JP2006093721A5 - - Google Patents

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Publication number
JP2006093721A5
JP2006093721A5 JP2005291809A JP2005291809A JP2006093721A5 JP 2006093721 A5 JP2006093721 A5 JP 2006093721A5 JP 2005291809 A JP2005291809 A JP 2005291809A JP 2005291809 A JP2005291809 A JP 2005291809A JP 2006093721 A5 JP2006093721 A5 JP 2006093721A5
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JP
Japan
Prior art keywords
substrate
exposure
exposure apparatus
liquid
flat plate
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2005291809A
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English (en)
Japanese (ja)
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JP2006093721A (ja
JP4164508B2 (ja
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Application filed filed Critical
Priority to JP2005291809A priority Critical patent/JP4164508B2/ja
Priority claimed from JP2005291809A external-priority patent/JP4164508B2/ja
Publication of JP2006093721A publication Critical patent/JP2006093721A/ja
Publication of JP2006093721A5 publication Critical patent/JP2006093721A5/ja
Application granted granted Critical
Publication of JP4164508B2 publication Critical patent/JP4164508B2/ja
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

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JP2005291809A 2005-10-04 2005-10-04 露光装置及びデバイス製造方法 Expired - Fee Related JP4164508B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2005291809A JP4164508B2 (ja) 2005-10-04 2005-10-04 露光装置及びデバイス製造方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2005291809A JP4164508B2 (ja) 2005-10-04 2005-10-04 露光装置及びデバイス製造方法

Related Parent Applications (1)

Application Number Title Priority Date Filing Date
JP2003185389A Division JP3862678B2 (ja) 2003-06-27 2003-06-27 露光装置及びデバイス製造方法

Related Child Applications (1)

Application Number Title Priority Date Filing Date
JP2007248076A Division JP4533416B2 (ja) 2007-09-25 2007-09-25 露光装置およびデバイス製造方法

Publications (3)

Publication Number Publication Date
JP2006093721A JP2006093721A (ja) 2006-04-06
JP2006093721A5 true JP2006093721A5 (enrdf_load_stackoverflow) 2007-08-23
JP4164508B2 JP4164508B2 (ja) 2008-10-15

Family

ID=36234328

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2005291809A Expired - Fee Related JP4164508B2 (ja) 2005-10-04 2005-10-04 露光装置及びデバイス製造方法

Country Status (1)

Country Link
JP (1) JP4164508B2 (enrdf_load_stackoverflow)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4517354B2 (ja) * 2004-11-08 2010-08-04 株式会社ニコン 露光装置及びデバイス製造方法
US7423720B2 (en) 2004-11-12 2008-09-09 Asml Netherlands B.V. Lithographic apparatus and device manufacturing method
SG10201407395SA (en) * 2006-08-31 2014-12-30 Nikon Corp Movable Body Drive Method And Movable Body Drive System, Pattern Formation Method And Apparatus, Exposure Method And Apparatus, And Device Manufacturing Method
JP5177736B2 (ja) * 2006-11-01 2013-04-10 レーザーテック株式会社 マスク検査装置

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN101872135B (zh) * 2002-12-10 2013-07-31 株式会社尼康 曝光设备和器件制造法
SG139733A1 (en) * 2003-04-11 2008-02-29 Nikon Corp Apparatus having an immersion fluid system configured to maintain immersion fluid in a gap adjacent an optical assembly
JP2005277363A (ja) * 2003-05-23 2005-10-06 Nikon Corp 露光装置及びデバイス製造方法

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