JP2006022645A - Turbo type high speed rotary apparatus - Google Patents

Turbo type high speed rotary apparatus Download PDF

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JP2006022645A
JP2006022645A JP2004198633A JP2004198633A JP2006022645A JP 2006022645 A JP2006022645 A JP 2006022645A JP 2004198633 A JP2004198633 A JP 2004198633A JP 2004198633 A JP2004198633 A JP 2004198633A JP 2006022645 A JP2006022645 A JP 2006022645A
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rotating shaft
turbo
seal material
rotary shaft
lip seal
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JP4639666B2 (en
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Koji Horikawa
浩司 堀川
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Shimadzu Corp
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Shimadzu Corp
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    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04DNON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00Details, component parts, or accessories
    • F04D29/66Combating cavitation, whirls, noise, vibration or the like; Balancing
    • F04D29/661Combating cavitation, whirls, noise, vibration or the like; Balancing especially adapted for elastic fluid pumps
    • F04D29/662Balancing of rotors
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04DNON-POSITIVE-DISPLACEMENT PUMPS
    • F04D27/00Control, e.g. regulation, of pumps, pumping installations or pumping systems specially adapted for elastic fluids
    • F04D27/001Testing thereof; Determination or simulation of flow characteristics; Stall or surge detection, e.g. condition monitoring
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04DNON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00Details, component parts, or accessories
    • F04D29/08Sealings
    • F04D29/10Shaft sealings
    • F04D29/102Shaft sealings especially adapted for elastic fluid pumps

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  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Structures Of Non-Positive Displacement Pumps (AREA)
  • Testing Of Balance (AREA)

Abstract

<P>PROBLEM TO BE SOLVED: To provide a turbo type high speed rotary apparatus capable of removing a lip seal material constricting a seal mechanism of a gas compression chamber and a motor chamber from a rotary shaft at a time of balance test. <P>SOLUTION: A bearing retaining member 8 for retaining an upper bearing 5 is provided on a housing 1. A seal plate 9 equivalent to a partition wall is mounted thereon and is installed on the housing. A rotary shaft 4 is provided to penetrate through a through hole 9H of the seal plate 9. The lip seal material 10 is attached inside of the through hole 9H of the seal plate 9, and an inner end thereof abuts on an outer circumference surface of the rotary shaft 4 as shown on a figure. A small diameter part 4K of an annular recess part is formed in an upper vicinity of the rotary shaft 4 on which the lip seal material slides. When the rotary shaft 4 displaces and the lip seal material 10 positions at the small diameter part 4K, contact with the rotary shaft 4 is cut off. <P>COPYRIGHT: (C)2006,JPO&NCIPI

Description

本発明は、たとえば気体レーザ発振器装置におけるガス循環用の電動コンプレッサとしてのブロワ等に適用できるターボ形高速回転機器に関する。   The present invention relates to a turbo-type high-speed rotating device that can be applied to, for example, a blower as an electric compressor for gas circulation in a gas laser oscillator device.

たとえばフロー型二酸化炭素ガスレーザ発振器装置の場合、炭酸ガスと他のガスの混合ガスを流しながら圧縮し、レーザ発振器に供給して共振させるようになっており、装置内にガス循環回路が構成されている。その循環回路の構成における一要素のブロワとしてターボ翼を高速で回転させてガスを圧縮し、レーザ発振器に供給するターボ形高速回転機器が使用されている。   For example, in the case of a flow type carbon dioxide gas laser oscillator device, it is compressed while flowing a mixed gas of carbon dioxide gas and other gas and supplied to the laser oscillator to resonate, and a gas circulation circuit is configured in the device. Yes. A turbo-type high-speed rotating device that compresses gas by rotating a turbo blade at high speed and supplies the gas to a laser oscillator is used as a blower as one element in the circuit configuration.

この種のターボ形高速回転機器は、ハウジング内の上方にターボ翼が回転可能に配設され、ガスを圧縮して排出する機構を設けるとともに、下方にはこのターボ翼を高速回転駆動させるモータが配設されている。そして、このモータの回転子とターボ翼ならびに回転軸等からなる回転体は、機械的な軸受方式で軸受けされ、オイルによる潤滑手段が併設されている。そのため、オイルミストが発生するが、このオイルミストがガス圧縮とともに排出されないよう真空ポンプで排気する方式が採用されている(特許文献1参照)。   In this type of turbo high-speed rotating device, a turbo blade is rotatably disposed above a housing, a mechanism for compressing and discharging gas is provided, and a motor for rotating the turbo blade at a high speed is provided below. It is arranged. The rotating body including the rotor of the motor, the turbo blade, the rotating shaft, and the like is supported by a mechanical bearing system and is provided with a lubricating means using oil. Therefore, although oil mist is generated, a method of exhausting with a vacuum pump is employed so that the oil mist is not discharged together with gas compression (see Patent Document 1).

このターボ形高速回転機器の具体的な構成は、図6に示すとおりで、ハウジング1の内方でその上方にターボ翼7が回転可能に配設され、同じく下方にはこのターボ翼7を高速回転駆動させるモータ2が配設され、両者が回転軸4にて連結されている。このモータ2はハウジング1の側に固設された電極コイル2Kと、この電極コイル2Kに対応して回転軸4に固設された回転子2Mで構成され、電極コイル2Kにインバータ3から電気エネルギーが供給される。   The specific configuration of the turbo-type high-speed rotating device is as shown in FIG. 6. A turbo blade 7 is rotatably disposed on the inside of the housing 1. A motor 2 for rotational driving is arranged, and both are connected by a rotating shaft 4. The motor 2 is composed of an electrode coil 2K fixed on the housing 1 side and a rotor 2M fixed to the rotary shaft 4 corresponding to the electrode coil 2K. Electric energy is supplied to the electrode coil 2K from the inverter 3. Is supplied.

回転軸4は上部軸受5と下部軸受6を介してハウジング1に対し、回転可能に保持されているが、この回転軸4の上方に形成された取付軸4Sにターボ翼7が固設されている。このモータ2と回転子2Mおよび回転軸4からなる回転体が軸受機構を構成する上部軸受5と下部軸受6に保持されている。なお、この上部軸受5と下部軸受6はモータ室M内に配設されている
ターボ翼7がモータ2によって高速回転駆動されると、ガスは吸気口1Kから吸入され、圧縮されて排気口1Hより排出される。この吸気口1Kから排気口1Hまでがガス圧縮室Cを形成する。この排気口1Hからのガスは上記したようにガス循環回路(図示せず)を経てレーザ発振器(図示せず)に供給される。
The rotary shaft 4 is rotatably held with respect to the housing 1 via an upper bearing 5 and a lower bearing 6. A turbo blade 7 is fixed to a mounting shaft 4 </ b> S formed above the rotary shaft 4. Yes. A rotating body including the motor 2, the rotor 2M, and the rotating shaft 4 is held by an upper bearing 5 and a lower bearing 6 that constitute a bearing mechanism. The upper bearing 5 and the lower bearing 6 are disposed in the motor chamber M. When the turbo blade 7 is driven to rotate at high speed by the motor 2, the gas is sucked from the inlet 1K, compressed, and exhausted 1H. More discharged. The gas compression chamber C is formed from the intake port 1K to the exhaust port 1H. The gas from the exhaust port 1H is supplied to a laser oscillator (not shown) through a gas circulation circuit (not shown) as described above.

ところで、回転軸4には図6に示すとおり、軸芯上に中空孔4Hが形成されているが、この中空孔4Hの下方部は内孔が上方拡がりのテーパ状をなし、これらの下方部位が潤滑用のオイルL内に浸漬されている。したがって、中空孔4Hの下方域に侵入している潤滑用のオイルLは、回転軸4の回転による遠心力の作用を受けて中空孔4Hの内方を上方に移動し、この作用で中空孔4Hはポンプ機能を発揮する。こうして潤滑用のオイルLは順次上方へ送り出され、射出孔4Tより外方に放出されてモータ2の冷却や上部軸受5と下部軸受6の潤滑を行なう。潤滑や冷却を終えた潤滑用のオイルLは再び下方のオイル槽1Yに溜められ、再び吸い上げられて循環する。   As shown in FIG. 6, the rotary shaft 4 has a hollow hole 4H formed on the shaft core. The lower part of the hollow hole 4H has a tapered shape with the inner hole expanding upward, and these lower parts Is immersed in the lubricating oil L. Accordingly, the lubricating oil L entering the lower region of the hollow hole 4H moves upward in the hollow hole 4H under the action of the centrifugal force caused by the rotation of the rotary shaft 4, and this action causes the hollow hole 4H to move upward. 4H demonstrates the pump function. Thus, the lubricating oil L is sequentially sent upward and discharged outward from the injection hole 4T to cool the motor 2 and lubricate the upper bearing 5 and the lower bearing 6. The lubricating oil L that has been lubricated and cooled is again stored in the lower oil tank 1Y, sucked up again, and circulated.

このように潤滑用のオイルLは、循環して上部軸受5や下部軸受6の潤滑を行なうが、この潤滑によって特にモータ室M内には噴霧状のオイルL(オイルミスト)が存在し浮遊することになる。モータ室Mにおけるこのオイルミストの存在は、上部軸受5と下部軸受6等における潤滑を良好にするが、このオイルミストがガス圧縮室Cに流入するとレーザ発振器などに流入し、レーザの発振機能を低下させる。   In this way, the lubricating oil L circulates to lubricate the upper bearing 5 and the lower bearing 6. By this lubrication, especially in the motor chamber M, sprayed oil L (oil mist) exists and floats. It will be. The presence of this oil mist in the motor chamber M improves the lubrication in the upper bearing 5 and the lower bearing 6 and the like, but when this oil mist flows into the gas compression chamber C, it flows into a laser oscillator and the like, and has a laser oscillation function. Reduce.

このことから、ハウジング1には上部軸受5の上方位置において区画壁Wが設けられ、ガス圧縮室Cとモータ室Mとは区画壁Wにて遮断されている。この区画壁Wには回転軸4が非接触で貫通できる範囲の最小径の貫通孔1Aが穿設され、回転軸4と協働するシール部Sが形成される。このシール部Sはたとえば図示例に示すラビリンスシール等が適用される。このラビリンスシールによるシール部Sは、回転軸4と貫通孔1Aとの間隙は通常数10ミクロンに設定されている。しかしながら、このラビリンスシール方式の場合は、回転軸4の周面と貫通孔1Aの内周面またはこのいずれかの面に複数段の小さい凹凸を設ける必要があり、加工が困難であるとともにコストが嵩む問題を有している。また、ラビリンスシール方式では間隙が数10ミクロンであり、この間隙で回転軸4が偏心している場合には回転軸4の振動による接触や融着もしくはシール間隙からの漏れ量が増大する。そのために、ラビリンスシールの加工精度や組立精度を高める必要があり、接触形のシール方式として円錐状で内周縁が回転軸4の外周面に摺接するリップシール材を利用してシールする方式も提案されている。   Therefore, the housing 1 is provided with a partition wall W at a position above the upper bearing 5, and the gas compression chamber C and the motor chamber M are blocked by the partition wall W. The partition wall W is formed with a through hole 1A having a minimum diameter that allows the rotary shaft 4 to pass through without contact, and a seal portion S that cooperates with the rotary shaft 4 is formed. For example, a labyrinth seal shown in the illustrated example is applied to the seal portion S. In the seal portion S by the labyrinth seal, the gap between the rotating shaft 4 and the through hole 1A is usually set to several tens of microns. However, in the case of this labyrinth seal method, it is necessary to provide a plurality of steps of unevenness on the peripheral surface of the rotating shaft 4 and the inner peripheral surface of the through-hole 1A or any one of these surfaces, which is difficult to process and costly. Has a bulky problem. Further, in the labyrinth seal system, the gap is several tens of microns, and when the rotary shaft 4 is eccentric in this gap, the amount of contact or fusion due to vibration of the rotary shaft 4 or leakage from the seal gap increases. Therefore, it is necessary to improve the processing accuracy and assembly accuracy of the labyrinth seal, and a contact-type sealing method is proposed by using a lip seal material in which the inner periphery is in sliding contact with the outer peripheral surface of the rotary shaft 4 Has been.

なお、モータ室Mは排気パイプRを介して外設した真空ポンプVPにて真空に排気される。これは上記したように、モータ室Mが潤滑用のオイルLのミストが充満しており、シール部Sの小さい隙間からガス圧縮室Cに漏洩するのを防止すためである。
特開2000−209815号公報
The motor chamber M is evacuated to vacuum by an external vacuum pump VP via an exhaust pipe R. This is to prevent the motor chamber M from being filled with the mist of the lubricating oil L and leaking into the gas compression chamber C through a small gap in the seal portion S as described above.
JP 2000-209815 A

このようなターボ形高速回転機器の製造過程においては、特に回転部がきわめて高速で回転駆動されるため少しの不釣合(アンバランス)の存在も許されない。したがって、回転部(回転体全体)の釣合を保障するために釣合試験が行われ、不釣合が存在した場合はその除去のための修正が行われる。釣合試験は、回転体部分を高速回転させて試験し測定するが、この場合前記したようにリップシール材が回転軸に接触しているとノイズが発生し、微少アンバランスの検知が不可能になる。このことは完全な釣合が得られない。
本発明はこのような問題を解決するターボ形高速回転機器を提供することを目的とする。
In the manufacturing process of such a turbo-type high-speed rotating device, since the rotating part is driven to rotate at a very high speed, the presence of a slight unbalance is not allowed. Therefore, a balance test is performed to ensure the balance of the rotating part (the entire rotating body), and if there is an unbalance, a correction is made to remove it. In the balance test, the rotating body part is tested and measured at high speed. In this case, noise is generated when the lip seal material is in contact with the rotating shaft as described above, and it is impossible to detect minute imbalances. become. This is not a perfect balance.
An object of the present invention is to provide a turbo-type high-speed rotating device that solves such problems.

本発明が提供するターボ形高速回転機器は、上記課題を解決するために、ガス圧縮室とポンプ室との区画壁における貫通孔と回転軸との間のシール機構をつぎのとおり改良する。区画壁には回転軸を貫通させる貫通孔が穿設されるとともにこの貫通孔と回転軸との間には、区画壁から内方に伸展された円錐状のリップシール材が設けられ、このリップシール材はポンプ組立後は回転軸全周面に接触し、ポンプ作動時は回転軸と前記貫通孔との間のシール機能を有する。他方、リップシール材が周面に接触する位置の近傍における回転軸に環状の凹部を形成するとともに、区画壁に対し回転軸をその軸心方向に変位させる手段を設ける。したがって、回転軸の変位によってその環状の凹部の位置がリップシール材位置に至り、リップシール材が回転軸の周面から離脱あるいは接触代が低減される。   In order to solve the above problems, the turbo-type high-speed rotating device provided by the present invention improves the sealing mechanism between the through hole and the rotating shaft in the partition wall between the gas compression chamber and the pump chamber as follows. A through-hole that penetrates the rotation shaft is formed in the partition wall, and a conical lip seal material extending inward from the partition wall is provided between the through-hole and the rotation shaft. The seal material contacts the entire circumferential surface of the rotary shaft after the pump is assembled, and has a sealing function between the rotary shaft and the through hole when the pump is operated. On the other hand, an annular recess is formed in the rotating shaft in the vicinity of the position where the lip seal material contacts the peripheral surface, and means for displacing the rotating shaft in the axial direction with respect to the partition wall is provided. Therefore, the position of the annular recess reaches the lip seal material position due to the displacement of the rotation shaft, and the lip seal material is detached from the peripheral surface of the rotation shaft or the contact allowance is reduced.

本発明が提供するターボ形高速回転機器は以上詳述したとおりであるから、つぎの効果を有する。
(1)製造工程における釣合修正作業においては、容易にリップシール材を回転軸と非接触の状況をつくることができ、完全な釣合修正を行うことができる。
以上の諸特性により経済的でかつ性能の優れたターボ形高速回転機器を提供する。
(2)本発明によればリップシール材の特徴である容易に数ミクロンオーダの微小間隙を実現でき、圧力損失の非常に大きい、シール機構を提供し、ガス消費量を削減することができる。
(3)リップシール材を円錐状に曲折する実施例の場合、スプリング効果をより充分に発揮でき、したがって製造におけるばらつきが存在しても初期の摺動トルクをこの円錐の角度変化で適切に緩和できる。
The turbo high-speed rotating device provided by the present invention is as described in detail above, and thus has the following effects.
(1) In the balance correction operation in the manufacturing process, the lip seal material can be easily brought into a non-contact state with the rotating shaft, and complete balance correction can be performed.
Provided is a turbo-type high-speed rotating device that is economical and excellent in performance due to the above characteristics.
(2) According to the present invention, it is possible to easily realize a minute gap on the order of several microns, which is a feature of the lip seal material, and to provide a sealing mechanism with a very large pressure loss, thereby reducing gas consumption.
(3) In the case of the embodiment in which the lip seal material is bent into a conical shape, the spring effect can be fully exerted, and therefore the initial sliding torque is appropriately reduced by changing the angle of the cone even if there is a variation in manufacturing. it can.

本発明は、ターボ翼が配設されたガス圧縮室と前記ターボ翼の軸受機構およびモータが配設されたモータ室を区画する区画壁をハウジングに設け、この区画壁に前記回転軸を貫通させる貫通孔を穿設し、この貫通孔と回転軸との間にリップ形のシール機構を設けた構成を基本とする。そして、このリップ形シール機構として機能するリップシール材が非運転時たとえば組立て前の釣合修正時には回転軸から離脱する状態が実現できる点に特徴を有する。もちろん、この離脱には接触がきわめて少ないすなわち接触代が低減され、釣合試験に影響を与えないような状態の接触は含まれるものとする。   According to the present invention, a gas compression chamber in which turbo blades are arranged, a partition wall that partitions the motor chamber in which the turbo blade bearing mechanism and the motor are arranged are provided in a housing, and the rotating shaft passes through the partition wall. A basic structure is such that a through-hole is formed and a lip-shaped sealing mechanism is provided between the through-hole and the rotating shaft. The lip seal material functioning as the lip-type seal mechanism is characterized in that it can be separated from the rotating shaft during non-operation, for example, when the balance before assembly is corrected. Of course, this disengagement includes contact in a state where contact is very small, that is, the contact allowance is reduced and does not affect the balance test.

この非運転時(組立て前)に回転軸と非接触状態を実現するためには、第1にリップシール材がシール位置に設置されていること、第2にこのシール材が接触する回転軸の位置の近傍における回転軸周面に一定幅の環状の凹部が形成されていること、および第3にハウジングと軸受機構あるいは回転軸と軸受機構が回転軸方向に相対的に変位できることの3つの構成が必要となる。すなわち、回転軸がリップシール材に対して回転軸の軸心方向に相対的に変位できる構成により、組立て前に回転部分を釣合試験機に水平状態で載架して釣合試験をするとき、リップシール材を回転軸と非接触状態が実現できる。本発明の最良の形態は、上記3つの構成要件を備え、かつこれらの機能を確実かつ容易に実現できる実施例である。   In order to realize a non-contact state with the rotary shaft during this non-operation (before assembly), first, the lip seal material is installed at the seal position, and second, the rotary shaft with which this seal material comes into contact. Three configurations that an annular concave portion having a constant width is formed on the circumferential surface of the rotating shaft in the vicinity of the position, and third, that the housing and the bearing mechanism or the rotating shaft and the bearing mechanism can be relatively displaced in the direction of the rotating shaft. Is required. That is, when the rotating shaft is mounted horizontally on the balance testing machine before the assembly, and the balance test is performed, the rotation shaft can be displaced relative to the lip seal material in the axial direction of the rotation shaft. The lip seal material can be in a non-contact state with the rotating shaft. The best mode of the present invention is an embodiment having the above-described three components and capable of realizing these functions reliably and easily.

上記3つの構成要件からなる本発明の構成を図1に示す。図1は図6と同様ターボ形高速回転機器の縦断面を示すが、上部軸受5を保持するための軸受保持部材8がハウジング1に設置され、その上方には区画壁に相当するシールプレート9が載架されて、ハウジング1に設置されている。このシールプレート9の貫通孔9Hに回転軸4が貫設されている。このシールプレート9の貫通孔9Hの内方にはリップシール材10が取り付けられ、その内方端が図示のとおり回転軸4の外周面に接している。このリップシール材10が摺接する回転軸4の上方近傍には環状の凹部である小径部4Kが形成されている。回転軸4が変位し小径部4Kにリップシール材10が位置すると回転軸4との接触が断たれる。なお、図1において11は軸受保持部材8とシールプレート9をハウジング1に固定するボルトであり、12は回転軸4とターボ翼7を浮遊させて保持する保持用のスプリングである。なお、図1において図6と同一の符号で示される部品は図6と同一であり、それらの機能、作用についての説明は省略する。   FIG. 1 shows the configuration of the present invention comprising the above three components. 1 shows a longitudinal section of a turbo-type high-speed rotating device as in FIG. 6, but a bearing holding member 8 for holding the upper bearing 5 is installed in the housing 1, and a seal plate 9 corresponding to a partition wall is provided above it. Is mounted on the housing 1. The rotating shaft 4 is provided through the through hole 9H of the seal plate 9. A lip seal material 10 is attached to the inner side of the through hole 9H of the seal plate 9, and its inner end is in contact with the outer peripheral surface of the rotating shaft 4 as shown in the figure. A small-diameter portion 4K, which is an annular recess, is formed in the vicinity of the upper portion of the rotating shaft 4 with which the lip seal material 10 is in sliding contact. When the rotary shaft 4 is displaced and the lip seal material 10 is positioned at the small diameter portion 4K, the contact with the rotary shaft 4 is cut off. In FIG. 1, 11 is a bolt for fixing the bearing holding member 8 and the seal plate 9 to the housing 1, and 12 is a holding spring for holding the rotating shaft 4 and the turbo blade 7 in a floating state. In FIG. 1, parts denoted by the same reference numerals as those in FIG. 6 are the same as those in FIG. 6, and descriptions of their functions and operations are omitted.

以上の構成において、以下図2に示す実施例1について、本発明のターボ形高速回転機器の構成、作動を説明する。実施例1は、回転軸4と軸受機構の上部軸受5および下部軸受6との間に相対的な変位を行わせる構成を採用し、リップシール材10を回転軸4から離脱させるものである。この変位を行わせる具体的な構成は、上部と下部の両軸受5、6の内径と、回転軸4の外径とのはめあい関係が、ゆるい嵌めあい関係にあり、両軸受5、6に対して回転軸4をその軸心方向に比較的容易に変位させることができるように構成されている。そのために、上部軸受5はそのアウターケースが軸受保持部材8に固定保持され、この上部軸受5、下部軸受6のインナーケースに対して回転軸4が外力などにより容易にスライド可能である。なお、上部軸受5と下部軸受6はアンギュラコンタクト形である。   In the above configuration, the configuration and operation of the turbo type high-speed rotating device of the present invention will be described with respect to the first embodiment shown in FIG. The first embodiment employs a configuration in which relative displacement is performed between the rotating shaft 4 and the upper bearing 5 and the lower bearing 6 of the bearing mechanism, and the lip seal material 10 is detached from the rotating shaft 4. The specific configuration for causing this displacement is that the fitting relationship between the inner diameters of the upper and lower bearings 5 and 6 and the outer diameter of the rotary shaft 4 is a loose fitting relationship. Thus, the rotary shaft 4 can be displaced relatively easily in the axial direction. Therefore, the outer bearing of the upper bearing 5 is fixedly held by the bearing holding member 8, and the rotary shaft 4 can be easily slid by the external force with respect to the inner cases of the upper bearing 5 and the lower bearing 6. The upper bearing 5 and the lower bearing 6 are angular contact types.

実施例1のターボ形高速回転機器を組み立てる際は、前述したように回転体の不釣合を除去する必要から釣合試験が行われるが、図2はこの釣合試験の状態を示す。回転体(ターボ翼7や回転軸4など)と上部と下部の両軸受5、6をターボ形高速回転機器より取り外し、釣合試験機13に載架する。この場合は、軸受保持部材8とシールプレート9を一体にして釣合試験機13に対してボルト11を利用して固定する。図2はこの状態を示している。釣合試験は回転軸4とターボ翼7を図示していない回転駆動機構にて高速回転させて行うが、この時、回転軸4にリップシール材10の内方端が接触しないようにさせる必要があり、図3に示すとおり、作動部材14にて外力を作用させて回転軸4を右方へ変位させる。すると、回転軸4は上部と下部の両軸受5、6に対してスライド可能であり、図3に示すとおり変位する。この変位によってリップシール材10は回転軸4から離脱し、あるいは接触代が低減して正常な釣合試験が保障される。なお、図2、図3において図6と同一の符号で示される部品は図6と同一であり、それらの機能、作用についての説明は省略する。   When assembling the turbo-type high-speed rotating device of the first embodiment, a balancing test is performed from the need to remove the unbalance of the rotating body as described above. FIG. 2 shows the state of this balancing test. The rotating body (such as the turbo blade 7 and the rotating shaft 4) and the upper and lower bearings 5 and 6 are removed from the turbo type high-speed rotating device and mounted on the balance testing machine 13. In this case, the bearing holding member 8 and the seal plate 9 are integrated and fixed to the balance testing machine 13 using the bolts 11. FIG. 2 shows this state. The balance test is performed by rotating the rotary shaft 4 and the turbo blade 7 at a high speed by a rotary drive mechanism (not shown). At this time, it is necessary to prevent the inner end of the lip seal material 10 from contacting the rotary shaft 4. As shown in FIG. 3, an external force is applied by the operating member 14 to displace the rotating shaft 4 to the right. Then, the rotating shaft 4 is slidable with respect to both the upper and lower bearings 5 and 6, and is displaced as shown in FIG. Due to this displacement, the lip seal material 10 is detached from the rotating shaft 4, or the contact allowance is reduced to ensure a normal balance test. 2 and 3 are the same as those shown in FIG. 6, and the description of their functions and operations is omitted.

本発明に関する実施例2を図4に示す。図4は図2と同様、ターボ翼7と回転軸4などターボ形高速回転機器の回転体部を取り出してその不釣合状況を試験するために釣合試験機13に載架した状態を示している。そして実施例2の特徴は、上部軸受5が軸受保持部材8に対して回転軸4の軸心方向にスライド可能に係合され、また下部軸受6が軸心方向にスライド可能に係合されていること、および特に上部軸受5のアウターレースと軸受保持部材8との間には圧縮バネ15が介在されていることである。したがって図5に示すように釣合試験をするに際して水平方向にして釣合試験機13に載架すると圧縮バネ15が伸びその弾力にて上部軸受5が右方へと変位させられる。上部軸受5と回転軸4とは一体的に固着されているから上部軸受5の変位にしたがって回転軸4も軸心方向に変位し、図5に示すとおり、小径部4Kがリップシール材10の位置に至る。この変位によってリップシール材10の内方端は回転軸4から離脱し、あるいは接触代が低減して正常な釣合試験が保障される。なお、図4、図5において図6と同一の符号で示される部品は図6と同一であり、それらの機能、作用についての説明は省略する。   A second embodiment relating to the present invention is shown in FIG. FIG. 4 shows a state where the rotating body part of the turbo type high-speed rotating device such as the turbo blade 7 and the rotating shaft 4 is taken out and mounted on the balance testing machine 13 in order to test the unbalanced state as in FIG. . The feature of the second embodiment is that the upper bearing 5 is engaged with the bearing holding member 8 so as to be slidable in the axial direction of the rotary shaft 4, and the lower bearing 6 is slidably engaged in the axial direction. And in particular, a compression spring 15 is interposed between the outer race of the upper bearing 5 and the bearing holding member 8. Therefore, as shown in FIG. 5, when the balance test is performed in the horizontal direction and mounted on the balance tester 13, the compression spring 15 extends and the upper bearing 5 is displaced rightward by the elasticity. Since the upper bearing 5 and the rotating shaft 4 are integrally fixed, the rotating shaft 4 is also displaced in the axial direction in accordance with the displacement of the upper bearing 5. As shown in FIG. To the position. Due to this displacement, the inner end of the lip seal material 10 is detached from the rotating shaft 4, or the contact allowance is reduced to ensure a normal balance test. 4 and 5 are the same as those shown in FIG. 6 and the description of their functions and operations is omitted.

本発明が提供する高速回転機器は以上詳述したとおりであるが、発明の構成は上記あるいは実施例1あるいは2に示される構成に限定されるものではなく、種々の変形例を包含する。
まず、回転軸4に形成する凹部については、図1〜図5に示すように回転軸4を段付きで小径化する方法以外に、断面半円状の環状凹部を形成する形とすることもできる。要は回転軸4が軸心方向に変位したとき、ハウジング1に対して固定的に保持されているリップシール材10の内方端が回転軸4の周面に対し非接触あるいは接触代が低減する状態が形成されれば良く、この環状凹部については特定の形に限定されない。また、リップシール材10の曲折方向も図示例と逆の方向にすることもでき、さらにこのリップシール材10の曲折方向の関連で回転軸4の変位方向を上記と逆にすることもできる。リップシール材10の形も図示例のような断面が曲面を有する円錐状のみならず、断面が直線状の円錐状のものも含まれる。回転軸4の軸心方向への変位をコイル状の圧縮バネ15にて行わせる例を示したが、皿状のバネや板状のバネを利用することもできる。ガス圧縮室Cとモータ室Mを区画する区画壁をハウジング1とは別個のシールプレート9で構成する例で示したが、ハウジング1の一部で構成することもできる。図示例の場合、軸受保持部材8と別個の部材としたがこの両者を一体とすることも可能である。また、ターボ形高速回転機器において本発明の特徴に直接関係しない構成たとえば上部と下部の両軸受5、6の潤滑機構などについても図示例に限定されない。さらに、図2から図5に示す釣合試験機13において、下部軸受6を直接釣合試験機13に架設する例を示したが、下部軸受6の保持枠を介して架設するようにすることも可能で釣合試験方法や釣合試験機の構成については、上記ならびに図示例には限定されない。なお、本発明はレーザ発振器にガスを圧縮して供給する機器以外の高速回転機器としても利用可能である。
The high-speed rotating device provided by the present invention is as described in detail above, but the configuration of the invention is not limited to the configuration described above or in the first or second embodiment, and includes various modifications.
First, the concave portion formed in the rotating shaft 4 may be formed in a shape in which an annular concave portion having a semicircular cross section is formed in addition to the step of reducing the diameter of the rotating shaft 4 as shown in FIGS. it can. In short, when the rotary shaft 4 is displaced in the axial direction, the inner end of the lip seal material 10 fixedly held with respect to the housing 1 is not in contact with the peripheral surface of the rotary shaft 4 or the contact allowance is reduced. It is sufficient that a state to be formed is formed, and the annular recess is not limited to a specific shape. Also, the bending direction of the lip seal material 10 can be reversed from the illustrated example, and the displacement direction of the rotary shaft 4 can be reversed with respect to the bending direction of the lip seal material 10. The shape of the lip seal material 10 includes not only a conical shape having a curved section as in the illustrated example, but also a conical shape having a straight section. Although the example which performs the displacement to the axial center direction of the rotating shaft 4 with the coil-shaped compression spring 15 was shown, a plate-shaped spring and a plate-shaped spring can also be utilized. Although an example in which the partition wall that partitions the gas compression chamber C and the motor chamber M is configured by the seal plate 9 that is separate from the housing 1 is shown, the partition wall may be configured by a part of the housing 1. In the case of the illustrated example, the bearing holding member 8 and a separate member are used, but it is also possible to integrate both. Further, the configuration of the turbo type high-speed rotating device not directly related to the features of the present invention, such as the lubrication mechanism of the upper and lower bearings 5 and 6, is not limited to the illustrated example. Further, in the balance testing machine 13 shown in FIGS. 2 to 5, the example in which the lower bearing 6 is directly mounted on the balance testing machine 13 has been shown. However, the lower bearing 6 is mounted via the holding frame of the lower bearing 6. The configuration of the balance test method and the balance test machine is not limited to the above and illustrated examples. The present invention can also be used as a high-speed rotating device other than a device that compresses and supplies gas to a laser oscillator.

本発明の構成を示す縦断面図である。It is a longitudinal cross-sectional view which shows the structure of this invention. 本発明の実施例1の構成を説明するための図である。It is a figure for demonstrating the structure of Example 1 of this invention. 本発明の実施例1の機能を説明するための図である。It is a figure for demonstrating the function of Example 1 of this invention. 本発明の実施例2の構成を説明するための図である。It is a figure for demonstrating the structure of Example 2 of this invention. 本発明の実施例2の機能を説明するための図である。It is a figure for demonstrating the function of Example 2 of this invention. 従来における高速回転機器の構成を示す縦断面図である。It is a longitudinal cross-sectional view which shows the structure of the conventional high-speed rotation apparatus.

符号の説明Explanation of symbols

1 ハウジング
1A 貫通孔
1H 排気口
1K 吸気口
1Y オイル槽
2 モータ
2K 電極コイル
2M 回転子
3 インバータ
4 回転軸
4S 取付軸
4H 中空孔
4K 小径部
4T 射出孔
5 上部軸受
6 下部軸受
7 ターボ翼
8 軸受保持部材
9 シールプレート
9H 貫通孔
10 リップシール材
11 ボルト
12 スプリング
13 釣合試験機
14 作動部材
15 圧縮バネ
R 排気パイプ
VP 真空ポンプ
C ガス圧縮室
M モータ室
S シール部
L オイル
W 区画壁
1 Housing 1A Through hole
1H Exhaust port 1K Intake port 1Y Oil tank 2 Motor 2K Electrode coil 2M Rotor 3 Inverter 4 Rotating shaft 4S Mounting shaft 4H Hollow hole 4K Small diameter portion 4T Injection hole 5 Upper bearing 6 Lower bearing 7 Turbo blade 8 Bearing holding member 9 Seal plate 9H Through-hole 10 Lip seal material 11 Bolt 12 Spring 13 Balance testing machine 14 Actuating member 15 Compression spring R Exhaust pipe VP Vacuum pump C Gas compression chamber M Motor chamber S Seal portion L Oil W Partition wall

Claims (3)

ガス圧縮を行なうターボ翼と、このターボ翼を高速回転駆動するモータと、この両者を連結する垂直に配設された回転軸と、この回転軸を回転自在に保持する上部軸受と下部軸受からなる軸受機構とをハウジング内に設け、前記ターボ翼が配設されたガス圧縮室と前記軸受機構およびモータが配設されたモータ室を区画する区画壁をハウジングに設置し、この区画壁に前記回転軸を貫通させる貫通孔を穿設するとともにこの貫通孔と回転軸との間には、区画壁から内方に伸展された円錐状のリップシール材が設けられ、このリップシール材はポンプ組立後は回転軸全周面に接触し、ポンプ作動時は回転軸と前記貫通孔との間にシール機能を有するよう構成されたターボ形高速回転機器において、リップシール材が周面に接触する位置の近傍における回転軸に環状の凹部を形成するとともに、リップシール材に対し回転軸をその軸心方向に変位させる手段を設け、回転軸の変位によって前記環状の凹部の位置がリップシール材位置に至り、リップシール材が回転軸の周面から離脱あるいは接触代が低減され得るようにしたことを特徴とするターボ形高速回転機器。   A turbo blade that performs gas compression, a motor that drives the turbo blade to rotate at high speed, a rotary shaft that is vertically disposed to connect the two, and an upper bearing and a lower bearing that rotatably hold the rotary shaft. A bearing mechanism is provided in the housing, and a gas compression chamber in which the turbo blades are disposed and a partition wall that partitions the motor chamber in which the bearing mechanism and the motor are disposed are installed in the housing, and the rotation is performed on the partition wall. A through-hole that penetrates the shaft is drilled, and a conical lip seal material extending inward from the partition wall is provided between the through-hole and the rotating shaft. Is a turbo high-speed rotating device configured to have a sealing function between the rotating shaft and the through hole when the pump is operated. In the vicinity An annular recess is formed in the rotating shaft, and a means for displacing the rotating shaft in the axial direction of the lip seal material is provided, and the position of the annular recess reaches the lip seal material position due to the displacement of the rotating shaft, A turbo type high-speed rotating device characterized in that the lip seal material can be detached from the peripheral surface of the rotating shaft or the contact allowance can be reduced. 変位させる手段は、回転軸が軸受機構に対して軸心方向に摺動可能に係合されるよう構成され、回転軸心方向に外部力が作用するとき回転軸が変位することを特徴とする請求項1記載のターボ形高速回転機器。   The means for displacing is configured such that the rotating shaft is slidably engaged with the bearing mechanism in the axial direction, and the rotating shaft is displaced when an external force acts in the rotating axis direction. The turbo-type high-speed rotating device according to claim 1. 変位させる手段は、ハウジングに対して軸受機構を軸心方向に摺動自在に係合させるとともに、ハウジングと軸受機構との間に圧縮形弾性手段を介設して構成したことを特徴とする請求項1記載のターボ形高速回転機器。
The means for displacing is configured such that the bearing mechanism is slidably engaged with the housing in the axial direction, and a compression-type elastic means is interposed between the housing and the bearing mechanism. Item 4. A turbo-type high-speed rotating device according to item 1.
JP2004198633A 2004-07-05 2004-07-05 Turbo type high speed rotating equipment Expired - Fee Related JP4639666B2 (en)

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