JP2006037212A - Solid grain erosion resistant surface treatment film and rotary machine - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a solid grain erosion resistant surface treatment film in which solid grain erosion resistance can be remarkably improved, and which is provided with oxidation resistance without reducing the fatigue strength even to a rotary member, and to provide a rotary machine such as a steam turbine and an axial flow compressor obtained by applying the same. <P>SOLUTION: The solid grain erosion resistant surface treatment film comprises a nitrided hard layer formed on a surface of a base material; one or more physical vapor-deposited hard layers formed on the surface of the nitrided hard layer by a physical vapor deposition method. The thickness of the nitrided hard layer is controlled to ≥30 μm, and also, the total thickness of the physical vapor-deposited hard film is controlled to ≥10 μm. In this way, the deformation of the base material at the time of the collision with solid grains and the cracking of the film comprising the nitrided hard layer and the physical vapor-deposited hard layers as the upper layers of the base material are prevented, and its solid grain erosion resistance is secured, thus the increase of the service life in the solid grain erosion resistant surface treatment film is made possible, and also, its oxidation resistance and fatigue strength are improved. <P>COPYRIGHT: (C)2006,JPO&NCIPI

Description

  The present invention relates to a surface treatment film having solid particle erosion resistance and a rotary machine such as a steam turbine or an axial flow compressor to which the surface treatment film is applied (in the present specification and claims, simply referred to as “rotary machine”). About.

  In a steam turbine, for example, 12% chromium-based stainless steel is used as a base material at a portion that comes into contact with steam. Moreover, in order to improve the erosion property by the solid particle which exists in a vapor | steam, the boronizing process which carried out the osmosis | diffusion diffusion process of the boron is given to the base-material surface layer in the stationary component.

  However, the above 12% chromium-based stainless steel suffers from erosion damage due to solid particles such as silica and iron oxide contained in the steam, resulting in a short life. In order to solve this, as described above, boronizing treatment may be applied to the surface layer of 12% chromium stainless steel, but in this case as well, the erosion property due to the solid particles is not sufficient, and the fatigue strength is further reduced. Due to the problem, there is a problem that it is difficult to apply to the rotating member.

  Moreover, in the part which contacts high temperature steams, such as a steam turbine, it is calculated | required that it has sufficient performance not only in solid particle erosion resistance but in oxidation resistance and fatigue strength simultaneously.

  Conventionally, in a high-speed rotating body such as a hydrodynamic fluid bearing, a diamond-like carbon film is applied to a hardened base material to prevent damage to the high-speed rotating body due to impurities such as metal powder caused by wear and a decrease in rotational performance and life. (Patent Document 1: Japanese Patent Application Laid-Open No. 2002-188642), however, such a surface-treated film is applied to a portion of a steam turbine in contact with steam, and is also resistant to solid particles. From the standpoint of oxidation resistance and fatigue strength, practicality and suitability were not sufficient.

Japanese Patent Laid-Open No. 2002-18864 (first page, FIG. 1)

  The present invention eliminates the above-mentioned conventional problems, can greatly improve erosion resistance, and has a solid particle erosion-resistant surface having oxidation resistance without reducing fatigue strength even for rotating members. It is an object of the present invention to provide a treatment film and a rotating machine to which the treatment film is applied.

  The present invention has been made to solve the above-described problems, and provides the following means (1) to (12), and will be described below in the order of the claims.

  (1) As the first means, it has a hard nitrided layer formed on a substrate surface layer, and one or more physical vapor deposited hard layers formed on the nitrided hard layer by a physical vapor deposition method. Provided is a solid particle erosion-resistant surface treatment film characterized in that the layer thickness is 30 μm or more, and the physical vapor deposition hard film has a total thickness of 10 μm or more.

  (2) As a second means, the solid particle erosion-resistant surface treatment film according to the first means, wherein the hard nitrided layer is formed by a radical nitriding method. Provide a film.

  (3) Further, as a third means, in the solid particle erosion-resistant surface treatment film of the first means, the physical vapor deposition hard layer is a CrN layer formed on the nitride hard layer. A solid particle erosion-resistant surface treatment film is provided.

  (4) As a fourth means, in the solid particle erosion-resistant surface treatment film of the first means, the physical vapor deposition hard layer further forms a CrN layer and a CrN layer formed on the nitrided hard layer, and further Provided is a solid particle erosion-resistant surface treatment film characterized by being an AlCrN layer or TiAlN formed thereon.

  (5) As a fifth means, in the solid particle erosion-resistant surface treatment film of the first means, the physical vapor deposition hard layer further forms a TiN layer and a TiN layer formed on the nitrided hard layer. Provided is a solid particle erosion-resistant surface treatment film characterized by being a CrN layer formed thereon.

  (6) As a sixth means, in the solid particle erosion-resistant surface treatment film of the first means, the physical vapor deposition hard layer further forms a TiN layer and a TiN layer formed on the nitrided hard layer, and further Provided is a solid particle erosion-resistant surface treatment film characterized by being an AlCrN layer or a TiAlN layer formed thereon.

  (7) As a seventh means, in the solid particle erosion-resistant surface treatment film of the first means, the physical vapor deposition hard layer is a CrN layer and a TiAlN layer formed by alternately multilayering on the nitrided hard layer. There is provided a solid particle erosion-resistant surface treatment film characterized by being.

  (8) As an eighth means, in the solid particle erosion-resistant surface treatment film of the first means, the physical vapor-deposited hard layer is a CrN layer and an AlCrN layer formed by alternately multilayering on the previous nitrided hard layer. There is provided a solid particle erosion-resistant surface treatment film characterized by being.

  (9) As a ninth means, in the solid particle erosion-resistant surface treatment film of the first means, the physical vapor deposition hard layer is a CrN layer and a TiN layer formed by alternately multilayering on the previous nitrided hard layer. There is provided a solid particle erosion-resistant surface treatment film characterized by being.

  (10) As a tenth means, in the solid particle erosion-resistant surface treatment film of the first means, the physical vapor deposition hard layer is a TiN layer and a TiAlN layer formed by alternately multilayering on the nitridation hard layer in the previous period. There is provided a solid particle erosion-resistant surface treatment film characterized by being.

  (11) As eleventh means, in the solid particle erosion-resistant surface treatment film of the first means, the physical vapor deposition hard layer is a TiN layer and an AlCrN layer formed by alternately multilayering on the previous nitrided hard layer. There is provided a solid particle erosion-resistant surface treatment film characterized by being.

  (12) A rotating machine characterized in that as a twelfth means, the solid particle erosion-resistant surface treatment film of any one of the first means to the eleventh means is provided on the surface of a portion in contact with the vapor. provide.

  (1) Solid particle erosion resistance is improved by applying a coating (physical vapor deposition hard layer) that is harder than the hardness of the colliding particles, but when the base of the coating is soft, when solid particles collide The present invention has been made with the knowledge that the base material is deformed and the upper physical vapor-deposited hard layer is cracked due to the deformation, and as a result, the erosion resistance is not improved.

  According to the invention of claim 1, in order to improve the solid particle erosion resistance of the physical vapor deposition hard layer formed by physical vapor deposition, a hard nitride layer is formed on the surface layer of the substrate. The substrate has a high hardness, and the thickness of the hard nitride layer is 30 μm or more, so that the deformation of the base material at the time of the solid particle collision described above, the hard nitride layer and the physical vapor deposition on the surface of the base material Cracking of the coating including the hard layer is prevented, and solid particle erosion resistance is ensured. Further, by setting the physical vapor deposition hard layer to a total thickness of 10 μm or more, the influence of erosion due to solid particle collision can be prevented, and the life of the solid particle erosion-resistant surface treatment film can be increased.

  The combination of the nitrided hard layer and the physical vapor deposition hard layer as described above improves the oxidation resistance and fatigue strength, and is preferably applied to a portion requiring strength such as a rotating member. It becomes.

  (2) According to the invention of claim 2, in addition to the function and effect of the invention of claim 1, since the hard nitrided layer is formed by radical nitriding, the hard nitrided layer by radical nitriding is a weakly altered layer. In addition, it is strong against fatigue characteristics and can improve the fatigue strength as compared with the fatigue characteristics of the base material.

(3) In order to obtain solid particle erosion resistance, it is important for the physical vapor deposition hard layer on the upper layer of the nitride hard layer that the hardness of the coating is larger than the hardness of the colliding particles. Ceramics having a Vickers hardness of SiO ₂ as a typical material and harder than 1000 to 1300 are required. According to the inventions of claims 3 to 6, CrN, TiAlN, AlCrN, and TiN are hardened. In addition to the effects of the invention of claim 1, the high temperature stability and toughness are superior to those of other ceramics, and a more preferable specific structure of the solid particle erosion coating is obtained.

  (4) According to the inventions of claims 7 to 11, in addition to the effects of the invention of claim 1, CrN, TiAlN, AlCrN, and TiN are hard as in the inventions of claims 3 to 6. In addition to satisfying the above conditions, high temperature stability and toughness are superior to other ceramics, and a more preferable concrete structure of a solid particle erosion coating can be obtained. By forming it in multiple layers, the resistance to cracking and peeling is improved compared to a single layer or two-layer physical vapor deposition hard layer, and the solid particle erosion resistance is further improved.

  (5) According to the invention of claim 12, the steam turbine capable of achieving a long life with high erosion resistance, oxidation resistance and fatigue characteristics due to the operational effects of any of the inventions of claims 1 to 11. Is obtained.

  The present invention has been found based on the results of numerous tests and research in order to obtain a surface-treated film that has oxidation resistance and satisfies the maintenance of fatigue strength and improvement in solid particle erosion resistance. Embodiments 1 to 12 will be described with reference to FIGS. 1 to 12 as the best mode for carrying out the present invention.

  FIG. 1 is a cross-sectional explanatory view of a solid particle erosion-resistant surface treatment film 101 according to Example 1 of the present invention. The solid particle erosion-resistant surface treatment film 101 of this example is formed by forming a hard nitrided hard layer 2 on a substrate 3 and forming a physical vapor deposition hard layer 1 as a hard film by physical vapor deposition thereon. The particle erosion surface treatment film 101 is constituted, and the steam turbine of the present invention is applied with the solid particle erosion-resistant surface treatment film thus constituted.

  The nitrided hard layer 2 is preferably a radical nitrided layer, and its thickness is 30 μm or more, preferably 60 to 100 μm, in order to suppress fatigue strength reduction and improve solid particle erosion resistance. The physical vapor deposition hard layer 1 to be used has a total thickness of 10 μm or more, preferably 20 μm or more. When the thickness is less than 10 μm, the lifetime is short due to erosion caused by solid particle collision. On the other hand, the thickness of about 25 μm is a limit from the viewpoint of film stress during film formation. The material is selected from CrN (chromium nitride), TiN (titanium nitride), AlCrN (aluminum chromium nitride), and TiAlN (titanium aluminum nitride). The type is multilayered, that is, the material a layer and another material b layer are multilayered. Moreover, the solid particle erosion-resistant surface treatment film 101 having such a configuration can be effectively used for a rotary machine such as a steam turbine or an axial compressor. In the present specification and claims, the “rotary machine” refers to a steam turbine, an axial compressor, or the like.

  Next, a more specific embodiment of the solid particle erosion-resistant surface treatment film of the present invention will be described with reference to FIGS.

  FIG. 2 is a cross-sectional explanatory view of the solid particle erosion-resistant surface treatment film 102 according to Example 2 of the present invention. In the solid particle erosion-resistant surface treatment film 102 of this example, the nitrided hard layer 2 is formed on the substrate 3 in the same manner as described in Example 1, and the CrN layer 11 is physically vapor-deposited thereon by physical vapor deposition. The layer 1 is formed.

  The hard nitride layer 2 is formed by radical nitriding without an altered layer, and has a thickness of 30 μm or more, preferably 60 to 100 μm. When the thickness is less than 30 μm, in an environment where solid particles collide, the upper physical vapor deposition hard layer 1 may be deformed together with the base material 3 at the time of particle collision, and the upper physical vapor deposition hard layer may be cracked and peeled, resulting in deterioration of erosion resistance. There is. A thickness exceeding 100 μm is not problematic in terms of physical properties, but is expensive in terms of manufacturing cost and disadvantageous for practical use.

  The upper physical vapor deposition hard layer 1 of this embodiment is a CrN layer 11, which is formed, for example, by an arc ion plating method, and has a thickness of 10 μm or more, preferably 20 μm or more. When the thickness is less than 10 μm, the lifetime is short due to erosion caused by solid particle collision. On the other hand, the thickness of about 25 μm is a limit from the viewpoint of film stress during film formation.

  FIG. 3 is a cross-sectional explanatory view of the solid particle erosion-resistant surface treatment film 103 according to Example 3 of the present invention. In the solid particle erosion-resistant surface treatment film 103 of this example, the nitrided hard layer 2 is formed on the substrate 3 in the same manner as described in Example 1, and the CrN layer 11 is formed thereon by physical vapor deposition in the same manner as described above. Further, a TiAlN layer 12 is provided thereon by physical vapor deposition to form a physical vapor deposition hard layer 1. Similar to the CrN layer 11, the TiAlN layer 12 can be formed by, for example, an arc ion plating method, and the thickness thereof is 1 to 6 μm.

  FIG. 4 is a cross-sectional explanatory view of the solid particle erosion-resistant surface treatment film 104 according to Example 4 of the present invention. In the solid particle erosion-resistant surface treatment film 104 of this example, the nitrided hard layer 2 is formed on the substrate 3 in the same manner as described in Example 1, and the CrN layer 11 is formed thereon by physical vapor deposition in the same manner as described above. Further, an AlCrN layer 13 is formed thereon by physical vapor deposition to form a physical vapor deposition hard layer 1. Similar to the CrN layer 11, the AlCrN layer 13 can be formed by, for example, an arc ion plating method, and the thickness thereof is 1 to 6 μm.

  FIG. 5 is a cross-sectional explanatory view of the solid particle erosion-resistant surface treatment film 105 according to Example 5 of the present invention. In the solid particle erosion-resistant surface treatment film 105 of this example, the nitrided hard layer 2 is formed on the base material 3 in the same manner as described in Example 1, and the TiN layer 14 is formed thereon by physical vapor deposition to a thickness of 5. The CrN layer 11 is formed thereon by physical vapor deposition in the same manner as described above to form the physical vapor deposition hard layer 1. Similar to the CrN layer 11, the TiN layer 14 can be formed by, for example, an arc ion plating method.

  FIG. 6 is a cross-sectional explanatory view of the solid particle erosion-resistant surface treatment film 106 according to Example 6 of the present invention. In the solid particle erosion-resistant surface treatment film 106 of this example, the nitrided hard layer 2 is formed on the substrate 3 in the same manner as described in Example 1, and the TiN layer 14 having a thickness of 5 is formed thereon by physical vapor deposition. The TiAlN layer 12 is formed in the same manner as described above by physical vapor deposition, and the physical vapor deposition hard layer 1 is formed.

  FIG. 7 is a cross-sectional explanatory view of the solid particle erosion-resistant surface treatment film 107 according to Example 7 of the present invention. In the solid particle erosion-resistant surface treatment film 107 of this example, the nitrided hard layer 2 is formed on the base material 3 in the same manner as described in Example 1, and the TiN layer 14 having a thickness of 5 is formed thereon by physical vapor deposition. The AlCrN layer 13 is formed by physical vapor deposition in the same manner as described above to form the physical vapor deposition hard layer 1.

  Next, FIG. 8 to FIG. 12 are explanatory views of examples of the solid particle erosion-resistant surface treatment film in which the physical vapor deposition hard layer 1 is formed by multilayering two kinds of materials.

  FIG. 8 is a cross-sectional explanatory view of the solid particle erosion-resistant surface treatment film 108 according to Example 8 of the present invention. In the solid particle erosion-resistant surface treatment film 108 of this example, the nitrided hard layer 2 is formed on the substrate 3 as described in Example 1, and the CrN layer 11 and the TiAlN layer are formed thereon by physical vapor deposition. The physical vapor deposition hard layer 1 is formed by alternately layering 12 layers. The thickness of each layer of the physical vapor deposition hard layer 1 can be set in a wide range, for example, 10 to 100 nm. The total thickness is 10 μm or more, preferably 20 μm or more as in the first embodiment.

  FIG. 9 is a cross-sectional explanatory view of the solid particle erosion-resistant surface treatment film 109 according to Example 9 of the present invention. In the solid particle erosion-resistant surface treatment film 109 of this example, the nitrided hard layer 2 is formed on the substrate 3 as described in Example 1, and the CrN layer 11 and the AlCrN layer are formed thereon by physical vapor deposition. The physical vapor deposition hard layer 1 is formed by alternately layering 13. The thickness of each layer of the physical vapor deposition hard layer 1 can be set in a wide range. For example, the thickness is 10 to 100 nm. The total thickness is 10 μm or more, preferably 20 μm or more as in Example 1.

  FIG. 10 is a cross-sectional explanatory view of the solid particle erosion-resistant surface treatment film 110 according to Example 10 of the present invention. In the solid particle erosion-resistant surface treatment film 110 of this example, the nitrided hard layer 2 is formed on the substrate 3 in the same manner as described in Example 1, and the TiN layer 14 and the CrN layer are formed thereon by physical vapor deposition. The physical vapor deposition hard layer 1 is formed by alternately layering 11. The thickness of each layer of the physical vapor deposition hard layer 1 can be set in a wide range, for example, 10 to 100 nm. The total thickness is 10 μm or more, preferably 20 μm or more as in the first embodiment.

  FIG. 11 is a cross-sectional explanatory view of the solid particle erosion-resistant surface treatment film 111 according to Example 11 of the present invention. In the solid particle erosion-resistant surface treatment film 111 of this example, the nitrided hard layer 2 is formed on the substrate 3 as described in Example 1, and the TiN layer 14 and the TiAlN layer are formed thereon by physical vapor deposition. The physical vapor deposition hard layer 1 is formed by alternately layering 12 layers. The thickness of each layer of the physical vapor deposition hard layer 1 can be set in a wide range, for example, 10 to 100 nm. The total thickness is 10 μm or more, preferably 20 μm or more as in the first embodiment.

  FIG. 12 is a cross-sectional explanatory view of the solid particle erosion-resistant surface treatment coating 112 according to Example 12 of the present invention. In the solid particle erosion-resistant surface treatment film 112 of this example, the nitrided hard layer 2 is formed on the base material 3 as described in Example 1, and the TiN layer 14 and the AlCrN layer are formed thereon by physical vapor deposition. The physical vapor deposition hard layer 1 is formed by alternately layering 13. The thickness of each layer of the physical vapor deposition hard layer 1 can be set in a wide range, for example, 10 to 100 nm. The total thickness is 10 μm or more, preferably 20 μm or more as in the first embodiment.

  In Examples 1 to 12, the physical vapor deposition method of the CrN layer 11, the TiAlN layer 12, the AlCrN layer 13, and the TiN layer 14 need not be limited. For example, an arc ion plating method is used.

  In the solid particle erosion-resistant surface treatment films 101 to 112 of the above-described embodiments, the nitrided hard layer 2 on the substrate 3 is solid-particle erosion-resistant of the physical vapor deposition hard layer 1 formed by physical vapor deposition thereon. Provided to improve performance. That is, the solid particle erosion resistance is improved by applying a coating (physical vapor deposition hard layer 1) that is harder than the hardness of the colliding particles. In this case, if the base material (base) 3 of the coating is soft, the solid particles When the collision occurs, the base material 3 is deformed, and the upper film (physical vapor deposition hard layer 1) is cracked by the deformation, and as a result, the erosion resistance is not improved.

  Therefore, in order to express the characteristics of the upper physical vapor deposition hard layer 1 well, it is necessary to increase the hardness of the base, and for this purpose, the nitride hard layer 2 can be formed on the surface layer of the substrate 3. I need it. There is an appropriate value for the thickness of the nitrided hard layer 2. If it is less than 30 μm, deformation of the base material 3 at the time of collision of the above-mentioned solid particles occurs, and the coating containing the hard nitride layer 2 and the physical vapor deposition hard layer on the surface is broken, which is not preferable. In order to secure solid particle erosion resistance, the nitrided hard layer 2 needs to have a thickness of 30 μm or more. As described above, a thickness exceeding 100 μm is not problematic in terms of physical properties, but is expensive in terms of manufacturing cost and disadvantageous for practical use.

  Furthermore, when subjected to a large fatigue stress during operation like a moving blade of a steam turbine, the solid particle erosion-resistant surface treatment coating must have a strength with no problem. In contrast, the hard nitrided layer 2 by radical nitriding does not have a weakly altered layer and is strong against fatigue characteristics, and the fatigue strength is improved as compared with the fatigue characteristics of the base material 3.

In order to obtain solid particle erosion resistance, it is important that the hardness of the coating of the physical vapor deposition hard layer 1 on the upper layer of the nitrided hard layer 2 is larger than the hardness of the colliding particles. Therefore, the hardness of SiO ₂ which is a representative material of the colliding solid particles is 1000 to 1300 in terms of Vickers hardness, and ceramics harder than this are mainly targeted.

  Therefore, the nitride ceramics forming the physical vapor-deposited hard layer 1 of each of the above examples, that is, CrN, TiAlN, AlCrN, and TiN satisfy the above-mentioned hardness conditions and are stable at high temperatures (oxidation resistance at 500 ° C. Property) and toughness are excellent as compared with other ceramics, and is optimal as a material forming the physical vapor deposition hard layer 1 constituting the solid particle erosion-resistant films 101 to 112 of the above embodiment.

  Further, by setting the physical vapor deposition hard layer 1 to a total thickness of 10 μm or more, the influence of erosion due to solid particle collision can be prevented, and the life of the solid particle erosion-resistant surface treatment film can be increased.

  Further, as in Example 8 to Example 12, this physical vapor deposition hard layer 1 is formed of two kinds of materials alternately and thinly in multiple layers so that the cracking peel resistance is a single layer or two-layer film. Further improvement over layer 1. If it is formed in multiple layers, even if surface cracks occur, the progressing direction of the cracks is distributed from the thickness direction to the horizontal direction between each layer, so that damage can be minimized. Therefore, the solid particle erosion resistance is improved.

  As described above, the solid particle erosion-resistant surface treatment film of the present invention includes the hard nitride layer 2 and the physical vapor-deposited hard layer 1 as an underlayer, and synergistically improves the solid particle erosion resistance. As shown in the following comparative test results, it has excellent oxidation resistance and fatigue strength, and rotating machines such as steam turbines and axial flow compressors with the same coating on the surface of the part in contact with steam Is obtained by simultaneously improving solid particle erosion resistance, oxidation resistance, and fatigue strength.

  Hereinafter, the comparative test results of the examples, comparative examples, and conventional examples according to the respective embodiments of the present invention will be described.

[Comparison test result 1]
A SUS410J1 base material having a thickness of 30 mm × 60 mm × 5 mm was used, and a hard nitride layer and a physical vapor deposition hard layer were formed on this surface by radical nitriding by the following method. Using this test piece, a sand erosion test was carried out at room temperature, in which conical silica sand having an average particle diameter of 326 μm was sprayed on the surface of the test piece at a speed of 100 m / s and a collision angle of 30, 60, 90 ° (deg.).

  The wear weight of each sample was determined from the weight of the test piece after the test and the weight before the test, and was converted into a wear volume from the film density of each sample.

  Furthermore, the ratio of the wear amount of the material of SUS410J1 of the conventional method only to the wear amount of each sample was determined as “multiple erosion resistance”. That is, this erosion resistance multiple indicates that the larger the number, the better the erosion resistance compared to the conventional method SUS410J1.

  The radical nitriding treatment was used by changing the time and forming nitride hard films with thicknesses of 30, 30, 60 and 100 μm.

  The physical vapor deposition hard layer was formed using an arc ion plating apparatus, and the arc current was 150 A, the bias voltage was −30 V, the gas pressure was 4 Pa, and the substrate temperature was 450 ° C.

  The bororizing treatment of the conventional example was performed under the condition of 920 ° C. × 18 hours, and a 70 μm boronizing treatment layer was formed on the surface layer of the substrate, followed by quenching and tempering treatment.

  Under the above conditions, 5 samples from 2-1 to 2-5 for Example 2, 1 sample each for Examples 3 to 12, and 2 samples for Conventional Example (Conventional Example 1: Base material only. Conventional Example 2: Boronizing treatment on the substrate surface layer.), 6 samples as comparative examples (Comparative Example 1: Nitride hard layer only. Comparative Examples 2 to 4: Nitride hard layer is less than 30 μm. Comparative Examples 5 and 6: Physical vapor deposition hard layer is less than 10 μm. Table 1 “Comparison test result 1” shows the respective conditions and results (erosion resistance multiple).

  As shown in the erosion resistance magnification of Table 1 “Comparative Test Result 1”, the solid particle erosion-resistant surface-treated film of each example of the present invention is markedly compared with the conventional SUS410J1 base material alone and the boronizing treatment. It turns out that it is excellent in.

  Further, when only the hard nitride layer is not provided with the physical vapor deposition hard layer (Comparative Example 1), and the hard nitride layer is less than 30 μm (20 μm) even if both the hard nitride layer and the physical vapor deposition hard layer are present (Comparative Example 2) 4) When the physical vapor deposition hard layer is less than 10 μm (5 μm, 8 μm) even when both the hard nitride layer and the physical vapor deposition hard layer are present (Comparative Examples 5 and 6), the erosion resistance magnification is higher than those of the above examples. It is greatly inferior and it turns out that sufficient solid particle | grain erosion resistance like each Example is not acquired.

[Comparison test result 2]
A SUS410J1 substrate having a thickness of 20 mm × 20 mm × 5 mm was used, and a hard nitride layer and a physical vapor deposition hard layer were formed on this surface by radical nitriding by the following method. Using this test piece, it was kept in a high-temperature steam atmosphere, and the oxidation resistance was investigated.

  In the radical nitriding treatment, the time was adjusted, and the thickness of the nitrided hard layer was set to 60 μm.

  The physical vapor deposition hard layer was formed using an arc ion plating apparatus, and the arc current was 150 A, the bias voltage was −30 V, the gas pressure was 4 Pa, and the substrate temperature was 450 ° C.

  The bolorizing process of Conventional Example 2 was performed under the condition of 920 ° C. × 18 hours, a 70 μm boronizing process layer was formed on the surface of the base material, and then subjected to a quenching and tempering process.

  Under the above conditions, 1 sample for Example 2, 1 sample for Example 3, 2 samples for Conventional Example (Conventional Example 1: Base material only, Conventional Example 2: Boronizing treatment on base material surface layer), 1 as a comparative example A test of a sample (only a hard nitrided layer and no physical vapor deposition hard layer) was performed, and each condition and result (oxide layer thickness ratio) are shown in Table 2 “Comparative Test Result 2”.

  In Table 2, “Comparative Test Result 2”, the oxidation resistance is shown as a relative ratio of the oxide layer thickness when the oxide layer thickness of SUS410J1 is 1, but the relative oxidation layer thickness in the table is As shown in the ratio, the oxidation resistance of the solid particle erosion-resistant surface treatment film of each example of the present invention is remarkably superior to that of the conventional example and the comparative example of the nitrided hard layer only by radical nitriding. You can see that

[Comparison test result 3]
In Example 2, a test piece in which a CrN layer (25 μm) was formed on a hard nitrided layer (60 μm) by radical nitriding and a test piece of SUS410J1 base material (without surface treatment) as a conventional example were prepared at 450 ° C. A rotating bending fatigue test was performed. As a result, when compared with the strength of 107 times, the test piece of Example 2 in which the CrN layer (25 μm) was formed on the nitrided hard layer (60 μm) improved in fatigue strength by 13% compared to the conventional example. As a result, it was found that the solid particle erosion-resistant surface treatment film of the example of the present invention has good fatigue strength.

  As described above, according to the solid particle erosion-resistant surface treatment film of each embodiment of the present invention, a hard nitride layer having a thickness of 30 μm or more on the substrate and a physical vapor deposition having a thickness of 10 μm or more on the upper layer. By providing the hard layer, an extremely high resistance to collision of solid particles can be obtained, and the erosion resistance of the member coated therewith can be remarkably improved and a longer life can be achieved. In addition, a solid particle erosion-resistant surface treatment film having good high-temperature oxidation resistance and fatigue characteristics is obtained. Moreover, if it is applied to the surface of the steam turbine where the solid particles collide with the steam, a steam turbine capable of achieving a long life with high erosion resistance, high temperature oxidation resistance and fatigue characteristics can be obtained. Furthermore, the life of the product can be extended by applying it to a rotary machine such as an axial compressor.

  The present invention has been described with reference to the illustrated embodiments. However, the present invention is not limited to the above-described embodiments, and various modifications may be made to the specific structure and configuration within the scope of the present invention. Nor. Further, the steam turbine of the present invention is not particularly illustrated, but is not limited to a steam turbine having a specific structure. In general, the surface of a portion in contact with steam is applied to the surface of the solid particle erosion-resistant surface treatment of the present invention. A film is provided.

It is sectional explanatory drawing of the solid particle erosion-resistant surface treatment film 101 which concerns on Example 1 of this invention. It is sectional explanatory drawing of the solid particle erosion-resistant surface treatment film | membrane 102 which concerns on Example 2 of this invention. It is a cross-sectional explanatory drawing of the solid particle erosion-resistant surface treatment film 103 according to Example 3 of the present invention. It is a cross-sectional explanatory drawing of the solid particle erosion-resistant surface treatment film 104 according to Example 4 of the present invention. It is sectional explanatory drawing of the solid particle erosion-resistant surface treatment membrane | film | coat 105 which concerns on Example 5 of this invention. It is a cross-sectional explanatory drawing of the solid particle erosion-resistant surface treatment film 106 according to Example 6 of the present invention. It is sectional explanatory drawing of the solid particle erosion-resistant surface treatment film | membrane 107 which concerns on Example 7 of this invention. It is sectional explanatory drawing of the solid particle erosion-resistant surface treatment film | membrane 108 which concerns on Example 8 of this invention. It is sectional explanatory drawing of the solid particle erosion-resistant surface treatment film 109 which concerns on Example 9 of this invention. It is sectional explanatory drawing of the solid particle erosion-resistant surface treatment film | membrane 110 which concerns on Example 10 of this invention. It is a section explanatory view of the solid particle erosion-resistant surface treatment film 111 concerning Example 11 of the present invention. It is sectional explanatory drawing of the solid particle erosion-resistant surface treatment film | membrane 112 which concerns on Example 12 of this invention.

Explanation of symbols

DESCRIPTION OF SYMBOLS 1 Physical vapor deposition hard layer 2 Nitride hard layer 3 Base material 11 CrN layer 12 TiAlN layer 13 AlCrN layer 14 TiN layer 101-112 Solid particle erosion-resistant surface treatment film

Claims (12)

  A hard nitride layer formed on the substrate surface layer, and one or more physical vapor deposition hard layers formed by physical vapor deposition on the hardened nitride layer, the thickness of the hard nitride layer being 30 μm or more, and A solid particle erosion-resistant surface treatment film characterized in that the physical vapor deposition hard film has a total thickness of 10 μm or more.   The solid particle erosion-resistant surface treatment coating according to claim 1, wherein the hard nitrided layer is formed by radical nitriding.   2. The solid particle erosion-resistant surface treatment film according to claim 1, wherein the physical vapor deposition hard layer is a CrN layer formed on the nitrided hard layer.   2. The solid particle erosion-resistant surface treatment film according to claim 1, wherein the physical vapor deposition hard layer is an AlCrN layer or TiAlN formed on the CrN layer and the CrN layer formed on the nitrided hard layer and then further formed thereon. A solid particle erosion-resistant surface treatment film characterized by being:   2. The solid particle erosion-resistant surface treatment film according to claim 1, wherein the physical vapor deposition hard layer is a TiN layer formed on the nitrided hard layer and a CrN layer formed on the TiN layer after the TiN layer is formed. A solid particle erosion-resistant surface treatment film characterized by   2. The solid particle erosion-resistant surface treatment film according to claim 1, wherein the physical vapor deposition hard layer is a TiN layer formed on the nitrided hard layer and the same TiN layer, and an AlCrN layer or TiAlN further formed thereon. A solid particle erosion-resistant surface treatment film characterized by being a layer.   2. The solid particle erosion-resistant surface treatment film according to claim 1, wherein the physical vapor deposition hard layer is a CrN layer and a TiAlN layer formed by alternately multilayering on the nitride hard layer. Particle erosion surface treatment film.   2. The solid particle erosion-resistant surface treatment film according to claim 1, wherein the physical vapor-deposited hard layer is a CrN layer and an AlCrN layer formed by alternately multilayering on the previous nitrided hard layer. Particle erosion surface treatment film.   2. The solid particle erosion-resistant surface treatment film according to claim 1, wherein the physical vapor deposition hard layer is a CrN layer and a TiN layer formed by alternately multilayering on the nitridation hard layer. Particle erosion surface treatment film.   2. The solid particle erosion-resistant surface treatment film according to claim 1, wherein the physical vapor deposition hard layer is a TiN layer and a TiAlN layer formed by alternately layering on the nitridation hard layer. Particle erosion surface treatment film.   2. The solid particle erosion-resistant surface treatment film according to claim 1, wherein the physical vapor-deposited hard layer is a TiN layer and an AlCrN layer formed by alternately layering on the nitridation hard layer. Particle erosion surface treatment film.   A rotating machine comprising the solid particle erosion-resistant surface treatment film according to any one of claims 1 to 11 provided on a surface in contact with steam.

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