JP2006013480A5 - - Google Patents
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- JP2006013480A5 JP2006013480A5 JP2005154536A JP2005154536A JP2006013480A5 JP 2006013480 A5 JP2006013480 A5 JP 2006013480A5 JP 2005154536 A JP2005154536 A JP 2005154536A JP 2005154536 A JP2005154536 A JP 2005154536A JP 2006013480 A5 JP2006013480 A5 JP 2006013480A5
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- JP
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- Prior art keywords
- conductive layer
- insulating film
- forming
- insulating
- layer
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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- 239000004065 semiconductor Substances 0.000 claims 29
- 239000000126 substance Substances 0.000 claims 15
- 239000000463 material Substances 0.000 claims 9
- 239000000758 substrate Substances 0.000 claims 7
- 239000011147 inorganic material Substances 0.000 claims 6
- 229910010272 inorganic material Inorganic materials 0.000 claims 6
- 239000011368 organic material Substances 0.000 claims 6
- 238000004519 manufacturing process Methods 0.000 claims 3
- 239000004020 conductor Substances 0.000 claims 1
Claims (8)
前記導電層上に形成された絶縁膜と、An insulating film formed on the conductive layer;
前記絶縁層上に形成された半導体層と、を有し、A semiconductor layer formed on the insulating layer,
前記導電層に含有された前記物質は、前記絶縁表面に接していることを特徴とする半導体装置。The semiconductor device, wherein the substance contained in the conductive layer is in contact with the insulating surface.
前記導電層上に形成され、有機材料からなる第1の絶縁膜と、
前記第1の絶縁膜上に形成され、無機材料からなる第2の絶縁膜と、
前記第2の絶縁膜上に形成された半導体層と、を有し、
前記導電層に含有された前記物質は、前記絶縁表面に接していることを特徴とする半導体装置。 Formed over a substrate having an insulating surface, of the material forming the insulating surface, the same material as at least one is contained conductive layer,
It is formed on the conductive layer, a first insulating film made of an organic material,
Formed on the first insulating film, a second insulating film made of an inorganic material,
A semiconductor layer formed on the second insulating film ,
The semiconductor device, wherein the substance contained in the conductive layer is in contact with the insulating surface.
前記導電層は液滴吐出法により形成されたことを特徴とする半導体装置。A semiconductor device, wherein the conductive layer is formed by a droplet discharge method.
前記第1の導電層上に形成された絶縁膜と、
前記絶縁膜上に形成された第1の半導体層と、
前記第1の半導体層上に形成された一導電型を有する第2の半導体層と、
前記第2の半導体層上に形成され、前記第2の半導体層を形成する物質のうち、少なくとも一つと同じ物質が含有された第2の導電層と、を有し、
前記第1の導電層に含有された前記物質は、前記絶縁表面に接しており、
前記第2の導電層に含有された前記物質は、前記第2の半導体層に接していることを特徴とする半導体装置。 Formed over a substrate having an insulating surface, of the material forming the insulating surface, a first conductive layer of the same material as at least one is contained,
An insulating film made form the first conductive layer,
A first semiconductor layer made form on prior Symbol insulating film,
A second semiconductor layer having one conductivity type formed on the first semiconductor layer;
A second conductive layer formed on the second semiconductor layer and containing at least one of the substances forming the second semiconductor layer ;
The substance contained in the first conductive layer is in contact with the insulating surface;
The semiconductor device, wherein the substance contained in the second conductive layer is in contact with the second semiconductor layer.
前記第1の導電層上に形成され、有機材料からなる第1の絶縁膜と、
前記第1の絶縁膜上に形成され、無機材料からなる第2の絶縁膜と、
前記第2の絶縁膜上に形成された第1の半導体層と、
前記第1の半導体層上に形成された一導電型を有する第2の半導体層と、
前記第2の半導体層上に形成され、前記第2の半導体層を形成する物質のうち、少なくとも一つと同じ物質が含有された第2の導電層と、
前記第2の導電層上に形成され、有機材料からなる第3の絶縁膜と、
前記第3の絶縁膜上に形成され、無機材料からなる第4の絶縁膜と、を有し、
前記第1の導電層に含有された前記物質は、前記絶縁表面に接しており、
前記第2の導電層に含有された前記物質は、前記第2の半導体層に接していることを特徴とする半導体装置。 Formed over a substrate having an insulating surface, of the material forming the insulating surface, a first conductive layer of the same material as at least one is contained,
It is formed on the first conductive layer, a first insulating film made of an organic material,
Formed on the first insulating film, a second insulating film made of an inorganic material,
A first semiconductor layer formed on the second insulating film,
A second semiconductor layer having one conductivity type formed on the first semiconductor layer;
A second conductive layer formed on the second semiconductor layer and containing at least one of the materials forming the second semiconductor layer; and
It is formed on the second conductive layer, a third insulating film formed of an organic material,
It formed on the third insulating film, a fourth insulating film made of an inorganic material, and
The substance contained in the first conductive layer is in contact with the insulating surface;
The semiconductor device, wherein the substance contained in the second conductive layer is in contact with the second semiconductor layer.
前記導電層上に絶縁膜を形成し、Forming an insulating film on the conductive layer;
前記絶縁膜上に半導体層を形成し、Forming a semiconductor layer on the insulating film;
前記導電層に含有された前記物質は、前記絶縁表面に接していることを特徴とする半導体装置の作製方法。The method for manufacturing a semiconductor device, wherein the substance contained in the conductive layer is in contact with the insulating surface.
前記導電層上に、有機材料からなる第1の絶縁膜を形成し、
前記第1の絶縁膜上に、無機材料からなる第2の絶縁膜を形成し、
前記第2の絶縁膜上に半導体層を形成し、
前記導電層に含有された前記物質は、前記絶縁表面に接していることを特徴とする半導体装置の作製方法。 On a substrate having an insulating surface , a conductive layer containing at least one of the substances forming the insulating surface is formed by a droplet discharge method .
On the conductive layer, forming a first insulating film made of an organic material,
On the first insulating film, forming a second insulating film made of an inorganic material,
The semi-conductor layer is formed on the second insulating film,
The method for manufacturing a semiconductor device , wherein the substance contained in the conductive layer is in contact with the insulating surface .
前記第1の導電層上に、有機材料からなる第1の絶縁膜を形成し、
前記第1の絶縁膜上に、無機材料からなる第2の絶縁膜を形成し、
前記第2の絶縁膜上に第1の半導体層を形成し、
前記第1の半導体層上に、一導電型を有する第2の半導体層を形成し、
前記第2の半導体層上に、前記第2の半導体層を形成する物質のうち、少なくとも一つと同じ物質が含有された第2の導電層を液滴吐出法により形成し、
前記第2の導電層上に、有機材料からなる第3の絶縁膜を形成し、
前記第3の絶縁膜上に、無機材料からなる第4の絶縁膜を形成し、
前記第1の導電層に含有された前記物質は、前記絶縁表面に接しており、
前記第2の導電層に含有された前記物質は、前記第2の半導体層に接していることを特徴とする半導体装置の作製方法。 Forming a first conductive layer containing at least one of the substances forming the insulating surface on a substrate having an insulating surface by a droplet discharge method ;
Said first conductive layer, forming a first insulating film made of an organic material,
On the first insulating film, forming a second insulating film made of an inorganic material,
The first half conductor layer is formed on the second insulating film,
Forming a second semiconductor layer having one conductivity type on the first semiconductor layer;
On the second semiconductor layer, of the material forming said second semiconductor layer, a second conductive layer with the same material as at least one is contained is formed by a droplet discharge method,
Said second conductive layer, forming a third insulating film formed of an organic material,
On the third insulating film, forming a fourth insulating film made of an inorganic material,
The substance contained in the first conductive layer is in contact with the insulating surface;
The method for manufacturing a semiconductor device, wherein the substance contained in the second conductive layer is in contact with the second semiconductor layer .
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2005154536A JP5089027B2 (en) | 2004-05-28 | 2005-05-26 | Semiconductor device |
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2004159939 | 2004-05-28 | ||
JP2004159939 | 2004-05-28 | ||
JP2005154536A JP5089027B2 (en) | 2004-05-28 | 2005-05-26 | Semiconductor device |
Publications (3)
Publication Number | Publication Date |
---|---|
JP2006013480A JP2006013480A (en) | 2006-01-12 |
JP2006013480A5 true JP2006013480A5 (en) | 2008-07-10 |
JP5089027B2 JP5089027B2 (en) | 2012-12-05 |
Family
ID=35780280
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2005154536A Expired - Fee Related JP5089027B2 (en) | 2004-05-28 | 2005-05-26 | Semiconductor device |
Country Status (1)
Country | Link |
---|---|
JP (1) | JP5089027B2 (en) |
Families Citing this family (10)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPWO2007099689A1 (en) * | 2006-02-28 | 2009-07-16 | パイオニア株式会社 | Organic transistor and manufacturing method thereof |
WO2007099690A1 (en) * | 2006-02-28 | 2007-09-07 | Pioneer Corporation | Organic transistor and method for manufacturing same |
US7678701B2 (en) * | 2006-07-31 | 2010-03-16 | Eastman Kodak Company | Flexible substrate with electronic devices formed thereon |
JP5205894B2 (en) * | 2007-09-21 | 2013-06-05 | 大日本印刷株式会社 | Organic semiconductor device, organic semiconductor device manufacturing method, organic transistor array, and display |
JP5489429B2 (en) * | 2008-07-09 | 2014-05-14 | 富士フイルム株式会社 | Thin film field effect transistor |
EP2172804B1 (en) * | 2008-10-03 | 2016-05-11 | Semiconductor Energy Laboratory Co, Ltd. | Display device |
KR101988341B1 (en) | 2009-09-04 | 2019-06-12 | 가부시키가이샤 한도오따이 에네루기 켄큐쇼 | Light-emitting device and method for manufacturing the same |
JP5886491B2 (en) * | 2010-11-12 | 2016-03-16 | 株式会社半導体エネルギー研究所 | Method for manufacturing semiconductor device |
KR102238180B1 (en) | 2014-08-05 | 2021-04-08 | 엘지디스플레이 주식회사 | Flexible display device and method of fabricating the same |
EP3848977B1 (en) * | 2018-09-03 | 2024-06-26 | FUJIFILM Corporation | Organic thin film transistor and method of manufacturing organic thin film transistor |
Family Cites Families (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS6018152B2 (en) * | 1976-04-23 | 1985-05-09 | 工業技術院長 | Method for manufacturing solar cell device |
JP3047246B2 (en) * | 1990-09-26 | 2000-05-29 | 株式会社リコー | DRAM battery backup method |
JP4094179B2 (en) * | 1998-08-21 | 2008-06-04 | 株式会社半導体エネルギー研究所 | Method for manufacturing semiconductor device |
JP3787839B2 (en) * | 2002-04-22 | 2006-06-21 | セイコーエプソン株式会社 | Device manufacturing method, device and electronic apparatus |
JP4490650B2 (en) * | 2002-04-26 | 2010-06-30 | 東芝モバイルディスプレイ株式会社 | EL display device driving method and EL display device |
-
2005
- 2005-05-26 JP JP2005154536A patent/JP5089027B2/en not_active Expired - Fee Related
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