JP2005502779A5 - - Google Patents
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- Publication number
- JP2005502779A5 JP2005502779A5 JP2003525696A JP2003525696A JP2005502779A5 JP 2005502779 A5 JP2005502779 A5 JP 2005502779A5 JP 2003525696 A JP2003525696 A JP 2003525696A JP 2003525696 A JP2003525696 A JP 2003525696A JP 2005502779 A5 JP2005502779 A5 JP 2005502779A5
- Authority
- JP
- Japan
- Prior art keywords
- substrate
- nozzle
- organic
- nozzle block
- deposition
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US31721501P | 2001-09-04 | 2001-09-04 | |
| US60/317,215 | 2001-09-04 | ||
| PCT/US2002/028095 WO2003020999A1 (en) | 2001-09-04 | 2002-09-04 | Process and apparatus for organic vapor jet deposition |
Related Child Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2011185784A Division JP2012043799A (ja) | 2001-09-04 | 2011-08-29 | 有機蒸気噴流沈着用の方法 |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2005502779A JP2005502779A (ja) | 2005-01-27 |
| JP2005502779A5 true JP2005502779A5 (US07682660-20100323-C00001.png) | 2011-10-13 |
| JP5052737B2 JP5052737B2 (ja) | 2012-10-17 |
Family
ID=23232631
Family Applications (2)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2003525696A Expired - Lifetime JP5052737B2 (ja) | 2001-09-04 | 2002-09-04 | 有機蒸気噴流沈着用の方法および装置 |
| JP2011185784A Pending JP2012043799A (ja) | 2001-09-04 | 2011-08-29 | 有機蒸気噴流沈着用の方法 |
Family Applications After (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2011185784A Pending JP2012043799A (ja) | 2001-09-04 | 2011-08-29 | 有機蒸気噴流沈着用の方法 |
Country Status (6)
Families Citing this family (30)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US7744957B2 (en) | 2003-10-23 | 2010-06-29 | The Trustees Of Princeton University | Method and apparatus for depositing material |
| US20050079278A1 (en) * | 2003-10-14 | 2005-04-14 | Burrows Paul E. | Method and apparatus for coating an organic thin film on a substrate from a fluid source with continuous feed capability |
| US7214554B2 (en) | 2004-03-18 | 2007-05-08 | Eastman Kodak Company | Monitoring the deposition properties of an OLED |
| CN1938447B (zh) * | 2004-03-29 | 2010-06-09 | 大见忠弘 | 成膜装置及成膜方法 |
| US9150953B2 (en) | 2004-08-13 | 2015-10-06 | Semiconductor Energy Laboratory Co., Ltd. | Method for manufacturing semiconductor device including organic semiconductor |
| JP4373374B2 (ja) * | 2005-01-05 | 2009-11-25 | 三星モバイルディスプレイ株式會社 | 冷却機能を具備したチャックプレート組立体 |
| KR100646961B1 (ko) * | 2005-01-06 | 2006-11-23 | 삼성에스디아이 주식회사 | 증착시스템의 증착원의 제어방법 |
| KR100753145B1 (ko) * | 2005-11-23 | 2007-08-30 | 주식회사 탑 엔지니어링 | 유기발광소자의 유기물질 증착장치 |
| US20080057195A1 (en) | 2006-08-31 | 2008-03-06 | United Technologies Corporation | Non-line of sight coating technique |
| US7879401B2 (en) * | 2006-12-22 | 2011-02-01 | The Regents Of The University Of Michigan | Organic vapor jet deposition using an exhaust |
| US8912036B2 (en) | 2007-08-24 | 2014-12-16 | The Regents Of The University Of Michigan | Growth of ordered crystalline organic films |
| US20090214782A1 (en) | 2008-02-21 | 2009-08-27 | Forrest Stephen R | Organic vapor jet printing system |
| KR101055606B1 (ko) * | 2008-10-22 | 2011-08-10 | 한국과학기술원 | 유기 드라이 젯 프린팅 헤드 및 이를 이용한 프린팅 장치 및 방법 |
| US8613496B2 (en) * | 2009-03-25 | 2013-12-24 | The Regents Of The University Of Michigan | Compact organic vapor jet printing print head |
| US8931431B2 (en) * | 2009-03-25 | 2015-01-13 | The Regents Of The University Of Michigan | Nozzle geometry for organic vapor jet printing |
| US20110097495A1 (en) * | 2009-09-03 | 2011-04-28 | Universal Display Corporation | Organic vapor jet printing with chiller plate |
| US8801856B2 (en) * | 2009-09-08 | 2014-08-12 | Universal Display Corporation | Method and system for high-throughput deposition of patterned organic thin films |
| CN103003464B (zh) * | 2010-07-22 | 2015-03-25 | 通用显示公司 | 有机气相喷射印刷 |
| US8541069B2 (en) | 2011-04-11 | 2013-09-24 | United Technologies Corporation | Method of guided non-line of sight coating |
| CN103046006A (zh) * | 2013-01-06 | 2013-04-17 | 中国科学院苏州纳米技术与纳米仿生研究所 | 一种微纳结构的制备方法 |
| JP6482080B2 (ja) * | 2013-06-11 | 2019-03-13 | Ｎｅｃライティング株式会社 | 有機エレクトロルミネッセンス素子、ディスプレイパネル、および有機エレクトロルミネッセンス素子の製造方法 |
| EP2960059B1 (en) | 2014-06-25 | 2018-10-24 | Universal Display Corporation | Systems and methods of modulating flow during vapor jet deposition of organic materials |
| US11267012B2 (en) | 2014-06-25 | 2022-03-08 | Universal Display Corporation | Spatial control of vapor condensation using convection |
| US11220737B2 (en) * | 2014-06-25 | 2022-01-11 | Universal Display Corporation | Systems and methods of modulating flow during vapor jet deposition of organic materials |
| US10566534B2 (en) | 2015-10-12 | 2020-02-18 | Universal Display Corporation | Apparatus and method to deliver organic material via organic vapor-jet printing (OVJP) |
| DE102016119623B4 (de) | 2015-10-15 | 2021-04-22 | Electronics And Telecommunications Research Institute | Verfahren zur Herstellung einer optischen Vorrichtung |
| KR101857482B1 (ko) * | 2016-04-25 | 2018-06-20 | 강흥석 | 박막증착장치 및 박막증착방법 |
| CN109765121B (zh) * | 2019-01-07 | 2021-11-05 | 合肥龙精灵信息技术有限公司 | 一种汽车管类零部件的抗弯测试机构及其方法 |
| CN109765122B (zh) * | 2019-01-07 | 2021-12-14 | 南昌申宝汽车部件有限公司 | 一种汽车零部件抗弯检具及其使用方法 |
| DE102019129176A1 (de) * | 2019-10-29 | 2021-04-29 | Apeva Se | Verfahren und Vorrichtung zum Abscheiden organischer Schichten |
Family Cites Families (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| AU3994785A (en) * | 1984-02-13 | 1985-08-27 | Schmitt, J.J. 111 | Method and apparatus for the gas jet deposition of conductingand dielectric thin solid films and products produced there by |
| US5650197A (en) | 1994-03-11 | 1997-07-22 | Jet Process Corporation | Jet vapor deposition of organic molecule guest-inorganic host thin films |
| JPH07258828A (ja) * | 1994-03-24 | 1995-10-09 | Matsushita Electric Works Ltd | 膜形成方法 |
| US5707745A (en) | 1994-12-13 | 1998-01-13 | The Trustees Of Princeton University | Multicolor organic light emitting devices |
| US6048630A (en) | 1996-07-02 | 2000-04-11 | The Trustees Of Princeton University | Red-emitting organic light emitting devices (OLED's) |
| US6165554A (en) * | 1997-11-12 | 2000-12-26 | Jet Process Corporation | Method for hydrogen atom assisted jet vapor deposition for parylene N and other polymeric thin films |
| US6337102B1 (en) | 1997-11-17 | 2002-01-08 | The Trustees Of Princeton University | Low pressure vapor phase deposition of organic thin films |
| GB9808806D0 (en) * | 1998-04-24 | 1998-06-24 | Cambridge Display Tech Ltd | Selective deposition of polymer films |
| DE10007059A1 (de) * | 2000-02-16 | 2001-08-23 | Aixtron Ag | Verfahren und Vorrichtung zur Herstellung von beschichteten Substraten mittels Kondensationsbeschichtung |
-
2002
- 2002-09-04 KR KR1020047003206A patent/KR100998059B1/ko active IP Right Review Request
- 2002-09-04 EP EP10180588.5A patent/EP2275587B1/en not_active Expired - Lifetime
- 2002-09-04 TW TW091120151A patent/TWI284155B/zh not_active IP Right Cessation
- 2002-09-04 CN CNB028199537A patent/CN1287002C/zh not_active Expired - Lifetime
- 2002-09-04 WO PCT/US2002/028095 patent/WO2003020999A1/en active Application Filing
- 2002-09-04 JP JP2003525696A patent/JP5052737B2/ja not_active Expired - Lifetime
- 2002-09-04 EP EP02770461.8A patent/EP1423552B1/en not_active Expired - Lifetime
-
2011
- 2011-08-29 JP JP2011185784A patent/JP2012043799A/ja active Pending
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