanism B2 and the transfer robot A2, the configuration of the first drive mechanism 3A is different from that of the first embodiment of the present invention described above, and other configurations are the same as those of the first embodiment. In FIG. 9 and subsequent drawings, the same or similar elements as those in the first embodiment are denoted by the same reference numerals as those in the first embodiment, and description thereof will be omitted as appropriate.

  FIG. 9 is a cross-sectional view of the transfer robot A2 in a horizontal plane including the lower housing 10b. The first drive mechanism 3 </ b> A of the present embodiment includes only the third transmission shaft 31. A belt 40 is wound around a pulley (not shown) provided at the upper end of the third transmission shaft together with the first transmission shaft 251 in an upper housing (not shown). In the lower housing 10b, the third transmission shaft 31 is provided with two drive pulleys 31a so as to overlap in the vertical direction. Output belts 41a and 41b are wound around these drive pulleys 31a, respectively. Thereby, in this embodiment, output belt 41a, 41b is rotated synchronizing with the same direction. Of the output belts 41a and 41b, in the sections 3Aa and 3Ab that travel in the direction N1 when the third transmission shaft 31 is rotated in the direction R1, a pair of connecting members 24a are connected.

  Even in such an embodiment, the first moving member 2A can be smoothly moved via the pair of connecting members 24a. Further, since the two output belts 41a and 41b are driven only by the third transmission shaft 31, the first drive mechanism 3A is advantageous for simplification.

  FIG. 10 shows a third embodiment of the linear movement mechanism and the transfer robot according to the present invention. In the illustrated linear movement mechanism B3 and transfer robot A3, the cooperation between the first transmission shaft 251 and the second transmission shaft 252 and the first drive mechanism 3A and the second drive mechanism 3B is the same as in the first embodiment and the first embodiment described above. The configuration is different from that of the second embodiment.

  Specifically, first, the second transmission shaft 252 is inserted into the first transmission shaft 251, and the positional relationship between the first transmission shaft 251 and the second transmission shaft 252 with the above-described embodiment. Is the opposite. The upper end of the second transmission shaft 252 protrudes from the upper housing 10a, while the upper end of the first transmission shaft 251 is located in the lower housing 10b. In the upper housing 10a, the driving force from the second transmission shaft 252 is transmitted to the second driving mechanism 3B, while in the lower housing 10b, the driving force from the first transmission shaft 251 is transmitted to the driving mechanism 3A. Has been. The specific configuration of the first drive mechanism 3A and the second drive mechanism 3B may be the same as that of the first embodiment described above, for example.

  According to the present embodiment, as shown in FIG. 6 in the first embodiment, it is not necessary to transmit driving force from the upper housing 10a to the lower housing 10b using the third transmission shaft 31. Therefore, the configuration of the linear movement mechanism B1 can be simplified.

  The linear movement mechanism and the transfer robot according to the present invention are not limited to the above-described embodiments.

  In the first embodiment and the like, the output belts 41a and 41b of the first drive mechanism 3A and the output belt 42 of the second drive mechanism 3B are so-called flat belts, but the present invention is not limited to this. For example, a steel belt or a wire may be used.

  The transfer robot is not limited to the one provided with the first moving member 2A and the second moving member 2B. For example, a so-called one-hand robot provided only with the first moving member 2A and the first drive mechanism 3A of the first embodiment. It is good. Also in this case, it is possible to appropriately cope with the lengthening of the workpiece and the extension of the transport distance.

  Although the above embodiment has been described on the assumption that it is used in a vacuum atmosphere, of course, the transfer robot according to the present invention can be configured to be used under atmospheric pressure.

1 is an overall perspective view of a transfer robot according to a first embodiment of the present invention. It is a top view of the transfer robot shown in FIG. It is a side view of the conveyance robot shown in FIG. It is a front view of the transfer robot shown in FIG. It is sectional drawing which follows the VV line of FIG. It is sectional drawing in alignment with the VI-VI line of FIG. 2, and its partial enlarged view. It is sectional drawing which follows the VII-VII line of FIG. It is sectional drawing which follows the VIII-VIII line of FIG. It is sectional drawing of the conveyance robot which concerns on the 2nd Embodiment of this invention. It is sectional drawing of the conveyance robot which concerns on the 3rd Embodiment of this invention. It is explanatory drawing which shows an example of the conventional conveyance robot.

Explanation of symbols

A1, A2, A3 Transfer robot B1, B2, B3 Linear movement mechanism GL Movement stroke Os Swiveling axis O1, O2 Vertical axis W Work 1 Guide member 11 Bottom wall 12 Side wall 13 Middle wall 13a Slit 14 Cover 14a, 14b Slit 2A 1st Moving member 2B Second moving member 20a, 20b Main plate portion 21a, 21b Hand 22a, 22b Slider 23a, 23b Support arm 24a, 24b Connecting member 31 Third transmission shaft 31a Drive pulley 31b Pulley 31c Gear 32 Fourth transmission shaft 32a Drive pulley 32c Gear 40 Belts 41a and 41b Output belt 42 Output belt 251 First transmission shaft 252 Second transmission shaft

Claims (13)

A linear movement mechanism comprising a guide member, a movable member movable along a horizontal linear movement stroke set on the guide member, and a drive mechanism for driving the movable member,
The drive mechanism includes a pair of reciprocating mechanisms that are arranged across the travel stroke and are driven synchronously;
The linear moving mechanism, wherein the moving member is connected to the pair of reciprocating mechanisms in a pair of connecting members that are separated from each other with the moving stroke in between. The drive mechanism includes a pair of output belts that are arranged across the travel stroke and are driven synchronously with each other,
Of the pair of output belts, the pair of reciprocating mechanisms are configured by a pair of reciprocating sections that are separated from each other across the moving stroke and reciprocate along a parallel line of the moving stroke. The linear movement mechanism according to claim 1. The drive mechanism includes a pair of drive pulleys that rotate synchronously in opposite directions,
The pair of output belts are respectively rotated around one of the pair of drive pulleys, thereby being synchronously rotated in opposite directions, and
The section of the pair of output belts located on both outer sides with respect to the travel stroke and extending along a parallel line of the travel stroke is the pair of reciprocating motion sections. The linear movement mechanism as described. The pair of drive pulleys are arranged side by side on the travel stroke,
Each of the drive pulleys is connected to gears arranged on the same axis, and the gears mesh with each other so that the pair of drive pulleys are synchronously rotated in opposite directions. The linear movement mechanism according to claim 3. The moving member includes a first moving member and a second moving member supported by the guide member so as to be movable without interfering with each other along the moving stroke.
The drive mechanism includes a first drive mechanism and a second drive mechanism provided on the guide member so as to drive the first moving member and the second moving member, respectively, and the first drive mechanism. The linear movement mechanism according to claim 4, comprising the pair of output belts and the pair of drive pulleys.   The guide member movably supports the first moving member, and a pair of first guide rails positioned with the moving stroke in between, and the second moving member movably supported, and the pair of first The linear movement mechanism according to claim 5, further comprising a pair of second guide rails positioned on the inner side of the one guide rail with the movement stroke in between.   The first moving member and the second moving member each have a main plate portion, while the main plate portion of the first moving member is positioned higher than the main plate portion of the second moving member, The first moving member is supported by the pair of first guide rails via a pair of support arms extending around both sides of the main plate portion of the second moving member from both sides of the main plate portion. The linear movement mechanism according to claim 6. The guide member has a structure having an upper housing and a lower housing that are partitioned from each other.
The linear movement mechanism according to claim 7, wherein the first drive mechanism is housed in the lower housing, while the second drive mechanism is housed in the upper housing.   9. The linear movement mechanism according to claim 1, wherein the guide member is supported with respect to a fixed base so that the guide member can turn about a vertical turning axis on the moving stroke, and the movement. A conveyance robot, wherein the member is provided with a hand on which a plate-like workpiece can be placed.   The transfer robot according to claim 9, wherein the linear movement mechanism is also supported with respect to the fixed base so as to move up and down along the pivot axis. The linear movement mechanism according to claim 8 is supported with respect to the fixed base so that the guide member can turn around a vertical turning shaft on the moving stroke, and the first moving member and the The second moving member is provided with a hand on which a plate-like workpiece can be placed,
A first drive source and a second drive source provided in the fixed base; and a driving force from the first drive source and the second drive source for transmitting to the first drive mechanism and the second drive mechanism. A first transmission shaft and a second transmission shaft.
One of the first transmission shaft and the second transmission shaft is inserted into the other so that each of the first transmission shaft and the second transmission shaft has the pivot axis as a central axis. The first transmission shaft is inserted through the second transmission shaft,
A third transmission shaft, part of which is located on each of the upper housing and the lower housing,
A portion of the third transmission shaft located in the upper housing is provided with a pulley for transmitting a driving force from the first transmission shaft via a belt, and of the third transmission shaft. One of the pair of drive pulleys of the first drive mechanism is provided in a portion located in the lower housing,
The transport robot according to claim 11, wherein a belt constituting the second drive mechanism is wound around a portion of the second transmission shaft located in the upper housing.   The transfer robot according to claim 12, wherein the linear movement mechanism is also supported so as to be able to move up and down along the pivot axis with respect to the fixed base.

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