JP2006005276A - Arraying mask of conductive ball, and arraying apparatus using thereof - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide an improved mask for arraying a conductive ball and an arraying apparatus using thereof. <P>SOLUTION: The mask for arraying the conductive ball on a body to be arrayed by a prescribed arraying pattern is provided with an opening which is formed corresponding to the array pattern, and which the conductive ball can be put through; a non-opening part; and a projecting part formed on one surface of the non-opening part. The projecting part is formed surrounding the opening end of the opening. <P>COPYRIGHT: (C)2006,JPO&NCIPI

Description

  The present invention relates to a mask for arranging conductive balls on an arrayed body and an arraying apparatus using the same, and more particularly, to a small solder ball used for forming a connection bump of an electronic component as the arrayed body. The present invention relates to a mask suitable for arranging in a mask and an arrangement apparatus using the mask.

  In recent years, mobile terminal devices and notebook PCs have become faster, more functional, smaller, and thinner, and semiconductor components built into them and electronic components such as substrates on which semiconductor components are mounted are also becoming smaller and smaller. There is a conflicting demand for reducing the thickness and increasing the number of connection terminals. In response to such demands, there are BGA (Ball Grid Array) type or FC (Flip Chip) type electronic components in which connection bumps are arranged in an area array.

  As a method for manufacturing the connection bump, there is a ball method using a solder ball. According to the ball system, a printing process for printing solder paste or flux on an electrode on which solder balls are arranged in an electronic component, a solder ball arranging process for arranging solder balls on an electrode printed with solder paste or flux, and solder The connection bumps are manufactured through a solder ball heating process in which the balls are heated and melted to form connection bumps.

  As a method for arranging solder balls in the solder ball arrangement process, a suction head method and a mask arrangement method are well known, and an example of the latter is described in Patent Document 1 below. In the mask arrangement method, a mask having an opening formed so that a solder ball can be inserted corresponding to the arrangement position of the electronic component is aligned with the electronic component, and the solder ball supplied on the mask is, for example, a squeegee. Is used to fill the opening (this operation is referred to as transfer) and to arrange the solder balls on the electronic component.

  Here, in order to accurately arrange the solder balls on the electronic component, it is necessary to position the mask so as to be in close contact with the electronic component as much as possible. However, the electronic component is coated with a flux, which is an adhesive film, for the purpose of ensuring the voids of the connection bumps, ensuring the interface strength, and temporarily fixing the solder balls. If the flux adheres to the mask, it becomes difficult to separate the mask from the electronic component, and if the mask is forcibly removed, the mask may be damaged. Further, since the opening of the mask is slightly larger in diameter than the solder ball, the flux spread by the solder ball adheres to the opening when the solder ball is filled into the opening of the mask. The solder balls may be captured and not arranged on the electronic component.

Therefore, a convex portion that supports the mask is formed on the bottom surface of the mask of Patent Document 1 so that the non-opening portion does not directly contact the flux. Therefore, according to the mask of Patent Document 1, there is an advantage that the flux does not easily adhere to the mask when the mask is overlaid on the electronic component.
JP 2001-267331 A (paragraph numbers 0024 to 0026)

  For example, when trying to arrange a ball having a diameter of 100 μm or less like a solder ball for FC, the thickness of the mask for arranging it is about 100 μm. Generally, the flux is printed on an electronic component with a thickness of about 50 μm. Therefore, when the convex portion is provided on the mask so that the flux does not adhere, the thickness of the non-opening portion of the mask is as very thin as 50 μm or less, leading to a reduction in the rigidity of the mask. When a mask with low rigidity is used, the mask is distorted due to the force generated by the movement of the squeegee that moves the solder balls or the surrounding temperature changes. There is a possibility to adhere to. This problem may be resolved by printing the flux thinner or with a smaller area than the solder balls, but the printing equipment becomes complicated and requires a large amount of cost and strict management of printing conditions. Become.

The present invention has been made in view of the above-described problems, and an object thereof is to provide an improved mask for arranging conductive balls and an arrangement apparatus using the mask.
The conductive ball referred to in the present invention is a ball mainly composed of metal such as Sn or Cu, Au, Ag, W, Ni, Mo, Al, or polypropylene or polyvinyl chloride, polystyrene, polyamide, cellulose acetate, polyester. A ball in which a conductive metal such as solder is coated on the surface of a sphere mainly composed of a resin such as a resin. In addition, the arrayed body referred to in the present invention is an electronic component in which a conductive ball is used as a connection bump such as a semiconductor device (chip) or a substrate, a wafer, a package thereof, and other electronic components, or a connection bump on the electronic component. For example, a member on which the conductive ball is disposed in order to mount the conductive ball on the electronic component.

  One embodiment of the present invention is a mask for arranging conductive balls on an object to be arranged in a predetermined arrangement pattern, and is formed corresponding to the arrangement pattern and has an opening through which the conductive balls can be inserted. An opening and a convex portion formed on one surface of the non-opening portion, the convex portion being a mask formed around the opening end of the opening portion. According to this mask, for example, in the case where the mask is aligned with the object to be arranged on which the adhesive film is formed, the convex portion of the mask is formed so that the adhesive film does not contact. In that case, since the convex part is formed around the opening end of the opening part of the mask, it is possible to obtain a mask having a predetermined rigidity with few thin portions in the non-opening part.

  In the above-described mask, when the array pattern is composed of a plurality of regular patterns regularly arranged, the convex portion is outside the region that can include the opening formed corresponding to the regular pattern. It is desirable to be formed. This mask is suitable when the openings are arranged relatively densely. That is, in such a case, the interval between the openings is narrow and it is difficult to form the protrusions between them, but the protrusions are provided outside the region including the openings formed in a certain pattern like this mask. As a result, the thin portion is reduced in the non-opening portion, and the rigidity of the mask can be maintained.

  Further, it is desirable that the convex portion surrounds the region and is formed in a rectangular shape because the convex portion can be formed relatively easily. In addition, if the height of the convex portion is equal to or less than the radius of the conductive ball, it is preferable that the conductive ball filled in the opening is not easily displaced. In addition, if the mask has soft magnetism, it is desirable that the mask can be brought into close contact with the object to be arranged.

  One embodiment of the present invention is an apparatus for arranging conductive balls on an arrayed body in a predetermined array pattern, and is placed on the mounting table on which the arrayed body is mounted and the mounting table. And an above-described mask disposed so as to be positioned with respect to the object to be arranged.

  Furthermore, one embodiment of the present invention is an apparatus for arranging conductive balls on an arrayed body in a predetermined array pattern, the mounting table on which the arrayed body is mounted, and the mounting table mounted on the mounting table An apparatus having the soft magnetic mask disposed so as to be positioned with respect to the arranged object and a magnet disposed below the mounting table.

  According to the above-described mask, for example, even when the mask is overlaid on an arrayed object on which an adhesive film is formed, the non-opening portion of the mask does not come into contact with the adhesive film due to the convex portion provided around the opening portion. The adhesive film does not adhere to the mask, and furthermore, since the convex portions are provided around the respective openings, a mask having a predetermined rigidity can be obtained without unnecessarily reducing the thickness of the non-openings. .

  According to the arrangement apparatus described above, since the mask as described above is employed, the conductive balls can be arranged on the arrayed object with high accuracy.

  The present invention will be described based on one embodiment with reference to the drawings. The mask of the following mode is suitable for arranging solder balls having a diameter of 300 μm or less, particularly solder balls having a diameter of about 100 μm to 50 μm as used in FC.

  FIG. 1 is a schematic configuration diagram of an arrangement apparatus using a mask according to an embodiment of the present invention. FIG. 2 is a partially enlarged cross-sectional view of FIG. FIG. 3 is a perspective view of the wafer of FIG. FIG. 4 is a perspective view of the mask of FIG. FIG. 5 is a diagram for explaining the operation of the array device of FIG. FIG. 6 is a perspective view of a wafer according to another embodiment different from FIG. FIG. 7 is a perspective view of a mask for arranging solder balls on the wafer of FIG. FIG. 8 is a plan view and a sectional view in which the mask of FIG. 1 is partially enlarged.

  First, a wafer that is an arrayed body on which solder balls 2 that are conductive balls in this embodiment are arranged will be described. As shown in FIG. 3A, the wafer 3 is composed of a plurality of semiconductor chips 32 arranged regularly. On one surface of each semiconductor chip 32 (hereinafter referred to as an electrode surface), electrodes 31 that are input / output terminals on which solder balls are placed are formed in a region 34 in a certain pattern. The wafer 3 is cut into individual pieces along a cutting line 33 indicated by a two-dot chain line in FIG. On the upper surface of the electrode 31 of the wafer 3, as shown in FIG. 2, for example, an adhesive film 4 is formed in advance by printing a solder paste or a flux with a predetermined thickness.

  As shown in FIG. 1, the arrangement device 1 for arranging the solder balls 2 on the wafer 3 has a wafer placement portion 11 on which the wafer 3 is placed with the electrode surface facing upward and holds a horizontal state, and the wafer 3 is placed on the wafer 3. A mask 13 for arranging the solder balls 2, a magnet part 12 for bringing the mask 13 into close contact with the electrode surface of the wafer 3, and a ball supply part 14 for transferring the solder balls 2 are configured. Note that this arrangement device is the best mode especially for the purpose of automation employing the mask according to the present invention, and the wafer mounting unit 11, the magnet unit 12, and the ball supply unit 14 are not necessarily indispensable configurations. Other configurations can be employed as required.

  The wafer mounting unit 11 includes a mounting table 111 including a wafer mounting recess 113 for mounting the wafer 3 in a horizontal state and an adsorption conduit 114 opened at the bottom of the wafer mounting recess 113, and an adsorption conduit 114 via a pipe 116. And a vacuum pump 115 connected to the. Here, the wafer mounting recess 113 is formed slightly larger than the outer shape of the wafer 3 and substantially the same depth as the thickness of the wafer 3 so that the wafer 3 can be accommodated and the front surface of the wafer 3 and the mounting table 111 are flush with each other. Yes.

  As shown in FIG. 4, the mask 13 is formed corresponding to the arrangement pattern of the electrodes 31 of the wafer 3 and has a through-hole-shaped opening 131 through which the solder ball 2 can be inserted, a non-opening 132, and a non-opening 132. It is comprised with the convex part 133 arrange | positioned at the bottom face. The mask 13 is made of a soft magnetic material such as Ni or Fe so as to be attracted by a magnet portion 12 described later.

  As shown in FIG. 8A, the protrusion 133 forms a recess 135 in a region 134 corresponding to the electrode 31 and including the opening 131 formed in a fixed pattern in plan view. It is provided outside (outside) the region 134 along the cutting line 33. The recess 135 is formed, for example, by etching through a photolithography process on a metal thin plate in which the opening 131 is formed. Therefore, in order to easily form the concave portion 135, it is desirable to have a simple shape in plan view. For example, the concave portion 135 may be rectangular as shown in the figure, and the convex portion 133 may surround the region 134.

  When the adhesive film 4 is formed on the wafer 3 as in this embodiment, the concave portion 135 is formed so as not to contact the adhesive film 4, and the depth thereof (that is, the height of the convex portion 133) is the adhesive film. It is formed deeper than the height of 4. Therefore, when the mask 13 is positioned so as to overlap the wafer 3, the recess 135 does not contact the adhesive film 4. In order to make it difficult for the position to be displaced when the solder ball 2 is filled in the opening 131, the upper limit of the depth of the recess 135 is set to be the same as the radius of the solder ball 2 as shown in FIG. 2. do it.

  The mask 13 having the above-described form is effective when the solder balls 2 are arranged on the electrodes 31 arranged very densely like the wafer 3. Specifically, the size of the rectangular region 34 in which the electrodes 31 are disposed is about 5 mm square, the size of the electrodes 31 is about 100 μm square, and the distance between the electrodes 31 is about 150 μm. The diameter of the solder ball 2 is about 80 μm. Therefore, since the space with a sufficient space between the electrodes 31 is about 50 μm, as shown in FIG. 8D, a concave portion 135 is formed for each opening portion 131 to provide the convex portion 133 in the portion corresponding to the space. Difficult to do. Even in such a case, if the protrusion 131 is provided outside the region 134, the thickness of the non-opening 135 is not reduced unnecessarily, and the mask 13 having a predetermined rigidity can be relatively easily produced in industrial production. Obtainable.

  FIG. 7 shows a mask 13a for arranging solder balls 2 on a wafer 3a (see FIG. 6) having electrodes 31a having an arrangement pattern different from that of the wafer 3 shown in FIG. 3, and FIG. ). In the wafer 3a, as shown in the drawing, the electrodes 31a of the respective semiconductor chips 32a are densely arranged so as to be included in the frame-shaped region 34.

  As shown in FIG. 8B, the convex portion 133a of the mask 13a in which the solder balls 2 are arranged on the electrode 31a is formed in a region 134a by forming a concave portion 135a in a region 134a corresponding to the region 34 including the electrode 31. It is provided outside the area.

  Further, a modified example of the mask is shown in FIGS. The mask of FIG. 8C is for arranging the solder balls 2 on the electrodes densely arranged in the triangular area, and in the area 134b including the opening 131b corresponding to the triangular area. A concave portion 135b is provided, and a convex portion 133b is formed outside the region 134b.

  In the case where the electrodes are not densely arranged, as shown in FIG. 8D, a recess 135c is provided around each opening 131c corresponding to the electrode, thereby projecting around the opening end of the opening 131c. The portion 133c may be formed.

  The magnet unit 12 is disposed below the mounting table 111 and has a permanent magnet 121 facing the mask 13 positioned on the wafer 3, a magnet holder 122 that houses the permanent magnet 121, and a lifting mechanism that moves the magnet holder 122 up and down. The air cylinder 123, the up / down switching valve 125 connected to the air cylinder 123 via the pipe 124, and the compressed air source 126 are configured. According to the magnet unit 12 having such a configuration, when the up / down switching valve 125 is switched to raise the permanent magnet 121 toward the mask 13, the mask 13 is attracted by the magnet 121 and is brought into close contact with the electrode surface of the wafer 3. If it is lowered and moved away from the mask 13, the mask 13 is released from the attractive force of the magnet 121 and can be detached from the wafer 3. The permanent magnet 121 may be an electromagnet.

  The ball supply unit 14 includes a supply unit 141 that supplies the solder balls 2 to the upper surface of the mask 13 positioned with respect to the wafer 3, and a squeegee brush 142 that is a transfer unit that transfers the supplied solder balls 2 to the opening 131 of the mask 13. It consists of and. The squeegee brush 142 is disposed so that the tip end of the squeegee brush 142 is in contact with the upper surface of the mask 13, and horizontally moves above the mask 13 by horizontal moving means (not shown).

  The operation of the arrangement device 1 will be described with reference to FIG.

  With the permanent magnet 121 in the lower end position, the wafer 3 is mounted in a horizontal state in the wafer mounting recess 113 with the electrode surface facing upward, the vacuum pump 115 is operated, and the wafer 3 is fixed to the mounting table 111. (Fig. 5 (a))

  The mask 3 is positioned so that the opening 131 of the mask 13 is aligned with the electrode 31 of the wafer 3, and the mask 13 is overlaid so as to be in close contact with the electrode surface of the wafer 3. (FIG. 5B) At this time, since the convex portion 133 is formed on the mask 13 so that the adhesive film 4 formed on the wafer 3 does not come into contact with the mask 13, the adhesion film 4 adheres to the mask 13. Absent.

  The permanent magnet 121 is raised by the air cylinder 123, and the mask 13 is further tightly fixed to the wafer 3 by the magnetic force of the permanent magnet 121. At this time, the magnetic force of the permanent magnet 121 acts on the mask 13 so as to bend it downward, but the convex part 133 is formed on the non-opening part 132 of the mask 13 and has sufficient rigidity. Therefore, the adhesive film 4 does not adhere without greatly bending.

  The solder ball 2 is supplied onto the mask 13 by the supply means 141, the squeegee brush 142 is moved horizontally to fill the opening 131 with the solder ball 2, and arranged on the electrode 31. Thereafter, the magnet 121 is lowered. (Fig. 5 (d))

  The mask 13 is removed from the wafer 3, the vacuum pump 115 is stopped, the fixation of the wafer 3 is released, and the wafer 3 is taken out from the mounting table 112. (Fig. 5 (e))

  In addition, although the convex part of the mask demonstrated in FIG.4, 7 and 8 is arrange | positioned continuously, you may make it into a protrusion shape and discretely arrange | position.

  The present invention is not limited to the above description, and can also be used for applications in which small or irregular powders or granules are mounted on a substrate, for example, in fields such as pharmaceuticals and ceramics.

It is a schematic block diagram of the arrangement | sequence apparatus using the mask of one embodiment of this invention. It is a partial expanded sectional view of FIG. It is a perspective view of the wafer of FIG. It is a perspective view of the mask of FIG. It is a figure explaining operation | movement of the arrangement | sequence apparatus of FIG. It is a perspective view of the wafer of another aspect. FIG. 7 is a perspective view of a mask for arranging solder balls on the wafer of FIG. 6. It is the top view and sectional drawing which expanded the mask of FIG.

Explanation of symbols

DESCRIPTION OF SYMBOLS 1 Array apparatus 11 Wafer mounting part 111 Mounting stand 112 Support member 113 Wafer mounting recessed part 114 Adsorption path 115 Vacuum pump 116 Piping 12 Magnet part 121 Magnet 122 Magnet holder 123 Lifting means 124 Piping 125 Raising / lowering switching valve 126 Compressed air source 13 Mask 131 Opening 132 Non-opening 133 Protruding part 134 Opening area 135 Recess 14 Ball supply part 141 Supplying means 142 Squeegee brush 2 Solder ball 3 Wafer 31 Electrode 32 Semiconductor chip 33 Cutting line 34 Electrode providing area 4 Adhesive film

Claims (7)

A mask for arranging conductive balls on an object to be arranged in a predetermined arrangement pattern,
An opening formed in correspondence with the array pattern, through which the conductive ball can be inserted, a non-opening, and a convex formed on one surface of the non-opening, the convex being the opening The mask is formed around the open end of the.   2. The mask according to claim 1, wherein the array pattern includes a plurality of regularly arranged regular patterns, and the convex portion is a region that can include the opening formed corresponding to the certain pattern. 3. A mask formed outside the area.   3. The mask according to claim 2, wherein the convex portion surrounds the region and is formed in a rectangular shape.   4. The mask according to claim 1, wherein a height of the convex portion is equal to or less than a radius of the conductive ball. 5.   5. The mask according to claim 1, wherein the mask has soft magnetism.   An apparatus for arranging conductive balls on an arrayed body in a predetermined array pattern, and capable of positioning with respect to a mounting table on which the arrayed body is mounted and an arrayed object mounted on the mounting table A device comprising a mask according to any one of claims 1 to 4 disposed.   An apparatus for arranging conductive balls on an arrayed body in a predetermined array pattern, and capable of positioning with respect to a mounting table on which the arrayed body is mounted and an arrayed object mounted on the mounting table An apparatus comprising: the mask according to claim 5 disposed; and a magnet disposed below the mounting table.

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