JP2006011244A - Defective correction method of color filter - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To reduce wasteful consumption of a material used for the correction of a defective part and the occurrence of waste, by quickly and easily performing correction working of the defective part. <P>SOLUTION: The defective correction method comprises applying a masking agent f2 sublimating over a region that is wider than the defective part E of a coloring layer 2a and including the part E in a planar view on the coloring layer 2a of a color filter; applying correction ink f1 on a coloring layer removing region K for removing the masking agent by an ink jet device, after removing the masking agent f2 of a coloring layer region including the defective part E, by applying pulse oscillation laser light (first laser light); forming a formed film 2a1 of the correction ink f1 to correct the defective part E by applying continuous oscillation laser light (second laser light) Lb to heat and harden the correction ink f1 applied to the coloring layer removing region K; and heating and sublimating the residual masking agent f2 on the coloring layer 2a to be removed from the coloring layer 2a. <P>COPYRIGHT: (C)2006,JPO&NCIPI

Description

  The present invention relates to a defect correction method for a color filter that corrects a defect portion such as a protrusion defect portion or a black and white defect portion generated in a color filter in a liquid crystal display device or the like.

Conventionally, as a defect correction method for correcting white defects such as pinholes and defects generated in an emulsion layer such as an organic film pattern of a color filter, for a defect portion of an image baked on an emulsion layer formed on a glass substrate, A protective film layer of a synthetic resin made of a weak adhesive film is attached to the periphery including the defective portion, and the protective film layer is irradiated with an ultraviolet laser beam in accordance with the defective portion, and the protective film layer together with the defective portion. And removing the protective film layer by applying a light-shielding pigment to the removed part and then removing the protective film layer leaving the light-shielding pigment in the defective part (for example, a known method is known) Patent Document 1).
Japanese Patent No. 2989809

  In the conventional defect correction method such as a color filter, in order to remove the protective film layer applied to the periphery including the defective part at the end of the process, the adhesive tape is applied to the protective film layer and the adhesive tape is peeled off. Since the protective film layer is peeled off from the emulsion layer together with the adhesive tape, the peeling work is performed carefully to prevent damage to the surface of the emulsion layer even when the protective film layer is weakly sticky. There is a problem that the peeling work is time-consuming and the work cannot be performed quickly, and waste such as a peeled protective film layer, a light-shielding pigment applied to the surface, and an adhesive tape is generated. . In addition, since a solution coating apparatus having a dispenser-type discharge mechanism is used to apply the light-shielding pigment to the defective portion, it is impossible to control a very small amount of the light-shielding pigment droplets, An extra droplet of light-shielding pigment is applied to a small defective portion, resulting in wasteful consumption of the light-shielding pigment and extra waste.

  The present invention has been made in view of the above circumstances, and can correct a defective portion quickly and easily, and reduce wasteful consumption of materials used for correcting the defective portion and generation of waste. An object of the present invention is to provide a defect correction method for a color filter that can achieve the above.

The present invention is characterized by the following points in order to solve the above problems.
That is, in the color filter defect correcting method according to claim 1, the masking agent having a sublimation property is applied to the colored layer of the color filter in a plan view including a defective portion of the colored layer over a wider area. After removing the masking agent in the colored layer area including the defective portion by irradiating with laser light, the correction ink is applied to the colored layer removal area from which the masking agent has been removed, and the correction ink applied to the colored layer removal area The defect portion is corrected by curing and removing the masking agent from the colored layer by heating and sublimation.

  In this defect correction method, when a defective portion of the colored portion of the color filter is detected by the inspection device, the masking agent is applied to a wider area including the defective portion in a plan view by a solution coating apparatus, The masking agent is irradiated with the first laser beam by the laser processing apparatus, and the masking agent in the predetermined colored layer region including the defect portion is removed. Next, a correction ink of a color corresponding to the colored layer of the defective portion is applied to the colored layer removal region from which the masking agent has been removed by a solution application device, and the applied correction ink is applied to the applied correction ink by, for example, a laser processing device. When the second laser beam is irradiated or the curing light is irradiated, the correction ink is cured, whereby a thin film of the correction ink is formed in the defect portion, and the defect portion of the color filter is corrected. Further, the masking agent remaining on the colored layer is heated by the second laser beam, or the masking agent is heated in a heating furnace or the like in a subsequent process, so that the masking agent is sublimated and removed from the colored layer. Thus, the color filter is cleaned.

  The color filter defect correcting method according to claim 2 is the color filter defect correcting method according to claim 1, wherein a thermosetting ink is used as the correction ink and applied to the colored layer removal region. The correction ink and the masking agent remaining in the colored layer are irradiated with laser light to heat and cure the correction ink and to sublimate the masking agent.

  The color filter defect correcting method according to claim 3 is the color filter defect correcting method according to claim 1, wherein an ultraviolet curable ink is used as the correction ink and applied to the colored layer removal region. After the correction ink is cured by irradiating with ultraviolet light, the masking agent remaining in the colored layer is sublimated by irradiating with laser light.

  The defect correction method for a color filter according to claim 4 is the defect correction method for a color filter according to any one of claims 1 to 3, wherein the correction ink is applied to a colored layer removal region from which a masking agent has been removed by an inkjet apparatus. It is characterized by being applied dropwise.

  A defect correction method for a color filter according to a fifth aspect is the defect correction method for a color filter according to any one of the first to fourth aspects, wherein the masking agent is applied by an ink jet apparatus.

  A defect correction method for a color filter according to claim 6 is the defect correction method for a color filter according to claim 4, wherein the amount of correction ink dripped by the inkjet device, the area of the correction ink dripping region, and the dripping region Reference data indicating a correlation with the film thickness of the corrected ink dropped after film formation is obtained in advance, and based on the reference data, the set film thickness of the colored layer having the defective portion and laser light irradiation are used. From the area of the colored layer removal area to be removed, the amount of the correction ink dripped onto the colored layer removal area is obtained.

  A defect correction method for a color filter according to claim 7 is the defect correction method for a color filter according to claim 4, wherein the amount of correction ink dripped by the ink jet device, the area of the correction ink dripping region, and the dripping region Reference data indicating a correlation with the film thickness of the corrected ink dropped after film formation is obtained in advance, and based on the reference data, the set film thickness of the colored layer having the defective portion and the correction by the ink jet apparatus. It is characterized in that the area of the colored layer removal region to be removed by the laser light irradiation is obtained from an integral multiple of the minimum possible drop amount of ink.

The present invention has the following excellent effects.
According to the method for correcting a color filter according to claim 1, since the correction ink is applied to the colored layer removal region including the limited defective portion surrounded by the sublimable masking agent, the correction ink is cured and formed. The defective portion of the colored layer can be accurately corrected by the formed film, and the masking agent can be removed from the colored layer by heating and sublimation. The operation | work of sticking to and peeling from a colored layer is unnecessary. Therefore, it is possible to quickly and easily perform the repair work of the defective portion of the colored layer in the color filter without causing damage to the colored layer having no defective portion, and use a material unnecessary for correcting the defective portion. This eliminates unnecessary consumption of materials and generation of waste.

  According to the correction method of the color filter according to claim 2, when the correction ink is heat-cured, the masking agent remaining on the colored layer can be sublimated and removed by heating by laser light irradiation at the same time. There is no need to provide a separate masking agent cleaning step, the process can be shortened, and the correction of the defective portion of the color filter can be performed more easily and quickly.

  According to the method for correcting a color filter according to claim 3, after the correction ink is cured by ultraviolet light, the masking agent remaining in the colored layer can be removed by heating by irradiation with laser light, so that it can be removed. There is no need to provide a separate masking agent cleaning step, the process can be shortened, and the correction of the defective portion of the color filter can be performed more easily and quickly.

  According to the color filter correcting method according to the fourth and fifth aspects, the correction ink and the masking agent can be applied in an appropriate amount and smoothly without any waste to the predetermined application region by the ink jet apparatus.

  According to the method for correcting a color filter according to claim 6, the amount of the correction ink dripped can be appropriately set with respect to the volume of the colored layer removal region removed by laser light irradiation, and the colored layer of the color filter This defect portion can be corrected by the formation of the correction ink that is evenly matched with the thickness of the colored layer without it, and the occurrence of the correction defect can be surely prevented.

  According to the method for correcting a color filter according to claim 7, even if the defective portion of the colored layer of the color filter has a very small diameter such as a pinhole, the correction is more than the minimum possible drop amount by the ink jet device. The ink can be dripped onto the colored layer removal region having an area adapted to the ink without excess or deficiency, and the corrected thickness of the colored layer in the color filter is compared with the thickness of the colored layer having no defect. Can be matched evenly.

Hereinafter, an example of a defect correction apparatus that implements a color filter defect correction method according to an embodiment of the present invention will be described with reference to FIG.
In FIG. 1, reference numeral 1 denotes a defect correction apparatus for performing a color filter defect correction method according to an embodiment of the present invention. In the color filter defect correcting apparatus 1, the color filter 2 is supported on the moving table 3 by a clamp 3a, and the moving table 3 is moved on the base (not shown) in the Y-axis direction by the operation of the drive motors 4 and 4 ( A substrate moving device 5 that moves the color filter 2 in the Y-axis direction by moving in a direction perpendicular to the paper surface of FIG. 1, and a measuring device 6 that measures a defective portion of the colored layer of the color filter 2, A laser processing device 7 for irradiating a defective portion of the colored layer measured by the measuring device 6 with a laser beam to remove a colored layer (colored layer removal region) including the defective portion; and the laser processing device 7 An inkjet apparatus (solution coating apparatus) 8 that drops the correction ink f having the same color as the color layer on the removed colored layer removal area, and the correction ink f is ultraviolet (hereinafter simply referred to as “UV”) curability. Use if you have Basic information about the light filter 70 for curing UV light, a control computer 9 for controlling operations of the substrate moving device 5, the measuring device 6, the laser processing device 7, the ink jet device 8, the color filter 2, etc. And a host computer (control device) 10 storing the above.

  The measuring device 6 includes a CCD camera (imaging means) 11 that takes an image through a microscope, an illuminator 12, an illumination optical system 13, a pair of mirrors 14 and 14, and an objective lens 15. While illuminating the surface of the color filter 2 through the illumination optical system 13, mirrors 14 and 14 and the objective lens 15 with light, the CCD camera is used to detect and measure defects in the colored layer of the color filter 2. Measurement data relating to the position, shape, dimensions, etc. of the defective portion is transmitted to the control computer 9.

  Further, the laser processing apparatus 7 includes a laser power source 16, a first laser oscillator 17a that oscillates a pulsed laser beam (first laser beam) La, and a continuous wave laser beam (second laser beam) Lb. A second laser oscillator 17b that oscillates, a pair of mirrors 18a and 18a, and a laser optical system 18 including an aperture mechanism 18b are provided. Each laser oscillator 17a and 17b is switched by a command from the control computer 9. After operating and shaping the pulsed laser beam La generated by the aperture mechanism 18b, the color is transmitted through the laser optical system 18, one mirror 14 shared with the measuring device 6 and the objective lens 15. The colored layer of the filter 2 is irradiated. Then, the colored layer removal region is removed by the pulsed laser beam La, the shaping by the aperture mechanism 18b is canceled, and the correction dropped by the inkjet device 8 onto the colored layer removal region by the continuous wave laser beam Lb. The ink is heated or UV cured.

Although not shown, the aperture mechanism 18b includes a slit mechanism in which the width of the slit is made variable by adjusting a mutual distance between the slit plates by causing a pair of slit plates to face each other perpendicular to the optical axis. The laser beam L is shifted in the direction of the optical axis, and a pair is arranged vertically, and the pair of slit mechanisms are individually swiveled around the optical axis, and the slits in the pair of slit mechanisms are overlapped. A plane determined by the opening on the surface of the color filter 2 when the pulsed laser beam La passes through the opening of a quadrilateral having an arbitrary size formed of a regular quadrangle, a rectangle, and a parallelogram. A pulsed laser beam La having a shape is irradiated.
The objective lens 15 is a slider type or a revolver type that can be used by switching a plurality of lenses having different magnifications. The objective lens 15 can be measured by the CCD camera 11 by changing the magnification as necessary, and each laser beam. It is possible to change the size of the spots La and Lb.
The ultraviolet light from the UV light irradiation light source 70 is guided to the objective lens 15 side by the half mirror 18c disposed on the optical axis of the optical system 18 between the mirror 18a and the aperture mechanism 18b, or The half mirror 18c disposed on the optical axis between the illuminator 12 and the illumination optical system 13 is guided to the objective lens 15 through the illumination optical system 13 and the mirrors 14 and 14, and is irradiated to the color filter 2 respectively. However, it is desirable to adopt the former method.

  The inkjet device 8 has a conventionally known ink ejection mechanism, and includes an inkjet control circuit 19, a plurality of ink cartridges 20a filled with correction inks of different colors, and a masking agent cartridge 20b filled with a masking agent. A plurality of correction ink ejection inkjet heads 21a provided corresponding to the ink cartridge 20a and having different minimum possible drops, and a masking agent ejection inkjet head 21b provided corresponding to the masking agent cartridge 20b. The correction ink f1 and the masking agent f2 that are operated by a command from the control computer 8 and whose ejection amount (drop amount) is controlled by the inkjet control circuit 19 are supplied from the inkjet heads 21a and 21b to the color filter 2. Layer removal area and It is adapted to be dropped each color layer.

The ink jet device 8 includes a plurality of solution cartridges, one of which is an ink cartridge 20a and the other part is a masking agent cartridge 20b, and both the correction ink f1 and the masking agent f2 are used in one device. Although it can be applied to the color filter 2, the present invention is not limited to this, and an inkjet apparatus for applying the correction ink f <b> 1 and an inkjet apparatus for applying the masking agent f <b> 2 may be provided separately.
The measuring device 6, the laser processing device 7 and the ink jet device 8 are supported by a gate-shaped support member (not shown) and are movable in the X-axis direction (left-right direction in FIG. 1) perpendicular to the Y-axis direction. It is attached to a carriage (not shown), and when the carriage is moved by the operation of the X-axis driving means in response to a command from the control computer 9, the carriage moves back and forth together in the X-axis direction. In addition, the movement can be adjusted individually in the Z-axis direction (vertical direction in FIG. 1) perpendicular to the X and Y axes.

The amount of correction ink f1 dropped by the ink jet head 21a of the ink jet device 8, the area of the correction ink f1 dropping area (corresponding to the colored layer removal area), and the correction ink dropped on the dropping area is heated, or When the relationship with the film thickness of the film formed by UV curing was obtained in advance by experiment, the amount of correction ink f1 dropped as shown in FIG. 2 in the range of the amount of correction ink f1 dropped from 30 pl to 300 pl. As the amount of film increases, the film thickness of the film increases, and experimental data (hereinafter referred to as “reference data”) showing a correlation in which the film thickness decreases with a value along a hyperbolic curve as the dropping region increases. Obtained.
The control computer 9 operates for the reference data indicating the correlation between the drop amount of the correction ink f1, the area of the drop region, and the film thickness after film formation, and the operations required for the devices 5, 6, 7, and 8. ROM (storage means) for storing a sequence program or the like for executing the above, RAM (storage means) for storing measurement data obtained by the measurement device 6, the reference data in the ROM, and the measurement data in the RAM , And calculating the area of the colored layer removal region of the defective portion in the colored layer of the color filter 2 and the amount of the correction ink f1 dropped from the inkjet head 21a, and the command of the calculation control means And a display for displaying the image of the defective portion obtained by the CCD camera 11 and the measurement data.

Next, with respect to the color filter defect correcting method according to an embodiment of the present invention implemented by the defect correcting apparatus 1 together with the operation of the color filter defect correcting apparatus 1 according to the above configuration, FIG. 3 and FIG. The description will be given with reference. 4A to 4E, the upper diagram is a cross-sectional view of the color filter, and the lower diagram is a plan view thereof.
When the operation of the defect correcting device 1 is started, the control computer 9 inputs substrate information relating to the color filter 2 from the host computer 10 and stores it in the RAM (step S1), and also drives the substrate moving device 5 The motor 4 and the X-axis driving means (not shown) are actuated to move the color filter 2 in the Y-axis direction and the measuring device 6 in the X-axis direction. The defective portion E of 2a is made to enter (step S2). As a result, the image data measured by the CCD camera 11 via the microscope is sent to the control computer 9 for image processing, and the defect E is located in the center of the field of view of the microscope. The filter 2 and the microscope are relatively moved in the X and Y axis directions (step S3). In FIG. 4, 2b is a substrate of the color filter 2, and 2c is a black matrix.

Next, the objective lens 15 is converted to a high-magnification lens so that the shape of the defective portion E is automatically recognized (step S4). Based on the measurement data (image data) obtained from the CCD camera 11, The calculation control means of the control computer 9 uses the minimum area of the right quadrilateral having the X and Y axis directions including the defect E as the minimum colored layer removal area (processing area) K, in the X and Y axis directions. Are calculated (step S5) (see FIG. 4A).
Further, the calculation control means of the control computer 9 determines the film thickness t and the color layer removal region K based on the film thickness (set film thickness) t of the color layer 2a in the substrate information regarding the color filter 2. From the area (x · y), the volume Vd (= x · y · t) of the colored layer 2a in the colored layer removal region K is calculated (step S6). Then, the inkjet device 8 is operated to move and position the inkjet head 21b for discharging the masking agent above the colored layer removal region K, and the masking agent f2 having a sufficiently larger volume than the volume Vd is supplied from the inkjet head 21b. Then, it is dropped and applied to the coating area A that extends to the surrounding colored layer 2a including the colored layer removal area K (step S7) (see FIG. 4B).
Although not shown, the masking agent f2 applied to the application area A is appropriately irradiated with white light by an illumination mechanism and cured by the heat.

  Next, the control computer 9 moves and positions the objective lens 15 above the colored layer removal region K, and the laser processing device 7 irradiates the colored layer 2a and the masking agent f2 applied thereon. The aperture mechanism 18b is operated so that the pulsed laser beam La is shaped into a beam shape corresponding to the colored layer removal region K (step S8). Then, the control computer 9 determines that the correction ink f1 is reduced by the heating process so that the volume Vd is the minimum possible drop amount Vijmin of the correction ink f1 from the inkjet head 21a for discharging the correction ink in the inkjet device 8. It is compared whether or not it is larger than the minimum drop amount (Vijmin × F) multiplied by the expected coefficient F (Vd ≧ Vijmin × F) (step S9). When the volume Vd is larger than the minimum dripping amount (Vijmin × F), a command is sent from the control computer 9 to the laser processing device 7 and the dimension of the minimum colored layer removal region K calculated in the step S5. In x and y, the applied masking agent f2 and the periphery of the defective portion E of the colored layer 2a are simultaneously removed by irradiation with the pulsed laser beam La (step S10) (see FIG. 4C). ).

  As the masking agent f2, a material that can be sublimated at a temperature lower than the heat resistant temperature of the color filter 2, such as para-dichlorobenzene, can be used. Further, in order to make it easy to absorb the pulsed laser beam La during the removal processing of the masking agent f2, a dye that absorbs the wavelength of the pulsed laser beam La is added to the material of the masking agent f2 to appropriately adjust the opacity. Therefore, it is desirable to use a colored and opaque color material. When the masking agent f2 has high transparency, for example, when performing processing to remove the colored layer removal region K simultaneously with the colored layer and the masking agent applied thereon without performing the shaping processing, a pulsed laser When the masking agent f2 is irradiated with the light La, the pulsed laser beam La is not absorbed by the masking agent f2, and the colored color filter existing under the masking agent is processed first, and the applied masking agent. The predetermined processed hole K1 corresponding to the colored layer removal region K is not satisfactorily formed in f2.

  Subsequently, when the correction ink f1 having thermosetting property is dropped from the inkjet head 21a of the inkjet apparatus 8 to the colored layer removal region K with the minimum possible drop amount Vijmin, the number of drops (Vd / Vijmin) is calculated. Then, the number of times the correction ink f1 is dropped is determined, and the correction ink f is dropped to the colored layer removal region K by the determined number of drops (step S11) (see FIG. 4D). In this case, when the calculated value of the number of drops becomes a fraction, a positive integer (excluding zero) of the number of drops close to the calculated value is selected. In addition, if there is reference data of a capacity capable of dropping a drop amount corresponding to the volume Vd at a time on the inkjet head 21a, or a reference data of a capacity capable of dropping a positive integer multiple of the minimum possible drop amount Vijmin. If there is reference data that can drop a drop amount corresponding to the volume Vd by adding a plurality (a number smaller than the number of drops obtained in the calculation), the inkjet control circuit 19 sets the drop amount to the volume Vd. It is preferable that the control is performed so as to match only once or only the addition number is dropped because the correction processing time of the defective portion E can be shortened.

  In the step S9, when the volume Vd is less than the minimum drop amount (Vijmin × F), the calculation control means of the control computer 9 sets the minimum drop amount (Vijmin × F) from the inkjet head 21a. Dividing by the film thickness t (Vijmin × F / t), the area (x ′ · y ′ = Vijmin × F / t) of the colored layer removal region K to be removed of the colored layer 2a is calculated, and x ′ ≧ x , Y ′ ≧ y as a condition, the dimensions x ′ and y ′ of the colored layer removal region K are back-calculated and then correspond to the colored layer removal region K of the colored layer 2a based on these dimensions x ′ and y ′. The partial masking agent f2 is removed and processed by irradiation with the pulsed laser beam La from the laser processing apparatus 7 (step S12). Thereafter, the calculation (x ′ · y ′ · t / Vijmin) is performed to obtain the number of drops of the corrected ink f1 by the minimum possible drop amount Vijmin as in the case of step S11. The correction ink f1 is dropped on the colored layer removal area K (step S13).

  In the above calculation, when the number of times of dropping becomes a fraction, the amount of dropping corresponding to the fraction cannot be obtained from the inkjet head 21a. Correction is made after re-processing the colored layer removal region K by calculating from the area (x ′ · y ′) of the colored layer removal region K so that the number of times of dropping is a positive integer (excluding zero) times. It is also possible to drop the ink f1. Also in this case, a plurality of reference data on the amount of dripping corresponding to the volume (x ′ · y ′ · t), or a plurality of pieces of reference data on the volume capable of dropping a positive integer multiple of the minimum possible dripping amount Vijmin (described above) If there is reference data that can drop a drop amount corresponding to the volume Vd by adding a number less than the number of drops obtained by calculation), the inkjet control circuit 19 sets the drop amount to the volume (x ′ · y ′). It is preferable that the control is performed so as to meet t) only once or only the addition number is dropped, because the correction processing time of the defective portion E can be shortened.

When the correction ink f1 is dropped onto the colored layer removal region K of the colored layer 2a of the color filter 2, the dropped correction ink f1 spreads over the entire surface of the colored layer removal region K and is applied to the colored layer 2a. Inside the processed hole K1 formed in the masking agent f2, the state rises from the surface of the colored layer 2a and is applied onto the substrate 2. Thereafter, the applied correction ink f1 is irradiated with the continuous oscillation laser light Lb by the laser processing device 7 (ink curing device), and the correction ink f1 is heated and cured (fired) by the continuous oscillation laser light Lb. ) As a result, the correction ink f1 is reduced to form a correction ink film 2a1 having the same color as the colored layer 2a and having a thickness aligned with the normal colored layer 2a having no defect E. The defect correction apparatus 1 The correction process of the defective portion E in the color filter 2 is completed (see FIG. 4E).
When the correction ink f1 applied to the colored layer 2a in the colored layer removal area K is heat-cured, the shaping by the aperture mechanism 18b is canceled, and the magnification of the objective lens 15 is lowered to continuously oscillate. Since the irradiation range of the laser beam Lb is expanded, the continuous wave laser beam Lb is irradiated to the entire range of the masking agent f2 remaining on the colored layer 2a, and the residual masking agent f2 is applied to the continuous wave laser. It is heated by the light Lb and sublimates and is completely removed from the colored layer 2a, whereby the color filter 2 is cleaned.

  In the defect correction method for a color filter according to the above-described embodiment, the masking agent f2 having sublimation properties over a wider area including the defect portion E of the color layer 2a in plan view is applied to the color layer 2a of the color filter 2 in plan view. After applying with the inkjet device 8 and removing the colored layer region K including the defect E and the corresponding masking agent f2 by irradiating the pulsed laser beam La of the laser processing device 7, the masking agent f2 is removed. The correction ink f1 is dropped and applied to the colored layer removal region K by the inkjet device 8, and the correction ink f1 applied to the color layer removal region K is heated by irradiation of the continuous wave laser beam Lb from the laser processing device 7. The masking agent f2 is heated and sublimated by the continuous wave laser beam Lb and removed from the colored layer 2a. It is configured to correct the defective portion E by the.

Therefore, according to the defect correction method of the color filter according to the embodiment, the correction ink f1 is applied to the colored layer removal region K including the limited defect E surrounded by the processing hole K1 of the sublimation masking agent f2. Since it is applied, the defective portion E of the colored layer 2a can be accurately corrected by the film formation 2a1 formed by curing the correction ink f1, and the masking agent f2 remaining on the colored layer 2a is heated and sublimated. Thus, it is possible to remove the colored layer 2a from the colored layer 2a as in the prior art by attaching the masking agent f2 to an adhesive tape or the like and peeling it from the colored layer 2a. For this reason, the correction work of the defective portion E of the colored layer 2a in the color filter 2 can be performed quickly and easily without causing damage to the colored layer 2a without the defective portion E. It is not necessary to use unnecessary materials for correction, and the generation of waste can be reduced.
Further, since the masking agent f2 remaining on the colored layer 2a can be sublimated and removed simultaneously with the heating and curing of the correction ink f1, it is not necessary to separately provide a cleaning process for the residual masking agent f2, thereby shortening the process. In addition, the defect E of the color filter 2 can be corrected more easily and quickly.
Furthermore, the ink jet device 8 can apply the correction ink f1 and the masking agent f2 smoothly and appropriately in a predetermined application area without waste.

  Further, according to the color filter defect correcting method according to the embodiment, the amount (volume) Vd of the correction ink f1 dropped by the inkjet head 21a from the inkjet device 8 and the area (x of the dropping region of the correction ink f1) Reference data indicating a correlation between y) and the film thickness t after forming the film 2a1 of the correction ink f1 dropped on the dropping region is obtained in advance, and the defect portion is determined based on the reference data. E from the set film thickness t of the colored layer 2a and the area (x · y) of the colored layer removal region K of the colored layer 2a to be removed by irradiation with the laser light L, the correction ink f1 for the colored layer removal region K Since the drop amount Vd is obtained, the correction ink is used for the volume (x · y · t) of the colored layer removal region K of the colored layer removed by the continuous wave laser beam Lb from the laser processing apparatus 7. 1 can be appropriately set, and the correction ink film formation 2a1 in which the defective portion E of the colored layer 2a of the color filter 2 is evenly matched with the film thickness t of the colored layer 2a without it. Therefore, it is possible to reliably prevent the occurrence of defective correction.

  Furthermore, according to the defect correction method of the color filter according to the embodiment, based on the correlation data, the set film thickness t of the colored layer 2a having the defect E and the correction ink f1 by the inkjet of the inkjet head 2121a. Since the area (x ′ · y ′) of the colored layer removal region K of the colored layer 2a to be removed by irradiation with the continuous wave laser beam Lb is obtained from an integral multiple of the minimum possible drop amount Vijmin, the color filter Even if the defective portion E of the second colored layer 2a has a very small diameter such as a pinhole, the correction ink f1 that is not less than the minimum possible drop amount Vijmin by the inkjet head 21a of the inkjet device 8 is added thereto. It can be dripped almost completely into the colored layer removal region K having an adapted area, and color fill The film thickness after the correction of the colored layer 2a in 2, can be equally aligned relative to the thickness t of the colored layer 2a was no defect portion E.

  In the color filter defect correcting method according to the embodiment, the laser processing device 7 is used as an ink curing device, and the continuous wave laser beam Lb generated therefrom is applied to the colored layer removal region K. The correction ink f1 is irradiated with the correction ink f1 to be heated and cured. However, the present invention is not limited to this, and the lower surface of the color filter 2 near or opposite to the inkjet device 8 in the defect correction device 1 is not limited thereto. A heater for heating and curing the correction ink f1 applied to the colored layer removal region K of the color filter 2 by a lamp heating means arranged on the side, or a heater in a heating furnace installed separately from the defect correction device 1, It is possible to heat and cure the correction ink f1 applied to the colored layer removal region K in a subsequent process of the processing by the defect correction apparatus 1. That.

Further, although the thermosetting ink was used as the correction ink f1 for correcting the defect portion E, instead of this, an ultraviolet curable ink was used, and the ultraviolet curable ink applied to the colored layer removal region K was You may make it harden | cure by irradiation of the ultraviolet light from the said light source 70 for UV light irradiation.
Further, in the color filter defect correcting method according to the above-described embodiment, the correction ink f1 is included in the colored layer removal region K and the masking agent f2 is included in the colored layer removal region K using the inkjet device 8 as a solution coating apparatus. However, the present invention is not limited to this, and when the defective portion E is relatively large, the colored layer removal region K is also processed in accordance with it, so that the dispenser-type ejection mechanism is applied. You may make it apply | coat efficiently using the solution coating device which has this.

It is a block diagram which shows an example of the defect correction apparatus which implements the correction method of the color filter which concerns on one embodiment of this invention. It is a diagram showing the correlation between the area of the laser processing area in the colored layer of the color filter, the thickness of the correction ink after film formation, and the amount of correction ink dropped. It is a flowchart which shows the correction method of the color filter which concerns on one embodiment of this invention. It is explanatory drawing which shows the operation | work process of the correction method of the color filter which concerns on one embodiment of this invention.

Explanation of symbols

DESCRIPTION OF SYMBOLS 1 Defect correction apparatus 2 Color filter 3 Moving stand 5 Substrate moving apparatus 6 Measuring apparatus 7 Laser processing apparatus 8 Inkjet apparatus 9 Control computer (control apparatus)
10 Host computer (control device)
11 CCD camera (imaging means)
DESCRIPTION OF SYMBOLS 12 Illuminator 15 Objective lens 17a, 17b Laser oscillator 19 Inkjet control circuit 20a Ink cartridge 20b Masking agent cartridge 21a, 21b Inkjet head E Defect part K Colored layer removal area (processing area)
La pulse oscillation laser (first laser beam)
Lb continuous wave laser (second laser beam)
f1 Correction ink f2 Masking agent x Dimension of colored layer removal region in X axis direction y Dimension of colored layer removal region in Y axis direction

Claims (7)

  Apply a masking agent that has sublimation to the colored layer of the color filter over a wider area including the defective part of the colored layer in plan view, and irradiate the masking agent in the colored layer area containing the defective part with laser light. Then, the correction ink is applied to the colored layer removal region from which the masking agent has been removed, the correction ink applied to the colored layer removal region is cured, and the masking agent is heated and sublimated to remove from the colored layer. A defect correction method for a color filter, wherein the defect portion is corrected by removing the defect.   A thermosetting ink is used as the correction ink, and the correction ink applied to the colored layer removal region and the masking agent remaining in the colored layer are irradiated with laser light to heat and correct the correction ink. The color filter defect correcting method according to claim 1, wherein a masking agent is sublimated.   An ultraviolet curable ink is used as the correction ink, and the correction ink applied to the colored layer removal region is cured by irradiating with ultraviolet light, and then the masking agent remaining on the colored layer is irradiated with laser light. The color filter defect correcting method according to claim 1, wherein the sublimation is performed.   4. The defect correction method for a color filter according to claim 1, wherein the correction ink is dropped and applied to the colored layer removal region from which the masking agent has been removed by an inkjet apparatus.   The color mask defect correcting method according to claim 1, wherein the masking agent is applied by an ink jet apparatus.   Reference data indicating a correlation between the amount of correction ink dropped by the ink jet device, the area of the correction ink dropping region, and the thickness of the correction ink dropped on the dropping region after film formation is obtained in advance, Based on the reference data, the amount of the correction ink dropped on the colored layer removal region is obtained from the set film thickness of the colored layer having the defective portion and the area of the colored layer removal region removed by laser light irradiation. The defect correction method for a color filter according to claim 4. Reference data indicating a correlation between the amount of correction ink dropped by the inkjet device, the area of the correction ink dropping region, and the thickness of the correction ink dropped on the dropping region after film formation is obtained in advance, Based on the reference data, the area of the colored layer removal region to be removed by irradiation with the laser beam is determined from the set film thickness of the colored layer having the defective portion and an integral multiple of the minimum possible dripping amount of the correction ink by the inkjet device. The method for correcting a defect of a color filter according to claim 4, wherein the correction is performed.

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