JP2006084189A - Imaging method, pattern inspection method, imaging apparatus and pattern inspection device - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide an imaging method which enables the certain detection of the flaw in a pattern at a high speed, a pattern inspection method, an imaging apparatus and a pattern inspection device. <P>SOLUTION: Since a scanning speed and the magnification of an imaging lens are switched corresponding to the scanning direction 201 with respect to the extending direction 205 of the pattern 210, the image input of the pattern can be performed in as short time as possible by image resolving power capable of detecting the flaw present in the pattern. <P>COPYRIGHT: (C)2006,JPO&NCIPI

Description

  The present invention relates to an imaging method for obtaining image data by scanning a pattern for image formation or the like formed on a plate-like object such as a PDP (plasma display panel), and an imaging apparatus for executing the imaging method The present invention also relates to a pattern inspection method for determining the quality of the pattern based on image data obtained by the imaging method, and a pattern inspection apparatus for executing the inspection method.

  In display devices such as PDP and liquid crystal, a pattern for forming pixels is formed on a panel in a stripe shape or a lattice shape. In order to guarantee quality and improve yield in the market, whether or not there is an abnormality in the pattern is checked. A pattern inspection to be inspected is performed for each manufacturing process. In recent years, in order to reduce the cost of display devices, after forming a plurality of display devices on a single panel, so-called multi-sided cutting is progressing, and the inspection area increases due to this increase in inspection area. Increase is a problem.

A conventional image inspection method will be described below with reference to the drawings.
FIG. 22 shows an inspection apparatus that executes the conventional first image inspection method. The inspection apparatus 10 includes a stage 1 having a moving mechanism on which an inspection object is placed and which can move the inspection object in the X and Y directions, an illumination apparatus 2 that illuminates the inspection object, and an optical system. 4 and an image processing apparatus 5 that images the inspection object, and an image processing apparatus 5 that is connected to the imaging apparatus 3 and determines the quality of the image of the inspection object captured by the imaging apparatus 3. Here, the inspection object is, for example, the above-described display panel, and a vertical stripe pattern, a horizontal stripe pattern, or a lattice-shaped line pattern is formed. Therefore, the quality determination of the image of the inspection object is to determine the quality of the pattern.

The inspection apparatus 10 performs pattern inspection as follows.
First, the panel 6 is placed on the stage 1. The lighting device 2 irradiates the panel 6 with light. As the stage 1 moves at a constant speed, the fixed imaging device 3 captures a vertical stripe, horizontal stripe, or grid line pattern formed on the panel 6 and takes an image at a fixed period. get information. The image information is sent to the image processing apparatus 5 to determine whether the pattern of the panel 6 is good or bad. FIG. 23 shows an example of a defective image of the plasma display panel processed by the image processing apparatus 5.

Further, a conventional second image inspection method will be described with reference to FIG.
The imaging unit 25 includes a zoom lens 26, and the zoom lens 26 changes the lens magnification of the color television camera 27 according to the resolution required for the inspection. That is, if the inspection part is a small soldering part, the lens magnification is increased and high-resolution inspection is performed. On the other hand, if the inspection part is a vast soldering part, the lens magnification is reduced and a wide-field inspection is performed. By the inspection, the captured image data of the inspection object is supplied from the image processing unit 28 to the determination unit 29. On the other hand, a determination data file for the image of the inspection object 30 is supplied from the control unit 31 to the determination unit 29. Therefore, the determination unit 29 compares the determination data file with the captured image data, determines the quality of the inspection object 30, and sends the result to the control unit 31. Further, based on the control of the control unit 31, the imaging controller 32 performs illumination control on the inspection object 30, control of the mutual balance of each hue light output in the camera 27, change of the magnification of the lens 26, and the like.
According to the inspection method, after determining the resolution necessary for the inspection for each inspection portion, the lens magnification of the imaging unit 25 can be changed to the optimum state, and high-precision inspection can be efficiently performed (for example, , See Patent Document 1).
Japanese Patent Laid-Open No. 3-189544

However, in the first image inspection method described above, there is a problem in that the inspection time increases correspondingly due to an increase in the size of the panel that is the inspection object.
In the second image inspection method described above, although the inspection speed can be increased by lowering the lens magnification, there is a problem that sufficient inspection accuracy cannot be obtained due to the low magnification.
On the other hand, in the pattern inspection in the panel such as PDP and liquid crystal, it is necessary to surely detect the short defect 40 and the disconnection defect 41 as shown in FIG. 25, but the protrusion defect 42 and the defect as shown in FIG. The defect 43 does not require higher inspection accuracy than the short defect 40 or the like. Therefore, the biggest problem is to reliably detect the short defect 40 and the disconnection defect 41 at high speed.
The present invention responds to such a demand, and an object thereof is to provide an imaging method, a pattern inspection method, an imaging apparatus, and a pattern inspection apparatus capable of reliably and rapidly detecting defects in a pattern of an inspection object. To do.

The present invention is configured as follows to achieve the above object.
That is, the imaging method of the first aspect of the present invention is an imaging method for obtaining image data by imaging while scanning a pattern on an inspection object.
When imaging the pattern, the scan speed and the imaging lens are switched according to the scan direction in which the scan is performed with respect to the extending direction of the pattern.

The imaging device according to the second aspect of the present invention includes an imaging unit that captures an image while scanning a pattern on the inspection object,
A lens unit that is provided between the imaging unit and the inspection object and has lenses with different magnifications;
A lens switching device that switches the lens that forms an image on the imaging unit;
A moving device that relatively moves the object to be inspected and the imaging unit in order to scan the imaging unit along the same direction as the extending direction of the pattern or an orthogonal direction orthogonal to the extending direction on a plane. When,
The relative movement of the inspection object and the imaging unit by the moving device switches the speed of the relative movement with respect to the moving device according to a scanning direction in which the imaging unit scans the pattern, and A control device for switching the lens with respect to the lens switching device;
It is provided with.

  The inspection object corresponds to an object in which a pattern is formed in a vertical stripe shape, a horizontal stripe shape, or a lattice shape. Specifically, for example, a display device such as a plasma display panel (PDP) corresponds. In such a display panel, a pattern is formed in a vertical stripe shape, a horizontal stripe shape, or a lattice shape, and the short defect 40 and the disconnection defect 41 shown in FIG. It needs to be detected. That is, as shown in FIG. 15, in order to reliably detect the short defect 40 and the disconnection defect 41 for the pattern 210 having the short defect 40 and the disconnection defect 41, the image resolution in the extending direction 205 of the pattern 210, The image resolution in the orthogonal direction 206 that is orthogonal to the extending direction 205 on the plane is important.

  The image resolution in the extending direction 205 is determined from specifications necessary for guaranteeing the process and the product. For example, if there is a possibility that a disconnection defect 41 or a short defect 40 of 10 μm or more may occur in the process, the necessary resolution is 5 μm, which corresponds to ½ times. Although the recommended resolution is 1/2 times the defect size to be detected, if image processing with submicron accuracy is possible by the image processing method, even with a resolution of 1 or more (in the above example, 10 μm or more) In some cases, defect detection is possible, and in some cases, a resolution higher than ½ times (here, smaller than 5 μm) is required, which varies depending on the target device and the image processing method.

  The image resolution in the orthogonal direction 206 is not related to the size of the defect, and in the case of the disconnection defect 41, a resolution that can recognize the pattern 210 as a pattern is necessary. In general image processing, the pattern 210 is imaged. Four or more pixels are required in the image sensor. For example, in the case of a pattern width of 100 μm, if the resolution is 25 μm, 4 pixels can be assigned to the pattern, and the pattern can be recognized as a pattern. In the case of the short defect 40, a resolution that can separate the adjacent patterns 210 is necessary, and similarly, four or more pixels are necessary. In the case of a pattern interval of 200 μm, if the resolution is 50 μm, 4 pixels can be allocated to the pattern interval.

Generally, since it is necessary to inspect the disconnection defect 41 and the short defect 40 at the same time, the smaller resolution of the necessary resolution for recognizing the pattern 210 and the necessary resolution for recognizing the pattern interval is adopted. It will be. For example, in the case of the pattern 210 having a pattern width of 100 μm and a pattern interval of 200 μm, a resolution of 25 μm is required.
In addition, although it has been described that four pixels need to be allocated for recognition as the pattern 210 and pattern interval, in the case of sub-pixel image processing, there may be cases where it is possible to recognize with a smaller number of allocated pixels, or binary. In the case of the conversion processing, 10 pixels or more may be necessary, and it depends on the target device and the image processing method.

  As is clear from the above description, the resolution in the extending direction 205 of the pattern 210 can be expressed as the resolution necessary for defect detection, and the resolution in the orthogonal direction 206 is expressed as the resolution necessary for recognizing the pattern 210. it can. In general, since the resolution necessary for recognizing the pattern is lower than the resolution necessary for defect detection, the extending direction 205 of the pattern 210 is imaged at a high magnification and the orthogonal direction 206 is imaged at a low magnification. It will be.

  Thus, it is only necessary to maintain a good image resolution in the extending direction 205 of the pattern 210, and the image resolution is lowered in the orthogonal direction 206 orthogonal to the extending direction 205 on the plane. Even if the image is picked up or compressed, there is no problem in pattern inspection. That is, the state of equal magnification in the extending direction 205 and the orthogonal direction 206 shown in FIG. 15 may be compressed in the orthogonal direction 206 as shown in FIG. The limit of compression is theoretically limited to immediately before adjacent patterns 210 are close to each other and recognized as one, and the pattern 210 itself becomes too thin to be recognized. Actually, it varies depending on the inspection object or its pattern, but as an example, it is desirable to allocate 4 pixels or more to the width of the pattern 210 or the gap between the adjacent patterns 210 as described above. For example, when the width of the pattern 210 is 100 μm and the gap between adjacent patterns 210 is 200 μm, a resolution of 25 μm is required based on the width of the smaller pattern 210.

  As is apparent from FIG. 15 and the like, the short defect 40 and the disconnection defect 41 are along a defect extending direction 207 that is a direction intersecting the pattern 210, that is, a direction parallel to or substantially parallel to the orthogonal direction 206. Extend. Therefore, in the defect extending direction 207, the image resolution can be relatively lowered, while in the extending direction 205 of the pattern 210, a high resolution is required.

On the other hand, since the imaging camera that captures the pattern in order to obtain the image data for inspection of the pattern is a camera composed of a CCD (charge coupled device), the magnification of the lens that performs imaging, and the pattern Depending on the scanning speed in the scanning direction in which the image is picked up, the resolution in the picked-up image changes. That is, a high-resolution image can be obtained when a lens with a higher magnification than that with a low magnification is used or when the scanning speed is set lower than the high speed. However, the use of a high-magnification lens narrows the imaging field of the imaging camera, and thus increases the inspection time required for one panel. Also, reducing the scanning speed leads to an increase in inspection time. Therefore, inspection in as short a time as possible is required without overlooking the short defect 40 and the disconnection defect 41.
Therefore, in the imaging method according to the first aspect of the present invention, defects can be detected reliably and at high speed by switching the scanning speed and the lens according to the scanning direction for imaging the pattern with respect to the extending direction of the pattern. It is what.

In an example in an actual imaging process, the imaging camera does not move, the inspection object moves only in one direction, and the inspection posture of the inspection object is fixed. That is, for example, by rotating the inspection object by 90 degrees, an operation for matching the pattern extending direction and the scanning direction is not performed.
Therefore, depending on the extending direction of the pattern on the inspection object, the scanning direction is the same as the extending direction or a direction orthogonal thereto. Therefore, as described above, the scanning speed and the lens are switched according to the scanning direction with respect to the extending direction, that is, depending on whether the scanning direction is the same direction as the extending direction or a perpendicular direction.

  The imaging operation is not limited to the above-described operation, and the imaging camera may be movable without moving the inspection object, and the direction thereof may be variable. Further, even when the inspection object is moved, the direction may be variable. In short, the imaging camera and the inspection object may be relatively moved.

  As shown in FIG. 17, for example, when the scan direction 201 is the same as the extension direction 205, the pattern 210 has a plurality of rows arranged along an orthogonal direction 206 orthogonal to the extension direction 205. Has been. Therefore, when a high-magnification lens is used, the image resolution in the pattern 210 is improved, but the number of patterns 210 that can be inspected decreases because the scanning direction 201 is the same as the extending direction 205. That is, the imaging field 225 using the low-power lens can capture more patterns in the imaging field in the orthogonal direction 206 than the imaging field 220 using the high-power lens. Therefore, from the viewpoint of reliably inspecting the short defect 40 and the disconnection defect 41 in a short time as described above, it is preferable to use a low magnification lens from the viewpoint of lens magnification. On the other hand, image resolution is inferior by using a low magnification lens. Therefore, the deterioration of image resolution is compensated by reducing the scanning speed. Thus, when the scanning direction 201 is the same direction as the extending direction 205, it is possible to detect defects reliably and at high speed by using a low magnification lens and by reducing the scanning speed. Become.

  In addition, when the scanning direction 201 is the same as the extending direction 205 described above, if a low magnification lens is used and the scanning speed is increased, the image resolution in the pattern extending direction 205 deteriorates, so that reliable defect detection is possible. In addition, when a high magnification lens is used and the scanning speed is lowered, the image resolution is improved and the detection of the short defect 40 and the disconnection defect 41 is improved, but the inspection time is lengthened by the narrow field of view and the low speed. In addition, if a high-magnification lens is used and the scanning speed is increased, it is difficult to reliably detect defects due to deterioration of the image resolution in the pattern extending direction 205, and the inspection time is extended due to the narrow field of view.

  In addition, as shown in FIG. 18, when the scan direction 201 is the same as the orthogonal direction 206, the short defect 40 and the disconnection defect 41 are surely inspected in a short time as described above. Therefore, it is preferable to inspect the patterns 210 one by one. Therefore, it is preferable to use a high magnification lens in terms of lens magnification. By using a high magnification lens, the inspection time becomes longer due to the narrow imaging field of view. Therefore, the increase in the inspection time is compensated by increasing the scanning speed. As described above, when the scanning direction 201 is the same as the orthogonal direction 206, it is possible to detect defects reliably and at high speed by using a high-magnification lens and increasing the scanning speed.

  In the case where the scan direction 201 is the same as the orthogonal direction 206 as described above, the detection of the short defect 40 and the disconnection defect 41 is good when a high magnification lens is used and the scan speed is low. As a result, the inspection time becomes longer, and if a low-magnification lens is used and the scanning speed is increased, the image resolution deteriorates, so that it is difficult to reliably detect defects, and a low-magnification lens is used. However, if the scanning speed is lowered, it is difficult to reliably detect defects due to the deterioration of the image resolution, and the inspection time is lengthened.

  The scanning speed is the movement speed of the inspection object when the imaging camera is fixed and the inspection object is moved, and the scanning speed is the movement speed of the imaging camera when the inspection object is fixed and the imaging camera is moved. Generally, the relative speed is obtained when the imaging camera and the inspection object are relatively moved. In addition, when switching lenses, a plurality of lenses with different magnifications are prepared, and the lens itself that forms an image on the imaging unit of the imaging camera is replaced with one non-magnification lens with different magnifications in the vertical and horizontal directions. In some cases, the magnification with respect to the imaging unit is changed by rotating the lens 90 degrees. Note that a plurality of non-magnification lenses having different magnifications may be provided, and the magnification may be switched by exchanging the lens itself in addition to the magnification switching by the rotation.

As described above, the imaging camera has a CCD, and for example, a line sensor type and a TDI (Time Delay Integration) type are conceivable. As shown in FIG. 19, the line sensor 1610 has a configuration in which a plurality of CCDs 1601 are arranged in a line along a column direction 1602 orthogonal to the scan direction 201 on a plane, and the scan speed in the scan direction 201 is set. By changing it, the image resolution can be changed.
Note that a shadow image of the imaging target 251 in the imaging target 250 is formed on the CCD 1601 through the lens 252.

  As shown in FIG. 20, the TDI 1620 has a configuration in which one row of CCDs in which a plurality of CCDs 1601 are arranged along the column direction 1602 are arranged in a plurality of rows along the scan direction 201, as with the line sensor 1610. Then, the imaging data is transmitted and accumulated in the scanning direction 201 for each column. Therefore, the TDI 1620 can improve the imaging sensitivity compared to the line sensor 1610, and can reduce noise. On the other hand, since the imaging data is transmitted as described above, if the scan speed is simply changed without changing the magnification of the lens 252 that forms an image on the TDI 1620, the output image will be blurred. Therefore, in the TDI 1620, it is necessary to maintain the relationship between the magnification of the lens 252 and the scanning speed, and an easy configuration can be adopted by using the above-described non-magnification lens.

Further, the pattern inspection method of the third aspect of the present invention is a pattern inspection method in which the pattern on the inspection object is imaged while scanning, and the quality of the pattern is determined based on the obtained image data.
When imaging the pattern, the image data is obtained by switching a scanning speed and the imaging lens in accordance with a scanning direction in which the scanning is performed with respect to an extending direction of the pattern.

A pattern inspection apparatus according to a fourth aspect of the present invention includes the imaging apparatus according to the second aspect,
A determination device that determines the quality of the pattern based on the image data of the pattern in the inspection object obtained from the imaging device;
It is provided with.

  Note that the present invention is not limited to the display device pattern inspection apparatus and method, and can also be applied to inspection of other input images.

  According to the imaging method of the first aspect of the present invention and the imaging apparatus of the second aspect described above, the scanning speed and the magnification of the imaging lens are switched according to the scanning direction with respect to the pattern extending direction. Therefore, it is possible to input a pattern image in as short a time as possible with an image resolution capable of detecting defects present in the pattern.

  Further, according to the pattern inspection method of the third aspect and the pattern inspection apparatus of the fourth aspect of the present invention described above, the high resolution obtained by the imaging method of the first aspect and the imaging apparatus of the second aspect. Since the pattern is inspected using the image, the pattern inspection can be performed with higher accuracy than in the past.

  An imaging method, a pattern inspection method, an imaging apparatus, and a pattern inspection apparatus, which are embodiments of the present invention, will be described below with reference to the drawings. The imaging apparatus is an apparatus capable of executing the imaging method. The inspection method is performed using image information obtained by the imaging method, and the inspection apparatus can execute the inspection method. Device. Moreover, in each figure, the same code | symbol is attached | subjected about the same component. Further, in the embodiment described below, a display device such as a PDP or a liquid crystal panel is taken as an example of the inspection object, and the pattern inspection apparatus is formed in the display device, as shown in FIG. The presence or absence of a defect in the pattern 210 constituting the display is inspected. The object in the imaging method, the pattern inspection method, the imaging apparatus, and the pattern inspection apparatus is not limited to the display device, and can be widely applied to pattern inspection. In particular, for inspection of image information having a stripe pattern extending linearly or a grid pattern orthogonal to each other on a plane, such as the pattern 210, or for inspection of a wiring pattern on a circuit board, for example. It is beneficial.

1st Embodiment;
FIG. 1 shows an imaging apparatus 101 according to the present embodiment. The imaging device 101 includes a stage 110, a camera unit 160, a moving device 120, and a control device 180 as a basic configuration, and further includes an illumination device 310 and a panel transport device 320 as auxiliary components. Prepare.
In the imaging apparatus 101 of the present embodiment, the camera unit 160 is movable only in the Y direction by the moving device 120, and the stage 110 is configured not to move in either the X direction or the Y direction. In addition, the panel conveyance device 320 conveys the display device 190 that is an inspection target along the X direction.

  The stage 110 mounts the display device 190. The display device 190 is carried into the stage 110 by the panel transfer device 320. As described above, the image forming pattern 210 is formed on the display device 190. Whether the extending direction 205 of the pattern 210 shown in FIG. 17 or the like is parallel to the Y direction, parallel to the X direction, or whether the pattern 210 has a lattice shape extending in the X and Y directions. It is discriminated in advance before carrying in.

  In this embodiment, the moving device 120 includes a ball screw structure having a screw portion extending in the Y direction and a nut portion that engages with the screw portion, and the camera portion 160 is mounted on the nut portion. Have. Therefore, the camera unit 160 can be moved in the Y direction by the operation of the screw portion, and the moving amount and moving speed are controlled by the control device 180. In this embodiment, the moving direction of the camera unit 160 by the moving device 120 corresponds to the scanning direction 201 shown in FIG. 17 and the like, and here corresponds to the Y direction. In the present embodiment, the moving speed of the camera unit 160 by the moving device 120 corresponds to the scanning speed.

  The camera unit 160 is provided directly above the stage 110, has a TDI sensor 1620, a lens unit 140, and a lens switching device 150, and is an apparatus that images the display device 190 placed on the stage 110. In the present embodiment, the TDI sensor 1620 corresponds to an example of an imaging unit.

  As described above with reference to FIG. 20, the TDI sensor 1620 includes, along the scan direction 201, a row formed by arranging a plurality of CCDs 1601 along the row direction 1602 orthogonal to the scan direction 201 on the plane. Imaging that has a configuration arranged in a plurality of rows and generates image information of the pattern 210 by performing so-called time delay integration on the imaging information of the pattern 210 in the display device 190 captured through the lens unit 140 Part. The generated image information is sent to the image processing apparatus 170.

  The lens unit 140 is provided between the display device 190 and the TDI sensor 1620 and has a lens that forms an image on the TDI sensor 1620. In the present embodiment, the lens unit 140 includes a low-magnification lens 141 and a high-magnification lens 142 arranged in parallel along the X direction. The low-magnification lens 141 and the high-magnification lens 142 are both lenses having non-magnification aspect ratios configured to have different magnifications in two directions orthogonal to each other on a plane. As shown in FIG. 21, the non-magnification aspect lens 148 is formed by combining a cylindrical lens 146 and a spherical lens 147, and each magnification in the two directions is optimal for imaging and inspection of the pattern 210. It has been decided.

  As described above, the non-equal magnification aspect lens has both low magnification and high magnification in two orthogonal directions, but in this specification, a low magnification image is formed in the column direction 1602 of the TDI sensor 1620. The non-magnification aspect lens is called a low-magnification lens, and the non-magnification aspect lens when forming a high-magnification image in the column direction 1602 is called a high-magnification lens.

The low-magnification lens 141 gives a low-magnification image in the column direction 1602 of the TDI sensor 1620 to the TDI sensor 1620 in a direction orthogonal to the column direction 1602 on the plane, that is, in the scan direction 201 compared to the low magnification. It is a lens that forms an image.
The high-magnification lens 142 is a lens that forms a high-magnification image in the column direction 1602 and a low-magnification image in the scanning direction 201 compared to the high-magnification image on the TDI sensor 1620.

  The lens switching device 150 is a mechanism that moves the lens unit 140 with respect to the TDI sensor 1620 and is low so that an image of the pattern 210 is input to the TDI sensor 1620 from either the low magnification lens 141 or the high magnification lens 142. The magnification lens 141 and the high magnification lens 142 are moved along the X direction, and the arrangement of the lenses with respect to the TDI sensor 1620 is changed. The lens switching device 150 is connected to the control device 180, and the lens is switched under the control of the control device 180.

  In the present embodiment, an example of the display device 190 has a size of 1000 mm × 1000 mm, and is orthogonal to the column direction 1602 of the TDI sensor 1620, that is, the scan direction 201 on a plane when an image is input with the low-magnification lens 141. The pixel resolution in the direction is 50 μm, the pixel resolution in the scan direction 201 is 10 μm, and the field of view in the column direction 1602 is 200 mm in diameter or width dimension. When an image is input with the high magnification lens 142, the pixel resolution in the column direction 1602 of the TDI sensor 1620 is 10 μm, the pixel resolution in the scan direction 201 is 50 μm, and the field of view in the column direction 1602 is a diameter or a width dimension. 40 mm. In the TDI sensor 1620, the scan speed is determined by the lens magnification in the scan direction 201. In this embodiment, when inputting an image with the low-magnification lens 141, the camera unit 160 is moved at a speed of 100 mm / sec. When the image is input using the high-magnification lens 142, the camera unit 160 is moved at a speed of 500 mm / second.

  The image processing apparatus 170 is connected to the TDI sensor 1620, performs image processing on the imaging information supplied from the TDI sensor 1620 by the image processing unit 171, and forms an image of the pattern 210 on the display device 190.

  The illumination device 310 is a device that is installed above the stage 110 and irradiates the display device 190 placed on the stage 110 with light necessary for imaging by the camera unit 160. The light control device 311 and the light control device 311 A light source 312 connected to the light control device 311 is included. The light control device 311 is a device that adjusts the luminance of the light source 312, and adjusts the luminance of the light source 312 under the control of the control device 180.

  The panel transfer device 320 is a device that is arranged along the X direction, carries the display device 190 into the imaging device 101 and places it on the stage 110, and carries out the display device 190 from the imaging device 101. Operation is controlled at 180.

  The control device 180 is connected to the stage 110, the moving device 120, the camera unit 160, the image processing device 170, the illumination device 310, and the panel transport device 320, and can be configured by a general-purpose personal computer. The control device 180 is a part that controls the operation of each component. For example, in response to switching between the low-magnification lens 141 and the high-magnification lens 142, the control device 180 controls the moving speed of the camera unit 160 and the luminance of the light source 312. Or control.

  In the imaging apparatus 101 configured as described above, the pattern inspection apparatus 105 can be configured by the image processing apparatus 170 further including a determination unit 172. In this configuration, the determination unit 172 determines the presence / absence of a defective portion such as the short defect 40 and the disconnection defect 41 based on the image of the pattern 210 sent from the image processing unit 171, and determines whether the pattern 210 is good or bad.

  The operation of the imaging apparatus 101 of the present embodiment configured as described above, that is, the imaging method, and further the operation of the pattern inspection apparatus 105, that is, the pattern inspection method will be described below. The imaging method and the pattern inspection method are executed with the operation controlled by the control device 180.

A case where the display device 190 having the vertical stripe pattern 210 as shown in FIG. 2 is placed on the stage 110 with the extending direction 205 of the pattern 210 parallel to the Y direction will be described.
In this case, the scanning direction 201 that is the moving direction of the camera unit 160 by the moving device 120 and the extending direction 205 of the pattern 210 are parallel to each other. Therefore, in order to detect the short defect 40 and the disconnection defect 41 in the pattern 210, it is necessary to obtain an image along the extending direction 205 with high resolution. On the other hand, the image along the orthogonal direction 206 orthogonal to the extending direction 205 may have a lower image resolution than the image resolution in the extending direction 205.
Therefore, the control device 180 operates the lens switching device 150 in the camera unit 160 and arranges the low magnification lens 141 with respect to the TDI sensor 1620. Thereby, the pixel resolution in the orthogonal direction 206 orthogonal to the scan direction 201 is 50 μm, but the pixel resolution in the scan direction 201 direction is 10 μm. Therefore, a shadow image along the Y direction can be captured with high resolution.

  Further, the control device 180 illuminates the display device 190 with the light source 312, moves the camera unit 160 in the scanning direction 201 at a scanning speed of 100 mm / second relative to the moving device 120, and causes the camera unit 160 to perform patterning. 210 is imaged.

  An image obtained from the camera unit 160 by such an operation is shown in FIG. Since the low-magnification lens 141 has a lower resolution in the orthogonal direction 206 than in the scanning direction 201, imaging is performed with a wide field of view in the orthogonal direction 206. On the other hand, since the camera unit 160 is moved in the scanning direction 201 at a low speed, a sufficient image resolution can be obtained in the extending direction 205 of the pattern 210. Therefore, the image obtained from the camera unit 160 is a vertically long image that is crushed in the orthogonal direction 206 and long in the scan direction 201, as shown in FIG.

  The inspection time when the pattern inspection is performed by the pattern inspection apparatus 105 based on the captured image of the pattern 210 obtained by the imaging operation described above will be described. That is, according to the imaging method described above, the low magnification lens 141 is used. Therefore, by moving the camera unit 160 in the scan direction 201 at a scan speed of 100 mm / second with respect to the display device 190 having a length of 1000 mm in the scan direction 201, an image can be captured in 10 seconds per scan. Complete. In addition, since the display device 190 having a width of 1000 mm in the orthogonal direction 206 is imaged with a field of view of 200 mm, the display device 190 having a size of 1000 mm × 1000 mm completes imaging in five scans. To do. Therefore, one display device 190 can complete imaging in 50 seconds. Here, in order to simplify the description, the acceleration / deceleration time of the camera unit 160 and the inspection time are not considered.

On the other hand, when the display device 190 of the same size is inspected by a conventional image inspection apparatus, the image pickup apparatus provided in the conventional image inspection apparatus has a resolution of 10 μm in both the scan direction and the orthogonal direction, and the camera unit of this embodiment As in 160, the aspect structure is not a non-equal size. Therefore, the imaging field of view is narrower than that of the camera unit 160 of the present embodiment and is only 40 mm. Therefore, the imaging time per scan is the same at 10 seconds, but 25 scans are required due to the narrow field of view. Therefore, the time required to image one display device 190 is five times 250 seconds.
As described above, according to the imaging apparatus 101 of the present embodiment and the pattern inspection apparatus 105 including the imaging apparatus 101, the inspection of the display device 190 can be completed in a shorter time than in the past.

Next, as shown in FIG. 4, an imaging method when the display device 190 having the vertical stripe pattern 210 is placed on the stage 110 with the extending direction 205 of the pattern 210 parallel to the X direction, and A pattern inspection method will be described.
In this case, the scanning direction 201 that is the moving direction of the camera unit 160 by the moving device 120 and the orthogonal direction 206 are parallel, and the scanning direction 201 is orthogonal to the extending direction 205 of the pattern 210. Therefore, in order to detect the short defect 40 and the disconnection defect 41 in the pattern 210, it is necessary to obtain an image along the orthogonal direction 206 with high resolution. On the other hand, the image along the extending direction 205 can be imaged with a lower resolution than the image resolution in the orthogonal direction 206.
Therefore, the control device 180 operates the lens switching device 150 in the camera unit 160 to place the high magnification lens 142 on the TDI sensor 1620 so that an image is formed through the high magnification lens 142. Thereby, the image resolution in the moving direction of the camera unit 160, that is, the orthogonal direction 206 orthogonal to the scanning direction 201 is as high as 10 μm, and the pixel resolution in the extending direction 205 of the pattern 210 parallel to the scanning direction 201 is 50 μm. Compared to the image resolution in the orthogonal direction 206, the resolution is low. Therefore, it is possible to image and inspect the pattern 210 along the orthogonal direction 206 with high resolution.

  Further, the control device 180 illuminates the display device 190 with the light source 312, moves the camera unit 160 in the scanning direction 201 at a scanning speed of 500 mm / second relative to the moving device 120, and Make an image.

  An image obtained from the camera unit 160 by such an imaging operation is shown in FIG. The high-magnification lens 142 has high resolution in the column direction 1602 of the TDI sensor 1620, that is, the direction orthogonal to the scanning direction 201, that is, the extending direction 205 of the pattern 210, and low resolution in the scanning direction 201. Therefore, imaging is performed with a wide field of view in the scanning direction 201, and sufficient image resolution can be obtained in the extending direction 205 of the pattern 210. Therefore, as shown in FIG. 5, the image obtained from the camera unit 160 is a horizontally long image that collapses in the orthogonal direction 206 and is long in the extending direction 205.

  The inspection time when the pattern inspection is performed by the pattern inspection apparatus 105 based on the captured image of the pattern 210 obtained by the imaging operation described above will be described. That is, according to the imaging method described above, the high magnification lens 142 is used. Therefore, by moving the camera unit 160 in the scan direction 201 at a scan speed of 500 mm / second with respect to the display device 190 having a length of 1000 mm in the scan direction 201, an image can be captured in 2 seconds per scan. Complete. In addition, since an image is captured with a visual field of 40 mm with respect to a display device 190 having a width of 1000 mm in the extending direction 205 of the pattern 210, the display device 190 having a size of 1000 mm × 1000 mm is scanned 25 times. To complete imaging. Therefore, one display device 190 can complete imaging in 50 seconds. Here, as described above, the acceleration / deceleration time of the camera unit 160 and the inspection time are not taken into consideration.

  Even in this case, as described above, according to the conventional image inspection apparatus, the time required to image one display device 190 requires 250 seconds. Therefore, the imaging apparatus 101 and the pattern inspection apparatus 105 according to the present embodiment. According to this, the inspection of the display device 190 can be completed in a shorter time than in the past.

A second embodiment;
In the imaging device 101 and the pattern inspection device 105 in the first embodiment, the moving direction of the camera unit 160 by the moving device 120, that is, the scanning direction 201 is limited to one direction, and the display device 190 on which the stage 110 is also placed. This is a configuration in which the mounting direction cannot be changed. Therefore, as shown in FIG. 6, imaging and pattern inspection cannot be performed for the display device 191 having the grid pattern 230. The imaging apparatus 102 and the pattern inspection apparatus 106 according to the second embodiment enable imaging and pattern inspection for the display device 191 having the grid pattern 230.

  FIG. 7 shows the imaging device 102 and the pattern inspection device 106 in the second embodiment. The difference between the imaging device 102 and the pattern inspection device 106 and the imaging device 101 and the pattern inspection device 105 in the first embodiment is that the camera unit 160 can be moved in the X direction and the Y direction instead of the moving device 120. It is the point provided with the moving apparatus 121 which performs. Other configurations are the same as the configurations of the imaging apparatus 101 and the pattern inspection apparatus 105. Therefore, only the mobile device 121 will be described here, and the description of the other components will be omitted.

The moving device 121 includes a Y-moving mechanism 1211 and an X-moving mechanism 1212. The Y-moving mechanism 1211 includes a ball screw structure having a Y screw portion extending in the Y direction and a Y nut portion that engages with the Y screw portion, and the camera portion 160 is mounted on the Y nut portion. Have Therefore, the camera unit 160 can be moved in the Y direction by the operation of the Y-movement mechanism 1211, and the movement amount and movement speed are controlled by the control device 180. The X-movement mechanism 1212 includes a pair of an X-movement mechanism 1212A and an X-movement mechanism 1212B that support both ends of the Y-movement mechanism 1211 and extend in parallel to each other in the X direction. The X-movement mechanism 1212A and the X-movement mechanism 1212B both have the same configuration, and include a ball screw structure having an X screw portion extending in the X direction and an X nut portion engaging with the X screw portion. Each end of the Y-moving mechanism 1211 is supported by each X nut portion. Accordingly, the Y-movement mechanism 1211 can be moved in the X direction by the operation of the X-movement mechanism 1212, and the movement amount and movement speed are controlled by the control device 180.
According to the moving apparatus 121 configured as described above, the camera unit 160 can freely move in the X direction and the Y direction, and also images the display device 191 having the grid pattern 230 as shown in FIG. And inspection becomes possible. The scan direction parallel to the X direction by the camera unit 160 is numbered “201X”, and the scan direction parallel to the Y direction is numbered “201Y”.

An imaging operation and a pattern inspection operation in the imaging apparatus 102 and the pattern inspection apparatus 106 according to the second embodiment including the moving device 121 will be described below by taking a display device 191 having a grid pattern 230 as an example. It is assumed that the display device 191 is placed on the stage 110 with the grid pattern 230 in a state parallel to the X direction and the Y direction, respectively.
When the camera unit 160 is moved in the Y direction, that is, the scanning direction 201Y by the moving device 121, in order to detect the short defect 40-Y and the disconnection defect 41-Y, as in the case of the first embodiment described above, Y It is necessary to obtain an image along the direction with high resolution. Therefore, the control device 180 controls the lens switching device 150 to place the low magnification lens 141 with respect to the TDI sensor 1620. Accordingly, the pixel resolution in the direction orthogonal to the moving direction of the camera unit 160, that is, the X direction is 50 μm, but the pixel resolution in the direction parallel to the moving direction of the camera unit 160, that is, in the scanning direction 201Y is 10 μm. Therefore, an image along the Y direction can be inspected with high resolution.
Further, the display device 191 is illuminated by the light source 312, the camera unit 160 is moved in the Y direction, that is, the scan direction 201 Y at a moving speed of 100 mm / second, and the camera unit 160 performs imaging.
An image obtained from the camera unit 160 by the above-described operation is shown in FIG.

Next, in order to detect the short defect 40-X and the disconnection defect 41-X when the camera unit 160 is moved in the X direction, that is, the scan direction 201X, as in the case of the first embodiment described above, the X direction 1121 is used. It is necessary to obtain an image along the line with high resolution. Therefore, the control device 180 controls the lens switching device 150 to place the high magnification lens 142 with respect to the TDI sensor 1620. Accordingly, the pixel resolution in the direction orthogonal to the moving direction of the camera unit 160, that is, the Y direction is 10 μm, but the pixel resolution in the direction parallel to the moving direction of the camera unit 160, that is, in the scanning direction 201X is 50 μm. Therefore, an image along the X direction can be inspected with high resolution.
Further, the display device 191 is illuminated by the light source 312, the camera unit 160 is moved in the X direction at a moving speed of 500 mm / second, and imaging is performed by the camera unit 160.
An image obtained from the camera unit 160 by the above-described operation is shown in FIG.

As described above, when the stripe pattern in the horizontal direction and the vertical direction perpendicular thereto are mixed in one display device 191, the camera unit 160 is moved at 100 mm / second using the low magnification lens 141. After the entire surface of the display device 190 is inspected, the camera unit 160 is moved at 500 mm / second using the high magnification lens 142 to inspect the entire surface of the display device 190.
According to such an inspection method, as described above in the first embodiment, each of the inspection by the low magnification lens 141 and the inspection by the high magnification lens 142 has an inspection time of 50 seconds. Inspection of the display device 191 can be completed in 100 seconds.
On the other hand, according to the conventional method, since both the X direction and the Y direction have high magnification, the inspection can be performed once, but the inspection in the X direction and the Y direction requires 250 seconds. Therefore, it takes 2.5 times as long as the inspection method of this embodiment.
Thus, according to the imaging apparatus and pattern inspection apparatus, and the imaging method and pattern inspection method of the second embodiment, the required inspection accuracy is reduced even when the pattern 230 is formed in a lattice shape. As a result, the inspection time can be shortened and speeded up as compared with the prior art.

  In the first embodiment and the second embodiment described above, the lens switching device 150 is provided with two types of the low-magnification lens 141 and the high-magnification lens 142. For example, depending on the type of the display device 190, the scanning speed, and the like. As shown in FIG. 13, three or more types of imaging lenses having different magnifications can be provided.

  At present, a plurality of non-magnification lenses are provided due to technical problems with the non-magnification lenses. However, a non-magnification lens is developed that can obtain images equivalent to each other in each scanning operation in the X direction and the Y direction, for example, by rotating the non-magnification lens 90 degrees without performing lens replacement in the future. Therefore, it is not necessary to provide a plurality of non-magnification lenses, and it is possible to adopt a configuration in which one non-magnification lens is provided.

In the first embodiment described above, the camera unit 160 is moved along the scan direction 201, and in the second embodiment, the camera unit 160 is moved in the X direction and the Y direction. Since it is only necessary to capture an image while scanning the pattern along the direction, the camera unit 160 and the display device, that is, the stage 110 may be relatively moved. Therefore, the following modified configuration can be adopted.
That is, like the imaging device 1011 and the pattern inspection device 1051 shown in FIG. 10, the moving device 120 includes a camera moving mechanism 1201 that moves the camera unit 160 along the Y direction, and a display device that can move in the X direction. The X-panel moving mechanism 1202 may be provided.

  Also, like the imaging device 1012 and the pattern inspection device 1052 shown in FIG. 11, the camera unit 160 is fixed, and the moving device 120 includes an X-panel moving mechanism 1202 that moves the display device, that is, the stage 110, in the X direction. The display device, that is, the stage 110 may be configured to include a Y-panel moving mechanism 1203 that can move in the Y direction.

Further, like the imaging device 1013 and the pattern inspection device 1053 shown in FIG. 12, the moving device 120 includes an X-panel moving mechanism 1202 that moves the display device, that is, the stage 110 in the X direction, and the display device, that is, the stage 110. A Y-panel moving mechanism 1203 movable in the Y direction is provided, and the lens switching device 150 can also be configured to include a rotation driving device 151 that rotates the camera. The rotational drive device 151 is centered on the optical axis of a lens arranged so that the entire camera unit 160 including the TDI sensor 1620, the lens unit 140, and the lens switching device 150 is imaged on the TDI sensor 1620. As a device that rotates 90 degrees around it.
Furthermore, it is possible to adopt a configuration in which the above-described modified examples are appropriately combined.

In the above description, the lens unit 140 is provided with a non-magnification aspect lens as an example. However, as shown in FIG. 14, it is not non-magnification, that is, in two directions orthogonal to each other. A plurality of normal lenses having the same magnification may be provided at different magnifications, for example, a low magnification lens 143 and a high magnification lens 144.
Furthermore, when using the normal lens, a known zoom mechanism 145 that is normally used in an optical system can be added to the lens unit 140. By providing the zoom mechanism 145, various magnifications can be obtained with one lens, and the number of lenses can be made one.

In the above description, the case where the TDI sensor 1620 is used as the configuration of the imaging unit in the camera unit 160 is taken as an example, but a line sensor can be used instead of the TDI sensor 1620.
As described above with reference to FIG. 19, the line sensor 1610 has a configuration in which a plurality of CCDs 1601 are arranged in a line along a column direction 1602 orthogonal to the scan direction 201 on a plane. The image resolution can be changed by changing the scanning speed.

  The present invention can be applied to an imaging apparatus that performs imaging or inspection of a pattern of a display device such as a PDP and a liquid crystal, and a pattern inspection apparatus.

1 is a perspective view illustrating a configuration of an imaging apparatus and a pattern inspection apparatus that are first embodiments of the present invention. FIG. It is a figure which shows an example of the pattern formed in the display device which is an example of the target of the imaging and test | inspection in the imaging device and test | inspection apparatus of FIG. FIG. 3 is a diagram showing an image obtained by imaging the display device shown in FIG. 2 by scanning along the Y direction with the imaging apparatus of FIG. 1. It is a figure which shows the other example of the pattern formed in the display device which is an example of the target of the imaging and test | inspection in the imaging device and test | inspection apparatus of FIG. FIG. 5 is a diagram illustrating an image captured by scanning the display device illustrated in FIG. 4 along the X direction with the imaging apparatus illustrated in FIG. 1. It is a figure which shows another example of the pattern of the display device which is an example of the target of the imaging and test | inspection in the imaging device and test | inspection apparatus of FIG. It is a perspective view which shows the structure of the imaging device which is 2nd Embodiment of this invention, and a pattern inspection apparatus. FIG. 8 is a diagram illustrating an image captured by scanning the display device illustrated in FIG. 6 along the Y direction with the imaging apparatus illustrated in FIG. 7. FIG. 8 is a diagram illustrating an image obtained by capturing the display device illustrated in FIG. 6 by scanning along the X direction with the imaging apparatus illustrated in FIG. 7. It is a perspective view which shows the modification of the imaging device and pattern inspection apparatus which are shown in FIG.1 and FIG.7. It is a perspective view which shows the other modification of the imaging device and pattern inspection apparatus which are shown in FIG.1 and FIG.7. It is a perspective view which shows another modification of the imaging device and pattern inspection apparatus which are shown in FIG.1 and FIG.7. It is a perspective view which shows the modification of the lens part with which the imaging device and pattern inspection apparatus which are shown in FIG.1 and FIG.7 are equipped. It is a perspective view which shows the other modification of the lens part with which the imaging device and pattern inspection apparatus which are shown in FIG.1 and FIG.7 are equipped. It is a figure for demonstrating the imaging method which is embodiment of this invention, Comprising: It is a figure which shows a pattern. It is a figure for demonstrating the imaging method which is embodiment of this invention, Comprising: It is a figure which shows the image obtained by imaging along the scanning direction of the pattern shown in FIG. It is a figure for demonstrating the imaging method which is embodiment of this invention. It is a figure for demonstrating the imaging method which is embodiment of this invention. It is a figure for demonstrating the structure of the line sensor which comprises the imaging part with which the imaging device and pattern inspection apparatus which are embodiment of this invention are equipped. It is a figure for demonstrating the structure of the TDI sensor which comprises the imaging part with which the imaging device and pattern inspection apparatus which are embodiment of this invention are equipped. It is a figure for demonstrating the structure of the non-magnification lens with which the imaging device and pattern inspection apparatus which are embodiment of this invention are equipped. It is a perspective view which shows the structure of the conventional image inspection apparatus. It is a figure which shows the pattern of the display device inspected with the conventional image inspection apparatus. It is a figure which shows the other structure in the conventional image inspection apparatus. It is a figure which shows the defect which becomes a problem in the pattern of a display device. It is a figure which shows the shape which does not become a problem comparatively in the pattern of a display device.

Explanation of symbols

120, 121 ... moving device, 140 ... lens part, 141 ... low magnification lens,
142 ... high magnification lens, 148 ... non-magnification lens, 150 ... lens switching device,
151 ... Rotation drive device, 172 ... Determination unit, 180 ... Control device,
190 ... display device, 201 ... scan direction, 205 ... extending direction,
206 ... orthogonal direction, 210 ... pattern,
1602 ... Column direction, 1610 ... Line sensor, 1620 ... TDI sensor.

Claims (14)

In an imaging method for obtaining image data by imaging while scanning a pattern in an inspection object,
An imaging method characterized by switching a scanning speed and an imaging lens according to a scanning direction in which the scanning is performed with respect to an extending direction of the pattern when imaging the pattern.   When the imaging lens has a high-magnification lens and a low-magnification lens having a low magnification compared to the high-magnification lens, and the scanning speed is high and the low-speed is slow compared to the high speed, the scanning direction is the above The imaging method according to claim 1, wherein when the pattern is in the same direction as the extending direction of the pattern, the imaging lens uses the low-magnification lens, and the scan speed is set to the low speed.   When the imaging lens has a high-magnification lens and a low-magnification lens having a low magnification compared to the high-magnification lens, and the scanning speed is high and the low-speed is slow compared to the high speed, the scanning direction is the above The imaging method according to claim 1, wherein the imaging lens uses the high-magnification lens and the scan speed is the high speed when the pattern is in an orthogonal direction perpendicular to the extending direction of the pattern.   When the pattern is imaged with the extension direction of the pattern and the scan direction being the same direction, and then the pattern is scanned along an orthogonal direction orthogonal to the extension direction of the pattern on the plane, the imaging is performed. The imaging method according to claim 2, wherein the imaging lens is switched from the low-power lens to the high-power lens, and the scan speed is switched from the low speed to the high speed. In the pattern inspection method for determining the quality of the pattern based on the image data obtained by scanning while scanning the pattern on the inspection object,
A pattern inspection method for obtaining the image data by switching a scanning speed and the imaging lens according to a scanning direction in which the scanning is performed with respect to an extending direction of the pattern when imaging the pattern. An imaging unit for imaging while scanning a pattern on the inspection object;
A lens unit that is provided between the imaging unit and the inspection object and has lenses with different magnifications;
A lens switching device that switches the lens that forms an image on the imaging unit;
A moving device that relatively moves the object to be inspected and the imaging unit in order to scan the imaging unit along the same direction as the extending direction of the pattern or an orthogonal direction orthogonal to the extending direction on a plane. When,
The relative movement of the inspection object and the imaging unit by the moving device switches the speed of the relative movement with respect to the moving device according to a scanning direction in which the imaging unit scans the pattern, and A control device for switching the lens with respect to the lens switching device;
An imaging apparatus comprising: The imaging unit has a line sensor structure in which CCDs are arranged in a line along a column direction orthogonal to the scan direction on a plane, and the lens unit includes a high magnification lens and the high magnification lens. It has a low magnification lens that is a low magnification, and the moving device performs the relative movement at a high speed and a low speed slower than the high speed,
When the scanning direction is the same as the extending direction of the pattern, the control device causes the low-power lens to face the imaging unit with respect to the lens switching device, and the low speed with respect to the moving device. The imaging apparatus according to claim 6, wherein the relative movement is performed. The imaging unit has a line sensor structure in which CCDs are arranged in a line along a column direction orthogonal to the scan direction on a plane, and the lens unit includes a high magnification lens and the high magnification lens. It has a low magnification lens that is a low magnification, and the moving device performs the relative movement at a high speed and a low speed slower than the high speed,
When the scanning direction coincides with an orthogonal direction orthogonal to the extending direction of the pattern on the plane, the control device causes the high-power lens to face the imaging unit with respect to the lens switching device and moves the movement The imaging apparatus according to claim 6, wherein the apparatus performs the relative movement at the high speed. The lens unit includes a non-magnification lens that has a high magnification in one direction and a low magnification in the other direction orthogonal to the one direction on a plane compared to the high magnification. A rotation drive device that rotates the non-magnification lens by 90 degrees about the center of the same-magnification lens as a rotation center, and the imaging unit includes the CCDs arranged in a line along a column direction orthogonal to the scan direction on a plane. The line sensor structure is arranged, the moving device performs the relative movement at a high speed and a low speed slower than the high speed,
When the scanning direction is the same as the extending direction of the pattern, the control device performs a rotation operation for causing the other direction of the non-magnification lens to coincide with the extending direction with respect to the lens switching device. The imaging apparatus according to claim 6, wherein the imaging apparatus performs the relative movement at the low speed with respect to the moving apparatus. The lens unit includes a non-magnification lens that has a high magnification in one direction and a low magnification in the other direction perpendicular to the one direction on a plane compared to the high magnification. A rotation drive device that rotates the non-magnification lens by 90 degrees about the center of the same-magnification lens as a rotation center, and the imaging unit includes the CCDs arranged in a line along a column direction orthogonal to the scan direction on a plane. The line sensor structure is arranged, the moving device performs the relative movement at a high speed and a low speed slower than the high speed,
When the scanning direction coincides with the orthogonal direction orthogonal to the extending direction of the pattern on the plane, the control device performs a rotation operation for causing the one direction of the non-magnification lens to coincide with the orthogonal direction. The imaging apparatus according to claim 6, wherein the imaging apparatus performs the relative movement at the high speed with respect to the moving apparatus. The lens unit includes a first non-magnification lens having a high magnification in the extending direction of the pattern and a low magnification in the orthogonal direction orthogonal to the extending direction on a plane compared to the high magnification. A second non-magnification lens having a low magnification in the direction and a high magnification in the orthogonal direction compared to the low magnification,
The imaging unit has a TDI (time delay integration) configuration in which a row of CCDs arranged in a row direction orthogonal to the scan direction on a plane is arranged in a plurality of rows along the scan direction,
The moving device performs the relative movement at a high speed and a low speed slower than the high speed,
When the scanning direction is the same as the extending direction of the pattern, the control device causes the second non-magnification lens to face the imaging unit with respect to the lens switching device, and The imaging apparatus according to claim 6, wherein the relative movement at the low speed is performed. The lens unit includes a first non-magnification lens having a high magnification in the extending direction of the pattern and a low magnification in the orthogonal direction orthogonal to the extending direction on a plane compared to the high magnification. A second non-magnification lens having a low magnification in the direction and a high magnification in the orthogonal direction compared to the low magnification,
The imaging unit has a TDI (time delay integration) configuration in which a row of CCDs arranged in a row direction orthogonal to the scan direction on a plane is arranged in a plurality of rows along the scan direction,
The moving device performs the relative movement at a high speed and a low speed slower than the high speed,
When the scanning direction coincides with the orthogonal direction, the control device causes the first non-magnification lens to face the imaging unit with respect to the lens switching device, and the high speed with respect to the moving device. The imaging apparatus according to claim 6, wherein relative movement is performed.   The imaging device according to claim 6, wherein the pattern is a striped pattern. An imaging device according to any one of claims 6 to 13,
A determination device that determines the quality of the pattern based on the image data of the pattern in the inspection object obtained from the imaging device;
A pattern inspection apparatus comprising:

Images