JP2006013187A - Manufacturing system, and method of manufacturing semiconductor device - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a manufacturing system wherein situations of examination devices are simultaneously grasped remotely (at a distance place) in a semiconductor device manufacture line including the plurality of examination devices, and judgement on results of examinations and an instruction of next processing are easily performed. <P>SOLUTION: A manufacturing system utilizes a manufacture execution system (MES) and is comprised of a plurality of examination devices 13a,..., 13n, an MES server 11 and MES clients 12a,..., 12m or the like. The MES server 11 manages examination implementations and examination results in the examination devices 13a,..., 13n. Each of the MES clients 12a,..., 12m includes: a device operating state list display for displaying a list of working states of the examination devices 13a,..., 13n; an examination result/lot next processing designation display for displaying an examined result of an examination target lot; and an examination target lot next processing designating section for inputting an instruction of next processing for the examination target lot. <P>COPYRIGHT: (C)2006,JPO&NCIPI

Description

  The present invention relates to a manufacturing system and a method of manufacturing a semiconductor device, and more particularly to a technique that is effective when applied to a semiconductor device manufacturing system using MES (Manufacturing Execution System).

  For example, as a technique studied by the present inventors, the following technique can be considered for a semiconductor device manufacturing system using MES.

  MES (Manufacturing Execution System) is an information system for supporting and managing the implementation of manufacturing and manufacturing plans, collecting data generated at manufacturing sites, grasping the status of constantly changing production resources, and manufacturing processes. This is a production information management system that integrates production planning and management / control, such as monitoring / control, production history information management, quality management, production schedule, etc., to close the gap with manufacturing implementation.

  The MES is composed of, for example, a MES server and a MES client, and each is connected via a network. The MES server is a computer that performs lot conveyance, start instruction, processing condition instruction, inspection data collection, and the like. The MES client is a computer that transmits to the MES server an instruction for processing such as start and completion regarding a lot from a worker, and extracts and displays various data stored in the MES server.

  In the manufacturing process of a semiconductor device, a lot is inspected by using an inspection apparatus between various process steps, and the data is collected to perform process management. At that time, it is necessary to grasp the progress of inspection of a plurality of inspection apparatuses and promptly instruct next processing.

In Patent Document 1, as the inspection apparatus capable of grasping in real time the wafer status such as the inspection status and location of the inspected object inside the apparatus body even during the inspection, the location of the semiconductor wafer and the progress of the inspection at the time of inspection are disclosed. A technique of providing a state display processing means for displaying a state of a semiconductor wafer including a display on a display device is disclosed.
Japanese Patent Laid-Open No. 9-237810 (page 8, FIG. 20)

  By the way, as a result of examination of the above-described technique by the present inventor, the following has been clarified.

  For example, in order to grasp the progress of inspection on a conventional MES client, it is necessary to specify an individual inspection device among a plurality of inspection devices and inquire about the inspection status. Could not be grasped efficiently on the client. Therefore, in order to recognize the timing of the end of inspection in a timely manner, determine the result, and determine the next processing of the lot, when the lot is inspected, the worker in charge of the process will inspect with the inspection equipment It was necessary to monitor the progress directly.

  Further, with the technology of Patent Document 1, it is possible to grasp the status of a plurality of inspection apparatuses, but it is not possible to efficiently determine the inspection result and instruct the next process.

  SUMMARY OF THE INVENTION Accordingly, an object of the present invention is to be able to grasp the status of an inspection apparatus in a lump (remote location) in a batch in a manufacturing process of a semiconductor device or the like having a plurality of inspection apparatuses, and to perform inspection result determination and subsequent processing. An object of the present invention is to provide a manufacturing system that can easily give instructions.

  The above and other objects and novel features of the present invention will be apparent from the description of this specification and the accompanying drawings.

  Of the inventions disclosed in the present application, the outline of typical ones will be briefly described as follows.

  That is, the manufacturing system according to the present invention uses a manufacturing execution system (MES), and includes a plurality of inspection devices, servers, clients, and the like. The server manages inspection execution and inspection results in the inspection apparatus. The client displays a first display means (apparatus operation state list screen) for displaying a list of operating conditions of the inspection apparatus, and a second display means (inspection result / lot next process designation screen) for displaying the inspection result of the inspection target lot. And means for inputting an instruction for the next processing for the inspection target lot (inspection target lot next processing specifying unit). Since the first display means and the second display means are interlocked, the status of the inspection apparatus can be grasped collectively, and the determination of the inspection result and the instruction for the next processing can be easily performed.

  Of the inventions disclosed in the present application, effects obtained by typical ones will be briefly described as follows.

  (1) Since the operation status of multiple inspection devices, inspection judgment required devices and lots for each person in charge can be grasped clearly and in a timely manner, the waiting time for lot judgment processing on the inspection device is reduced and cycle time is shortened. Is possible.

  (2) The operator can easily grasp the latest inspection progress status remotely without moving in front of the inspection apparatus, and can perform inspection processing determination / lot next processing designation operation by a series of screen switching. This eliminates the need for the operator to move to the inspection apparatus, and enables reduction in work man-hours and manufacturing costs.

  Hereinafter, embodiments of the present invention will be described in detail with reference to the drawings. Note that components having the same function are denoted by the same reference symbols throughout the drawings for describing the embodiment, and the repetitive description thereof will be omitted.

  FIG. 1 is a block diagram showing a configuration of a semiconductor device manufacturing system according to an embodiment of the present invention, and FIG. 2 is a device operating state list screen displayed on a MES client in the semiconductor device manufacturing system of the present embodiment. FIG. 3 is a view showing an inspection result / lot next process designation screen displayed on the MES client, and FIG. 4 is a flowchart showing a work procedure.

  First, an example of a configuration of a semiconductor device manufacturing system according to the present embodiment will be described with reference to FIG. The semiconductor device manufacturing system according to the present embodiment uses, for example, a manufacturing execution system (MES) having functions of manufacturing condition management, process management, device interface, and automatic transfer system interface. MES clients 12a,..., 12m, a plurality of inspection devices 13a,..., 13n, a transport system integrator 14, an automatic transport vehicle 15, various manufacturing devices (not shown), etc., each connected by a computer network. .

  The MES server 11 includes a computer, a storage device, a program, and the like, and executes processing in response to requests from the MES clients 12a, ..., 12m. In addition, the inspection execution and inspection results in a plurality of inspection apparatuses are managed.

  The MES clients 12a,..., 12m are computers such as personal computers and mobile computers (portable small computers), request the MES server 11 for processing, and display the results on the screen.

  The inspection devices 13a,..., 13n are inspection devices for quality control of manufacturing processes such as a film thickness measuring device.

  The transport system integrator 14 controls the automatic transport vehicle 15 in the production line. In FIG. 1, only one automatic conveyance vehicle 15 is shown, but normally, a plurality of automatic conveyance vehicles 15 are traveling in the production line, and the transfer system integrator 14 includes a plurality of automatic conveyance vehicles 15. Control is in progress.

  FIG. 2 shows an apparatus operation state list screen (first display means) displayed on the MES clients 12a,..., 12m and representing the operation states of the inspection apparatuses 13a,.

  At least the inspection device name (ID), the device state, the inspection process name, and the lot ID (number) are displayed on the device operation state list screen. In the inspection device name, only the inspection devices for the worker are selected and displayed. The apparatus state is automatically updated from the MES server 11 side in response to a change in the inspection progress status in the inspection apparatus, and no inquiry from the user is required. As the display item of the apparatus status, “standby (vacant)”, “inspection data collection”, “inspection data collection complete (waiting for inspection result determination)”, “failure”, “under maintenance”, and the like are displayed. The inspection process name is automatically updated from the MES server 11 side in response to a change in the inspection processing process, and no inquiry from the user is required. In the case of the process in charge of the worker, the process is highlighted by color-coded display or marking.

  FIG. 3 shows an inspection result / lot next process designation screen (inspection results and inspection conditions of each inspection apparatus 13a,..., 13n and inspection process / lot next process designation screen displayed on the MES clients 12a,. 2nd display means).

  In FIG. 3, the inspection result and the like for the inspection apparatus 1 of FIG. 2 are displayed, but other inspection apparatuses such as the inspection apparatus 2 can also be displayed. 3 includes an inspection data display unit 31, an inspection condition display unit 32, an inspection target lot next processing specification unit 33, and the like.

  The inspection data display unit 31 displays the inspection result of each inspection apparatus. The inspection condition display unit 32 displays measurement conditions for determining whether or not the measurement has been performed correctly. The inspection target lot next process designating unit 33 confirms the inspection data and the inspection conditions, and designates the next process of the inspection target lot.

  The apparatus operating state list screen in FIG. 2 and the inspection result / lot next process designation screen in FIG. 3 can be switched to each other by clicking on the screen. For example, when the row (record) of the inspection apparatus-1 is clicked on the apparatus operation state list screen of FIG. 2, the inspection result / lot next process designation screen of FIG. 3 is displayed. On the other hand, when the inspection result / lot next process designation screen in FIG. 3 is finished, the next process designation input for the inspection target lot is terminated, thereby returning to the apparatus operating state list screen in FIG.

  Next, referring to FIG. 4, the work procedure of the semiconductor device manufacturing system according to the present embodiment will be described.

  First, in response to an instruction from the MES server 11, the transport system integrator 14 and the automatic transport vehicle 15 transport the inspection target lot, and the construction by the inspection apparatuses 13a, ..., 13n is automatically performed (step S401). Then, a value X indicating the number of remeasurements is set to zero (step S408).

  On the MES client 12a,..., 12m, the worker looks at the display of the device status on the device operation status list screen (the screen of FIG. 2, hereinafter also referred to as “inspection status list screen”), and the lot for the process in charge. It is recognized from the display of “inspection data collection” that determination work relating to the inspection target lot occurs (steps S402 and S403). In addition, the screen of the worker in charge of the inspection target lot clearly indicates that he is in charge.

  When the lot inspection data collection is completed (step S404), the apparatus operating state list screen is switched to the display of “inspection data collection complete” (step S405). By switching the display, the worker in charge recognizes that it is necessary to determine the inspection result and to instruct the next processing of the lot (step S406).

  When the worker in charge selects a row (record) of the inspection device that has collected the inspection data of the lot on the device operation state list screen by clicking on the screen or the like, it is used for determining the inspection result and instructing the next processing of the lot. The screen is switched to the inspection result / lot next processing designation screen (the screen of FIG. 3, hereinafter also referred to as “lot processing screen”). The worker in charge confirms the inspection result in the inspection data display section 31 on the inspection result / lot next process designation screen (step S407).

  It is confirmed whether or not the inspection result is within the standard value (step S409). If the inspection result is within the standard value, the worker in charge gives an instruction to advance the lot to the next process, inspection result / lot next process designation screen The inspection target lot next process designating unit 33 inputs (step S410). If the inspection result is out of specification, the worker in charge confirms the measurement condition on the inspection condition display unit 32 on the inspection result / lot next process designation screen (step S411). The measurement condition is a condition for determining whether or not the measurement has been performed correctly, and is determined by a GOF (Good Of Fitness) value, the number of detected measurement points, and the like. The GOF value is an accuracy index (function value) calculated based on the measurement result and the measurement environment.

  It is confirmed whether or not the measurement conditions are correct (step S412). If the measurement conditions are correct, it is determined that the process is abnormal in the upstream process, and the worker in charge gives an instruction to stop the start of the next process of the lot. Then, the inspection target lot next process designation section 33 of the inspection result / lot next process designation screen is input, and the next process start of the target lot is stopped (step S413).

  If the measurement conditions are not correct in step S412, the value X indicating the number of remeasurements is compared with the upper limit value Y for remeasurement (step S414). If X <Y, the inspection result / lot next process designation is specified. A re-inspection instruction is input at the inspection target lot next process designation section 33 on the screen, and re-measurement is performed (step S415). Then, the value X indicating the number of remeasurements is incremented (step S416), and the process returns to step S402.

  After completing the above series of steps, the worker in charge returns the display screen of the MES clients 12a,..., 12m to the apparatus operating state list screen (FIG. 2) and repeats the above steps.

  In the above process, after step S404, the inspection result of the lot is automatically determined, and when the determination result is within the specified value, the inspection lot is automatically moved to the next process on the MES server 11 side, and the determination result “Examination of data collection” for prompting the operator to perform the determination process may be displayed only when the value of the value is outside the specified value. By doing in this way, the work man-hour of a worker in charge is reduced, and the manufacturing cost is reduced.

  Further, an alarm sound may be output when “inspection data collection completion” for the process in charge is displayed in step S405. By doing so, prevention of determination processing delay is strengthened, and cycle time is shortened.

  Therefore, according to the semiconductor device manufacturing system of the present embodiment, the device operating status (inspection progress status) in a plurality of inspection devices can be grasped at a glance at a remote location.

  In addition, it is possible to clearly grasp the person in charge for each worker with respect to the lot being processed by the inspection apparatus.

  In addition, it is possible to recognize in a timely manner the inspection apparatus and lot that require result determination and lot next processing designation by the operator.

  A series of operations in the inspection process of grasping the inspection progress of the lot, confirming and determining the inspection result of the lot, and specifying the next processing of the lot can be realized on the client screen.

  Therefore, the semiconductor device manufacturing system according to the present embodiment can grasp the operation status of multiple inspection devices remotely and the inspection / requirement devices / lots for each person in charge in a clear and timely manner. The processing waiting time is reduced, and the cycle time can be shortened. Furthermore, inspection processing can be performed by a series of screen switching, operability is improved, and cycle time can be shortened.

  In addition, the operator can easily grasp the latest inspection progress status remotely without moving in front of the inspection apparatus, and can perform inspection processing determination and lot next processing designation operation by a series of screen switching. This eliminates the need for the operator to move to the inspection apparatus, and enables reduction in work man-hours and manufacturing costs.

  In the semiconductor device manufacturing system according to the present embodiment, in a semiconductor pre-process manufacturing line where automation is progressing, it is difficult to fully automate the process, which requires judgment of measurement results by a worker and instructions for subsequent processing to a lot. It is most effective for management related to inspection processes.

  Furthermore, although the conveyance is automated, it is effective for the start management related to the production line / process in which the start / finish instruction is performed manually.

  As mentioned above, the invention made by the present inventor has been specifically described based on the embodiment. However, the invention is not limited to the embodiment, and various modifications can be made without departing from the scope of the invention. Needless to say.

  In the above description, the case where the invention made mainly by the present inventor is applied to a semiconductor device manufacturing system, which is a technical field to which the present invention belongs, has been described. However, the present invention is not limited to this. It can also be applied to a product manufacturing system.

  As described above, the invention disclosed in the present application is applicable to a production line for industrial products such as semiconductor devices.

1 is a block diagram showing a configuration of a semiconductor device manufacturing system according to an embodiment of the present invention. It is a figure which shows the apparatus operating state list screen displayed on a MES client in the semiconductor device manufacturing system by one embodiment of this invention. It is a figure which shows the inspection result / lot next process designation | designated screen displayed on a MES client in the semiconductor device manufacturing system by one embodiment of this invention. 5 is a flowchart showing a work procedure in the semiconductor device manufacturing system according to the embodiment of the present invention.

Explanation of symbols

DESCRIPTION OF SYMBOLS 11 MES server 12a, ..., 12m MES client 13a, ..., 13n Inspection apparatus 14 Conveyance system integrator 15 Automatic conveyance vehicle 31 Inspection data display part 32 Inspection condition display part 33 Inspection object lot next process designation | designated part

Claims (5)

A manufacturing execution system, a plurality of manufacturing apparatuses, and a plurality of inspection apparatuses;
The manufacturing execution system includes a server that manages inspection execution and inspection results in the plurality of inspection apparatuses;
A first display means for displaying a list of operating statuses of the plurality of inspection apparatuses via the server, and a first display means for displaying inspection results of inspection target lots in the inspection apparatuses in conjunction with the first display means. 2. A manufacturing system comprising: a display unit; and a client including a unit for inputting an instruction for a next process for the inspection target lot. The manufacturing system according to claim 1,
The operating status of the inspection device displayed on the first display means includes the name of the inspection device, the state of the inspection device, the name of the inspection process, and the number of the inspection target lot. . The manufacturing system according to claim 1 or 2,
The operating system of the inspection apparatus displayed on the first display means is updated as needed according to a change in the state of the inspection apparatus. In the manufacturing system according to any one of claims 1 to 3,
The operating system of the inspection apparatus displayed by the first display means is displayed with the portion in charge of each worker highlighted.   A manufacturing execution system, a plurality of manufacturing apparatuses, and a plurality of inspection apparatuses, wherein the manufacturing execution system includes a server that manages inspection execution and inspection results in the plurality of inspection apparatuses; First display means for displaying a list of operating statuses of the inspection apparatuses, second display means for displaying inspection results of inspection target lots in the respective inspection apparatuses, in conjunction with the first display means, and the inspection A method for manufacturing a semiconductor device in a manufacturing system, comprising: a client including a means for inputting an instruction for a next process for a target lot, wherein the manufacturing apparatus is used for operating the inspection apparatus. A display screen of a system client displays a list of operation statuses of the plurality of inspection apparatuses and an inspection result display of each inspection target lot in a switchable manner. The method of manufacturing a semiconductor device.

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