JP2006116403A - Retaining device for article to be washed and washing method for article to be washed using the device - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To effectively suppress remaining of a solvent to an article to be washed after washing and to enhance cleanliness by washing. <P>SOLUTION: The retaining device 1 for the article to be washed for retaining the article to be washed and immersed in a washing tank is provided with a tray 10 arranged with the article to be washed; a surrounding member 11 standingly provided on an article-to-be-washed arrangement surface of the tray and surrounding the periphery of the article to be washed; and a removal restriction member 20 for restricting that the article to be washed is removed by separation from the tray. An opening for making a solvent used at washing flowing out/in relatively to the article to be washed is formed on the periphery of the article 5 to be washed surrounded by the surrounding member 11. <P>COPYRIGHT: (C)2006,JPO&NCIPI

Description

  The present invention relates to a holder for holding a cleaning object when cleaning the cleaning object such as an electronic component or a fine part, and particularly relates to a holder used when the cleaning object is immersed in a cleaning solvent for cleaning. . The present invention also relates to a method for cleaning a cleaning object using such a holder.

  Electronic parts composed of semiconductor chips and small precision parts are required to have high cleanliness depending on their application, and must be cleaned after being manufactured and before being shipped or incorporated into equipment. Is called. In particular, a magnetic head slider that is required to have a low flying height with respect to a magnetic disk is a component that requires high cleanliness and high positioning accuracy because it is incorporated in a magnetic disk device. Reliable cleaning is required.

  An example of a method for cleaning such parts is disclosed in Patent Document 1. In this patent document 1, the magnetic head slider is immersed in a cleaning tank while being held by a cage, and ultrasonic cleaning is performed in such a state. The retainer includes a member having a mesh that forms a lattice-like through hole that houses the magnetic head slider and covers the lower end opening thereof, and a member that has a mesh that covers the upper end opening of the through hole. It is configured. Thus, the magnetic head slider is housed in the through hole, and is surrounded by the wall surface of the through hole and the pair of nets covering both end openings of the through hole, thereby preventing the magnetic head slider from jumping to the outside. Furthermore, the opening size and thickness of the through hole are set to 1.1 to 2.5 times the vertical, horizontal size and thickness of the magnetic head slider, and the magnetic head slider can freely move in the through hole. Thus, ultrasonic cleaning is effectively performed in the cleaning tank.

JP-A-6-103511

  However, in the cleaning of parts using the cage in Patent Document 1, the following inconvenience occurs. First, since the cleaning object is surrounded by the wall surface that forms the through-hole, the solvent of the cleaning liquid is difficult to be removed from the cleaning object at the end of cleaning, and it is likely that spots are likely to remain, particularly at the four corners (corners). Problems arise. In addition, since both surfaces of the cleaning object are held by the net, there is a problem that ESD destruction is likely to occur. In addition, since the holding is not stable due to the holding by the net, the cleaning object will collide with the wall surface by moving during cleaning by ultrasonic vibration, etc., and the impact may cause the cleaning object to crack or chip and break. Is likely to occur.

  For this reason, the present invention improves the disadvantages of the above-described conventional examples, and in particular, a cleaning object holder and a cleaning method for effectively suppressing the residual solvent in the cleaning object after cleaning and improving the cleanliness by the cleaning. , Its purpose is to provide.

Then, the washing | cleaning material holder which is one form of this invention,
A cleaning object holder that holds at least one cleaning object and is immersed in a cleaning tank,
A tray on which the cleaning object is disposed, a surrounding member which is provided on the cleaning object disposition surface of the tray and encloses the periphery of the cleaning object, and a separation regulating member which regulates the separation of the cleaning object from being separated from the tray. ,
The present invention is characterized in that an opening through which a solvent used during cleaning flows in and out of the cleaning object is formed around the cleaning object surrounded by the enclosing member.

  According to the above configuration, the cleaning object is accommodated in the area surrounded by the cleaning object arrangement surface of the tray and the enclosure member standing on the cleaning object arrangement surface, and the separation regulating member is disposed above the cleaning object. The object is held so as not to leave the tray. At this time, since one surface of the cleaning object is supported by the tray, it can be stably held by the holding tool, and the cleaning can be stabilized. Then, by forming an opening around the washed object that is held, the solvent can flow in and out in the horizontal direction (XY direction) with respect to the washing object arrangement surface of the tray. Since the circulation of the solvent with respect to the cleaning object surrounded by is promoted, the cleaning is performed efficiently, and the solvent can be quickly discharged from the tray even when it is taken out from the cleaning tank after the cleaning. Accordingly, it is possible to suppress the residue of the solvent in the cleaned product after cleaning, to suppress the generation of spots and the like, and to improve the cleanliness.

  In the above configuration, it is preferable that the surrounding member is formed by a plurality of protrusions. Furthermore, it is desirable to provide at least four protrusions as a surrounding member for one cleaning object. At this time, it is more desirable that the protrusion is a cylinder.

  Accordingly, since the plurality of protrusions surround the periphery of the cleaning object, the cleaning object can be held in the same manner as described above, and at the same time, an opening is widely formed by the gap between the plurality of protrusions. The outflow of the solvent can be promoted, and the residue of the solvent in the washed product can be suppressed. Accordingly, the holder can be formed with a simple configuration, and the opening can be formed wide, and the outflow of the solvent after cleaning is further promoted. Furthermore, by providing four or more protrusions as the enclosure member, it becomes possible to appropriately hold the cleaning object, and since the surrounding opening is formed wider, it is possible to further suppress residual solvent. it can. Further, by making the enclosure member a cylindrical shape, the residual solvent is further suppressed, and even if the cleaning object collides during cleaning, the impact on the cleaning object is reduced, and damage to the cleaning object can be suppressed. it can.

  Moreover, the through-hole which penetrates the said tray was provided in the washing | cleaning material arrangement | positioning surface of a tray, It is characterized by the above-mentioned. As a result, since the solvent flows out from the through-hole on the back side of the tray at the place where the cleaning object is disposed, the amount of the solvent flowing out after the cleaning can be increased, and the residual solvent can be further suppressed. it can.

  Further, the detachment regulating member is disposed in contact with the cleaning object. In this way, by bringing the cleaning member into contact with the cleaning object, it is possible to suppress the movement of the cleaning object within the area surrounded by the enclosure member during the cleaning, or it is possible to suppress the movement speed, and the enclosure member is cleaned. Damage to the cleaning object due to the collision of the object can be suppressed.

  Further, when the cleaning object is a magnetic head slider having a recording / reproducing element, the separation restricting member is disposed at a position not in direct contact with the recording / reproducing element of the magnetic head slider. As a result, it is possible to prevent the separation regulating member from touching the recording / reproducing element that performs data recording / reproducing, so that damage to the recording / reproducing element at the time of cleaning can be suppressed, and the quality of the magnetic head slider that is the washed object can be maintained. it can.

  Further, the separation regulating member is a linear member. As a result, the cleaning object is fastened by a linear member so as not to be detached from the tray, so the side opposite to the tray side of the cleaning object is almost open, and the outflow and inflow of the solvent is promoted, and further cleaning efficiency is improved. Improvement and residual solvent can be suppressed.

  Further, the present invention is characterized in that at least two or more linear members are provided so as to intersect with one cleaning object. Moreover, you may provide at least a pair of substantially parallel linear member along a predetermined direction with respect to one wash thing. And you may form the said linear member in a grid | lattice form.

  As a result, the cleaning object is covered with a plurality of members so that the holding is stabilized. In particular, by holding the linear members at the intersecting points, the upper part of the cleaning object can be pressed from a plurality of directions, and can be held more stably. Furthermore, it becomes possible to hold | maintain simultaneously in multiple places by setting it as a grid | lattice form. In addition, by installing a plurality of linear members that are substantially parallel along the brush cleaning direction when cleaning with the brush, the linear members are prevented from obstructing the cleaning, and the holding force is maintained. However, stable cleaning is possible.

  Further, when a plurality of cleaning items of X rows × Y columns (both X and Y are integers) are arranged on the tray, at least one linear member is provided for each row and each column. It is characterized by comprising a linear member mounting frame that can be mounted all at once on the entire surface of the tray to be cleaned. At this time, a holding member for holding the tray and the linear member mounting frame is provided. Further, at least one pair of holding members is provided, and the pair of holding members are arranged at positions symmetrical to each other with respect to the center of the cleaning object arrangement surface of the tray.

  As a result, the linear members that restrict the cleaning material from being detached from the tray are arranged so as to correspond to the cleaning materials arranged on the tray and mounted on the frame body, and the frame body is collectively placed on the tray. Since it can be mounted, it is possible to easily hold a plurality of washing objects. At this time, the mounting frame body and the tray can be mounted by being clamped by the holding member, and it becomes easier to hold a plurality of cleaning objects. Furthermore, since the holding members for stopping the mounting frame are arranged symmetrically with respect to the center of the tray, they can be pressed with an equal pressure.

  Furthermore, the linear member which is the above-mentioned detachment restricting member is processed with tetrafluoroethylene resin. Thereby, the detachment of the solvent from the linear member is improved, the solvent is prevented from remaining from the washed product after the cleaning, and the occurrence of a stain or the like can be further suppressed.

Further, the present invention also provides a method for cleaning a washing item,
A cleaning object holding step for holding the cleaning object using the cleaning object holder described above, a step of immersing the held cleaning object in a cleaning solvent in the cleaning tank, a cleaning process for cleaning the cleaning object in the cleaning solvent, And a step of removing the cleaning solvent from the cleaning object. The cleaning step is characterized by ultrasonic cleaning or brush cleaning.

  According to the cleaning method for cleaning objects of the above configuration, the cleaning object is held by the above-described cleaning object holder, so that stable cleaning is performed in the cleaning process such as ultrasonic cleaning and brush cleaning, and the cleaning object In addition, it is possible to suppress the occurrence of a stain or the like by suppressing breakage and further suppressing the remaining of the solvent in the cleaning object in the step of removing the cleaning solvent. Therefore, similarly to the above, the object of the present invention can be achieved that cleaning with high cleanliness can be performed.

  Since the present invention is configured and functions as described above, according to this, since the cleaning object is arranged on the tray, the holding stability is increased and the circulation of the solvent from the periphery of the cleaning object is promoted. Cleaning is performed efficiently, and also when the solvent is taken out from the cleaning tank after cleaning, the solvent can be quickly discharged from the tray, and it is possible to suppress the residue of the solvent on the cleaning object, thereby suppressing the occurrence of spots and the like. It has an unprecedented superior effect of being able to.

  In particular, the present invention is characterized by a tray in which the cleaning object is disposed and a mesh (detachment restricting member) that holds the cleaning object on the tray in order to suppress residual solvent after cleaning. Hereinafter, a specific configuration and operation will be described with reference to examples. In the embodiment, the cleaning object is described as the magnetic head slider 5, but the present invention is not limited to this, and the cleaning object such as all parts can be held and cleaned.

  A first embodiment of the present invention will be described with reference to FIGS. FIG. 1 is a diagram showing an outline of a cleaning apparatus for cleaning a cleaning object. 2 to 6 are diagrams showing the configuration of the cleaning object holder.

[Constitution]
<Washing device>
First, with reference to FIG. 1, the whole structure of the washing | cleaning apparatus which wash | cleans a cleaning material is demonstrated. The cleaning apparatus is filled with a solvent 102 so as to form a depth enough to immerse the cleaning object holder 1 to be described later in the cleaning tank 100, and the inner bottom surface of the cleaning tank 100 is superficial in the solvent 102. A sound wave oscillator 101 is provided. The ultrasonic vibrator 101 generates ultrasonic vibrations in the solvent 102. By immersing the cleaning object holder 1 in which the cleaning object is held in the solvent 102 to generate ultrasonic vibrations, Ultrasonic cleaning of the cleaning object can be realized. The solvent 102 is made of, for example, pure water (DI), isopropyl alcohol (IPA), gray coal phthalate (wax), or neutral detergent (about 0.5%).

<Washing object holder>
Next, the cleaning object holder 1 will be described in detail. The cleaning object holder 1 is a holder that holds the magnetic head slider 5 that is a cleaning object and is immersed in the solvent 102 of the cleaning tank 100, and includes a tray 10 on which the magnetic head slider 5 is disposed, and the magnetic head. The slider 5 is configured by a mesh 20 (detachment restricting member) that restricts the slider 5 from being separated from the tray 10 and separated. That is, as shown in FIG. 5 to be described later, a plurality of magnetic head sliders 5 are arranged on the tray 10 and sandwiched between the tray 10 and the mesh 20 to hold the magnetic head slider 5 as a cleaning object. It is. Hereinafter, the configuration will be described in more detail.

<Tray>
The structure of the tray 10 is shown in FIGS. First, as shown in FIG. 2, the tray 10 is composed of a single plate-like member having a predetermined thickness, and has a substantially rectangular shape. Moreover, the magnitude | size is substantially the same magnitude | size as the inner side space part of the frame 21 of the mesh 20 demonstrated later. A large number of protrusions 11 and through holes 12 and 13 are formed on one surface of the tray 10 to constitute a cleaning object disposition surface on which the magnetic head slider 5 is disposed. The configuration of the cleaning object arrangement surface will be described with reference to FIG.

  FIG. 3A is an enlarged view of a region R in FIG. 2 which is a part of the cleaning object arrangement surface of the tray 10. Moreover, FIG.3 (b) is AA sectional drawing in Fig.3 (a). Such regions R are continuously formed on the tray 10. For example, the region R is formed in a matrix of X rows × Y columns (X and Y are integers) on the tray 10, and one magnetic head slider 5 is disposed in each region R as will be described later. It is possible to arrange magnetic head sliders 5 which are X × Y cleaning objects.

  As shown in FIG. 3A, in the region R of the tray 10, first, the magnetic head slider 5 that is the cleaning object is disposed at the center, but the protrusion protruding from the cleaning object disposition surface around it. 11 (enclosure member) is formed. Each of the protrusions 11 has a substantially cylindrical shape, and is formed so as to be arranged one by one near the center of the four sides of the slider 5 having a substantially rectangular shape. Accordingly, the four protrusions 11 have a role of restricting the magnetic head slider 5 from moving in the direction along the cleaning object arrangement surface of the tray 10. That is, the magnetic head slider 5 is disposed so as to surround it.

  In this way, if there are at least four protrusions 11 arranged so as to surround the cleaning object in accordance with the shape of the cleaning object, it plays a role of restricting movement not only in the magnetic head slider but also in other shapes. In addition, the shape of the protrusion 11 is not particularly limited to a cylinder, and other prisms may be used. However, a cylinder is most preferable in consideration of easy flow of the solvent 102 and reduction of shock at the time of collision of the cleaning object. Further, the smaller the number of protrusions 11 in the entire tray 10, the better the flow of the solvent 102 as will be described later. Therefore, when washing a plurality of washing items at the same time, a portion that can be shared for holding adjacent washing items The protrusion standing positions are set so as to reduce the number of the protrusions 11 shared.

  Further, as the detailed arrangement position of the protrusion 11, for example, when the magnetic head slider 5 is ideally arranged at the center of each protrusion 11 as shown in FIG. The distance (Xc, Yc) is about 0.05 mm. As shown in FIG. 3B, the height 12a of the protrusion 11 is about 0.4 mm, and the height 5a (thickness) of the magnetic head slider 5 is about 0.3 mm. However, such dimensions are merely examples, and are not limited to the above dimensions.

  Further, since the magnetic head slider 5 is disposed on the tray 10 so as to be surrounded by the protrusions 11, the spaces between the protrusions 11 are opened. An opening for allowing the solvent to flow in and out of the slider 5 is formed. That is, since the side surface of the magnetic head slider 5 is exposed to the solvent 102 between the protrusions 11, the solvent flows out in the horizontal direction (XY direction) with respect to the cleaning object arrangement surface of the tray. Therefore, the circulation of the solvent 102 with respect to the magnetic head slider 5 is promoted. Furthermore, since the side surface of the slider 5 is exposed when taken out from the cleaning tank 100, the solvent 102 can be quickly discharged from the tray 10.

  Further, the tray 10 is formed with through holes 12 and 13 penetrating from the cleaning object arrangement surface to the back surface. More specifically, five first solvent removal holes 12 are formed as relatively small through holes at the arrangement position of the magnetic head slider 5, which is an area surrounded by the protrusions 11. Four second solvent removal holes 13 are formed as relatively large through holes. These through holes 12 and 13 serve to circulate the solvent 102, and in particular, the first solvent removal hole 12 located on the back surface of the magnetic head slider 5 is quickly provided from the place where the cleaning object is placed on the tray 10 after cleaning. It acts to discharge the solvent 12. In addition, the larger the diameter of the solvent removal hole, the greater the effect of discharging the solvent.However, if the diameter is too large, the washed object cannot be stably held. It is desirable to decide.

  The tray 10 is made of a mixed resin of Peak resin (polyarylene ether ketone resin) and carbon for coping with ESD problems. However, such a material is an example, and is not limited thereto. For example, a thermoplastic plastic having ESD resistance and solvent resistance may be used.

<Mesh>
Next, the mesh 20 (linear member mounting frame) will be described with reference to FIG. The mesh 20 is configured by a frame body 21 having a hollow inside that is slightly larger than the tray 10 and a grid-like wire 22 (a linear member, a separation regulating member) stretched around a space portion of the frame body 21. Is done.

  Specifically, a large number of through holes through which the wires 22 are inserted are formed around the frame body 21. And by forming the wire 22 through the through-hole formed in the opposing frame, it is formed in a vertical and horizontal mesh shape (lattice shape). At this time, the interval between the wires 22 is set corresponding to the magnetic head slider 5 arranged on the tray 10 described above, and each intersection of the wires is positioned above one magnetic head slider 5. It has become. That is, at least one wire 22 is provided for each row and each column corresponding to the X row × Y row matrix arranged in the region R of the tray 10. This state will be described later with reference to FIG.

  The wire 22 is formed of, for example, carbon-filled nylon having a diameter of 0.1 mm, and in particular, the surface thereof is subjected to tetrafluoroethylene resin processing (Teflon (registered trademark) processing). Thereby, the separation of the solvent 102 from the wire 22 after being pulled up from the solvent 102 is improved, and it is possible to prevent the solvent from remaining from the washed object after the cleaning. In addition, the material of the said wire 22 is an example, Comprising: It is not limited to this, For example, what has ESD resistance and solvent resistance should just be. Furthermore, the member (detachment restricting member) that presses the cleaning object that is the magnetic head slider 5 is not limited to a wire-shaped member.

[Operation]
The tray 10 and the mesh 20 are configured as described above, and the operation when the magnetic head slider 5 is assembled to hold the magnetic head slider 5, the holding state, and the cleaning operation, that is, the cleaning method are shown in FIGS. This will be described with reference to FIG.

  First, as the washing object holding step, the magnetic head slider 5 is arranged so as to be accommodated in each arrangement place surrounded by each protrusion 11 on the washing object arrangement surface of the tray 10 and the mesh 20 is covered from above. At this time, it arrange | positions so that the tray 10 may be settled inside the frame 21 of the mesh 20, the several clip 30 (clamping member) is mounted | worn around, and the tray 10 and the mesh 20 are clamped and integrated. Note that the clip 30 is a substantially U-shaped holding member having a spring property, and in particular, in the example shown in FIG. 5, the portion located on the side opposite to the illustrated side is the portion of the tray 10. It is formed longer than the portion on the illustrated surface side so as to contact a part (see the dotted line portion).

  The state in which the magnetic head slider 5 is held in this way will be described with reference to the enlarged view of FIG. FIG. 6A shows a region indicated by reference numeral R in FIG. 5, and shows a state in which the magnetic head slider 5 is held in the region R shown in FIG. And the BB sectional drawing is shown in Drawing 6 (b). First, as shown in FIG. 6A, the magnetic head slider 5 is supported on one surface by the cleaning object arrangement surface of the tray 10, and the side surface (surrounding) is surrounded by the protrusion 11. Further, the other surface (the surface shown in the figure) is located above the wires 20a and 22b of the mesh 20 so as to be restricted from jumping out and separating from the cleaning object disposition surface. Yes.

  At this time, since the wires 22a and 22b are supported by the protrusion 11, a gap Zc is formed between the magnetic head slider 5 and the wires 22a and 22b due to a difference in height between the protrusion 11 and the magnetic head slider 5. Is about 0.1 mm. However, the gaps Zc can be set to about 0.05 mm when the wires 22a and 22b sag and move downward, or when the horizontal wires 22a are pressed downward by the vertical wires 22b. Further, in some cases, the wire 22a may come into contact with the magnetic head slider 5 due to the slack or the pressing of other intersecting wires, which causes the magnetic head slider 5 to be pressed against the tray 10. In addition, the holding of the slider 5 is further stabilized. In particular, in the cleaning process by ultrasonic cleaning as will be described later, even if the magnetic head slider 5 and the wire 22a are in contact with each other, the gap Zc is generated by vibration, so that no cleaning leakage occurs.

  Next, the operation during cleaning will be described. As shown in FIGS. 5 and 6, the cleaning object holder 1 is immersed in the solvent 102 of the cleaning tank 100 while holding the magnetic head slider 5 as the cleaning object. At this time, as shown in FIG. 1, the magnetic head slider 5 is surrounded by the tray 10, the protrusion 11, and the mesh 20, as described above, although its posture is not determined in the solvent 102. 1 is held stably, and in particular, since it is supported by the cleaning object arrangement surface of the tray 10, the slider 5 itself moves because it is supported more stably than the conventional example. It is suppressed. Further, when the wire 22 is in contact with the magnetic head slider 5 and is held by the tray 10, it is possible to suppress the movement of the slider 5 on the tray 10 or the movement speed of the movement. The slider 5 can be prevented from colliding with the surrounding projection 11 or the collision speed can be reduced, and damage such as cracking of the magnetic head slider 5 due to the impact can be suppressed.

  Thereafter, in the cleaning process, ultrasonic cleaning of the magnetic head slider 5 is performed by generating ultrasonic vibrations in the solvent by the ultrasonic vibrator 101 installed on the bottom surface of the cleaning tank 100. At this time, the wire 22 is only present on one surface of the magnetic head slider 5 and almost the entire surface is exposed to the outside, and four protrusions 11 are present on the side surface of the magnetic head slider 5. The first and second solvent escape holes 12 and 13 are also formed on the surface of the magnetic head slider 5 on the tray 10 side except for the vicinity thereof. Since the solvent 102 circulates efficiently on the outer surface of 5, cleaning by ultrasonic vibration is performed efficiently.

  When the cleaning is completed and the cleaning object holder 1 is pulled up from the cleaning tank 100, the mesh 20 side and the side surface side of the magnetic head slider 5 are substantially open as described above. 20 is processed with Teflon (registered trademark), and the solvent through holes 12 and 13 are also formed on the tray 10 side, so that the solvent 102 can be quickly discharged from the tray 10 and magnetically Residue of the solvent 102 on the head slider 5 can be suppressed, and generation of spots and the like can be suppressed.

  Here, in the above description, the columnar protrusion 11 is used as a member (enclosure member) surrounding the magnetic head slider 5 that is the cleaning object, but the shape is not limited thereto. For example, the member which has a wall surface standingly standing on the washing | cleaning material arrangement | positioning surface of the tray 10 may be sufficient. In such a case, the intermittent portion of the erected member acts as an opening for allowing the solvent to escape when the member is lifted from the cleaning tank after cleaning, and thus has the same effect as described above. In addition, the enclosure member is not limited to the shape described above, and is formed by a continuous wall surface that completely surrounds the periphery of the cleaning object, and a through hole serving as an opening is formed on the wall surface. It may be configured.

  Next, a second embodiment of the present invention will be described with reference to FIGS. FIG. 7 to FIG. 8 are views showing a state when the magnetic head slider 5 as the cleaning object is held by the cleaning object holder 1, and is an enlarged view showing a region R portion shown in FIG. . FIG. 9 is a schematic view showing a configuration of a cleaning device by brush cleaning. In addition, in a present Example, arrangement | positioning of the wire 22 of the mesh 20 differs from the case of the said Example 1, respectively.

  First, an example shown in FIG. The wire 22 that holds the upper side of the cleaning object (the side opposite to the tray 10 side) does not necessarily have to pass through the center of the cleaning object placed on the tray 10 in the vertical or horizontal direction. It may be shifted. That is, the mesh 20 is configured in advance so that the wires 22a and 22b are positioned as shown in this figure (the mesh 20 is not shown). Specifically, in the case of this figure, the vertical wires 22 b are arranged so as not to pass through the center of the short side of the magnetic head slider 5. This is because a recording / reproducing element 51 for recording / reproducing data is provided at the center of one end of the magnetic head slider 5 so that the wire 22b is not directly in contact with this part so as to avoid the element 51. is doing. By configuring the mesh 20 in this manner, damage to the recording / reproducing element 51 during cleaning can be suppressed, and the quality of the magnetic head slider 5 can be maintained.

  Here, since the lateral width of the recording / reproducing element 51 is about 0.03 mm, considering the gap Xc (about 0.05 mm) between the magnetic head slider 5 and the projection 11 described above, it is about 0.08 mm or more. It is better to dispose from the center in the horizontal direction.

  Even when the longitudinal wire 22b is positioned at the center of the short side of the magnetic head slider 5 as shown in FIG. 6A, it is applied to the element 51 side as shown in FIG. 6A. The wires 22b may be crossed so as to be on top of other wires 22a that cross each other. Thereby, the gap Zc that can be formed between the element 51 and the wire 22b can be increased, and the rate of contact of the wire 22b can be reduced, so that the occurrence of damage to the element 51 can be suppressed.

  Further, as shown in FIG. 7B, two vertical wires 22 b may be provided by being shifted from the horizontal center of the magnetic head slider 5. Thereby, the holding | maintenance by the holder 1 of the slider 5 is stabilized. In particular, as shown in FIG. 9, at the time of cleaning by the cleaning device using the roll brush 104, by arranging the two wires 22b along the moving direction of the roll brush 104 as a cleaning tool, that is, the brushing direction, It is possible to suppress the cleaning object from largely moving due to the force applied by the roll brush 104.

  Here, a cleaning apparatus using the roll brush 104 of FIG. 9 will be described. The cleaning apparatus includes a base 103 on which an upper part of the cleaning object holder 1 that holds the cleaning object is placed in the cleaning tank 100, and the upper part of the base 103 is filled with a solvent 102 so that the upper part of the base 103 is immersed. Further, a roll brush 104 for cleaning the cleaning object is provided above. Specifically, the base 103 is formed with a recess (not shown) for installing the substantially rectangular washing object holder 1 on the upper part thereof, and fixedly supports the washing object holder 1 accommodated in the recess. . However, the base 103 may support the cleaning object holder in another configuration. The roll brush 104 is also provided with driving means such as a motor for rotating the brush portion and movable means for moving the position of the roll brush 104, and the position where the tip of the brush contacts the surface of the cleaning object holder 1. Rotate and move with to perform brushing cleaning along one direction.

  Furthermore, the modification of arrangement | positioning of the wire 22 is shown in FIG. In FIG. 8A, the mesh 20 is configured by further narrowing the lattice interval between the wires 22a and 22b. At this time, for example, the lattice spacing is 0.08 to 0.10 mm, and the mesh is previously arranged so that the wires 22 b and 22 a are not positioned on the recording / reproducing element 51 of the magnetic head slider 5. 20 is formed. As a result, the magnetic head slider 5 can be pressed against the tray 10 from above by the plurality of grid-like wires 22a and 22b, and the holding stability is further increased.

  Conversely, FIG. 8B illustrates a configuration in which the number of wires 22 is reduced and the wires 22b are pressed only from one direction. Thus, even with the two wires 22b arranged in the same direction, the magnetic head slider 5 can be stably held on the tray 10. And when using brushes, such as the roll brush 104, as shown in FIG. 9, since a big force is directly applied to the wires 22a and 22b by a brush, there exists a possibility that a washing | cleaning thing may move largely, Therefore The number of the wires 22 It is desirable to increase In particular, it is preferable to use a plurality of wires extending along the direction of travel of the brush where the time during which the force is applied becomes long.

  Here, the state at the time of washing | cleaning at the time of using the washing | cleaning apparatus shown in FIG. 9 is demonstrated. First, similarly to the above, the magnetic head slider 5 is held by the tray 10 and the mesh 20 and placed on the base 103 in the cleaning tank 100. Then, the roll brush 104 is rotated and moved, and the mesh surface side of the cleaning object holder 1 is brushed and cleaned. At this time, since the wire 22 is only present on the surface of the magnetic head slider 5 with which the roll brush 104 comes into contact, almost the entire surface is exposed to the outside, and brushing can be reliably performed. Further, the side surface side of the magnetic head slider 5 has only four protrusions 11 and is exposed to the outside except for the vicinity thereof, and the first and first surfaces of the magnetic head slider 5 are also exposed to the tray 10 surface side. Since the two solvent escape holes 12 and 13 are formed, the solvent 102 is efficiently circulated around the slider 5. Therefore, cleaning with such a solvent is also performed efficiently. After the cleaning, the mesh 20 side and the side surface of the magnetic head slider 5 are substantially opened by pulling up from the cleaning tank 100 as described above, and the mesh 20 is processed with Teflon (registered trademark). Furthermore, since the solvent through holes 12 and 13 are also formed on the tray 10 side, the solvent 102 can be quickly discharged from the tray 10, and the solvent 102 remains on the magnetic head slider 5. It is possible to suppress the occurrence of spots and the like.

  The structure of the mesh 20 shown in FIG. 7B, FIG. 8A, and FIG. 8B described above can be applied to any cleaning device, but is particularly effective in brush cleaning because the holding is stable. is there. On the other hand, unlike the brush cleaning, the mesh structure used for the ultrasonic cleaning described in the first embodiment does not apply a large force to the cleaning object, so that the lattice spacing of the mesh 20 can be increased. By taking a large lattice spacing in this way, the opening of the cleaning object becomes wide and the cleaning effect becomes high, but if it is too large, it becomes impossible to stably hold the cleaning object, so there are more effects depending on the size of the cleaning object. It is desirable to determine the lattice spacing so that Further, in order to increase the lattice spacing, the mesh wire 22 used for ultrasonic cleaning can be formed thinner than the mesh wire 22 used for brush cleaning.

  Next, a third embodiment of the present invention will be described with reference to FIG. FIGS. 10A and 10B show examples of arrangement of the clips 30 that sandwich the tray 10 and the mesh 20, respectively. In any of the examples in these drawings, the clip 30 is held by four clips 30, and these clips 30 are arranged so as to be symmetric with respect to the center C of the tray 10. Specifically, the clip 30 that forms a pair with the two associated with the dotted arrows in FIGS. 10A and 10B is centered on the intersection of the diagonal lines of the tray 10 tray mesh 20 that is substantially rectangular. C is arranged so as to be point-symmetric about the point C. That is, in the case of FIGS. 10A and 10B, two pairs of clips 30 are arranged point-symmetrically at the center C of the mesh 20, and a total of four clips are arranged. The center of point symmetry may be the center of gravity of the holder 1.

  Thereby, the tray 10 and the mesh 20 can be pressed by the clip 30 with equal pressure. In addition, although the example provided with four clips 30 was shown, it is not limited to this number. However, as described above, since it is desirable to provide a plurality of pairs of clips 30 as described above in order to suppress the pressure with a uniform pressure, it is desirable that the number of clips 30 is an even number as a whole. And in order to suppress the stain | pollution | contamination by the clip 30, it is desirable that the number is small. Therefore, it is particularly preferable to provide four that are less contaminated and can be stably held at an equal pressure.

  The present invention has industrial applicability because it is a cleaning object holder that can be used in cleaning performed using a solvent in a cleaning tank.

It is the schematic which shows the structure of a washing | cleaning apparatus. It is a top view which shows the structure of the tray which comprises a washing | cleaning material holder. FIG. 3A is an enlarged view of a part of the tray, and FIG. 3B is a cross-sectional view taken along line AA in FIG. It is a top view which shows the structure of the mesh which comprises a washing | cleaning material holder. It is a top view which shows the structure of the washing | cleaning material holder when hold | maintaining a cleaning material. 6A is an enlarged view of a part of the cleaning object holder shown in FIG. 5, and FIG. 6B is a cross-sectional view taken along line BB in FIG. 6A. FIGS. 7A and 7B are plan views showing other configurations of the mesh, respectively, and show a state when the cleaning object is held. FIGS. 8A and 8B are plan views showing other configurations of the mesh, respectively, and show a state when the cleaning object is held. It is the schematic which shows the other structure of the washing | cleaning apparatus. FIGS. 10A and 10B are explanatory diagrams showing examples of clip arrangement.

Explanation of symbols

1 Cleaning object holder 5 Magnetic head slider (cleaning object)
10 Tray 11 Protrusion (enclosure member)
12 First solvent drain hole (through hole)
13 Second solvent drain hole (through hole)
20 mesh (Linear member mounting frame, separation regulating member)
21 Frame 22, 22a, 22b Wire (Linear member, Departure restricting member)
30 clips (holding members)
51 Recording / Reproducing Element 100 Cleaning Tank 101 Ultrasonic Vibrator 102 Solvent 103 Base 104 Roll Brush

Claims (17)

A cleaning object holder that holds at least one cleaning object and is immersed in a cleaning tank,
A tray on which the cleaning object is arranged, a surrounding member standing on the cleaning object disposition surface of the tray and enclosing the periphery of the cleaning object, and a detachment restricting member for restricting the cleaning object from separating from the tray And comprising
A cleaning object holder, wherein an opening for allowing a solvent used for cleaning to flow into and out of the cleaning object is formed around the cleaning object surrounded by the enclosure member.   The cleaning object holder according to claim 1, wherein the enclosure member is formed by a plurality of protrusions. For one washing item,
The cleaning object holder according to claim 1, wherein at least four protrusions are provided as the enclosure member.   4. The washing object holder according to claim 2, wherein the protrusion is a cylinder.   The cleaning object holder according to claim 1, 2, 3, or 4, wherein a through-hole penetrating the tray is provided on a cleaning object arrangement surface of the tray.   The cleaning object holder according to claim 1, 2, 3, 4, 5, or 6, wherein the separation regulating member is disposed in contact with the cleaning object. When the cleaning object is a magnetic head slider having a recording / reproducing element,
7. The cleaning object holder according to claim 1, wherein the separation regulating member is arranged at a position where it does not directly contact the recording / reproducing element of the magnetic head slider.   The cleaning object holder according to claim 1, 2, 3, 4, 5, 6 or 7, wherein the separation regulating member is a linear member.   9. The cleaning object holder according to claim 8, wherein at least two or more linear members are provided so as to intersect one cleaning object.   The cleaning object holder according to claim 8 or 9, wherein at least a pair of substantially parallel linear members are provided along a predetermined direction with respect to one cleaning object.   The washed object holder according to claim 9 or 10, wherein the linear members are formed in a lattice shape. In the case where a plurality of the cleaning items of X rows × Y columns (both X and Y are integers) are arranged on the tray,
The detachment restricting member is configured by a linear member mounting frame that is provided with at least one linear member for each row and for each column, and can be collectively mounted on the entire surface of the cleaning object arrangement surface of the tray. The washed object holder according to claim 1, 2, 3, 4, 5, 6, 7, 8, 9, 10 or 11.   The cleaning object holder according to claim 12, further comprising a holding member for holding the tray and the linear member mounting frame.   The at least one pair of the holding members is provided, and the pair of holding members are arranged symmetrically with respect to the center of the cleaning object arrangement surface of the tray. Cleaning material holder.   The washed article holder according to claim 8, 9, 10, 11, 12, 13, or 14, wherein the linear member is processed with a tetrafluoroethylene resin. A cleaning object holding step for holding the cleaning object, a step of immersing the held cleaning object in a cleaning solvent in a cleaning tank, a cleaning process for cleaning the cleaning object in the cleaning solvent, and a cleaning solvent for the cleaning object A washing method comprising:
The cleaning object cleaning method, wherein the cleaning object holding step uses the cleaning object holder according to any one of claims 1 to 15. The cleaning method according to claim 16, wherein the cleaning step is ultrasonic cleaning or brush cleaning.

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