JP2006014592A5 - - Google Patents

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Publication number
JP2006014592A5
JP2006014592A5 JP2005183282A JP2005183282A JP2006014592A5 JP 2006014592 A5 JP2006014592 A5 JP 2006014592A5 JP 2005183282 A JP2005183282 A JP 2005183282A JP 2005183282 A JP2005183282 A JP 2005183282A JP 2006014592 A5 JP2006014592 A5 JP 2006014592A5
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JP
Japan
Prior art keywords
commutation
coil assembly
angle
planar motor
displacement
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2005183282A
Other languages
English (en)
Japanese (ja)
Other versions
JP2006014592A (ja
JP4051383B2 (ja
Filing date
Publication date
Priority claimed from US10/874,691 external-priority patent/US7205741B2/en
Application filed filed Critical
Publication of JP2006014592A publication Critical patent/JP2006014592A/ja
Publication of JP2006014592A5 publication Critical patent/JP2006014592A5/ja
Application granted granted Critical
Publication of JP4051383B2 publication Critical patent/JP4051383B2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

JP2005183282A 2004-06-24 2005-06-23 平面モータの初期化方法、平面モータ、リソグラフィ装置、およびデバイス製造方法 Expired - Lifetime JP4051383B2 (ja)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US10/874,691 US7205741B2 (en) 2004-06-24 2004-06-24 Planar motor initialization method, planar motor, lithographic apparatus and device manufacturing method

Publications (3)

Publication Number Publication Date
JP2006014592A JP2006014592A (ja) 2006-01-12
JP2006014592A5 true JP2006014592A5 (enExample) 2007-08-02
JP4051383B2 JP4051383B2 (ja) 2008-02-20

Family

ID=35504961

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2005183282A Expired - Lifetime JP4051383B2 (ja) 2004-06-24 2005-06-23 平面モータの初期化方法、平面モータ、リソグラフィ装置、およびデバイス製造方法

Country Status (2)

Country Link
US (1) US7205741B2 (enExample)
JP (1) JP4051383B2 (enExample)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US8680803B2 (en) 2007-07-17 2014-03-25 Brooks Automation, Inc. Substrate processing apparatus with motors integral to chamber walls
US8803513B2 (en) 2007-06-27 2014-08-12 Brooks Automation, Inc. Multiple dimension position sensor
US9024488B2 (en) 2007-06-27 2015-05-05 Brooks Automation, Inc. Robot drive with magnetic spindle bearings

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Publication number Priority date Publication date Assignee Title
US7283140B2 (en) * 2005-06-21 2007-10-16 Microsoft Corporation Texture montage
JP2007068256A (ja) * 2005-08-29 2007-03-15 Canon Inc ステージ装置の制御方法
US8659205B2 (en) 2007-06-27 2014-02-25 Brooks Automation, Inc. Motor stator with lift capability and reduced cogging characteristics
US8823294B2 (en) 2007-06-27 2014-09-02 Brooks Automation, Inc. Commutation of an electromagnetic propulsion and guidance system
JP5416104B2 (ja) * 2007-06-27 2014-02-12 ブルックス オートメーション インコーポレイテッド セルフベアリングモータ用位置フィードバック
US9752615B2 (en) * 2007-06-27 2017-09-05 Brooks Automation, Inc. Reduced-complexity self-bearing brushless DC motor
US7830495B2 (en) * 2007-07-10 2010-11-09 Asml Netherlands B.V. Lithographic apparatus and position sensor
US9465305B2 (en) 2010-05-18 2016-10-11 Nikon Corporation Method for determining a commutation offset and for determining a compensation map for a stage
CN101834437B (zh) * 2010-05-21 2012-07-04 浙江大学 一种高压直流换流器换相重叠角的确定方法
CN102607388B (zh) * 2012-02-17 2014-09-24 清华大学 平面电机动子位移测量装置及方法
CN102607391B (zh) * 2012-03-01 2014-06-18 清华大学 一种平面电机动子位移的测量方法
JP6394967B2 (ja) * 2012-10-02 2018-09-26 株式会社ニコン 移動体装置、露光装置、及びデバイス製造方法
CN103973172B (zh) 2013-01-25 2016-09-28 上海微电子装备有限公司 一种动线圈式磁浮平面电机磁对准系统及其对准方法
US9250514B2 (en) 2013-03-11 2016-02-02 Applied Materials, Inc. Apparatus and methods for fabricating a photomask substrate for EUV applications
CN104104198B (zh) * 2013-04-15 2017-02-08 上海微电子装备有限公司 一种动线圈型磁浮电机及其磁角度检测方法
CN104143936A (zh) * 2013-05-08 2014-11-12 上海微电子装备有限公司 动线圈型磁浮电机的磁对准方法及系统
CN104143945B (zh) * 2013-05-08 2017-08-29 上海微电子装备（集团）股份有限公司 动线圈型磁浮电机的磁对准方法及系统
WO2021233615A1 (en) * 2020-05-20 2021-11-25 Asml Netherlands B.V. Magnet assembly, coil assembly, planar motor, positioning device and lithographic apparatus

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6246204B1 (en) * 1994-06-27 2001-06-12 Nikon Corporation Electromagnetic alignment and scanning apparatus
JP4362975B2 (ja) * 1998-04-10 2009-11-11 株式会社ニコン リニアモーターコイル、コイル、リニアモーター、電気モーター、リニアモーターの製造方法、電気モーターの製造方法、ステージ装置、露光装置
TW591342B (en) * 2000-11-30 2004-06-11 Asml Netherlands Bv Lithographic projection apparatus and integrated circuit manufacturing method using a lithographic projection apparatus
US6580260B2 (en) * 2001-04-19 2003-06-17 Nikon Corporation PWM feedback control by using dynamic pulse-to-pulse error compensation

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US8803513B2 (en) 2007-06-27 2014-08-12 Brooks Automation, Inc. Multiple dimension position sensor
US9024488B2 (en) 2007-06-27 2015-05-05 Brooks Automation, Inc. Robot drive with magnetic spindle bearings
US8680803B2 (en) 2007-07-17 2014-03-25 Brooks Automation, Inc. Substrate processing apparatus with motors integral to chamber walls

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