JP2006078896A - Drawing method using droplet ejection apparatus, droplet ejection apparatus, manufacturing method of electrooptical apparatus, electrooptical apparatus and electronic equipment - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a drawing method or the like using a droplet ejection apparatus by which drawing processing can be performed without producing drying unevenness within a filter region for a substrate where a plurality of filter regions are made. <P>SOLUTION: In the drawing method using the droplet ejection apparatus 1 by which drawing processing can be performed by using a functional droplet ejection head 71 where functional liquid is introduced toward the substrate Wt where m pieces of filter regions (m is an integer of ≥1) are made in a X-axis direction and n pieces of filter regions ((n) is an integer of ≥2) are made in a Y-axis direction, the drawing processing is performed by repeating main scanning for driving the functional droplet ejection head 71 by synchronizing with relative movement of the functional droplet ejection head 71 in the X-axis direction and sub scanning for relatively moving the functional droplet ejection head 71 in the Y-axis direction by a drawing line L, in a state where a drawing line L is constituted so as to be corresponding to a region drawing width R being width of the filter regions F of k pieces ((k) is a divisor of (n) and k≠n) in the Y-axis direction. <P>COPYRIGHT: (C)2006,JPO&NCIPI

Description

  The present invention is a drawing using a droplet discharge apparatus that performs drawing processing by discharging and landing functional droplets by an ink jet method by a functional droplet discharge head on a substrate of a plurality of types in which a plurality of filter regions are formed. The present invention relates to a method, a droplet discharge device, a method for manufacturing an electro-optical device, an electro-optical device, and an electronic apparatus.

Conventionally, a functional liquid droplet ejection head into which a functional liquid has been introduced is moved relative to a substrate such as a color filter of a liquid crystal display device in the X-axis direction, while functional liquid droplets are applied to a plurality of pixel regions formed on the substrate. 2. Related Art There is known a droplet discharge apparatus that performs drawing processing by repeatedly performing main scanning (discharge scanning) for discharging / landing the ink and sub-scanning for relatively moving a functional droplet discharge head in the Y-axis direction. Then, after the drawing process, a drying process is performed to vaporize the solvent in the functional liquid that has landed on each pixel region, thereby forming a colored layer (film forming portion) of the color filter. (For example, refer to Patent Document 1).
JP 2003-265996 A

  By the way, in order to increase the efficiency of color filter manufacturing, the substrate is configured as a multiple-take type in which a plurality of filter regions having a plurality of pixel regions are arranged in the X-axis direction and the Y-axis direction with a gap therebetween. It is considered. However, in the conventional droplet discharge device, the drawing line constituted by the plurality of discharge nozzles of the functional droplet discharge head does not correspond to the width of the filter region in the Y-axis direction. In some cases, drawing processing is performed by two or more main scans. In this case, the time from when the functional liquid droplets are ejected and landed to each pixel area until the drying process is performed between the range in which the main scan is performed first and the range in which the main scan is performed later. Unlikely, the vaporization amounts of the solvent before the drying treatment were different from each other. When the drying process is performed in such a state, there is a problem that uneven drying occurs between the two ranges. This drying unevenness causes color unevenness (display unevenness) in the color filter. In particular, this color unevenness is conspicuous at the boundary portion between the range where the main scan is performed first and the range where the main scan is performed later.

  The present invention relates to a drawing method and a droplet discharge method using a droplet discharge device capable of performing a drawing process on a multi-type substrate in which a plurality of filter regions are formed without causing drying unevenness in the filter region. It is an object to provide an apparatus, a method for manufacturing an electro-optical device, an electro-optical device, and an electronic apparatus.

  In the drawing method using the droplet discharge device of the present invention, m (m is an integer of 1 or more) filter regions having a plurality of pixel regions in the X-axis direction and n in the Y-axis direction with a gap. Using a functional liquid droplet ejection head into which a functional liquid has been introduced, a drawing process is performed by ejecting and landing functional liquid droplets on a plurality of pixel areas on a multi-type substrate (n is an integer of 2 or more). A drawing method using a droplet discharge device, which is a functional liquid so as to correspond to a region drawing width which is a width in the Y-axis direction of k filter regions (k is a divisor of n and k ≠ n). Main scanning for discharging and driving the functional liquid droplet ejection head in synchronization with the relative movement of the functional liquid droplet ejection head in the X-axis direction with respect to the substrate in a state in which a drawing line is configured by a plurality of ejection nozzles of the droplet ejection head. , Relative to the substrate for the functional liquid droplet ejection head in the Y-axis direction Repeat sub-scanning for moving the, and performing a drawing process.

  The droplet discharge device of the present invention includes m filter regions having a plurality of pixel regions in the X-axis direction (m is an integer of 1 or more) and n filter regions (n Is an integer greater than or equal to 2) A droplet that performs drawing processing by ejecting and landing functional liquid droplets on multiple pixel areas using a functional liquid droplet ejection head that has been introduced into a multiple-taken-type substrate. An ejection device, which controls a functional liquid droplet ejection head, a moving means for moving the functional liquid droplet ejection head relative to the substrate in the X-axis direction and the Y-axis direction, and the functional liquid droplet ejection head and the moving means And a control means for discharging functional liquid droplets so as to correspond to an area drawing width which is a width in the Y-axis direction of k filter areas (k is a divisor of n and k ≠ n). With a drawing line configured by multiple ejection nozzles on the head, Synchronous with the relative movement of the functional liquid droplet ejection head in the X-axis direction, main scanning for driving the functional liquid droplet ejection head to be driven, and the functional liquid droplet ejection head relative to the substrate relative to the drawing line in the Y-axis direction In this case, the drawing process is performed by repeatedly performing the sub-scan that is moved in an automatic manner.

  According to these configurations, the functional liquid droplets are ejected and landed in a state where the drawing lines correspond to the area drawing widths, so that the functional liquid droplets are subjected to one main scan for each filter region. Thus, the drawing process is not performed in a plurality of main scans for each filter region. For this reason, in each filter area, the time from when functional droplets are ejected and landed to each pixel area until the drying process is performed is substantially the same, and the drying process is performed with the amount of the solvent of the functional liquid being uniform. Done. Accordingly, the drawing process can be performed on the multi-type substrate without causing uneven drying in the filter region.

One main scan refers to relative movement (forward movement and / or backward movement) of the functional liquid droplet ejection head that is performed one or more times between sub-scans.
Further, it is preferable that the drawing line is constituted by all the discharge nozzles of the functional liquid droplet discharge head, and according to this, the drawing process is performed by discharging and landing the functional liquid droplets from all the discharge nozzles. There is no possibility that the discharge nozzle is not driven to discharge (is idle), and there is no possibility that the functional liquid of the discharge nozzle dries (nozzle clogging) and the discharge function deteriorates.

  The drawing method using another droplet discharge device of the present invention includes m filter areas having a plurality of pixel areas in the X-axis direction (m is an integer of 1 or more) and a Y-axis direction with a gap. A plurality of functional liquids of different colors are introduced into the n-type (n is an integer of 2 or more) and a plurality of functional liquids are introduced at the same position in the Y-axis direction. A drawing method using a droplet discharge apparatus that performs drawing processing by discharging and landing functional droplets on a plurality of pixel areas using a head, and k (k is a divisor of n and k ≠ n) In a state where a plurality of color-specific drawing lines are configured by a plurality of ejection nozzles of a plurality of color-specific functional liquid droplet ejection heads so as to correspond to a region rendering width that is the width of the filter region in the Y-axis direction, Synchronized with the relative movement of the functional droplet discharge head in the X-axis direction The drawing process is repeated by repeating the main scanning for discharging each functional liquid droplet ejection head and the sub-scan for moving each functional liquid droplet ejection head relative to the substrate in the Y-axis direction by the drawing line. It is characterized by.

  In another droplet discharge device of the present invention, m filter regions having a plurality of pixel regions are provided in the X-axis direction (m is an integer of 1 or more) and n filter regions (n Is an integer greater than or equal to 2) A plurality of color functional liquids are respectively introduced into a multi-type substrate that has been prepared, and a plurality of functional liquid droplet ejection heads arranged at the same position in the Y-axis direction are used. Is a droplet discharge device that performs drawing processing by discharging and landing functional droplets on a pixel area of a plurality of functional droplet discharge heads for each color and each functional droplet discharge head with respect to a substrate in the X-axis direction. And a moving means for relatively moving in the Y-axis direction, and a control means for controlling each of the functional liquid droplet ejection heads and the moving means. The number of control means is k (k is a divisor of n and k ≠ n ) To correspond to the area drawing width which is the width in the Y-axis direction of the filter area Synchronized with the relative movement of each functional liquid droplet ejection head in the X-axis direction with respect to the substrate in a state where a plurality of color-specific drawing lines are configured by a plurality of ejection nozzles of the functional liquid droplet ejection heads for each color The drawing process is performed by repeating the main scanning for discharging and driving each functional liquid droplet ejection head and the sub-scan for moving each functional liquid droplet ejection head relative to the substrate in the Y-axis direction by the drawing line. It is characterized by.

  According to these configurations, functional liquid droplets are ejected and landed in a state in which a plurality of drawing lines for each color and area drawing widths correspond to each other, so that each filter area can be scanned once. A plurality of color functional droplets are ejected and landed, and drawing processing is not performed for each filter region by a plurality of main scans. For this reason, similarly to the above, in each filter region, the drying process is performed in a state where the vaporization amount of the solvent of the functional liquid is uniform, and drying unevenness does not occur. Therefore, it is possible to perform the drawing process on the multi-pattern substrate without causing color unevenness in the filter region.

Note that, in the same way as described above, one main scanning means relative movement (forward movement and / or recovery) of the functional liquid droplet ejection head performed once or a plurality of times between the sub scanning and the sub scanning. Motion). Similarly to the above, it is preferable that a plurality of drawing lines for each color is constituted by all the discharge nozzles of the plurality of functional droplet discharge heads for each color.
Furthermore, in the color filter, the three functional droplets of R (red), G (green), and B (blue) land on the pixel area based on a predetermined color arrangement pattern, and the functional droplets land 3 A so-called pixel is constituted by the pixel area, that is, the pixel area on which the R functional droplet has landed, the pixel area on which the G functional liquid droplet has landed, and the pixel area on which the B functional liquid droplet has landed. . The above-mentioned R, G, and B color functional liquids are commonly used as the multi-color functional liquids, but C (cyan) and E (emerald) are added to R, G, and B to improve color reproducibility. In addition, four color functional liquids may be used, and functional liquids of other combinations / numbers of colors may be used.

  In the above-described liquid droplet ejection apparatus, a plurality of functional liquid droplet ejection heads are provided, and the plurality of functional liquid droplet ejection heads are mounted on a plurality of carriages to form a plurality of carriage units, and a drawing line is provided for each carriage unit. It is preferable that partial drawing lines including a plurality of discharge nozzles of a plurality of functional liquid droplet discharge heads are continuously formed in the Y-axis direction.

  In the other droplet discharge device, a plurality of functional droplet discharge heads for each color are provided, and a plurality of functional droplet discharge heads for each color are mounted on a plurality of carriages to form a plurality of carriage units. The drawing line is preferably configured such that partial drawing lines composed of a plurality of ejection nozzles of a plurality of functional droplet ejection heads of each color of each carriage unit are continuously arranged in the Y-axis direction.

According to these configurations, a drawing line can be configured by using a plurality of functional liquid droplet ejection heads having a standard number of ejection nozzles, and a plurality of functional liquid droplet ejection heads are distributed and mounted on a plurality of carriages. As a result, the number of functional droplet discharge heads constituting each carriage unit is reduced. Therefore, the mutual alignment of the functional droplet discharge heads and the replacement operation of the functional droplet discharge heads can be easily performed for each carriage unit. It can be carried out.
In these cases, the plurality of carriage units are preferably arranged so as to be displaced from each other in the X-axis direction. According to this, physical interference between the carriage units can be avoided.

In the above droplet discharge apparatus, the moving means has an X-axis table for mounting the substrate and moving the substrate in the X-axis direction, and a Y-axis table for individually moving a plurality of carriage units in the Y-axis direction. Then, the control means moves each functional liquid droplet ejection head by the drawing line via main scanning for ejecting each functional liquid droplet ejection head in synchronization with the movement of the substrate in the X-axis direction and the carriage unit. It is preferable to perform the drawing process by repeating the sub-scanning.
Further, in this case, head storage means for storing each functional liquid droplet ejection head in a function maintaining state is provided on the movement trajectory of the plurality of carriage units by the Y-axis table. The maximum width drawing line is configured to cover the longest area drawing width of the substrate that can be mounted on the X-axis table, and the control means is mounted on the X-axis table among a plurality of carriage units. It is preferable to perform drawing processing by operating each functional liquid droplet ejection head of the minimum number of carriage units constituting a drawing line corresponding to the drawing width of the area of the substrate, and to make the other carriage units face the head storage means. .

In the other droplet discharge device, the moving means includes an X-axis table that mounts the substrate and moves the substrate in the X-axis direction, and a Y-axis table that individually moves a plurality of carriage units in the Y-axis direction; The control means includes a main scanning for driving each functional liquid droplet ejection head in synchronization with the movement of the substrate in the X-axis direction, and each functional liquid droplet ejection head for each drawing line via the carriage unit. It is preferable to perform the drawing process by repeating the sub-scan to be moved.
Furthermore, in this case, head storage means for storing each functional liquid droplet ejection head in a function maintaining state is provided on the movement trajectory of the plurality of carriage units by the Y-axis table. The maximum width drawing line composed of the drawing lines is configured to cover the longest area drawing width of the substrate that can be mounted on the X-axis table, and the control means includes the X-axis table among the plurality of carriage units. Each functional liquid droplet ejection head of the minimum number of carriage units constituting a plurality of color-specific drawing lines corresponding to the area drawing width of the mounted substrate is operated to perform drawing processing, and other carriage units are stored in the head storage means. It is preferable to make it face.

  According to these configurations, in accordance with the area drawing width of the mounted substrate, the functional liquid droplet ejection heads mounted on the minimum number of carriage units are operated to perform the drawing process, and other carriage units are used. By causing the mounted functional liquid droplet ejection head to face the head storage means, it is possible to prevent the ejection function from being deteriorated due to, for example, drying of the ejection nozzles of the functional liquid droplet ejection head that is not in operation.

  A method for manufacturing an electro-optical device according to the present invention is characterized in that a film-forming portion made of functional droplets is formed on a substrate using the above-described droplet discharge device.

  The electro-optical device according to the present invention is characterized in that a film-forming portion made of functional droplets is formed on a substrate using the above-described droplet discharge device.

  According to these configurations, a high-quality electro-optical device can be efficiently manufactured because a droplet discharge device that can perform drawing processing without unevenness of drying (color unevenness) on a multi-pattern substrate is manufactured. It can be manufactured. As an electro-optical device (flat panel display: FPD), a color filter, a liquid crystal display device, an organic EL device, a PDP device, an electron emission device, and the like are conceivable. The electron emission device is a concept including a so-called FED (Field Emission Display) or SED (Surface-conduction Electron-Emitter Display) device. Further, as the electro-optical device, devices including metal wiring formation, lens formation, resist formation, light diffuser formation, and the like are conceivable.

  An electronic apparatus according to an aspect of the invention includes the electro-optical device manufactured by the above-described method for manufacturing the electro-optical device or the above-described electro-optical device.

  In this case, examples of the electronic device include a mobile phone and a personal computer equipped with a so-called flat panel display, and various electric products.

  Hereinafter, a droplet discharge device to which the present invention is applied will be described with reference to the accompanying drawings. The liquid droplet ejection apparatus according to the present embodiment is installed in a drawing system incorporated in an FPD production line such as a liquid crystal display device, and a functional liquid ejection head that uses special liquid such as special ink or light-emitting resin liquid. Then, a colored layer (film forming portion) is formed by functional droplets on a substrate of a color filter such as a liquid crystal display device. Therefore, first, a substrate (work) to be drawn by the droplet discharge device 1 will be described. Note that values such as the size of the substrate described below are approximate numbers.

  As shown in FIG. 1, the substrate W is a transparent substrate made of quartz glass, polyimide resin, or the like, and the size thereof is 1500 mm × 1800 mm. A pair of substrate alignment marks (not shown) whose positions are recognized by the introduced droplet discharge device 1 (see FIG. 2) are formed on both long side portions of the substrate W, and the long sides are in the Y-axis direction. Is set so as to be parallel to (described later).

  Further, the substrate W is of a plurality of types, and a plurality of filter regions F in which a plurality of pixel regions 507a are configured in a matrix are formed in advance with a gap. There are various types of substrates W depending on the number of filter regions F formed, and in this embodiment, a three-sided substrate Wt (same as above) in which three filter regions F having a size of 1280 mm × 540 mm are formed. Two types are used: an eight-sided substrate We (see FIG. 8B) in which eight filter regions F having a size of 730 mm × 350 mm are formed. In the three-chamfered substrate Wt, one filter region F is formed in the X-axis direction and three filter regions F are formed in the Y-axis direction with a gap (45 mm in the Y-axis direction). Further, in the eight-chamfered substrate We, there are two filter regions F in the X-axis direction and four in the Y-axis direction with a gap (20 mm in the X-axis direction and 20 mm in the Y-axis direction). .

  Note that the three filter regions F of the three-sided substrate Wt are arranged in order from the drawing area 31 side to be described later to the maintenance area 32 side (from the right side to the left side in FIG. 1) in order. Region Fb and third filter region Fc (see FIG. 8). Of the eight filter regions F of the eight-chamfered substrate We, four filter regions F on the forward side (upper side in FIG. 1) of the substrate W, which will be described later, are directed from the drawing area 31 side to the maintenance area 32 side. The first filter region Fa, the second filter region Fb,..., The fourth filter region Fd in this order (from the right side to the left side in the figure), and the return side of the substrate W described later (the lower side in the figure) ) Are designated as a fifth filter region Fe, a sixth filter region Ff,..., An eighth filter region Fh in order from the drawing area 31 side to the maintenance area 32 side (see FIG. 12). ).

  Each pixel region 507a is a rectangular recess in a plan view surrounded by a partition wall 507b, and has three colors of R (red), G (green), and B (blue) by a functional liquid droplet ejection head 71 described later. When the film forming portions (colored layers 508R, 508G, and 508B) are formed, they become the landing areas of the functional liquid droplets (see FIG. 16). In this case, three pixel areas where the functional liquid droplets land, that is, a pixel area where the R functional liquid droplets land, a pixel area where the G functional liquid droplets land, and a pixel where the B functional liquid droplets land A region constitutes a so-called pixel.

  The color arrangement pattern of the plurality of pixel regions 507a in this embodiment is a stripe arrangement in which all the colors are the same in the matrix row (Y-axis direction). However, a stripe arrangement in which all the columns in the matrix (in the X-axis direction) have the same color may be used. Furthermore, the arbitrary three pixels arranged in the vertical and horizontal rows of the matrix may be a mosaic arrangement of three colors of R, G, and B, or may be a delta arrangement in which a plurality of pixel regions 507a form a staggered pattern. Good.

  Next, the droplet discharge device according to the present invention will be described. As shown in FIGS. 2 to 4, the droplet discharge device 1 is capable of discharging functional liquids of R, G, and B colors onto the substrate W, and has a large common platform (not shown) installed on the floor. ), A drawing device 11 that is widely mounted on the entire area of the common frame and on which the functional liquid droplet ejection head 71 (carriage unit 21) is mounted, and a maintenance means 12 attached to the drawing device 11, and includes a maintenance means. 12, the function of the functional liquid droplet ejection head 71 is maintained and restored, and the drawing apparatus 11 performs a drawing process for discharging the functional liquid onto the substrate W. In addition, the droplet discharge device 1 incorporates a controller 13 (control unit 122, see FIG. 7) that is connected to a host computer 2 that controls the entire drawing system and controls each part of the droplet discharge device 1. Yes. Further, although not shown, the droplet discharge device 1 is provided with a substrate carry-in / out device configured by a robot arm, and the substrate W is introduced into the droplet discharge device 1 through the substrate carry-in / out device. Is done.

  First, a drawing device 11 in the droplet discharge device 1 and a drawing process using the drawing device 11 will be described. The drawing apparatus 11 is installed on a common frame and a plurality of (five) carriage units 21 each including a plurality (24) of functional liquid droplet ejection heads 71 and a carriage 62 on which the functional droplet discharge heads 71 are mounted. An X-axis table 22 for moving the substrate W in the X-axis direction, and the five carriage units 21 individually moving in the Y-axis direction. A Y-axis table 23 to be stored, a functional liquid tank (not shown) for storing the functional liquid, and a pressure adjusting valve (not shown) for adjusting the hydraulic head pressure of the functional liquid supplied to each functional liquid droplet ejection head 71. Functional liquid supply means (not shown) for supplying functional liquid to the functional liquid droplet ejection head 71 and image recognition means 24 having various cameras for recognizing images of the substrate W, the carriage unit 21 and the like. There.

  An area where the movement locus of the substrate W by the X-axis table 22 and the movement locus of the carriage unit 21 by the Y-axis table 23 intersect is a drawing area 31 where drawing processing is performed. An area outside the X axis table 22 on the movement locus of the carriage unit 21 is a maintenance area 32, and the maintenance means 12 is installed in the maintenance area 32. On the other hand, the area on the front side of the X-axis table 22 is a substrate carry-in / out area 33 where the substrate W is carried into and out of the droplet discharge device 1.

The X-axis table 22 is connected to the suction table 41 for sucking and setting the introduced substrate W and the substrate θ for finely adjusting (θ correction) the θ position of the substrate W via the suction table 41. An axis table 42, a set table 43 that supports the substrate θ-axis table 42, an X-axis air slider 44 that slidably supports the set table 43 in the X-axis direction, and an adsorption table 41 that extends in the X-axis direction. A pair of left and right X-axis linear motors (not shown) that move the substrate W in the X-axis direction, and a pair of X-axis guide rails 45 that are parallel to the X-axis linear motor and guide the movement of the X-axis air slider 44. , 45 and an X-axis linear scale (not shown) for grasping the position of the suction table 41. Then, when the pair of X-axis linear motors are driven, the X-axis air slider 44 is moved in the X-axis direction while the pair of X-axis guide rails 45 and 45 are used as guides, and the substrate W set on the suction table 41 becomes X Move in the axial direction.
In the present embodiment, the time when the substrate W (the suction table 41) moves from the substrate carry-in / out area 33 side to the drawing area 31 side (from the lower side to the upper side in FIG. 3) is defined as the forward movement. When moving to the carry-in / out area 33 side (from the upper side to the lower side in the figure), the return movement is assumed.

  The suction table 41 is formed in a substantially square shape in plan view, and the length of one side thereof is set to 1800 mm in accordance with the length of the long side of the substrate W, and the substrate W is placed vertically (the long side of the substrate W is It can be set in any orientation of the horizontal direction (parallel to the X-axis direction) and horizontal placement (the long side of the substrate W is parallel to the Y-axis direction) and at the center center. However, in this embodiment, the substrate W is set horizontally.

  The range of reciprocation by the X-axis table 22 is 2000 mm so that the substrate W can face the drawing area 31 from end to end (1500 mm) in the X-axis direction. Moreover, the moving speed of the X-axis table 22 is 200 mm / sec. Therefore, reciprocation by the X-axis table 22 requires 10 seconds for one way.

  On the set table 43, a dot dropout inspection table 116 is disposed adjacent to the suction table 41 on the forward side of the substrate W (left side in FIG. 4). The dot dropout inspection table 116 is provided with a test paper that can be wound up on its upper surface. The functional liquid droplets are ejected from the full-function liquid droplet ejection head 71 to the test paper, and the drawing is performed. The result is image-recognized by a dot recognition camera 102, which will be described later, to inspect for the presence or absence of defective ejection such as missing dots or flying bends (dot missing inspection). Further, a regular flushing box 114 is provided on the set table 43 adjacent to the dot missing inspection table 116 on the forward side of the substrate W.

  On the other hand, the Y-axis table 23 is supported on a pair of front and rear support stands 56, 56 extending in the Y-axis direction, spans between the drawing area 31 and the maintenance area 32, and draws five carriage units 21. These are moved individually between the area 31 and the maintenance area 32. The Y-axis table 23 includes five bridge plates 51 that vertically suspend the five carriage units 21 and five sets that support the five bridge plates 51 with both ends so that the five bridge plates 51 are aligned in the Y-axis direction. A Y-axis slide table (not shown) and a pair of front and rear Y-axis linear motors (not shown) extending in the Y-axis direction and moving each bridge plate 51 in the Y-axis direction via each set of Y-axis slide tables And two Y-axis guide rails (not shown) each extending in the Y-axis direction for guiding the movement of the five bridge plates 51 (not shown) and the movement positions of the carriage units 21 are detected. Y-axis linear scale (not shown).

When the pair of Y-axis linear motors is driven, the five sets of Y-axis slide tables can be moved independently, and the five carriage units 21 can be individually moved in the Y-axis direction. Of course, it is also possible to move the five carriage units 21 together in the Y-axis direction by simultaneously moving the five sets of Y-axis slide tables in the Y-axis direction.
In this embodiment, the five carriage units 21 are mounted side by side on the single Y-axis table 23. However, a plurality of Y-axis tables 23 are provided, and the five carriage units 21 are divided and mounted. May be.

  Although not shown in the drawings, on each bridge plate 51, 24 electrical unit units for driving and discharging 24 functional liquid droplet ejection heads 71 mounted on the corresponding carriage units 21, and 24 units for supplying functional liquids to these units. And a functional liquid tank (not shown). The five electrical units for heads are arranged in a staggered manner so that they do not interfere with each other (noise prevention), and the five functional liquid tanks face each electrical unit for heads. Arranged in a staggered pattern.

The five carriage units 21 are respectively suspended from the five bridge plates 51 of the Y-axis table 23 and arranged in the Y-axis direction. Each carriage unit 21 includes 24 functional liquid droplet ejection heads 71. The head unit 61 (see FIG. 5) and a carriage 62 on which the head unit 61 and 24 pressure regulating valves are mounted. The five carriage units 21 are displaced in the X-axis direction and arranged in a staggered manner so as to avoid physical interference between the carriage units 21.
The five carriage units 21 are arranged in order from the drawing area 31 side to the maintenance area 32 side (from the right side to the left side in FIG. 3) in order, the first carriage unit 21a, the second carriage unit 21b,. The fifth carriage unit 21e is assumed.

  Each carriage 62 includes a support plate (not shown) for positioning and fixing the head unit 61 and the 24 pressure regulating valves, a carriage body 66 for holding the support plate, a carriage body 66 and a carriage body 66. A head θ axis table 67 that is coupled to the upper portion and finely adjusts the θ position of the head unit 61 via the carriage body 66 (θ axis correction), and is coupled to the upper portion of the head θ axis table 67. A head Z-axis table 68 for finely adjusting (Z-axis correction) the Z position of the head unit 61 via the carriage body 66 is provided. Although not shown in the drawings, each support plate is used as a reference for positioning (position recognition) each carriage unit 21 (head unit 61) in the X-axis, Y-axis, and θ-axis directions on the premise of image recognition. A reference pin is provided.

  As shown in FIG. 5, the head unit 61 is composed of 24 functional liquid droplet ejection heads 71 and a thick plate having a substantially parallelogram shape in plan view made of stainless steel or the like. It has a head plate 72 for positioning and a head holding member 73 for fixing each functional liquid droplet ejection head 71 from the back surface side. The 24 functional liquid droplet ejection heads 71 are divided into 8 groups of 8 head groups 71u.

  As shown in FIG. 6, the functional liquid droplet ejection head 71 has a so-called double structure, a functional liquid introduction part 81 having two connection needles 82, and a double head substrate that is continuous with the functional liquid introduction part 81. 83, and a head main body 84 which is connected to the lower side (upper side in the figure) of the functional liquid introduction portion 81 and in which an in-head flow path filled with the functional liquid is formed. The connection needle 82 is connected to the functional liquid tank via a pressure regulating valve, and supplies the functional liquid to the in-head flow path of the functional liquid droplet ejection head 71. Further, the head substrate 83 is provided with two connectors 85, 85, and each connector 85 is connected to the above-mentioned head electrical unit (head driver 131, see FIG. 7) via a flexible flat cable. ing.

  The head main body 84 includes a cavity 91 formed of a piezoelectric element or the like, and a nozzle plate 92 having a nozzle surface 93 in which two nozzle rows 94 and 94 are formed in parallel to each other. Each nozzle row 94 has a length of 1 inch (25.4 mm), and each nozzle row 94 is composed of 180 nozzles 95 arranged at an equal pitch (140 μm). Both nozzle rows 94 are shifted from each other by a half pitch (70 μm) in the nozzle row direction, and the dot density (resolution) is 360 dpi.

  Further, due to the structure of the flow path in the head, the discharge amount from the nozzles 95 located at both ends becomes larger than the discharge amount from the nozzle 95 located at the center portion, so that each of the ten nozzles at both ends. 95 is a non-ejection nozzle, and 160 nozzles 95 in the center are used as ejection nozzles, so that the functional liquid is ejected only from the ejection nozzle and the functional liquid is not ejected from the non-ejection nozzle. Therefore, a partial drawing line Lp (see FIG. 5) is configured by 160 discharge nozzles in the center of each nozzle row 94.

  As shown in FIG. 5, each of the three functional liquid droplet ejection heads 71 in each group has two nozzle rows 94 and 94 parallel to the Y-axis direction and is disposed at the same position in the Y-axis direction. From the upper side of the figure, an R-system functional liquid droplet ejection head 71R, a G-system functional liquid droplet ejection head 71G, and a B-system functional liquid droplet ejection head 71B into which functional liquids of R, G, and B colors are respectively introduced. ing. That is, the 24 functional liquid droplet ejection heads 71 of each carriage unit 21 include 8 R system functional liquid droplet ejection heads 71R that eject R functional liquid droplets and 8 functional liquid droplet ejection heads that eject G functional liquid droplets. The system is composed of a G-system functional liquid droplet ejection head 71G and eight B-system functional liquid droplet ejection heads 71B that eject B functional liquid droplets.

Of the eight head groups 71 u of each carriage unit 21, four nozzle groups 95 of the four function liquid droplet ejection heads 71 for each color continue in the Y-axis direction. As described above, the head groups 71u are arranged stepwise while shifting in the Y-axis direction, and the other four groups of head groups 71u are rearranged in the Y-axis direction with respect to the four groups of head groups 71u. Thus, they are arranged in the same step shape as described above.
In each functional liquid droplet ejection head 71, the connector 85 is positioned outside the head plate 72, and the head main body 84 is fixed to the position head plate 72 inside the head plate 72.

  A partial drawing line Lp for each color is formed by all the nozzles 95 (discharge nozzles) of all (eight) functional droplet discharge heads 71 for each color of each carriage unit 21, and all (5) partial drawing lines for each color. Lp is continuous in the Y-axis direction to form a maximum width drawing line Lm for each color. Therefore, the length of the partial drawing line Lp is 180.6 mm (25.4 mm / 180 × 160 × 8), and the length of the maximum width drawing line Lm is 903 mm (180.6 mm × 5). According to this, the drawing line L can be configured by using a plurality of functional liquid droplet ejection heads 71 having a standard number of nozzles, and a plurality of functional liquid droplet ejection heads 71 of each color are distributed to a plurality of carriages 62. As a result, the number of functional liquid droplet ejection heads 71 constituting each carriage unit 21 is reduced. Therefore, mutual alignment of the functional liquid droplet ejection heads 71 performed for each carriage unit 21 and functional liquid droplet ejection are performed. The replacement work of the head 71 can be easily performed.

  Although details will be described later, the droplet discharge device 1 discharges and lands functional droplets of three colors in each filter region F in one main scan. For this reason, drawing processing is not necessarily performed in a state in which the plurality of maximum width drawing lines Lm for each color are configured by all the carriage units 21, and k pieces (k is in the Y-axis direction of the substrate W) by at least one carriage unit 21. Drawing processing is performed in a state in which a plurality of drawing lines L for each color corresponding to the area drawing width R corresponding to the area drawing width R, which is a divisor of the number n of filter areas arranged and k ≠ n) in the Y-axis direction, are configured. That is, the operating unit group 26 composed of the minimum number of carriage units 21 constituting a plurality of color-specific drawing lines L corresponding to the area drawing width R of the substrate W mounted on the X-axis table 22 is moved to the drawing area 31. While moving the operation unit group 26 relative to the substrate W facing the drawing area 31, the functional liquid droplet ejection head 71 discharges the functional liquid onto the substrate W to perform drawing processing, and the operation unit group The drawing standby unit group 27 composed of the carriage units 21 other than 26 is moved to the maintenance area 32, and the maintenance process for storing the respective functional liquid droplet ejection heads 71 in the function maintaining state is performed (FIG. 9, FIG. 9). (See FIG. 13).

  Specifically, when the substrate W mounted on the X-axis table 22 is a three-chamfered substrate Wt, as described above, since the three-chamfered substrate Wt is n = 3, k = 1, and the region The drawing width R is 540 mm. Therefore, the minimum number of carriage units 21 constituting the drawing lines L of the respective colors corresponding to the area drawing width R of the three-sided substrate Wt is three. That is, the operating unit group 26 includes three carriage units 21 (see FIG. 9).

  Further, when the substrate W mounted on the X-axis table 22 is the eight-chamfered substrate We, as described above, since the eight-chamfered substrate We is n = 4, k = 1 or 2. When k = 1, the area drawing width R is 350 mm. Therefore, the minimum number of carriage units 21 constituting the drawing line L corresponding to the area drawing width R of the eight-sided substrate We is two. In other words, the operating unit group 26 includes two carriage units 21. When k = 2, the area drawing width R is 720 mm. Therefore, the minimum number of carriage units 21 constituting the drawing line L corresponding to the area drawing width R of the eight-sided substrate We is four. In other words, the operating unit group 26 includes four carriage units 21 (see FIG. 13).

In the present embodiment, the longest area drawing width R of the substrate W that can be mounted on the X-axis table 22 is 720 mm (when k = 2 for the eight chamfered substrate We), and this longest area drawing width R is all ( 5) Covered by a maximum width drawing line Lm (903 mm) composed of all (5) partial drawing lines Lp of each color corresponding to the carriage unit 21.
Note that the longest drawing width of the region can be covered also by the drawing line L (720 mm) constituted by the four carriage units 21, so that the four carriage units 21 are replaced with the five carriage units 21. The structure provided with may be sufficient. Further, it is preferable to change the number of carriage units 21 according to the longest region drawing width R of the substrate W that can be mounted.

  Although not shown, the functional liquid supply means corresponds to the 24 functional liquid droplet ejection heads 71 of each carriage unit 21 and includes a tank unit including 24 functional liquid tanks that store the functional liquid, and each functional liquid tank. And 24 pressure regulating valves for adjusting the water head pressure between the respective functional liquid droplet ejection heads 71, and a liquid supply tube for connecting the respective functional liquid tanks and the functional liquid droplet ejection heads through the respective pressure regulating valves. is doing. The 24 functional liquid tanks store the 8 functional liquid tanks for storing the R functional liquid and the G functional liquid so as to correspond to the 8 functional liquid droplet ejection heads 71 respectively for R, G, and B. 8 functional liquid tanks and 8 functional liquid tanks for storing the B functional liquid. Then, the functional liquid in each functional liquid tank is introduced into the corresponding functional liquid droplet ejection head 71 via the liquid supply tube and the pressure adjustment valve.

  As shown in FIGS. 2 to 4, the image recognition means 24 is arranged so as to face both the front and rear sides of the substrate carry-in / out area 33, and has two substrate alignment marks respectively formed on both long side portions of the substrate W. A head recognition camera (not shown) that is connected to two substrate recognition cameras 101 that recognize images and an X-axis air slider 44 of the X-axis table 22 and recognizes two reference pins of each carriage 62 (support plate). And image recognition of functional droplets (dots) 2 mounted on the Y-axis table 23 so as to be movable in the Y-axis direction by a camera moving mechanism (not shown) attached to the Y-axis table 23, respectively. And a dot recognition camera 102. Based on the image recognition results of these various cameras, position correction of the substrate W and the head unit 61 and the above-described dot dropout inspection are performed.

  Next, with reference to FIGS. 2 to 4, the maintenance means 12 in the droplet discharge device 1 and the function maintenance / recovery processing of the functional droplet discharge head 71 by this will be described. The maintenance unit 12 stores the functional liquid droplet ejection head 71 mounted on the drawing standby unit group 27 including the carriage unit 21 on the maintenance area 32 side other than the operating unit group 26 in a state in which the ejection function is maintained and the ejection. It restores functionality.

  The maintenance means 12 is disposed in the maintenance area 32, and includes five suction units 111 that perform suction (cleaning) for removing the functional liquid thickened in the functional liquid droplet ejection head 71, and functional liquid droplets. Two wiping units 112 for wiping the nozzle surface 93 of the discharge head 71, and seven unit lifting mechanisms (not shown) for supporting the five suction units 111 and the two wiping units 112 so as to be individually liftable. And an angle mount 113 that supports them. Further, the maintenance means 12 includes a flight observation unit 117 disposed on the drawing area 31 side of the wiping unit 112, a regular flushing box 114 disposed on the set table 43, and both front and rear sides of the suction table 41. It has a pair of pre-drawing flushing boxes 115, 115 arranged.

  The five suction units 111 respectively correspond to the five carriage units 21, and each suction unit 111 faces each carriage unit 21 from below, and the nozzle surfaces of the 24 functional liquid droplet ejection heads 71. Twenty-four caps (not shown in the figure) are provided for sealing to 93. Thereby, it can prevent that the functional liquid of the nozzle 95 of each function liquid droplet discharge head 71 dries, and a discharge function falls. Further, the functional liquid is sucked from the nozzle 95 with each cap sealed to the nozzle surface 93, and the functional liquid thickened in the functional liquid droplet ejection head 71 is discharged.

  The two wiping units 112 are arranged on the drawing area 31 side of the suction unit 111 and are aligned in the X-axis direction corresponding to the staggered arrangement of the five carriage units 21. Each wiping unit 112 uses the wiping sheet 112a to wipe off the nozzle surface 93 that is contaminated with the functional liquid by suction or the like of the functional liquid droplet ejection head 71. The discharge function of the functional liquid droplet discharge head 71 in which nozzle clogging has occurred can be recovered by the suction process and the wiping.

  The flight observation unit 117 is composed of a CCD camera, a strobe, and the like. The flight observation unit 117 images the flight state of the functional liquid droplets ejected from each functional liquid droplet ejection head 71, and based on the image recognition result, the functional liquid It is inspected for flying bends of droplets and satellites (fine particles floating in the form of mist due to the discharged liquid), and whether or not there is clogging of the nozzles.

  The regular flushing box 114 is for receiving regular flushing performed when the substrate W is replaced. When the suction table 41 faces the substrate carry-in / out area 33 for exchanging the substrate W, the periodic flushing box 114 faces the drawing area 31, and the functional liquid droplet ejection head 71 is provided. The waste discharge from all the nozzles 95 (discharge nozzles) is received. By this regular flushing, it is possible to prevent the nozzle 95 of the functional liquid droplet ejection head 71 from being dried and lowering the ejection function (nozzle clogging).

  The pair of pre-drawing flushing boxes 115, 115 are for receiving pre-drawing flushing performed immediately before the functional liquid is discharged onto the substrate W (during a series of drawing operations). The suction table 41 is disposed so as to sandwich the suction table 41 in the X-axis direction, and waste discharge from all the nozzles 95 (discharge nozzles) performed immediately before the discharge drive of the functional liquid droplet discharge head 71 accompanying the reciprocation of the substrate W is performed. To receive. By this pre-drawing flushing, the functional liquid droplets can be ejected onto the substrate W while the functional liquid droplet ejection from the functional liquid droplet ejection head 71 is stable.

  The regular flushing box 114 and the pair of pre-drawing flushing boxes 115 and 115 are each formed in a rectangular box shape with the upper surface opened, and an absorbent material (not shown) for absorbing the functional liquid is formed on the upper surface. It is laid. Further, the long side (Y-axis direction) of the regular flushing box is the length of the maximum width drawing line Lm so that the flushing box can be flushed even when the operating unit group 26 is composed of all the carriage units 21. (Dots missing inspection table 116 is also the same). On the other hand, the long sides (Y-axis direction) of the pair of pre-drawing flushing boxes 115 and 115 cause each carriage unit 21 of the working unit group 26 to be sub-scanned (described later) during a series of drawing operations, and will be described later. It is formed corresponding to the width (1800 mm) in the Y-axis direction.

  Next, with reference to FIG. 7, a control system of the entire droplet discharge device 1 will be described. The control system of the droplet discharge device 1 basically has a drive having various drivers for driving the host computer 2 and the functional droplet discharge head 71, the X-axis table 22, the Y-axis table 23, the maintenance means 12, and the like. And a control unit 122 (controller 13) that controls the entire droplet discharge device 1 including the drive unit 121.

  The host computer 2 is configured by connecting a computer 127 connected to the controller 13 to a keyboard 127 and a display 128 for displaying an image of an input result or the like by the keyboard 127.

  The drive unit 121 includes a head driver 131 that controls the ejection of the functional liquid droplet ejection head 71, a moving driver 132 that controls the motors of the X-axis table 22 and the Y-axis table 23, and each unit of the maintenance unit 12. A maintenance driver 133 that controls the driving of the vehicle.

  The control unit 122 includes a CPU 141, a ROM 142, a RAM 143, and a P-CON 144, which are connected to each other via a bus 145. The ROM 142 has a control program area for storing a control program to be processed by the CPU 141, and a control data area for storing control data for performing a drawing operation and image recognition.

  The RAM 143, in addition to various register groups, a drawing data storage unit that stores drawing data for discharging functional liquid onto the substrate W, a position data storage unit that stores position data of the substrate W and the functional liquid droplet ejection head 71, and the like. Are used as various work areas for control processing.

  In addition to various drivers of the drive unit 121, various cameras of the image recognition means 24 are connected to the P-CON 144, and a logic circuit is constructed to supplement the functions of the CPU 141 and handle interface signals with peripheral circuits. Built in. For this reason, the P-CON 144 receives various commands and the like from the host computer 2 as they are or processes them and imports them into the bus 1455. Or it processes and outputs to the drive part 121. FIG.

  The CPU 141 inputs various detection signals, various commands, various data, etc. via the P-CON 144 according to the control program in the ROM 142, processes various data, etc. in the RAM 143, and then drives via the P-CON 144. The entire droplet discharge device 1 is controlled by outputting various control signals to the unit 121 and the like. For example, the CPU 141 controls the functional droplet discharge head 71, the X-axis table 22, and the Y-axis table 23 to perform drawing on the substrate W under predetermined droplet discharge conditions and predetermined movement conditions.

  Here, with reference to FIG. 8 thru | or FIG. 14, drawing control by the droplet discharge apparatus 1 of this embodiment is demonstrated in detail. As described above, the droplet discharge device 1 moves the operating unit group 26 to the drawing area 31 and functions while moving the operating unit group 26 relative to the substrate W facing the drawing area 31. Drawing is performed by discharging a functional liquid onto the substrate W from the droplet discharge head 71 (see FIG. 5), and the drawing standby unit group 27 is moved to the maintenance area 32. Perform maintenance processing to keep the function maintained. The drawing process and the maintenance process are performed by the controller 13 controlling each apparatus of the drawing apparatus 11 and each unit of the maintenance means 12.

  First, a drawing process performed on a three-sided substrate Wt of two types of substrates W will be described. First, the three-sided substrate Wt is set on the X-axis table 22. Subsequently, the set three-sided substrate Wt is imaged by the substrate recognition camera 101, and based on the image recognition result, the position correction in the θ-axis direction by the substrate θ-axis table 42 and the X of the workpiece W are performed. The position data correction in the axial direction and the Y-axis direction is performed. Note that the position of the head unit 61 of each carriage unit 21 has been corrected based on the image recognition result obtained by the head recognition camera described above.

Three carriage units 21 so that a plurality of color-specific drawing lines L corresponding to the area drawing width R (540 mm) of the three-sided substrate Wt can be configured in parallel with the setting operation of the three-sided substrate Wt. Thus, the operation unit group 26 is configured. That is, the operator sets the three carriage units 21 (first to third carriage units 21a to 21c) on the drawing area 31 side as the operation unit group 26 using the keyboard 127, and sets the two carriage units 21 on the maintenance area 32 side. The carriage units 21 (fourth and fifth carriage units 21 d and e) are set as the drawing standby unit group 27.
The unit group sorting setting is performed by the operator sorting the carriage units 21 into either the operation unit group 26 or the drawing standby unit group 27 as described above, and the area of the substrate W on which the operator is introduced. The drawing width R may be input, and the controller 13 may sort based on the input value.

  Next, the Y-axis table 23 is driven and controlled, and the first to third carriage units 21a to 21c set as the operating unit group 26 are left in the drawing area 31, and the first set as the drawing standby unit group 27 is set. 4. Move the fifth carriage unit 21d · e to the maintenance area 32 (see FIG. 8). Until the discharge to the three-sided substrate Wt is performed, the function liquid droplet discharge head 71 of the operation unit group 26 discards and discharges to the regular flushing box 114.

Thus, after preparation before discharge is performed, a drawing process is performed on each filter region F of the three-sided substrate Wt. At this time, all the nozzles 95 (ejection nozzles) of all (8 × 3) functional liquid droplet ejection heads 71 of each color of the first to third carriage units 21a to 21c so as to correspond to the region drawing width R (540 mm). ), The drawing line L of each color is controlled to be constructed, and the drawing process is performed in this state.
When the area drawing width R of the substrate W mounted on the X-axis table 22 is, for example, 530 mm, as described above, each of the nozzles 95 (discharge nozzles) of the all-function liquid droplet discharge heads 71 of each color is used. Instead of constituting the drawing line L for each color, a plurality of nozzles 95 (ejection nozzles) excluding a part (corresponding to 10 mm) of the functional liquid droplet ejection heads 71 for each color located outside one side in the Y-axis direction. The nozzles 95 (discharge nozzles) are controlled to form the drawing lines L of the respective colors.

The drawing apparatus 11 drives the Y-axis table 23 so that the first to third carriage units 21a to 21c of the operating unit group 26 face the first filter region Fa. Then, the three-chamfered substrate Wt is moved forward in the X-axis direction by the X-axis table 22, and each functional liquid droplet ejection head 71 of the operation unit group 26 is selectively driven in synchronism with this to arrange the stripe arrangement color scheme. In order to form a pattern, functional droplets of three colors are ejected and landed on the plurality of pixel regions 507a of the first filter region Fa, respectively. Subsequently, the functional liquid is discharged again to the first filter region Fa while moving the three-sided substrate Wt backward. Then, in order to discharge and land a predetermined amount of functional liquid on each pixel region 507a, the forward / backward movement of the three-sided substrate Wt in the X-axis direction and the driving of the functional liquid droplet ejection head 71 are performed a plurality of times ( (For example, two forward movements and two backward movements). In this way, the first main scanning is performed, and the drawing process for the first filter region Fa is completed (see FIG. 9). The time required for one main scan is 40 seconds (10 seconds × 4 forwards and backwards).
Each time the three-chamfered substrate Wt moves forward and backward, the carriage unit 21 of the operating unit group 26 is moved by a small distance in the Y-axis direction (for example, 1/8 of the nozzle pitch) by the Y-axis table 23. According to this, functional droplets can be ejected and landed throughout the entire pixel region 507A.

  When the drawing process for the first filter area Fa is completed, each carriage unit 21 of the working unit group 26 is moved by the drawing line L in the Y-axis direction (sub-scanning) by the Y-axis table 23, and the first to third carriage units 21a. ˜c is exposed to the second filter region Fb. Thereafter, the drawing process (second main scanning) for the second filter area Fb is performed in the same manner as the drawing process for the first filter area Fa (see FIG. 10).

  Further, when the drawing process for the second filter region Fb is completed, each carriage unit 21 of the operating unit group 26 is moved by the drawing line L in the Y-axis direction by the Y-axis table 23 (sub scanning), and the first to third carriages are moved. The units 21a to 21c are made to face the third filter region Fc. Thereafter, the drawing process (second main scanning) for the third filter area Fc is performed in the same manner as the drawing process for the first and second filter areas Fa and b. As described above, the drawing process for all the filter regions F of the three-sided substrate Wt is completed (see FIG. 11).

  It should be noted that during the last backward movement of the third main scan, ejection for dot missing inspection is performed on the dot missing inspection table 116. In the present embodiment, since the dot dropout inspection table 116 is arranged on the left side of FIG. 3 with respect to the suction table 41 (in the same position as the regular flushing box 114 in the Y-axis direction), the three-sided substrate Wt. 3 is drawn from the right side to the left side (in order from the first filter region Fa), but the dot missing inspection table 116 is moved to the right side of FIG. And drawing may be performed from the left side to the right side of the three-sided substrate Wt (in order from the third filter region Fc). According to this, each functional liquid droplet ejection head 71 that has been discarded and discharged to the regular flushing box 114 before the drawing process can be immediately transferred to the drawing process without moving in the Y-axis direction.

  In this manner, the functional liquid droplets are ejected and landed in a state where the plurality of drawing lines L for each color and the region drawing width R are associated with each other, so that one main scan is performed for each filter region F. Thus, the functional liquid droplets are discharged and landed, and the drawing process is not performed on each filter region F by a plurality of main scans.

  In this regard, if functional droplets are ejected and landed in two main scans for each filter region F, 40 seconds after the first main scan (second return). Since the second main scan (the second reciprocal movement) is performed, there is a difference between the range in which the first main scan is performed and the range in which the second main scan is performed. Since the time from when functional droplets are ejected and landed on the pixel region 507a to when the drying process is performed is different by 40 seconds, the amount of solvent vaporization in the drying process differs. However, in this embodiment, in each filter region F, the time from when the functional liquid droplets are ejected and landed to each pixel region 507a until the drying process is performed is substantially the same, and the amount of vaporization of the functional liquid solvent is uniform. In this state, the drying process is performed, and drying unevenness does not occur. Therefore, the drawing process can be performed on the three-sided substrate Wt without causing color unevenness in the filter region F.

  On the other hand, with respect to the drawing standby unit group 27 (fourth and fifth carriage units 21 d and e) moved to the maintenance area 32, the respective functional liquid droplet ejection heads 71 are sealed by the corresponding suction units 111. It is stored in a function maintaining state (see FIGS. 8 to 11). According to this, while the operation unit group 26 is moved to the drawing area 31 and the drawing process is performed by the functional liquid droplet ejection head 71, the drawing standby unit group 27 is moved to the maintenance area 32, and the function is performed. The droplet discharge head 71 can be stored while maintaining the discharge function.

  Next, a drawing process performed on the 8-chamfered substrate We will be described. Note that, in the eight-sided substrate We, as described above, the operation unit group 26 is configured by the two carriage units 21, and a plurality of color-specific drawing lines L corresponding to the region drawing width R of 350 mm (k = 1) are provided. In some cases, the operation unit group 26 is configured by four carriage units 21 and a plurality of color-specific drawing lines L corresponding to an area drawing width R of 720 mm (k = 2) may be configured. Here, the case where the operation unit group 26 is constituted by four carriage units 21 will be mainly described. First, the 8-chamfered substrate We is set on the X-axis table 22, and the position correction with respect to the 8-chamfered substrate We is performed in the same manner as described above. Subsequently, in the same manner as described above, the first to fourth carriage units 21 a to 21 d are operated units so that a plurality of color-specific drawing lines L corresponding to the area drawing width R (720 mm) of the eight-sided substrate We can be configured. The fifth carriage unit 21 e is set as the drawing standby unit group 27 while being set as the group 26.

  Next, the Y-axis table 23 is driven and controlled, and the first to fourth carriage units 21a to 21d set as the operating unit group 26 are left in the drawing area 31, and the first set as the drawing standby unit group 27 is set. 5 Move the carriage unit 21e to the maintenance area 32 (see FIG. 12).

  Thus, after preparation before discharge is performed, the drawing process with respect to each filter area | region F of the 8 chamfering board | substrate We is performed. At this time, in the same manner as described above, all (8 × 4) functional liquid droplet ejection heads 71 of each color of the first to fourth carriage units 21a to 21d are respectively corresponding to the region drawing width R (720 mm). The nozzles 95 (discharge nozzles) are controlled to form the drawing lines L of the respective colors, and the drawing process is performed in this state.

  The drawing apparatus 11 drives the Y-axis table 23 to move the first to fourth carriage units 21a to 21d of the working unit group 26 into the first and second filter regions Fa and b (and the fifth and sixth filter regions Fe).・ Face it. Then, the 8-chamfered substrate We is moved forward in the X-axis direction by the X-axis table 22, and each functional liquid droplet ejection head 71 of the operation unit group 26 is selectively driven in synchronism with this to arrange the stripe arrangement color scheme Three-color functional droplets are ejected and landed on the plurality of pixel regions 507a of the first and second filter regions Fa and b and the fifth and sixth filter regions Fe and f so as to form a pattern. Subsequently, the functional liquid is discharged again to the first and second filter regions Fa and b and the fifth and sixth filter regions Fe and f while moving the three-sided substrate Wt backward. Similarly to the above, in order to discharge and land a predetermined amount of functional liquid on each pixel region 507a, the forward / backward movement in the X-axis direction of such an 8-chamfered substrate We and the functional liquid droplet discharge head 71 Driving is performed a plurality of times (for example, two forward movements and two backward movements). In this way, the first main scanning is performed, and the drawing process for the first and second filter regions Fa and b and the fifth and sixth filter regions Fe and f is completed (see FIG. 13).

  When the drawing processing for the first and second filter regions Fa and b and the fifth and sixth filter regions Fe and f is completed, the Y-axis table 23 causes each carriage unit 21 of the operating unit group 26 to draw the drawing line L in the Y-axis direction. The first to fourth carriage units 21a to 21d are moved to the third and fourth filter regions Fc · d (and the seventh and eighth filter regions Fg · h) by moving by a minute amount (sub scanning). Thereafter, the third and fourth filter regions Fc and d and the seventh and eighth filter regions Fg are processed in the same manner as the drawing process for the first and second filter regions Fa and b and the fifth and sixth filter regions Fe and f. Perform drawing processing for h (second main scanning). As described above, the drawing process for all the filter regions F of the eight-sided substrate We is completed (see FIG. 14).

  As described above, the functional liquid droplets are ejected and landed on the eight-sided substrate We in a state where the plurality of color-specific drawing lines L and the region drawing width R are associated with each other. With respect to F, functional droplets are ejected and landed in one main scan, and drawing processing is not performed for each filter region F in a plurality of main scans. Therefore, the drawing process can be performed on the eight-chamfered substrate We without causing color unevenness in the filter region F.

  On the other hand, in this case as well, the function liquid droplet ejection heads 71 are sealed by the corresponding suction units 111 with respect to the drawing standby unit group 27 (fifth carriage unit 21e) moved to the maintenance area 32. By storing in the maintenance state, the functional liquid droplet ejection head 71 can be stored in a state where the ejection function is maintained.

  As described above, the operation unit group 26 is configured by the four carriage units 21 with respect to the eight-chamfered substrate We, and a plurality of color-specific drawing lines L corresponding to the area drawing width R of 720 mm (k = 2) is configured. As described above, the operation unit group 26 is configured by the two carriage units 21 and a plurality of drawing lines L for each color corresponding to the area drawing width R of 350 mm (k = 1) are similarly configured. The functional liquid droplets are ejected and landed on each filter region F by one main scan, and the drawing process is not performed on each filter region F by a plurality of main scans. That is, a plurality of color-specific drawing lines L (350 mm) constituted by all the nozzles 95 (discharge nozzles) of all the functional liquid droplet discharge heads 71 of the two carriage units 21 correspond to the region drawing width R (350 mm). In the first main scan, the drawing process is performed on the first and fifth filter areas Fa · e, and in the second main scan, the drawing process is performed on the second and sixth filter areas Fb · f. In the third main scan, drawing processing is performed on the third and seventh filter regions Fc · g, and in the fourth main scanning, drawing processing is performed on the fourth and eighth filter regions Fd · h. Is called. Therefore, the drawing process can be performed on the eight-chamfered substrate We without causing color unevenness in the filter region F.

  Further, the droplet discharge device 1 of the present embodiment is configured to discharge and land any one of the R, G, and B functional liquids on the substrate W by the three droplet discharge devices 1. Alternatively, one color layer 508 may be sequentially formed. In this case as well, in each color drawing process, each filter region F can be drawn in one main scan, so that there is no color unevenness in the filter region F with respect to the multi-type substrate W. Drawing processing can be performed.

  Furthermore, as will be described later, it is also possible to manufacture an electro-optical device other than the color filter by using the droplet discharge device 1 of the present embodiment. Also in this case, it is possible to perform the drawing process on the various substrates W in the multi-cavity format without causing uneven drying in the filter region F.

  Next, as an electro-optical device (flat panel display) manufactured using the droplet discharge device 1 of this embodiment, a color filter, a liquid crystal display device, an organic EL device, a plasma display (PDP device), an electron emission device ( FED devices, SED devices), and active matrix substrates formed in these display devices will be described as an example for their structures and manufacturing methods. Note that an active matrix substrate refers to a substrate on which a thin film transistor, a source line electrically connected to the thin film transistor, and a data line are formed.

First, a method for manufacturing a color filter incorporated in a liquid crystal display device, an organic EL device or the like will be described. FIG. 15 is a flowchart showing the manufacturing process of the color filter, and FIG. 16 is a schematic cross-sectional view of the color filter 500 (filter base body 500A) of this embodiment shown in the order of the manufacturing process.
First, in the black matrix formation step (S11), a black matrix 502 is formed on a substrate (W) 501 as shown in FIG. The black matrix 502 is formed of metal chromium, a laminate of metal chromium and chromium oxide, resin black, or the like. A sputtering method, a vapor deposition method, or the like can be used to form the black matrix 502 made of a metal thin film. Further, when forming the black matrix 502 made of a resin thin film, a gravure printing method, a photoresist method, a thermal transfer method, or the like can be used.

Subsequently, in the bank formation step (S12), the bank 503 is formed in a state of being superimposed on the black matrix 502. That is, first, as shown in FIG. 16B, a resist layer 504 made of a negative transparent photosensitive resin is formed so as to cover the substrate 501 and the black matrix 502. Then, an exposure process is performed with the upper surface covered with a mask film 505 formed in a matrix pattern shape.
Further, as shown in FIG. 16C, the resist layer 504 is patterned by etching an unexposed portion of the resist layer 504 to form a bank 503. When the black matrix is formed from resin black, it is possible to use both the black matrix and the bank.
The bank 503 and the black matrix 502 below the partition wall 507b partitioning each pixel region 507a, and in the subsequent colored layer forming step, the colored liquid layers (film forming portions) 508R, 508G, When forming 508B, the landing area of the functional droplet is defined.

The filter substrate 500A is obtained through the above black matrix forming step and bank forming step.
In the present embodiment, as the material for the bank 503, a resin material whose surface is lyophobic (hydrophobic) is used. Since the surface of the substrate (glass substrate) 501 is lyophilic (hydrophilic), the droplets into each pixel region 507a surrounded by the bank 503 (partition wall portion 507b) in the colored layer forming step described later. Variations in landing position can be automatically corrected.

  Next, in the colored layer forming step (S13), as shown in FIG. 16 (d), functional droplets are ejected by the functional droplet ejection head 71 to enter each pixel region 507a surrounded by the partition wall portion 507b. Make it land. In this case, the functional liquid droplet ejection head 71 is used to introduce functional liquids (filter materials) of three colors of R, G, and B to eject functional liquid droplets. Note that the three-color arrangement pattern of R, G, and B includes a stripe arrangement, a mosaic arrangement, and a delta arrangement.

Thereafter, the functional liquid is fixed through a drying process (a process such as heating), and three colored layers 508R, 508G, and 508B are formed. If the colored layers 508R, 508G, and 508B are formed, the process proceeds to the protective film forming step (S14), and as shown in FIG. A protective film 509 is formed so as to cover the upper surface.
That is, after the protective film coating liquid is discharged over the entire surface of the substrate 501 where the colored layers 508R, 508G, and 508B are formed, the protective film 509 is formed through a drying process.
Then, after forming the protective film 509, the color filter 500 moves to a film forming process such as ITO (Indium Tin Oxide) which becomes a transparent electrode in the next process.

  FIG. 17 is a cross-sectional view of a main part showing a schematic configuration of a passive matrix liquid crystal device (liquid crystal device) as an example of a liquid crystal display device using the color filter 500 described above. By attaching auxiliary elements such as a liquid crystal driving IC, a backlight, and a support to the liquid crystal device 520, a transmissive liquid crystal display device as a final product can be obtained. Since the color filter 500 is the same as that shown in FIG. 16, the corresponding parts are denoted by the same reference numerals and description thereof is omitted.

The liquid crystal device 520 is roughly configured by a color filter 500, a counter substrate 521 made of a glass substrate, and a liquid crystal layer 522 made of an STN (Super Twisted Nematic) liquid crystal composition sandwiched between them, The filter 500 is arranged on the upper side (observer side) in the figure.
Although not shown, polarizing plates are provided on the outer surfaces of the counter substrate 521 and the color filter 500 (surfaces opposite to the liquid crystal layer 522 side), and the polarizing plates located on the counter substrate 521 side are also provided. A backlight is disposed outside.

On the protective film 509 of the color filter 500 (on the liquid crystal layer side), a plurality of strip-shaped first electrodes 523 elongated in the left-right direction in FIG. 17 are formed at predetermined intervals. The color of the first electrode 523 A first alignment film 524 is formed so as to cover the surface opposite to the filter 500 side.
On the other hand, a plurality of strip-shaped second electrodes 526 elongated in a direction orthogonal to the first electrode 523 of the color filter 500 are formed on the surface of the counter substrate 521 facing the color filter 500 at a predetermined interval. A second alignment film 527 is formed so as to cover the surface of the two electrodes 526 on the liquid crystal layer 522 side. The first electrode 523 and the second electrode 526 are made of a transparent conductive material such as ITO.

The spacer 528 provided in the liquid crystal layer 522 is a member for keeping the thickness (cell gap) of the liquid crystal layer 522 constant. The sealing material 529 is a member for preventing the liquid crystal composition in the liquid crystal layer 522 from leaking to the outside. Note that one end of the first electrode 523 extends to the outside of the sealing material 529 as a lead-out wiring 523a.
A portion where the first electrode 523 and the second electrode 526 intersect with each other is a pixel, and the color layers 508R, 508G, and 508B of the color filter 500 are located in the portion that becomes the pixel.

  In a normal manufacturing process, patterning of the first electrode 523 and application of the first alignment film 524 are performed on the color filter 500 to create a portion on the color filter 500 side. Patterning of the electrode 526 and application of the second alignment film 527 are performed to create a portion on the counter substrate 521 side. Thereafter, a spacer 528 and a sealing material 529 are formed in the portion on the counter substrate 521 side, and the portion on the color filter 500 side is bonded in this state. Next, liquid crystal constituting the liquid crystal layer 522 is injected from the inlet of the sealing material 529, and the inlet is closed. Thereafter, both polarizing plates and the backlight are laminated.

  The droplet discharge device 1 according to the embodiment applies, for example, a spacer material (functional liquid) that constitutes the cell gap, and before the portion on the color filter 500 side is bonded to the portion on the counter substrate 521 side, the sealing material Liquid crystal (functional liquid) can be uniformly applied to the region surrounded by 529. In addition, the above-described sealing material 529 can be printed by the functional liquid droplet ejection head 71. Furthermore, the first and second alignment films 524 and 527 can be applied by the functional liquid droplet ejection head 71.

FIG. 18 is a cross-sectional view of a principal part showing a schematic configuration of a second example of a liquid crystal device using the color filter 500 manufactured in the present embodiment.
The liquid crystal device 530 is significantly different from the liquid crystal device 520 in that the color filter 500 is arranged on the lower side (the side opposite to the observer side) in the figure.
The liquid crystal device 530 is generally configured by sandwiching a liquid crystal layer 532 made of STN liquid crystal between a color filter 500 and a counter substrate 531 made of a glass substrate or the like. Although not shown, polarizing plates and the like are provided on the outer surfaces of the counter substrate 531 and the color filter 500, respectively.

On the protective film 509 of the color filter 500 (on the liquid crystal layer 532 side), a plurality of strip-shaped first electrodes 533 elongated in the depth direction in the figure are formed at predetermined intervals, and the liquid crystal of the first electrodes 533 is formed. A first alignment film 534 is formed so as to cover the surface on the layer 532 side.
A plurality of strip-shaped second electrodes 536 extending in a direction orthogonal to the first electrode 533 on the color filter 500 side are formed on the surface of the counter substrate 531 facing the color filter 500 at a predetermined interval. A second alignment film 537 is formed so as to cover the surface of the second electrode 536 on the liquid crystal layer 532 side.

The liquid crystal layer 532 is provided with a spacer 538 for keeping the thickness of the liquid crystal layer 532 constant and a sealing material 539 for preventing the liquid crystal composition in the liquid crystal layer 532 from leaking to the outside. Yes.
Similarly to the liquid crystal device 520 described above, a portion where the first electrode 533 and the second electrode 536 intersect with each other is a pixel, and the colored layers 508R, 508G, and 508B of the color filter 500 are located at the portion that becomes the pixel. Is configured to do.

FIG. 19 shows a third example in which a liquid crystal device is configured using a color filter 500 to which the present invention is applied, and is an exploded perspective view showing a schematic configuration of a transmissive TFT (Thin Film Transistor) type liquid crystal device. It is.
In the liquid crystal device 550, the color filter 500 is arranged on the upper side (observer side) in the figure.

The liquid crystal device 550 includes a color filter 500, a counter substrate 551 disposed so as to face the color filter 500, a liquid crystal layer (not shown) sandwiched therebetween, and an upper surface side (observer side) of the color filter 500. The polarizing plate 555 and the polarizing plate (not shown) arranged on the lower surface side of the counter substrate 551 are roughly configured.
A liquid crystal driving electrode 556 is formed on the surface of the protective film 509 of the color filter 500 (the surface on the counter substrate 551 side). The electrode 556 is made of a transparent conductive material such as ITO, and is a full surface electrode that covers the entire region where a pixel electrode 560 described later is formed. An alignment film 557 is provided so as to cover the surface of the electrode 556 opposite to the pixel electrode 560.

  An insulating layer 558 is formed on the surface of the counter substrate 551 facing the color filter 500, and the scanning lines 561 and the signal lines 562 are formed on the insulating layer 558 in a state of being orthogonal to each other. A pixel electrode 560 is formed in a region surrounded by the scanning lines 561 and the signal lines 562. In an actual liquid crystal device, an alignment film is provided on the pixel electrode 560, but the illustration is omitted.

  In addition, a thin film transistor 563 including a source electrode, a drain electrode, a semiconductor, and a gate electrode is incorporated in a portion surrounded by the cutout portion of the pixel electrode 560 and the scanning line 561 and the signal line 562. . The thin film transistor 563 is turned on / off by application of signals to the scanning line 561 and the signal line 562 so that energization control to the pixel electrode 560 can be performed.

  Note that the liquid crystal devices 520, 530, and 550 in the above examples are transmissive, but a reflective liquid crystal device or a transflective liquid crystal device is provided by providing a reflective layer or a transflective layer. You can also

  Next, FIG. 20 is a cross-sectional view of an essential part of a display region (hereinafter simply referred to as a display device 600) of the organic EL device.

The display device 600 is schematically configured with a circuit element portion 602, a light emitting element portion 603, and a cathode 604 laminated on a substrate (W) 601.
In the display device 600, light emitted from the light emitting element portion 603 to the substrate 601 side is transmitted through the circuit element portion 602 and the substrate 601 and emitted to the observer side, and the light emitting element portion 603 is opposite to the substrate 601. After the light emitted to the side is reflected by the cathode 604, the light passes through the circuit element portion 602 and the substrate 601 and is emitted to the observer side.

  A base protective film 606 made of a silicon oxide film is formed between the circuit element portion 602 and the substrate 601, and an island-shaped semiconductor film 607 made of polycrystalline silicon is formed on the base protective film 606 (on the light emitting element portion 603 side). Is formed. In the left and right regions of the semiconductor film 607, a source region 607a and a drain region 607b are formed by high concentration cation implantation, respectively. A central portion where no positive ions are implanted is a channel region 607c.

  In the circuit element portion 602, a transparent gate insulating film 608 covering the base protective film 606 and the semiconductor film 607 is formed, and a position corresponding to the channel region 607c of the semiconductor film 607 on the gate insulating film 608 is formed. For example, a gate electrode 609 made of Al, Mo, Ta, Ti, W or the like is formed. On the gate electrode 609 and the gate insulating film 608, a transparent first interlayer insulating film 611a and a second interlayer insulating film 611b are formed. Further, contact holes 612a and 612b are formed through the first and second interlayer insulating films 611a and 611b and communicating with the source region 607a and the drain region 607b of the semiconductor film 607, respectively.

A transparent pixel electrode 613 made of ITO or the like is patterned and formed in a predetermined shape on the second interlayer insulating film 611b, and the pixel electrode 613 is connected to the source region 607a through the contact hole 612a. .
A power supply line 614 is disposed on the first interlayer insulating film 611a, and the power supply line 614 is connected to the drain region 607b through the contact hole 612b.

  Thus, the driving thin film transistors 615 connected to the pixel electrodes 613 are formed in the circuit element portion 602, respectively.

The light emitting element portion 603 includes a functional layer 617 stacked on each of the plurality of pixel electrodes 613, and a bank portion 618 provided between each pixel electrode 613 and the functional layer 617 to partition each functional layer 617. It is roughly structured.
The pixel electrode 613, the functional layer 617, and the cathode 604 provided on the functional layer 617 constitute a light emitting element. Note that the pixel electrode 613 is formed by patterning in a substantially rectangular shape in plan view, and a bank portion 618 is formed between the pixel electrodes 613.

The bank unit 618 is laminated on the inorganic bank layer 618a (first bank layer) 618a formed of an inorganic material such as SiO, SiO ₂ , TiO _{2, and the} like, and is made of an acrylic resin, a polyimide resin, or the like. It is composed of an organic bank layer 618b (second bank layer) having a trapezoidal cross section formed of a resist having excellent heat resistance and solvent resistance. A part of the bank unit 618 is formed on the peripheral edge of the pixel electrode 613.
An opening 619 that gradually expands upward with respect to the pixel electrode 613 is formed between the bank portions 618.

The functional layer 617 includes a hole injection / transport layer 617a formed in a stacked state on the pixel electrode 613 in the opening 619, and a light emitting layer 617b formed on the hole injection / transport layer 617a. Has been. Note that another functional layer having other functions may be further formed adjacent to the light emitting layer 617b. For example, it is possible to form an electron transport layer.
The hole injection / transport layer 617a has a function of transporting holes from the pixel electrode 613 side and injecting them into the light emitting layer 617b. The hole injection / transport layer 617a is formed by discharging a first composition (functional liquid) containing a hole injection / transport layer forming material. A known material is used as the hole injection / transport layer forming material.

  The light emitting layer 617b emits light in red (R), green (G), or blue (B), and discharges a second composition (functional liquid) containing a light emitting layer forming material (light emitting material). Is formed. As the solvent (nonpolar solvent) of the second composition, a known material that is insoluble in the hole injection / transport layer 617a is preferably used, and such a nonpolar solvent is used as the second composition of the light emitting layer 617b. By using the light emitting layer 617b, the light emitting layer 617b can be formed without re-dissolving the hole injection / transport layer 617a.

  The light emitting layer 617b is configured such that the holes injected from the hole injection / transport layer 617a and the electrons injected from the cathode 604 are recombined in the light emitting layer to emit light.

  The cathode 604 is formed so as to cover the entire surface of the light emitting element portion 603, and plays a role of flowing current to the functional layer 617 in a pair with the pixel electrode 613. Note that a sealing member (not shown) is disposed on the cathode 604.

Next, a manufacturing process of the display device 600 will be described with reference to FIGS.
As shown in FIG. 21, the display device 600 includes a bank part forming step (S21), a surface treatment step (S22), a hole injection / transport layer forming step (S23), a light emitting layer forming step (S24), It is manufactured through an electrode formation step (S25). In addition, a manufacturing process is not restricted to what is illustrated, and when other processes are removed as needed, it may be added.

First, in the bank part forming step (S21), as shown in FIG. 22, an inorganic bank layer 618a is formed on the second interlayer insulating film 611b. The inorganic bank layer 618a is formed by forming an inorganic film at a formation position and then patterning the inorganic film by a photolithography technique or the like. At this time, a part of the inorganic bank layer 618 a is formed so as to overlap with the peripheral edge of the pixel electrode 613.
When the inorganic bank layer 618a is formed, the organic bank layer 618b is formed on the inorganic bank layer 618a as shown in FIG. The organic bank layer 618b is also formed by patterning using a photolithography technique or the like in the same manner as the inorganic bank layer 618a.
In this way, the bank portion 618 is formed. Accordingly, an opening 619 opening upward with respect to the pixel electrode 613 is formed between the bank portions 618. The opening 619 defines a pixel region.

In the surface treatment step (S22), a lyophilic process and a lyophobic process are performed. The region to be subjected to the lyophilic treatment is the first laminated portion 618aa of the inorganic bank layer 618a and the electrode surface 613a of the pixel electrode 613. These regions are made lyophilic by plasma treatment using, for example, oxygen as a treatment gas. Is done. This plasma treatment also serves to clean the ITO that is the pixel electrode 613.
In addition, the lyophobic treatment is performed on the wall surface 618s of the organic bank layer 618b and the upper surface 618t of the organic bank layer 618b, and the surface is fluorinated (treated to be liquid repellent) by plasma treatment using, for example, tetrafluoromethane. )
By performing this surface treatment process, when the functional layer 617 is formed using the functional liquid droplet ejection head 71, the functional liquid droplets can be landed more reliably on the pixel area. It is possible to prevent the functional droplets from overflowing from the opening 619.

  Then, the display device base 600A is obtained through the above steps. The display device base 600A is placed on the suction table 41 of the droplet discharge device 1 shown in FIG. 1, and the following hole injection / transport layer forming step (S23) and light emitting layer forming step (S24) are performed. .

  As shown in FIG. 24, in the hole injection / transport layer forming step (S23), the first composition containing the hole injection / transport layer forming material is transferred from the functional liquid droplet ejection head 71 to each opening 619 that is a pixel region. Discharge inside. Thereafter, as shown in FIG. 25, a drying process and a heat treatment are performed to evaporate the polar solvent contained in the first composition, thereby forming a hole injection / transport layer 617a on the pixel electrode (electrode surface 613a) 613.

Next, the light emitting layer forming step (S24) will be described. In this light emitting layer forming step, as described above, in order to prevent re-dissolution of the hole injection / transport layer 617a, the hole injection / transport layer 617a is used as a solvent for the second composition used in forming the light emitting layer. A non-polar solvent insoluble in.
However, since the hole injection / transport layer 617a has a low affinity for the nonpolar solvent, the hole injection / transport layer 617a has a low affinity even if the second composition containing the nonpolar solvent is discharged onto the hole injection / transport layer 617a. There is a possibility that the injection / transport layer 617a and the light emitting layer 617b cannot be adhered to each other, or the light emitting layer 617b cannot be applied uniformly.
Therefore, in order to increase the surface affinity of the hole injection / transport layer 617a with respect to the nonpolar solvent and the light emitting layer forming material, it is preferable to perform surface treatment (surface modification treatment) before forming the light emitting layer. In this surface treatment, a surface modifying material which is the same solvent as the non-polar solvent of the second composition used in the formation of the light emitting layer or a similar solvent is applied on the hole injection / transport layer 617a, and this is applied. This is done by drying.
By performing such treatment, the surface of the hole injection / transport layer 617a is easily adapted to the nonpolar solvent. In the subsequent step, the second composition containing the light emitting layer forming material is added to the hole injection / transport layer. It can be uniformly applied to 617a.

  Then, as shown in FIG. 26, the pixel composition (second liquid composition containing a light emitting layer forming material corresponding to one of the colors (blue (B) in the example of FIG. 26)) is used as a functional droplet. A predetermined amount is driven into the opening 619). The second composition driven into the pixel region spreads on the hole injection / transport layer 617a and fills the opening 619. Even if the second composition deviates from the pixel region and lands on the upper surface 618t of the bank portion 618, the upper composition 618t is subjected to the liquid repellent treatment as described above. Things are easy to roll into the opening 619.

  Thereafter, by performing a drying process and the like, the second composition after discharge is dried, the nonpolar solvent contained in the second composition is evaporated, and as shown in FIG. 27, a hole injection / transport layer 617a is obtained. A light emitting layer 617b is formed thereon. In the case of this figure, a light emitting layer 617b corresponding to blue (B) is formed.

  Similarly, using the functional liquid droplet ejection head 71, as shown in FIG. 28, the same steps as in the case of the light emitting layer 617b corresponding to the blue (B) described above are sequentially performed, and other colors (red (R) and red (R) and A light emitting layer 617b corresponding to green (G) is formed. Note that the order in which the light-emitting layers 617b are formed is not limited to the illustrated order, and may be formed in any order. For example, the order of formation can be determined according to the light emitting layer forming material. In addition, the arrangement pattern of the three colors R, G, and B includes a stripe arrangement, a mosaic arrangement, a delta arrangement, and the like.

  As described above, the functional layer 617, that is, the hole injection / transport layer 617a and the light emitting layer 617b are formed on the pixel electrode 613. And it transfers to a counter electrode formation process (S25).

In the counter electrode forming step (S25), as shown in FIG. 29, the cathode 604 (counter electrode) is formed on the entire surface of the light emitting layer 617b and the organic bank layer 618b by, for example, vapor deposition, sputtering, CVD, or the like. In the present embodiment, the cathode 604 is configured by, for example, laminating a calcium layer and an aluminum layer.
On top of the cathode 604, an Al film, an Ag film as an electrode, and a protective layer such as SiO ₂ or SiN for preventing oxidation thereof are appropriately provided.

  After forming the cathode 604 in this way, the display device 600 is obtained by performing other processes such as a sealing process for sealing the upper part of the cathode 604 with a sealing member and a wiring process.

Next, FIG. 30 is an exploded perspective view of a main part of a plasma display device (PDP device: hereinafter simply referred to as a display device 700). In the figure, the display device 700 is shown with a part thereof cut away.
The display device 700 is schematically configured to include a first substrate 701, a second substrate 702, and a discharge display portion 703 formed between them, which are disposed to face each other. The discharge display unit 703 includes a plurality of discharge chambers 705. Among the plurality of discharge chambers 705, the three discharge chambers 705 of the red discharge chamber 705R, the green discharge chamber 705G, and the blue discharge chamber 705B are arranged to form one pixel.

Address electrodes 706 are formed in stripes at predetermined intervals on the upper surface of the first substrate 701, and a dielectric layer 707 is formed so as to cover the address electrodes 706 and the upper surface of the first substrate 701. On the dielectric layer 707, partition walls 708 are provided so as to be positioned between the address electrodes 706 and along the address electrodes 706. The partition 708 includes one extending on both sides in the width direction of the address electrode 706 as shown, and one not shown extending in the direction orthogonal to the address electrode 706.
A region partitioned by the partition 708 is a discharge chamber 705.

  A phosphor 709 is disposed in the discharge chamber 705. The phosphor 709 emits red (R), green (G), or blue (B) fluorescence, and the red phosphor 709R is disposed at the bottom of the red discharge chamber 705R, and the green discharge chamber 705G. A green phosphor 709G and a blue phosphor 709B are arranged at the bottom and the blue discharge chamber 705B, respectively.

On the lower surface of the second substrate 702 in the drawing, a plurality of display electrodes 711 are formed in stripes at predetermined intervals in a direction orthogonal to the address electrodes 706. A dielectric layer 712 and a protective film 713 made of MgO or the like are formed so as to cover them.
The first substrate 701 and the second substrate 702 are bonded so that the address electrodes 706 and the display electrodes 711 face each other in a state of being orthogonal to each other. The address electrode 706 and the display electrode 711 are connected to an AC power source (not shown).
When the electrodes 706 and 711 are energized, the phosphor 709 emits light in the discharge display portion 703, and color display is possible.

In the present embodiment, the address electrode 706, the display electrode 711, and the phosphor 709 can be formed by using the droplet discharge device 1 shown in FIG. Hereinafter, a process of forming the address electrode 706 on the first substrate 701 will be exemplified.
In this case, the following steps are performed with the first substrate 701 placed on the suction table 41 of the droplet discharge device 1.
First, the liquid material (functional liquid) containing the conductive film wiring forming material is landed on the address electrode formation region as a functional liquid droplet by the functional liquid droplet ejection head 71. This liquid material is obtained by dispersing conductive fine particles such as metal in a dispersion medium as a conductive film wiring forming material. As the conductive fine particles, metal fine particles containing gold, silver, copper, palladium, nickel, or the like, a conductive polymer, or the like is used.

  When the replenishment of the liquid material is completed for all the address electrode formation regions to be replenished, the address material 706 is formed by drying the discharged liquid material and evaporating the dispersion medium contained in the liquid material. .

By the way, although the formation of the address electrode 706 has been exemplified in the above, the display electrode 711 and the phosphor 709 can also be formed through the above steps.
In the case of forming the display electrode 711, as in the case of the address electrode 706, a liquid material (functional liquid) containing a conductive film wiring forming material is landed on the display electrode formation region as a functional droplet.
Further, in the case of forming the phosphor 709, a liquid material (functional liquid) containing a fluorescent material corresponding to each color (R, G, B) is ejected as droplets from the functional liquid droplet ejection head 71, and corresponding. Land in the color discharge chamber 705.

Next, FIG. 31 is a cross-sectional view of an essential part of an electron emission device (also referred to as FED device or SED device: hereinafter simply referred to as a display device 800). In the drawing, a part of the display device 800 is shown as a cross section.
The display device 800 is schematically configured to include a first substrate 801, a second substrate 802, and a field emission display portion 803 formed therebetween, which are disposed to face each other. The field emission display unit 803 includes a plurality of electron emission units 805 arranged in a matrix.

  On the upper surface of the first substrate 801, a first element electrode 806a and a second element electrode 806b constituting the cathode electrode 806 are formed so as to be orthogonal to each other. In addition, a conductive film 807 having a gap 808 is formed in a portion partitioned by the first element electrode 806a and the second element electrode 806b. That is, the first element electrode 806a, the second element electrode 806b, and the conductive film 807 constitute a plurality of electron emission portions 805. The conductive film 807 is made of, for example, palladium oxide (PdO), and the gap 808 is formed by forming after forming the conductive film 807.

  An anode electrode 809 that faces the cathode electrode 806 is formed on the lower surface of the second substrate 802. A grid-like bank portion 811 is formed on the lower surface of the anode electrode 809, and a phosphor 813 is disposed in each downward opening 812 surrounded by the bank portion 811 so as to correspond to the electron emission portion 805. Yes. The phosphor 813 emits fluorescence of any one of red (R), green (G), and blue (B), and each opening 812 has a red phosphor 813R, a green phosphor 813G, and a blue color. The phosphors 813B are arranged in the predetermined pattern described above.

  The first substrate 801 and the second substrate 802 configured as described above are bonded together with a minute gap. In this display device 800, electrons that jump out of the first element electrode 806 a or the second element electrode 806 b that are cathodes through the conductive film (gap 808) 807 are formed on the phosphor 813 formed on the anode electrode 809 that is an anode. When excited, it emits light and enables color display.

  Also in this case, as in the other embodiments, the first element electrode 806a, the second element electrode 806b, the conductive film 807, and the anode electrode 809 can be formed using the droplet discharge device 1 and each color. The phosphors 813R, 813G, and 813B can be formed using the droplet discharge device 1.

  The first element electrode 806a, the second element electrode 806b, and the conductive film 807 have the planar shape shown in FIG. 32A, and when these are formed, as shown in FIG. 32B. In addition, the bank portion BB is formed (photolithographic method), leaving portions where the first element electrode 806a, the second element electrode 806b, and the conductive film 807 are previously formed. Next, the first element electrode 806a and the second element electrode 806b were formed in the groove portion constituted by the bank portion BB (inkjet method using the droplet discharge device 1), and the solvent was dried to form a film. After that, a conductive film 807 is formed (an ink jet method using the droplet discharge device 1). Then, after forming the conductive film 807, the bank portion BB is removed (ashing peeling process), and the process proceeds to the above forming process. As in the case of the organic EL device described above, it is preferable to perform a lyophilic process on the first substrate 801 and the second substrate 802 and a lyophobic process on the bank portions 811 and BB.

  As other electro-optical devices, devices such as metal wiring formation, lens formation, resist formation, and light diffuser formation are conceivable. By using the droplet discharge device 1 described above for manufacturing various electro-optical devices (devices), various electro-optical devices can be efficiently manufactured.

FIG. It is an external appearance perspective view of a droplet discharge device. It is a top view of a droplet discharge device. It is a side view of a droplet discharge device. It is a figure explaining the drawing line comprised by the functional droplet discharge head mounted in the several carriage unit and its discharge nozzle. It is an external appearance perspective view of a functional droplet discharge head. It is the block diagram explaining the control system of the droplet discharge apparatus. It is explanatory drawing of the drawing process with respect to the 3 chamfering board | substrate using a droplet discharge apparatus. FIG. 9 is an explanatory diagram of a drawing process for the three-chamfered substrate using the droplet discharge device, following FIG. 8. FIG. 10 is an explanatory diagram of a drawing process for the three-chamfered substrate using the droplet discharge device, following FIG. 9. FIG. 11 is an explanatory diagram of a drawing process for the three-chamfer substrate using the droplet discharge device, following FIG. 10. It is explanatory drawing of the drawing process with respect to the 8 chamfering board | substrate using a droplet discharge apparatus. FIG. 13 is an explanatory diagram of a drawing process for an 8-chamfered substrate using the droplet discharge device, following FIG. 12. It is explanatory drawing of the drawing process with respect to the 8-chamfering board | substrate using a droplet discharge apparatus following FIG. It is a flowchart explaining a color filter manufacturing process. (A)-(e) is a schematic cross section of the color filter shown to the manufacturing process order. It is principal part sectional drawing which shows schematic structure of the liquid crystal device using the color filter to which this invention is applied. It is principal part sectional drawing which shows schematic structure of the liquid crystal device of the 2nd example using the color filter to which this invention is applied. It is principal part sectional drawing which shows schematic structure of the liquid crystal device of the 3rd example using the color filter to which this invention is applied. It is principal part sectional drawing of the display apparatus which is an organic electroluminescent apparatus. It is a flowchart explaining the manufacturing process of the display apparatus which is an organic electroluminescent apparatus. It is process drawing explaining formation of an inorganic bank layer. It is process drawing explaining formation of an organic substance bank layer. It is process drawing explaining the process in which a positive hole injection / transport layer is formed. It is process drawing explaining the state in which the positive hole injection / transport layer was formed. It is process drawing explaining the process in which a blue light emitting layer is formed. It is process drawing explaining the state in which the blue light emitting layer was formed. It is process drawing explaining the state in which the light emitting layer of each color was formed. It is process drawing explaining formation of a cathode. It is a principal part disassembled perspective view of the display apparatus which is a plasma type display apparatus (PDP apparatus). It is principal part sectional drawing of the display apparatus which is an electron emission apparatus (FED apparatus). It is the top view (a) around the electron emission part of a display apparatus, and the top view (b) which shows the formation method.

Explanation of symbols

  DESCRIPTION OF SYMBOLS 1 ... Droplet discharge device 12 ... Maintenance means 13 ... Controller 21 ... Carriage unit 22 ... X-axis table 23 ... Y-axis table 62 ... Carriage 71 ... Functional droplet discharge head 95 ... Nozzle 500 ... Color filter 507a ... Pixel area F ... Filter area L ... Drawing line Lm ... Maximum width drawing line Lu ... Partial drawing line R ... Area drawing width We ... 8 chamfered substrate Wt ... 3 chamfered substrate

Claims (13)

A plurality of filter regions having a plurality of pixel regions are formed with a gap, and m (m is an integer of 1 or more) in the X-axis direction and n (n is an integer of 2 or more) in the Y-axis direction. A drawing method using a droplet discharge device that performs a drawing process by discharging and landing functional droplets on the plurality of pixel regions using a functional droplet discharge head into which a functional liquid is introduced on a substrate of a type ,
A drawing line is formed by a plurality of ejection nozzles of the functional liquid droplet ejection head so as to correspond to an area rendering width which is a width in the Y-axis direction of the k filter areas (k is a divisor of k and k ≠ n). With the configured
Main scanning for ejecting and driving the functional liquid droplet ejection head in synchronization with the relative movement of the functional liquid droplet ejection head in the X-axis direction with respect to the substrate; and the functional liquid droplet ejection head with respect to the substrate. A drawing method using a droplet discharge device, wherein the drawing process is performed by repeating sub-scanning that relatively moves in the Y-axis direction by the drawing line. A plurality of filter regions having a plurality of pixel regions are formed with a gap, and m (m is an integer of 1 or more) in the X-axis direction and n (n is an integer of 2 or more) in the Y-axis direction. A plurality of color functional liquids are introduced into a substrate of a type, and a plurality of functional liquid droplet ejection heads arranged at the same position in the Y-axis direction are used to eject functional liquid droplets to the plurality of pixel regions. A drawing method using a droplet discharge device that performs drawing processing by landing,
Each of the plurality of functional droplet discharge heads for each of the plurality of colors corresponds to a region drawing width that is a width in the Y-axis direction of the k filter regions (k is a divisor of k and k ≠ n). With a plurality of drawing lines for each color configured by the discharge nozzle,
Main scanning for driving and discharging each functional liquid droplet ejection head in synchronization with the relative movement of each functional liquid droplet ejection head with respect to the substrate in the X-axis direction; and each functional liquid droplet with respect to the substrate A drawing method using a droplet discharge device, wherein the drawing process is performed by repeating sub-scanning in which the discharge head is relatively moved by the drawing line in the Y-axis direction. A plurality of filter regions having a plurality of pixel regions are formed with a gap, and m (m is an integer of 1 or more) in the X-axis direction and n (n is an integer of 2 or more) in the Y-axis direction. A liquid droplet ejection apparatus that performs a drawing process by ejecting and landing functional liquid droplets on the plurality of pixel regions using a functional liquid droplet ejection head into which a functional liquid is introduced with respect to a type substrate,
The functional liquid droplet ejection head;
Moving means for moving the functional liquid droplet ejection head relative to the substrate in the X-axis direction and the Y-axis direction;
Control means for controlling the functional liquid droplet ejection head and the moving means,
The control means includes a plurality of the functional liquid droplet ejection heads so as to correspond to a region drawing width that is a width in the Y-axis direction of the k filter regions (k is a divisor of k and k ≠ n). Main scanning for discharging and driving the functional liquid droplet ejection head in synchronization with the relative movement of the functional liquid droplet ejection head in the X-axis direction with respect to the substrate in a state where a drawing line is configured by the ejection nozzle; A droplet discharge apparatus, wherein the drawing process is performed by repeating sub-scanning of moving the functional droplet discharge head relative to the substrate in the Y-axis direction by the drawing line. A plurality of the functional liquid droplet ejection heads are provided,
The plurality of functional liquid droplet ejection heads are mounted on a plurality of carriages to constitute a plurality of carriage units,
4. The drawing line according to claim 3, wherein partial drawing lines including a plurality of ejection nozzles of the plurality of functional liquid droplet ejection heads of the carriage units are continuously formed in the Y-axis direction. The liquid droplet ejection apparatus described. The moving means includes an X-axis table that mounts the substrate and moves the substrate in the X-axis direction, and a Y-axis table that individually moves the plurality of carriage units in the Y-axis direction,
The control means is configured to perform main scanning for ejecting and driving the functional droplet ejection heads in synchronization with the movement of the substrate in the X-axis direction, and the functional droplet ejection heads via the carriage unit. The liquid droplet ejection apparatus according to claim 4, wherein the drawing process is performed by repeating sub-scanning that moves by a drawing line. On the movement trajectory of the plurality of carriage units by the Y-axis table, a head storage means for storing each functional liquid droplet ejection head in a function maintaining state is provided,
The plurality of carriage units are configured by a number that covers the longest area drawing width of the substrate that can be mounted on the X-axis table with a maximum width drawing line constituted by all the partial drawing lines,
The control means includes the functional liquid droplet ejection heads of the minimum number of the carriage units constituting the drawing line corresponding to the area drawing width of the substrate mounted on the X-axis table among the plurality of carriage units. The liquid droplet ejection apparatus according to claim 5, wherein the drawing process is performed by operating the head, and the other carriage unit is allowed to face the head storage unit. A plurality of filter regions having a plurality of pixel regions are formed with a gap, and m (m is an integer of 1 or more) in the X-axis direction and n (n is an integer of 2 or more) in the Y-axis direction. A plurality of color functional liquids are introduced into a substrate of a type, and a plurality of functional liquid droplet ejection heads arranged at the same position in the Y-axis direction are used to eject functional liquid droplets to the plurality of pixel regions. A droplet discharge device that performs drawing processing by landing,
A plurality of functional droplet discharge heads by color;
Moving means for moving each functional liquid droplet ejection head relative to the substrate in the X-axis direction and the Y-axis direction;
A control means for controlling each of the functional liquid droplet ejection heads and the moving means,
The control means discharges the plurality of functional liquid droplets for each color so as to correspond to the area drawing width which is the width in the Y-axis direction of the k filter areas (k is a divisor of k and k ≠ n). Each functional liquid droplet is synchronized with the relative movement in the X-axis direction of each functional liquid droplet ejection head with respect to the substrate in a state where a plurality of color-specific drawing lines are formed by a plurality of ejection nozzles of the head. The drawing process is performed by repeating main scanning for discharging the ejection head and sub-scanning for moving each functional liquid droplet ejection head relative to the substrate in the Y-axis direction by the drawing line. A droplet discharge apparatus characterized by the above. A plurality of the functional liquid droplet ejection heads for each color are provided,
The plurality of functional liquid droplet ejection heads for each color are mounted on a plurality of carriages to form a plurality of carriage units,
The drawing lines for each color are configured such that partial drawing lines each including a plurality of ejection nozzles of the plurality of functional droplet ejection heads for each color of each carriage unit are continuously formed in the Y-axis direction. The liquid droplet ejection apparatus according to claim 7. The moving means includes an X-axis table that mounts the substrate and moves the substrate in the X-axis direction, and a Y-axis table that individually moves the plurality of carriage units in the Y-axis direction,
The control means is configured to perform main scanning for ejecting and driving the functional droplet ejection heads in synchronization with the movement of the substrate in the X-axis direction, and the functional droplet ejection heads via the carriage unit. The liquid droplet ejection apparatus according to claim 8, wherein the drawing process is performed by repeating sub-scanning that moves by a drawing line. On the movement trajectory of the plurality of carriage units by the Y-axis table, a head storage means for storing each functional liquid droplet ejection head in a function maintaining state is provided,
The plurality of carriage units are configured such that the maximum width drawing line constituted by all the partial drawing lines of each color covers the longest area drawing width of the substrate that can be mounted on the X-axis table,
The control means includes the functions of a minimum number of the carriage units constituting the plurality of color-specific drawing lines corresponding to the area drawing width of the substrate mounted on the X-axis table among the plurality of carriage units. 10. The droplet discharge apparatus according to claim 9, wherein the drawing process is performed by operating a droplet discharge head, and the other carriage unit is allowed to face the head storage unit.   11. A method of manufacturing an electro-optical device, wherein the droplet discharge device according to claim 3 is used to form a film forming portion with functional droplets on the substrate.   An electro-optical device using the droplet discharge device according to claim 3, wherein a film forming portion using functional droplets is formed on the substrate.   An electronic apparatus comprising the electro-optical device manufactured by the method for manufacturing the electro-optical device according to claim 11 or the electro-optical device according to claim 12 mounted thereon.

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