JP2006043778A - Actuator device - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To compensate for displacement by a normal actuator even if a defective actuator exists, and to improve a numerical aperture and luminance in the case of application as a display device. <P>SOLUTION: This actuator device 10A includes: a driving part 16 where a plurality of actuators 14 are arrayed in plane on a base plate 12; and a first plate member 18 to which the driving force of the plurality of actuators 14 in the driving part 15 is transmitted. A plurality of spacers 24 are formed between the first plate member 18 and the base plate 12, and m-number of cells 15 are formed by the spacers 24. The actuator 14 has a void 64, a vibrating part 66 and a fixed part 68 formed on the base plate 12. The rigidity of the first plate member 18 is larger than that of the vibrating part 66 of the actuator 14. <P>COPYRIGHT: (C)2006,JPO&NCIPI

Description

  The present invention relates to an actuator device that can be applied as a display device and can be applied to various applications such as an optical modulator and a variable capacitor.

  It has been clarified that an actuator device having a plurality of actuators can be applied as a display device, and can also be applied to various applications such as an optical modulator and a variable capacitor (see, for example, Patent Document 1). Here, taking a display device as an example, the present applicant has proposed a new display device in order to achieve the following effects.

(1) The clearance (gap) between the optical waveguide plate and the pixel structure can be easily formed, and can be formed uniformly over all pixels.

(2) The size of the gap can be easily controlled.

(3) The pixel structure can be prevented from sticking to the optical waveguide plate, and the response speed can be effectively increased.

(4) When a predetermined pixel structure contacts the optical waveguide plate, the contact surface (contact surface with the optical waveguide plate) of the pixel structure is smoothed so that light is efficiently introduced into the pixel structure. Can be formed.

(5) The response speed of the pixels can be ensured.

(6) Uniform luminance can be obtained over all pixels.

(7) The luminance of the pixel can be improved.

  That is, as shown in FIGS. 52 and 53, the display device 200 is provided with an optical waveguide plate 204 into which the light 202 is introduced, and one plate surface of the optical waveguide plate 204, and a large number of display devices 200. Between the actuator substrate 208 in which the number of actuators 206 corresponding to the pixel is arranged, the pixel structure 210 formed on each actuator 206 of the actuator substrate 208, and the optical waveguide plate 204 and the actuator substrate 208, the pixel And a spacer 212 formed in a portion other than the structure 210 (see, for example, Patent Document 2). A light shielding layer 218 is interposed between the optical waveguide plate 204 and the spacer 212.

  Examples of applications using piezoelectric actuators include Patent Documents 3-7.

JP 11-339561 A Japanese Patent Laid-Open No. 2003-161896 Japanese Patent Laid-Open No. 11-252333 JP 2003-52181 A JP 2000-314381 A Japanese Patent Laid-Open No. 2003-74475 WO 02/084751 A1 publication

  By the way, in the display device 200 described above, as a pixel configuration, for example, a method in which one pixel is configured by six actuators in two rows and three columns is conceivable. In this case, when one actuator 206 is defective, a portion corresponding to the actuator 206 is displayed as a black point or a white point regardless of the image display, which is disadvantageous in improving the image quality. There is a fear.

  That is, in the conventional actuator device, if even one actuator has a defect, the influence is related to the quality of the actuator device, so that there is a possibility that the yield may be limited. Another problem is that the area displaced by the actuator, that is, the effective area cannot be increased.

  The present invention has been made in consideration of such a problem, and even if a defective actuator exists, the displacement can be compensated for by a normal actuator, the yield can be improved, and it is effective. An object of the present invention is to provide an actuator device capable of increasing the area.

  Another object of the present invention is to provide an actuator device that exhibits the following effects when applied as a display device, for example.

(1) Even if a defective actuator exists, the displacement can be compensated for by a normal actuator, and defective pixels can be eliminated.

(2) The aperture ratio of the pixel can be improved.

(3) One pixel can be turned on / off by displacement of a plurality of actuators, and when one actuator is viewed, a region having the largest displacement among the actuators can be utilized. . This leads to improvement in luminance and contrast.

(4) The degree of freedom of the pixel shape can be increased.

  The actuator device according to the present invention includes a plurality of actuators arranged in a plane and a plate member to which a driving force of the plurality of actuators is transmitted, and the actuator includes a vibrating portion and a fixed portion. It is characterized by.

  As a result, the driving force from the plurality of actuators arranged in a plane is transmitted to the plate member. However, since each actuator is displaced in the vertical direction, the plate member is moved relative to the plate surface. It will be displaced in a nearly vertical direction.

  At this time, even if some of the plurality of actuators become defective, the displacement can be compensated by a normal actuator, and the yield can be improved. Further, the area of the portion displaced by the actuator, that is, the effective area can be increased. In particular, it is more preferable to connect three or more actuators with a plate member. The probability of failure is reduced, and the plate member can be displaced more stably. When the displacement direction of the actuator is the Z-axis direction and the surface direction of the plate member is the XY plane direction, three or more actuators may be arranged in the X-axis direction, or in the X-axis direction and the Y-axis direction. Two or more actuators may be arranged in each.

  In this case, it is preferable that the rigidity of the plate member is larger than the rigidity of the vibrating portion. As a result, even if one actuator fails due to a crack, disconnection, or the like, the plate member is displaced by displacement of another actuator, and the vibration portion of the failed actuator can be displaced by the force. As a result, even if one actuator fails, the displacement of the entire plate member can be hardly affected, so that the failure portion can be compensated.

  In addition, since the actuator has the vibration part, the failed actuator can be easily displaced by an external force. Such a defect compensation cannot be performed with, for example, a laminated actuator that does not have a vibration part.

  You may make it provide an unevenness | corrugation in the said plate member. In this case, the cross-sectional secondary moment of the plate member can be increased, and the bending rigidity of the plate member can be increased. The rigidity can be increased with a small amount of material, which is advantageous in reducing the weight. In addition, since the inertial mass is reduced, an effect of improving the response speed of the actuator can be obtained. Examples of the uneven shape include a groove shape and the like, but a plurality of dents and protrusions may be arranged in a matrix or a staggered pattern. In addition, as the shape of the unevenness, the shape seen from the plane is an X shape, a circular shape, a lattice shape, a stripe shape, a comb tooth shape, or the like, and the shape seen from the cross section is a dimple shape, a sawtooth shape, a mountain shape, etc. A mold shape, a wedge shape, a square shape, or the like may be used. Of course, the unevenness may be formed on both sides of the plate member, or may be formed only on one side. The plate member itself may be bent in a wave shape, for example.

  Further, the actuator and the plate member may be connected by a displacement transmission unit.

  Furthermore, the bending rigidity of the plate member is preferably 10 times or more that of the vibration part. Thereby, the bending amount of a board member becomes smaller. In this case, the structure can be made less susceptible to manufacturing variations such as the distance between the actuators and the size of the displacement transmission unit (when the actuator and the plate member are connected by the displacement transmission unit).

  A piezoelectric element, an electrostatic force, a magnetic force, an electromagnetic force, a spring, a wire, or the like can be used as a generation source of the driving force of the actuator.

  When a piezoelectric element is used as a source of actuator driving force, a unimorph structure, bimorph structure, monomorph structure, a structure in which a piezoelectric actuator is formed on a vibrating part, a structure in which a piezoelectric actuator is formed between a vibrating part and a fixed part, etc. Can be adopted.

  In an aspect in which electrostatic force is used as a source for generating the driving force of the actuator, electrodes are provided on the surface of the vibrating portion facing the fixed portion and on the surface of the fixed portion facing the vibrating portion. By applying a voltage to, an electrostatic force may be generated and the vibrating part may be displaced. Of course, electrodes may be formed on the surface of the vibration part, an insulator may be interposed between different electrodes so that different electrodes do not come into contact with each other, and the electrode surface is covered with an insulator. May be.

  Needless to say, it is preferable that the distance between the vibrating portion and the plate member does not change in the displacement process of the actuator. For example, when a displacement transmission part is interposed between the vibration part and the plate member, the thickness (height) of the displacement transmission part is hardly deformed by the displacement operation of the actuator (compression deformation, tensile deformation, buckling). It is preferable that the deformation does not occur. In this case, deformation due to compression and tension can be suppressed by adding a filler to the displacement transmitting portion.

  Further, in the above configuration, it is preferable that a width of a portion of the actuator connected to the displacement transmission unit is smaller than a width of the vibration unit. Thereby, the displacement and generated force of the vibration part can be reliably transmitted to the plate member by the displacement transmission part. In this case, it is preferable that the displacement transmission portion does not overlap the fixing portion so as not to hinder the displacement at the displacement transmission portion, and the displacement transmission portion vibrates in order to securely fix the vibration portion and the plate member. It is preferable not to be too small relative to the part. Furthermore, it is particularly preferable that the displacement transmitting unit connects the plate member and the vibrating unit at a position including a portion having the largest displacement among the vibrating units. Of course, since the displacement and generated force vary depending on the location of the vibration part, even if the connection part between the vibration part and the displacement transmission part does not include the vibration part with the largest displacement, the generated force and the required displacement The optimum value can be taken from the quantity. That is, the width of the displacement transmitting portion is 5% to 99%, more preferably 30% to 90% of the width of the vibrating portion. When viewed in terms of area, the cross sectional area of the displacement transmitting portion is 0.5% to 99%, more preferably 10% to 90% of the cross sectional area of the vibration portion. Further, the ratio between the height and width of the displacement transmitting unit, that is, the aspect ratio of the displacement transmitting unit is preferably smaller than 1, more preferably smaller than 0.2.

  In addition, if the rigidity of the vibration part is higher than the rigidity of the plate member, the plate member bends without being able to displace the vibration part of the failed actuator, and the part that is displaced in the plate member and the part that is not displaced Is not preferable.

  The vibrating portion may have a convex shape that is convex toward the plate member or concave toward the plate member. Compared with the case where the vibration part is not convex (for example, in a flat state), there is an effect of improving the response of the actuator, and even if the actuator fails, the displacement can be compensated by the adjacent actuator.

  The reason for this is that by arranging the plate member, the vibrating part must displace a larger mass, and the load is greater than when there is no plate member. By having the convex shape, it is considered that the driving force becomes stronger and the responsiveness is kept high. Moreover, it is thought that it can fully support even if the mass of a plate member is added because rigidity increases.

  On the other hand, when the actuator fails, the plate member driven by the adjacent actuator displaces the vibration part. At this time, it is desirable that the reaction force from the vibration part is small. The convex shape is considered to have a characteristic that the reaction force does not increase when displaced by the plate member while increasing the driving force.

  The convex shape of the vibration part may be formed in the length direction of the beam, or may be formed in a direction parallel to the joint between the vibration part and the fixed part. In particular, it is effective and preferable to have a wing shape (W shape) over the length of the beam. When it has a wing shape, it is preferable that the width of the convex shape, that is, the distance between the valleys is 1/3 or more of the length of the beam. Moreover, when it makes convex toward the said plate member, it is more preferable that the convex vertex protrudes in the plate member side rather than the height of a fixing | fixed part.

  In addition, when the vibration part has a convex shape, the vibration part preferably has an arch shape or a wave shape. This structure is particularly preferably used in a configuration in which both ends of the vibration part are connected to the fixed part and a structure in which the periphery of the vibration part is connected to the fixed part. If there is a void under the vibrating part, it can be considered that the void is filled with liquid and used, but in such a case, the periphery of the vibrating part is fixed to the fixed part so that the liquid does not leak. It needs to be connected.

  In addition, when the plate member is displaced by a normal actuator with respect to the failed actuator, and the vibration part of the failed actuator is pushed down via the displacement transmission part, for example, the vibration part whose periphery is connected to the fixed part has a flat cross section. If it is shaped, there is a possibility that the force that inhibits the displacement is increased by the tension of the tensioned vibration part. That is, in order to perform the displacement, the vibration part extends in the length direction. On the other hand, when the vibration part has an arch shape or a wave shape, the vibration part itself is longer than the shortest distance connecting the fixed parts. The force that inhibits the displacement becomes relatively weak.

  When the vibration part has an arch shape, the actuator is convex toward the plate member when the direction in which the actuator is displaced by the driving force is away from the plate member, and toward the plate member when the direction of displacement is toward the plate member. More preferably, it has a concave arch shape. The reason why the actuator in which the vibration part is convex toward the plate member is further displaced toward the plate member is that the length of the vibration part is further increased, and the force that inhibits the displacement is increased. . When the actuator having the vibrating portion convex toward the plate member receives a force in a direction away from the plate member via the displacement transmitting portion, the vibrating portion is deflected to receive the displacement.

  Thus, even when the vibration part is fixed to both ends with respect to the fixed part, or when the vibration part is fixed to the periphery, the rigidity of the vibration part does not become too high, so that the effect of satisfying the function of compensating for the failure is high. In addition, the degree of freedom in design is increased. Of course, the vibrating part may be fixed to the fixed part at one end.

  When the vibration part has an arch shape or a wave shape, the height (or depth) of the convex (or concave) toward the plate member is greater than the height (or depth) of the thickness of the vibration part. Is preferred.

  Needless to say, to ensure the response of the actuator, it is necessary that the rigidity of the vibration part does not become too small, the thickness and width of the vibration part, the length of the beam, the shape, the material, etc. It is natural that the selection is made in consideration of the above. Further, the convex or concave constituting the convex shape may not be formed in the central portion of the vibration part.

  The actuator device according to the present invention includes a plurality of cells arranged in a plane, and the cells include a plurality of actuators arranged in a plane and a plate to which driving forces of the plurality of actuators are transmitted. The actuator has a vibrating part and a fixed part. Each cell may have the same size (in this case, a unit cell) or may have a different size. Also in this case, it is preferable that the rigidity of the plate member is larger than the rigidity of the vibrating portion, as in the above-described invention.

  And in the said invention, the plate member of the said cell may be connected mutually. In this case, it is preferable that the rigidity of all or part of the joint portion that connects the plate members to each other is smaller than the rigidity of the plate members. As a method of making the rigidity of all or part of the joint part smaller than the rigidity of the plate member, a material that is less rigid than the plate member may be used as the joint part. And making the width of the joint part smaller than the width of the plate member.

  Further, in the above configuration, the joint portion that has a gap forming member for forming a gap between the fixing portion and the plate member in the plurality of actuators, and connects the plate members to each other and the fixing The part may be joined via the gap forming member. Thereby, the distance between the plate member and the fixed portion in each cell can be set accurately and reliably.

  In addition, the presence of a gap forming member between the joint portion and the fixed portion provides the following effects.

  That is, when the height of the fixed portion varies depending on the location, for example, when a plurality of actuators are formed on one substrate, when the substrate has undulations (many inevitable in manufacturing), When the plate member is disposed on the fixed portion, the distance between the plate member and the fixed portion varies depending on the location, and the actuator and the plate member may directly contact each other. In such a case, a part of the plate member is distorted, and the plate member may not be operated as desired by the operation of the actuator.

  However, if there is a gap forming member on the fixed part, the distance between the plate member and the fixed part can be secured by the gap forming member, so that the above-described problems do not occur even if the substrate is wavy.

  In addition, the displacement characteristics of the actuator may be affected by the connection with the plate member. However, if the distance between the plate member and the fixed part is defined by the gap forming member, the degree of change in the displacement characteristics will depend on the location. Regardless, it is uniform and has a great effect on suppressing the occurrence of variations. For example, since the thickness of the displacement transmitting portion can be made uniform, the influence on the displacement characteristics of each actuator can be made uniform.

  Furthermore, when there is no gap forming member, when the actuator and the plate member partially approach each other, the displacement transmission part for connecting the actuator and the plate member spreads larger than the size of the actuator, As a result, the operation of the actuator may be hindered, but such a problem can be avoided by providing a gap forming member.

  If the height of the gap forming member is higher than necessary, problems such as expansion and contraction of the gap forming member itself and characteristic changes due to an increase in the load on the actuator may occur. Therefore, by setting the gap forming member to an appropriate height, the above-described effects of the gap forming member can be sufficiently exhibited.

  In the above configuration, a second plate member is disposed, and one plate surface of the second plate member is opposed to one plate surface of the plate member (hereinafter referred to as the first plate member). It may be. Assuming the case where the first plate member and the second plate member are close to each other and facing each other, the gap is formed so that the distance between the second plate member and the first plate member is a predetermined distance. It is preferable to arrange and connect the members. In this case, it is preferable to connect a gap forming member between the second plate member and the fixed portion. When the joint portion and the fixed portion of the first plate member are connected by the gap forming member, the joint portion of the first plate member and the second plate member are connected via another gap forming member. It is also preferable to connect.

  As for the arrangement of the gap forming member, it is preferable to provide a gap forming member for each cell. This is because tight fixation is obtained and the gap distance can be set accurately and reliably. In addition, when a gap forming member is provided for each cell, if the effective area of the cell is reduced, a plurality of continuous cells are set as one large cell for the purpose of increasing the effective area efficiency. Alternatively, a gap forming member may be provided. Of course, you may make it provide a clearance gap formation member only in the outer periphery of an actuator apparatus.

  The gap forming member may be formed so as to surround the cell, or may be formed in a stripe shape along the opposite sides of the cell. Of course, columnar gap forming members may be arranged at the four corners or four sides of the cell.

  When the actuator device according to the present invention is configured as a display device, that is, the second plate member is an optical waveguide plate into which light from a light source is introduced, and among the plate members, the optical waveguide plate The following effects can be obtained when a pixel structure is formed on the opposite surface and the pixel structure is configured as a display device that controls light leakage from the optical waveguide plate by contacting and separating the pixel structure from the optical waveguide plate. be able to.

(1) Even if a defective actuator exists, the displacement can be compensated for by a normal actuator, and defective pixels can be eliminated.

(2) The aperture ratio of the pixel can be improved.

(3) One pixel can be turned on / off by displacement of a plurality of actuators, and when one actuator is viewed, a region having the largest displacement among the actuators can be utilized. . This leads to improvement in luminance and contrast.

(4) The degree of freedom of the pixel shape can be increased.

  If the fixed electrode of the variable capacitor is formed on the second plate member and the movable electrode of the variable capacitor is formed on the plate member, the movable electrode approaches the fixed electrode by driving a plurality of actuators. In addition, a variable capacitor whose capacity can be arbitrarily changed can be configured by separating and / or separating. Of course, the second plate member itself may be the fixed electrode of the variable capacitor, and the plate member itself may be the movable electrode of the variable capacitor.

  Further, an interference type optical modulator can be configured by using the second plate member as a transparent plate and a portion of the plate member facing the second plate member as a light reflecting surface. That is, by making the input light enter the plate member through the second plate member (transparent plate), the light reflected at the boundary between the back surface of the transparent plate (the surface facing the plate member) and the space (first reflected light). ) And light reflected by the light reflecting surface (second reflected light) are emitted as output light. At this time, an interference type optical modulator is obtained by arbitrarily adjusting the spectral distribution of the output light by the displacement between the plate member and the second plate member due to the interference between the first reflected light and the second reflected light. Will function as. As a structure which makes the part which opposes the said 2nd board member of the said board member into a light reflection surface, the surface which faces the said 2nd board member among the said board members is made into a mirror surface, or among the said board members In some cases, a light reflecting film is formed at a position facing the second plate member, or a light reflecting film is formed through an underlayer. In order to prevent unnecessary reflection, a layer such as an antireflection film may be provided on both sides or one side of the transparent plate.

  As described above, according to the actuator device of the present invention, even when a defective actuator exists, the displacement can be compensated for by a normal actuator, and the yield can be improved.

  Further, when the actuator device according to the present invention is applied as, for example, a display device, the following effects can be obtained.

(1) Even if a defective actuator exists, the displacement can be compensated for by a normal actuator, and defective pixels can be eliminated.

(2) The aperture ratio of the pixel can be improved.

(3) One pixel can be turned on / off by displacement of a plurality of actuators, and when one actuator is viewed, a region having the largest displacement among the actuators can be utilized. . This leads to improvement in luminance and contrast.

(4) The degree of freedom of the pixel shape can be increased.

  Embodiments of an actuator device according to the present invention will be described below with reference to FIGS.

  First, as shown in FIG. 1, the actuator device 10 </ b> A according to the first embodiment includes a drive unit 16 in which a plurality of actuators 14 are arranged in a plane on a substrate 12, and a plurality of actuators 14 in the drive unit 16. And a first plate member 18 to which the driving force is transmitted.

  A plurality of spacers 24 are formed between the first plate member 18 and the substrate 12, and m cells 15 are formed by these spacers 24. And n actuators 14 are assigned to each cell 15. Each cell 15 may have the same size (in this case, a unit cell) or may have a different size.

  Here, the actuator 14 has a void 64 formed in the substrate 12, a vibrating portion 66, and a fixing portion 68. That is, the portion of the substrate 32 where the void 64 is formed is thin, and the other portion is thick. The thin portion functions as the vibrating portion 66 with a structure that is susceptible to vibration against external stress, and the portion other than the void 64 functions as a fixing portion 68 that is thick and supports the vibrating portion 66. It is like that. A displacement transmission unit 76 that transmits the displacement of the actuator 14 to the first plate member 18 is interposed between the actuator 14 and the first plate member 18.

  An example of the configuration of the actuator 14 will be described with reference to FIG. 2. The actuator 14 includes a vibrating portion 66 and a fixed portion 68, a piezoelectric / electrostrictive layer 72 formed directly on the vibrating portion 66, and the piezoelectric portion. The actuator body 75 is composed of a pair of electrodes 74a and 74b formed on the upper and lower surfaces of the electrostrictive layer 72.

  As shown in FIG. 2, the pair of electrodes 74 a and 74 b may have a structure formed above and below the piezoelectric / electrostrictive layer 72, a structure formed only on one side, or only on the upper part of the piezoelectric / electrostrictive layer 72. A pair of electrodes 74a and 74b may be formed.

  When the pair of electrodes 74a and 74b are formed only on the upper part of the piezoelectric / electrostrictive layer 72, the planar shape of the pair of electrodes 74a and 74b is a shape in which a number of comb teeth complementarily face each other. As shown in JP-A-78549 and JP-A-2001-324961, a spiral shape or a multi-branch shape may be employed.

  1 and 3 to 34, the actuator main body 75 of the actuator 14 is omitted in order to avoid complication of the drawings.

  In the actuator device 10A according to the first embodiment, the first plate member 18 receives the driving force from the plurality of actuators 14 arranged in a plane, but each actuator 14 is vertical. Since the first plate member 18 is displaced in the direction, the first plate member 18 is displaced in a direction substantially perpendicular to the plate surface.

  A piezoelectric element, an electrostatic force, a magnetic force, an electromagnetic force, a spring, a wire, or the like can be used as a generation source of the driving force of the actuator 14.

  When a piezoelectric element is used as a source for generating the driving force of the actuator 14, a unimorph structure, a bimorph structure, a monomorph structure, a structure in which a piezoelectric actuator is formed on the vibration part 66, and a piezoelectric actuator is formed on the vibration part 66 and the fixed part 68. The structure etc. which were made can be employ | adopted.

  In an aspect in which electrostatic force is used as a source for generating the driving force of the actuator 14, electrodes are provided on the surface of the vibrating portion 66 that faces the fixed portion 68 and the surface of the fixed portion 68 that faces the vibrating portion 66. Then, by applying a voltage between these electrodes, an electrostatic force may be generated to displace the vibrating part 66 (see FIG. 9). Of course, an electrode may be formed on the surface of the vibration part 66, an insulator may be interposed between different electrodes so that different electrodes are not in contact with each other, and the electrode surface is made of an insulator. It may be coated.

  Next, as shown in FIG. 3, the actuator device 10B according to the second embodiment has substantially the same configuration as the actuator device 10A according to the first embodiment described above, but the first plate member. 18 is different in that it is separated in accordance with m cells 15.

  Here, preferred modes of the actuator devices 10A and 10B according to the first and second embodiments will be described with reference to FIGS.

  First, the rigidity of the first plate member 18 is preferably larger than the rigidity of the vibration part 66 of the actuator 14.

  This will be described with reference to the schematic diagrams of FIGS. FIG. 4 shows a configuration in which one first plate member 18 is connected to two actuators (first actuator 14 a and second actuator 14 b) via a displacement transmission unit 76. In addition, as shown in FIG. 6, you may make it provide the hole 170 in the location corresponding to between the displacement transmission parts 76 of the adjacent cell 15 among the fixing | fixed parts 68. FIG.

FIG. 5 shows a state in which the first actuator 14a is displaced and the first plate member 18 is displaced downward in a state where the second actuator 14b is out of order. That is, when the first actuator 14a is displaced downward by the distance w ₀ , the first plate member 18 tries to push down the second actuator 14b downward. The reaction force shows a state returned by the distance w ₁ . As a result, the first plate member 18 is bent by the distance w ₁ , and the vibration part 66 of the second actuator 14b is bent by the distance w ₂ = w ₀ −w ₁ .

  In order to simplify the calculation, it is assumed that the center of the vibration part 66 of the actuators 14a and 14b is equal to the center of the displacement transmission part 76, and a concentrated load is applied to the center of the vibration part 66. Further, it is assumed that the deformation of the displacement transmitting portion 76 due to the concentrated load can be ignored.

As shown in FIG. 5, the distance between the displacement transmitting portions 76 is L ₁ , the width of the vibrating portion 66 of the second actuator 14b is L ₂ , and the bending rigidity of the first plate member 18 is E ₁ I ₁ , If the bending rigidity of the vibration part 66 is E ₂ I ₂ , the force (P) at the center of the vibration part in the second actuator 14b is balanced,
w ₁ = PL ₁ ³ / (3E ₁ I ₁ ) ……………… (1) Cantilever beam W ₂ = PL ₂ ³ / (48E ₂ I ₂ ) ……… (2) Double-end beam , The ratio of W ₁ and W ₂ is
w ₁ / w ₂ = 16 × (L ₁ / L ₂ ) ³ × (E ₂ I ₂ / E ₁ I ₁ ) (3)
It becomes.

The smaller this ratio W ₁ / W ₂ is, the more the displacement of the second actuator 14b in the failed state can be compensated. That is, as the bending rigidity E ₁ I ₁ of the first plate member 18 is larger than the bending rigidity E ₂ I ₂ of the vibration part 66 of the first and second actuators 14a and 14b, the ratio W ₁ / W ₂ becomes larger. As a result, the displacement of the second actuator 14b can be compensated.

Further, as shown in FIGS. 7 and 8, the vibrating portion 66 may be configured to extend in a cantilever shape from the fixed portion 68 toward the space 64. Here, considering the concentrated load at the center (m) of the displacement transmitting portion 76 on the second actuator 14b,
w ₁ = PL ₁ ³ / (3E ₁ I ₁ ) ……………… (4) Cantilever W ₂ = PL ₂ ³ / (3E ₂ I ₂ ) ……………… (5) Cantilever And the ratio of W ₁ and W ₂ is
w ₁ / w ₂ = (L ₁ / L ₂ ) ³ × (E ₂ I ₂ / E ₁ I ₁ ) (6)
It becomes.

7 and 8 has an advantage that the ratio w ₁ / w ₂ can be further reduced because the structure can reduce L ₁ / L ₂ .

  7 and 8, when the electrode 172 is formed on the lower surface of the vibration part 66 in the first actuator 14a and the vibration part 66 in the second actuator 14b is formed, for example, as shown in FIG. An electrode 174 is formed on the lower surface of the first electrode, and an electrode 176 opposite to the electrode 172 and the electrode 174 is formed on the bottom of the cavity 64, whereby the first and second actuators 14a and 14b are displaced by electrostatic force. Can be made. That is, for example, when the second actuator 14b is in a failure state, the first actuator 14a is displaced downward by applying a voltage between the electrode 172 and the electrode 176, and accordingly, the first plate member 18 and The second actuator 14b can be displaced downward.

  As a method for increasing the bending rigidity of the first plate member 18, as shown in FIGS. 10 and 11, a plurality of grooves 178 may be provided on the lower surface of the first plate member 18. The direction in which the grooves 178 are formed (the direction in which the grooves 178 extend) is the direction in which the actuators 14 are arranged, and the depth of the grooves 178 is 10% or more of the thickness of the first plate member 18, more preferably 30. % Or more. Thereby, the cross-sectional secondary moment of the 1st board member 18 increases, and the bending rigidity of this 1st board member 18 can be enlarged.

  Further, as a method for increasing the bending rigidity of the first plate member 18, as shown in FIG. 12, a plurality of concave portions 180 and convex portions 182 may be arranged in a matrix shape or a staggered shape. This is because when the displacement direction of the actuator 14 is the z-axis direction and the surface direction of the first plate member 18 is the xy plane direction, two or more actuators 14 are arranged in the x-axis direction and the y-axis direction, respectively. This is suitable for increasing the bending rigidity of the first plate member 18 in this case. That is, by adopting the configuration shown in FIG. 12, the sectional moment in the x-axis direction and the y-axis direction is increased, and the bending rigidity in all directions is increased. In addition, the depth of the recessed part 180 and the height of the convex part 182 are 10% or more of the thickness of the 1st board member 18, More preferably, it is 30% or more. Further, as the shape of the concave portion 180 and the convex portion 182, the shape viewed from the plane is an X shape, a circular shape, a lattice shape, a stripe shape, a comb tooth shape, or the shape viewed from the cross section is a dimple shape. Sawtooth, chevron, wedge, square, etc. Of course, the concave portion 180 and the convex portion 182 may be formed on both surfaces of the first plate member 18 or may be formed only on one surface. Further, the first plate member 18 itself may be bent in a wave shape, for example.

Further, the bending rigidity of the first plate member 18 may be made larger than the bending rigidity of the vibrating portion 66 in terms of material and thickness. For example, when the material of the vibration part 66 is zirconium oxide, the longitudinal elastic modulus is 245.2 GPa, and when the material of the first plate member 18 is stainless steel (for example, SUS304), the longitudinal elastic modulus is 193.0 GPa. . When the cross section is rectangular, the second moment of the cross section is proportional to the cube of the thickness. Therefore, if the thickness of the vibrating portion 66 is 10 μm and the thickness of the first plate member 18 is 50 μm, for example, the first plate member 18 The bending rigidity ratio of the vibrating portion 66 is 193.0 × 50 ³ /245.2×10 ³ = 98.3, and the bending rigidity of the first plate member 18 is larger than the bending rigidity of the vibrating portion 66. Become.

  As a next preferable mode, the width of the portion connected to the displacement transmission unit 76 in the actuator 14 is smaller than the width of the vibration unit 66. As a specific configuration example of this aspect, for example, a configuration as shown in FIG.

  That is, in FIG. 13, the displacement transmitting portion 76 is formed to extend continuously over at least two actuators 14a and 14b, the upper surface thereof is substantially flat, and the lower surface is convex corresponding to the actuators 14a and 14b, respectively. A portion 184 is formed. When a cross section along the center of at least two actuators 14a and 14b is considered, one contact width of the displacement transmission portion 76 with respect to the first plate member 18 is d1, and the displacement transmission portion 76 with respect to the actuator (vibration portion 66). When one contact width is d2 and the width of the vibrating portion 66 is d3, d1> d3> d2 is satisfied. Here, the width is a value corresponding to the length of the beam when the vibrating portion 66 is viewed as a beam.

  In FIG. 14, the displacement transmission part 76 is formed separately corresponding to each of the actuators 14a and 14b. When a cross section along the center of at least two actuators 14a and 14b is considered, one contact width of the displacement transmission portion 76 with respect to the first plate member 18 is d1, and the displacement transmission portion 76 with respect to the actuator (vibration portion 66). When one contact width is d2 and the width of the vibration part 66 is d3, d3> d2 = d1 is satisfied.

  As a next preferred mode, the width of the portion connected to the displacement transmitting portion 76 in the first plate member 18 is smaller than the width of the vibrating portion 66. As a specific configuration example of this aspect, for example, the configuration shown in FIG. 14 or FIG.

  In FIG. 15, the displacement transmitting portion 76 is formed so as to extend continuously over at least two actuators 14a and 14b, the lower surface thereof is substantially flat, and the upper surface corresponds to the actuators 14a and 14b, respectively. Is formed. When a cross section along the center of at least two actuators 14a and 14b is considered, one contact width of the displacement transmission portion 76 with respect to the first plate member 18 is d1, and the displacement transmission portion 76 with respect to the actuator (vibration portion 66). When one contact width is d2 and the width of the vibrating portion 66 is d3, d1 <d3 = d2 is satisfied. Since the configuration of FIG. 10 has been described above, the description thereof is omitted here.

  In the case of the configuration shown in FIG. 15, as shown in FIG. 16, the second actuator 14b in the failed state can be displaced by displacing the first actuator 14a downward.

  As described above, in the actuator devices 10A and 10B according to the first and second embodiments, even if some of the actuators 14 out of the plurality of actuators 14 become defective, the normal actuators 14 are displaced. It is possible to compensate, and the yield can be improved. Further, the area of the portion displaced by the actuator 14, that is, the effective area can be increased.

  In particular, since the rigidity of the first plate member 18 is made larger than the rigidity of the vibration portion 66 of the actuator 14, even if one actuator 14 fails due to a crack, disconnection, etc., another actuator 14 is displaced. The first plate member 18 is displaced, and the vibration portion 66 of the actuator 14 that has failed due to the force can also be displaced. As a result, even if one actuator 14 fails, the displacement of the entire first plate member 18 is not affected, so that the failure portion can be compensated. In addition, since the actuator 14 has the vibrating portion 66, the failed actuator 14 can be easily displaced by an external force. Such a defect compensation cannot be performed by, for example, a laminated actuator that does not have the vibration part 66.

  The bending rigidity of the first plate member 18 is preferably 10 times or more that of the vibration part 66. Thereby, the bending amount of the 1st board member 18 becomes smaller. In this case, a structure that is not easily affected by manufacturing variations such as the distance between the actuators 14 and the size of the displacement transmitting portion 76 can be obtained.

  Further, since the groove 178, the concave portion 180, and the convex portion 182 are provided in the first plate member 18, the second moment of section of the first plate member 18 can be increased. Bending rigidity can be increased. In this case, the rigidity can be increased with a small amount of material, which is advantageous in reducing the weight. In addition, since the inertial mass is reduced, an effect of improving the response speed of the actuator can be obtained.

  In the displacement process of the actuator 14, it is preferable that the distance between the vibrating portion 66 and the first plate member 18 hardly changes. For example, when the displacement transmission unit 76 is interposed between the vibration unit 66 and the first plate member 18, the thickness (height) of the displacement transmission unit 76 is hardly deformed by the displacement operation of the actuator 14 ( It is preferable that the material is not subjected to compression deformation, tensile deformation, deformation due to buckling, or the like. In this case, it is possible to suppress deformation due to compression and tension by adding a filler to the displacement transmitting portion 76.

  In addition, since the width of the portion connected to the displacement transmission unit 76 of the actuator 14 is smaller than the width of the vibration unit 66, the displacement and the generated force of the vibration unit 66 are changed by the displacement transmission unit 76. The plate member 18 can reliably transmit. In particular, in the modes of FIGS. 13 to 15, it is possible to adopt a configuration that does not inhibit the displacement in the displacement transmission unit 76, and in the modes of FIGS. 13 and 14, the displacement transmission unit 76 does not overlap the fixing unit 68. Can be configured. In these cases, it is preferable that the displacement transmitting portion 76 is not too small relative to the vibrating portion 66 in order to securely fix the vibrating portion 66 and the first plate member 18. In this case, since the displacement and generated force differ depending on the location of the vibration part 66, even if the connection part between the vibration part 66 and the displacement transmission part 76 does not include the part with the largest displacement in the vibration part 66. The optimum value can be obtained from the force and the required displacement. That is, the width of the displacement transmission unit 76 is 5% to 99%, more preferably 30% to 90% of the width of the vibration unit 66. When viewed in terms of area, the cross sectional area of the displacement transmitting portion 76 is 0.5% to 99%, more preferably 10% to 90% of the cross sectional area of the vibrating portion 66. Further, the ratio between the height and width of the displacement transmitting portion 76, that is, the aspect ratio of the displacement transmitting portion 76 is preferably smaller than 1, more preferably smaller than 0.2.

  In addition, if the rigidity of the vibration part 66 is higher than the rigidity of the first plate member 18, the first plate member 18 is bent without being able to displace the vibration part 66 of the failed actuator 14, and the first plate member 18 is bent. This is not preferable because a portion that is displaced and a portion that is not displaced are formed in one plate member 18.

  In the aspect shown in FIG. 4, the vibration part 66 is flat, but the vibration part 66 may have an arch shape as shown in FIG. 17A or a wave shape as shown in FIG. 18. Good. In the example of FIGS. 17A and 18, a case is shown in which the vibrating portion 66 has a shape protruding toward the first plate member 18. In this case, there is an effect of improving the responsiveness of the actuator 14 compared to a case where the vibrating portion 66 is not convex (for example, in a flat state), and even if the actuator 14 fails, the adjacent actuator 14 compensates for the displacement. can do.

  The reason is that by arranging the first plate member 18, the vibrating portion 66 has to displace a larger mass, and the load is larger than when the first plate member 18 is not provided. It is considered that when the vibrating portion 66 has a convex shape, the driving force becomes stronger and the responsiveness is kept high. Moreover, it is thought that it can fully support even if the mass of the 1st board member 18 is added because rigidity increases.

  On the other hand, when the actuator 14 fails, the first plate member 18 driven by the adjacent actuator 14 displaces the vibration part 66. At this time, the reaction force from the vibration part 66 is Smaller is desirable. The convex shape is considered to have the characteristic that the reaction force does not increase when displaced by the first plate member 18 while increasing the driving force.

  And in the structure which makes the vibration part 66 convex, it is particularly preferable to use a structure in which both ends of the vibration part 66 are connected to the fixed part 68 and a structure in which the periphery of the vibration part 66 is connected to the fixed part 68. . If there is a void under the vibrating portion 66, there may be a case where the void is filled with a liquid, etc. In such a case, the periphery of the vibrating portion 66 is arranged so that the liquid does not leak. It is necessary to connect to the fixing portion 68.

  Further, in the state where the first plate member 18 is displaced by the normal actuator 14 with respect to the failed actuator 14 and the vibration portion 66 of the failed actuator 14 is pushed down via the displacement transmitting portion 76, the periphery is the fixed portion 68. If the vibrating portion 66 connected to the surface of the vibrating portion 66 has a flat cross-sectional shape, the force that inhibits the displacement may be increased by the tension of the vibrating portion 66 that is taut. That is, in order to perform the displacement, the vibration part 66 extends in the length direction. On the other hand, if the vibrating portion 66 has an arch shape or a wave shape, the length of the vibrating portion 66 itself is longer than the shortest distance connecting the fixed portions 68, as shown in FIG. When the force is received from the displacement transmission unit 76, the force that inhibits the displacement becomes relatively weak.

  When the vibration part 66 has an arch shape, when the direction in which the actuator 14 is displaced by receiving a driving force is a direction away from the first plate member 18, the vibration portion 66 has a convex arch shape toward the first plate member 18. It is preferable to have a concave arch shape toward the first plate member 18 when the direction of displacement is the direction toward the first plate member 18.

  Displacement of the actuator 14 having the vibrating portion 66 convex toward the first plate member 18 further toward the first plate member 18 further increases the length of the vibrating portion 66. This is because the force that inhibits the displacement increases. When the actuator 14 having the vibrating portion 66 convex toward the first plate member 18 receives a force in a direction away from the first plate member 18 via the displacement transmitting portion 76, the vibrating portion 66 is It will be displaced by bending.

  As described above, even when the vibrating portion 66 is fixed at both ends with respect to the fixing portion 68 or the periphery is fixed, the rigidity of the vibrating portion 66 does not become excessively high, so that an effect for satisfying the function of compensating for the failure is obtained. high. In addition, the degree of freedom in design is increased. Of course, the vibration part 66 may be fixed to the fixing part 68 at one end.

  When the vibration part 66 has an arch shape or a wave shape, the height (or depth) of the convex (or concave) toward the first plate member 18 is the height (or depth) of the thickness of the vibration part 66. It is preferable that it is larger than.

  Needless to say, the rigidity of the vibration part 66 does not have to be too small in order to ensure the response of the actuator 14, and the thickness and width of the vibration part 66, the length and shape of the beam Of course, the material is selected in consideration of the material and the like. Further, the convex or concave constituting the convex shape may not be formed in the central portion of the vibrating portion 66.

  The convex shape of the vibration part 66 may be formed in the length direction of the beam as shown in FIGS. 17A and 18, or parallel to the joint of the vibration part 66 and the fixing part 68 as shown in FIG. 20. It may be shaped in any direction. In particular, it is effective and preferable to have a wing shape (W shape) over the length of the beam. In FIG. 20, an arrow A indicates that it is deformed into a convex shape. When it has a wing shape, it is preferable that the width of the convex shape, that is, the distance between the valleys is 1/3 or more of the length of the beam. Further, when convex toward the first plate member 18, it is more preferable that the convex apex protrudes toward the first plate member 18 from the height of the fixing portion 68.

  As shown in FIGS. 21 and 22, for example, one first plate member 18 may be arranged for four actuators 14 arranged in a matrix. In this case, the actuators 14 are preferably arranged at the four corners of the first plate member 18. Thereby, it becomes possible to control the displacement of the first plate member 18 having a large area with a small number and a small area of the actuator 14, and the area of the portion displaced by the actuator 14, that is, the effective area (display device). The aperture ratio and the like when applied to can be increased. This leads to low power consumption and improvement in the rigidity of the substrate 12, and the planar shape can be stabilized.

  Further, as shown in FIG. 23, the actuators 14 are arranged at the four corners of the first plate member 18, respectively, at positions on the diagonal line of the first plate member 18 and close to the actuators 14. An actuator 14e for defect compensation may be arranged. Thereby, reliability can be improved significantly.

  The actuator devices 10A and 10B according to the first and second embodiments have a plurality of cells 15 arranged in a plane. In particular, the first of the actuator devices 10A according to the first embodiment. As shown in FIGS. 24 and 25, the plate members are connected to each other at portions corresponding to the respective cells 15. In this case, the rigidity of all or part of the joint portion 190 that connects the cells 15 to each other is set to be smaller than the rigidity of the portion 192 (hereinafter referred to as a cell portion) corresponding to the cell 15 of the first plate member 18. Has been.

  As a technique for making the rigidity of all or part of the joint portion 190 of the first plate member 18 smaller than the rigidity of the cell portion 192, a slit 194 or the like is provided in the joint portion 190 as shown in FIG. The width (2 × D2) of 190 is made smaller than the width D1 of the cell part 192, and, for example, a part 196 of the joint part 190 is made thinner than the cell part 192 as shown in FIG. 26B. It is done.

  In the example of FIG. 24, a slit 194 is provided between portions of the first plate member 18 corresponding to the spacer 24 (spacer portion 220), and the cell portion 192 and the spacer portion 220 are formed by the narrow arm portion 222. It is a connected form.

  In the example of FIG. 25, among the first plate member 18, a plurality of vertical ruled portions 224 and a plurality of horizontal ruled portions 226 extending in the vertical direction and the horizontal direction along the arrangement of the spacers 24 are respectively formed in the spacer portions 220. For example, the horizontal ruled part 226 and the cell part 192 are connected by a narrow arm part 222. That is, in this example, a slit 194A along the vertical ruled part 224 and a slit 194B along the horizontal ruled part 226 are formed.

  As a specific method, for example, as shown in FIG. 27, each half-etching from one surface (for example, the lower surface) of the first plate member 18 to half the thickness of the first plate member 18 is performed. A plurality of recesses 180 are formed in the cell portion 192. At this time, the concave portion 198 is formed by half-etching also in the joint portion 190 between the cell portions 192 and the portion where the slit is formed. Next, the portion of the opposite surface (for example, the upper surface) where the slit is formed is etched. Thereby, a hole is made in a portion where the slit is formed, and the slit 194 is formed.

  Thereby, since each cell part 192 among the 1st board members 18 has the cross-sectional secondary moment large by the some recessed part 180, bending rigidity becomes high. The joint portion 190 is approximately halved in thickness due to the formation of the recess 198, and the width is narrowed due to the formation of the slit 194, so that the bending rigidity is smaller than that of each cell portion 192. .

  In the actuator device 10A according to the first embodiment, for example, as shown in FIG. 24, the joint portion 190 and the fixing portion 68 (see FIG. 1) of the first plate member 18 are interposed via the spacer 24. Since they are joined, the distance between each cell portion 192 and the fixing portion 68 in the first plate member 18 can be set accurately and reliably.

  In particular, the presence of the spacer 24 between the substrate 12 and the joint portion 190 of the first plate member 18 provides the following effects.

  That is, when the height of the substrate 12 varies depending on the location, for example, when a plurality of actuators 14 are formed on one substrate 12, the substrate 12 has undulations (often inevitable in manufacturing). When the first plate member 18 is disposed on the substrate 12, the distance between the first plate member 18 and the substrate 12 varies depending on the location, and the actuator 14 and the first plate member 18 are in direct contact with each other. Sometimes. In such a case, a part of the first plate member 18 is distorted, and the operation of the actuator 14 may cause the first plate member 18 to be unable to operate as desired.

  However, if the spacer 24 exists between the joint portion 190 of the substrate 12 and the first plate member 18, the distance between the first plate member 18 and the substrate 12 can be secured by the spacer 24. However, the above problems do not occur.

  Further, when the actuator 14 is connected to the first plate member 18, the displacement characteristics of the actuator 14 are affected, but the distance between the first plate member 18 and the substrate 12 is defined by the spacer 24. As a result, the degree of change in the displacement characteristics of the actuator 14 is uniform regardless of the location, which is effective in suppressing the occurrence of variations. For example, since the thickness of the connection member (for example, the displacement transmission unit 76) for connecting the actuator 14 and the first plate member 18 can be made uniform, the influence on the displacement characteristics of each actuator can be made uniform.

  Further, in the case where there is no spacer 24, when the actuator 14 and the first plate member 18 are partially close to each other, for example, the displacement transmission portion 76 spreads larger than the size of the actuator 14, and as a result, Although there is a possibility that the operation of the actuator 14 may be hindered, such a problem can be avoided by providing the spacer 24.

  If the height of the spacer 24 is higher than necessary, problems such as expansion and contraction of the spacer 24 itself and characteristic changes due to an increase in the load on the actuator 14 may occur. Therefore, by setting the spacer 24 to an appropriate height, the above-described effect of the spacer 24 can be sufficiently exhibited.

  As for the arrangement of the spacers 24, it is preferable to provide the spacers 24 for each cell 15, as shown in FIG. This is because tight fixation is obtained, and the distance between each cell portion 192 and the fixing portion 68 can be set accurately and reliably. In addition, when the spacer 24 is provided for each cell 15, if the effective area of each cell portion 192 is reduced, for example, as shown in FIG. The cell 15 may be one large cell 200, and the spacer 24 may be provided in the large cell 200 unit. Of course, the spacer 24 may be provided only on the outer periphery of the actuator device 10A.

  The spacers 24 may be formed in a lattice shape so as to surround the cells 15 as shown in FIG. 29, or stripes may be formed along opposite sides of the cells 15 as shown in FIGS. You may make it form in a shape. Of course, columnar spacers 24 may be arranged at the four corners of the cell 15 as shown in FIG. 24, or columnar spacers 24 may be arranged on the four sides of the cell 15 as shown in FIG. May be.

  Next, as shown in FIG. 33, the actuator device 10 </ b> C according to the third embodiment has substantially the same configuration as the actuator device according to the first embodiment described above, but the first plate member 18. It differs in that it has one second plate member 20 disposed opposite to the first plate member 20.

  A plurality of spacers 22 are formed between the first plate member 18 and the second plate member 20, and in this case, for example, m cells 15 are formed by the spacers 22.

  As shown in FIG. 34, the actuator device 10D according to the fourth embodiment has substantially the same configuration as the actuator device 10B according to the second embodiment described above, but the first plate member 18 is m. It is different in that it is separated according to the number of cells 15. A plurality of spacers 26 are interposed between the second plate member 20 and the substrate 12 through gaps between the adjacent first plate members 18.

  The actuator devices 10A to 10D according to the first to fourth embodiments described above can be applied as display devices, and can also be applied to variable capacitors, optical modulators, and the like.

  Here, the display devices 30A and 30B according to the first and second specific examples to which the actuator devices 10C and 10D according to the third and fourth embodiments are applied as display devices will be described with reference to FIGS. explain.

  First, as shown in FIG. 35, the display device 30A according to the first specific example includes a driving unit 36 in which a plurality of actuators 34 are arranged in a planar manner (for example, in a matrix or zigzag) on one actuator substrate 32. One optical waveguide plate 38 that is disposed opposite to the actuator substrate 32 and into which the light 33 from the light source is introduced from the end surface, and is disposed between the actuator substrate 32 and the optical waveguide plate 38, and And a single connecting plate 40 to which the driving force of the plurality of actuators 34 in the driving unit 36 is transmitted.

  As shown in FIG. 36, a plurality of spacers 42 are formed between the actuator substrate 32 and the connecting plate 40 so as to surround each cell 50 (pixel forming section) in which pixels are formed. A plurality of spacers 44 are also formed between the corrugated plates 38 so as to surround the cells 50.

  Each cell 50 is partitioned, for example, in a rectangular shape by a plurality of spacers 42 and 44, and has a region including, for example, six actuators 34 (actuators in two rows and three columns). One pixel structure 52 is formed on the connecting plate 40 corresponding to each cell 50. In other words, this embodiment has a configuration in which one pixel component 52 on the connecting plate 40 is assigned to the six actuators 34 on the actuator substrate 32.

  A plurality of display devices 30A according to the first specific example are prepared. As shown in FIG. 37, a plurality of display devices 30A are arranged on the back surface of one light guide plate 60, for example, in a matrix. Thus, one large screen display device 62 is configured.

  The large screen display device 62 has a display device 30A on the back surface of the light guide plate 60 so that 640 pixels are arranged in the horizontal direction and 480 pixels are arranged in the vertical direction so as to comply with, for example, a VGA (Video Graphics Array) standard. Are arranged in the horizontal direction and four in the vertical direction.

  The light guide plate 60 has a large light transmittance in the visible light region, such as a glass plate or an acrylic plate, and a uniform one is used. Between the display devices 30A, wire bonding, soldering, and end face connectors are used. By connecting with a back surface connector or the like, signals can be supplied between each other.

  The light guide plate 60 and the optical waveguide plate 38 of each display device 30A preferably have similar refractive indexes. When the light guide plate 60 and the optical waveguide plate 38 are bonded together, a transparent adhesive or liquid is used. It may be used. Like the light guide plate 60 and the optical waveguide plate 38, the adhesive and the liquid are preferably uniform in the visible light region and have a high light transmittance, and the refractive index is also the light guide plate 60 and the optical waveguide plate. It is desirable to set a value close to 38 in order to ensure the brightness of the screen.

  In the above example, the large screen display device 62 is configured such that the surface of the display device 30A on the optical waveguide plate 38 side is bonded to the light guide plate 60. However, as shown in parentheses in FIG. Alternatively, the optical waveguide plate 38 may be omitted, and the large screen display device 62 may be configured by directly bonding the end face of the spacer 44 (see FIG. 35) to the light guide plate 60.

  On the other hand, inside the actuator substrate 32 in the display device 30A, a space 64 for forming a vibration part 66 described later is provided at a position corresponding to each actuator 34. Each space 64 communicates with the outside through a through hole (not shown) having a small diameter provided on the other end surface of the actuator substrate 32.

  Of the actuator substrate 32, the portion where the void 64 is formed is thin, and the other portion is thick. The thin portion functions as the vibrating portion 66 with a structure that is susceptible to vibration against external stress, and the portion other than the void 64 functions as a fixing portion 68 that is thick and supports the vibrating portion 66. It is like that.

  That is, as shown in FIG. 38, the actuator substrate 32 is a laminate of a substrate layer 32A, which is the lowest layer, a spacer layer 32B, which is an intermediate layer, and a thin plate layer 32C, which is the uppermost layer. It can be grasped as an integral structure in which a void 64 is formed at a location corresponding to the actuator 34. The substrate layer 32A functions not only as a reinforcing substrate but also as a wiring substrate. The actuator substrate 32 may be integrally fired or retrofitted.

  As a constituent material of the substrate layer 32A, the spacer layer 32B, and the thin plate layer 32C, for example, high heat resistance and high strength such as stabilized zirconium oxide, partially stabilized zirconium oxide, aluminum oxide, magnesium oxide, titanium oxide, spinel and mullite. And what has high toughness is employ | adopted suitably. The substrate layer 32A, the spacer layer 32B, and the thin plate layer 32C may all be made of the same material or different materials.

  The thickness of the thin plate layer 32C is set to 50 μm or less, preferably about 3 to 20 μm, in order to greatly displace the actuator 34.

  The spacer layer 32 </ b> B only needs to be present as the void 64 in the actuator substrate 32, and the thickness thereof is not particularly limited. However, on the other hand, the thickness may be determined according to the purpose of use of the space 64, and among them, the actuator 34 does not have a thickness more than necessary for functioning, and is preferably configured in a thin state. . That is, the thickness of the spacer layer 32B is preferably about the magnitude of the displacement of the actuator 34 to be used.

  With such a configuration, the bending of the thin portion (vibrating portion 66 portion) is limited by the substrate layer 32A close to the bending direction, and the destruction of the thin portion is prevented when an unintended external force is applied. The effect of doing is obtained. Note that it is possible to stabilize the displacement of the actuator 34 at a specific value by utilizing the effect of limiting the bending by the substrate layer 32A.

  Further, since the thickness of the actuator substrate 32 itself can be reduced and the bending rigidity can be reduced by making the spacer layer 32B thin, for example, when the actuator substrate 32 is bonded and fixed separately, the other party (for example, optical waveguide) The warpage of the self (in this case, the actuator substrate 32) or the like is effectively corrected with respect to the plate 38 and the connecting plate 40), and the reliability of adhesion and fixation can be improved.

  In addition, since the actuator substrate 32 is configured to be thin as a whole, the amount of raw materials used can be reduced when the actuator substrate 32 is manufactured, which is an advantageous structure from the viewpoint of manufacturing cost. Therefore, the specific thickness of the spacer layer 32B is preferably 3 to 50 μm, and more preferably 3 to 20 μm.

  On the other hand, the thickness of the substrate layer 32A is set to 50 μm or more, preferably about 80 to 300 μm for the purpose of reinforcing the entire actuator substrate 32 because the spacer layer 32B described above is formed thin.

  Here, specific examples of the actuator 34 and the pixel structure 52 will be described with reference to FIGS. 35 and 38. FIG. 35 shows a case where the light shielding layer 70 is provided between the optical waveguide plate 38 and the spacer 44 interposed between the optical waveguide plate 38 and the coupling plate 40.

  First, as shown in FIG. 38, the actuator 34 includes a vibrating portion 66 and a fixed portion 68, a piezoelectric / electrostrictive layer 72 formed directly on the vibrating portion 66, and an upper surface of the piezoelectric / electrostrictive layer 72. And an actuator body 75 composed of a pair of electrodes 74a and 74b formed on the lower surface.

  As shown in FIG. 38, the pair of electrodes 74a and 74b may have a structure formed above and below the piezoelectric / electrostrictive layer 72 or a structure formed only on one side, or only on the upper part of the piezoelectric / electrostrictive layer 72. A pair of electrodes 74a and 74b may be formed.

  When the pair of electrodes 74a and 74b are formed only on the upper part of the piezoelectric / electrostrictive layer 72, the planar shape of the pair of electrodes 74a and 74b is a shape in which a number of comb teeth complementarily face each other. As shown in JP-A-78549 and JP-A-2001-324961, a spiral shape or a multi-branch shape may be employed.

  The pair of electrodes 74a and 74b are made of aluminum, titanium, chromium, iron, cobalt, nickel, copper, zinc, niobium, molybdenum, ruthenium, palladium, rhodium, silver, tin, tantalum, tungsten, iridium, platinum, gold, Each metal such as lead, or an alloy containing two or more of these as constituents, and metal oxides such as aluminum oxide, titanium oxide, zirconium oxide, cerium oxide, and copper oxide are added to these metals and alloys. In addition, a conductive material such as a constituent material of the actuator substrate 32 described above with respect to a single metal and an alloy and / or a cermet in which the same material as the piezoelectric / electrostrictive material described later is dispersed is used. it can.

  As a method for forming the pair of electrodes 74a and 74b on the actuator substrate 32, a photolithography method, a screen printing method, a dipping method, a coating method, an electrophoresis method, an ion beam method, a sputtering method, a vacuum deposition method, an ion plating method. And film formation methods such as plating, chemical vapor deposition (CVD), and plating.

  Preferable examples of the constituent material of the piezoelectric / electrostrictive layer include lead zirconate, lead manganese tungstate, sodium bismuth titanate, bismuth ferrate, potassium sodium niobate, strontium bismuth tantalate, lead magnesium niobate, nickel niobium Lead oxide, lead zinc niobate, lead manganese niobate, lead magnesium tantalate, lead nickel tantalate, lead antimony stannate, lead titanate, barium titanate, barium copper tungstate, lead magnesium tungstate, lead cobalt niobate Or a composite oxide composed of two or more of these. These piezoelectric / electrostrictive materials include lanthanum, calcium, strontium, molybdenum, tungsten, barium, niobium, zinc, nickel, manganese, cerium, cadmium, chromium, cobalt, antimony, iron, yttrium, tantalum, and lithium. Further, oxides such as bismuth, tin, and copper may be dissolved.

  Instead of the piezoelectric / electrostrictive layer 72, an antiferroelectric layer may be used. In this case, there may be mentioned lead zirconate, lead zirconate and lead stannate composite oxide, lead zirconate, lead stannate and lead niobate composite oxide, and the like. These antiferroelectric materials may also have the above-described elements dissolved therein.

  Further, a material obtained by adding lithium bismutate, lead germanate, etc. to the above materials, for example, a material obtained by adding lithium bismutate or lead germanate to a composite oxide of lead zirconate, lead titanate and lead magnesium niobate The piezoelectric / electrostrictive layer 72 is preferable because it can exhibit high material properties while realizing low-temperature firing. Note that the low-temperature firing can be realized by addition of glass (for example, silicate glass, borate glass, phosphate glass, germanate glass, or a mixture thereof). However, excessive addition leads to deterioration of material characteristics, so it is desirable to determine the addition amount according to required characteristics.

  Incidentally, as shown in FIG. 38, when the electrode 74a is formed on the lower surface of the piezoelectric / electrostrictive layer 72 and the electrode 74b is formed on the upper surface of the piezoelectric / electrostrictive layer 72 as a pair of electrodes 74a and 74b, As shown in FIG. 35, it is possible to bend and displace the actuator 34 in one direction so as to be convex toward the space 64, and in other directions so that the actuator 34 is convex toward the connecting plate 40. It is also possible to bend and displace.

  Here, the opening width (area) of the space 64 is preferably larger than the width (area) of the actuator body 75, but the opening width (area) of the space 64 is equal to the width (area) of the actuator body 75. They may be the same or slightly smaller.

  A displacement transmitting portion 76 for transmitting the displacement of the actuator 34 to the connecting plate 40 is formed on the actuator 34. For example, an adhesive can be used for the displacement transmission unit 76. Of course, a filler-containing adhesive may be used. In this case, the end faces of the connecting plate 40 and the displacement transmitting portion 76 may be fixed (joined) or simply in contact with each other. Therefore, in the following description, the term “connection” is used to include these “adhesion” and “contact”. That is, the actuator 34 and the connecting plate 40 are connected via the displacement transmission unit 76.

  Although the displacement transmission part 76 is not specifically limited, A thermoplastic resin, a thermosetting resin, a photocurable resin, a moisture absorption curable resin, a normal temperature curable resin etc. can be mentioned as a suitable example.

  Specifically, acrylic resins, modified acrylic resins, epoxy resins, modified epoxy resins, silicone resins, modified silicone resins, vinyl acetate resins, ethylene-vinyl acetate copolymer resins, vinyl butyral resins, cyanoacrylate resins Examples include resins, urethane resins, polyimide resins, methacrylic resins, modified methacrylic resins, polyolefin resins, special silicone-modified polymers, polycarbonate resins, natural rubber, and synthetic rubber.

  In particular, a vinyl butyral resin, an acrylic resin, a modified acrylic resin, an epoxy resin, a modified epoxy resin, or a mixture of two or more of these is preferable because of its excellent adhesive strength, and in particular, an epoxy resin, a modified epoxy resin, Alternatively, a mixture of these is preferred.

  Even when there is an actuator with a defective displacement (defective actuator), the connecting plate 40 has an optimum rigidity to compensate for the displacement of the defective actuator by the displacement of the normal actuator 34 connected to the connecting plate 40. Material and thickness are selected.

That is, the connecting plate 40 is not particularly limited as long as it can use metal, ceramics, glass, organic resin, or the like and satisfies the above functions. For example, SUS304 (Young's modulus: 193 GPa, linear expansion coefficient: 17.3 × 10 ⁻⁶ / ° C.), SUS403 (Young's modulus: 200 GPa, linear expansion coefficient: 10.4 × 10 ⁻⁶ / ° C.), oxidation Zirconium (Young's modulus: 245.2 GPa, linear expansion coefficient: 9.2 × 10 ⁻⁶ / ° C.), glass (for example, Corning 0211, Young's modulus: 74.4 GPa, linear expansion coefficient: 7.38 × 10 ⁻⁶ / ° C. Etc.) are preferably used. In this embodiment, a SUS plate is used. In this case, the thickness of the SUS plate is preferably 10 μm to 300 μm.

  The constituent materials of the spacers 42 and 44 are preferably those that do not deform with respect to heat and pressure. For example, a thermosetting resin such as an epoxy resin, a photo-curing resin, a moisture curable resin, a room temperature curable resin, or the like is cured.

  Of course, the spacers 42 and 44 may contain a filler. Compared with the case where no filler is contained, the hardness is high, and the heat resistance, strength and dimensional stability are high. In addition, the amount of deformation accompanying an increase in the internal temperature of the display device 30A is significantly smaller than that of a spacer containing no filler. In other words, the inclusion of the filler can improve the hardness, heat resistance, and strength of the cured resin, and can significantly reduce the amount of expansion / contraction due to heat.

  For example, as illustrated in FIG. 35, the pixel structure 52 can be configured by a stacked body of a light scattering layer 78 and a transparent layer 80 formed on the connecting plate 40.

  In addition to the laminate, (1) when a color filter or a colored scatterer is interposed between the transparent layer 80 and the light scattering layer 78, (2) a light reflecting layer is laminated below the light scattering layer 78. In this case, (3) various combinations such as the case where the laminated body of the colored scattering layer and the transparent layer 80 is formed are conceivable.

  The formation of films such as the electrodes 74a and 74b, the piezoelectric / electrostrictive layer 72 and the spacer 42 on the actuator substrate 32 and the formation of the film such as the pixel structure 52 and the spacer 44 on the connecting plate 40 are not particularly limited. In addition, various known film forming methods can be applied.

  For example, as a method of forming a film on the surface of the actuator substrate 32 or the connecting plate 40, a film sticking method in which a chip-like film or a film-like film is directly attached, or a powder, paste, liquid, gas, ion, which is a raw material of the film Etc., screen printing method, photolithography method, spray dipping method, thick film forming method such as coating, ion beam method, sputtering method, vacuum deposition method, ion plating method, chemical vapor deposition (CVD) method, Examples include a thin film forming method such as plating.

  Here, the operation of the display device 30A will be briefly described with reference to FIGS. First, light 33 is introduced from, for example, an end of the optical waveguide plate 38. In this case, by adjusting the size of the refractive index of the optical waveguide plate 38 in a state where the pixel structure 52 is not in contact with the optical waveguide plate 38, all the light 33 is transmitted on the front and back surfaces of the optical waveguide plate 38. It should be totally reflected inside without transmitting. The refractive index of the optical waveguide plate 38 is desirably 1.3 to 1.8, and more desirably 1.4 to 1.7.

  In this example, since the end surface of the pixel structure 52 is in contact with the back surface of the optical waveguide plate 38 at a distance equal to or smaller than the wavelength of the light 33 in the natural state of the actuator 34, the light 33 is emitted from the pixel structure 52. Is reflected on the surface of the light and becomes scattered light 82. A part of the scattered light 82 is reflected again in the optical waveguide plate 38, but most of the scattered light 82 is not reflected by the optical waveguide plate 38 and passes through the front surface (surface) of the optical waveguide plate 38. Will do. As a result, all the actuators 34 are turned on, and the on state is realized in the form of light emission, and the light emission color corresponds to the color filter included in the pixel structure 52 and the color of the light scattering layer 78. Become. In this case, since the pixels corresponding to all the actuators 34 are in the on state, white is displayed from the screen of the display device 30A.

  Furthermore, a low level voltage (for example, −10 V) is applied as a drive voltage between the electrode 74 b and the electrode 74 a of the actuator 34, so that the end surface of the pixel structure 52 is against the back surface of the optical waveguide plate 38. It is possible to create a more reliable ON state by touching in a pressed state, and stable display is possible.

  In this state, when a high-level driving voltage (for example, 50 V) is applied between the electrodes 74b and 74a of the six actuators 34 corresponding to a certain pixel, the six actuators 34 corresponding to the pixel are shown in FIG. As shown in FIG. 4, since the bending displacement is convex so as to be convex toward the void 64, that is, the bending displacement is downward, this driving displacement is transmitted to the pixel structure 52 through the displacement transmitting portion 76 and the connecting plate 40, thereby The end surface of the pixel structure 52 is separated from the optical waveguide plate 38, the pixel corresponding to the pixel structure 52 is turned off, and the off state is realized in the form of quenching.

  That is, the display device 30 </ b> A can control the presence / absence of light emission (scattered light 82) on the front surface of the optical waveguide plate 38 based on the presence / absence of contact of the pixel structure 52 with the optical waveguide plate 38.

  Then, one frame (1/60 sec) in the image signal is divided into three time zones (first field to third field), and the three color light sources are switched in each field. For example, light from a red light source (R light source) is introduced in the first field, light from a green light source (G light source) is introduced in the second field, and light from a blue light source (B light source) is introduced in the third field. As a result, color display can be realized even with a monochrome pixel array, and in this case, one pixel can be configured by one pixel structure 52, so that high resolution can be realized.

  In the above description, the materials of the main constituent members of the display device 30A according to the first specific example have been described, but the materials of the other constituent members (the light 33, the actuator substrate 32, and the optical waveguide plate 38) will be described below.

  First, the light 33 incident on the optical waveguide plate 38 may be in the ultraviolet region, visible region, or infrared region. As the light source, an incandescent bulb, a deuterium discharge lamp, a fluorescent lamp, a mercury lamp, a metal halide lamp, a halogen lamp, a xenon lamp, a tritium lamp, a light emitting diode, a laser, a plasma light source, a hot cathode tube, a cold cathode tube, or the like is used.

  The vibrating portion 66 is preferably a high heat resistant material. The reason for this is that when the actuator 34 has a structure in which the vibration portion 66 is directly supported by the fixing portion 68 without using a material having poor heat resistance such as an organic adhesive, vibration occurs at least when the piezoelectric / electrostrictive layer 72 is formed. In order to prevent the portion 66 from being altered, the vibrating portion 66 is preferably made of a high heat resistant material.

  The vibrating portion 66 includes a wiring (for example, a row selection line) that communicates with one electrode 74a of the pair of electrodes 74a and 74b formed on the actuator substrate 32 and a wiring (for example, a signal line) that communicates with the other electrode 74b. In order to perform electrical separation, an electrically insulating material is preferable.

  Therefore, the vibration part 66 may be a high heat-resistant metal or a material such as enamel whose metal surface is coated with a ceramic material such as glass, but ceramic is optimal.

  As the ceramic constituting the vibrating section 66, for example, stabilized zirconium oxide, aluminum oxide, magnesium oxide, titanium oxide, spinel, mullite, aluminum nitride, silicon nitride, glass, a mixture thereof, or the like can be used. Stabilized zirconium oxide has high mechanical strength and high toughness even if the vibrating portion 66 is thin, and has low chemical reactivity with the piezoelectric / electrostrictive layer 72 and the pair of electrodes 74a and 74b. For this reason, it is particularly preferable. Stabilized zirconium oxide includes stabilized zirconium oxide and partially stabilized zirconium oxide. Stabilized zirconium oxide has a crystal structure such as a cubic crystal and thus does not cause a phase transition.

  On the other hand, zirconium oxide undergoes a phase transition between monoclinic and tetragonal crystals at around 1000 ° C., and cracks may occur during this phase transition. The stabilized zirconium oxide contains 1 to 30 mol% of a stabilizer such as calcium oxide, magnesium oxide, yttrium oxide, scandium oxide, ytterbium oxide, sodium oxide, or an oxide of rare earth metal. In order to increase the mechanical strength of the vibration part 66, the stabilizer preferably contains yttrium oxide. At this time, yttrium oxide is preferably contained in an amount of 1.5 to 6 mol%, more preferably 2 to 4 mol%, and further preferably 0.1 to 5 mol% of aluminum oxide.

  The crystal phase may be a cubic + monoclinic mixed phase, a tetragonal + monoclinic mixed phase, a cubic + tetragonal + monoclinic mixed phase, etc. However, a mixed phase of tetragonal crystal or tetragonal crystal + cubic crystal is most preferable from the viewpoint of strength, toughness, and durability.

  When the vibration part 66 is made of ceramics, a large number of crystal grains constitute the vibration part 66. In order to increase the mechanical strength of the vibration part 66, the average grain size of the crystal grains may be 0.05 to 2 μm. Preferably, it is 0.1-1 micrometer.

  The fixing portion 68 is preferably made of ceramics, but may be the same ceramic as the material of the vibrating portion 66 or may be different. As the ceramic constituting the fixing portion 68, for example, as with the material of the vibrating portion 66, for example, stabilized zirconium oxide, aluminum oxide, magnesium oxide, titanium oxide, spinel, mullite, aluminum nitride, silicon nitride, glass, these A mixture of the above can be used.

  In particular, the actuator substrate 32 used in the display device 30A according to the first specific example includes a material mainly composed of zirconium oxide, a material mainly composed of aluminum oxide, or a material mainly composed of a mixture thereof. Is preferably employed. Among these, those mainly composed of zirconium oxide are more preferable.

  In addition, although clay etc. may be added as a sintering auxiliary agent, it is necessary to adjust an auxiliary | assistant component so that what is easy to vitrify, such as a silicon oxide and a boron oxide, is not included excessively. This is because, although these materials that are easily vitrified are advantageous in bonding the actuator substrate 32 and the piezoelectric / electrostrictive layer 72, the reaction between the actuator substrate 32 and the piezoelectric / electrostrictive layer 72 is promoted, and a predetermined piezoelectricity is achieved. This is because it is difficult to maintain the composition of the electrostrictive layer 72, and as a result, the device characteristics are deteriorated.

  That is, it is preferable to limit the silicon oxide or the like in the actuator substrate 32 to 3% or less, more preferably 1% or less by weight. Here, the main component refers to a component present at a ratio of 50% or more by weight.

  The optical waveguide plate 38 has an optical refractive index such that the light 33 introduced into the optical waveguide plate 38 is totally reflected without transmitting to the outside of the optical waveguide plate 38 at the front and back surfaces. It is necessary that the transmittance in the wavelength region is uniform and high. The material is not particularly limited as long as it has such characteristics, but specifically, for example, translucent plastic such as glass, quartz, acrylic, translucent ceramics, or the like, or having a different refractive index. A general structure includes a multi-layer structure of materials, or a surface provided with a coating layer.

  Next, the effect of the display device 30A according to the first specific example will be described with reference to FIGS. 39A to 42 in comparison between the embodiment and the comparative example.

  The example has the same configuration as the display device 30A according to the first specific example, and the comparative example has the same configuration as the display device 300 according to the conventional example shown in FIG.

  First, the difference in aperture ratio for one pixel will be described. In the comparative example, as shown in FIG. 39B, when one cell 50 is considered, the contact area of, for example, six pixel structures 310 formed on each actuator 306 on the actuator substrate 308 shown in FIG. The aperture ratio is determined. In this case, since the area of each pixel component 310 is restricted by the area of the corresponding actuator 306 and there is a gap between adjacent pixel components 310, the end surface of the pixel component 310 emits light. A gap between the area 90 (area shown by hatching in FIG. 39B) and the pixel structure 310 becomes a non-light emitting area 92. That is, the light emitting area 90 is defined by six dot-shaped areas surrounded by the non-light emitting area 92.

  On the other hand, in the embodiment, as shown in FIG. 39A, when one cell 50 is considered, the aperture ratio is determined by the contact area of one pixel structure 52 formed on the connecting plate 40 shown in FIG. The In this case, the end face of the pixel structure 52 is the light emitting region 90 and the other part is the non-light emitting region 92. That is, the light emitting region 90 can be freely set regardless of the area of the actuator 34 and the displacement transmitting portion 76 of the actuator substrate 32, and the region that was the non-light emitting region 92 in the comparative example is also included as the light emitting region 90. Is possible. Of course, the light emitting region 90 can be extended to a range close to the cell 50.

  Therefore, in the embodiment, the aperture ratio can be significantly increased as compared with the aperture ratio of the comparative example.

  Next, let us look at the difference in displacement of the actuator for one pixel. In the comparative example, as shown in FIG. 40, the voltage applied to the actuator 306 is controlled to change the displacement amount of the pixel structure 310, thereby bringing the pixel structure 310 into contact with the optical waveguide plate 304 ( Light emission state) and a state separated from the optical waveguide plate 304 (quenching state).

  In the comparative example, since the pixel structure 310 directly formed on the actuator 306 is brought into contact with and separated from the optical waveguide plate 304, the shape of the vibration part 314 of the actuator 306 is reflected to some extent on the upper surface of the pixel structure 310. Is done. Therefore, when the pixel structure 310 is separated from the optical waveguide plate 304, the upper surface of the pixel structure 310 has a concave shape with respect to the optical waveguide plate 304, that is, a recess 316. Therefore, even if a voltage is applied to the actuator 306 to displace the pixel structure 310 in a direction away from the optical waveguide plate 304, if the displacement amount is insufficient, the upper end of the pixel structure 310 is positioned at the optical waveguide plate 304. It remains in a state where it is in contact with the film, and a complete extinction state cannot be obtained.

  That is, when the pixel structure 310 is displaced in a direction away from the optical waveguide plate 304, the central portion of the end surface of the pixel structure 310 corresponds to a portion where the maximum displacement amount of the actuator 306 can be obtained. Although it is displaced, the peripheral portion of the pixel structure 310 is slightly displaced because it corresponds to a portion of the actuator 306 that has a small amount of displacement. For example, when V1 is a voltage for obtaining a certain amount of displacement in the central portion of the pixel structure 310 and V2 is a voltage for obtaining the same amount of displacement in the peripheral portion of the pixel structure 310, V2> V1. The above-described difference in the amount of displacement due to the portion becomes significant when the end surface area of the pixel structure 310 is increased for the purpose of improving the aperture ratio of the pixel.

  If the distance between the optical waveguide plate 304 and the upper end of the pixel structure 310 must be equal to or greater than the distance d in order to completely separate the pixel structure 310 from the optical waveguide plate 304, the pixel structure 310 The amount of displacement of the peripheral portion needs to be greater than the distance d. That is, the voltage applied to the actuator 306 must be set in consideration of the displacement of the part of the actuator 306 corresponding to the peripheral portion of the pixel structure 310.

  In addition, when the distance between the upper end of the pixel structure 310 and the optical waveguide plate 304 is equal to or greater than d, the displacement amount of the central portion of the end surface of the pixel structure 310 is a distance D larger than the distance d. For this reason, when the pixel structure 310 is brought into contact with the optical waveguide plate 304 next, it takes time until the bottom of the concave portion 316 comes into contact with the pixel structure 310, and there is a possibility that the improvement of the responsiveness may be limited.

  On the other hand, in the embodiment, as shown in FIG. 41, the voltage applied to the actuator 34 is controlled and the displacement is transmitted to the displacement transmitting unit 76 and the connecting plate 40 to change the displacement amount of the pixel structure 52. Thus, a state where the pixel structure 52 is in contact with the optical waveguide plate 38 (light emission state) and a state where the pixel structure 52 is separated from the optical waveguide plate 38 (extinction state) are obtained.

  In this case, the end face of the pixel structure 52 formed on the connecting plate 40 is flat regardless of the shape of the vibration part 66 in the actuator 34. In addition, since the aperture ratio of the pixel is determined by the pixel structure 52 formed on the connecting plate 40 regardless of the cross-sectional area of the displacement transmission unit 76 formed on the actuator 34, the displacement transmission unit 76 It can be set finely. Therefore, the displacement transmission unit 76 can be installed in the central portion of the actuator 34 where the maximum displacement amount can be obtained, and the displacement amount of the displacement transmission unit 76 is set to an amount substantially close to the maximum displacement amount of the actuator 34. can do.

  Therefore, when the distance between the optical waveguide plate 38 and the upper end of the pixel structure 52 is not less than the distance d in order to completely separate the pixel structure 52 from the optical waveguide plate 38, the voltage applied to the actuator 34 is Of these, it is only necessary to set in consideration of the displacement of the portion where the maximum amount of displacement is obtained, and the voltage can be greatly reduced as compared with the comparative example. As a result, it is possible to obtain effects such as reduction in power consumption, reduction in voltage and cost of the driver circuit for driving, and improvement in reliability.

  Next, a change in brightness when there is a defective actuator will be described with reference to FIGS. 39A to 42.

  In the comparative example, as shown in FIG. 39B, when one cell 50 is considered, one pixel is formed by, for example, six pixel structures 210 formed on each actuator 306 on the actuator substrate 308 (see FIG. 32). Is formed.

  In the embodiment, as shown in FIG. 39A, when one cell 50 is also considered, one pixel is formed by one pixel structure 52 formed on the connecting plate 40 (see FIG. 41). Under the connecting plate 40, there are six actuators 34.

  Numbers 1, 2, 3,... 6 displayed in FIGS. 39A and 39B indicate the order of increase of defective actuators by serial numbers.

  FIG. 42 shows the luminance change during the on / off operation of the pixel with respect to the defect rate of the actuator 206 or 34 (the number of defective actuators / the number of actuators constituting one pixel).

  In the comparative example, when the number of defective actuators increases in the order shown in FIG. 39, the luminance change in the comparative example decreases proportionally as the number of defective actuators increases as shown by the solid line A in FIG.

  On the other hand, as shown by a broken line B in FIG. 42, the luminance change in the example hardly decreases when the defect rate of the actuator 34 is 2/6 or less, and the defect rate is 3/6. It was a decrease in luminance change of about 5%. That is, in the embodiment, it is possible to keep a large change in luminance even when a defective actuator is present, as compared with the comparative example.

  In the same configuration as in the embodiment, when one pixel is formed by the four actuators 34, the luminance change does not decrease if the defect rate is 1/4 or less. When one pixel is formed by the three actuators 34, the luminance change does not decrease if the defect rate is 1/3 or less.

  Further, in the same configuration as in the comparative example, when one pixel is formed by two actuators, the decrease in luminance change with a defect rate of ½ was almost 50%. When one pixel is formed by two actuators, a decrease in luminance change at a defect rate of ½ is suppressed to 25% or less.

  As described above, even if some of the actuators 34 are defective, the failure rate can be reduced, the yield rate can be increased, the yield can be improved, and the product cost can be effectively reduced.

  In addition, when a force for displacing the connecting plate 40 is applied due to the normal displacement of the actuator 34, the vibrating portion 66 bends downward in the defective actuator 34. For this reason, even if there is a defective actuator 34, the connecting plate 40 is displaced according to the displacement of the normal actuator 34 (the portion corresponding to the defective actuator 34 is also displaced), and the pixel structure 52 operates normally. .

  In the display device 30A according to the first specific example described above, one coupling plate 40 is disposed between the optical waveguide plate 38 and the actuator substrate 32, and between the actuator substrate 32 and the coupling plate 40, and the optical waveguide. Since a plurality of spacers 44 are formed between the plate 38 and the connecting plate 40 in accordance with the cells 50, the portions of the connecting plate 40 adjacent to the spacers 42 and 44 are affected by the tension of the connecting plate 40. There is a possibility that the displacement of the connecting plate 40 itself is lowered (the rigidity is increased). However, as shown in FIG. 43, if the slit 110 is formed in a portion close to the spacer 42 in the joint portion 190 between the cells 50 in the connecting plate 40, the portion (a part of the joint portion 190). Therefore, it is possible to avoid a decrease in displacement as described above, and to relieve thermal stress and mechanical stress.

  By forming the slit 110 in the connecting plate 40, a portion of the connecting plate 40 that is narrowed by the slit 110, that is, a boundary portion (also a fixed region) of the cell 50 in the connecting plate 40 and the pixel structure 52. A portion (hereinafter, simply referred to as an arm portion 111) that connects a portion corresponding to (also a movable region) is formed.

  Needless to say, the arm portion 111 is given adequate rigidity in order to facilitate the handling of the connecting plate 40 in the manufacturing process while securing the displacement of the portion corresponding to the pixel structure 52 in the connecting plate 40. It is preferable to optimize the shape, thickness, and structure. More preferably, the movable region has a high bending rigidity to compensate for the displacement of the defective actuator, and the arm portion 111 has a low bending rigidity.

  As a method of forming the slit 110 in the connecting plate 40 and making the thickness of the arm portion 111 thinner than the surroundings, a half etching method, a sand blast method, or the like is preferably used. Further, by clamping the fixed region and pushing the movable region down in the thickness direction in that state, the arm unit 111 is stretched, and then the movable region is pushed up in the opposite direction, whereby the side surface shape of the arm unit 111 is changed. For example, it can be formed in an arch shape. Thereby, the displacement fall by the tension | tensile_strength of the arm part 111 can further be suppressed. The planar shape of the arm portion 111 may be an L shape, a spiral shape, a bellows shape, or the like other than the linear shape shown in FIG.

  Next, a display device 30B according to a second specific example will be described with reference to FIG. In addition, the same code | symbol is attached | subjected about the thing corresponding to FIG. 35, and the duplicate description is abbreviate | omitted.

  As shown in FIG. 44, the display device 30B according to the second specific example has substantially the same configuration as the display device 30A according to the first specific example described above, but the connecting plate 40 is aligned with the cell 50. It is different in that it is separated. That is, a plurality of connecting plates 40 are arranged in a plane between the optical waveguide plate 38 and the actuator substrate 32.

  In this relation, a plurality of spacers 112 are formed between the optical waveguide plate 38 and the actuator substrate 32, and these spacers 112 pass through the gaps between the adjacent connecting plates 40 and the optical waveguide plate 38 and the actuator substrate 32. It is interposed between

  In the display device 30B according to the second specific example, since the connecting plates 40 are separated in accordance with the cells 50, each connecting plate 40 has a tension of the adjacent connecting plates 40 during displacement driving. And the spacer 112 or the like.

  If there is a defective actuator, the connecting plate 40 will be somewhat affected by the displacement drop caused by the defective actuator. However, for example, when six actuators 34 are assigned to one pixel structure 52, The luminance change with respect to the defect rate of the actuator 34 is 0% when the defect rate is 1/6, approximately 3% when the defect rate is 2/6, and approximately 5% when the defect rate is 3/6. The display according to the first embodiment. It has almost the same performance as the device 30A.

  Next, an example in which the actuator device 10D according to the fourth embodiment is applied to uses other than display will be described with reference to FIGS. 45 to 48C.

  First, a variable capacitor 120 according to a specific example shown in FIG. 45 includes a drive unit 36 in which a plurality of actuators 34 are arranged in a plane on an actuator substrate 32, and one metal disposed to face the drive unit 36. A fixed electrode 122 made of a plate, and a movable electrode made of one metal plate that is arranged between the actuator substrate 32 and the fixed electrode 122 and that transmits the driving force of the plurality of actuators 34 in the drive unit 36 via the displacement transmission unit 76. 124. The fixed electrode 122 is fixed to the actuator substrate 32 by a spacer 112 interposed between the fixed electrode 122 and the actuator substrate 32.

  In the variable capacitor 120, the movable electrode 124 approaches or separates from the fixed electrode 122 by driving the plurality of actuators 34. That is, the distance da between the fixed electrode 122 and the movable electrode 124 is precisely changed by the plurality of actuators 34, and the capacitance between the electrodes 122 and 124 can be arbitrarily changed.

  Further, by increasing the facing area between the fixed electrode 122 and the movable electrode 124, the dynamic range of the capacitance can be widened. Since a plurality of actuators 34 are assigned to one movable electrode 124, the distance between the fixed electrode 122 and the movable electrode 124 can be precisely controlled over a wide area.

  Even if there is a defective actuator that does not operate, the characteristic of the variable capacitor 120, that is, the change characteristic of the capacitance value with respect to the level of the control signal supplied to the variable capacitor 120 hardly fluctuates. Therefore, the yield of the variable capacitor 120 with stable characteristics can be improved.

  In the above-described example, the case where the fixed electrode 122 and the movable electrode 124 are each formed of a metal plate is shown. However, as in the variable capacitor 120a according to the modified example shown in FIG. The conductive film 126 is formed on the plate member 125 using an arbitrary material such as a resin film, and the movable electrode 124 is formed on the plate member 127 using an arbitrary material such as glass, ceramics, or a resin film. Alternatively, the conductive film 128 may be formed.

  Next, the interferometric optical modulator 130 according to the specific example shown in FIG. 47 is arranged so as to be opposed to the drive unit 36 in which a plurality of actuators 34 are arranged in a plane on the actuator substrate 32. One transparent plate 132, and one mirror member that is arranged between the actuator substrate 32 and the transparent plate 132 and that transmits the driving force of the plurality of actuators 34 in the driving unit 36 via the displacement transmitting unit 76. 134. The transparent plate 132 is fixed to the actuator substrate 32 by a spacer 112 interposed between the transparent plate 132 and the actuator substrate 32.

  In this interferometric light modulator 130, the input light Li is incident on the mirror member 134 through the transparent plate 132, so that the light reflected at the boundary between the back surface of the transparent plate 132 (the surface facing the mirror member 134) and the space. (First reflected light L1) and light reflected by the surface of the mirror member 134 (second reflected light L2) are emitted as output light Lo. At this time, the spectral distribution of the output light Lo is determined by the distance db between the transparent plate 132 and the mirror member 134 due to interference between the first reflected light L1 and the second reflected light L2. Therefore, the spectral distribution of the output light Lo is changed by changing the distance db between the transparent plate 132 and the mirror member 134 by moving the mirror member 134 toward or away from the transparent plate 132 by driving the plurality of actuators 34. It can be controlled arbitrarily. The interference light modulator 130 can be used as a color display device, a color filter, an optical switch, or the like. In particular, since a connecting plate is used for the interference part (mirror member 134), flatness can be ensured on the light input surface and the interference part can be provided over a wide area. Moreover, even if some actuators are defective, there is almost no influence on the displacement operation of the interference part. In the above-described example, an example in which the upper surface of the interference part is flattened has been shown. However, the upper part of the interference part may be inclined or uneven as necessary.

  As shown in FIG. 48A, for example, the mirror member 134 may be configured by mirroring at least a surface 135a of the metal plate 135 facing the transparent plate 132 (see FIG. 47), or FIG. 48B. As shown in FIG. 4, the light reflecting film 137 may be directly formed on a part of the surface of the arbitrary plate member 136 that faces the transparent plate 132. Alternatively, as shown in FIG. 48C, a light reflection film 137 may be formed on a part of the surface of the arbitrary plate member 136 that faces the transparent plate 132 via a base layer 138. In the example of FIGS. 48B and 48C, it is preferable that the surface of the plate member 136 is a light absorbing surface because unnecessary scattered light is not generated.

  In the actuator devices 10A to 10D according to the first to fourth embodiments described above, the example using the substrate 12 has been shown, but other configurations that do not use the substrate 12 can also be preferably employed.

  Hereinafter, an actuator device 10E according to a fifth embodiment that does not use the substrate 12 will be described with reference to FIG.

  As shown in FIG. 49, the actuator device 10E according to the fifth embodiment is characterized in that a laminated body 156 in which a diaphragm layer 152 and a piezoelectric functional layer 154 are laminated instead of the substrate 12 is used.

  The piezoelectric functional layer 154 includes a plurality of lower electrodes 74a formed on the vibration plate layer 152, a piezoelectric / electrostrictive layer 72 formed on the entire surface of the vibration plate layer 152 including the lower electrode 74a, and the piezoelectric / electrostrictive layer. A plurality of upper electrodes 74 b formed on the strained layer 72. The diaphragm layer 152 has a function of amplifying the amount of displacement in the piezoelectric / electrostrictive layer 72. That is, the multilayer body 156 has a configuration in which a plurality of actuators 14 are arranged, and the multilayer body 156 itself constitutes the drive unit 16. The diaphragm layer 152 may be made of the same material as that of the piezoelectric / electrostrictive layer 72 of the piezoelectric functional layer 154, or may be made of different component materials. Moreover, the laminated body 156 can be produced by laminating ceramic green sheets, and the upper electrode 74b and the lower electrode 74a can be easily formed by screen printing or the like.

  The actuator device 10E according to the fifth embodiment includes the driving unit 16, the first plate member 18 to which the driving force of the plurality of actuators 14 in the driving unit 16 is transmitted, And one second plate member 20 disposed to face one plate member 18.

  Also in this case, a plurality of spacers 22 are formed between the first plate member 18 and the second plate member 20, and m cells 15 are formed by these spacers 22, for example. A plurality of spacers 24 are also formed between the first plate member 18 and the laminated body 156, and m cells 15 are formed by these spacers 24. And n actuators 14 are assigned to each cell 15. Displacement transmission portions 76 for transmitting the driving force of each actuator 14 to the first plate member 18 are formed on each actuator 14.

  On the other hand, the upper electrode 74b in the stacked body 156 has, for example, an electrode pattern separated in units of 15 cells or an electrode pattern separated in units of rows, and the lower electrode 74a has an electrode pattern separated in units of actuators 14. Have. These electrodes 74a and 74d may be upside down.

  Moreover, the laminated body 156 has a configuration in which it is disposed on the fixed plate 158 via a plurality of spacers 160 and 162. The spacers 160 and 162 on the fixed plate 158 include, for example, a plurality of first spacers 160 that are formed so as to correspond to the spacers 24 formed between the first plate member 18 and the laminated body 156. Each cell 15 has a plurality of second spacers 162 formed in a portion excluding the actuator 14.

  In the actuator device 10E according to the fifth embodiment, a part of the diaphragm layer 152 (positionally corresponding to the actuator 14) is formed by the first and second spacers 160 and 162 formed on the fixed plate 158. Since the space surrounded by the fixing plate 158, the first and second spacers 160 and 162, and the diaphragm layer 152 is pseudo, the space of the actuator substrate 32 shown in FIG. Therefore, the displacement direction of the actuator 14 can be easily determined.

  Further, since the laminated body 156 is supported on the fixed plate 158 by the first and second spacers 160 and 162, crosstalk (effect of displacement) between the actuators 14 and between the cells 15 can be reduced. . Moreover, there is an advantage that the response of switching (displacement operation of the first plate member 18) is improved. Further, the provision of the fixing plate 158 increases the mechanical strength of the actuator device 10E itself, and facilitates handling during transportation and manufacturing.

  In addition, the displacement amount and generated force of each actuator 14 can be increased by laminating the plurality of piezoelectric functional layers 154. An arbitrary displacement mode can be obtained only by changing the installation positions of the spacers 22, 24, 160, and 162. A desired displacement can be obtained by arbitrarily changing the electrode patterns of the upper electrode 74b and the lower electrode 74a.

  When the actuator device 10E according to the fifth embodiment is applied as a display device, the second plate member 20 is the optical waveguide plate 38, and light shielding is provided between the second plate member 20 and the spacer 22. It can be easily realized by forming the layer 70 (indicated by a two-dot chain line) and forming the pixel structure 52 (indicated by a two-dot chain line) on the first plate member 18.

  As a modification of the actuator device 10E according to the fifth embodiment, for example, the second plate member 20 may not be provided like the actuator device 10Ea according to the first modification in FIG. Like the actuator device 10Eb according to the second modification example in FIG. 51, the second plate member 20 and the fixed plate 158 may not be provided. Even in the absence of the fixing plate 158, the lower electrode 74a has an electrode pattern separated in units of the actuator 14, so that the portion without the lower electrode 74a is not subjected to bending displacement and the spacer 24 exists. It is connected to the part. Accordingly, each actuator 14 is bent and displaced while the portion without the lower electrode 74a is fixed at the same height as the portion with the spacer 24.

  As in the actuator device (including various modifications) according to the fifth embodiment described above, the configuration having the piezoelectric functional layer is lower in the electrode pattern of the lower electrode and the upper electrode than the configuration having the substrate 12. Since the magnitude of the bending displacement and the form of displacement can be arbitrarily changed, there is an advantage that the design change can be flexibly and easily handled. Moreover, there is an advantage that generation of defective actuators is reduced, which is an effect due to the piezoelectric functional layer being uniformly formed of a ceramic green sheet.

  In addition, the actuator device according to the present invention is not limited to the above-described embodiment, and it is needless to say that various configurations can be adopted without departing from the gist of the present invention.

It is a block diagram which shows the actuator apparatus which concerns on 1st Embodiment. It is sectional drawing which shows one structural example of an actuator. It is a block diagram which shows the actuator apparatus which concerns on 2nd Embodiment. It is a figure for demonstrating the preferable aspect of the actuator apparatus which concerns on 1st and 2nd embodiment. It is a figure for demonstrating the compensation of the displacement in case a 2nd actuator is in a failure state among the 1st and 2nd actuators. It is a top view which shows an example of the structure which makes bending rigidity of a vibration part small. It is sectional drawing which shows the other example of the structure which makes bending rigidity of a vibration part small. It is a top view which shows the structure shown in FIG. It is a figure which shows the structure using an electrostatic force. It is a top view which shows an example of the structure which raises the bending rigidity of a 1st board member. It is sectional drawing on the XI-XI line in FIG. It is a top view which shows the other example of the structure which raises the bending rigidity of a 1st board member. It is sectional drawing which shows an example of the structure by which the width | variety of the part connected with a displacement transmission part among actuators was made smaller than the width | variety of a vibration part. The actuator is another example of the configuration in which the width of the portion connected to the displacement transmission portion is smaller than the width of the vibration portion, and is connected to the displacement transmission portion of the first plate member. It is sectional drawing which shows an example of the structure by which the width | variety of the part made into smaller than the width | variety of a vibration part. It is sectional drawing which shows the other example of the structure by which the width | variety of the part connected to a displacement transmission part among the 1st board members was made smaller than the width | variety of a vibration part. It is explanatory drawing which shows the effect | action by the structural example of FIG. It is sectional drawing which shows an example at the time of making a vibration part into an arch shape. It is sectional drawing which shows an example at the time of making a vibration part into a waveform. It is a figure for demonstrating the compensation of the displacement in case a 2nd actuator is in a failure state among the 1st and 2nd actuators. FIG. 8 is a perspective view illustrating a configuration example in a case where a part of the vibration unit has a waved shape in the aspect of FIG. 7. It is a top view which shows the example which has arrange | positioned the actuator to each of the four corners of the 1st board member. It is sectional drawing on the XXII-XXII line | wire in FIG. FIG. 22 is a plan view showing an example in which defect compensation actuators are arranged in the embodiment of FIG. 21. It is a perspective view which abbreviate | omits and shows an example of the joint part and cell part which mutually connect cells among 1st board members. It is a perspective view which abbreviate | omits and shows the other example of the joint part and cell part which mutually connect cells among 1st board members. FIG. 26A is an explanatory view showing a case where a slit is formed in the joint part, and FIG. 26B is an explanatory view showing a case where a part of the joint part is formed thin. It is a perspective view which abbreviate | omits and shows the state which formed the several recessed part in the lower surface of a 1st board member, and formed the slit in the joint part. FIG. 4 is a perspective view showing a part of an example of a configuration in which four continuous cells are set as one large cell and a spacer is provided in the large cell unit. It is a perspective view which abbreviate | omits and shows some examples (grating form) of a structure of a spacer. It is a perspective view which abbreviate | omits and partially shows other examples (stripe shape: the 1) of the structure of a spacer. It is a perspective view which abbreviate | omits and partially shows other examples (stripe shape: the 2) of a structure of a spacer. It is a perspective view which abbreviate | omits and partially shows other examples (columnar shape) of the structure of a spacer. It is a block diagram which shows the actuator apparatus which concerns on 3rd Embodiment. It is a block diagram which shows the actuator apparatus which concerns on 4th Embodiment. It is a block diagram which shows the display apparatus which concerns on a 1st specific example. It is an enlarged view which shows the principal part of the display apparatus which concerns on a 1st specific example seeing from the optical waveguide board side. It is a perspective view which shows a large screen display apparatus. It is sectional drawing which shows the structure of an actuator. FIG. 39A is an explanatory diagram illustrating a planar shape of the pixel structure in the example, and FIG. 39B is an explanatory diagram illustrating a planar shape of the pixel structure in the comparative example. It is explanatory drawing which shows the difference in the displacement amount of the actuator about 1 pixel in a comparative example. It is explanatory drawing which shows the difference in the displacement amount of the actuator about 1 pixel in an Example. FIG. 5 is a characteristic diagram showing a change in luminance during an on / off operation of a pixel with respect to a defect rate of the actuator (the number of defective actuators / the number of actuators constituting one pixel). It is a figure which shows the state which formed the slit in the part adjacent to a spacer among connection plates seeing from the back surface of a connection plate. It is a block diagram which shows the display apparatus which concerns on a 2nd example. It is a block diagram which shows the variable capacitor which concerns on a specific example. It is a block diagram which shows the modification of the variable capacitor which concerns on a specific example. It is a block diagram which shows the interference type optical modulator which concerns on a specific example. 48A to 48C are partially omitted cross-sectional views showing configuration examples of the mirror member. It is a block diagram which shows the actuator apparatus which concerns on 5th Embodiment. It is a block diagram which shows the 1st modification of the actuator apparatus which concerns on 5th Embodiment. It is a block diagram which shows the 2nd modification of the actuator apparatus which concerns on 5th Embodiment. It is a block diagram which shows the display apparatus which concerns on a prior art example. It is a top view which shows the display apparatus which concerns on a prior art example seeing from an optical waveguide plate.

Explanation of symbols

10A to 10E, 10Ea, 10Eb ... Actuator device 12 ... Substrate 14 ... Actuator 16 ... Drive unit 18 ... First plate member 20 ... Second plate member 22, 24, 26, 42, 44, 112 ... Spacer 30A, 30B ... Display device 32 ... Actuator substrate 34 ... Actuator 38 ... Optical wave guide plate 40 ... Connecting plate 52 ... Pixel component 60 ... Light guide plate 72 ... Piezoelectric / electrostrictive layer 74a, 74b ... Electrode 75 ... Actuator body 76 ... Displacement transmission unit 110 ... Slit 120 ... Variable capacitor 122 ... Fixed electrode 124 ... Moving electrode 130 ... Interferometric optical modulator 132 ... Transparent plate 134 ... Mirror member

Claims (15)

A plurality of planarly arranged actuators;
A plate member to which the driving force of the plurality of actuators is transmitted,
The actuator device has a vibrating part and a fixed part. The actuator device according to claim 1, wherein
An actuator device according to claim 1, wherein the rigidity of the plate member is larger than the rigidity of the vibration part. The actuator device according to claim 2, wherein
An actuator device, wherein the plate member is provided with irregularities. The actuator device according to claim 3, wherein
The actuator and the plate member are connected by a displacement transmission unit,
The actuator device characterized in that a width of a portion of the actuator connected to the displacement transmission unit is smaller than a width of the vibration unit. The actuator device according to claim 3, wherein
The actuator and the plate member are connected by a displacement transmission unit,
An actuator device, wherein a width of a portion of the plate member connected to the displacement transmission unit is smaller than a width of the vibration unit. The actuator device according to claim 1, wherein
The said vibration part has a shape which becomes convex toward the said plate member, or becomes concave toward the said plate member, The actuator apparatus characterized by the above-mentioned. The actuator device according to claim 6, wherein
The vibration device has an arch shape or a wave shape. A plurality of cells arranged in a plane;
The cell includes a plurality of actuators arranged in a plane, and a plate member to which driving force of the plurality of actuators is transmitted.
The actuator device has a vibrating part and a fixed part. The actuator device according to claim 8, wherein
An actuator device, wherein the plate members of the cells are connected to each other. The actuator device according to claim 9, wherein
The actuator device characterized in that the rigidity of all or a part of the joint portion connecting the plate members to each other is smaller than the rigidity of the plate member. The actuator device according to claim 10, wherein
A gap forming member for forming a gap between the fixed portion and the plate member in the plurality of actuators;
The actuator device, wherein the joint portion that connects the plate members to each other and the fixing portion are joined via the gap forming member. In the actuator device according to any one of claims 1 to 11,
A second plate member is arranged,
One plate surface of the second plate member is opposed to one plate surface of the plate member. The actuator device according to claim 12, wherein
The second plate member is an optical waveguide plate into which light from a light source is introduced;
A pixel structure is formed on a surface of the plate member facing the optical waveguide plate,
An actuator device configured as a display device that controls light leakage from the optical waveguide plate by contacting and separating the pixel structure from the optical waveguide plate. The actuator device according to claim 12, wherein
The second plate member itself is a variable capacitor fixed electrode, or the variable capacitor fixed electrode is formed on the second plate member,
The actuator device, wherein the plate member itself is a movable electrode of the variable capacitor, or the movable electrode of the variable capacitor is formed on the plate member. The actuator device according to claim 12, wherein
The second plate member is a transparent plate;
The said plate member has a light reflection surface in the part facing the said 2nd plate member, The actuator apparatus characterized by the above-mentioned.

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