JP2005348199A - Actuator and switch using the same - Google Patents

Actuator and switch using the same Download PDF

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Publication number
JP2005348199A
JP2005348199A JP2004166840A JP2004166840A JP2005348199A JP 2005348199 A JP2005348199 A JP 2005348199A JP 2004166840 A JP2004166840 A JP 2004166840A JP 2004166840 A JP2004166840 A JP 2004166840A JP 2005348199 A JP2005348199 A JP 2005348199A
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electrode portion
drive
driving
drive electrode
arm
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JP2004166840A
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JP4258439B2 (en
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Mitsuhiro Furukawa
光弘 古川
Akihiro Korechika
哲広 是近
Ryoichi Takayama
了一 高山
Koji Nomura
幸治 野村
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Panasonic Holdings Corp
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Matsushita Electric Industrial Co Ltd
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Abstract

<P>PROBLEM TO BE SOLVED: To provide an actuator of which a driving area is enlarged, and a switch using the same. <P>SOLUTION: Driving electrode parts 4, 5 provided on a driving arm 3 of an inboard beam comprising an actuator are divided into both terminal side areas 6 and a middle area 7 of the driving arm 3, so that the driving electrode parts can be independently controlled, respectively to improve driving efficiency and a driving area of the actuator can be enlarged as a result. <P>COPYRIGHT: (C)2006,JPO&NCIPI

Description

本発明は、電子機器に用いられるアクチュエータ及びこれを用いたスイッチに関するものである。   The present invention relates to an actuator used in an electronic apparatus and a switch using the actuator.

従来の電気式微小機械装置（以下、ＭＥＭＳと称す）としてのアクチュエータは、アクチュエータの駆動部となる駆動アームが基板上に支持され、この駆動アームに設けられた駆動電極部（例えば圧電歪みを応用した圧電駆動電極部や静電気吸着を応用した静電駆動電極部）に駆動電圧を印加することで駆動アームの動きを制御することが知られている。   An actuator as a conventional electric micromechanical device (hereinafter referred to as MEMS) has a driving arm that is supported on a substrate as a driving portion of the actuator, and a driving electrode portion (for example, applying piezoelectric strain) provided on the driving arm. It is known to control the movement of the driving arm by applying a driving voltage to the piezoelectric driving electrode unit and the electrostatic driving electrode unit applying electrostatic attraction).

なお、この出願の発明に関する先行技術文献情報としては、例えば、特許文献１が知られている。
特開２０００−１８８０５０号公報 As prior art document information relating to the invention of this application, for example, Patent Document 1 is known.
JP 2000-188050 A

そして、このようなＭＥＭＳ式アクチュエータの用途として携帯電話の送受信信号の接続を切り換えるスイッチや、光信号のオン−オフを行うスイッチなどが挙げられるようになり、その駆動領域の拡大が重要視されるようになってきている。   Such MEMS actuators can be applied to switches for switching transmission / reception signals of mobile phones, switches for turning on / off optical signals, etc., and it is important to expand the drive area. It has become like this.

しかしながら、駆動アームにおける駆動領域は駆動アームの振幅により決定するため、その領域を拡大するためには駆動アームを長く設定しなければならず、アクチュエータが大型化してしまうという問題があった。   However, since the drive area in the drive arm is determined by the amplitude of the drive arm, in order to expand the area, the drive arm has to be set long, and there is a problem that the actuator becomes large.

そこで本発明はこのような問題を解決し、駆動領域が大きなアクチュエータを提供するものである。   Therefore, the present invention solves such a problem and provides an actuator having a large driving area.

この目的を達成するために本発明は、特に、アクチュエータを構成する両持ち梁の駆動アームに設けられる駆動電極部を駆動アームの両端側領域とその中間領域とに分けて設けたのである。   In order to achieve this object, in the present invention, in particular, the drive electrode portion provided in the drive arm of the doubly-supported beam constituting the actuator is provided separately in both end region and intermediate region of the drive arm.

この構成により、駆動アームに対して駆動力を与える駆動電極部が細分化されたことで、それぞれ駆動電極部を独立して制御し駆動効率を向上させることができ、結果としてアクチュエータの駆動領域を拡大できるのである。   With this configuration, the drive electrode section that provides drive force to the drive arm is subdivided, so that each drive electrode section can be controlled independently to improve drive efficiency, resulting in a drive area for the actuator. It can be expanded.

以下、本発明の一実施形態について図を用いて説明する。   Hereinafter, an embodiment of the present invention will be described with reference to the drawings.

図１は本発明に係るアクチュエータの斜視図であり、その基本構成は基板１と、両端が基板１に設けられた一対の支持部２により支持された両持ち梁の駆動アーム３と、この駆動アーム３の両端側領域に設けられた外側駆動電極部４と、駆動アーム３の中間領域に設けられた内側駆動電極部５とから構成されている。   FIG. 1 is a perspective view of an actuator according to the present invention. The basic configuration of the actuator is a substrate 1, a drive arm 3 of a doubly supported beam supported by a pair of support portions 2 provided at both ends of the substrate 1, and this drive. The outer drive electrode unit 4 is provided in the both end regions of the arm 3 and the inner drive electrode unit 5 is provided in the intermediate region of the drive arm 3.

また、駆動アーム３を駆動する外側駆動電極部４および内側駆動電極部５は、特に図示はしていないが、一対の駆動電圧印加用の制御電極で圧電体層を挟み込むことで構成しており、制御電極に駆動電圧を印加することにより圧電体層が伸縮することにより駆動アームが撓むという原理に基づき利用している。   The outer drive electrode unit 4 and the inner drive electrode unit 5 that drive the drive arm 3 are configured by sandwiching a piezoelectric layer between a pair of control electrodes for applying a drive voltage, although not particularly illustrated. This is utilized based on the principle that the drive arm bends when the piezoelectric layer expands and contracts by applying a drive voltage to the control electrode.

なお、この制御電極に対する電圧印加手段はワイヤボンディングや内層配線などの一般的な接続手段を用いて適宜接続すれば良いものである。また基板１や駆動アーム３の素材としてはシリコンを用いているが、基本的に表面が絶縁性を有するものであれば良く、金属板の表面に絶縁化処理を施したものでも代替え可能である。   The voltage applying means for the control electrode may be appropriately connected using general connecting means such as wire bonding or inner layer wiring. Further, although silicon is used as the material for the substrate 1 and the drive arm 3, it is basically sufficient if the surface has an insulating property, and it is possible to substitute a metal plate with an insulating treatment. .

そして、駆動アーム３を駆動するにあたっては図１に示すように、支持部２によって支持された駆動アーム３の両端側領域６とその間に位置する中間領域７に外側駆動電極部４と内側駆動電極部５が独立して設けられていることから、外側駆動電極部４においては支持部２により固定された部分に近接して配置されることで駆動時の瞬発性および駆動力が高められ、内側駆動電極部５においては駆動アーム３の最大振幅となる中間領域７においてその駆動制御が可能となり駆動アーム３の駆動効率を向上させることができ、結果としてアクチュエータの駆動領域を拡大できるのである。   When driving the drive arm 3, as shown in FIG. 1, the outer drive electrode portion 4 and the inner drive electrode are arranged in the region 6 on both ends of the drive arm 3 supported by the support portion 2 and the intermediate region 7 positioned therebetween. Since the portion 5 is provided independently, the outer drive electrode portion 4 is arranged in the vicinity of the portion fixed by the support portion 2, so that the instantaneousness and driving force at the time of driving are increased, and the inner side In the drive electrode portion 5, the drive control can be performed in the intermediate region 7 having the maximum amplitude of the drive arm 3, and the drive efficiency of the drive arm 3 can be improved. As a result, the drive region of the actuator can be expanded.

また、このアクチュエータの動作としては、まず図２（ａ）の矢印のように外側駆動電極部４と内側駆動電極部５の撓み方向つまり駆動方向を異ならせ、外側駆動電極部４を用いて中間領域７を下方に引き下げるとともに内側駆動電極部５を用いて中間領域７を上方に撓ませた状態とする。次いで図２（ｂ）に矢印で示すよう、外側駆動電極部４の駆動方向を維持しつつ内側駆動電極部５の駆動方向を逆転させることで、破線で示すように外側駆動電極部４の駆動力と併せて内側駆動電極部５の反動により駆動アーム３の振幅をさらに大きくすることができるので、結果としてアクチュエータの最大駆動領域を拡大することができるのである。   Further, as the operation of this actuator, first, as shown by the arrow in FIG. 2A, the outer drive electrode portion 4 and the inner drive electrode portion 5 are made different in bending direction, that is, the drive direction. The region 7 is pulled down and the intermediate region 7 is bent upward using the inner drive electrode portion 5. Next, as shown by an arrow in FIG. 2B, the driving direction of the inner driving electrode unit 5 is reversed while maintaining the driving direction of the outer driving electrode unit 4, thereby driving the outer driving electrode unit 4 as shown by a broken line. The amplitude of the drive arm 3 can be further increased by the reaction of the inner drive electrode portion 5 together with the force, and as a result, the maximum drive area of the actuator can be expanded.

なお、内側駆動電極部５に交流電圧を印加することにより、内側駆動電極部５が設けられた中間領域のみを振動させ、外側駆動電極部４の駆動と内側駆動電極部５の振動により、アクチュエータの最大駆動領域を拡大することができるのである。   In addition, by applying an alternating voltage to the inner drive electrode portion 5, only the intermediate region where the inner drive electrode portion 5 is provided is vibrated, and the actuator is driven by driving the outer drive electrode portion 4 and vibration of the inner drive electrode portion 5. The maximum drive area can be expanded.

また、このようなアクチュエータを用いた例としては図３に示されるようなスイッチが挙げられる。このスイッチは基本的には先に述べた図１に示されるアクチュエータの中間領域７に接続電極９を設け、この接続電極９の上下振動を制御することにより基板１の表面に設けられた一対の端子電極１０間の接続−非接続を制御する構成となっている。   An example of using such an actuator is a switch as shown in FIG. This switch is basically provided with a connecting electrode 9 in the intermediate region 7 of the actuator shown in FIG. 1 described above, and a pair of electrodes provided on the surface of the substrate 1 by controlling the vertical vibration of the connecting electrode 9. The connection / disconnection between the terminal electrodes 10 is controlled.

そして、このようなスイッチにおいては高周波用途に用いられることが想定されることから、端子電極１０間が非接続状態を保つために接続電極９と端子電極１０間に生じる浮遊容量を小さくすることが重要であり、上述したような作用、効果が特に有効に作用するものである。   Since such a switch is assumed to be used for high frequency applications, the stray capacitance generated between the connection electrode 9 and the terminal electrode 10 can be reduced in order to keep the terminal electrode 10 in a non-connected state. It is important and the above-described operations and effects are particularly effective.

また、このようなスイッチにおいては端子電極１０間の接続状態を持続する必要もあることから、図３に示されたスイッチに対してさらに図４に示されるような静電気発生用の静電電極８を基板１の表面と接続電極９の両側に別途設けることで、端子電極１０間の接続状態を駆動アーム３側に設けられた静電電極８と基板１側に設けられた静電電極８との間に生じる静電気力を利用して持続することができるのである。   Further, in such a switch, since the connection state between the terminal electrodes 10 needs to be maintained, the electrostatic electrode 8 for generating static electricity as shown in FIG. 4 is further added to the switch shown in FIG. Are separately provided on the surface of the substrate 1 and on both sides of the connection electrode 9, so that the connection state between the terminal electrodes 10 is changed between the electrostatic electrode 8 provided on the drive arm 3 side and the electrostatic electrode 8 provided on the substrate 1 side. It can be sustained using the electrostatic force generated during the period.

本発明にかかるアクチュエータ及びこれを用いたスイッチは、駆動領域を拡大できるという効果を有し、特に小型でありながら大きな駆動領域が要望される用途において有用である。   The actuator according to the present invention and the switch using the actuator have an effect that the driving area can be expanded, and are particularly useful in applications where a large driving area is required while being small.

本発明の一実施形態におけるアクチュエータの斜視図The perspective view of the actuator in one Embodiment of this invention 同アクチュエータの駆動状態を示す断面図Sectional view showing the drive state of the actuator 本発明の一実施形態におけるスイッチの斜視図The perspective view of the switch in one embodiment of the present invention 本発明の別の実施形態におけるスイッチの斜視図The perspective view of the switch in another embodiment of the present invention

符号の説明Explanation of symbols

１ 基板
２ 支持部
３ 駆動アーム
４ 外側駆動電極部
５ 内側駆動電極部
６ 両端側領域
７ 中間領域
８ 静電電極
９ 接続電極
１０ 端子電極 DESCRIPTION OF SYMBOLS 1 Board | substrate 2 Support part 3 Drive arm 4 Outer drive electrode part 5 Inner drive electrode part 6 Both-ends side area | region 7 Middle area | region 8 Electrostatic electrode 9 Connection electrode 10 Terminal electrode

Claims (4)

少なくとも表面が絶縁化された基板と、この基板に対して両端部分が一対の支持部により支持された駆動アームと、前記駆動アームの表面に設けられその振幅方向に対して駆動力を与える駆動電極部とを備え、前記駆動電極部は前記駆動アームの両端側領域とその中間領域とに分けて設けたことを特徴とするアクチュエータ。 A substrate having at least a surface insulated, a drive arm having both ends supported by a pair of support portions with respect to the substrate, and a drive electrode provided on the surface of the drive arm and providing a driving force in the amplitude direction An actuator, wherein the drive electrode portion is divided into a region on both ends of the drive arm and an intermediate region thereof. 駆動電極部は両端側領域に設けられた外側駆動電極部と中間領域に設けられた内側駆動電極部とから構成され、初期駆動時には前記外側駆動電極部と前記内側駆動電極部の駆動方向を異ならせ、その後前記外側駆動電極部の駆動を維持しつつ前記内側駆動電極部を前記外側駆動電極部と同方向に駆動させることを特徴とした請求項１に記載のアクチュエータ。 The drive electrode portion is composed of an outer drive electrode portion provided in both end regions and an inner drive electrode portion provided in the intermediate region, and the drive directions of the outer drive electrode portion and the inner drive electrode portion are different during initial driving. The actuator according to claim 1, wherein the inner driving electrode portion is driven in the same direction as the outer driving electrode portion while maintaining driving of the outer driving electrode portion. 駆動電極部は両端側領域に設けられた外側駆動電極部と中間領域に設けられた内側駆動電極部とから構成され、前記内側駆動電極部に交流電圧を加えて前記中間領域を振動させたことを特徴とする請求項１に記載のアクチュエータ。 The drive electrode portion is composed of an outer drive electrode portion provided in both end regions and an inner drive electrode portion provided in the intermediate region, and an alternating voltage is applied to the inner drive electrode portion to vibrate the intermediate region. The actuator according to claim 1. 少なくとも表面が絶縁化された基板と、この基板の主面に設けられた一対の端子電極と、前記基板の主面に対して両端部分が一対の支持部により支持された駆動アームと、前記駆動アームの表面に設けられその振幅方向に対して駆動力を与える駆動電極部と、前記駆動アームの最大振幅領域でかつ前記端子電極側を向く面に設けられ前記一対の端子電極間を接続する接続電極とを備え、前記駆動アームの両端側領域に設けられた外側駆動電極部と、中間領域に設けられた内側駆動電極部とを備えたことを特徴とするスイッチ。 A substrate having at least a surface insulated; a pair of terminal electrodes provided on a main surface of the substrate; a drive arm having both ends supported by a pair of support portions with respect to the main surface of the substrate; and the driving A drive electrode portion provided on the surface of the arm for applying a driving force in the amplitude direction, and a connection for connecting the pair of terminal electrodes provided on the surface facing the terminal electrode side in the maximum amplitude region of the drive arm A switch comprising: an outer drive electrode portion provided in a region on both ends of the drive arm, and an inner drive electrode portion provided in an intermediate region.
JP2004166840A 2004-06-04 2004-06-04 Actuator drive method Expired - Fee Related JP4258439B2 (en)

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Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2006351296A (en) * 2005-06-14 2006-12-28 Sony Corp Movable element, semiconductor device with the same incorporated therein, module and electronic apparatus
WO2009123111A1 (en) * 2008-03-31 2009-10-08 パナソニック電工株式会社 Mem switch and method for manufacturing the same

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2006351296A (en) * 2005-06-14 2006-12-28 Sony Corp Movable element, semiconductor device with the same incorporated therein, module and electronic apparatus
JP4586642B2 (en) * 2005-06-14 2010-11-24 ソニー株式会社 Movable element, and semiconductor device, module and electronic equipment incorporating the movable element
WO2009123111A1 (en) * 2008-03-31 2009-10-08 パナソニック電工株式会社 Mem switch and method for manufacturing the same
JP2009245877A (en) * 2008-03-31 2009-10-22 Panasonic Electric Works Co Ltd Mems switch and its manufacturing method
US8390173B2 (en) 2008-03-31 2013-03-05 Panasonic Corporation MEMS switch and method of manufacturing the MEMS switch

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