JP2003218417A - Piezoelectric/electrostrictive element and device using the same - Google Patents
Piezoelectric/electrostrictive element and device using the sameInfo
- Publication number
- JP2003218417A JP2003218417A JP2002017071A JP2002017071A JP2003218417A JP 2003218417 A JP2003218417 A JP 2003218417A JP 2002017071 A JP2002017071 A JP 2002017071A JP 2002017071 A JP2002017071 A JP 2002017071A JP 2003218417 A JP2003218417 A JP 2003218417A
- Authority
- JP
- Japan
- Prior art keywords
- piezoelectric
- electrostrictive element
- piezoelectric material
- metal plate
- electrostrictive
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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Abstract
Description
【０００１】[0001]
【発明の属する技術分野】本発明は圧電・電歪素子及び
それを用いた装置に関し、電圧を印加することで変位も
しくは力を発生する圧電・電歪素子及びそれを用いた装
置に関する。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a piezoelectric / electrostrictive element and an apparatus using the same, and more particularly to a piezoelectric / electrostrictive element that generates displacement or force by applying a voltage and an apparatus using the same.
【０００２】[0002]
【従来の技術】電圧を印加することで変位もしくは力を
発生する圧電・電歪素子で、大きな変位量を確保できる
ものとしてモノモルフ素子またはバイモルフ素子があ
る。2. Description of the Related Art A piezoelectric / electrostrictive element that generates a displacement or a force by applying a voltage and can secure a large displacement amount includes a monomorph element or a bimorph element.
【０００３】従来のバイモルフ素子は、図１（Ａ），
（Ｂ）に斜視図及び側面図を示すように、可撓性かつ導
電性の金属板１の両面に、互いに反対方向に分極する圧
電材料２，３を貼り合わせ、圧電材料２，３の表面に導
電体４，５を形成して構成されている。A conventional bimorph element is shown in FIG.
As shown in the perspective view and the side view in (B), the piezoelectric materials 2 and 3 which are polarized in opposite directions are bonded to both surfaces of the flexible and conductive metal plate 1, and the surfaces of the piezoelectric materials 2 and 3 are bonded. And conductors 4 and 5 are formed on it.
【０００４】そして、金属板１と導電体４，５との間に
電圧を印加することで圧電材料２，３が歪む。これによ
り、金属板１の一端Ａを固定すると、他端Ｂは矢印方向
に変位する。なお、モノモルフ素子は、圧電材料２，３
のうちの一方を貼り合わせ、その表面に導電体４または
５を形成した構成である。When a voltage is applied between the metal plate 1 and the conductors 4 and 5, the piezoelectric materials 2 and 3 are distorted. Thus, when one end A of the metal plate 1 is fixed, the other end B is displaced in the arrow direction. In addition, the monomorph element is composed of piezoelectric materials 2, 3
One of them is bonded and the conductor 4 or 5 is formed on the surface thereof.
【０００５】[0005]
【発明が解決しようとする課題】上記のモノモルフ素子
またはバイモルフ素子等の圧電・電歪素子は、その変位
原理の特性上、Ｘ軸方向（端部Ａ，Ｂを結ぶ方向）に長
い構造を有している。特に、変位動作で圧電・電歪素子
自体が破損しないように長手方向の微小区間における変
位量には限界があるため、大きな変位量を得るためには
上記Ｘ軸方向の長さをその変位量に比例して長くする必
要がある。The piezoelectric / electrostrictive element such as the monomorph element or the bimorph element has a structure which is long in the X-axis direction (the direction connecting the ends A and B) due to the characteristic of the displacement principle. is doing. In particular, there is a limit to the amount of displacement in a minute section in the longitudinal direction so that the piezoelectric / electrostrictive element itself is not damaged by the displacement operation. Therefore, in order to obtain a large amount of displacement, the length in the X-axis direction is set to that amount of displacement. Needs to be lengthened in proportion to.
【０００６】このため、圧電・電歪素子を収納するスペ
ースが大きくなってスペース効率が悪化し、圧電・電歪
素子の設置場所や設置方法が大きな制約を受けるという
問題があった。For this reason, there is a problem that the space for accommodating the piezoelectric / electrostrictive element becomes large and the space efficiency is deteriorated, and the installation place and the installation method of the piezoelectric / electrostrictive element are greatly restricted.
【０００７】本発明は、上記の点に鑑みなされたもの
で、スペース効率が向上し、素子の設置場所や設置方法
の自由度が向上する圧電・電歪素子及びそれを用いた装
置を提供することを目的とする。The present invention has been made in view of the above points, and provides a piezoelectric / electrostrictive element and a device using the same, in which the space efficiency is improved, and the degree of freedom of the installation location and installation method of the element is improved. The purpose is to
【０００８】[0008]
【課題を解決するための手段】上記課題を解決するため
に、請求項１に記載の発明は、圧電材料を一対の電極で
挟み、前記圧電材料に電圧を印加し前記圧電材料の厚さ
方向に変位させる圧電・電歪素子において、前記圧電材
料を螺旋状に形成したことにより、螺旋の中心軸方向に
大きな変位量を得ることができ、圧電・電歪素子の投影
面積を縮小してスペース効率を向上でき、圧電・電歪素
子の設置場所や設置方法の自由度が向上する。In order to solve the above-mentioned problems, the invention according to claim 1 sandwiches a piezoelectric material between a pair of electrodes, and a voltage is applied to the piezoelectric material so that the piezoelectric material has a thickness direction. In the piezoelectric / electrostrictive element to be displaced in the above manner, by forming the piezoelectric material in a spiral shape, a large displacement amount can be obtained in the central axis direction of the spiral, and the projected area of the piezoelectric / electrostrictive element can be reduced to reduce the space. The efficiency can be improved, and the flexibility of the installation location and installation method of the piezoelectric / electrostrictive element is improved.
【０００９】請求項２に記載の発明は、圧電材料を一対
の電極で挟み、前記圧電材料に電圧を印加し前記圧電材
料の厚さ方向に変位させる圧電・電歪素子において、前
記圧電材料を渦巻き状に形成したことにより、圧電材料
の厚さ方向に大きな変位量を得ることができ、圧電・電
歪素子の長さを縮小してスペース効率を向上でき、圧電
・電歪素子の設置場所や設置方法の自由度が向上する。According to a second aspect of the present invention, in a piezoelectric / electrostrictive element in which a piezoelectric material is sandwiched between a pair of electrodes and a voltage is applied to the piezoelectric material to displace in the thickness direction of the piezoelectric material, the piezoelectric material is Due to the spiral shape, a large amount of displacement can be obtained in the thickness direction of the piezoelectric material, the length of the piezoelectric / electrostrictive element can be reduced, and space efficiency can be improved. And the degree of freedom of installation method is improved.
【００１０】請求項３に記載の発明は、圧電材料を一対
の電極で挟み、前記圧電材料に電圧を印加し前記圧電材
料の厚さ方向に変位させる圧電・電歪素子において、前
記圧電材料を波板状に形成したことにより、波板の延在
方向に大きな変位量を得ることができ、圧電・電歪素子
の長さを縮小してスペース効率を向上でき、圧電・電歪
素子の設置場所や設置方法の自由度が向上する。According to a third aspect of the invention, there is provided a piezoelectric / electrostrictive element in which a piezoelectric material is sandwiched between a pair of electrodes, and a voltage is applied to the piezoelectric material to displace the piezoelectric material in the thickness direction of the piezoelectric material. By forming the corrugated plate shape, a large amount of displacement can be obtained in the extending direction of the corrugated plate, the length of the piezoelectric / electrostrictive element can be reduced to improve space efficiency, and the piezoelectric / electrostrictive element can be installed. The degree of freedom of place and installation method is improved.
【００１１】[0011]
【発明の実施の形態】図２（Ａ），（Ｂ）は、本発明の
圧電・電歪素子の第１実施例の斜視図及びそのIIＢ線に
沿った断面図を示す。この圧電・電歪素子はバイモルフ
素子である。同図中、金属板１１は、弾性かつ導電性を
有し螺旋状に形成されている。ここで、螺旋状とは、回
転位置に応じてＺ軸方向に変位する構造をいう。2 (A) and 2 (B) are a perspective view of a piezoelectric / electrostrictive device according to a first embodiment of the present invention and a sectional view taken along line IIB thereof. This piezoelectric / electrostrictive element is a bimorph element. In the figure, the metal plate 11 has elasticity and conductivity, and is formed in a spiral shape. Here, the spiral shape means a structure that is displaced in the Z-axis direction depending on the rotational position.
【００１２】金属板１１の両面には、互いに反対方向に
分極する圧電材料１２，１３が貼り合わせられており、
圧電材料１２，１３の表面に導電体１４，１５が形成さ
れている。なお、スパッタやディップを用いて金属板１
１に圧電材料１２，１３を設けても良い。Piezoelectric materials 12 and 13 which are polarized in opposite directions are attached to both surfaces of the metal plate 11,
Conductors 14 and 15 are formed on the surfaces of the piezoelectric materials 12 and 13. It should be noted that the metal plate 1 using spatter or dip
The piezoelectric materials 12 and 13 may be provided on the first substrate.
【００１３】金属板１１と導電体１４，１５との間に電
圧を印加すると、圧電材料１２，１３が歪む。これによ
り、金属板１１の一端Ａを固定すると、他端Ｂは圧電材
料１２，１３の厚さ方向であるＺ軸方向に変位する。な
お、モノモルフ素子は、圧電材料１２，１３のうちの一
方を金属板１１に貼り合わせ、その表面に導電体１４ま
たは１５を形成した構成である。When a voltage is applied between the metal plate 11 and the conductors 14 and 15, the piezoelectric materials 12 and 13 are distorted. As a result, when one end A of the metal plate 11 is fixed, the other end B is displaced in the Z-axis direction which is the thickness direction of the piezoelectric materials 12 and 13. The monomorph element has a structure in which one of the piezoelectric materials 12 and 13 is attached to the metal plate 11 and the conductor 14 or 15 is formed on the surface thereof.
【００１４】このように、金属板１１及び圧電材料１
２，１３を螺旋状にしているため、螺旋の中心軸方向で
あるＺ軸方向に大きな変位量を得ることができ、圧電・
電歪素子のＸＹ平面（Ｚ軸と直交）における投影面積を
縮小してスペース効率を向上でき、圧電・電歪素子の設
置場所や設置方法の自由度が向上する。Thus, the metal plate 11 and the piezoelectric material 1
Since 2 and 13 are formed in a spiral shape, a large amount of displacement can be obtained in the Z-axis direction, which is the central axis direction of the spiral.
The space efficiency can be improved by reducing the projected area of the electrostrictive element on the XY plane (orthogonal to the Z axis), and the degree of freedom in the installation location and installation method of the piezoelectric / electrostrictive element is improved.
【００１５】図３（Ａ），（Ｂ），（Ｃ）は、本発明の
圧電・電歪素子の第２実施例の斜視図及びそのIIIＢ線
に沿った断面図及びその一部を切り取った平面図を示
す。この圧電・電歪素子はモノモルフ素子である。同図
中、圧電材料２１は円筒状に形成されており、円筒状の
圧電材料２１は、外周面から内周面まで貫通する螺旋状
の切り込み２２が設けられることにより、螺旋状とされ
ている。また、この円筒状の圧電材料２１の外周面には
導電体２３が形成され、内周面には導電体２４が形成さ
れている。3 (A), (B) and (C) are a perspective view of a second embodiment of the piezoelectric / electrostrictive element of the present invention, a sectional view taken along the line IIIB thereof and a part thereof cut away. A top view is shown. This piezoelectric / electrostrictive element is a monomorph element. In the figure, the piezoelectric material 21 is formed in a cylindrical shape, and the cylindrical piezoelectric material 21 is formed in a spiral shape by providing a spiral cut 22 penetrating from the outer peripheral surface to the inner peripheral surface. . Further, a conductor 23 is formed on the outer peripheral surface of the cylindrical piezoelectric material 21, and a conductor 24 is formed on the inner peripheral surface thereof.
【００１６】上記圧電材料２１の螺旋状の切り込みは切
削工具またはエッチャント・レーザで整形する。この他
にも、螺旋状の切り込みを有する鋳型で型取りして圧電
材料２１を整形したり、粘土状の材料を螺旋状に整形し
て固めることで圧電材料２１を整形しても良い。The spiral cut of the piezoelectric material 21 is shaped by a cutting tool or an etchant laser. In addition to this, the piezoelectric material 21 may be shaped by molding with a mold having a spiral cut, or by shaping a clay-like material into a spiral shape and hardening it.
【００１７】ここで、図３（Ａ）にハッチングで示す部
分２５の平面図を図３（Ｃ）に示している。導電体２
３，２４の間に電圧を印加すると、図３（Ｃ）に矢印で
示すように、圧電材料２１は円筒の半径方向に圧縮され
ると共に周方向に伸長するように歪む。なお、図３
（Ｃ）には破線で電圧印加前の圧電材料２１の形状を示
し、実線で電圧印加時の圧電材料２１の形状を示す。こ
れにより、圧電材料２１は螺旋の中心軸方向であるＺ軸
方向に変位する。なお、円筒径を小とする方向にも変位
する。Here, a plan view of a portion 25 shown by hatching in FIG. 3 (A) is shown in FIG. 3 (C). Conductor 2
When a voltage is applied between 3 and 24, the piezoelectric material 21 is compressed in the radial direction of the cylinder and distorted so as to extend in the circumferential direction, as indicated by the arrow in FIG. Note that FIG.
In (C), the broken line shows the shape of the piezoelectric material 21 before voltage application, and the solid line shows the shape of the piezoelectric material 21 when voltage is applied. As a result, the piezoelectric material 21 is displaced in the Z-axis direction which is the central axis direction of the spiral. It should be noted that it is also displaced in the direction in which the diameter of the cylinder is reduced.
【００１８】このように、圧電材料２１を螺旋状にして
いるため、Ｚ軸方向に大きな変位量を得ることができ、
圧電・電歪素子のＸＹ平面（Ｚ軸と直交）における投影
面積を縮小してスペース効率を向上でき、圧電・電歪素
子の設置場所や設置方法の自由度が向上する。Since the piezoelectric material 21 has a spiral shape as described above, a large displacement amount can be obtained in the Z-axis direction.
The projected area on the XY plane (orthogonal to the Z axis) of the piezoelectric / electrostrictive element can be reduced to improve space efficiency, and the degree of freedom in the installation location and installation method of the piezoelectric / electrostrictive element is improved.
【００１９】図４（Ａ），（Ｂ）は、本発明の圧電・電
歪素子の第３実施例の斜視図及びそのIVＢ線に沿った断
面図を示す。この圧電・電歪素子はバイモルフ素子であ
る。同図中、金属板３１は、弾性かつ導電性を有する円
盤状に形成されており、円盤を貫通する渦巻き状の切り
込み３２が設けられている。FIGS. 4A and 4B are a perspective view and a sectional view taken along line IVB of a third embodiment of the piezoelectric / electrostrictive element of the present invention. This piezoelectric / electrostrictive element is a bimorph element. In the figure, the metal plate 31 is formed in a disk shape having elasticity and conductivity, and a spiral cut 32 is provided to penetrate the disk.
【００２０】金属板３１の両面には、互いに反対方向に
分極する圧電材料３３，３４が貼り合わせられており、
圧電材料３３，３４の表面に導電体３５，３６が形成さ
れている。なお、スパッタやディップを用いて金属板３
１に圧電材料３３，３４を設けても良い。Piezoelectric materials 33 and 34, which are polarized in opposite directions to each other, are attached to both surfaces of the metal plate 31.
Conductors 35 and 36 are formed on the surfaces of the piezoelectric materials 33 and 34. In addition, the metal plate 3 is formed by using a spatter or a dip.
The piezoelectric materials 33 and 34 may be provided on the first substrate.
【００２１】金属板３１と導電体３５，３６との間に電
圧を印加すると、圧電材料３３，３４が歪む。これによ
り、金属板３１の外周側端部を固定すると、内周側端部
は圧電材料の厚さ方向であるＺ軸方向に変位する。な
お、モノモルフ素子は、圧電材料３３，３４のうちの一
方を金属板３１に貼り合わせ、その表面に導電体３５ま
たは３６を形成した構成である。When a voltage is applied between the metal plate 31 and the conductors 35 and 36, the piezoelectric materials 33 and 34 are distorted. As a result, when the outer peripheral side end of the metal plate 31 is fixed, the inner peripheral side end is displaced in the Z-axis direction which is the thickness direction of the piezoelectric material. The monomorph element has a structure in which one of the piezoelectric materials 33 and 34 is attached to the metal plate 31 and the conductor 35 or 36 is formed on the surface thereof.
【００２２】このように、金属板３１及び圧電材料３
３，３４を渦巻き状にしているため、Ｚ軸方向に大きな
変位量を得ることができ、金属板３１のＸ軸またはＹ軸
方向の長さを縮小してスペース効率が向上し、圧電・電
歪素子の設置場所や設置方法の自由度が向上する。Thus, the metal plate 31 and the piezoelectric material 3
Since 3 and 34 are formed in a spiral shape, a large displacement amount can be obtained in the Z-axis direction, the length of the metal plate 31 in the X-axis or Y-axis direction is reduced, space efficiency is improved, and piezoelectric / electrical The degree of freedom of the installation location and installation method of the strain element is improved.
【００２３】図５（Ａ），（Ｂ）は、本発明の圧電・電
歪素子の第４実施例の平面図及びそのVＢ線に沿った断
面図を示す。この圧電・電歪素子はバイモルフ素子であ
る。同図中、金属板４１は、弾性かつ導電性を有しＸ軸
方向に波打ちつつＺ軸方向に延在する波板状に形成され
ている。FIGS. 5A and 5B are a plan view and a sectional view taken along line VB of a fourth embodiment of the piezoelectric / electrostrictive element of the present invention. This piezoelectric / electrostrictive element is a bimorph element. In the figure, the metal plate 41 is elastic and conductive, and is formed in a corrugated plate shape that undulates in the X-axis direction and extends in the Z-axis direction.
【００２４】金属板４１の両面には、互いに反対方向に
分極する圧電材料４２，４３が貼り合わせられており、
圧電材料４２，４３の表面に導電体４４，４５が形成さ
れている。なお、スパッタやディップを用いて金属板４
１に圧電材料４２，４３を設けても良い。Piezoelectric materials 42 and 43 which are polarized in opposite directions are attached to both surfaces of the metal plate 41.
Conductors 44 and 45 are formed on the surfaces of the piezoelectric materials 42 and 43. In addition, the metal plate 4 is formed by using a spatter or a dip.
The piezoelectric materials 42 and 43 may be provided on the first unit.
【００２５】金属板４１と導電体４４，４５との間に電
圧を印加すると、圧電材料４２，４３が歪む。これによ
り、金属板４１の一端Ａを固定すると、他端Ｂは波板の
延在方向であるＺ軸方向に変位する。なお、モノモルフ
素子は、圧電材料４２，４３のうちの一方を金属板４１
に貼り合わせ、その表面に導電体４４または４５を形成
した構成である。When a voltage is applied between the metal plate 41 and the conductors 44 and 45, the piezoelectric materials 42 and 43 are distorted. As a result, when one end A of the metal plate 41 is fixed, the other end B is displaced in the Z-axis direction which is the extending direction of the corrugated plate. In the monomorph element, one of the piezoelectric materials 42 and 43 is provided on the metal plate 41.
And a conductor 44 or 45 is formed on the surface thereof.
【００２６】このように、金属板４１及び導電体４４，
４５を波板状にしているため、Ｚ軸方向に大きな変位量
を得ることができ、金属板１１のＺ軸方向の長さを縮小
してスペース効率が向上し、圧電・電歪素子の設置場所
や設置方法の自由度が向上する。Thus, the metal plate 41 and the conductors 44,
Since 45 is formed into a corrugated plate, a large displacement amount can be obtained in the Z-axis direction, the length of the metal plate 11 in the Z-axis direction can be reduced, space efficiency can be improved, and piezoelectric / electrostrictive elements can be installed. The degree of freedom of place and installation method is improved.
【００２７】このように、本発明の圧電・電歪素子によ
れば、従来のバイモルフ素子で得られる変位量と同等の
変位量を、従来のバイモルフ素子より小型の素子で得る
ことができ、本発明の圧電・電歪素子を使用した機器を
小型化することが可能となる。また、変位を発生するア
クチュエータとして小型の携帯機器に搭載することが可
能となる。本発明素子の応用としてはスピーカ等の音響
機器、人工筋肉やロボット用アクチュエータ、機械的に
光の進路を変えることで実現されるディスプレイなどが
ある。また、本発明はアクチュエータとしての機能だけ
でなく、与えられた外力によって変位したとき変位量に
応じた電力を発生するセンサとしても利用することがで
きる。As described above, according to the piezoelectric / electrostrictive element of the present invention, the same displacement amount as that obtained by the conventional bimorph element can be obtained by the element smaller than the conventional bimorph element. It is possible to downsize a device using the piezoelectric / electrostrictive element of the invention. Further, it becomes possible to mount the actuator as a displacement-generating actuator on a small portable device. Applications of the device of the present invention include acoustic devices such as speakers, artificial muscles, actuators for robots, and displays realized by mechanically changing the path of light. Further, the present invention can be used not only as a function as an actuator but also as a sensor that generates electric power according to the amount of displacement when displaced by an external force applied.
【００２８】[0028]
【発明の効果】上述の如く、請求項１に記載の発明は、
圧電材料を螺旋状に形成したことにより、螺旋の中心軸
方向に大きな変位量を得ることができ、圧電・電歪素子
の投影面積を縮小してスペース効率を向上でき、圧電・
電歪素子の設置場所や設置方法の自由度が向上する。As described above, the invention according to claim 1 is
By forming the piezoelectric material in a spiral shape, a large amount of displacement can be obtained in the direction of the central axis of the spiral, the projected area of the piezoelectric / electrostrictive element can be reduced, and space efficiency can be improved.
The degree of freedom in the installation location and installation method of the electrostrictive element is improved.
【００２９】また、請求項２に記載の発明は、圧電材料
を渦巻き状に形成したことにより、圧電材料の厚さ方向
に大きな変位量を得ることができ、圧電・電歪素子の長
さを縮小してスペース効率を向上でき、圧電・電歪素子
の設置場所や設置方法の自由度が向上する。According to the second aspect of the invention, since the piezoelectric material is formed in a spiral shape, a large amount of displacement can be obtained in the thickness direction of the piezoelectric material, and the length of the piezoelectric / electrostrictive element can be reduced. The size can be reduced to improve space efficiency, and the flexibility of the installation location and installation method of the piezoelectric / electrostrictive element can be improved.
【００３０】請求項３に記載の発明は、圧電材料を波板
状に形成したことにより、波板の延在方向に大きな変位
量を得ることができ、圧電・電歪素子の長さを縮小して
スペース効率を向上でき、圧電・電歪素子の設置場所や
設置方法の自由度が向上する。According to the third aspect of the present invention, since the piezoelectric material is formed in a corrugated plate shape, a large displacement amount can be obtained in the extending direction of the corrugated plate, and the length of the piezoelectric / electrostrictive element is reduced. The space efficiency can be improved, and the flexibility of the installation location and installation method of the piezoelectric / electrostrictive element is improved.
【図１】従来のバイモルフ素子の一例の斜視図及び側面
図である。FIG. 1 is a perspective view and a side view of an example of a conventional bimorph element.
【図２】本発明の圧電・電歪素子の第１実施例の斜視図
及びそのIIＢ線に沿った断面図である。FIG. 2 is a perspective view of a piezoelectric / electrostrictive element according to a first embodiment of the present invention and a sectional view taken along line IIB thereof.
【図３】本発明の圧電・電歪素子の第２実施例の斜視図
及びそのIIIＢ線に沿った断面図及びその一部を切り取
った平面図である。FIG. 3 is a perspective view of a piezoelectric / electrostrictive device according to a second embodiment of the present invention, a cross-sectional view taken along line IIIB thereof, and a plan view with a part thereof cut away.
【図４】本発明の圧電・電歪素子の第３実施例の斜視図
及びそのIVＢ線に沿った断面図である。FIG. 4 is a perspective view of a piezoelectric / electrostrictive device according to a third embodiment of the present invention and a cross-sectional view taken along line IVB thereof.
【図５】本発明の圧電・電歪素子の第４実施例の平面図
及びそのVＢ線に沿った断面図である。5A and 5B are a plan view and a sectional view taken along line VB of a fourth embodiment of the piezoelectric / electrostrictive element of the present invention.
１１，３１，４１ 金属板
１２，１３，２１，３３，３４，４２，４３ 圧電材料
１４，１５，２３，２４，３５，３６，４４，４５ 導
電体11, 31, 41 Metal plate 12, 13, 21, 33, 34, 42, 43 Piezoelectric material 14, 15, 23, 24, 35, 36, 44, 45 Conductor
───────────────────────────────────────────────────── フロントページの続き (72)発明者 江刺 正喜 宮城県仙台市太白区八木山一丁目11−９ Ｆターム(参考） 5D004 AA09 5D019 BB10 ─────────────────────────────────────────────────── ─── Continued front page (72) Inventor Masayoshi Esashi 11-9 Yagiyama, Taihaku Ward, Sendai City, Miyagi Prefecture F-term (reference) 5D004 AA09 5D019 BB10
Claims (8)
材料に電圧を印加し前記圧電材料の厚さ方向に変位させ
る圧電・電歪素子において、 前記圧電材料を螺旋状に形成したことを特徴とする圧電
・電歪素子。1. A piezoelectric / electrostrictive element that sandwiches a piezoelectric material between a pair of electrodes and applies a voltage to the piezoelectric material to displace the piezoelectric material in a thickness direction of the piezoelectric material, wherein the piezoelectric material is formed in a spiral shape. Characteristic piezoelectric / electrostrictive element.
材料に電圧を印加し前記圧電材料の厚さ方向に変位させ
る圧電・電歪素子において、 前記圧電材料を渦巻き状に形成したことを特徴とする圧
電・電歪素子。2. A piezoelectric / electrostrictive element that sandwiches a piezoelectric material between a pair of electrodes and applies a voltage to the piezoelectric material to displace it in the thickness direction of the piezoelectric material, wherein the piezoelectric material is formed in a spiral shape. Characteristic piezoelectric / electrostrictive element.
材料に電圧を印加し前記圧電材料の厚さ方向に変位させ
る圧電・電歪素子において、 前記圧電材料を波板状に形成したことを特徴とする圧電
・電歪素子。3. A piezoelectric / electrostrictive element that sandwiches a piezoelectric material between a pair of electrodes and applies a voltage to the piezoelectric material to displace it in the thickness direction of the piezoelectric material, wherein the piezoelectric material is formed in a corrugated plate shape. Piezoelectric / electrostrictive element characterized by.
電歪素子において、 前記一対の電極の一方として弾性を有する金属板を用い
たことを特徴とする圧電・電歪素子。4. The piezoelectric device according to claim 1, 2, or 3.
In the electrostrictive element, a piezoelectric / electrostrictive element using an elastic metal plate as one of the pair of electrodes.
て、 前記圧電材料は、前記金属板の一面に設けられることを
特徴とする圧電・電歪素子。5. The piezoelectric / electrostrictive element according to claim 4, wherein the piezoelectric material is provided on one surface of the metal plate.
て、 前記圧電材料は、前記金属板の両面に設けられることを
特徴とする圧電・電歪素子。6. The piezoelectric / electrostrictive element according to claim 4, wherein the piezoelectric material is provided on both surfaces of the metal plate.
て、 前記圧電材料は、円筒状でその外周面から内周面に貫通
する螺旋状の切れ込みを入れて形成したことを特徴とす
る圧電・電歪素子。7. The piezoelectric / electrostrictive element according to claim 1, wherein the piezoelectric material is cylindrical and is formed by forming spiral cuts penetrating from an outer peripheral surface to an inner peripheral surface thereof. -Electrostrictive element.
アクチュエータとして使用したことを特徴とする装置。8. A device using the piezoelectric / electrostrictive element according to any one of claims 1 to 6 as an actuator.
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| JP2002017071A JP2003218417A (en) | 2002-01-25 | 2002-01-25 | Piezoelectric/electrostrictive element and device using the same |
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|---|---|---|---|
| JP2002017071A JP2003218417A (en) | 2002-01-25 | 2002-01-25 | Piezoelectric/electrostrictive element and device using the same |
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|---|---|
| JP2003218417A true JP2003218417A (en) | 2003-07-31 |
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| US20100084947A1 (en) * | 2008-10-02 | 2010-04-08 | Korea Institute Of Science And Technology | High Efficiency Piezoelectric Energy Harvester Having Spiral Structure |
| JP2015501562A (en) * | 2011-09-30 | 2015-01-15 | クォルコム・メムズ・テクノロジーズ・インコーポレーテッド | Cross-sectional expansion mode resonator and resonator-based ladder filter |
| CN104999475A (en) * | 2015-08-28 | 2015-10-28 | 刘伟 | Artificial muscle and application thereof |
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| KR20210001332A (en) * | 2019-06-27 | 2021-01-06 | 한국원자력연구원 | Piezoelectric actuator |
| KR20210026289A (en) * | 2019-08-29 | 2021-03-10 | 한국원자력연구원 | Fluid transfer apparatus, propulsion apparatus, and axial moving apparatus |
| CN115890643A (en) * | 2022-12-15 | 2023-04-04 | 之江实验室 | Electrically-driven artificial muscle fiber with bidirectional linear strain and preparation method thereof |
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2002
- 2002-01-25 JP JP2002017071A patent/JP2003218417A/en active Pending
Cited By (12)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US20100084947A1 (en) * | 2008-10-02 | 2010-04-08 | Korea Institute Of Science And Technology | High Efficiency Piezoelectric Energy Harvester Having Spiral Structure |
| JP2015501562A (en) * | 2011-09-30 | 2015-01-15 | クォルコム・メムズ・テクノロジーズ・インコーポレーテッド | Cross-sectional expansion mode resonator and resonator-based ladder filter |
| CN104999475A (en) * | 2015-08-28 | 2015-10-28 | 刘伟 | Artificial muscle and application thereof |
| CN106426144A (en) * | 2015-08-28 | 2017-02-22 | 刘伟 | Artificial muscle, application of artificial muscle, robot |
| CN106426144B (en) * | 2015-08-28 | 2019-01-18 | 朱正直 | A kind of artificial-muscle and its application, robot |
| JP2017175751A (en) * | 2016-03-23 | 2017-09-28 | 国立大学法人東北大学 | Oscillating power generation element |
| JP2020190543A (en) * | 2019-05-14 | 2020-11-26 | 株式会社村田製作所 | Deformation detecting sensor |
| JP7156324B2 (en) | 2019-05-14 | 2022-10-19 | 株式会社村田製作所 | Deformation detection sensor |
| KR20210001332A (en) * | 2019-06-27 | 2021-01-06 | 한국원자력연구원 | Piezoelectric actuator |
| KR20210026289A (en) * | 2019-08-29 | 2021-03-10 | 한국원자력연구원 | Fluid transfer apparatus, propulsion apparatus, and axial moving apparatus |
| CN115890643A (en) * | 2022-12-15 | 2023-04-04 | 之江实验室 | Electrically-driven artificial muscle fiber with bidirectional linear strain and preparation method thereof |
| CN115890643B (en) * | 2022-12-15 | 2023-09-05 | 之江实验室 | Electric-driven artificial muscle fiber with bidirectional linear strain and preparation method thereof |
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