JP5177694B2 - Conductive ball mounting device - Google Patents

Description

  The present invention relates to a mounting device for mounting a conductive ball so as to be arranged in a predetermined pattern on an arrayed object such as an electronic component or a member used for manufacturing the electronic component. is there.

  As an example of an arrayed body on which conductive balls (hereinafter referred to as conductive balls) are mounted so as to be aligned in a predetermined pattern, for example, a BGA (Ball Grid Array) type or an FC (Frip- There is an electronic component such as a semiconductor device having a protruding connection bump of an area array type such as a (Chip) type, a substrate or a package thereof.

  In recent years, as mobile terminal devices and notebook computers have become faster, more functional, lighter, smaller, and thinner, electronic components built into them have become smaller and thinner. The contradictory performance of terminalization is required. The area array type electronic component is employed as a means to meet the demand.

  For example, as a method of forming connection bumps using a conductive material such as solder or copper, a paste method in which a paste containing a conductive material is printed on an electrode of an electronic component, a conductive ball method in which a conductive ball is mounted on an electrode, or conductive There are filming methods such as plating or vapor deposition of materials. In order to increase the number of terminals, the arrangement of electrodes is increased in density, and the size of connection bumps tends to be reduced accordingly. When forming small connection bumps, a conductive ball system that is advantageous in terms of alignment accuracy and productivity of the connection bumps is often employed.

  According to the conventional conductive ball method, the connection bump has a printing process in which an adhesive connection aid such as solder paste or flux is printed on the electrode, and the conductive ball is mounted on the electrode on which the connection aid is printed. It is formed through a mounting process to be performed and a bump forming process for forming the connection bump by heating the conductive ball.

  As one of the methods for mounting the conductive ball on the electrode in the mounting step, as described in, for example, Japanese Patent Application Laid-Open No. 2001-223234 (Patent Document 1), the solder ball is attached by a suction head using negative pressure. There is an adsorption system that adsorbs and transfers it onto the electrode for mounting. However, in the suction system, the conductive ball may be deformed by the suction force of the suction head. In addition, the conductive ball sticks to the flux adhering to the tip of the suction head, and even if the suction force is released, it may not be separated from the suction head and a mounting failure may occur. Furthermore, the conductive balls that have moved through the air during the adsorption are charged with static electricity, and an aggregate of the conductive balls agglomerated by the static electricity is mounted on the electrode, or an excess of conductive balls (commonly called surplus balls or extra balls). May adhere to the surface of the workpiece other than the electrode. These problems have been particularly noticeable with the reduction in the diameter of the conductive balls.

  As another mounting method, a flat plate mask which is an alignment member in which a through hole positioning opening corresponding to an electrode pattern is formed, and a conductive ball supplied on the mask is moved to position the opening. There is a so-called transfer method in which the operation is called “transfer” and mounted on the electrode through the positioning opening. Examples of this transfer method are disclosed in Japanese Patent Application Laid-Open No. 2002-171054 (Patent Document 2), Japanese Patent Application Laid-Open No. 9-162533 (Patent Document 3), Japanese Patent Application Laid-Open No. 2001-267331 (Patent Document 4), and Japanese Patent Application Laid-Open No. No. 126046 (Patent Document 5) and the like.

  The mounting device described in Patent Document 2 is “in a solder ball mounting device for mounting solder balls on a flux applied to a plurality of locations on the surface of a workpiece, arranged to cover the workpiece, A mask having a plurality of ball holding holes through which the solder balls can pass at positions corresponding to the flux, a tilting mechanism for tilting the workpiece and the mask, and moving on the mask surface in the tilted state from above to below. And a regulating member that moves the solder ball on the mask surface and drops the solder ball into the positioning opening while regulating the movement speed of the plurality of solder balls. The conductive ball to be received by the regulating member can be reliably inserted into the positioning opening by moving it at an appropriate speed. It has been described.

  The mounting device described in Patent Document 3 states that “in the state where the bottom of the solder supply head is in contact with the solder supply object, the solder supply means slides on the inner surface of the bottom of the solder supply head, By moving a large number of spherical solders supplied in advance into the supply head on the inner surface of the bottom, the spherical solder is supplied to each solder supply position of the solder supply object through each solder supply hole. Using a static elimination brush as a transfer tool, which is a solder supply means, and sliding the tip of the static elimination brush steadily supplied to each solder supply position of the solder supply object. It can be explained.

  The mounting method described in Patent Document 4 is “adhesive film forming step of selectively forming an adhesive film on each of a plurality of electrode portions on an electronic component, and each of the adhesive films formed in the adhesive film forming step. A bonding material aligning and supplying step for aligning and supplying the bonding material on the substrate, and a bonding step of melting the bonding material supplied in the bonding material aligning and supplying step and bonding it to the electrode portion. The ball alignment mask is placed on the wafer, the solder balls are supplied onto the ball alignment mask, and the solder balls are moved by an alignment squeegee as a transfer tool and mounted on the electrode on which the adhesive film is formed. Is.

  The mounting apparatus described in Patent Document 5 is “In a ball grid array manufacturing apparatus in which a minute solder ball is mounted on a pattern formed on a substrate, a holding table for holding the substrate is provided, A mask having solder ball introduction holes corresponding to the pattern is provided on the top of the substrate, a spacer is provided between the mask and the substrate, and a blade is provided so that the top surface of the mask can be moved horizontally. Place a solder ball in a free state on it and move a flexible blade horizontally on it to drop the solder ball one by one into the mask introduction hole, scraping off the excess solder ball and moving it to one side of the mask. Collect and mount solder balls only on necessary parts. "

  In this transfer system, the conductive ball is mounted by the action of gravity, so that there is an advantage that the problem caused by the adsorption system is solved. In addition, even when the conductive ball is charged, the assembly of the conductive balls that is in a dumped state due to the restriction of the size of the positioning opening is not mounted on the electrode, and the part other than the electrode in the electronic component is shielded with a mask. Therefore, there is an advantage that there is little possibility that the surplus balls adhere to unnecessary portions.

JP 2001-223234 A JP 2002-171054 A JP-A-9-162533 Japanese Patent Laid-Open No. 2001-267331 Japanese Patent Laid-Open No. 10-126046

  In the future, demands for further multi-terminal and miniaturization of electronic components are expected. In that case, since the number of connection bumps becomes enormous, the pitch is reduced and the density is increased, and conductive balls having a diameter of 100 μm or less are used. The following problems occur as the diameter of the conductive ball is reduced.

  In the transfer method, when the diameter of the conductive ball is reduced, the filling rate of the positioning opening is reduced, and therefore, the conductive ball may not be mounted on some electrodes, and the mounting rate may be decreased. Here, the mounting rate is defined as a value obtained by an expression defined by (the number of conductive balls mounted at a predetermined mounting position / the number of predetermined mounting positions). Specifically, for example, the mounting rate in the case where the arrayed body is a substrate having a plurality of electrodes is determined by (number of conductive balls mounted on electrodes / number of electrodes).

  If the conductive ball has a large diameter and a large mass, the conductive ball inserted in the positioning opening will drop vigorously by its own weight, collide with the flux, and adhere well to the flux on the electrode. Placed. The contact area between the large diameter conductive ball and the flux is large. Therefore, the conductive ball that is well adhered and held with the flux is less likely to be detached from the electrode even when a certain external force is applied.

  However, when the conductive ball has a small diameter and a small mass, the momentum when the conductive ball inserted into the positioning opening falls and collides with the flux is reduced. Also, the contact area with the flux is reduced. As a result, the adhesive force of the conductive ball due to the flux is reduced, and the conductive ball is easily detached from the electrode even when a slight external force is applied. For example, when a flexible squeegee is used as the transfer tool, the conductive ball is once transferred to the positioning opening by the squeegee, but the tip of the squeegee enters a part of the positioning opening, and the conductive ball becomes conductive. The ball is scraped off at the tip and separated from the electrode. Therefore, the mounting rate of the conductive balls is reduced.

  As the diameter of the conductive ball is reduced, the conductive ball behaves like a powder. Therefore, the control of inertial force (gravity) becomes relatively small. For example, since production of electronic components and the like is normally performed in the atmosphere, a portion that is charged with static electricity or moisture is generated on the mask used as the alignment member. When the conductive ball is large in diameter and large in mass, inertial force (gravity) is dominant. When the conductive ball is moved on the mask with a squeegee or when the conductive ball is inserted into the positioning opening, the moving conductive ball has sufficient inertial force (gravity). Therefore, it is less likely to be adsorbed by static electricity or moisture partially generated in the mask as described above.

  When the diameter of the conductive ball is reduced and the mass thereof is reduced, the magnitude of the adsorption force due to static electricity or moisture may be larger than the inertial force (gravity). Therefore, when the conductive ball is attracted by the attracting force in the positioning opening, it is not placed on the electrode, and as a result, the mounting rate is lowered. Further, when the conductive ball is adsorbed on the mask surface, the mounting rate of the conductive ball is reduced by one transfer operation with the squeegee. As a result, it is necessary to perform a plurality of transfer operations, but the plurality of transfer operations promotes the phenomenon described above, in which the conductive ball once filled in the positioning opening is scraped at the tip of the squeegee. Let Therefore, it becomes difficult to improve the mounting rate. In addition, the conductive balls adsorbed on the mask may remain in that state. When the mask is removed from the electronic component, the conductive ball adsorbed by the mask is detached from the mask and adheres to the electronic component, causing a short circuit of the conductor circuit.

  As shown in FIG. 20 (a), deformations such as inevitable warpage in the plate thickness direction and variations in plate thickness due to differences in the expansion coefficient between the electrode 71 and the conductor pattern and the electronic component 7, manufacturing conditions, etc., are caused. Has. When the mask 92 is disposed on the electronic component 7, a gap is generated between the electronic component 7 and the mask 92. When the gap is larger than that of the conductive ball B, the conductive ball B inserted in the positioning opening 921 is not placed on the leakage electrode 71 from the gap, and as a result, the mounting rate is lowered. The leaked conductive ball B becomes a surplus ball and causes a short circuit of the conductor pattern. In addition, the leaking conductive ball B may adhere to the outer peripheral portion of the electrode 71, causing a plurality of conductive balls B to be connected to form a bridge.

  When the mask is positioned on the electronic component, the flux applied to the electrode may adhere to the inner wall of the positioning opening. The conductive ball inserted in the positioning opening is captured by the flux adhering to the inner wall, and as a result, the mounting rate is lowered. Also, the flux may adhere to the mask and the mask cannot be separated from the electronic component.

  In the transfer method, more conductive balls than the number of electrodes are supplied to the upper surface of the mask, a transfer operation is performed, and excess conductive balls that are not filled in the positioning openings are collected. The collected conductive balls are often used as they are for the next transfer operation. During the transfer operation, the flux may adhere to the conductive ball. The conductive ball to which the flux is attached is not smoothly inserted into the positioning opening, and as a result, the mounting rate is lowered. The problem related to the flux may be solved by cleaning the mask or the conductive ball, but the manufacturing cost increases.

  An object of the present invention is to provide an improved mounting apparatus for mounting conductive balls on an arrayed body in a predetermined pattern. One object of the present invention is to provide a conductive ball mounting apparatus capable of improving the mounting ratio of conductive balls on an arrayed body. An object of the present invention is to provide a mounting device in which surplus balls are less likely to adhere to an arrayed body.

The present invention provides a mounting device for mounting conductive balls on one surface of an arrayed body in a predetermined pattern.
The present invention includes conductive balls mainly composed of metals such as Sn, Cu, Au, Ag, W, Ni, Mo, and Al. Further, the present invention includes a conductive ball in which a conductive metal such as solder is coated on the surface of a ball mainly composed of a resin such as polypropylene or polyvinyl chloride, polystyrene, polyamide, cellulose acetate, or polyester.
Electronic components such as semiconductor devices (chips), substrates, packages thereof, and other electronic components that employ conductive balls as connection bumps are included in the arrayed body of the present invention. In addition, a member for forming a connection bump on the electronic component, for example, a member on which the conductive ball is disposed for mounting the conductive ball on the electronic component is also included in the arrayed body referred to in the present invention.
In the present invention, the property of the surface of the arrayed body on which the conductive balls are mounted is not particularly limited, and a flat surface, a curved surface, an uneven surface, or the like is targeted.

The present invention provides a mounting apparatus for mounting conductive balls on one surface of an arrayed body in a predetermined pattern, one surface to which the ball to be mounted on the arrayed body is supplied, and the other of the one surface And an alignment member arranged corresponding to the pattern and having an opening on the one surface and the other surface through which the ball can be inserted, and the shaft core being substantially aligned. A transfer tool including two or more linear members having flexibility, and a holding member that fixes an end of the linear member so that a curved abdomen is formed in the linear member. A magnetic generator that attracts the abdomen of the linear member and presses it against one surface of the alignment member, and at least when the ball is mounted, the alignment member has the other surface of the alignment member that is the arrayed body. State for one side In the transfer tool, the abdomen of the linear member abutted against one surface of the alignment member is applied in a substantially horizontal posture with respect to the ball supplied to the one surface of the alignment member. It is arranged in a contactable state, is moved horizontally relative to one surface of the alignment member, and a ball supplied to one surface of the alignment member is captured and moved by the abdomen of the linear member. It is a mounting apparatus of the conductive ball inserted in the positioning opening.

  As described in detail below, according to the present invention, an improved mounting apparatus for mounting conductive balls on an arrayed body in a predetermined pattern is provided.

It is a conceptual diagram of the mounting apparatus which concerns on the 1st-6th aspect of this invention. It is a side view of the mounting part of the mounting apparatus of the 1st aspect of FIG. It is a figure which shows the structure of the board | substrate with which a conductive ball is mounted with the mounting apparatus of the 1st aspect of FIG. It is a figure which shows the alignment member of the mounting part of FIG. It is a figure which shows the modification of the alignment member of FIG. FIG. 6 is a partially enlarged cross-sectional view of the alignment member of FIGS. 4 and 5. It is a figure which shows another modification of the alignment member of FIG. It is a figure which shows the modification of the alignment member of FIG. It is a perspective view which shows the transfer tool and alignment member of the mounting part of FIG. It is a figure which shows the modification of the transfer tool of FIG. It is aa sectional drawing of FIG. 9, Comprising: It is the elements on larger scale of a transfer tool. It is a top view which shows the transfer tool and alignment member of the mounting part of FIG. It is a figure explaining operation | movement of the mounting apparatus of the 1st aspect of FIG. It is a figure explaining operation | movement of the transfer tool of FIG. It is a side view of the mounting part of the mounting apparatus of the 2nd aspect of FIG. It is a perspective view which shows the transfer tool of the mounting part of FIG. 15, an alignment member, and a magnetic generator. It is a figure which shows the modification of the magnetic generator of FIG. It is a side view of the mounting part of the mounting apparatus of the 3rd aspect of FIG. It is sectional drawing of the holder of FIG. It is an enlarged side view of the holder of FIG. 18, a board | substrate, and a mask. It is the elements on larger scale of the mask of the mounting apparatus of the 4th aspect of FIG. It is a figure explaining operation | movement of the mounting apparatus of the 4th aspect of FIG. It is a figure which shows the modification of the temporarily fixed film | membrane altered part of FIG. It is a figure which shows the mounting part of the mounting apparatus of the 5th aspect of FIG. It is a figure explaining operation | movement of the mounting apparatus of the 5th aspect of FIG. It is a conceptual diagram of the mounting apparatus which concerns on the 6th aspect of this invention. It is a figure which shows the temporarily fixed film | membrane formation part of the mounting apparatus of FIG. It is a figure explaining operation | movement of the mounting apparatus of FIG.

  The present invention will be described. Of the embodiments related to the present invention described below, the third to sixth embodiments not directly related to the invention described in the claims are indicated as “reference examples” for the sake of understanding. It does not limit the technical scope.

1. First Embodiment A first embodiment, which is an example of the present invention, will be described with reference to FIGS.
FIG. 1 is a conceptual diagram of a mounting apparatus 1a according to the first aspect of the present invention. FIG. 2 is a side view of the mounting portion 2 of the mounting apparatus 1 of FIG. FIG. 3 is a view showing the structure of the substrate 7 on which the conductive balls B are mounted in the mounting apparatus 1 of FIG. FIG. 4 is a view showing the alignment member 22 of the mounting portion 2 of FIG. FIG. 5 is a view showing a modification 28 of the alignment member 22 of FIG. FIG. 6 is a partially enlarged cross-sectional view of the alignment members 22 and 28 of FIGS. 4 and 5. FIG. 7 is a view showing another modification 22a to 22c of the alignment member 22 of FIG. FIG. 8 is a view showing a modification 28 ′ of the alignment member 28 in FIG. 5. FIG. 9 is a perspective view showing the transfer tool 27 and the alignment member 22 of the mounting portion 2 of FIG. FIG. 10 is a diagram illustrating modifications 27a to 27e of the transfer tool 27 of FIG. FIG. 11 is a cross-sectional view taken along the line aa in FIG. 9 and is a partially enlarged cross-sectional view of the transfer tool 27. FIG. 12 is a plan view showing the transfer tool 27 and the alignment member 22 of the mounting portion 2 of FIG. FIG. 13 is a diagram for explaining the operation of the mounting apparatus 1 of FIG. FIG. 14 is a diagram for explaining the operation of the transfer tool 27 of FIG.

  As shown in FIG. 1, the mounting device 1 a according to the first aspect includes a mounting portion 2 that mounts solder balls aligned on a substrate that is an arrayed body.

  As shown in FIG. 3, the substrate 7 has connection bumps 72 b (72) connected to an external device such as a mother board protruding in one area (lower surface) in an area array and connected to the semiconductor element 8. Connection bumps 72a (72) are projected from the other surface (upper surface) in an area array shape. The semiconductor element 8 is flip-chip bonded to the upper surface of the substrate 8 to form a package.

  The substrate 7 has a thin plate-like base 73, a pad-like electrode 71a (71) in which the connection bump 72a projects from the upper surface side of the base 73, and a pad shape in which the connection bump 72b projects from the lower surface side. Electrode 71b (71). A conductor pattern is formed on the surface and inside of the base 73 for rewiring. As the substrate 73, a known resin or ceramic substrate or a substrate on which they are laminated is selected as necessary.

  As shown in FIG. 2, the mounting unit 2 includes a mask 22 which is an alignment member for aligning the solder balls B on the electrodes 71 of the substrate 7, and a moving means (not shown) on the upper surface of the mask 22 positioned on the substrate 7. And a transfer tool 27 which is moved horizontally and transfers the solder balls B.

  The mounting portion 2 of the first aspect has a holder 21 that holds the posture of the substrate 7 horizontally with the electrode 71 facing upward, and the holder 21 can be raised and lowered, so that the substrate 7 can be raised and lowered at a predetermined height. Holder lifting / lowering means 29 for positioning, mask horizontal moving means 23 for horizontally supporting the mask 22 and moving it in the horizontal direction to position the mask 22 on the substrate 7 positioned at the predetermined height, and the mask 22 The ball supply means 24 for supplying the solder balls B to the upper surface of the mask 22 and the ball removal means 26 for removing the remaining solder balls B from the upper surface of the mask 22 are provided.

  The holder 21 or the holder lifting / lowering means 29, the mask horizontal moving means 23, the ball supply means 24, and the ball removing means 26 can be appropriately selected according to requirements such as cost and quality. For example, the substrate 7 may be simply placed on a table. Positioning of the substrate 7 and the mask 22 may be performed manually. The supply and removal of the solder balls B may be performed manually.

  Hereinafter, the configuration of the mask 22 and the transfer tool 27, the holder 21, the holder lifting / lowering means 29, the mask horizontal moving means 23, the ball supply means 24, and the ball removing means 26 will be described in detail.

1-1. Mask The mask 22 has an upper surface (one surface) 222 and a lower surface (the other surface) 223 with respect to the upper surface, and a positioning opening 221 corresponding to the arrangement pattern, through which the solder balls B can be inserted and opened to the upper surface 222 and the lower surface 223. And.

  The mask 22 has a protrusion 224 shown in FIG. 4B and has a structure in which the lower surface 223 does not contact the substrate 7 or a structure in which the lower surface 223 does not have the protrusion 224 and contacts the substrate 7. Can be taken. In any structure, when the lower surface 223 of the mask 22 is positioned on the electrode 71, the distance t from the upper surface 711 of the electrode 71 to the upper surface 222 of the mask 22 is 0. It is preferable to form so as to have a thickness satisfying 8 ≦ t / d ≦ 1.4. That is, when the thickness of the mask 22 is such that t / d is less than 0.8, the top of the solder ball B is exposed too much with respect to the upper surface 222 of the mask 22, so that the solder ball B once filled in the positioning opening 221 is obtained. Can easily escape from the positioning opening 221 and t / d is larger than 1.4, the positioning opening 221 is easily filled with a plurality of solder balls B.

  The positioning opening 221 has a first tapered hole 2211 that widens from the upper surface to the lower surface. It is preferable that the ridge line 2211b of the upper edge portion 2211a of the first taper hole portion 51 is displaced above the center of the solder ball 3 mounted on the upper surface 771 of the electrode 71. That is, most of the solder balls B are brought close to the wall surface on one side of the positioning opening 221 when it is transferred to the positioning opening 221. According to the positioning opening 221 having the first tapered hole portion 2211, the solder ball B has its upper hemisphere in contact with the upper side edge portion 2211 a of the first tapered hole portion 2211 and is pressed from above by the side edge portion 2211 a. Since it is in the attached state, it is difficult for it to come out of the positioning opening 221 even when an external force such as vibration is applied. Further, when the mask 22 is removed upward, even if the solder ball B remains in contact with the wall surface, the wall surface moves in a direction away from the ball B, so that the solder ball B is dragged by the mask 22 and the electrode 71 is moved. Less chances of being taken away from

  The shape of the first tapered hole portion 2211 may be a substantially truncated cone shape. If the first taper hole portion 221 has a substantially truncated cone shape, there is no corner portion on the side wall, and the solder ball B is smoothly inserted into the positioning opening portion 221 without being obstructed by the corner portion.

  Further, as shown in FIG. 6 (a), the diameter D1 of the upper opening end 2211c of the first tapered hole portion 2211 is preferably large so that the solder ball B can be easily passed through. Not only does the variation in the position of the solder ball B mounted on the 71 increase, but also the excess solder ball B tends to stagnate above the positioning opening 221, and the solder ball B stagnated when the mask 22 is removed is not removed from the substrate 7. The solder ball B mounted on the electrode 71 may be blown off to reduce the mounting rate. In addition, the diameter of the lower opening end 2211d of the first tapered hole 221 should be increased within the range allowed by the strength of the mask 22. That is, as the lower opening end 2211d is increased, the inclination of the side wall of the first tapered hole portion 51 is increased, so that the solder ball B can be pressed from the upper part, and the solder ball B can be further prevented from coming out. However, in order to prevent the solder ball B from being separated from the electrode 71 when the mask 22 is removed, it is preferable that the tolerance of variation in the mounting position of the solder ball B is set to (b + d) or less.

  The mask 22 is not particularly limited to the above description. For example, like the mask 22a shown in FIG. 7A, the upper surface 222a may be formed slightly oblique to the lower surface 223. Further, as in the mask 22b shown in FIG. 5B, the positioning opening 221b may be one in which a cylindrical hole 2212 is provided coaxially above the first tapered hole 2211. In addition, as in the mask 22c shown in FIG. 5C, the positioning opening 221c may be one in which a cylindrical hole portion 2213 is provided coaxially below the first tapered hole portion 2211.

Further, another example mask will be described.
As shown in FIG. 5, the mask 28 includes a positioning opening 281 having a generally spelled shape. The positioning opening 281 has a first tapered hole portion 2811 that is basically similar to the first tapered hole portion 2211, and is formed on the upper surface 61 of the mask 6 coaxially with the first tapered hole portion 2811. A second tapered hole 2812 that extends in the direction of 282 is provided. According to the positioning opening 281, the solder ball B supplied to the upper surface of the mask 28 is guided by the second tapered hole 2812, and the solder ball B is more smoothly inserted into the positioning opening 281. The ridge line 2812b of the lower side edge portion 2812a of the second tapered hole portion 2812 or the ridge line 2811b of the upper side edge portion 2811a of the first tapered hole portion 2811 (in this example, the ridge lines 2811b and 2812b are the same). If the shape is chamfered or rounded, the solder balls B are introduced more smoothly and effective.

  The first and second tapered hole portions 2811 and 2812 may have a substantially truncated cone shape. If the first and second taper holes 2811 and 2812 have a substantially truncated cone shape, there are no corners on the side walls, and the solder ball B is smoothly inserted into the positioning opening 281 without being obstructed by the corners. Is done.

  As shown in FIG. 6B, the diameter D1 of the upper opening end 2812c of the second tapered hole portion 2812 is preferably about 1.2 to 1.4d with respect to the diameter of the solder ball B. The diameter of the lower opening end 2811d of the first taper hole portion 2811 is preferably set to (b + d) or less, where b is an allowable range of variation in the mounting position of the solder ball B. The reason is the same as in the case of the mask 22 described above.

  According to this mask 28, the variation in the mounting position of the solder ball B can be made smaller than in the case of the mask 22. As shown in FIG. 6A, in the case of the mask 22, the upper opening end 2811c of the first tapered hole 2811 of the positioning opening 281 is formed with a size D1 that allows the solder ball B to be smoothly inserted. Has been. The first taper hole 2811 of the positioning opening 281 is a hole extending downward. Therefore, the position of the solder ball B in the planar direction is regulated by the narrowest upper opening end 2811c. As a result, the solder ball B is placed on the electrode 71 with variation according to the size D1 of the upper opening end 2811c.

  On the other hand, even in the case of the mask 28, as shown in FIG. 6B, the upper opening end 2812c of the second tapered hole portion 2812 of the positioning opening portion 281 has a size D1 that allows the solder ball B to be smoothly inserted. Although formed, the second tapered hole portion 2812 is a hole that shrinks downward. In the positioning opening 281, the size D2 of the lower opening end 2812d (in this example, the same as the upper opening end 2811c of the first tapered hole 2811) is the narrowest. The position in the plane direction is regulated by the lower opening end 2812d. Therefore, for example, by making the size D2 of the lower opening end 2812d slightly larger than the diameter so that the solder ball B can pass through, the variation in the mounting position of the solder ball B can be made extremely small. .

  The shape of the positioning opening 281 is not particularly limited to the above description. For example, like the mask 28 ′ shown in FIG. 8, the positioning opening 281 ′ may be one in which a cylindrical hole 2813 is provided between the first and second tapered holes 2811 and 2812 coaxially therewith. .

  The masks 22 and 28 are repeatedly used with a kind of jig, and a plate-like substrate such as a metal plate, a resin plate, a laminated product, or a film-formed product is used. Since the positioning openings 221 and 281 must be formed with an accurate shape and dimensions, it is desirable to form the positioning openings 221 and 281 on the base material by laser processing or etching processing. If the masks 22 and 28 are manufactured by electroforming using nickel or the like as a material, the positioning openings 221 and 281 are also formed at the same time.

  Further, it is desirable that the mask 28 uses a laminated plate provided with an etching barrier layer as a base material. This laminated board is a base material whose intermediate layer is an etching barrier layer. For example, the first layer is made of a nickel alloy, the intermediate layer which is a second layer is made of a titanium alloy, and the third layer is made of the same nickel alloy as the first layer. A layer in which different etchants are stacked. According to this laminated board, a resist film having a pattern capable of forming a positioning opening in the first layer and the third layer is formed and etched. At this time, since the intermediate layer is an etching barrier layer, it is not removed by etching. Next, etching for removing the intermediate layer is performed. At this time, the first layer and the third layer are not removed. According to this laminated plate, a substantially continuous through-hole such as the positioning opening 281 of the mask 28 is formed with high accuracy.

1-2. As shown in FIG. 9, the transfer tool 27 includes two or more linear members 271 arranged with the shaft cores substantially aligned. The transfer tool 27 is arranged so that the linear member 271 can come into contact with the solder ball B supplied to the upper surface of the mask 22 in a substantially horizontal posture at least when the solder ball B is mounted. At the same time, it is moved horizontally relative to the upper surface of the mask 22.

  The pair of holding members denoted by reference numeral 272 is used to keep the linear member 271 in a shape having a curved abdomen. Here, the abdomen is a portion that is not held by the holding member 272, specifically, a portion that forms a substantially linear shape that contacts the solder ball B as indicated by reference numeral F in FIG. .

  The shape of the linear member 271 stretched between the holding members 272 can be adjusted as appropriate by adjusting the interval and direction of the holding members 272. That is, when the solder ball B mounting range is small, the length of the abdomen may be short. Therefore, as shown in FIGS. 10 (a) and 10 (b), a substantially bow shape or a substantially U shape, A character shape may be used. When the mounting range is wide, a long abdomen is required. Therefore, it may be substantially linear as shown in FIG. 10C, and the rigidity of the linear member 271 is increased as shown in FIG. A plurality of linear members 271 may be arranged for raising. Moreover, as shown in FIG.10 (e), the linear member 271 may be hold | maintained at the holding member 272 at the one end.

  The transfer tool 27 is horizontally moved manually or by a mechanical movement mechanism (single-axis table, cylinder, etc.). Further, if the transfer tool 27 can be moved and positioned also in the direction perpendicular to the upper surface of the mask 22, it is convenient for transferring the solder ball B in a reciprocating operation, and is particularly suitable for automation. .

The transfer tool 27 will be described in more detail.
As shown in FIG. 11, the transfer tool 27 is densely arranged in the movement direction (horizontal direction on the paper surface) and in the vertical direction so that the plurality of linear members 271 are in close contact with each other. Specifically, as shown in the drawing, a number of linear members 271 are bound together and fixed to the holding member 272 closely. The linear members 271 have low rigidity individually, but the linear members 271 are densely provided in this way, so that they have overall rigidity. Therefore, according to the linear member 271 in which a plurality of wires are densely arranged, a large number of solder balls B put into the mask 22 can be captured as a whole and hardly deformed even if a reaction force is received through the captured solder balls B. Become.

  The linear member 271 preferably has a conductive material such as metal or carbon in order to remove static electricity from the solder ball B charged during transfer and prevent adhesion to the substrate 7 or the linear member 271. Further, in order to prevent the solder ball B from adhering to the surface of the linear member 271, it is preferable that the linear member 271 has, for example, at least a surface that has been subjected to fluorine treatment or the like to impart water repellency.

  As the linear member 271, members having various cross-sectional shapes can be selected, but it is desirable in terms of industrial production to adopt a substantially circular shape in terms of availability. When the cross-section of the linear member 271 is substantially circular, if the diameter is smaller than the solder ball B, the linear member 271 is brought into contact with the solder ball B supplied to the upper surface of the mask 271 and then the solder member B 271 It is preferable because it is difficult to ride B.

  The posture of the linear member 271 when viewed horizontally is not particularly limited, but as shown in FIG. 12, the linear member 271 is inclined with respect to the moving direction of the linear member 271. When moved, the solder ball B may move along the abdomen side surface of the linear member 271 and leak from the abdomen end. Therefore, the crossing angle θ between the moving direction of the linear member 271 and the axis of the linear member 271 is preferably in the range of 45 ° to 135 °, and more preferably, the crossing angle θ is about 90 °. What is necessary is just to move the member 271 in the direction substantially orthogonal to the axial center. Further, if the transfer tool 27 is moved horizontally while the linear member 271 is in contact with the upper surface of the mask 22, the solder ball B does not remain on the leak mask 22 from the gap between the linear member 271 and the mask 22. preferable.

  If the linear member 271 is formed of a flexible material mainly composed of, for example, soft resin, rubber, paper, or metal, it is desirable that the solder ball B can be transferred while being prevented from being deformed. Furthermore, when the linear member 271 has flexibility, as shown in FIG. 14, even when a certain linear member 271 is deformed and the solder ball B leaks from the gap, the leaked solder ball B is moved backward. It is captured by another adjacent linear member 271. Therefore, the remaining solder ball B that has not been inserted into the positioning opening 221 is moved to a predetermined position of the mask 22, for example, while being captured by the linear member 271 without leaking backward. If the remaining solder balls B are collected by an appropriate method, the possibility that the solder balls B remain on the mask 22 is reduced. The linear member 271 may be held between the holding members 272 in a flexible state.

  Further, the linear member 271 is formed of a material mainly composed of a predetermined waist strength, that is, an elastic resin, rubber, metal, or the like, and the linear member 271 is pressed against the upper surface of the mask 22. If provided, the downward force due to the reaction force of the elastically deformed linear member 271 acts on the solder ball B transferred to above the positioning opening 221 in addition to gravity. The solder ball B to which the reaction force acts in addition to the gravity is smoothly and surely inserted into the positioning opening 221.

1-3. As shown in FIG. 2, the holder 21 includes a wall 213 erected on the left side of the holder 21, an insertion recess 212 on which the substrate 7 can be freely mounted, and an opening opened on the bottom surface of the insertion recess 212. An opening 211b that opens to the outside of the portion 211a, a fluid passage 211 that communicates with the openings 211a and 211b, and negative pressure generating means that generates a negative pressure by connecting to the fluid passage 211 at the opening 211b. . If a negative pressure is generated by the negative pressure generating means after mounting the substrate 7 in the insertion recess 212, the substrate 7 comes into close contact with the bottom surface of the insertion recess 212. Therefore, the posture of the substrate 7 is always kept horizontal.

1-4. Holder lifting / lowering means The initial position of the holder 21 before mounting the substrate 7 is a lower position on the paper surface as shown in FIG. The holder elevating means 29 raises the holder 21 from the initial position to a predetermined height after the substrate 7 is mounted on the holder 21. The substrate 7 is positioned at the mounting position shown in FIG. 2A for mounting the solder balls B. The holder elevating means 29 lowers the holder 21 to the initial position after the solder balls B are mounted on the substrate 7, and removes the mask 22 from the substrate 7.

1-5. Mask horizontal moving means The initial position of the mask 22 is the right position on the paper surface as shown in FIG. The mask transfer means 23 moves the mask 22 to the left from the initial position after the substrate 7 is positioned at the mounting position. As shown in FIG. 2A, the mask 22 stops when its left end face comes into contact with the right side surface of the wall portion 213. As shown in FIG. 4A, the mask 22 is positioned with respect to the substrate 7 so that the positioning opening 221 corresponds to the electrode 71. The mask horizontal moving means 23 is returned to the initial position after the solder balls B are mounted on the substrate 7 and the holder 21 is lowered.

1-6. Ball supply means The ball supply means 24 is disposed above the right end of the mask 22 and has a supply port 241 for supplying solder balls. The ball supply means 24 quantitatively weighs more solder balls B than the number of electrodes 71, and the upper surface of the mask 22. To supply.

1-7. Ball removing means The ball removing means 26 has a suction port 261 that is disposed at the left end of the mask 22 and sucks the solder balls B, and removes the balls remaining on the upper surface of the mask 22 by suction.

1-8. Operation of Mounting Device 1 The operation of the mounting device 1a including the mounting unit 2 will be described.

1) Step of aligning the mask (first step)
As shown in FIG. 13A, the mask 22 is aligned with the substrate 7. At this time, the positioning opening 221 of the mask 22 corresponds to the electrode 71 of the substrate 7 in the planar direction, and the mask 22 is positioned so that the lower surface of the mask 22 has a predetermined positional relationship with the upper surface of the substrate 7 in the vertical direction. Match. In the case of FIG. 13A, the mask 22 is aligned so that the lower surface of the mask 22 is in contact with the upper surface of the electrode 71. For example, when flux or the like is applied to the electrode 71, the flux Alignment may be performed such that the lower surface of the mask 22 is separated from the substrate 7 at a predetermined interval so that the mask 22 does not adhere to the mask 22.

2) Step of mounting solder balls (second step)
Solder balls B equal to or more than the number of electrodes 71 are supplied to the upper surface of the mask 12 by the ball supply means 24. The transfer tool 27 disposed so that the linear member 271 contacts the solder ball B supplied to the upper surface of the mask 22 in a substantially horizontal posture is moved horizontally relative to the upper surface of the mask 22.

  Then, as shown in FIG. 14, the solder ball B is captured by the abdomen of the linear member 271 that moves in a substantially horizontal state with respect to the upper surface of the mask 22, moved to above the positioning opening 221, and the positioning opening 221 and placed on the electrode 71 as shown in FIG. Here, since the abdomen sufficiently larger than the positioning opening 221 moves horizontally with the linear member 271 parallel to the upper surface of the mask 22, the linear member 271 does not enter the positioning opening 221 due to the restriction of the positioning opening 221. . Therefore, the solder ball B already inserted into the positioning opening 221 is scraped by the linear member 271 and is less likely to be detached from the electrode 71. Further, the solder ball B is inserted into the positioning opening 221 having the first tapered hole portion 2211 having the edge portion ridge line 2211b displaced to the upper side from the center thereof, and moves on the side wall of the first tapered hole portion 2211. Is restrained. Therefore, even when the linear member 271 enters the positioning opening 221, there is little possibility that the solder ball B inserted into the positioning opening 221 is easily scraped and detached from the electrode 71.

  The remaining solder balls B are moved to the ball removing means 26 side by the transfer tool 27 and removed by the ball removing means 26. Here, as shown in FIG. 14, even when a certain linear member 271 is deformed and the solder ball B leaks from the gap, the leaked solder ball B is captured by another linear member 271 adjacent to the rear. . Therefore, the remaining solder balls B that have not been inserted into the positioning opening 221 are moved to the ball removing means 26 while being captured by the linear member 271 without leaking backward.

3) Step of removing the mask from the substrate As shown in FIG. 13C, the holder elevating means 29 is lowered to remove the mask 22 from the substrate 7.

  When the substrate 7 on which the solder balls B are mounted in this manner is reflowed, connection bumps 72 are formed as shown in FIG.

2. Second Embodiment A second embodiment which is an example of the present invention will be described with reference to FIG. 1 and FIGS.
FIG. 1 is a conceptual diagram of the mounting apparatus 1b according to the second aspect. FIG. 15 is a side view of the mounting portion 3 of the mounting apparatus 1b of FIG. 16 is a perspective view showing the transfer tool 27, the alignment member 22, and the magnetic generator 314 of the mounting portion 2 of FIG. FIG. 17 is a diagram illustrating modifications 314a to 314f of the magnetic generator 314 of FIG. In the figure, components substantially similar to those of the mounting device 1a of the first aspect are denoted by the same reference numerals, and detailed description of the structure and operation thereof is omitted. (The same applies to other modes described below.)

  As shown in FIG. 1, the mounting device 1 b of the second aspect has a mounting portion 3 that mounts solder balls aligned on a substrate that is an arrayed body.

  As shown in FIG. 15, the mounting portion 3 of the second aspect has basically the same configuration as the mounting portion 2 of the first aspect, and is an alignment member that aligns the solder balls B on the electrodes 71 of the substrate 7. The mask 22, the transfer tool 27 'that horizontally moves the upper surface of the mask 22 positioned on the substrate 7 by a moving means (not shown) and transfers the solder ball B, and the substrate 71 with the electrode 71 facing upward so as to be suitable for automation. 7, a holder 31 for holding the posture 7, a holder lifting / lowering means 29 for positioning the substrate 7 at a predetermined height, and the mask 22 for supporting the mask 22 horizontally and moving it in the horizontal direction. A mask horizontal movement means 23 for positioning the mask 22 on the substrate 7 positioned at a height, a ball supply means 24 for supplying a solder ball B to the upper surface of the mask 22, and a surplus solder ball And a ball removal means 26 for removing Le B from the upper surface of the mask 22.

  The mounting portion 3 of the second aspect is different from the mounting portion 2 of the first aspect in that it is incorporated in a transfer tool 27 ′ having a linear member 271 ′ made of a soft magnetic material such as magnetic stainless steel, and a holder 31. A magnetic generator 314. Hereinafter, the magnetic generator 314 will be described in detail. Although the magnetic generator 314 is incorporated in the holder 31 so as to be suitable for automation, it can be used alone or can be incorporated into another member on which the substrate 7 is placed.

2-1. Magnetic Generator The magnetic generator 314 is a substantially flat permanent magnet disposed so as to correspond to the substrate 7 in a plane as shown in FIG. The upper surface (one surface) of the magnetic generator 314 with respect to the transfer tool 27 is magnetized to a certain pole (for example, a positive (N) pole). The magnetic generator 314 may be disposed in close contact with the substrate 7 or may be disposed at an appropriate gap with respect to the substrate 7 in order to apply an appropriate amount of the generated magnetic force to the linear member 271 ′. Good. The magnetic generator 314 arranged in this manner attracts downward with a magnetic force that generates a linear member 271 ′ that horizontally moves on the upper surface of the mask 22.

  As the magnetic generator, the magnetic generators 314a and 314b shown in FIGS. 17A and 17B can be selected. Each of the magnetic generators 314a and 314b has a plurality of magnetic domains, and a plurality of magnetic domains having a substantially cubic shape, a substantially rectangular parallelepiped shape, and a substantially disk shape are provided to implement a magnetic generator in which adjacent magnetic domains are arranged in different polarities. It has permanent magnets 81 and 82, and is arranged side by side in a substantially flat plate as a whole so that adjacent permanent magnets 81 and 82 have different polarities. According to the magnetic generators 314a and 314b, the interval between the lines of magnetic force generated from the permanent magnet 40 is shortened, and the linear member 11 is more strongly and evenly attracted downward.

  When such magnetic generators 314a and 314b are applied, the linear member 271 ′ has a substantially parallel axis with respect to the direction of the polarity of the permanent magnets 81 and 82, as shown in the figure. It is desirable to arrange so that. If the linear member 271 ′ is arranged in this way, the linear member 271 ′ moves horizontally on the upper surface of the mask 22 in a manner that is always substantially parallel or substantially perpendicular to the magnetic force lines generated from the permanent magnets 81 and 82. Therefore, the deformation of the linear member 271 ′ due to the difference in the density of the magnetic field lines generated from the magnetic generators 314 a and 314 b is suppressed.

  A magnetic generator 314c shown in FIG. 17C can be selected as the magnetic generator. The magnetic generator 314c has a plurality of magnetic domains, and adjacent magnetic domains are arranged in different polarities and each magnetic domain is arranged in a line. It has permanent magnets 83 and is arranged in a substantially flat plate shape with its short side surfaces in close contact so that adjacent permanent magnets 83 have different polarities.

  The magnetic generator 31c is improved as follows with respect to the magnetic generators 314a and 314b. That is, in the case of the magnetic generator 314a, as shown in FIG. 17A, the magnetic generator 314a has a boundary between magnetic domains in two directions indicated by reference numerals 811 and 812 in the drawing. For example, when a linear member 271 ′ is disposed as shown in the figure, a magnetic force line intersecting with the linear member 271 ′ is generated at a boundary 811 parallel to the axis of the linear member 271 ′. When the linear member 271 ′ that moves horizontally passes over the boundary 811, the linear member 271 ′ is pulled in the direction of the permanent magnets 81 and 82 adjacent to the boundary portion 811. As a result, the linear member 271 ′ is deformed as indicated by a symbol d in the drawing. When the linear member 271 ′ is deformed in this manner, a phenomenon that the solder ball B leaks from the deformed portion or the solder ball 7 is not smoothly inserted into the positioning opening 221 at the deformed portion is likely to occur.

  On the other hand, as shown in FIG. 17C, the magnetic force generating means 314c has a magnetic domain boundary 832 in only one direction as indicated by reference numeral 832. Therefore, when the linear member 271 ′ is disposed as shown in the drawing, the magnetic lines of force generated at the boundary 832 are parallel to the axis of the linear member 271 ′ and do not intersect the linear member 271 ′. Therefore, the linear member 271 ′ is not deformed.

  Magnetic generators 314e and 314f shown in FIGS. 17E and 17F can be selected as the magnetic generator. The magnetic generators 314e and 314f are formed by arranging the permanent magnets 85 and 86 having the same polarity in parallel in one direction in the magnetic generator 314c. This configuration is preferable because it is not necessary to prepare a long permanent magnet 83 unlike the magnetic generator 314c, and the magnetic generators 314e and 314f can be manufactured at low cost.

  As the magnetic generator, a magnetic generator 314d shown in FIG. 17D can be selected. This magnetic generator 314d has a magnetic domain composed of an electromagnet 84, and the magnetic force can be freely controlled by the magnitude of the current applied to the electromagnet 84. Therefore, even when the length or thickness of the linear member 271 ′ is changed depending on the size of the solder ball B or the substrate 7, it can be easily handled.

  In the above description, a plurality of permanent magnets and electromagnets are used to configure the magnetic domains of the magnetic generators 314a to 314f. However, a single magnet may be divided so as to have a plurality of magnetic domains.

  According to the mounting portion 3 including the magnetic generator 314 having the above configuration, the linear member 271 ′ drawn downward by the magnetic force generated by the magnetic generator 314 is in a state where the abdomen is pressed against the upper surface of the mask 22. . In this state, the linear member 271 ′ is moved horizontally. The linear member 271 ′ captures the solder ball B and moves it to above the positioning opening 221. A downward pressing force due to magnetic force acts on the abdomen of the linear member 271 ′. Accordingly, the pressing force acts on the solder ball B, and the solder ball B is smoothly inserted into the positioning opening 221. The pressing force of the linear member 271 ′ generated by the magnetic force is maintained constant regardless of the state of the upper surface of the mask 22 or the like. Therefore, there is little possibility that the linear member 271 ′ is disturbed in the moving direction and causes a spring-back movement, and the solder ball B is stably inserted into the positioning opening 221.

2-3. Examples of the first and second aspects will be described.

1) Example 1
Under the following conditions, the solder balls B were mounted on the five substrates 7 by the mounting apparatus 1a of the first aspect.
The mask 22 was made of SUS430, and its thickness was 80 μm. The mask 22 used was one in which 10200 positioning openings 221 corresponding to the electrodes 71 of the substrate 7 were formed in a range of 25 mm □, and the diameter of the positioning openings 221 was 90 μm. The linear member 271 of the transfer tool 17 has a substantially circular cross section with a diameter of φ75 μm and has a length of an abdomen including a range of the positioning opening 221. Solder balls B having a diameter of 80 μm mainly composed of Sn were placed on the upper surface of the mask 22 in 12,000 pieces. As the linear member 271, Sandalon (trade name, manufactured by Asahi Kasei) was used. The above conditions were basically the same as in Example 2 and Comparative Example described below.

2) Example 2
The solder ball B was mounted on the five substrates 7 by the mounting device 1b of the second mode. In addition, as the linear member 11, SUS430 which is a ferritic magnetic stainless steel was used.

3) Comparative Example A transfer device provided with a brush-like linear member having a sharp portion is incorporated in the mounting device 1a of the first aspect, and the linear member is disposed substantially perpendicular to the upper surface of the mask 22, and the sharp portion The solder ball B was mounted by horizontally moving the linear member in a state where it was in contact with the mask 22.

  Table 1 shows the unfilled rate and the residual rate of the solder balls B in Examples 1 and 2 and the comparative example. Here, the residual rate is defined by (number of solder balls B remaining on the mask 22 / number of introduced solder balls).

3. Third Embodiment A third embodiment, which is a reference example of the present invention, will be described with reference to FIG. 1 and FIGS.
FIG. 1 is a conceptual diagram of a mounting apparatus 1c according to a third aspect. FIG. 18 is a side view of the mounting portion 4 of the mounting apparatus 1c of FIG. FIG. 19 is a cross-sectional view of the holder 41 of FIG. FIG. 20 is an enlarged side view showing only the holder 41, the substrate 7, and the mask 22 of FIG.

  As shown in FIG. 1, the mounting device 1 c according to the third aspect includes a mounting portion 4 that mounts solder balls aligned on a substrate 7 that is an arrayed body.

  As shown in FIG. 18, the mounting portion 4 of the third aspect is basically the same configuration as the mounting portion 2 of the first aspect, and is an alignment member that aligns the solder balls B on the electrodes 71 of the substrate 7. The mask 22 ', the transfer tool 27 that horizontally moves the upper surface of the mask 22' positioned on the substrate 7 by a moving means (not shown) and transfers the solder ball B, and the electrode 71 is horizontally directed upward so as to be suitable for automation. A holder 41 that holds the posture of the substrate 7, a holder lifting and lowering means 29 that positions the substrate 7 at a predetermined height, and the mask 22 ′ are horizontally supported and moved in the horizontal direction. Mask horizontal movement means 23 for positioning the mask 22 on the substrate 7 positioned at the predetermined height, ball supply means 24 for supplying the solder balls B to the upper surface of the mask 22 ', and the remaining half And a ball removal means 26 for removing the ball B from the upper surface of the mask 22 '.

  In the mounting portion 4 of the third aspect, the difference from the mounting portion 2 of the first aspect is that the mask 22 'has a soft magnetic portion made of magnetic stainless steel and the like, and the mask 22 is attracted downward by a magnetic force, That is, a suction part for bringing the lower surface of the mask 22 ′ into close contact with the upper surface of the substrate 7 is incorporated in the holder 41. Hereinafter, the suction unit will be described in detail. The suction unit is incorporated in the holder 41 so as to be suitable for automation. However, the suction unit can be used alone or in a separate member on which the substrate 7 is placed.

3-1. Suction Part The suction part of this aspect is a magnetic generator 411 that generates a magnetic force built in the holder 41 as shown in FIG. The magnetic generator 411 is disposed so as to face the mask 22 positioned above the substrate 7 with the substrate 7 interposed therebetween. A power supply control circuit 412 that supplies power to the magnetic generator 411 is connected to the magnetic generator 411.

As the suction unit, an electrostatic force generator 413 shown in FIG. 19B can be selected. The electrostatic force generator 413 is incorporated in the holder 41 in the same manner as the magnetic generator 411. A printing pressure control circuit for applying a voltage is connected to the static electricity generator 413. The electrostatic force generator 413 pressed to the positive electrode or the negative electrode by the printing pressure control means charges the mask 22 to a polarity opposite to the polarity of the printing pressure, sucks it downward, and makes it adhere to the substrate 7. In this case, the mask 22 does not need to include a soft magnetic part. Instead, it is desirable to select a base material for the mask 22 that is easily charged. For example, the substrate has a relatively high dielectric constant of 4 to ¹² , and an insulating material having a conductivity of about 10 ⁸ to 10 ¹² Ωcm, specifically, a polyimide resin, a phenol resin, silicon A resin, a vinyl chloride resin, an ABS resin, acetyl cellulose, acetyl butyl cellulose, urethane elastomer, chloroprene rubber, nitrile rubber, a mixture thereof, or a mixture of these with carbon black as appropriate may be selected.

  As the suction unit, a vacuum suction device 415 shown in FIG. 19C can be selected. The vacuum suction device 415 connects the upper surface opening 416 opened on the upper surface of the holder 41 other than the portion to which the substrate 7 is mounted, the side surface opening 418 opened on the side surface, and the upper surface openings 416 and 418 to connect the upper surface opening 416 and 418. A fluid passage 417 defined in the interior and a vacuum generating means connected to the side opening 418 are provided. According to the vacuum suction device 415, a negative pressure is generated by the vacuum generating means, and the mask 22 placed on the holder 41 is sucked downward by the upper surface opening 416 and brought into close contact with the substrate 7. In this case, the mask 22 does not need to include a soft magnetic portion, and various substrates are selected as the base of the mask 22.

3-2. Operation of Mounting Device 1c The operation of the mounting device 1c according to the third aspect will be described.

1) Step of aligning the mask (first step)
The mask 22 ′ is aligned with the substrate 7.

2) Step of sucking the mask As shown in FIG. 20B, the mask 22 ′ placed above the substrate 7 is entirely moved downward by the magnetic force generated by the magnetic generator 411 fed by the power feeding control circuit. To suck. As a result, the lower surface of the mask 22 ′ closely adheres to the upper surface of the substrate 7. Therefore, even when the substrate 7 is deformed, a large gap does not occur between the substrate 7 and the mask 22 '.

3) Step of mounting solder balls (second step)
Solder balls B equal to or more than the number of electrodes 71 are supplied to the upper surface of the mask 22 ′ by the ball supply means 24. The transfer tool 27 disposed so that the linear member 271 contacts the solder ball B supplied to the upper surface of the mask 22 ′ in a substantially horizontal posture is moved horizontally relative to the upper surface of the mask 22 ′. The solder ball B is moved by the transfer tool 27 and inserted into the positioning opening 221. Here, the mask 22 ′ is in close contact with the substrate 7. Therefore, the solder ball B placed on the electrode 71 through the positioning opening 221 does not leak from the positioning opening 221.

4) Step of removing the mask from the substrate The holder elevating means 29 is lowered to remove the mask 22 ′ from the substrate 7.

4). Fourth Embodiment A fourth embodiment, which is a reference example of the present invention, will be described with reference to FIGS. The mounting device 1d according to the fourth aspect is basically the same as the mounting device 1a according to the first aspect.
FIG. 21 is a partial enlarged cross-sectional view of only the mask 22, the substrate 7, and the temporary fixing film F of the mounting device 1 d according to the fourth aspect. FIG. 22 is a diagram illustrating the operation of the mounting device 1d according to the fourth aspect. FIG. 23 is a view showing a modification of the temporarily fixed membrane altered portion 25 of FIG.

  In the mounting device 1d of the fourth aspect, the difference from the mounting device 1a of the first aspect is that, as shown in FIG. 21 (a), an electrode 71 having a temporary fixing film F having a low adhesive force formed on at least the upper surface is provided. A substrate 7 is prepared, a solder ball B is placed on the electrode 71 with the temporary fixing film F interposed therebetween, and the adhesive force of the temporary fixing film F is increased by the temporarily fixing film altered portion. The solder ball B is temporarily fixed to the electrode 71 by force. The temporary fixing film F may be formed so as to cover the entire upper surface of the substrate 7 as shown in FIG. 21 (a), or selectively only on the upper surface of the electrode 71 as shown in FIG. 21 (b). You may form in. Hereinafter, the temporarily fixed membrane and the temporarily fixed membrane altered portion will be described in detail.

4-1. Temporary Fixing Film Temporary fixing film F is soldered so that solder ball B does not move easily even if some external force is applied to solder ball B placed on substrate 7 after the step of removing the mask described in FIG. The ball B is temporarily fixed to the electrode 71 with adhesive force. However, in the second step of mounting the solder ball B from the first step of aligning the mask 22 on the substrate 7, the temporary fixing film F is prevented from adhering to the mask 22 or the solder ball B. It is desired that the adhesive strength be in a low state.

  Such a temporarily fixed film F is, for example, solidified under a certain condition to have low adhesive strength, and liquefied under another condition (here, liquefaction includes gelation or pasting) and has adhesive strength. This is realized by selecting a material having a high value (hereinafter, the material is referred to as a temporary fixing material). As the first type of temporary fixing material selected, for example, an organic material such as resin or paper selected from polypropylene or polyvinyl chloride, polystyrene, polyamide, cellulose acetate, polyester, or Hg or Ga, In, A material mainly composed of a metal material such as Sn is selected. According to the first type of temporary fixing material, for example, the temporary fixing material is vapor-deposited and formed on the substrate 7 to form the low-adhesive temporary fixing film F. Alternatively, the temporary fixing material F is mixed with an appropriate solvent (water, oil, various alcohols, methanol, etc.), the mixture is applied to the substrate 7, dried, and the solvent is removed to remove the solvent. Is formed. The temporary fixing film F formed in this way only needs to have a low adhesive force because the surface with which the solder balls B come into contact is solidified.

  A liquid (for example, water or oils, various organic solvents such as alcohol and methanol) or a liquid mixture containing the liquid as a solvent can be selected as the second type of temporary fixing material to be selected. According to the second type of temporary fixing material, when the temperature of the temporary fixing material is set to be equal to or lower than the melting point thereof, the temporary fixing material is solidified, and the low-adhesive temporary fixing film F is formed. The temporary fixing film F formed in this way only needs to have a low adhesive force because the surface with which the solder balls B come into contact is solidified.

  As the second type of temporary fixing material, if a melting point is selected to be -100 ° C. or higher, preferably room temperature (−10 ° C. to 50 ° C.) at atmospheric pressure, the process for solidifying the temporary fixing material is low cost. This is desirable because Also, those having a boiling point lower than the melting point of the solder ball B, such as dodecyl alcohol (melting point 24 ° C., boiling point 154 ° C.), tetradecanol (melting point 38 ° C., boiling point 289 ° C.), butyl alcohol (melting point 25.4 ° C., boiling point 83 (° C.), the temporary fixing film F is vaporized at the same time when the solder balls B are reflowed to form the connection bumps. Therefore, it is desirable that the temporary fixing film F need not be removed through the cleaning process.

  The temporary fixing material preferably has a melting point lower than that of the solder ball B in order to save the trouble of removing the temporary fixing film F before the step of reflowing the solder ball B.

  The temporary fixing material desirably contains a flux component. Here, the flux component means that when the solder ball B is reflowed, 1) the oxidation of the solder ball B and the electrode 71 is prevented, and 2) the surface of the electrode 71 is cleaned. It is a high component. The flux component is an additive having characteristics similar to rosin (pine resin) or rosin, for example. According to the temporary fixing film F formed of a temporary fixing material containing a flux component, the occurrence of poor bonding between the connection bump and the electrode is suppressed, and the generation of voids in the connection bump is suppressed.

4-2. Temporary fixing membrane alteration portion The temporary fixation membrane alteration portion is to thermally or mechanically and chemically alter the temporary fixation membrane F to increase its adhesive force. In the mounting device 1d of the fourth aspect, the mounting portion 2 Built in.

  The temporarily fixed film altered portion of the fourth aspect is disposed so as to be able to come into contact with the top of the solder ball B filled in the positioning opening 221 shown in FIG. 23A, and is in contact with at least the solder ball B. The surface is a temporarily fixed film altered portion 25a that generates heat. The temporarily fixed film altered portion 25 a may be, for example, a plate-like heating element disposed on one surface of a block-like base, and an elevating means (for example, air) above the mask 22 so that the heating element faces the mask 22. It may be arranged so as to be movable up and down with a cylinder or the like.

  The temporarily fixed film altered portion 25a heats the contacted solder balls B. The heat melts the temporary fixing film F in the vicinity of the region where the solder ball B is in contact via the solder ball B. Accordingly, the temporarily fixed film F is melted (that is, liquefied), and the adhesive force of the temporarily fixed film F is increased.

  The form of the temporarily fixed membrane altered portion 25a is not limited to the illustration, and various forms are selected. For example, as shown in FIG. 23A, when the thickness of the mask 22 is smaller than the diameter of the solder ball B, the surface 251 of the temporarily fixed film altered portion 25a in contact with the solder ball B is assumed to be planar. That's fine. If the mask 22 is thicker than the diameter of the solder ball B, a protrusion 252 that can be inserted into the positioning opening 221 corresponding to the positioning opening 221 may be provided.

  As the temporarily fixed film altered portion, as shown in FIG. 23B, a temporarily fixed film altered portion 25b that individually heats the solder balls B with an electron beam (for example, a laser) is also selected.

  As the temporarily fixed film altered portion, a temporarily fixed membrane altered portion that heats the solder ball B in advance before being transferred to the positioning opening 221 is also selected. When the solder ball B heated in the temporarily fixed film altered portion is placed on the electrode 71, the temporary fixed film F in the vicinity of the region in contact with the solder ball B is melted, and the adhesive force of the temporary fixed film F is increased.

  As the temporarily fixed film altered portion, a temporarily fixed membrane altered portion that heats a region including the plurality of solder balls B filled in the positioning opening 221 is also selected. This temporarily fixed film altered portion is constituted by, for example, an infrared heater. When this temporarily fixed film altered portion is selected, the mask 22 is more thermally conductive than the solder ball B so that the temporarily fixed film F below the mask 22 is heated and melted and does not adhere to the mask 22. It is desirable to select one consisting of a substrate with a low rate.

  As shown in FIG. 23C, the temporarily fixed film altered portion is disposed so as to be able to contact the top of the solder ball B filled in the positioning opening 221 and temporarily fixes the solder ball B with a predetermined pressure. The film alteration part 25c is also selected. The temporarily fixed film altered portion 25c may be configured to vibrate instead of pressing the contacted solder ball B. According to the temporarily fixed film altered portion 25c, the adhesive force of the temporarily fixed film F in the vicinity of the region where the solder ball B is in contact with the pressing force or vibration transmitted through the solder ball B is increased. The temporarily fixed film altered portion 25c is effective in the case where the surface portion is solidified and the adhesive strength of the liquid temporarily fixed film F inside is increased. That is, the surface portion of the temporarily fixed film F is mechanically broken by the pressing force or vibration applied by the temporarily fixed film altered portion 25c, the internal liquid is exposed, and the adhesive force of the temporarily fixed film F increases.

  The outer periphery of the solder ball B before being transferred into the positioning opening 221 with a component that increases the adhesive strength of the temporary fixing film F selected according to the temporary fixing material forming the temporary fixing film F as the temporary fixing film altered portion The temporarily fixed film alteration part applied to the surface is also selected. According to the temporarily fixed film altered portion, the solder ball B having a component that increases the adhesive force of the temporarily fixed film F applied to the outer peripheral surface is placed on the electrode 71, and the temporary ball near the area where the solder ball B is in contact is placed. The adhesive strength of the fixed film F is increased.

4-3. Operation of Mounting Device 1d The operation of the mounting device 1d will be described.

1) Step of aligning the mask (first step)
As shown in FIG. 22A, the mask 22 is aligned with the substrate 7 on which the temporary fixing film F having a low adhesive force is formed on the upper surface of the electrode 71.

2) Step of mounting solder balls (second step)
Solder balls B are supplied to the upper surface of the mask 22. The solder ball B supplied to the mask 22 is moved by the transfer tool 27, and the solder ball B is transferred to the positioning opening 221. The solder ball B is placed on the electrode 71 with the temporary fixing film F interposed therebetween. In the mounting device of the fourth aspect, the solder ball B is mounted by a transfer method, but it may be mounted by an adsorption method or other methods as in the mounting device of the fifth aspect described below.

3) Step of temporarily fixing solder balls (third step)
As shown in FIG. 22B, the temporarily fixed film altered portion 25a is brought into contact with the top of the solder ball B transferred to the positioning opening 221 and the solder ball B is heated. With the heat transmitted through the solder ball B, the temporary fixing film F in the vicinity of the region in contact with the solder ball B is melted to increase the adhesive force. The solder ball B is temporarily fixed by the adhesive force of the temporary fixing film F. When the solder ball B is heated, it is desirable that the solder ball B is stronger and temporarily fixed if the solder ball B is pressurized or vibrated.

  The temporarily fixed film altered portion 25a is separated from the solder ball B. Thereafter, the melted temporary fixing film F is cooled and solidified, but the solder balls B temporarily fixed by the temporary fixing film F are not separated by some external force.

5. Fifth Embodiment A fifth embodiment, which is a reference example of the present invention, will be described with reference to FIGS.
FIG. 1 is a conceptual diagram of a mounting apparatus 1e according to the fifth aspect. FIG. 24 is a diagram showing the mounting unit 5 of the mounting apparatus 1e of FIG. FIG. 25 is a diagram for explaining the operation of the mounting apparatus 1e of FIG.

  The mounting device 1e according to the fifth aspect is different from the mounting device 1a according to the first aspect in that, like the mounting device 1d according to the fourth aspect, an electrode having a temporary fixing film having a low adhesive force formed on at least the upper surface is provided. The point which prepares the board | substrate which has, the point which has the temporarily fixed film | membrane altered | denatured part which raises the adhesive force of a temporarily fixed film | membrane, and the point which has the adsorption | suction type adsorption head 51 as an alignment member as shown in FIG. Since the temporarily fixed membrane and the temporarily fixed membrane altered portion are basically the same as those in the fourth aspect, detailed description thereof is omitted.

5-1. Mounting Device As shown in FIG. 1, the mounting device 1 e has a mounting portion 5.

5-2. Mounting Unit As shown in FIG. 24, the mounting unit 5 includes a suction head 51 that is an alignment member including a positioning suction unit 511 that can be attached to and detached from the conductive ball B corresponding to the pattern of the electrode 71, and a large number of solder balls. A container 52 having an upper opening in which B is stored and a temporarily fixed membrane altered portion (not shown) are provided.

  The suction head 51 has a box-like shape having an internal space, and a through-hole-shaped positioning suction portion 511 corresponding to the pattern of the electrode 71 is formed on the lower surface thereof. The positioning suction portion 511 is formed smaller than the diameter of the solder ball B so that the solder ball B can be sucked. A negative pressure generating means (not shown) is connected to the suction head 51. According to the suction head 51, the negative pressure is generated by the negative pressure generating means, whereby the solder ball B is attracted to the positioning suction portion 511, and the solder ball B is separated from the positioning suction portion 511 by cutting the negative pressure. The suction head 51 is configured to be moved by a moving means (not shown) in the vertical and horizontal directions and in the front-rear direction on the paper surface in order to position the solder balls B attracted by the positioning suction portion 511 so as to correspond to the electrodes 71.

5-3. Operation of Mounting Device 1e The operation of the mounting device 1e will be described.

1) Step of aligning the suction head (first step)
The solder balls B stored in the container are adsorbed by the positioning adsorption unit 211. As shown in FIG. 25A, the suction head 51 is positioned so that the solder ball B sucked by the positioning suction portion 511 corresponds to the electrode 71.

2) Step of mounting solder balls (second step)
The solder ball 4 is separated from the positioning suction portion 511 and mounted on the electrode 71 through a temporary fixing film F having a low adhesive force.

3) Step of temporarily fixing solder balls (third step)
As shown in FIG. 25B, the temporarily fixed film F is melted by the temporarily fixed film altered portion 25a, the adhesive force of the temporarily fixed film F is increased, and the solder balls B are temporarily fixed.

6). Sixth Embodiment A sixth embodiment, which is a reference example of the present invention, will be described with reference to FIGS.
FIG. 26 is a conceptual diagram of the mounting apparatus 1 ′ according to the sixth aspect. FIG. 27 is a diagram showing the temporary fixing film forming unit 6 of the mounting apparatus 1 ′ of FIG. FIG. 28 is a diagram for explaining the operation of the mounting apparatus 1 ′ of FIG.

  As shown in FIG. 26, the mounting device 1 ′ includes a mounting portion 2 having a temporarily fixed film alteration portion 25 that is basically the same as the mounting portion 2 of the mounting device 1 d of the fourth aspect, and an upstream side of the mounting portion 2. The temporary fixing film forming portion 6 is provided. The transfer of the substrate 7 between the temporarily fixed film forming unit 6 and the mounting unit 2 may be performed manually. However, as shown in the figure, a transfer unit C is provided between the temporarily fixed film forming unit 6 and the mounted unit 2 and transferred. Part C may be delivered mechanically.

6-1. Temporary Fixed Film Forming Unit The temporary fixed film forming unit 6 forms the temporary fixed film F having a low adhesive force on the electrode 71. The temporary fixing film F is formed using the temporary fixing material described above. The method for forming the temporarily fixed film F is not particularly limited, but for example, the temporarily fixed film F is formed using the temporarily fixed film forming portion 6 illustrated in FIG.

  The temporary fixing film forming unit 6 shown in FIG. 27 is arranged by applying the second type temporary fixing material, that is, a liquid temporary fixing material having a high adhesive force to the electrode 71 and arranging the temporary fixing material. The fixing material is solidified to form a temporary fixing film F having a low adhesive force.

  The temporarily fixed film forming portion 6a shown in FIG. 26A includes a squeegee 61 that can move on the upper surface of the substrate 7 in a state where the tip portion is in contact. According to the temporary fixing film forming unit 6 a, the paste-like temporary fixing material F is supplied to the upper surface of the substrate 7, and the supplied temporary fixing material F is spread with the squeegee 61. At this time, the temporary fixing material f is preferably spread as thinly and uniformly as possible. The applied temporary fixing material 6a is heated or cooled to be solidified. As a result, a temporary fixing film F with low adhesive strength is formed.

  26B includes a printing mask 62 having a through-hole 63 corresponding to the electrode 71, and a squeegee 64 capable of laterally moving the upper surface of the mask 62 in a state in which the tip is in contact. ing. According to the temporary fixing film forming unit 6 b, the printing mask 32 is aligned so that the through hole 63 and the electrode 71 correspond to each other, and the paste-like temporary fixing material f is supplied to the upper surface of the mask 32. The supplied temporary fixing material f is spread with a squeegee 64, and the temporary fixing material f is selectively printed on the electrode 71. The printed temporary fixing material f is heated or cooled to be solidified. As a result, a temporary fixing film F with low adhesive strength is formed on the electrode 71.

  The temporarily fixed film forming portion 6c shown in FIG. 26 (c) includes a syringe-like application means 65 for applying the paste-like temporarily fixed material f from the lower end. The application unit 65 is configured to be movable above the substrate 7 in the front / rear / left / right / up / down directions on the paper surface and to be positioned relative to the electrode 71. According to the temporary fixing film forming unit 6 c, the application unit 65 is positioned on the electrode 71, and the temporary fixing material f is discharged and applied on the electrode 71. The applied temporary fixing material f is heated or cooled to be solidified. As a result, a temporary fixing film F with low adhesive strength is formed on the electrode 71.

  The temporarily fixed film forming portion 6d shown in FIG. 26 (d) includes a spray-type application unit 66 that sprays the liquid temporarily fixed material f from the lower end. The coating means 66 is configured to be movable above the substrate 7 in the front / rear / left / right / up / down directions on the paper surface. According to the temporary fixing film forming unit 6d, the application means 66 is moved in the front / rear / left / right directions above the substrate 7 to spray and apply the temporary fixing material 6a to the entire upper surface of the substrate 7. The applied temporary fixing material f is heated or cooled to be solidified. As a result, a temporary fixing film F with low adhesive strength is formed on the electrode 71.

6-2. Operation of Mounting Device 1 ′ The operation of the mounting device 1 ′ will be described.

1) Step of forming a temporary fixing film A liquid temporary fixing material having a high adhesive strength is thinly applied to the upper surface of the substrate 7 and arranged, and the arranged temporary fixing material is solidified, as shown in FIG. In addition, a temporary fixing film F having a low adhesive strength is formed on the electrode 71.

2) Step of aligning the mask (first step)
As shown in FIG. 28B, the mask 22 is positioned above the substrate 7 so that the electrode 71 and the positioning opening 221 correspond to each other.

3) Step of mounting solder balls (second step)
The solder ball B is supplied to the upper surface of the mask 22, and the solder ball B is moved by the transfer tool 27 and transferred to the positioning opening 221. The solder ball B is placed on the electrode 71 with the temporary fixing film F interposed therebetween.

4) Step of temporarily fixing solder balls (third step)
As shown in FIG. 28C, the temporarily fixed film F is melted by the temporarily fixed film altered portion 25a, the adhesive force of the temporarily fixed film F is recovered, and the solder balls B are temporarily fixed.

6-3. Examples Examples of the fourth and sixth aspects, which are reference examples, will be described.

1) Example 1
An example in which a paste-like rosin flux that is generally used is used as a temporary fixing material will be described. The flux may be resin-based or water-soluble.

  As shown in FIG. 27A, the temporary fixing material f was applied to the substrate 7 with a thickness of several μm to several tens of μm. The temporarily fixed material is heated by blowing hot air of 120 ° C. for 30 seconds to volatilize the solvent component of the temporarily fixed material f, and the temporarily fixed material f is not adhered to the mask 22 or the solder ball B. The surface was dried to form a temporary fixing film F having a low adhesive strength as shown in FIG.

  As shown in FIG. 28B, the mask 22 is aligned so that the positioning opening 221 corresponds to the electrode 71, and the solder ball B is transferred into the opening 221. As shown in FIG. 28 (c), the temporarily fixed film altered portion 25a that generates heat at a temperature equal to or higher than the melting point of the temporarily fixed material (60 to 90 ° C.) is instantaneously brought into contact with the solder ball B to melt the temporarily fixed film F. The solder balls B were temporarily fixed.

2) Example 2
An example in which a liquid rosin flux diluted with highly volatile IPA is used as the temporary fixing material f will be described.

  A temporary fixing film F was formed in the same manner as in Example 1. According to the temporary fixing material f of the present embodiment, since the IPA has high volatility, the temporary fixing material f is dried more quickly and the temporary fixing film F can be efficiently formed. Further, since IPA volatilizes and disappears, the film thickness of the temporarily fixed film 6 can be controlled by the ratio of IPA in the temporarily fixed material f. For example, when a thin film temporarily fixed film F is required, the ratio Should be increased.

  Thereafter, the solder balls B were temporarily fixed in the same manner as in Example 1.

3) Example 3
An example in which a rosin-based flux diluted with dodecyl alcohol having a melting point of 24 ° C. as a solvent is used as the temporary fixing material f will be described. As this type of solvent, butyl alcohol (melting point: 25 ° C.), tetradecyl alcohol (melting point: 38 ° C.), or the like can also be used.

  The temporary fixing material f was applied to the electrode 51 in the same manner as in Example 1, and the temporary fixing material f was cooled and solidified to form a temporary fixing film F. When the temporary fixing material f is only flux, the melting point is about −40 ° C., which is lower than room temperature, so that it is difficult to cool and solidify by a normal cooling method. However, according to the temporary fixing material f, since it is diluted with dodecyl alcohol that solidifies at 24 ° C., when the temporary fixing material is cooled below the melting point of dodecyl alcohol, the dodecyl alcohol is solidified in a state of containing the flux, A temporary fixing film having low adhesive strength is formed.

  While maintaining the adhesive force of the temporarily fixed film F by continuing cooling, the temporarily fixed film altered by causing the solder ball B to be transferred to the positioning opening 121 and generating heat to a temperature equal to or higher than the melting point of the temporarily fixed material f as in Example 1. The part 25a was instantaneously brought into contact with the solder ball B to melt the temporary fixing film F, and the conductive ball 4 was temporarily fixed.

4) Example 4
An example in which the above dodecyl alcohol is used as the temporary fixing material f will be described.

  The temporary fixing material f is applied to the surface of the substrate 7 by the application means 66 shown in FIG. According to this temporary fixing material, since the melting point is in the room temperature region, there is an advantage that the solidified state can be maintained (that is, the cooling can be maintained) relatively easily.

  Thereafter, the solder balls 4 were temporarily fixed in the same manner as in Example 3.

  In any of Examples 1 to 4, the mask 22 could be removed without adhering to the substrate 7 with the temporary fixing film F. The temporarily fixed film F adhering to the removed mask 22 and the positioning opening 221 was not confirmed. The temporary fixing film F was not attached to the solder ball B, and could be used without washing in the next operation.

  The present invention is not limited to the above description, and can also be used for applications in which small or irregular powders or granules are mounted on a substrate, for example, in fields such as pharmaceuticals and ceramics.

DESCRIPTION OF SYMBOLS 1 Mounting apparatus 2 Mounting part 21 Holder 22 (28) Mask (alignment member)
DESCRIPTION OF SYMBOLS 23 Mask horizontal movement means 24 Ball supply means 26 Ball removal means 27 Transfer tool 29 Holder raising / lowering means 3 Mounting part 31 Holder 4 Mounting part 41 Holder 5 Mounting part 51 Adsorption head (alignment member)
52 Container 6 Temporary fixing film forming part 7 Substrate 71 Electrode 8 Magnet

Claims (1)

In a mounting device for mounting a ball having conductivity on one surface of an arrayed body in a predetermined pattern, one surface to which the ball to be mounted on the arrayed body is supplied and the other surface with respect to the one surface; An alignment member that is arranged corresponding to the pattern and includes a positioning opening that is open on the one surface and the other surface and through which the ball can be inserted, and a flexible member that is arranged in a state where the shaft cores are substantially aligned. has a two or more linear members having a gender, and a transfer device that includes a holding member for fixing the ends of the linear member to abdominal curved in the linear member is formed, the line A magnetic generator that attracts the abdomen of the member and presses it against one surface of the alignment member, and at least when the ball is mounted, the alignment member has a state in which the other surface of the alignment member is against one surface of the arrayed body Positioned on The transfer tool is configured such that the abdomen of the linear member brought into contact with one surface of the alignment member can contact the ball supplied to the one surface of the alignment member in a substantially horizontal posture. And is positioned horizontally by moving horizontally relative to one surface of the alignment member and capturing and moving the ball supplied to one surface of the alignment member at the abdomen of the linear member. A device for mounting a conductive ball to be inserted into an opening.

Images