JP2006054298A - 積層型半導体装置の製造方法および製造装置 - Google Patents
積層型半導体装置の製造方法および製造装置 Download PDFInfo
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- H01L2224/48227—Connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked the item being non-metallic, e.g. insulating substrate with or without metallisation connecting the wire to a bond pad of the item
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- Encapsulation Of And Coatings For Semiconductor Or Solid State Devices (AREA)
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Abstract
【解決手段】 積層型半導体装置の製造方法は、支持基板上に半導体チップを複数段積層した積層チップを複数個配置し、各積層チップ単位で加熱を行いながら各積層チップにおける各段の半導体チップと前記支持基板間をワイヤで接続し、各積層チップの樹脂封止を行い、各積層チップごとに分離する、ことを特徴とする。積層型半導体装置の製造装置は、半導体チップを複数段積層した積層チップが複数個配置された支持基板の下方に、前記積層チップに対応して設けられた分割ヒータブロックと、この分割ヒータブロックをワイヤボンディング作業が行われる前記積層チップに対応して選択的に伝熱を行わせるようにしている。
【選択図】 図3
Description
2、4,7,9 接着材,
3、5,8,10 チップ、
6 スペーサ、
12 樹脂封止体
13,14,15,16 ワイヤ、
20、21,22,23 積層チップ
30.31,32,33 分割ヒータブロック
40 従動ローラ
50 カムプレート
60 シリンダ
Claims (5)
- 支持基板上に半導体チップを複数段積層した積層チップを複数個配置し、
各積層チップ単位で加熱を行いながら各積層チップにおける各段の半導体チップと前記支持基板間をワイヤで接続し、
各積層チップの樹脂封止を行い、
各積層チップごとに分離する、積層型半導体装置の製造方法。 - 前記積層チップ単位の加熱は、積層チップに対応して設けられた分割ヒータブロックによりおこなわれることを特徴とする請求項1に記載の積層型半導体装置の製造方法。
- 前記分割ヒータブロックをワイヤボンディング対象積層チップに対応して選択的に加熱することを特徴とする請求項2に記載の積層型半導体装置の製造方法。
- 前記分割ヒータブロックをワイヤボンディング対象積層チップに対応して選択的に近接させることを特徴とする請求項2に記載の積層型半導体装置の製造方法。
- 半導体チップを複数段積層した積層チップが複数個配置された支持基板の下方に、前記積層チップに対応して設けられた分割ヒータブロックと、
この分割ヒータブロックをワイヤボンディング作業が行われる前記積層チップに対応して選択的に伝熱を行わせるようにした、積層型半導体装置の製造装置。
Priority Applications (4)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2004234461A JP4406335B2 (ja) | 2004-08-11 | 2004-08-11 | 積層型半導体装置の製造方法および製造装置 |
TW094126989A TWI267185B (en) | 2004-08-11 | 2005-08-09 | Method and apparatus for manufacturing stacked-type semiconductor device |
US11/200,037 US7871856B2 (en) | 2004-08-11 | 2005-08-10 | Method and apparatus for manufacturing stacked-type semiconductor device |
US12/926,774 US20110079629A1 (en) | 2004-08-11 | 2010-12-08 | Method and apparatus for manufacturing stacked-type semiconductor device |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2004234461A JP4406335B2 (ja) | 2004-08-11 | 2004-08-11 | 積層型半導体装置の製造方法および製造装置 |
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Publication Number | Publication Date |
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JP2006054298A true JP2006054298A (ja) | 2006-02-23 |
JP4406335B2 JP4406335B2 (ja) | 2010-01-27 |
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JP2004234461A Expired - Fee Related JP4406335B2 (ja) | 2004-08-11 | 2004-08-11 | 積層型半導体装置の製造方法および製造装置 |
Country Status (3)
Country | Link |
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US (2) | US7871856B2 (ja) |
JP (1) | JP4406335B2 (ja) |
TW (1) | TWI267185B (ja) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2007102199A1 (ja) * | 2006-03-07 | 2007-09-13 | Solana Techno Corporation | マトリックスヒータ |
WO2014064796A1 (ja) * | 2012-10-25 | 2014-05-01 | 富士機械製造株式会社 | 印刷装置 |
Families Citing this family (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2007035864A (ja) * | 2005-07-26 | 2007-02-08 | Toshiba Corp | 半導体パッケージ |
JP2007035865A (ja) * | 2005-07-26 | 2007-02-08 | Toshiba Corp | 半導体パッケージとその製造方法 |
KR100809701B1 (ko) * | 2006-09-05 | 2008-03-06 | 삼성전자주식회사 | 칩간 열전달 차단 스페이서를 포함하는 멀티칩 패키지 |
WO2009022991A1 (en) * | 2007-08-14 | 2009-02-19 | Agency For Science, Technology And Research | Die package and method for manufacturing the die package |
Family Cites Families (10)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH07120679B2 (ja) * | 1988-07-04 | 1995-12-20 | 株式会社新川 | 半導体装置の製造装置 |
JP3089392B2 (ja) * | 1995-07-13 | 2000-09-18 | 株式会社新川 | ボンデイング装置 |
US6071759A (en) | 1996-07-15 | 2000-06-06 | Matsushita Electronics Corporation | Method for manufacturing semiconductor apparatus |
JP4075204B2 (ja) | 1999-04-09 | 2008-04-16 | 松下電器産業株式会社 | 積層型半導体装置 |
US6426552B1 (en) * | 2000-05-19 | 2002-07-30 | Micron Technology, Inc. | Methods employing hybrid adhesive materials to secure components of semiconductor device assemblies and packages to one another and assemblies and packages including components secured to one another with such hybrid adhesive materials |
JP4360742B2 (ja) | 2000-06-22 | 2009-11-11 | Necエレクトロニクス株式会社 | ボンディング装置 |
JP2002294723A (ja) | 2001-03-30 | 2002-10-09 | Watanabe Pipe | コンクリート基礎石用補強材 |
US6737750B1 (en) * | 2001-12-07 | 2004-05-18 | Amkor Technology, Inc. | Structures for improving heat dissipation in stacked semiconductor packages |
JP2003179092A (ja) | 2001-12-10 | 2003-06-27 | Nitto Denko Corp | 半導体装置の製造方法及びそれに用いるワイヤボンディング装置 |
JP4705748B2 (ja) * | 2003-05-30 | 2011-06-22 | ルネサスエレクトロニクス株式会社 | 半導体装置の製造方法 |
-
2004
- 2004-08-11 JP JP2004234461A patent/JP4406335B2/ja not_active Expired - Fee Related
-
2005
- 2005-08-09 TW TW094126989A patent/TWI267185B/zh active
- 2005-08-10 US US11/200,037 patent/US7871856B2/en not_active Expired - Fee Related
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2010
- 2010-12-08 US US12/926,774 patent/US20110079629A1/en not_active Abandoned
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2007102199A1 (ja) * | 2006-03-07 | 2007-09-13 | Solana Techno Corporation | マトリックスヒータ |
WO2014064796A1 (ja) * | 2012-10-25 | 2014-05-01 | 富士機械製造株式会社 | 印刷装置 |
Also Published As
Publication number | Publication date |
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US20060038275A1 (en) | 2006-02-23 |
TW200620622A (en) | 2006-06-16 |
US20110079629A1 (en) | 2011-04-07 |
TWI267185B (en) | 2006-11-21 |
US7871856B2 (en) | 2011-01-18 |
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