JP2006003227A - Integrated circuit tester - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To realize an IC tester capable of shortening a testing time. <P>SOLUTION: The invention improves an IC tester for testing an object to be tested. The tester comprises a test system controller for executing command based on an execution order data showing execution order of set value data in which set values or variables are defined based on the execution order data, and a plurality of pin electronics cards for preparing setting of set value data based on the set value data and execution order data, setting the set value based on the set value of execution command from the test system controller and the variables and transmitting/receiving signals to the object to be tested for at least one pin. <P>COPYRIGHT: (C)2006,JPO&NCIPI

Description

  The present invention relates to an IC tester for testing an object to be tested, for example, an IC or an LSI, and relates to an IC tester capable of shortening a test time.

  The IC tester gives a test pattern to an object to be tested (hereinafter referred to as DUT), compares the output of the DUT with an expected value pattern, and determines the quality of the DUT. For example, it is described in Patent Document 1 and the like.

JP 2000-292500 A

  In such an apparatus, a test system controller (hereinafter TSC) operates based on a test program, performs various settings on a pin electronics card (hereinafter PE card) on which a plurality of drivers, comparators, and the like are mounted, Tested against DUT. However, the setting must be changed for each test item, and each time setting is performed from the test system controller, the setting takes time. As a result, it takes DUT test time.

  Therefore, an object of the present invention is to realize an IC tester that can shorten the test time.

In order to achieve such a problem, the invention according to claim 1 of the present invention is:
In an IC tester for testing a test object,
A test system controller that outputs an execution instruction and a variable setting value based on execution order data indicating an execution order of the setting value data in which the setting value or variable is defined;
Based on the set value data and the execution order data, the set value data is prepared for setting, the set value is set by the execution command and the variable set value from the test system controller, and the test target and signal And a plurality of pin electronics cards capable of transferring one or more pins.
The invention according to claim 2 is the invention according to claim 1,
Test system controller
A first storage unit that stores at least execution order data and variable setting values;
A first control unit that outputs an execution instruction and a variable value of the setting based on the execution order data of the storage unit and the setting value of the variable;
Pin electronics card
A second storage unit for storing setting data and execution order data;
Based on the execution order data of the second storage unit, the setting data of the second storage unit is prepared, and the setting value is set by the execution instruction and the variable setting value of the first control unit. And a control unit.
The invention according to claim 3 is the invention according to claim 1 or 2,
The pin electronics card is characterized in that it receives a set value of a variable from a test system controller and sets a variable of the set data to a fixed value.
The invention according to claim 4 is the invention according to claim 3,
The pin electronics card is characterized in that only a desired variable is set to a fixed value.

  According to Claims 1 and 2, since the pin electronics card stores the setting data in advance and prepares the setting, it is not necessary for the test system controller to send the setting value each time, and the test time can be shortened. it can.

  According to Claims 3 and 4, since the Pientronics card handles the variable in the same way as a fixed value, the test system controller does not need to send the set value of the variable to the pin electronics card each time, thereby shortening the test time. be able to.

  Hereinafter, the present invention will be described in detail with reference to the drawings. FIG. 1 is a block diagram showing an embodiment of the present invention.

  In FIG. 1, the TSC 10 controls the entire IC tester and includes a storage unit 11 and a control unit 12. The storage unit 11 stores setting data 111 in which a plurality of setting values or variables are defined, execution order data 112 that indicates the execution order of the setting data 111, and variable setting value data 113 that is a setting value of a variable of the setting data 111. To do. As shown in FIG. 2, the setting data 111 includes a data number, a registered flag, a setting item, pin information, a variable flag, a speed-up variable flag, and a setting value. The registered flag indicates whether the set value is registered. For example, voltage setting (V), current setting (I), etc. are described in the setting items. The pin information indicates a setting target pin. The variable flag indicates whether the data is a variable. The speed-up variable flag indicates whether the variable is a fixed value. As the setting value, a value for the setting item or a variable number is shown. Here, one data number is assigned to one setting item, but one data number may be assigned to a plurality of setting items. In the execution order data 112, as shown in FIG. 3, the data numbers of the setting data 111 are arranged in the execution order. The control unit 12 sends the setting data 111 in the storage unit 11 in advance, and outputs the execution command and the variable setting value of the variable setting value data 113 based on the execution order data 113 to perform control.

  A plurality of PE cards 20 are provided in a test head (not shown), connected to the TSC 10, and include a storage unit 21, a control unit 22, a control register 23, a driver (not shown), a comparator (not shown), and the like. The storage unit 21 stores setting data 211, execution order data 212, and variable setting value data 213. As shown in FIG. 4, the setting data 211 includes a data number, a processing command, pin information, a variable flag, a speed-up variable flag, and a setting value. The processing command indicates a command corresponding to the setting item. The execution order data 212 includes a data number and a set value determination flag, as shown in FIG. The data number is the same as the data number of the setting data 211. The setting value confirmation flag indicates whether or not the setting value corresponding to the data number has been confirmed. As shown in FIG. 6, the variable set value data 213 includes a variable number and a set value, and holds a set value for the variable. The control unit 22 prepares the setting data 211 based on the execution order data 212 of the storage unit 21 and sets the setting value according to the execution command of the control unit 12 and the setting value of the variable. In the control register 23, a set value is set from the control unit 22, and a control target such as a driver and a comparator sets based on the set value.

  The operation of such an apparatus will be described with reference to FIGS. 7 and 8 are diagrams showing changes in the setting data 111 and 211, respectively, in which the shaded portion is changed. FIG. 9 is a flowchart showing the operation of the TSC 10, and FIGS. 10 and 11 are flowcharts showing the operation of the PE card 20.

  First, the control unit 12 of the TSC 10 reads the setting data 111 shown in FIG. 2 from the storage unit 11 and sends it to each PE card 20. The control unit 22 of the PE card 20 converts the setting item of the setting data 111 into a processing command, deletes the pin information unnecessary for itself from the pin information, and stores it in the storage unit 21 as the setting data 211 shown in FIG. .

  Next, the control unit 12 acquires a data number from the execution order data 112 (FIG. 3) in the storage unit 11 (S1), and confirms the issued flag of the setting data 111 corresponding to the data number (S2). If the issued flag is not raised, that is, “0”, the control unit 12 checks whether the variable flag is raised, that is, “1”, and if not, proceeds to the next (S3). When the flag is set, the variable set value data 113 is acquired from the storage unit 11 (S4) and stored as the variable set value data 213 (FIG. 6) in the storage unit 21 of the PE card 20 (S5). It is confirmed whether the acceleration variable flag is set (S6). If the flag is not set, the process proceeds to the next step. If the flag is set, the variable flag is dropped from the setting data 111 as shown in FIG. , “0” is set (S7). It is confirmed whether the processing has been completed for all parameters (S8). If not completed, it is confirmed again whether the variable flag is set (S3). It is confirmed whether or not the variable flags for all parameters have been cleared (S9). If they have been dropped, an issued flag is set (S10), and if not, the process proceeds to the next. And the control part 11 issues the execution command of a data number and a comment process start command with respect to PE card 20 (S11). It is confirmed whether all the data numbers of the execution order data 112 have been executed (S12). If not, the data number is acquired again (S1). If executed, the process is terminated. Such an operation is repeated for each test of the DUT.

  On the other hand, the PE card 20 receives the execution command including the data number for the first time (S20), and the control unit 22 performs the data number of the execution command with respect to the execution order data 212 (FIG. 5) of the storage unit 21. Is registered (S21). With this data number, the control unit 22 confirms that the variable flag of the setting data 211 (FIG. 4) in the storage unit 21 is set (S22). If the variable flag is not set, the control unit 22 proceeds to the next and sets the variable flag. If so, the setting value is acquired from the variable setting value data 213 (FIG. 6) corresponding to the variable (S23). Then, it is confirmed whether or not the speed-up variable flag is set (S24). If the speed-up variable flag is set, the setting value is registered in the setting data 211 as shown in FIG. The variable flag is dropped (S25), and if the flag is not set, the process proceeds to the next. The control unit 22 sets a set value in the control register 23 by a processing command (S26). It is confirmed whether all processing commands have been executed (S27). If not, it is checked again whether a variable flag is set (S22). It is confirmed whether all the variable flags corresponding to the data numbers have been removed from the setting data 211 (S28). If they have been removed, as shown in FIG. The execution instruction including the data number is received (S20). If the execution instruction is not dropped, the execution instruction including the data number is received again (S20). Such an operation is performed at the time of the first DUT test.

  In the case of the next DUT test, the control unit 22 of the PE card 20 acquires the data number from the execution order data 212 (FIG. 5) in the storage unit 21 (S30), and sets the execution order data 212 corresponding to the data number. It is confirmed whether or not a value confirmation flag is set (S31).

  If the set value confirmation flag is not set, the PE card 20 receives the execution command including the data number (S32). The control unit 22 checks whether the variable flag of the setting data (FIG. 8) 211 in the storage unit 21 is set with the data number of the execution order data 212 (S33). If the variable flag is set, the setting value is acquired from the variable setting value data 213 (FIG. 6) corresponding to the variable (S34). Then, it is confirmed whether or not the acceleration variable flag is set (S35). If the acceleration variable flag is set, the setting value is registered in the setting data 211 and the acceleration variable flag and the variable flag are dropped (S36). If the flag is not set, continue. The control unit 22 sets a set value in the control register 23 by a processing command (S37). It is confirmed whether all the processing commands have been executed (S38). If not, it is checked again whether the variable flag is set (S33). It is confirmed whether all the variable flags corresponding to the data numbers have been deleted from the setting data 211 (FIG. 8) (S39). If they have been deleted, a setting value confirmation flag is set for the execution order data 212 (FIG. 5) ( S40) Again, the control unit 22 obtains the next data number from the execution order data 212 of the storage unit 21 (S30), and if not dropped, the control unit 22 starts from the execution order data 212 of the storage unit 21. The next data number is acquired (S30).

  When the set value confirmation flag is set, the control unit 22 reads the processing command and the set value of the setting data 211 (FIG. 8) in the storage unit 21 (S41). It is confirmed whether or not all the processing commands have been executed (S42). If not, the processing commands and setting values of the setting data 211 in the storage unit 21 are read again (S41). The PE card 20 receives the execution command including the data number (S43). Then, it is confirmed whether it matches the data number of the execution order data 212 (FIG. 5) (S44).

  If they match, the control unit 22 sets the setting value of the setting data 211 in the control register 23 (S45), and the control unit 22 again acquires the data number from the execution order data 212 of the storage unit 21 (S30). .

  If they do not match, the control unit 22 re-registers the data number of the execution order data 212 in the storage unit 21 and clears the set value determination flag (S46). The control unit 22 checks whether the variable flag of the setting data 211 in the storage unit 21 is set with the data number of the execution order data 212 (S33). If the variable flag is not set, the control unit 22 proceeds to the next and sets the variable flag. If so, the setting value is acquired from the variable setting value data 213 corresponding to the variable (S34). Then, it is confirmed whether or not the acceleration variable flag is set (S35). If the acceleration variable flag is set, the set value is registered in the setting data 211, and the acceleration variable flag and the variable flag are dropped (S36). If the flag is not set, proceed to the next step. The control unit 22 sets a set value in the control register 23 by a processing command (S37). It is confirmed whether all the processing commands have been executed (S38). If not, it is checked again whether the variable flag is set (S33). It is confirmed whether all the variable flags corresponding to the data numbers have been deleted from the setting data 211 (S39). If they have been deleted, a setting value confirmation flag is set for the execution order data 212 (S40), and the control unit 22 The next data number is acquired from the execution order data 212 of the storage unit 21 (S30), and if not dropped, the control unit 22 acquires the next data number from the execution order data 212 of the storage unit 21 (S30). .

  That is, it operates as shown in FIG. (A) shows the operation of the control unit 12, (b) shows the operation of the control unit 22, and (c) shows the setting operation of the control target, driver, comparator, etc. of the PE card 20. That is, the control unit 12 only issues the data number and the setting value of the variable, and the control unit 22 performs the next setting operation to the setting register 23 while the control target of the PE card 20 is performing the setting operation. A prior analysis is performed. Therefore, since the control unit 22 prepares for setting in the control register 23 in advance, the setting time can be shortened.

  Thus, since the PE card 20 stores the setting data 211 in advance and prepares for setting, it is not necessary for the TSC 10 to send the setting value each time, and the test time can be shortened.

  In addition, the IC tester changes the set value when changing the set value at the time of debugging or ranks the DUT with good accuracy, or changes the set value for other DUT tests to change the set value. Treated as a variable. However, there are variables that do not need to be changed during the mass production stage DUT test, and each time the TSC 10 sends the variable setting values to the PE card 20 side, it took a long test time. However, since the PE card 20 handles the variable in the same way as the fixed value, the TSC 10 does not need to send the variable setting value to the PE card 20 each time, and the test time can be shortened.

  The PE card 20 may have a configuration that can be connected to two or more pins in addition to a configuration that can be connected to one pin of the DUT.

  Further, although the configuration in which the execution order and the variable setting values are sequentially stored in the storage unit 21 at the first execution time is shown, the execution order data may be passed to the PE card 20 before the execution.

It is the block diagram which showed one Example of this invention. It is the figure which showed the setting data. It is the figure which showed execution order data. It is the figure which showed the setting data. It is the figure which showed execution order data 212. It is the figure which showed variable set value data 213. It is the figure which showed the data change of the setting data. It is the figure which showed the data change of the setting data. 3 is a flowchart showing an operation of a control unit 12. 3 is a flowchart showing an operation of a control unit 22. 3 is a flowchart showing an operation of a control unit 22. It is the figure which showed schematic operation | movement of the apparatus shown in FIG.

Explanation of symbols

10 TSC
11 Storage Unit 12 Control Unit 20 PE Card 21 Storage Unit 22 Control Unit 23 Control Register

Claims (4)

In an IC tester for testing a test object,
A test system controller that outputs an execution instruction and a variable setting value based on execution order data indicating an execution order of the setting value data in which the setting value or variable is defined;
Based on the set value data and the execution order data, the set value data is prepared for setting, the set value is set by the execution command and the variable set value from the test system controller, and the test target and signal An IC tester comprising a plurality of pin electronics cards capable of transferring 1 or more pins. Test system controller
A first storage unit that stores at least execution order data and variable setting values;
A first control unit that outputs an execution instruction and a variable value of the setting based on the execution order data of the storage unit and the setting value of the variable;
Pin electronics card
A second storage unit for storing setting data and execution order data;
Based on the execution order data of the second storage unit, the setting data of the second storage unit is prepared, and the setting value is set by the execution instruction and the variable setting value of the first control unit. The IC tester according to claim 1, further comprising a control unit.   3. The IC tester according to claim 1, wherein the pin electronics card receives a set value of the variable from the test system controller and sets the variable of the set data to a fixed value. 4. The IC tester according to claim 3, wherein the pin electronics card has a fixed value only for a desired variable.

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