JP2006035003A - Ultrasonic transducer and method for manufacturing ultrasonic transducer - Google Patents

Ultrasonic transducer and method for manufacturing ultrasonic transducer Download PDF

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JP2006035003A
JP2006035003A JP2004213811A JP2004213811A JP2006035003A JP 2006035003 A JP2006035003 A JP 2006035003A JP 2004213811 A JP2004213811 A JP 2004213811A JP 2004213811 A JP2004213811 A JP 2004213811A JP 2006035003 A JP2006035003 A JP 2006035003A
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ultrasonic transducer
electromechanical
transducer
connection member
electrode layer
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JP4727953B2 (en
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Takenao Fujimura
毅直 藤村
Akiko Mizunuma
明子 水沼
Hideo Adachi
日出夫 安達
Katsuhiro Wakabayashi
勝裕 若林
Sunao Sato
佐藤　　直
Yukihiko Sawada
之彦 沢田
Takeharu Nakazato
威晴 中里
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Olympus Corp
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Olympus Corp
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Priority to JP2004213811A priority Critical patent/JP4727953B2/en
Priority to PCT/JP2005/013417 priority patent/WO2006009220A1/en
Priority to EP05766347.8A priority patent/EP1769854A4/en
Publication of JP2006035003A publication Critical patent/JP2006035003A/en
Priority to US11/624,907 priority patent/US7327072B2/en
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Abstract

<P>PROBLEM TO BE SOLVED: To provide an inexpensive ultrasonic transducer with high reliability relative to electric connection realizing miniaturization and suppressing thermal damage received by an electrical mechanical conversion element when the electric mechanical conversion element and a lead part are connected, and a method for manufacturing the ultrasonic transducer. <P>SOLUTION: In the ultrasonic transducer 1, an acoustic adjustment member 3 is formed at a sound radiation side of the electric mechanical conversion element 2 and a backing material 4 is adhered/fixed to an opposite side thereof. An electrode layer 5 and a notch part 6 are provided on upper and lower surfaces of the electric mechanical conversion element 2. A connection member 7 fixes the electric mechanical conversion element 2 by pressurizing the electric mechanical conversion element 2 from an opposed direction 8. <P>COPYRIGHT: (C)2006,JPO&NCIPI

Description

本発明は、超音波振動子及びその超音波振動子の製造方法に関する。   The present invention relates to an ultrasonic transducer and a method for manufacturing the ultrasonic transducer.

図１６は、従来の超音波振動子を示す図である（例えば、特許文献１参照）。
図１６に示す超音波振動子１６０は、電気機械変換素子１６１の上下面１６２の両側に銀電極１６３が配され、銀電極１６３の外側に導電性部材が重ね塗りされ補強部１６４が配され、この補強部１６４とリード部１６５とが半田１６６により接合され、電気機械変換素子１６１とリード部１６５とが電気的に接続されている。 FIG. 16 is a diagram showing a conventional ultrasonic transducer (see, for example, Patent Document 1).
In the ultrasonic transducer 160 shown in FIG. 16, silver electrodes 163 are disposed on both sides of the upper and lower surfaces 162 of the electromechanical transducer 161, and a conductive member is overcoated on the outside of the silver electrode 163, and a reinforcing portion 164 is disposed. The reinforcing portion 164 and the lead portion 165 are joined by the solder 166, and the electromechanical transducer 161 and the lead portion 165 are electrically connected.

このように、図１６に示す超音波振動子１６０では、電気機械変換素子１６１とリード部１６５とが半田１６６により接合しているので、電気機械変換素子１６１とリード部１６５との電気的な接続に対する信頼性が高くなっている。   As described above, in the ultrasonic transducer 160 shown in FIG. 16, since the electromechanical transducer 161 and the lead portion 165 are joined by the solder 166, electrical connection between the electromechanical transducer 161 and the lead portion 165 is performed. The reliability is high.

図１７は、従来の他の超音波振動子を示す図である（例えば、特許文献２参照）。なお、図１６に示す構成と同じ構成には、同じ符号を付している。
図１７に示す超音波振動子１６７は、電気機械変換素子１６１の上下面１６２の片側がリード部１６５と一体に形成される接続部材１６８により加圧され、電気機械変換素子１６１とリード部１６５とが電気的に接続されている。 FIG. 17 is a diagram showing another conventional ultrasonic transducer (see, for example, Patent Document 2). In addition, the same code | symbol is attached | subjected to the same structure as the structure shown in FIG.
In the ultrasonic transducer 167 shown in FIG. 17, one side of the upper and lower surfaces 162 of the electromechanical transducer 161 is pressurized by a connecting member 168 formed integrally with the lead 165, and the electromechanical transducer 161 and the lead 165 Are electrically connected.

このように、図１７に示す超音波振動子１６７では、電気機械変換素子１６１が接続部材１６８により加圧され電気機械変換素子１６１と接続部材１６８とが常に接触しているので、電気機械変換素子１６１とリード部１６５との電気的な接続に対する信頼性が高くなっている。
特開平５−１３５４２号 （第２〜３頁、第１〜２図） 特開平１１−２３１８７６号 （第２〜３頁、第１〜６図） As described above, in the ultrasonic transducer 167 shown in FIG. 17, since the electromechanical transducer 161 is pressurized by the connecting member 168, the electromechanical transducer 161 and the connecting member 168 are always in contact with each other. The reliability with respect to the electrical connection between 161 and the lead portion 165 is high.
JP-A-5-13542 (pages 2 and 3, FIGS. 1 and 2) Japanese Patent Laid-Open No. 11-231876 (pages 2 and 3, FIGS. 1 to 6)

図１６に示す超音波振動子１６０は、電気機械変換素子１６１とリード部１６５との電気的な接続に半田１６６を用いているため、電気機械変換素子１６１とリード部１６５とを接続する際、半田１６６の熱が電気機械変換素子１６１に伝わり、電気機械変換素子１６１に熱的なダメージを与えてしまうという問題がある。   Since the ultrasonic transducer 160 shown in FIG. 16 uses solder 166 for electrical connection between the electromechanical transducer 161 and the lead portion 165, when the electromechanical transducer 161 and the lead portion 165 are connected, There is a problem that the heat of the solder 166 is transmitted to the electromechanical conversion element 161 and the electromechanical conversion element 161 is thermally damaged.

また、半田１６６による接続では、電気機械変換素子１６１とリード部１６５との接続部分の形状が正確に決まらないため、超音波振動子１６０の形状、大きさにばらつきが出るという問題がある。   Further, in the connection using the solder 166, there is a problem in that the shape and size of the ultrasonic vibrator 160 varies because the shape of the connection portion between the electromechanical transducer 161 and the lead portion 165 cannot be accurately determined.

また、半田１６６の半田つけ作業は、半田温度管理作業者の熟練度等により接合性ばらつきが起こりやすく、超音波振動子１６０の品質にばらつきが起こりやすいという問題がある。   Further, the soldering operation of the solder 166 has a problem that the bonding property is likely to vary depending on the skill level of the solder temperature management operator and the quality of the ultrasonic transducer 160 is likely to vary.

また、半田１６６の半田エリアの大きさのばらつきを抑えるためには、ある程度大きな半田エリアを設ける必要があり、そのため、超音波振動子１６０全体が大きくなるという問題がある。   In addition, in order to suppress the variation in the size of the solder area of the solder 166, it is necessary to provide a solder area that is large to some extent, which causes a problem that the entire ultrasonic transducer 160 becomes large.

また、超音波振動子１６０が大きくなると、超音波振動子１６０を安価に製造できなくなるという問題がある。
また、半田１６６以外を用いる接続方法として、導電性接着剤を用いる接続方法があるが、この接続方法においても、導電性接着剤の量のコントロールが難しい点や導電性接着剤自体が硬化時に過熱するため電気機械変換素子１６１に熱的ダメージを与えてしまう点等、半田１６６による接合方法と同様な欠点を有するという問題がある。 Further, when the ultrasonic transducer 160 becomes large, there is a problem that the ultrasonic transducer 160 cannot be manufactured at a low cost.
Moreover, as a connection method using other than the solder 166, there is a connection method using a conductive adhesive. However, even in this connection method, it is difficult to control the amount of the conductive adhesive or the conductive adhesive itself is overheated during curing. Therefore, there is a problem that the electromechanical conversion element 161 has the same defects as the joining method using the solder 166, such as causing thermal damage.

また、図１７に示す超音波振動子１６７は、接続部材１６８とハウジング１６９とで電気機械変換素子１６１を挟み込むことにより電気機械変換素子１６１とリード部１６５とを電気的に接続する構造となっており構造的に複雑になるという問題がある。   17 has a structure in which the electromechanical transducer 161 and the lead portion 165 are electrically connected by sandwiching the electromechanical transducer 161 between the connecting member 168 and the housing 169. The ultrasonic transducer 167 illustrated in FIG. There is a problem that the structure becomes complicated.

また、図１７に示す超音波振動子１６７は、接続部材１６８とハウジング１６９の２部品が独立に存在するため、その２部品の個々の大きさのばらつきにより、超音波振動子１６７全体の大きさのばらつきが大きくなるという問題がある。   In addition, since the ultrasonic vibrator 167 shown in FIG. 17 has two parts of the connecting member 168 and the housing 169 independently, the size of the ultrasonic vibrator 167 as a whole due to variations in individual sizes of the two parts. There is a problem that the variation of the size becomes large.

また、図１７に示す超音波振動子１６７において、接続部材１６８が変形することを利用して、超音波振動子１６７全体の大きさのばらつきを吸収する場合にも、接続部材１６８をある程度大きくする必要があり、やはり、超音波振動子１６７を小型化することが難しいという問題がある。   Also, in the ultrasonic transducer 167 shown in FIG. 17, the connection member 168 is enlarged to some extent even when the variation in the overall size of the ultrasonic transducer 167 is absorbed by utilizing the deformation of the connection member 168. There is still a problem that it is difficult to reduce the size of the ultrasonic transducer 167.

また、図１６に示す超音波振動子１６０と同様に、超音波振動子１６７が大きくなると、超音波振動子１６７を安価に製造することができなくなるという問題がある。
そこで、本発明は、安価で、かつ、小型化が可能で、電気的な接続に対する信頼性が高く、電気機械変換素子とリード部とを接続する際に電気機械変換素子に受ける熱的ダメージを抑制する超音波振動子及びその超音波振動子の製造方法を提供することを目的とする。 Similarly to the ultrasonic transducer 160 shown in FIG. 16, when the ultrasonic transducer 167 is large, there is a problem that the ultrasonic transducer 167 cannot be manufactured at low cost.
Therefore, the present invention is inexpensive and can be reduced in size, has high reliability for electrical connection, and causes thermal damage to the electromechanical conversion element when the electromechanical conversion element and the lead portion are connected. An object of the present invention is to provide an ultrasonic transducer to be suppressed and a method for manufacturing the ultrasonic transducer.

上記の課題を解決するために本発明では、以下のような構成を採用した。
すなわち、本発明の超音波振動子は、電気機械変換素子と音響整合部材とバッキング材と前記電気機械変換素子に電気的に接続される接続部材とを備える超音波振動子において、前記接続部材が前記電気機械変換素子を、対向する２方向から加圧接触することにより、前記電気機械変換素子と前記接続部材とが電気的に接続されることを特徴とする。 In order to solve the above problems, the present invention adopts the following configuration.
That is, the ultrasonic transducer of the present invention is an ultrasonic transducer comprising an electromechanical transducer, an acoustic matching member, a backing material, and a connecting member electrically connected to the electromechanical transducer, wherein the connecting member is The electromechanical conversion element and the connection member are electrically connected by press-contacting the electromechanical conversion element from two opposing directions.

また、上記超音波振動子の接続部材は、前記電気機械変換素子の一方の面を加圧接触する加圧部と、前記電気機械変換素子の他方の面に形成される電極層を加圧接触する電気接続部と、ＧＮＤ線または信号線と接続されるリード部とを備え、前記加圧部、前記電気接続部、及び前記リード部が一体に形成されてもよい。   In addition, the connecting member of the ultrasonic transducer is configured to press and contact the pressing portion that pressurizes and contacts one surface of the electromechanical transducer, and the electrode layer formed on the other surface of the electromechanical transducer. And a lead portion connected to the GND line or the signal line, and the pressurizing portion, the electrical connecting portion, and the lead portion may be integrally formed.

また、上記超音波振動子の接続部材は、前記電気機械変換素子の一方の面に形成される電極層を絶縁部材を介して加圧接触する加圧部と、前記電気機械変換素子の他方の面に形成される電極層を加圧接触する電気接続部とを備えるように構成してもよい。   In addition, the connection member of the ultrasonic transducer includes a pressurization unit that pressurizes and contacts an electrode layer formed on one surface of the electromechanical transducer through an insulating member, and the other of the electromechanical transducer You may comprise so that the electrode layer formed in a surface may be equipped with the electrical connection part which press-contacts.

また、上記超音波振動子の電気機械変換素子は、前記電気機械変換素子の一方の面に形成される電極層の一部が切り取られることにより形成される切欠き部を備え、前記接続部材は、前記電気機械変換素子の一方の面に形成される前記切欠き部を加圧接触する加圧部と、前記電気機械変換素子の他方の面に形成される電極層を加圧接触する電気接続部とを備え、前記加圧部は、前記切欠き部の形状に基づいて形成されてもよい。   The electromechanical transducer of the ultrasonic transducer includes a notch formed by cutting a part of an electrode layer formed on one surface of the electromechanical transducer, and the connection member includes A pressure part that pressurizes and contacts the notch formed on one surface of the electromechanical transducer, and an electrical connection that pressurizes and contacts an electrode layer formed on the other surface of the electromechanical transducer. And the pressurizing part may be formed based on the shape of the notch part.

また、上記超音波振動子の接続部材は、金属薄板を略長方形に抜き加工されて作成され、前記接続部材の長手方向に直交する方向の幅が前記金属薄板の厚さの５倍以上で構成されてもよい。   Further, the connection member of the ultrasonic transducer is formed by punching a thin metal plate into a substantially rectangular shape, and the width in the direction perpendicular to the longitudinal direction of the connection member is at least five times the thickness of the thin metal plate. May be.

また、上記超音波振動子において、前記電気機械変換素子のそれぞれの電極と電気的に接続される複数の前記接続部材は、金属薄板を同一形状で略長方形に抜き加工され、この抜き加工された略長方形の金属薄板の端部において、前記電気機械変換素子の一方の面に形成される電極層を加圧接触する電気接続部が形成され、前記電気接続部の近傍に形成される孔の内側に前記電気接続部と反対方向に突出して前記電気機械変換素子の他方の面を加圧接触する加圧部が形成され、前記加圧部の折り曲げ方向を変える事により、それぞれの前記電極と前記電気接続部が電気的に接続されるように構成されてもよい。   Further, in the ultrasonic transducer, the plurality of connection members that are electrically connected to the respective electrodes of the electromechanical transducer are formed by punching a thin metal plate into a substantially rectangular shape with the same shape. At the end of the substantially rectangular thin metal plate, an electrical connection part is formed in pressure contact with the electrode layer formed on one surface of the electromechanical transducer, and the inside of the hole formed in the vicinity of the electrical connection part Are formed in a direction opposite to the electrical connection portion to press contact the other surface of the electromechanical transducer, and by changing the bending direction of the pressure portion, The electrical connection portion may be configured to be electrically connected.

また、上記超音波振動子において、前記電気機械変換素子と加圧接触する前記接続部材の面に、凹凸部または突起部が設けられてもよい。
また、上記超音波振動子の接続部材は、前記電気機械変換素子の一方の面を加圧接触する加圧部と、前記電気機械変換素子の他方の面に形成される電極層を加圧接触する電気接続部とを備え、前記電気接続部の面積が前記加圧部の面積よりも広く構成してもよい。 In the ultrasonic transducer, an uneven portion or a protruding portion may be provided on the surface of the connection member that is in pressure contact with the electromechanical transducer.
In addition, the connecting member of the ultrasonic transducer is configured to press and contact the pressing portion that pressurizes and contacts one surface of the electromechanical transducer, and the electrode layer formed on the other surface of the electromechanical transducer. And an electrical connection portion that is configured such that an area of the electrical connection portion is larger than an area of the pressurizing portion.

また、上記超音波振動子の接続部材は、前記電気機械変換素子の一方の面を加圧接触する加圧部と、前記電気機械変換素子の他方の面に形成される電極層を加圧接触する電気接続部とを備え、前記加圧部及び前記電気接続部の一方または両方に１本以上の貫通した溝が設けられてもよい。   In addition, the connecting member of the ultrasonic transducer is configured to press and contact the pressing portion that pressurizes and contacts one surface of the electromechanical transducer, and the electrode layer formed on the other surface of the electromechanical transducer. And one or both of the pressurizing part and the electrical connecting part may be provided with one or more through-grooves.

また、上記超音波振動子の接続部材は、前記電気機械変換素子の一方の面を加圧接触する加圧部と、前記電気機械変換素子の他方の面に形成される電極層を加圧接触する電気接続部とを備え、前記加圧部または前記電気接続部に孔が設けられ、前記孔内部に半田または導電性接着剤が入れられ、前記電気機械変換素子と前記接続部材とが接続されてもよい。   In addition, the connecting member of the ultrasonic transducer is configured to press and contact the pressing portion that pressurizes and contacts one surface of the electromechanical transducer, and the electrode layer formed on the other surface of the electromechanical transducer. An electrical connection portion, and a hole is provided in the pressurizing portion or the electrical connection portion, solder or a conductive adhesive is placed inside the hole, and the electromechanical conversion element and the connection member are connected to each other. May be.

また、上記超音波振動子において、前記電気機械変換素子と前記接続部材との隙間が保護部材により覆われてもよい。
また、上記超音波振動子において、ＧＮＤ線と電気的に接続され、少なくとも前記電気機械変換素子を内部で固定する金属製のハウジングを備え、前記接続部材が前記ハウジングと電気的に接続されてもよい。 In the ultrasonic transducer, a gap between the electromechanical transducer and the connection member may be covered with a protective member.
The ultrasonic transducer may further include a metal housing that is electrically connected to the GND wire and fixes at least the electromechanical transducer inside, and the connecting member is electrically connected to the housing. Good.

また、上記超音波振動子の電気機械変換素子は、複数の柱状セラミック圧電体それぞれが樹脂により包まれて形成される板状部材の両面に電極層が配されることにより構成される複合圧電素子であり、前記樹脂と前記電極層との合計の厚さが、前記柱状セラミック圧電体と前記電極層との合計の厚さよりも厚く、前記接続部材により前記樹脂が加圧変形されることにより前記電気機械変換素子と前記接続部材とが接続されてもよい。   Further, the electromechanical transducer of the ultrasonic vibrator is a composite piezoelectric element configured by arranging electrode layers on both sides of a plate-like member formed by enclosing a plurality of columnar ceramic piezoelectric bodies with resin. The total thickness of the resin and the electrode layer is larger than the total thickness of the columnar ceramic piezoelectric body and the electrode layer, and the resin is pressurized and deformed by the connecting member. The electromechanical conversion element and the connection member may be connected.

また、上記超音波振動子において前記接続部材が形状記憶合金により形成されてもよい。
また、上記超音波振動子の前記接続部材を弾性変形させることにより、前記電気機械変換素子と前記接続部材とが接続されてもよい。 In the ultrasonic transducer, the connection member may be formed of a shape memory alloy.
Further, the electromechanical transducer and the connection member may be connected by elastically deforming the connection member of the ultrasonic transducer.

また、本発明の上記超音波振動子の製造方法は、金属薄板を抜き加工することにより、前記接続部材と、前記電気機械変換素子を載せるための載置部材と、前記金属薄板と前記接続部材及び前記金属薄板と前記載置部材とを結合させるための結合部とを前記金属薄板に形成し、前記載置部材に前記電気機械変換素子を載せ、前記接続部材の一部を折り曲げることにより、前記電気機械変換素子と前記接続部材とを接続し、前記結合部を切り落とすことを特徴とする。   The ultrasonic transducer manufacturing method according to the present invention includes a step of punching a metal thin plate to form the connection member, a mounting member for mounting the electromechanical transducer, the metal thin plate, and the connection member. And forming a coupling portion for coupling the metal thin plate and the mounting member on the metal thin plate, placing the electromechanical conversion element on the mounting member, and bending a part of the connection member, The electromechanical transducer and the connection member are connected, and the coupling portion is cut off.

本発明によれば、接続部材が電気機械変換素子を、対向する２方向から加圧接触することにより電気機械変換素子と接続部材との電気的な接続が行われるため、超音波振動子の構造を簡単にし、電気機械変換素子と接続部材との電気的な接続に対する信頼性を向上させることができる。   According to the present invention, since the electromechanical transducer and the connecting member are electrically connected by pressurizing and contacting the electromechanical transducer from two opposing directions, the structure of the ultrasonic transducer is achieved. And the reliability of the electrical connection between the electromechanical transducer and the connection member can be improved.

また、リード部が一体に形成されて接続部材を構成している場合は、電気機械変換素子とリード部とを半田等により接続する必要が無くなり、電気機械変換素子に熱的ダメージが与えられることを抑制することができる。   In addition, when the lead part is integrally formed to form a connection member, it is not necessary to connect the electromechanical conversion element and the lead part with solder or the like, and the electromechanical conversion element is thermally damaged. Can be suppressed.

また、電気機械変換素子と接続部材との電気的な接続が半田等を使用しなくても可能になるため、超音波振動子を小型化することができ、その分製造コストを安価にすることができる。   In addition, since the electrical connection between the electromechanical transducer and the connection member is possible without using solder or the like, the ultrasonic transducer can be reduced in size, and the manufacturing cost can be reduced accordingly. Can do.

以下、本発明の実施形態を図面を用いて説明する。
＜第１実施形態＞
図１は、本発明の第１実施形態の超音波振動子を説明するための図である。 Hereinafter, embodiments of the present invention will be described with reference to the drawings.
<First Embodiment>
FIG. 1 is a diagram for explaining an ultrasonic transducer according to a first embodiment of the present invention.

図１に示すように、超音波振動子１は、電気機械変換素子２（例えば、圧電素子）の音波放射側に超音波を整合するための音響整合部材３が形成されており、その反対側に超音波を減衰させるためのバッキング材４が接着固定されている。   As shown in FIG. 1, in the ultrasonic transducer 1, an acoustic matching member 3 for matching ultrasonic waves is formed on the sound wave emission side of an electromechanical transducer 2 (for example, a piezoelectric element), and the opposite side thereof. A backing material 4 for attenuating the ultrasonic waves is bonded and fixed.

また、電気機械変換素子２の上下面には、電極層５が作成されている。
また、電気機械変換素子２の上下面には、電極層５が一部切り取られることにより形成されてできる切欠き部６が設けられている。 Electrode layers 5 are formed on the upper and lower surfaces of the electromechanical transducer 2.
In addition, on the upper and lower surfaces of the electromechanical conversion element 2, there are provided notch portions 6 formed by partially cutting the electrode layer 5.

また、接続部材７は、コ字状に作成されており、電気機械変換素子２を、対向方向８（対向する２方向）から加圧することにより電気機械変換素子２を固定している。このとき、接続部材７の加圧部９は、切欠き部６に加圧接触し、加圧部９と対向する電気接続部１０は、電極層５に加圧接触している。   The connecting member 7 is formed in a U-shape, and the electromechanical conversion element 2 is fixed by pressurizing the electromechanical conversion element 2 from the facing direction 8 (two opposing directions). At this time, the pressing portion 9 of the connecting member 7 is in pressure contact with the notch portion 6, and the electrical connection portion 10 facing the pressing portion 9 is in pressure contact with the electrode layer 5.

また、接続部材７は、半田、導電性接着剤、またはビス等の電気的及び機械的な締結手段によりリード線１１と固定されている。なお、リード線１１は図示しないドライバに接続されているものとする。   Further, the connecting member 7 is fixed to the lead wire 11 by electrical and mechanical fastening means such as solder, conductive adhesive, or screws. Note that the lead wire 11 is connected to a driver (not shown).

次に、超音波振動子１の動作について説明する。
図示しないドライバにより、超音波信号が励起されリード線１１を通じて、接続部材７から電気機械変換素子２に印加されると、その超音波信号を超音波に変換して音響整合部材３から超音波が送信される。また、電気機械変換素子２が外部から超音波を受けると、超音波を超音波信号に変換して接続部材７及びリード線１１を介して図示しないドライバに送られる。 Next, the operation of the ultrasonic transducer 1 will be described.
When an ultrasonic signal is excited by a driver (not shown) and applied to the electromechanical transducer 2 from the connection member 7 through the lead wire 11, the ultrasonic signal is converted into an ultrasonic wave by the ultrasonic wave from the acoustic matching member 3. Sent. Further, when the electromechanical conversion element 2 receives an ultrasonic wave from the outside, the ultrasonic wave is converted into an ultrasonic signal and sent to a driver (not shown) via the connection member 7 and the lead wire 11.

このように、接続部材７が電気機械変換素子２を対向方向８から挟み込んでいるので、電気接続部１０が電極層５を常に加圧接触し、電気機械変換素子２と接続部材７との電気的な接続状態が継続して安定する。   As described above, since the connection member 7 sandwiches the electromechanical conversion element 2 from the facing direction 8, the electric connection portion 10 always press-contacts the electrode layer 5, and the electric connection between the electromechanical conversion element 2 and the connection member 7 is achieved. Connection status continues and stabilizes.

これにより、電気機械変換素子２と接続部材７との電気的な接続に対する信頼性が向上するので、電気機械変換素子２とリード線１１との電気的な接続に対する信頼性も向上する。   Thereby, since the reliability with respect to the electrical connection between the electromechanical conversion element 2 and the connection member 7 is improved, the reliability with respect to the electrical connection between the electromechanical conversion element 2 and the lead wire 11 is also improved.

また、接続部材７とリード線１１とを半田等により接続しているので、電気機械変換素子２が受ける熱的ダメージを抑制することができる。
また、半田等を使用することなく電気機械変換素子２と接続部材７とを接続しているので、半田エリア等を電気機械変換素子２等に設ける必要がない分、超音波振動子１を小型化することができ、製造コストを安価にすることができる。 Further, since the connection member 7 and the lead wire 11 are connected by solder or the like, thermal damage to the electromechanical conversion element 2 can be suppressed.
Further, since the electromechanical transducer 2 and the connecting member 7 are connected without using solder or the like, the ultrasonic transducer 1 is reduced in size because it is not necessary to provide a solder area or the like in the electromechanical transducer 2 or the like. The manufacturing cost can be reduced.

＜第２実施形態＞
図２Ａ〜図２Ｄは、本発明の第２実施形態の超音波振動子を説明するための図である。なお、図１に示す構成と同じ構成には同じ符号を付している。また、図２Ａは、他の実施形態の超音波振動子全体を示す図である。また、図２Ｂは、図２Ａに示す超音波振動子に接続される接続部材単体を示す図である。また、図２Ｃは、図２Ｂに示す接続部材が折り曲げ加工された状態を示す図である。また、図２Ｄは、図２Ｃに示す接続部材が電気機械変換素子に接続された状態を示す図である。 Second Embodiment
2A to 2D are views for explaining an ultrasonic transducer according to a second embodiment of the present invention. In addition, the same code | symbol is attached | subjected to the same structure as the structure shown in FIG. FIG. 2A is a diagram illustrating the entire ultrasonic transducer according to another embodiment. FIG. 2B is a diagram showing a single connection member connected to the ultrasonic transducer shown in FIG. 2A. FIG. 2C is a diagram illustrating a state where the connection member illustrated in FIG. 2B is bent. FIG. 2D is a diagram illustrating a state in which the connection member illustrated in FIG. 2C is connected to the electromechanical conversion element.

図２Ａに示す超音波振動子１２において、接続部材１３は、金属薄板が抜き加工されることにより形成されるものであって、電気機械変換素子２の一方の面の切欠き部６を加圧接触する加圧部１４と、電気機械変換素子２の他方の面の電極層５を加圧接触する電気接続部１５と、ＧＮＤ線や信号線等と接続されるリード部１６とを備え、加圧部１４と電気接続部１５とリード部１６とが一体に形成されている。なお、図２Ａに示す電気機械変換素子２の左側に接続される接続部材１３は、加圧部１４が電極層５を加圧接触し、電気接続部１５が切欠き部６を加圧接触する構成としている。   In the ultrasonic transducer 12 shown in FIG. 2A, the connection member 13 is formed by punching a metal thin plate, and pressurizes the notch 6 on one surface of the electromechanical transducer 2. A pressurizing unit 14 that contacts, an electrical connection unit 15 that pressurizes and contacts the electrode layer 5 on the other surface of the electromechanical transducer 2, and a lead unit 16 that is connected to a GND line, a signal line, or the like. The pressure part 14, the electrical connection part 15, and the lead part 16 are integrally formed. In the connection member 13 connected to the left side of the electromechanical conversion element 2 shown in FIG. 2A, the pressurizing part 14 makes pressure contact with the electrode layer 5, and the electrical connection part 15 makes pressure contact with the notch part 6. It is configured.

また、接続部材１３は、電気機械変換素子２に接続される前、図２Ｃに示すような形状に予め折り曲げられている。そして、図２Ｃ及び図２Ｄに示すように、加圧部１４と電気接続部１５との間の差込み部１７に電気機械変換素子２が差し込まれ、対向方向８から加圧部１４と電気接続部１５とが応圧され、加圧部１４が切欠き部６を加圧接触し、電気接続部１５が電極層５を加圧接触して、接続部材１３が電気機械変換素子２を固定する。   Further, the connection member 13 is bent in advance into a shape as shown in FIG. 2C before being connected to the electromechanical transducer 2. 2C and 2D, the electromechanical conversion element 2 is inserted into the insertion portion 17 between the pressurizing unit 14 and the electrical connection unit 15, and the pressurization unit 14 and the electrical connection unit from the facing direction 8 are inserted. 15, the pressurizing unit 14 pressurizes and contacts the notch 6, the electrical connecting unit 15 pressurizes and contacts the electrode layer 5, and the connecting member 13 fixes the electromechanical transducer 2.

また、図２Ｂ〜図２Ｄに示すように、リード部１６の端部１８に設けられた突起１９を折り曲げて、端部１８にリード線１１を挟み込ませることによりリード線１１をリード部１６に固定し、その後、リード部１６とリード線１１の先端部とを半田２０により固定する。これにより、リード部１６とリード線１１とが電気的及び機械的に接続され、接続部材１３とリード線１１とが電気的及び機械的に接続される。   2B to 2D, the lead wire 11 is fixed to the lead portion 16 by bending the protrusion 19 provided on the end portion 18 of the lead portion 16 and sandwiching the lead wire 11 in the end portion 18. Thereafter, the lead portion 16 and the tip end portion of the lead wire 11 are fixed by the solder 20. Thereby, the lead part 16 and the lead wire 11 are electrically and mechanically connected, and the connecting member 13 and the lead wire 11 are electrically and mechanically connected.

このように、半田２０による接続部材１３とリード線１１との接続を、電気機械変換素子２と接続部材１３とが接続される位置からリード部１６の長手方向の長さ分離れた位置の接続部材１３上で実施できるので、接続時の半田２０の熱が電気機械変換素子２に伝わり難くなり、電気機械変換素子２に熱的ダメージをあまり与えないようにすることができる。   In this way, the connection between the connection member 13 and the lead wire 11 by the solder 20 is performed at a position separated from the position where the electromechanical conversion element 2 and the connection member 13 are connected in the longitudinal direction of the lead portion 16. Since it can be carried out on the member 13, the heat of the solder 20 at the time of connection is hardly transmitted to the electromechanical conversion element 2, and it is possible to prevent the electromechanical conversion element 2 from being damaged much.

すなわち、電気機械変換素子２とリード線１１とがリード部１６を介して離れて接続されるため、リード線１１をリード部１６に接続する際にリード部１６が受ける熱の影響を電気機械変換素子２に受け難くさせることができる。   That is, since the electromechanical conversion element 2 and the lead wire 11 are connected to each other via the lead portion 16, the influence of the heat received by the lead portion 16 when the lead wire 11 is connected to the lead portion 16 is electromechanically converted. The element 2 can be made difficult to receive.

これにより、超音波振動子１２の品質を向上させることができる。
また、端部１８に突起１９を設けたことにより、接続部材１３とリード線１１との機械的な接続に対する信頼性を向上させることができる。 Thereby, the quality of the ultrasonic transducer | vibrator 12 can be improved.
Further, by providing the protrusions 19 at the end portions 18, it is possible to improve the reliability with respect to the mechanical connection between the connecting member 13 and the lead wire 11.

また、端部１８に突起１９を設けたことにより、接続部材１３とリード線１１との接続作業が容易となり作業性を向上させることができる。
また、電気機械変換素子２と接続部材１３とが接続される場所の近傍にリード線１１が接続されない構成であるため、半田つけエリア等の不確定なエリアが電気機械変換素子２や接続部材６から無くなり、超音波振動子１２の形状をより設計時の形状のみで決めることができる。 Further, by providing the projections 19 at the end portion 18, the connection work between the connection member 13 and the lead wire 11 becomes easy, and the workability can be improved.
In addition, since the lead wire 11 is not connected in the vicinity of the place where the electromechanical conversion element 2 and the connection member 13 are connected, an uncertain area such as a soldering area is the electromechanical conversion element 2 or the connection member 6. Therefore, the shape of the ultrasonic transducer 12 can be determined only by the shape at the time of design.

また、電気機械変換素子２や接続部材６に無駄なエリアを設ける必要がなくなり、小型化が容易となる。
また、リード部１６が一体に形成されて接続部材１３を構成しているので、電気機械変換素子２とリード部１６とを半田等により接続する必要が無くなり、電気機械変換素子２に熱的ダメージが与えられることを抑制することができる。 Further, it is not necessary to provide a useless area in the electromechanical conversion element 2 or the connection member 6, and the miniaturization is facilitated.
Further, since the lead portion 16 is integrally formed to constitute the connecting member 13, it is not necessary to connect the electromechanical conversion element 2 and the lead portion 16 with solder or the like, and the electromechanical conversion element 2 is thermally damaged. Can be suppressed.

＜第３実施形態＞
図３は、本発明の第３実施形態の超音波振動子を説明するための図である。なお、図１または図２Ａ〜図２Ｄに示す構成と同じ構成には同じ符号を付している。 <Third Embodiment>
FIG. 3 is a diagram for explaining an ultrasonic transducer according to a third embodiment of the present invention. In addition, the same code | symbol is attached | subjected to the same structure as the structure shown in FIG. 1 or FIG. 2A-FIG. 2D.

図３に示すように、超音波振動子２１は、切欠き部６を有していない電極層５が電気機械変換素子２の上下面に配されている。そして、図３に示す電気変換素子２の右側に接続される接続部材１３の加圧部１４が絶縁部材２２を介して対向方向８に電極層５を加圧し、電気接続部１５が対向方向８に電極層５を加圧接触している。また、図３に示す電気機械変換素子２の左側に接続される接続部材１３は、加圧部１４が電極層５を加圧接触し、電気接続部１５が絶縁部材２２を介して電極層５を加圧する構成としている。なお、絶縁部材２２は、例えば、ポリイミド、テフロン（登録商標）、シリコン樹脂等の有機物の絶縁材料で構成されてもよい。   As shown in FIG. 3, in the ultrasonic transducer 21, the electrode layers 5 that do not have the notch 6 are arranged on the upper and lower surfaces of the electromechanical transducer 2. And the pressurization part 14 of the connection member 13 connected to the right side of the electrical conversion element 2 shown in FIG. 3 pressurizes the electrode layer 5 in the opposing direction 8 through the insulating member 22, and the electrical connection part 15 is in the opposing direction 8. The electrode layer 5 is in pressure contact. Further, in the connection member 13 connected to the left side of the electromechanical transducer 2 shown in FIG. 3, the pressurizing unit 14 pressurizes and contacts the electrode layer 5, and the electrical connection unit 15 passes through the insulating member 22 to form the electrode layer 5. It is set as the structure which pressurizes. The insulating member 22 may be made of an organic insulating material such as polyimide, Teflon (registered trademark), or silicon resin.

このように、加圧部１４または電気接続部１５が絶縁部材２２を介して電気機械変換素子２の電極層５を加圧するため、電極層５の形状によることなく電気機械変換素子２と接続部材１３とを電気的に接続することができる。   Thus, since the pressurization part 14 or the electrical connection part 15 pressurizes the electrode layer 5 of the electromechanical conversion element 2 via the insulating member 22, the electromechanical conversion element 2 and the connection member are not affected by the shape of the electrode layer 5. 13 can be electrically connected.

これにより、電極層５の形状を考慮することなく、ベタ電極で電極層５を形成することができ、電気機械変換素子２の構造を非常に単純にすることができる。
また、絶縁部材２２が有機物の絶縁材料で構成される場合は、絶縁部材２２が電気機械変換素子２と加圧部１４または電気接続部１５との間で自由に変形するので、電気機械変換素子２に加圧部１４または電気接続部１５による局部応力が発生することを防止することができる。 Thereby, without considering the shape of the electrode layer 5, the electrode layer 5 can be formed with a solid electrode, and the structure of the electromechanical transducer 2 can be made very simple.
Further, when the insulating member 22 is made of an organic insulating material, the insulating member 22 is freely deformed between the electromechanical conversion element 2 and the pressurizing unit 14 or the electric connecting unit 15. 2 can be prevented from generating local stress due to the pressurizing portion 14 or the electrical connecting portion 15.

これにより、電気機械変換素子２に対する加圧部１４または電気接続部１５の圧力が均一化し、電気機械変換素子２と接続部材１３との電気的及び機械的な接続に対する信頼性を向上させ、超音波振動子２１の品質を安定化させることができる。   Thereby, the pressure of the pressurizing part 14 or the electrical connection part 15 with respect to the electromechanical conversion element 2 is made uniform, and the reliability of the electrical and mechanical connection between the electromechanical conversion element 2 and the connection member 13 is improved. The quality of the sound wave vibrator 21 can be stabilized.

＜第４実施形態＞
図４Ａ〜図４Ｃは、本発明の第４実施形態の超音波振動子を説明するための図である。なお、図１または図２Ａ〜図２Ｄに示す構成と同じ構成には同じ符号を付している。また、図４Ａは、他の実施形態の超音波振動子全体を示す図である。また、図４Ｂは、電気機械変換素子と接続部材とが接続される前において図４Ａに示す矢印ａ方向から見た図である。また、図４Ｃは、図４Ａに示す矢印ａ方向から見た図である。 <Fourth embodiment>
4A to 4C are views for explaining an ultrasonic transducer according to a fourth embodiment of the present invention. In addition, the same code | symbol is attached | subjected to the same structure as the structure shown in FIG. 1 or FIG. 2A-FIG. 2D. FIG. 4A is a diagram illustrating an entire ultrasonic transducer according to another embodiment. Moreover, FIG. 4B is the figure seen from the arrow a direction shown to FIG. 4A before an electromechanical transducer and a connection member are connected. Moreover, FIG. 4C is the figure seen from the arrow a direction shown to FIG. 4A.

図４Ａ及び図４Ｂに示す超音波振動子２３において、電気機械変換素子２には、上下面に配されている電極層５の一部が切り取られ、切欠き部６が設けられている。
また、図４Ｃに示すように、電気機械変換素子２と接続部材１３とが接続される際、電極層５と電気接続部１５との間に隙間２４が空くように、電気接続部１５が形成されている。そして、電気機械変換素子２と接続部材１３とを接続する際は、電極層５と電気接続部１５との間に隙間２４が空くように接続部材１３の位置だしが行われる。 In the ultrasonic transducer 23 shown in FIG. 4A and FIG. 4B, the electromechanical transducer 2 is provided with a notch 6 by cutting off a part of the electrode layer 5 disposed on the upper and lower surfaces.
4C, when the electromechanical transducer 2 and the connection member 13 are connected, the electrical connection portion 15 is formed so that a gap 24 is formed between the electrode layer 5 and the electrical connection portion 15. Has been. When the electromechanical transducer 2 and the connection member 13 are connected, the connection member 13 is positioned so that a gap 24 is left between the electrode layer 5 and the electrical connection portion 15.

これにより、電極層５と電気接続部１５とが隙間２４により絶縁される。
また、切欠き部６の形状を予め設計時において決定することができるので、音波放射面積を正確に決めることができる。 Thereby, the electrode layer 5 and the electrical connection portion 15 are insulated by the gap 24.
Moreover, since the shape of the notch 6 can be determined in advance at the time of design, the sound wave radiation area can be determined accurately.

また、電気機械変換素子２を複数作成する場合においてもそれぞれ同一面積の切欠き部６を設けることができるので、超音波振動子２３の品質を向上させることができる。
また、半田等を使用して電気機械変換素子２と接続部材１３とを接続する場合のように、半田等が流れ出すことを予測して電気機械変換素子２と接続部材１３との接続エリアを大きく取る必要がないため、超音波振動子２３を小型化することが可能となる。 In addition, even when a plurality of electromechanical transducer elements 2 are produced, the cutout portions 6 having the same area can be provided, so that the quality of the ultrasonic transducer 23 can be improved.
Further, as in the case where the electromechanical conversion element 2 and the connection member 13 are connected using solder or the like, the connection area between the electromechanical conversion element 2 and the connection member 13 is increased by predicting that the solder or the like flows out. Since it is not necessary to reduce the size, the ultrasonic transducer 23 can be downsized.

なお、図４Ａに示す電気機械変換素子２の右側に接続される接続部材１３においても、加圧部１４と電極層５との間に隙間２４が空くように加圧部１４を形成してもよい。
＜第５実施形態＞
図５Ａ〜図５Ｅは、本発明の第５実施形態の超音波振動子を説明するための図である。なお、図１または図２Ａ〜図２Ｄに示す構成と同じ構成には同じ符号を付している。また、図５Ａは、接続部材単体を示す図である。図５Ｂは、電気機械変換素子と接続部材とが接続される前において接続部材が折り曲げられた状態を示す図である。図５Ｃは、電気機械変換素子と接続部材とが接続された状態を示す図である。図５Ｄは、図５Ａに示す接続部材のｍ−ｍ断面図を示している。図５Ｅは、他の実施形態の超音波振動子全体を示す図である。図５Ｆは、ハウジング単体の斜視図を示している。 In the connection member 13 connected to the right side of the electromechanical transducer 2 shown in FIG. 4A, the pressurizing part 14 may be formed so that a gap 24 is left between the pressurizing part 14 and the electrode layer 5. Good.
<Fifth Embodiment>
5A to 5E are views for explaining an ultrasonic transducer according to a fifth embodiment of the present invention. In addition, the same code | symbol is attached | subjected to the same structure as the structure shown in FIG. 1 or FIG. 2A-FIG. 2D. FIG. 5A is a diagram showing a single connection member. FIG. 5B is a diagram illustrating a state in which the connection member is bent before the electromechanical transducer and the connection member are connected. FIG. 5C is a diagram illustrating a state in which the electromechanical conversion element and the connection member are connected. FIG. 5D shows a cross-sectional view of the connecting member shown in FIG. FIG. 5E is a diagram illustrating an entire ultrasonic transducer according to another embodiment. FIG. 5F shows a perspective view of a single housing.

図５Ａ〜図５Ｄに示す接続部材１３は、金属薄板が抜き加工されることにより形成されるものであって、接続部材１３の厚さｔを１とする場合、接続部材１３の幅Ｗが５以上になるように形成されている。なお、金属薄板を抜き加工して接続部材１３を形成する際、突起１９を備えない形状、すなわち、略長方形に抜き加工して接続部材１３を形成してもよい。   The connection member 13 shown in FIGS. 5A to 5D is formed by punching a thin metal plate. When the thickness t of the connection member 13 is 1, the width W of the connection member 13 is 5. It is formed as described above. Note that when the connecting member 13 is formed by punching a thin metal plate, the connecting member 13 may be formed by punching into a shape without the protrusions 19, that is, a substantially rectangular shape.

また、図５Ａ及び図５Ｂに示すように、接続部材１３の端部には、互いに対向する位置にくびれ部２５が設けられている。
これにより、接続部材１３をくびれ部２５において折れ易くさせることができる。 Further, as shown in FIGS. 5A and 5B, a constricted portion 25 is provided at an end portion of the connecting member 13 at a position facing each other.
Thereby, the connecting member 13 can be easily broken at the constricted portion 25.

次に、図５Ｅに示す超音波振動子２６について説明する。
まず、電気機械変換素子２に接続部材１３を接続し、各電極層５に音響整合部材３とバッキング材４を取り付けた後、接続部材１３のリード部１６を図５Ｆに示すハウジング２７の孔２８に挿入し、バッキング材４をハウジング２７の台座部２９に載置する。なお、台座部２９には、予め接着剤が塗布されていてもよい。また、ハウジング２７は、樹脂材料で作成されてもよい。 Next, the ultrasonic transducer 26 shown in FIG. 5E will be described.
First, after connecting the connection member 13 to the electromechanical transducer 2 and attaching the acoustic matching member 3 and the backing material 4 to each electrode layer 5, the lead portion 16 of the connection member 13 is connected to the hole 28 of the housing 27 shown in FIG. 5F. And the backing material 4 is placed on the pedestal 29 of the housing 27. Note that an adhesive may be applied to the pedestal portion 29 in advance. The housing 27 may be made of a resin material.

次に、孔２８から出ている接続部材１３をくびれ部２５において折り曲げてハウジング２７の内部に収納する。
このように、孔２８に接続部材１３のリード部１６を挿入させる場合、リード部１６の曲がりの自由度は、図５Ｄに示すように、Ｘ軸回りのモーメントＭｘに対しては曲がり易く、Ｙ軸回りのモーメントＭｙに対しては曲がり難いことがハウジング２７へのリード部１６の位置決めとその後のリード部１６の折り曲げ作業上において必要になる。 Next, the connecting member 13 protruding from the hole 28 is bent at the constricted portion 25 and accommodated in the housing 27.
Thus, when the lead portion 16 of the connecting member 13 is inserted into the hole 28, the degree of freedom of bending of the lead portion 16 is easily bent with respect to the moment Mx around the X axis, as shown in FIG. It is necessary for the positioning of the lead portion 16 to the housing 27 and the subsequent bending operation of the lead portion 16 that it is difficult to bend with respect to the moment My around the axis.

また、幅Ｗを厚みｔに対して十分大きく、例えば、上述したように、厚みｔを１としたときに幅Ｗが５以上とすることによりリード部１６の曲がりの自由度をＭｙ＞＞Ｍｘとすることができる。   Further, the width W is sufficiently large with respect to the thickness t. For example, as described above, when the thickness t is 1, the width W is 5 or more, whereby the degree of freedom of bending of the lead portion 16 is My >> Mx. It can be.

このように、リード部１６の曲がりの自由度をＭｙ＞＞Ｍｘとすることができるので、リード部１６の位置決めにばらつきが起こらず、リード部１６の孔２８への挿入を容易にし、電気機械変換素子２をハウジング２７に載置することが簡単化する。   In this way, the degree of freedom of bending of the lead portion 16 can be set to My >> Mx. Therefore, the positioning of the lead portion 16 does not vary, and the lead portion 16 can be easily inserted into the hole 28. Mounting the conversion element 2 on the housing 27 is simplified.

また、Ｍｙ＞＞Ｍｘとすることにより、組み立て精度や品質が向上し、製造コストを低減することができる。
＜第６実施形態＞
図６Ａ〜図６Ｇは、本発明の第６実施形態の超音波振動子を説明するための図である。なお、図１または図２Ａ〜図２Ｄに示す構成と同じ構成には同じ符号を付している。また、図６Ａは、他の実施形態の超音波振動子全体を示す図である。また、図６Ｂは、接続部材単体を示す図である。また、図６Ｃは、図６Ｂに示す接続部材の加圧部と電気接続部とが互いに反対方向に曲げられたときの状態を示す図である。また、図６Ｄは、図６Ｃに示す接続部材が図６Ａに示す電気機械変換素子の右側に接続された状態を示す図である。また、図６Ｅは、図６Ｂに示す接続部材の加圧部と電気接続部とが互いに同じ方向に曲げられたときの状態を示す図である。また、図６Ｆは、図６Ｅに示す接続部材の加圧部が電気接続部側にさらに曲げられたときの状態を示す図である。また、図６Ｇは、図６Ｆに示す接続部材が図６Ａに示す電気機械変換素子の左側に接続された状態を示す図である。 Further, by setting My >> Mx, the assembly accuracy and quality can be improved, and the manufacturing cost can be reduced.
<Sixth Embodiment>
6A to 6G are views for explaining an ultrasonic transducer according to a sixth embodiment of the present invention. In addition, the same code | symbol is attached | subjected to the same structure as the structure shown in FIG. 1 or FIG. 2A-FIG. 2D. FIG. 6A is a diagram illustrating an entire ultrasonic transducer according to another embodiment. FIG. 6B is a diagram showing a single connection member. Moreover, FIG. 6C is a figure which shows a state when the pressurization part and electrical connection part of a connection member which are shown to FIG. 6B are bent in the mutually opposite direction. 6D is a diagram illustrating a state where the connection member illustrated in FIG. 6C is connected to the right side of the electromechanical transducer illustrated in FIG. 6A. Moreover, FIG. 6E is a figure which shows a state when the pressurization part and electrical connection part of a connection member which are shown to FIG. 6B are mutually bent in the same direction. Moreover, FIG. 6F is a figure which shows a state when the pressurization part of the connection member shown to FIG. 6E is further bent to the electrical connection part side. 6G is a diagram illustrating a state in which the connection member illustrated in FIG. 6F is connected to the left side of the electromechanical transducer illustrated in FIG. 6A.

図６Ａに示す超音波振動子３０は、電気機械変換素子２の右側に接続されている接続部材１３の加圧部１４がバッキング材４側にある切欠き部６を加圧接触し、電気接続部１５が音響整合部材３側にある電極層５を加圧接触している。また、電気機械変換素子２の左側に接続されている接続部材１３の加圧部１４が音響整合部材３側にある切欠き部６を加圧接触し、電気接続部１５がバッキング材４側にある電極層５を加圧接触している。   In the ultrasonic transducer 30 shown in FIG. 6A, the pressing portion 14 of the connecting member 13 connected to the right side of the electromechanical transducer 2 presses and contacts the notch portion 6 on the backing material 4 side to make electrical connection. The portion 15 is in pressure contact with the electrode layer 5 on the acoustic matching member 3 side. In addition, the pressing portion 14 of the connecting member 13 connected to the left side of the electromechanical transducer 2 presses and contacts the notch portion 6 on the acoustic matching member 3 side, and the electric connecting portion 15 faces the backing material 4 side. A certain electrode layer 5 is in pressure contact.

この電気機械変換素子２の左右に接続される２つの接続部材１３は、それぞれ、図６Ｂに示す接続部材１３の加圧部１４の折曲げ方向を変更させることにより作成される。
また、接続部材１３の孔３１の側面に加圧部１４が設けられていることにより、その加圧部１４をリード部１６と独立して曲げることができ、加圧部１４の折曲げ方向を変更させることができる。 The two connection members 13 connected to the left and right of the electromechanical transducer 2 are created by changing the bending direction of the pressurizing portion 14 of the connection member 13 shown in FIG. 6B.
In addition, since the pressing portion 14 is provided on the side surface of the hole 31 of the connecting member 13, the pressing portion 14 can be bent independently of the lead portion 16, and the bending direction of the pressing portion 14 can be changed. It can be changed.

また、図６Ｂ、図６Ｃ、図６Ｅ、または図６Ｆに示すように、孔３１の左右には、それぞれ支柱３２が配されている。このように、孔３１の左右にそれぞれ支柱３２が配されていることにより、接続部材１３における電気機械変換素子２との接続部分が電気機械変換素子２をねじれるように変形することを防止している。   Moreover, as shown in FIG. 6B, FIG. 6C, FIG. 6E, or FIG. 6F, the support | pillar 32 is distribute | arranged to the left and right of the hole 31, respectively. As described above, the support columns 32 are arranged on the left and right sides of the hole 31, so that the connection portion of the connection member 13 with the electromechanical conversion element 2 is prevented from being deformed so as to twist the electromechanical conversion element 2. Yes.

また、図６Ｃに示すように、加圧部１４が矢印３３方向に曲げられると共に、電気接続部１５が矢印３４方向に曲げられ、さらに、図６Ｄに示すように、加圧部１４と電気接続部１５との間に電気機械変換素子２が挿し込まれ、加圧部１４と電気接続部１５とが対向方向８から押圧され、加圧部１４と電気接続部１５とがそれぞれ塑性変形すると、電気機械変換素子２の右側に接続部材１３が接続される。   Further, as shown in FIG. 6C, the pressurizing portion 14 is bent in the direction of the arrow 33, and the electrical connecting portion 15 is bent in the direction of the arrow 34. Further, as shown in FIG. 6D, the pressurizing portion 14 is electrically connected. When the electromechanical conversion element 2 is inserted between the portion 15 and the pressurizing portion 14 and the electrical connecting portion 15 are pressed from the opposing direction 8, and the pressurizing portion 14 and the electrical connecting portion 15 are plastically deformed, respectively. A connection member 13 is connected to the right side of the electromechanical transducer 2.

また、図６Ｅに示すように、加圧部１４が矢印３５方向に曲げられると共に、電気接続部１５が矢印３５と同じ回転方向である矢印３６方向に曲げられ、次に、図６Ｆに示すように、加圧部１４が矢印３５と同じ回転方向である矢印３７方向に曲げられ、そして、図６Ｇに示すように、加圧部１４と電気接続部１５との間に電気機械変換素子２が挿し込まれ、加圧部１４と電気接続部１５とが対向方向８から押圧され、加圧部１４と電気接続部１５とがそれぞれ塑性変形すると、電気機械変換素子２の左側に接続部材１３が接続される。   6E, the pressure unit 14 is bent in the direction of the arrow 35, and the electrical connection unit 15 is bent in the direction of the arrow 36, which is the same rotational direction as the arrow 35. Next, as shown in FIG. 6F. Further, the pressurizing unit 14 is bent in the direction of the arrow 37 which is the same rotation direction as the arrow 35, and the electromechanical transducer 2 is interposed between the pressurizing unit 14 and the electrical connecting unit 15 as shown in FIG. 6G. When the pressure member 14 and the electrical connection portion 15 are pressed from the facing direction 8 and the pressure portion 14 and the electrical connection portion 15 are plastically deformed, the connection member 13 is placed on the left side of the electromechanical transducer 2. Connected.

このように、抜き加工された１つの接続部材１３において加圧部１４の折曲げ方向を変更することにより、２種類の接続部材（端部に電気接続部１５が形成され孔３１に加圧部１４が形成された接続部材１３と、端部に加圧部１４が形成され孔３１に電気接続部１５が形成された接続部材の２種類の接続部材）を形成することができる。   In this way, by changing the bending direction of the pressurizing portion 14 in one connection member 13 that has been punched, two types of connecting members (the electrical connecting portion 15 is formed at the end portion and the pressurizing portion is formed in the hole 31). 14, and a connecting member in which the pressurizing portion 14 is formed at the end and the electrical connecting portion 15 is formed in the hole 31).

これにより、２種類の接続部材を予め用意する必要がないため、生産工程の部品在庫が削減し、接続部材の作成型が削減されるので、作成費用の低減を計ることができる。
なお、金属薄板を抜き加工して接続部材１３を形成する際、突起１９を備えない形状、すなわち、略長方形に抜き加工して接続部材１３を形成してもよい。 Thereby, since it is not necessary to prepare two types of connecting members in advance, the parts inventory in the production process is reduced, and the creation type of the connecting members is reduced, so that the production cost can be reduced.
Note that when the connecting member 13 is formed by punching a thin metal plate, the connecting member 13 may be formed by punching into a shape without the protrusions 19, that is, a substantially rectangular shape.

＜第７実施形態＞
図７Ａ〜図７Ｅは、本発明の第７実施形態の電気機械変換素子を説明するための図である。なお、図１または図２Ａ〜図２Ｄに示す構成と同じ構成には同じ符号を付している。また、図７Ａは、他の実施形態の接続部材を示す図である。また、図７Ｂは、図７Ａに示す接続部材が電気機械変換素子に接続された状態を示す図である。また、図７Ｃ〜図７Ｅは、さらに他の実施形態の接続部材を示す図である。 <Seventh embodiment>
7A to 7E are views for explaining an electromechanical transducer according to a seventh embodiment of the present invention. In addition, the same code | symbol is attached | subjected to the same structure as the structure shown in FIG. 1 or FIG. 2A-FIG. 2D. Moreover, FIG. 7A is a figure which shows the connection member of other embodiment. FIG. 7B is a diagram illustrating a state where the connection member illustrated in FIG. 7A is connected to the electromechanical conversion element. Moreover, FIG. 7C-FIG. 7E is a figure which shows the connection member of other embodiment.

図７Ａに示す接続部材３８は、図６Ｆと同様に、加圧部１４と電気接続部１５とが互いに同じ方向に折り曲げられて構成されるものであって、電気接続部１５の表面に突起３９が複数配されている。   The connection member 38 shown in FIG. 7A is configured by bending the pressing portion 14 and the electrical connection portion 15 in the same direction as in FIG. 6F, and has a protrusion 39 on the surface of the electrical connection portion 15. Are arranged in multiple numbers.

そして、図７Ｂに示すように、突起３９と電極層５とが接触するように、電気接続部１５を電極層５に加圧接触させることにより、電極層５と電気接続部１５とが微小面積で接触し、突起３９と電極層５との接触部分に極圧応力が発生する。   Then, as shown in FIG. 7B, the electrode layer 5 and the electric connection portion 15 are brought into a small area by bringing the electric connection portion 15 into pressure contact with the electrode layer 5 so that the protrusion 39 and the electrode layer 5 are in contact with each other. And an extreme pressure stress is generated at the contact portion between the protrusion 39 and the electrode layer 5.

これにより、電気機械変換素子２側から見たときの突起３９の接触部分において、垂直抗力が増大し、電気機械変換素子２が抜け方向４０にずれることを防止することができる。   Thereby, in the contact portion of the protrusion 39 when viewed from the electromechanical conversion element 2 side, the vertical drag increases, and the electromechanical conversion element 2 can be prevented from shifting in the removal direction 40.

また、図７Ｃに示す接続部材４１は、図６Ｆと同様に、加圧部１４と電気接続部１５とが互いに同じ方向に折り曲げられて構成されるものであって、電気接続部１５の表面に凹凸部が設けられている。   In addition, the connection member 41 shown in FIG. 7C is configured such that the pressurizing portion 14 and the electrical connection portion 15 are bent in the same direction as in FIG. 6F, and is formed on the surface of the electrical connection portion 15. Concave and convex portions are provided.

そして、その凹凸部の凸部分と電極層５とが接触するように、電気接続部１５を電極層５に加圧接触させることにより、電極層５と電気接続部１５とを微小面積で接触させることができる。   And the electrode layer 5 and the electrical connection part 15 are made to contact in a micro area by making the electrical connection part 15 press-contact with the electrode layer 5 so that the convex part of the uneven | corrugated | grooved part and the electrode layer 5 may contact. be able to.

これにより、図７Ａに示す接続部材３８と同様に、電気機械変換素子２を接続部材４１から抜け難くすることができる。
また、図７Ｄに示す接続部材４２は、図６Ｆと同様に、加圧部１４と電気接続部１５とが互いに同じ方向に折り曲げられて構成されるものであって、電気接続部１５の表面に先鋭突起４３が設けられている。 Thereby, similarly to the connection member 38 shown in FIG. 7A, it is possible to make it difficult for the electromechanical conversion element 2 to be removed from the connection member 41.
In addition, the connection member 42 shown in FIG. 7D is configured such that the pressurizing portion 14 and the electrical connection portion 15 are bent in the same direction as in FIG. 6F, and is formed on the surface of the electrical connection portion 15. A sharp protrusion 43 is provided.

そして、その先鋭突起４３の先端部が電極層５に噛み込むように、電気接続部１５を電極層５に加圧接触させることにより、電極層５と電気接続部１５とを微小面積で接触させることができる。   Then, the electrical connection portion 15 is brought into pressure contact with the electrode layer 5 so that the tip of the sharp protrusion 43 is engaged with the electrode layer 5, thereby bringing the electrode layer 5 and the electrical connection portion 15 into contact with each other in a minute area. be able to.

これにより、図７Ａに示す接続部材３８と同様に、電気機械変換素子２を接続部材４２から抜け難くすることができる。
なお、先鋭突起４３の先端部を電極層５を介して電気機械変換素子２の中まで進入させることにより、さらに、電気機械変換素子２を接続部材４２から抜け難くすることができる。 Thereby, similarly to the connection member 38 shown in FIG. 7A, it is possible to make it difficult for the electromechanical conversion element 2 to be removed from the connection member 42.
In addition, the electromechanical conversion element 2 can be further prevented from coming out of the connecting member 42 by causing the tip of the sharp protrusion 43 to enter the electromechanical conversion element 2 through the electrode layer 5.

また、図７Ｅに示す接続部材４４は、図６Ｆと同様に、加圧部１４と電気接続部１５とが互いに同じ方向に折り曲げられて構成されるものであって、電気接続部１５の表面が粗く加工されている。   Moreover, the connection member 44 shown to FIG. 7E is comprised by the pressurization part 14 and the electric connection part 15 being bend | folded in the mutually same direction similarly to FIG. 6F, Comprising: The surface of the electric connection part 15 is comprised. Roughly processed.

そして、その粗い加工面が電極層５に接触するように、電気接続部１５を電極層５に加圧接触させることにより、電極層５と電気接続部１５との接触面積を小さくすることができる。   And the contact area of the electrode layer 5 and the electrical connection part 15 can be made small by making the electrical connection part 15 press-contact with the electrode layer 5 so that the rough processed surface may contact the electrode layer 5. .

これにより、図７Ａに示す接続部材３８と同様に、電気機械変換素子２を接続部材４４から抜け難くすることができる。
また、突起３９や先鋭突起４３等を加圧部１４の表面に設け、突起３９や先鋭突起４３等の先端部が電極層５や切欠き部６に接触するように、加圧部１４を電極層５や切欠き部６に加圧接触させても、図７Ａに示す接続部材３８と同様な効果を得ることができる。 Thereby, similarly to the connection member 38 shown in FIG. 7A, it is possible to make it difficult for the electromechanical conversion element 2 to be removed from the connection member 44.
In addition, the protrusion 39 and the sharp protrusion 43 are provided on the surface of the pressure portion 14, and the pressure portion 14 is connected to the electrode layer 5 and the notch portion 6 so that the tips of the protrusion 39 and the sharp protrusion 43 are in contact with the electrode layer 5. Even when the layer 5 and the notch 6 are brought into pressure contact, the same effect as that of the connection member 38 shown in FIG. 7A can be obtained.

また、突起３９や先鋭突起４３等を加圧部１４の表面と電気接続部１５の表面との両方に設けも、図７Ａに示す接続部材３８と同様な効果を得ることができる。
また、図７Ａ等に示すように、電気接続部１５の表面に突起３９等を設ける場合は、電極層５と電気接続部１５との電気的な接続に対する信頼性をより高めることができる。 Further, providing the protrusion 39, the sharp protrusion 43, and the like on both the surface of the pressurizing portion 14 and the surface of the electrical connecting portion 15 can achieve the same effect as that of the connecting member 38 shown in FIG. 7A.
Further, as shown in FIG. 7A and the like, when the protrusion 39 and the like are provided on the surface of the electrical connection portion 15, the reliability of the electrical connection between the electrode layer 5 and the electrical connection portion 15 can be further increased.

＜第８実施形態＞
図８Ａ〜図８Ｄは、本発明の第８実施形態の超音波振動子を説明するための図である。なお、図１または図２Ａ〜図２Ｄに示す構成と同じ構成には同じ符号を付している。また、図８Ａは、他の実施形態の接続部材を示す図である。また、図８Ｂは、図８Ａに示す矢印４５方向から見たときの図である。また、図８Ｃは、電気機械変換素子２と図８Ａに示す接続部材とが接続されている状態において、図８Ａに示す矢印４６方向から見たときの図を示す図である。また、図８Ｃに示す矢印は、電気機械変換素子２にかかる加圧力を表し、矢印の長さは加圧力の大きさを示している。また、図８Ｄは、図８Ｃに示す円形枠の拡大図である。 <Eighth Embodiment>
8A to 8D are views for explaining an ultrasonic transducer according to an eighth embodiment of the present invention. In addition, the same code | symbol is attached | subjected to the same structure as the structure shown in FIG. 1 or FIG. 2A-FIG. 2D. Moreover, FIG. 8A is a figure which shows the connection member of other embodiment. Moreover, FIG. 8B is a figure when it sees from the arrow 45 direction shown to FIG. 8A. Moreover, FIG. 8C is a figure which shows a figure when it sees from the arrow 46 direction shown to FIG. 8A in the state which the electromechanical conversion element 2 and the connection member shown to FIG. 8A are connected. Moreover, the arrow shown to FIG. 8C represents the applied pressure concerning the electromechanical conversion element 2, and the length of the arrow has shown the magnitude | size of the applied pressure. FIG. 8D is an enlarged view of the circular frame shown in FIG. 8C.

図８Ａに示す接続部材４７は、図６Ｆと同様に、加圧部１４と電気接続部１５とが互いに同じ方向に折り曲げられて構成されるものであって、加圧部１４における切欠き部６と接触する面積が電気接続部１５における電極層５と接触する面積よりも小さくなるように、加圧部１４及び電気接続部１５をそれぞれ形成している。   The connection member 47 shown in FIG. 8A is configured by bending the pressurizing unit 14 and the electrical connecting unit 15 in the same direction as in FIG. 6F, and the notch 6 in the pressurizing unit 14. The pressing part 14 and the electrical connection part 15 are formed so that the area in contact with the electrode layer 5 is smaller than the area in contact with the electrode layer 5 in the electrical connection part 15.

すなわち、図８Ｂに示すように、電気機械変換素子２と接続部材４７とが接続される際の接続部材４７の状態において、加圧部１４の外周と電気接続部１５の外周との間に間隔４８が空くように、加圧部１４及び電気接続部１５をそれぞれ形成している。   That is, as shown in FIG. 8B, in the state of the connection member 47 when the electromechanical transducer 2 and the connection member 47 are connected, a gap is provided between the outer periphery of the pressurizing unit 14 and the outer periphery of the electric connection unit 15. The pressurizing unit 14 and the electrical connecting unit 15 are formed so that 48 is open.

これにより、図８Ｃに示すように、加圧部１４と電気接続部１５とが対向しているところにかかる加圧力４９は、ほぼ均一の大きさになり、間隔４８にかかる加圧力４９は、加圧部１４による加圧が無いことにより、電気接続部１５の端に行くに従い徐々に小さくなる。   As a result, as shown in FIG. 8C, the applied pressure 49 applied to the place where the pressurizing unit 14 and the electrical connecting unit 15 face each other is substantially uniform, and the applied pressure 49 applied to the interval 48 is Due to the absence of pressurization by the pressurizing unit 14, the pressure gradually decreases toward the end of the electrical connection unit 15.

また、加圧部１４の面積と電気接続部１５の面積が等しく、加圧部１４と電気接続部１５とが対向する際にそれぞれの端部が互いに一致する場合、加圧部１４と電気接続部１５とにより電気機械変換素子２にかかる加圧力は、加圧部１４と電気接続部１５とが対向しなくなるところで急に小さくなる。そのため、電極層５にかかる応力は、電極層５と電気接続部１５とが接触しているところと接触していないところとで大きな差が生じ、その境目で電極層５がせん断するおそれがある。   Moreover, when the area of the pressurization part 14 and the area of the electrical connection part 15 are equal, and each end part mutually corresponds when the pressurization part 14 and the electrical connection part 15 oppose, electrical connection with the pressurization part 14 is carried out. The pressing force applied to the electromechanical transducer 2 by the portion 15 is suddenly reduced where the pressurizing portion 14 and the electrical connecting portion 15 do not face each other. For this reason, the stress applied to the electrode layer 5 is greatly different between where the electrode layer 5 and the electrical connection portion 15 are in contact with each other, and the electrode layer 5 may be sheared at the boundary. .

これに対して、上述のように、加圧部１４の面積を電気接続部１５の面積よりも小さくする場合では、加圧力４９が加圧部１４の端から電気接続部１５の端に行くに従って徐々に小さくなるので、電極層５にかかる応力も除々に減少し、急激な応力差に起因する電極層５のせん断を防ぐ効果が得られる。   On the other hand, as described above, when the area of the pressurizing unit 14 is made smaller than the area of the electrical connecting unit 15, the pressurizing force 49 goes from the end of the pressurizing unit 14 to the end of the electrical connecting unit 15. Since it is gradually reduced, the stress applied to the electrode layer 5 is gradually reduced, and an effect of preventing shearing of the electrode layer 5 due to a sudden stress difference is obtained.

また、図８Ｄに示すように、加圧部１４の端部にＲ加工を施すと、加圧部１４の端部近傍での応力差を緩和する効果がある。なお、電気接続部１５の端部にＲ加工を施してもよい。これにより、電気接続部１５の端部近傍での応力差を緩和することができる。   Further, as shown in FIG. 8D, when R processing is performed on the end of the pressurizing unit 14, there is an effect of relaxing the stress difference in the vicinity of the end of the pressurizing unit 14. In addition, you may give R process to the edge part of the electrical-connection part 15. FIG. Thereby, the stress difference in the vicinity of the end portion of the electrical connection portion 15 can be relaxed.

＜第９実施形態＞
図９Ａ〜図９Ｄは、本実施形態の第９実施形態の超音波振動子を説明するための図である。なお、図１または図２Ａ〜図２Ｄに示す構成と同じ構成には同じ符号を付している。また、図９Ａは、他の実施形態の接続部材を示す図である。また、図９Ｂは、さらに他の実施形態の接続部材を示す図である。また、図９Ｃは、図９Ａに示す接続部材を上から見た図である。図９Ｄは、さらに他の実施形態の接続部材を示し、その接続部材を上から見た図である。 <Ninth Embodiment>
9A to 9D are views for explaining the ultrasonic transducer according to the ninth embodiment of the present embodiment. In addition, the same code | symbol is attached | subjected to the same structure as the structure shown in FIG. 1 or FIG. 2A-FIG. 2D. Moreover, FIG. 9A is a figure which shows the connection member of other embodiment. Moreover, FIG. 9B is a figure which shows the connection member of further another embodiment. Moreover, FIG. 9C is the figure which looked at the connection member shown to FIG. 9A from the top. FIG. 9D shows a connection member of still another embodiment, and is a view of the connection member as seen from above.

図９Ａに示す接続部材５０は、図６Ｆと同様に、加圧部１４と電気接続部１５とが互いに同じ方向に折り曲げられて構成されるものであって、加圧部１４の中央付近において端部から根元にかけて貫通した溝が入れられ、加圧部１４が加圧部１４Ａ及び加圧部１４Ｂに分かれるように形成されている。   The connection member 50 shown in FIG. 9A is configured by bending the pressurizing unit 14 and the electrical connecting unit 15 in the same direction as in FIG. 6F, and ends near the center of the pressurizing unit 14. A groove penetrating from the base to the base is inserted, and the pressurizing part 14 is formed to be divided into a pressurizing part 14A and a pressurizing part 14B.

これにより、例えば、電気機械変換素子２の切欠き部６に対して、加圧部１４Ａ及び加圧部１４Ｂによる応力をそれぞれ独立にかけることができる。
また、図９Ｂに示す接続部材５１も、図６Ｆと同様に、加圧部１４と電気接続部１５とが互いに同じ方向に折り曲げられて構成されるものであって、加圧部１４が加圧部１４Ａ及び１４Ｂに分かれるように形成されていると共に、電気接続部１５の中央付近において端部から根元にかけて貫通した溝が入れられ、電気接続部１５が電気接続部１５Ａ及び電気接続部１５Ｂに分かれるように形成されている。 Thereby, for example, the stress by the pressurizing part 14 </ b> A and the pressurizing part 14 </ b> B can be applied independently to the notch part 6 of the electromechanical conversion element 2.
In addition, the connecting member 51 shown in FIG. 9B is configured by bending the pressurizing unit 14 and the electrical connecting unit 15 in the same direction as in FIG. It is formed so as to be divided into portions 14A and 14B, and a groove penetrating from the end portion to the base is inserted in the vicinity of the center of the electric connection portion 15, and the electric connection portion 15 is divided into the electric connection portion 15A and the electric connection portion 15B. It is formed as follows.

これにより、例えば、切欠き部６に対して、加圧部１４Ａ及び加圧部１４Ｂによる応力をそれぞれ独立にかけると共に、電極層５に対して、電気接続部１５Ａ及び電気接続部１５Ｂによる応力をそれぞれ独立にかけることができる。   Thereby, for example, the stress by the pressurizing unit 14A and the pressurizing unit 14B is applied to the notch 6 independently, and the stress by the electrical connecting unit 15A and the electrical connecting unit 15B is applied to the electrode layer 5. Each can be applied independently.

このように、溝を入れられた加圧部１４の外周（図９Ｃに示す一点鎖線）や電気接続部１５の外周は、図８Ａに示す加圧部１４の外周や電気接続部１５の外周に比べて、長くすることができる。   As described above, the outer periphery of the grooved pressurizing unit 14 (the one-dot chain line shown in FIG. 9C) and the outer periphery of the electrical connection unit 15 are the same as the outer periphery of the pressurization unit 14 and the outer periphery of the electrical connection unit 15 shown in FIG. In comparison, it can be made longer.

これにより、加圧部１４の外周付近の切欠き部６の変形量や電気接続部１５の外周付近の電極層５の変形量を大きくさせることができ、接続部材５０や接続部材５１を電気機械変換素子２に接続した際の電気機械変換素子２のズレを抑制することができる。   Thereby, the deformation amount of the notch portion 6 near the outer periphery of the pressurizing portion 14 and the deformation amount of the electrode layer 5 near the outer periphery of the electrical connection portion 15 can be increased, and the connection member 50 and the connection member 51 can be connected to the electric machine. The displacement of the electromechanical conversion element 2 when connected to the conversion element 2 can be suppressed.

また、図９Ｂに示すように、加圧部１４及び電気接続部１５にそれぞれ溝を入れる場合では、図８Ａに示すような接続部材４７を複数使用することと同じような効果を得ることができ、電気機械変換素子２と接続部材５１との電気的な接続に対する信頼性を向上させることができる。   Further, as shown in FIG. 9B, when grooves are respectively formed in the pressurizing unit 14 and the electrical connection unit 15, the same effect as using a plurality of connection members 47 as shown in FIG. 8A can be obtained. The reliability of the electrical connection between the electromechanical transducer 2 and the connection member 51 can be improved.

また、接続部材５０や接続部材５１は、加圧により変形する複合圧電体等機械的に柔らかい電気機械変換素子に特に有効である。
なお、加圧部１４の外周や電気接続部材１５の外周をさらに長くする方法として、例えば、図９Ａに示す加圧部１４Ａ及び１４Ｂを、図９Ｄに示す加圧部１４Ｃ及び１４Ｄのように扇形に形成してもよい。 The connection member 50 and the connection member 51 are particularly effective for mechanically soft electromechanical transducers such as composite piezoelectric bodies that are deformed by pressure.
As a method for further extending the outer periphery of the pressurizing unit 14 and the outer periphery of the electrical connecting member 15, for example, the pressurizing units 14A and 14B shown in FIG. 9A are fan-shaped like the pressurizing units 14C and 14D shown in FIG. 9D. You may form in.

これにより、図９Ａに示す加圧部１４に比べて、加圧部１４の外周を長くすることができる。
また、図９Ｂに示すように、孔３１の中央に支柱５２を設けてもよい。 Thereby, the outer periphery of the pressurization part 14 can be lengthened compared with the pressurization part 14 shown to FIG. 9A.
Further, as shown in FIG. 9B, a support column 52 may be provided in the center of the hole 31.

＜第１０実施形態＞
図１０Ａ及び図１０Ｂは、本発明の第１０実施形態の超音波振動子を説明するための図である。なお、図１または図２Ａ〜図２Ｄに示す構成と同じ構成には同じ符号を付している。また、図１０Ａは、他の実施形態の接続部材を示す図である。また、図１０Ｂは、図１０Ａに示すｎ−ｎ断面図を示している。 <Tenth Embodiment>
10A and 10B are views for explaining an ultrasonic transducer according to the tenth embodiment of the present invention. In addition, the same code | symbol is attached | subjected to the same structure as the structure shown in FIG. 1 or FIG. 2A-FIG. 2D. Moreover, FIG. 10A is a figure which shows the connection member of other embodiment. Moreover, FIG. 10B has shown nn sectional drawing shown to FIG. 10A.

図１０Ａに示す接続部材５３は、図６Ｃと同様に、加圧部１４と電気接続部１５とが互いに反対方向に折り曲げられて構成されるものであって、電気接続部１５の中央付近に補助孔５４が設けられている。なお、接続部材５３の表面全体にはＮｉ−Ｃｒ−Ａｕ等のメッキが施されているものとする。   Similar to FIG. 6C, the connection member 53 shown in FIG. 10A is configured by bending the pressurizing portion 14 and the electrical connection portion 15 in opposite directions, and is provided near the center of the electrical connection portion 15. A hole 54 is provided. It is assumed that the entire surface of the connection member 53 is plated with Ni—Cr—Au or the like.

そして、電気機械変換素子２と接続部材５３とを接続した後、図１０Ｂに示すように、補助孔５４に半田５５を溶かし込み、電気機械変換素子２と接続部材５３との電気的な接続を行う。   Then, after connecting the electromechanical transducer 2 and the connection member 53, as shown in FIG. 10B, the solder 55 is melted into the auxiliary hole 54, and the electrical connection between the electromechanical transducer 2 and the connection member 53 is established. Do.

このように、電気接続部１５に設けられる補助孔５４内に半田５５を溶かし込む構成であるので、半田５５が補助孔５４内に溜まり、半田５５の周囲への溢出しを防ぐことができる。   As described above, since the solder 55 is melted in the auxiliary hole 54 provided in the electrical connection portion 15, the solder 55 accumulates in the auxiliary hole 54, and the overflow of the solder 55 to the periphery can be prevented.

これにより、電極層５と電気接続部１５との接続部分の外形が半田５５により変化することがなくなり、半田５５のはみ出し部分を考慮する必要がなくなる。そのため、半田５５のはみ出し部分を考慮して電気機械変換素子２と接続部材５３とを接続する場合に比べて、電気機械変換素子２と接続部材５３との接続部分を小さくすることができる。   As a result, the outer shape of the connection portion between the electrode layer 5 and the electrical connection portion 15 is not changed by the solder 55, and it is not necessary to consider the protruding portion of the solder 55. Therefore, the connection portion between the electromechanical conversion element 2 and the connection member 53 can be made smaller than when the electromechanical conversion element 2 and the connection member 53 are connected in consideration of the protruding portion of the solder 55.

また、半田５５により電極層５と電気接続部１５とを機械的に接続する効果、すなわち、アンカ効果も期待することができる。
また、電極層５と電気接続部１５との電気的な接続に関しては、加圧接触による接続と半田５５による接続の両方を同時に行っているため、電気的な接続に対する信頼性を向上させることができる。 Further, an effect of mechanically connecting the electrode layer 5 and the electrical connection portion 15 by the solder 55, that is, an anchor effect can be expected.
In addition, regarding the electrical connection between the electrode layer 5 and the electrical connection portion 15, both the connection by pressure contact and the connection by the solder 55 are performed at the same time, so that the reliability of the electrical connection can be improved. it can.

なお、補助孔５４には、半田５５に限らず、導電性接着剤等を入れてもよい。
また、加圧部１４に補助孔５４を設け、その補助孔５４に半田５５や導電性接着剤等を入れて、加圧部１４と切欠き部６とを接続してもよい。 The auxiliary hole 54 is not limited to the solder 55 and may be filled with a conductive adhesive or the like.
Alternatively, the pressurizing unit 14 may be provided with an auxiliary hole 54, and solder 55 or a conductive adhesive may be inserted into the auxiliary hole 54 to connect the pressurizing unit 14 and the notch 6.

これにより、加圧部１４と切欠き部６との機械的な接続に対する信頼性を加圧接触のみで接続するものに比べて向上させることができる。
＜第１１実施形態＞
図１１Ａ及び図１１Ｂは、本発明の第１１実施形態の超音波振動子を説明するための図である。なお、図１または図２Ａ〜図２Ｄに示す構成と同じ構成には同じ符号を付している。また、図１１Ａは、超音波振動子の一部が拡大されたものを示す図である。また、図１１Ｂは、図１１Ａに示す超音波振動子の中央部の断面図を示している。 Thereby, the reliability with respect to the mechanical connection of the pressurization part 14 and the notch part 6 can be improved compared with what connects only by a pressurization contact.
<Eleventh embodiment>
11A and 11B are diagrams for explaining an ultrasonic transducer according to an eleventh embodiment of the present invention. In addition, the same code | symbol is attached | subjected to the same structure as the structure shown in FIG. 1 or FIG. 2A-FIG. 2D. FIG. 11A is a diagram showing an enlarged part of the ultrasonic transducer. FIG. 11B shows a cross-sectional view of the central portion of the ultrasonic transducer shown in FIG. 11A.

図１１Ａ及び図１１Ｂに示す超音波振動子５６は、電極層５と電気接続部１５との隙間が接着剤等の有機物樹脂で構成される保護部材５７により覆われている。
このように、電極層５と電気接続部１５との隙間が保護部材５７により覆われているので、電極層５と電気接続部１５との境界部分が保護され、電極層５と電気接続部１５との隙間にゴミ等の異物が進入することを防止することができる。 In the ultrasonic transducer 56 shown in FIGS. 11A and 11B, the gap between the electrode layer 5 and the electrical connection portion 15 is covered with a protective member 57 made of an organic resin such as an adhesive.
Thus, since the gap between the electrode layer 5 and the electrical connection portion 15 is covered with the protective member 57, the boundary portion between the electrode layer 5 and the electrical connection portion 15 is protected, and the electrode layer 5 and the electrical connection portion 15 are protected. It is possible to prevent foreign matter such as dust from entering the gap.

これにより、電極層５と電気接続部１５との接触状態を安定化させることができるので、電気機械変換素子２と接続部材１３との電気的な接続に対する信頼性を向上させることができる。   Thereby, since the contact state of the electrode layer 5 and the electrical connection part 15 can be stabilized, the reliability with respect to the electrical connection of the electromechanical conversion element 2 and the connection member 13 can be improved.

また、保護部材５７により電極層５と電気接続部１５との接続強度を向上させることができる。
なお、加圧部１４と切欠き部６との隙間を保護部材５７により覆うようにしてもよい。 Further, the connection strength between the electrode layer 5 and the electrical connection portion 15 can be improved by the protective member 57.
Note that the protective member 57 may cover the gap between the pressure unit 14 and the notch 6.

これにより、加圧部１４と切欠き部６との接触状態を安定化させることができる。
＜第１２実施形態＞
図１２は、本発明の第１２実施形態の超音波振動子を説明するための図である。なお、図１または図２Ａ〜図２Ｄに示す構成と同じ構成には同じ符号を付している。 Thereby, the contact state of the pressurization part 14 and the notch part 6 can be stabilized.
<Twelfth embodiment>
FIG. 12 is a diagram for explaining an ultrasonic transducer according to a twelfth embodiment of the present invention. In addition, the same code | symbol is attached | subjected to the same structure as the structure shown in FIG. 1 or FIG. 2A-FIG. 2D.

図１２に示すように、超音波振動子５８は、電気機械変換素子２の上下面に設けられている電極層５にそれぞれ接続部材１３が接続され、電気機械変換素子２の音波放射面に音響整合部材３が固定されていると共に、反対面にバッキング材４が接着固定されている。   As shown in FIG. 12, in the ultrasonic transducer 58, the connection members 13 are connected to the electrode layers 5 provided on the upper and lower surfaces of the electromechanical transducer 2, and the acoustic transducer 58 is acoustically connected to the sound wave emitting surface of the electromechanical transducer 2. The alignment member 3 is fixed, and the backing material 4 is bonded and fixed to the opposite surface.

また、電気機械変換素子２、音響整合部材３、バッキング材４、電極層５、及び接続部材１３が金属製のハウジング５９の内部に固定され、音響整合部材３側の電極層５に接続される接続部材１３のリード部１６がハウジング５９の外側に引き出され、そのリード部１６がハウジング５９の外側側面に半田６０により電気的に接続されている。   In addition, the electromechanical conversion element 2, the acoustic matching member 3, the backing material 4, the electrode layer 5, and the connection member 13 are fixed inside the metal housing 59 and connected to the electrode layer 5 on the acoustic matching member 3 side. The lead portion 16 of the connecting member 13 is pulled out to the outside of the housing 59, and the lead portion 16 is electrically connected to the outer side surface of the housing 59 by solder 60.

また、リード線１１は、ＧＮＤ線６１と電気機械変換素子２に超音波信号を伝える信号線６２とを備え、ＧＮＤ線６１は、半田６３により直接ハウジング５９の外側側面に電気的に接続されている。また、信号線６２は、ハウジング５９の側面に設けられる側面穴６４を通って、ハウジング５９の内部でバッキング材４側の電極層５に接続される接続部材１３のリード部１６に半田６５により電気的に接続されている。   The lead wire 11 includes a GND wire 61 and a signal wire 62 that transmits an ultrasonic signal to the electromechanical transducer 2. The GND wire 61 is electrically connected to the outer side surface of the housing 59 directly by the solder 63. Yes. The signal line 62 passes through a side hole 64 provided on the side surface of the housing 59 and is electrically connected to the lead portion 16 of the connection member 13 connected to the electrode layer 5 on the backing material 4 side by the solder 65 inside the housing 59. Connected.

また、バッキング材４側の電極層５に接続される接続部材１３とハウジング５９とを絶縁させるためにリング状のカラー部材６６がハウジング５９の内周に沿って設けられている。   A ring-shaped collar member 66 is provided along the inner periphery of the housing 59 in order to insulate the connection member 13 connected to the electrode layer 5 on the backing material 4 side from the housing 59.

また、信号線６２に接続される接続部材１３のリード部１６は、バッキング材４とカラー部材６６との間のスペース６７を通って、バッキング材４の裏面に配されている。
また、ハウジング５９とカラー部材６６とは、接着剤等により接続されている。 Further, the lead portion 16 of the connecting member 13 connected to the signal line 62 is disposed on the back surface of the backing material 4 through a space 67 between the backing material 4 and the collar member 66.
The housing 59 and the collar member 66 are connected by an adhesive or the like.

また、接続部材１３とリード線１１との接続が終了すると、必要部位、例えば、電気機械変換素子２、音響整合部材３、バッキング材４、電極層５、接続部材１３、信号線６２、及びカラー部材６６等を樹脂６８により包埋して、ハウジング５９の裏面にフタ６９を配し、ハウジング５９の下方の外周端部とフタ６９の外周端部とを接着材等で固定する。   Further, when the connection between the connection member 13 and the lead wire 11 is completed, necessary portions, for example, the electromechanical conversion element 2, the acoustic matching member 3, the backing material 4, the electrode layer 5, the connection member 13, the signal line 62, and the collar. The member 66 or the like is embedded in the resin 68, a lid 69 is disposed on the back surface of the housing 59, and the outer peripheral end portion below the housing 59 and the outer peripheral end portion of the lid 69 are fixed with an adhesive or the like.

このように、ハウジング５９を介して、接続部材１３とＧＮＤ線６１とを電気的に接続しているので、接続部材１３とＧＮＤ線６１との接続位置に対する自由度が上がり、配線作業が行い易いところで接続部材１３とハウジング５９とを接続すると共に、配線作業が行う易いところでハウジング５９とＧＮＤ線６１とを接続することができる。これにより、配線作業を簡略化することができる。   Thus, since the connection member 13 and the GND line 61 are electrically connected via the housing 59, the degree of freedom with respect to the connection position between the connection member 13 and the GND line 61 is increased, and wiring work is easy. By the way, while connecting the connection member 13 and the housing 59, it is possible to connect the housing 59 and the GND wire 61 where the wiring work is easily performed. Thereby, wiring work can be simplified.

また、ハウジング５９を介して、接続部材１３とＧＮＤ線６１とを電気的に接続しているので、接続部材１３とＧＮＤ線６１との電気的な接続に対する信頼性が向上する。
また、ハウジング５９を介して、接続部材１３とＧＮＤ線６１とを電気的に接続しているので、ハウジング５９をＧＮＤ線６１と同電位にする作業を省くことができるので、配線作業における工数を低減することができる。 Further, since the connection member 13 and the GND line 61 are electrically connected via the housing 59, the reliability of the electrical connection between the connection member 13 and the GND line 61 is improved.
Further, since the connecting member 13 and the GND line 61 are electrically connected via the housing 59, the work of setting the housing 59 to the same potential as that of the GND line 61 can be omitted. Can be reduced.

＜第１３実施形態＞
図１３Ａ〜図１３Ｃは、本発明の第１３実施形態の超音波振動子を説明するための図である。なお、図１または図２Ａ〜図２Ｄに示す構成と同じ構成には同じ符号を付している。また、図１３Ａは、複合圧電素子の断面を示す図である。また、図１３Ｂは、図１３Ａに示す複合圧電素子と接続部材とが接続された状態を示す図である。また、図１３Ｃは、図１３Ａに示す複合圧電素子を使用した超音波振動子を示す図である。 <13th Embodiment>
13A to 13C are diagrams for explaining an ultrasonic transducer according to a thirteenth embodiment of the present invention. In addition, the same code | symbol is attached | subjected to the same structure as the structure shown in FIG. 1 or FIG. 2A-FIG. 2D. FIG. 13A is a diagram showing a cross section of the composite piezoelectric element. FIG. 13B is a diagram showing a state where the composite piezoelectric element shown in FIG. 13A and the connection member are connected. FIG. 13C is a diagram showing an ultrasonic transducer using the composite piezoelectric element shown in FIG. 13A.

図１３Ａに示す複合圧電素子７０は、複数の柱状セラミック圧電体７１がそれぞれ樹脂７２で包まれて形成される板状部材の両面に電極層５が配されて構成されている。
また、図１３Ａに示す複合圧電素子７０は、樹脂７２と電極層５との合計の厚さが、柱状セラミック圧電体７１と電極層５との合計の厚さよりも厚くなるように形成されている。 A composite piezoelectric element 70 shown in FIG. 13A is configured by arranging electrode layers 5 on both surfaces of a plate-like member formed by wrapping a plurality of columnar ceramic piezoelectric bodies 71 with a resin 72, respectively.
13A is formed so that the total thickness of the resin 72 and the electrode layer 5 is larger than the total thickness of the columnar ceramic piezoelectric body 71 and the electrode layer 5. The composite piezoelectric element 70 shown in FIG. .

また、図１３Ａに示す複合圧電素子７０の上下面には、それぞれ切欠き部６が設けられている。
図１３Ｂに示すように、接続部材１３の加圧部１４と電気接続部１５とをそれぞれ塑性変形させ、加圧部１４が切欠き部６を加圧接触し、電気接続部１５が電極層５を加圧接触することにより、樹脂７２が対向方向８に加圧変形し、複合圧電素子７０と接続部材１３とが電気的に接続される。 Moreover, the notch part 6 is each provided in the upper and lower surfaces of the composite piezoelectric element 70 shown to FIG. 13A.
As shown in FIG. 13B, the pressurizing portion 14 and the electrical connecting portion 15 of the connecting member 13 are plastically deformed, the pressurizing portion 14 pressurizes and contacts the notch portion 6, and the electrical connecting portion 15 is the electrode layer 5. Is pressed and deformed in the facing direction 8, and the composite piezoelectric element 70 and the connection member 13 are electrically connected.

そして、複合圧電素子７０と接続部材１３とを接続した後、図１３Ｃに示すように、複合圧電素子７０に音響整合部材３とバッキング材４とを接着材等で固定し、超音波振動子を作成する。   Then, after connecting the composite piezoelectric element 70 and the connecting member 13, as shown in FIG. 13C, the acoustic matching member 3 and the backing material 4 are fixed to the composite piezoelectric element 70 with an adhesive or the like, and the ultrasonic vibrator is attached. create.

また、接続部材１３の塑性変形は、柱状セラミック圧電体７１に直接対向方向８の加圧力がかかるまで行われる。初期状態（複合圧電素子７０と接続部材１３とが接続されていない状態）では、樹脂７２の両側の電極層５が柱状セラミック圧電体７１の両側の電極層５よりも突出している。そして、その突出部分が接続部材１３により挟み込まれると、樹脂７２が圧縮変形し、樹脂７２内に圧縮の残留応力が残る。   Further, the plastic deformation of the connecting member 13 is performed until the pressure in the facing direction 8 is directly applied to the columnar ceramic piezoelectric body 71. In an initial state (a state where the composite piezoelectric element 70 and the connection member 13 are not connected), the electrode layers 5 on both sides of the resin 72 protrude beyond the electrode layers 5 on both sides of the columnar ceramic piezoelectric body 71. When the protruding portion is sandwiched between the connecting members 13, the resin 72 is compressed and deformed, and a compressive residual stress remains in the resin 72.

このように、複合圧電素子７０と接続部材１３とを接続すると、樹脂７２内に圧縮の残留応力が残るので、その残留応力により複合圧電素子７０の電極層５と接続部材１３の電気接続部１５との接続強度が大きくなり、常に電極層５と電気接続部１５とを接触させることができる。   As described above, when the composite piezoelectric element 70 and the connection member 13 are connected, a compressive residual stress remains in the resin 72, and therefore the electrode layer 5 of the composite piezoelectric element 70 and the electrical connection portion 15 of the connection member 13 are caused by the residual stress. And the electrode layer 5 and the electrical connection portion 15 can always be brought into contact with each other.

これにより、電極層５と電気接続部１５との電気的な接続に対する信頼性を向上させることができる。
＜第１４実施形態＞
次に、本発明の第１４実施形態の超音波振動子について説明する。 Thereby, the reliability with respect to the electrical connection between the electrode layer 5 and the electrical connection portion 15 can be improved.
<Fourteenth embodiment>
Next, an ultrasonic transducer according to a fourteenth embodiment of the present invention will be described.

第１４実施形態の超音波振動子の特徴とする点は、接続部材を形状記憶合金で作成する点である。
例えば、形状記憶合金で作成された接続部材を加熱して接続部材自体の温度を上げて、加圧部と電気接続部とが互いに離れている状態（以下、開状態という）の形状を記憶させ、次に、接続部材自体の温度を常温にして、加圧部と電気接続部とが互いに近づいている状態（以下、閉状態という）の形状を記憶させておく場合を考える。 A feature of the ultrasonic transducer of the fourteenth embodiment is that the connecting member is made of a shape memory alloy.
For example, by heating a connecting member made of a shape memory alloy to raise the temperature of the connecting member itself, the shape in a state where the pressurizing portion and the electrical connecting portion are separated from each other (hereinafter referred to as an open state) is stored. Next, let us consider a case where the temperature of the connecting member itself is set to room temperature and the shape of the state where the pressurizing unit and the electrical connecting unit are close to each other (hereinafter referred to as a closed state) is stored.

そして、このように形状を記録させた接続部材と電気機械変換素子とを接続させる場合は、まず、その接続部材を加熱して開状態にし、次に、開状態の接続部材の加圧部と電気接続部との間に電気機械変換素子を配置する。そして、接続部材自体の温度を常温に戻し、接続部材を閉状態にし、電気機械変換素子と接続部材とを電気的及び機械的に接続する。なお、接続部材の加熱方法は、例えば、電気炉や赤外線等、特に限定されない。   And when connecting the connection member and the electromechanical conversion element which recorded the shape in this way, first, the connection member is heated to an open state, and then the pressure member of the connection member in the open state An electromechanical transducer is disposed between the electrical connection portion. Then, the temperature of the connection member itself is returned to room temperature, the connection member is closed, and the electromechanical transducer and the connection member are electrically and mechanically connected. In addition, the heating method of a connection member is not specifically limited, for example, an electric furnace, infrared rays, etc.

このように、形状記憶合金で作成された接続部材を使用することにより、ジグ等を用いることなく電気機械変換素子と接続部材とを接続させることができる。
これにより、電気機械変換素子と接続部材とを接続するための外力の印加を非接触で行うことができるので、電気機械変換素子や接続部材とジグ等との接触による汚染を防止することができる。 Thus, by using a connection member made of a shape memory alloy, the electromechanical transducer and the connection member can be connected without using a jig or the like.
Thereby, since application of external force for connecting the electromechanical conversion element and the connection member can be performed in a non-contact manner, contamination due to contact between the electromechanical conversion element or the connection member and the jig or the like can be prevented. .

また、電気機械変換素子と接続部材との接続を接続部材における温度コントロールのみで行うことができるので、特別な加圧装置を必要とせず簡単に電気機械変換素子と接続部材との接続を実施することができる。   In addition, since the connection between the electromechanical conversion element and the connection member can be performed only by temperature control in the connection member, the connection between the electromechanical conversion element and the connection member can be easily performed without requiring a special pressurizing device. be able to.

＜第１５実施形態＞
図１４Ａ〜図１４Ｄは、本発明の第１５実施形態の超音波振動子を説明するための図である。なお、図１または図２Ａ〜図２Ｄに示す構成と同じ構成には同じ符号を付している。また、図１４Ａは、他の実施形態の接続部材を示す図である。また、図１４Ｂは、図１４Ａに示す接続部材が電気機械変換素子に接続された状態を示す図である。また、図１４Ｃは、さらに他の実施形態の接続部材を示す図である。また、図１４Ｄは、図１４Ｃに示す接続部材が電気機械変換素子に接続された状態を示す図である。 <Fifteenth embodiment>
14A to 14D are views for explaining an ultrasonic transducer according to a fifteenth embodiment of the present invention. In addition, the same code | symbol is attached | subjected to the same structure as the structure shown in FIG. 1 or FIG. 2A-FIG. 2D. Moreover, FIG. 14A is a figure which shows the connection member of other embodiment. FIG. 14B is a diagram illustrating a state where the connection member illustrated in FIG. 14A is connected to the electromechanical transducer. Moreover, FIG. 14C is a figure which shows the connection member of further another embodiment. FIG. 14D is a diagram illustrating a state in which the connection member illustrated in FIG. 14C is connected to the electromechanical conversion element.

図１４Ａに示す接続部材７３は、加圧部１４の先端に「へ」の字状の折り返し部７４が配されている。この折り返し部７４は、通常（電気機械変換素子２と接続部材７３とが接続されていないとき）、外側に向かう弾性力が働いている。そのため、折り返し部７４は、通常、電気接続部１５を加圧している。   In the connection member 73 shown in FIG. 14A, a “f” -shaped folded portion 74 is disposed at the tip of the pressurizing portion 14. The folded portion 74 normally has an elastic force acting outward (when the electromechanical conversion element 2 and the connection member 73 are not connected). Therefore, the folded portion 74 normally pressurizes the electrical connection portion 15.

そして、図１４Ｂに示すように、折り返し部７４と電気接続部１５との間に電気機械変換素子２を押し込むと、加圧部１４及び折り返し部７４が弾性変形し、電気機械変換素子２が電気接続部１５を押圧する。   Then, as shown in FIG. 14B, when the electromechanical transducer 2 is pushed between the folded portion 74 and the electrical connecting portion 15, the pressurizing portion 14 and the folded portion 74 are elastically deformed, and the electromechanical transducer 2 is electrically connected. The connection part 15 is pressed.

この電気機械変換素子２が電気接続部１５を押圧する際の押圧力により、電極層５と電気接続部１５とを電気的に接続することができる。
また、図１４Ｃに示す接続部材７５は、加圧部１４と電気接続部１５が共に「へ」の字状に加工されている。また、接続部材７５は、通常（電気機械変換素子２と接続部材７５とが接続されていないとき）、加圧部１４と電気接続部１５とのそれぞれの形状が互いに線対称で等しくなっている。 The electrode layer 5 and the electrical connection portion 15 can be electrically connected by a pressing force when the electromechanical conversion element 2 presses the electrical connection portion 15.
Further, in the connecting member 75 shown in FIG. 14C, the pressurizing unit 14 and the electrical connecting unit 15 are both processed into a “he” shape. In addition, the connecting member 75 is normally (when the electromechanical conversion element 2 and the connecting member 75 are not connected), and the shape of the pressurizing unit 14 and the electric connecting unit 15 is line-symmetric and equal to each other. .

そして、図１４Ｄに示すように、加圧部１４と電気接続部１５との間に電気機械変換素子２を押し込むと、加圧部１４及び電気接続部１５がそれぞれ弾性変形する。
これにより、加圧部１４が切欠き部６を押圧すると共に、電気接続部１５が電極層５を押圧するので、その押圧力により電極層５と電気接続部１５とを電気的に接続することができる。 Then, as shown in FIG. 14D, when the electromechanical transducer 2 is pushed between the pressurizing unit 14 and the electrical connection unit 15, the pressurization unit 14 and the electrical connection unit 15 are elastically deformed.
Thereby, while the pressurization part 14 presses the notch part 6 and the electrical connection part 15 presses the electrode layer 5, the electrode layer 5 and the electrical connection part 15 are electrically connected by the pressing force. Can do.

このように、接続部材７３自体や接続部材７５自体が、弾性変形することにより電極層５と電気接続部１５とが電気的に接続されるので、従来のように加圧のための装置が不要となる。   As described above, since the electrode layer 5 and the electrical connection portion 15 are electrically connected by the elastic deformation of the connection member 73 itself or the connection member 75 itself, an apparatus for pressurization as in the prior art is unnecessary. It becomes.

また、電気機械変換素子２と接続部材７３または７５とを接続した状態でその接続部材７３または７５の弾性変形により、常に、加圧力が接続部材７３または７５から電気機械変換素子２に加わるため、安定した電気的な接続状態を保つことができ、接続作業の簡単化と電気的な接続に対する信頼性の向上を図ることができる。   In addition, since the electromechanical conversion element 2 and the connection member 73 or 75 are connected to each other due to elastic deformation of the connection member 73 or 75, pressure is always applied to the electromechanical conversion element 2 from the connection member 73 or 75. A stable electrical connection state can be maintained, the connection work can be simplified, and the reliability of the electrical connection can be improved.

＜第１６実施形態＞
図１５Ａ〜図１５Ｄは、上述した実施形態の超音波振動子の製造方法を説明するための図である。なお、図１または図２Ａ〜図２Ｄに示す構成と同じ構成には同じ符号を付している。また、図１５Ａ〜図１５Ｄは、第２実施形態における電気機械変換素子２と接続部材１３（突起１９が無い状態のもの）との組み立て工程を示す図である。 <Sixteenth Embodiment>
15A to 15D are views for explaining a method of manufacturing the ultrasonic transducer according to the embodiment described above. In addition, the same code | symbol is attached | subjected to the same structure as the structure shown in FIG. 1 or FIG. 2A-FIG. 2D. 15A to 15D are diagrams illustrating an assembly process of the electromechanical transducer 2 and the connection member 13 (without the protrusion 19) in the second embodiment.

まず、図１５Ａに示すように、帯状の金属薄板７６（例えば、厚さ０．１ｍｍ）を抜き加工（プレス）により接続部材１３と電気機械変換素子２を置くための素子載置部７７とを作製する。なお、接続部材１３、素子載置部７７、接続部材１３の順番に並んだ３つの部材を１セットし、その３つの部材が順次形成されていくものとする。また、接続部材１３と素子載置部７７は、それぞれ結合部７８により金属薄板７６とつながっているものとする。   First, as shown in FIG. 15A, a strip-shaped metal thin plate 76 (for example, a thickness of 0.1 mm) is punched (pressed) to form a connection member 13 and an element mounting portion 77 for placing the electromechanical transducer 2. Make it. It is assumed that three members arranged in the order of the connecting member 13, the element mounting portion 77, and the connecting member 13 are set as one set, and the three members are sequentially formed. Further, it is assumed that the connection member 13 and the element mounting portion 77 are connected to the metal thin plate 76 by a coupling portion 78, respectively.

次に、図１５Ｂに示すように、各加圧部１４をそれぞれ垂直に折り曲げ、電気機械変換素子２の切欠き部６が一方の接続部材１３の加圧部１４と合うように、反対面の切欠き部６が他方の接続部材１３の電気接続部１５と合うように、自動で電気機械変換素子２を素子載置部７７上に載置する。   Next, as shown in FIG. 15B, each pressing portion 14 is bent vertically, and the notch portion 6 of the electromechanical transducer 2 is aligned with the pressing portion 14 of one connecting member 13. The electromechanical conversion element 2 is automatically placed on the element placement portion 77 so that the notch portion 6 is aligned with the electrical connection portion 15 of the other connection member 13.

次に、図１５Ｃに示すように、各加圧部１４を図示しない折曲げ手段により対向方向８に折り曲げ、電気機械変換素子２の電極５と上記一方の接続部材１３の電気接続部１５とを加圧接触させ、電気機械変換素子２の電極５と上記他方の接続部材１３の加圧部１４とを加圧接触させることにより、電気機械変換素子２と接続部材１３とを接続する。   Next, as shown in FIG. 15C, each pressing portion 14 is bent in the facing direction 8 by a bending means (not shown), and the electrode 5 of the electromechanical transducer 2 and the electric connecting portion 15 of the one connecting member 13 are connected. The electromechanical conversion element 2 and the connecting member 13 are connected by pressurizing and contacting the electrode 5 of the electromechanical conversion element 2 and the pressurizing portion 14 of the other connecting member 13.

そして、図示しないパンチ手段により結合部７８を切り落とし、図１５Ｄに示すように、電気機械変換素子２と接続部材１３とが組み立てられる。
なお、図１５Ａ〜図１５Ｄは、第２実施形態における電気機械変換素子２と接続部材１３との組み立て工程を示す図であるが、図１５Ａ〜図１５Ｄに示す各組み立て工程を上述した他の実施形態における電気機械変換素子と接続部材との組み立て工程に適用することもできる。例えば、図１５Ｂや図１５Ｃにおいて、一方の接続部材１３の加圧部１４の折り曲げ方向を変えることにより、第６実施形態における電気機械変換素子２と接続部材１３との組み立て工程に適用することができる。 And the coupling | bond part 78 is cut off by the punch means which is not shown in figure, and as shown to FIG. 15D, the electromechanical conversion element 2 and the connection member 13 are assembled.
15A to 15D are diagrams showing the assembly process of the electromechanical transducer 2 and the connection member 13 in the second embodiment, but other implementations in which each assembly process shown in FIGS. 15A to 15D is described above. It can also be applied to the assembly process of the electromechanical conversion element and the connecting member in the form. For example, in FIG. 15B and FIG. 15C, it is possible to apply to the assembly process of the electromechanical conversion element 2 and the connection member 13 in the sixth embodiment by changing the bending direction of the pressure part 14 of one connection member 13. it can.

このように、抜き加工により電気機械変換素子と接続部材との組み立てを行うことができるので、超音波振動子を量産させることができ、安価で品質の安定した超音波振動子を作製することができる。   As described above, since the electromechanical transducer and the connection member can be assembled by punching, the ultrasonic vibrator can be mass-produced, and an inexpensive and stable quality ultrasonic vibrator can be manufactured. it can.

上記実施形態では、抜き加工による組み立て方法を示したが、同様の効果が得られる、エッチング、レーザ加工等の加工方法を用いても、同様に、超音波振動子を量産させることができ、安価で品質の安定した超音波振動子を作製することができる。   In the above embodiment, the assembling method by the punching process is shown. However, the ultrasonic vibrator can be mass-produced similarly and inexpensively using a processing method such as etching or laser processing that can obtain the same effect. Can produce an ultrasonic transducer with stable quality.

本発明の実施形態の超音波振動子を説明するための図である。It is a figure for demonstrating the ultrasonic transducer | vibrator of embodiment of this invention. 他の実施形態の超音波振動子全体を示す図である。It is a figure which shows the whole ultrasonic transducer | vibrator of other embodiment. 図２Ａに示す超音波振動子に接続される接続部材単体を示す図である。It is a figure which shows the connection member single-piece | unit connected to the ultrasonic transducer | vibrator shown to FIG. 2A. 図２Ｂに示す接続部材が折り曲げ加工された状態を示す図である。It is a figure which shows the state by which the connection member shown to FIG. 2B was bend | folded. 図２Ｃに示す接続部材が電気機械変換素子に接続された状態を示す図である。It is a figure which shows the state by which the connection member shown to FIG. 2C was connected to the electromechanical conversion element. 他の実施形態の超音波振動子を説明するための図である。It is a figure for demonstrating the ultrasonic transducer | vibrator of other embodiment. 他の実施形態の超音波振動子全体を示す図である。It is a figure which shows the whole ultrasonic transducer | vibrator of other embodiment. 電気機械変換素子と接続部材とが接続される前において図４Ａに示す矢印ａ方向から見た図である。It is the figure seen from the arrow a direction shown to FIG. 4A before an electromechanical conversion element and a connection member are connected. 図４Ａに示す矢印ａ方向から見た図である。It is the figure seen from the arrow a direction shown to FIG. 4A. 接続部材単体を示す図である。It is a figure which shows a connection member single-piece | unit. 電気機械変換素子と接続部材とが接続される前において接続部材が折り曲げられた状態を示す図である。It is a figure which shows the state by which the connection member was bent before the electromechanical conversion element and the connection member were connected. 電気機械変換素子と接続部材とが接続された状態を示す図である。It is a figure which shows the state by which the electromechanical conversion element and the connection member were connected. 図５Ａに示す接続部材のｍ−ｍ断面図を示している。FIG. 5B is a sectional view of the connecting member shown in FIG. 他の実施形態の超音波振動子全体を示す図である。It is a figure which shows the whole ultrasonic transducer | vibrator of other embodiment. ハウジング単体の斜視図を示している。The perspective view of the housing single-piece | unit is shown. 他の実施形態の超音波振動子全体を示す図である。It is a figure which shows the whole ultrasonic transducer | vibrator of other embodiment. 接続部材単体を示す図である。It is a figure which shows a connection member single-piece | unit. 図６Ｂに示す接続部材の加圧部と電気接続部とが互いに反対方向に曲げられたときの状態を示す図である。It is a figure which shows a state when the pressurization part and electrical connection part of a connection member which are shown to FIG. 6B are bent in the mutually opposite direction. 図６Ｃに示す接続部材が図６Ａに示す電気機械変換素子の右側に接続された状態を示す図である。6C is a diagram illustrating a state in which the connection member illustrated in FIG. 6C is connected to the right side of the electromechanical transducer illustrated in FIG. 6A. 図６Ｂに示す接続部材の加圧部と電気接続部とが互いに同じ方向に曲げられたときの状態を示す図である。It is a figure which shows a state when the pressurization part and electrical connection part of a connection member which are shown to FIG. 6B are mutually bent in the same direction. 図６Ｅに示す接続部材の加圧部が電気接続部側にさらに曲げられたときの状態を示す図である。It is a figure which shows a state when the pressurization part of the connection member shown to FIG. 6E is further bent to the electrical connection part side. 図６Ｆに示す接続部材が図６Ａに示す電気機械変換素子の左側に接続された状態を示す図である。FIG. 6F is a diagram showing a state where the connection member shown in FIG. 6F is connected to the left side of the electromechanical transducer shown in FIG. 6A. 他の実施形態の接続部材を示す図である。It is a figure which shows the connection member of other embodiment. 図７Ａに示す接続部材が電気機械変換素子に接続された状態を示す図である。It is a figure which shows the state by which the connection member shown to FIG. 7A was connected to the electromechanical conversion element. 他の実施形態の接続部材を示す図である。It is a figure which shows the connection member of other embodiment. 他の実施形態の接続部材を示す図である。It is a figure which shows the connection member of other embodiment. 他の実施形態の接続部材を示す図である。It is a figure which shows the connection member of other embodiment. 他の実施形態の接続部材を示す図である。It is a figure which shows the connection member of other embodiment. 図８Ａに示す矢印４５方向から見たときの図である。It is a figure when it sees from the arrow 45 direction shown to FIG. 8A. 電気機械変換素子２と図８Ａに示す接続部材とが接続されている状態において、図８Ａに示す矢印４６方向から見たときの図を示す図である。It is a figure which shows a figure when it sees from the arrow 46 direction shown to FIG. 8A in the state which the electromechanical conversion element 2 and the connection member shown to FIG. 8A are connected. 図８Ｃに示す円形枠の拡大図である。It is an enlarged view of the circular frame shown in FIG. 8C. 他の実施形態の接続部材を示す図である。It is a figure which shows the connection member of other embodiment. さらに他の実施形態の接続部材を示す図である。It is a figure which shows the connection member of other embodiment. 図９Ａに示す接続部材を上から見た図である。It is the figure which looked at the connection member shown to FIG. 9A from the top. さらに他の実施形態の接続部材を示し、その接続部材を上から見た図である。Furthermore, the connection member of other embodiment is shown and it is the figure which looked at the connection member from the top. 他の実施形態の接続部材を示す図である。It is a figure which shows the connection member of other embodiment. 図１０Ａに示すｎ−ｎ断面図を示している。FIG. 10B is a sectional view taken along line nn shown in FIG. 10A. 超音波振動子の一部が拡大されたものを示す図である。It is a figure which shows what expanded a part of ultrasonic transducer | vibrator. 図１１Ａに示す超音波振動子の中央部の断面図を示している。FIG. 11B is a cross-sectional view of the central portion of the ultrasonic transducer shown in FIG. 11A. 他の実施形態の超音波振動子を説明するための図である。It is a figure for demonstrating the ultrasonic transducer | vibrator of other embodiment. 複合圧電素子の断面を示す図である。It is a figure which shows the cross section of a composite piezoelectric element. 図１３Ａに示す複合圧電素子と接続部材とが接続された状態を示す図である。It is a figure which shows the state by which the composite piezoelectric element shown to FIG. 13A and the connection member were connected. 図１３Ａに示す複合圧電素子を使用した超音波振動子を示す図である。It is a figure which shows the ultrasonic transducer | vibrator using the composite piezoelectric element shown to FIG. 13A. 他の実施形態の接続部材を示す図である。It is a figure which shows the connection member of other embodiment. 図１４Ａに示す接続部材が電気機械変換素子に接続された状態を示す図である。It is a figure which shows the state by which the connection member shown to FIG. 14A was connected to the electromechanical conversion element. さらに他の実施形態の接続部材を示す図である。It is a figure which shows the connection member of other embodiment. 図１４Ｃに示す接続部材が電気機械変換素子に接続された状態を示す図である。It is a figure which shows the state by which the connection member shown to FIG. 14C was connected to the electromechanical conversion element. 超音波振動子の製造方法を説明するための図である。It is a figure for demonstrating the manufacturing method of an ultrasonic transducer | vibrator. 超音波振動子の製造方法を説明するための図である。It is a figure for demonstrating the manufacturing method of an ultrasonic transducer | vibrator. 超音波振動子の製造方法を説明するための図である。It is a figure for demonstrating the manufacturing method of an ultrasonic transducer | vibrator. 超音波振動子の製造方法を説明するための図である。It is a figure for demonstrating the manufacturing method of an ultrasonic transducer | vibrator. 従来の超音波振動子を示す図である。It is a figure which shows the conventional ultrasonic transducer | vibrator. 従来の超音波振動子を示す図である。It is a figure which shows the conventional ultrasonic transducer | vibrator.

符号の説明Explanation of symbols

１ 超音波振動子
２ 電気機械変換素子
３ 音響整合部材
４ バッキング材
５ 電極層
６ 切欠き部
８ 対向方向
１１ リード線
１３ 接続部材
１４ 加圧部
１５ 電気接続部
５９ ハウジング
DESCRIPTION OF SYMBOLS 1 Ultrasonic transducer 2 Electromechanical transducer 3 Acoustic matching member 4 Backing material 5 Electrode layer 6 Notch part 8 Opposite direction 11 Lead wire 13 Connection member 14 Pressurization part 15 Electrical connection part 59 Housing

Claims (16)

電気機械変換素子と音響整合部材とバッキング材と前記電気機械変換素子に電気的に接続される接続部材とを備える超音波振動子において、
前記接続部材が前記電気機械変換素子を、対向する２方向から加圧接触することにより、前記電気機械変換素子と前記接続部材とが電気的に接続されることを特徴とする超音波振動子。 In an ultrasonic transducer comprising an electromechanical transducer, an acoustic matching member, a backing material, and a connection member electrically connected to the electromechanical transducer,
The ultrasonic transducer according to claim 1, wherein the electromechanical transducer and the connecting member are electrically connected when the connecting member pressurizes and contacts the electromechanical transducer from two opposing directions. 請求項１に記載の超音波振動子であって、
前記接続部材は、
前記電気機械変換素子の一方の面を加圧接触する加圧部と、
前記電気機械変換素子の他方の面に形成される電極層を加圧接触する電気接続部と、
ＧＮＤ線または信号線と接続されるリード部と、
を備え、
前記加圧部、前記電気接続部、及び前記リード部が一体に形成されていることを特徴とする超音波振動子。 The ultrasonic transducer according to claim 1,
The connecting member is
A pressurizing part that pressurizes and contacts one surface of the electromechanical transducer;
An electrical connection portion that pressurizes and contacts an electrode layer formed on the other surface of the electromechanical transducer;
A lead portion connected to a GND line or a signal line;
With
The ultrasonic transducer, wherein the pressing portion, the electrical connection portion, and the lead portion are integrally formed. 請求項１に記載の超音波振動子であって、
前記接続部材は、
前記電気機械変換素子の一方の面に形成される電極層を絶縁部材を介して加圧接触する加圧部と、
前記電気機械変換素子の他方の面に形成される電極層を加圧接触する電気接続部と、
を備えることを特徴とする超音波振動子。 The ultrasonic transducer according to claim 1,
The connecting member is
A pressurizing part that pressurizes and contacts an electrode layer formed on one surface of the electromechanical conversion element via an insulating member;
An electrical connection portion that pressurizes and contacts an electrode layer formed on the other surface of the electromechanical transducer;
An ultrasonic transducer comprising: 請求項１に記載の超音波振動子であって、
前記電気機械変換素子は、前記電気機械変換素子の一方の面に形成される電極層の一部が切り取られることにより形成される切欠き部を備え、
前記接続部材は、
前記電気機械変換素子の一方の面に形成される前記切欠き部を加圧接触する加圧部と、
前記電気機械変換素子の他方の面に形成される電極層を加圧接触する電気接続部と、
を備え、
前記加圧部は、前記切欠き部の形状に基づいて形成されていることを特徴とする超音波振動子。 The ultrasonic transducer according to claim 1,
The electromechanical transducer has a notch formed by cutting a part of an electrode layer formed on one surface of the electromechanical transducer,
The connecting member is
A pressurizing part that pressurizes and contacts the notch formed on one surface of the electromechanical transducer;
An electrical connection portion that pressurizes and contacts an electrode layer formed on the other surface of the electromechanical transducer;
With
The ultrasonic transducer according to claim 1, wherein the pressurizing portion is formed based on a shape of the notch portion. 請求項１に記載の超音波振動子であって、
前記接続部材は、金属薄板を略長方形に抜き加工されて作成され、
前記接続部材の長手方向に直交する方向の幅が前記金属薄板の厚さの５倍以上であることを特徴とする超音波振動子。 The ultrasonic transducer according to claim 1,
The connecting member is created by punching a thin metal plate into a substantially rectangular shape,
The ultrasonic transducer according to claim 1, wherein a width of the connection member in a direction orthogonal to a longitudinal direction is five times or more a thickness of the metal thin plate. 請求項１に記載の超音波振動子であって、
前記電気機械変換素子のそれぞれの電極と電気的に接続される複数の前記接続部材は、金属薄板を同一形状で略長方形に抜き加工され、この抜き加工された略長方形の金属薄板の端部において、前記電気機械変換素子の一方の面に形成される電極層を加圧接触する電気接続部が形成され、前記電気接続部の近傍に形成される孔の内側に前記電気接続部と反対方向に突出して前記電気機械変換素子の他方の面を加圧接触する加圧部が形成され、前記加圧部の折り曲げ方向を変える事により、それぞれの前記電極と前記電気接続部が電気的に接続されることを特徴とする超音波振動子。 The ultrasonic transducer according to claim 1,
The plurality of connection members that are electrically connected to the respective electrodes of the electromechanical conversion element are formed by punching a thin metal plate into a substantially rectangular shape, and at the end of the punched substantially rectangular thin metal plate. An electrical connection part is formed in pressure contact with the electrode layer formed on one surface of the electromechanical transducer, and is formed in a direction opposite to the electrical connection part inside a hole formed in the vicinity of the electrical connection part. A pressing portion that protrudes and press-contacts the other surface of the electromechanical transducer is formed, and by changing the bending direction of the pressing portion, each of the electrodes and the electrical connection portion are electrically connected. An ultrasonic transducer characterized by that. 請求項１に記載の超音波振動子であって、
前記電気機械変換素子と加圧接触する前記接続部材の面に、凹凸部または突起部が設けられていることを特徴とする超音波振動子。 The ultrasonic transducer according to claim 1,
An ultrasonic transducer, wherein an uneven portion or a protrusion is provided on a surface of the connection member that is in pressure contact with the electromechanical transducer. 請求項１に記載の超音波振動子であって、
前記接続部材は、
前記電気機械変換素子の一方の面を加圧接触する加圧部と、
前記電気機械変換素子の他方の面に形成される電極層を加圧接触する電気接続部と、
を備え、
前記電気接続部の面積が前記加圧部の面積よりも広いことを特徴とする超音波振動子。 The ultrasonic transducer according to claim 1,
The connecting member is
A pressurizing part that pressurizes and contacts one surface of the electromechanical transducer;
An electrical connection portion that pressurizes and contacts an electrode layer formed on the other surface of the electromechanical transducer;
With
The ultrasonic transducer according to claim 1, wherein an area of the electrical connection portion is larger than an area of the pressurizing portion. 請求項１に記載の超音波振動子であって、
前記接続部材は、
前記電気機械変換素子の一方の面を加圧接触する加圧部と、
前記電気機械変換素子の他方の面に形成される電極層を加圧接触する電気接続部と、
を備え、
前記加圧部及び前記電気接続部の一方または両方に１本以上の貫通した溝が設けられていることを特徴とする超音波振動子。 The ultrasonic transducer according to claim 1,
The connecting member is
A pressurizing part that pressurizes and contacts one surface of the electromechanical transducer;
An electrical connection portion that pressurizes and contacts an electrode layer formed on the other surface of the electromechanical transducer;
With
One or both of the said pressurization part and the said electrical-connection part are provided with the groove | channel which 1 or more penetrated, The ultrasonic transducer | vibrator characterized by the above-mentioned. 請求項１に記載の超音波振動子であって、
前記接続部材は、
前記電気機械変換素子の一方の面を加圧接触する加圧部と、
前記電気機械変換素子の他方の面に形成される電極層を加圧接触する電気接続部と、
を備え、
前記加圧部または前記電気接続部に孔が設けられ、前記孔内部に半田または導電性接着剤が入れられ、前記電気機械変換素子と前記接続部材とが接続されることを特徴とする超音波振動子。 The ultrasonic transducer according to claim 1,
The connecting member is
A pressurizing part that pressurizes and contacts one surface of the electromechanical transducer;
An electrical connection portion that pressurizes and contacts an electrode layer formed on the other surface of the electromechanical transducer;
With
An ultrasonic wave characterized in that a hole is provided in the pressurizing part or the electrical connection part, solder or a conductive adhesive is placed inside the hole, and the electromechanical transducer and the connection member are connected. Vibrator. 請求項１に記載の超音波振動子であって、
前記電気機械変換素子と前記接続部材との隙間が保護部材により覆われていることを特徴とする超音波振動子。 The ultrasonic transducer according to claim 1,
An ultrasonic transducer, wherein a gap between the electromechanical transducer and the connection member is covered with a protective member. 請求項１に記載の超音波振動子であって、
ＧＮＤ線と電気的に接続され、少なくとも前記電気機械変換素子を内部で固定する金属製のハウジングを備え、
前記接続部材が前記ハウジングと電気的に接続されていることを特徴とする超音波振動子。 The ultrasonic transducer according to claim 1,
A metal housing that is electrically connected to the GND wire and fixes at least the electromechanical transducer inside;
The ultrasonic transducer, wherein the connecting member is electrically connected to the housing. 請求項１に記載の超音波振動子であって、
前記電気機械変換素子は、複数の柱状セラミック圧電体それぞれが樹脂に包まれて形成される板状部材の両面に電極層が配されることにより構成される複合圧電素子であり、
前記樹脂と前記電極層との合計の厚さが、前記柱状セラミック圧電体と前記電極層との合計の厚さよりも厚く、前記接続部材により前記樹脂が加圧変形されることにより前記電気機械変換素子と前記接続部材とが接続されることを特徴とする超音波振動子。 The ultrasonic transducer according to claim 1,
The electromechanical conversion element is a composite piezoelectric element configured by arranging electrode layers on both surfaces of a plate-like member formed by encapsulating each of a plurality of columnar ceramic piezoelectric bodies,
The total thickness of the resin and the electrode layer is larger than the total thickness of the columnar ceramic piezoelectric body and the electrode layer, and the resin is pressurized and deformed by the connecting member, so that the electromechanical conversion is performed. An ultrasonic transducer, wherein an element and the connection member are connected. 請求項１に記載の超音波振動子であって、
前記接続部材が形状記憶合金により形成されていることを特徴とする超音波振動子。 The ultrasonic transducer according to claim 1,
The ultrasonic vibrator, wherein the connecting member is made of a shape memory alloy. 請求項１〜１４の何れか１項に記載の超音波振動子であって、
前記接続部材を弾性変形させることにより、前記電気機械変換素子と前記接続部材とが接続されることを特徴とする超音波振動子。 The ultrasonic transducer according to any one of claims 1 to 14,
The ultrasonic transducer, wherein the electromechanical transducer and the connection member are connected by elastically deforming the connection member. 請求項１に記載の超音波振動子の製造方法であって、
金属薄板を抜き加工することにより、前記接続部材と、前記電気機械変換素子を載せるための載置部材と、前記金属薄板と前記接続部材及び前記金属薄板と前記載置部材とを結合させるための結合部とを前記金属薄板に形成し、
前記載置部材に前記電気機械変換素子を載せ、
前記接続部材の一部を折り曲げることにより、前記電気機械変換素子と前記接続部材とを接続し、
前記結合部を切り落とすことを特徴とする超音波振動子の製造方法。


It is a manufacturing method of the ultrasonic vibrator according to claim 1,
By punching a thin metal plate, the connecting member, a mounting member for mounting the electromechanical conversion element, the thin metal plate, the connecting member, the thin metal plate, and the mounting member for combining the mounting member A coupling portion is formed on the metal thin plate;
Place the electromechanical transducer on the mounting member,
By bending a part of the connection member, the electromechanical transducer and the connection member are connected,
A method of manufacturing an ultrasonic transducer, wherein the coupling portion is cut off.


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