JP2005302711A - Actuator, its control method and switch using this - Google Patents

Actuator, its control method and switch using this Download PDF

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JP2005302711A
JP2005302711A JP2005072543A JP2005072543A JP2005302711A JP 2005302711 A JP2005302711 A JP 2005302711A JP 2005072543 A JP2005072543 A JP 2005072543A JP 2005072543 A JP2005072543 A JP 2005072543A JP 2005302711 A JP2005302711 A JP 2005302711A
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electrode
drive
piezoelectric
voltage
electrodes
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Ryoichi Takayama
了一 高山
Akihiro Korechika
哲広 是近
Koji Nomura
幸治 野村
Mitsuhiro Furukawa
光弘 古川
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Panasonic Holdings Corp
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Matsushita Electric Industrial Co Ltd
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Priority to JP2005072543A priority Critical patent/JP2005302711A/en
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Priority to US11/415,076 priority patent/US7633213B2/en
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    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01H—ELECTRIC SWITCHES; RELAYS; SELECTORS; EMERGENCY PROTECTIVE DEVICES
    • H01H57/00—Electrostrictive relays; Piezo-electric relays
    • H01H2057/006—Micromechanical piezoelectric relay

Abstract

<P>PROBLEM TO BE SOLVED: To attain high drive speed and low drive voltage for an actuator and a switch using it. <P>SOLUTION: This actuator is provided with: a substrate 3 at least whose surface is insulated; a drive arm 4 whose at least one part is supported by the substrate 3; an electrostatic electrode 8 provided in a position facing the substrate 3 and the drive arm 4; and a first voltage applying means applying voltage to the electrostatic electrode 8. A piezoelectric drive electrode 7 having electrodes 6 in upper and lower surfaces of a piezoelectric material layer 5 is provided in the drive arm 4, and a second voltage applying means applying voltage to the piezoelectric drive electrode 7 is provided. <P>COPYRIGHT: (C)2006,JPO&NCIPI

Description

本発明は、電子機器に用いられるアクチュエータおよびそれを用いた高周波スイッチに関するものである。   The present invention relates to an actuator used in an electronic device and a high frequency switch using the actuator.

従来の電気式微少機械装置（ＭＥＭＳ）としてのアクチュエータは、アクチュエータの駆動部となる駆動アームが基板上に支持され、基板と駆動アームに設けられた静電用電極の一方に正電圧を他方の静電用電極に負電圧を印加することで、これによって生じる静電気力を用い駆動アームを基板側に引き寄せる構成が知られている。   In a conventional actuator as an electric micromechanical device (MEMS), a drive arm serving as an actuator drive unit is supported on a substrate, and a positive voltage is applied to one of the substrate and the electrostatic electrode provided on the drive arm. There has been known a configuration in which a negative arm is applied to an electrostatic electrode to draw a drive arm toward the substrate using an electrostatic force generated thereby.

なお、この出願の発明に関連する先行技術文献情報としては、例えば、特許文献１が知られている。
特開２０００−１８８０５０号公報 As prior art document information related to the invention of this application, for example, Patent Document 1 is known.
JP 2000-188050 A

そして、このようなＭＥＭＳ式アクチュエータの用途として携帯電話の送受信信号の接続を切り換えるスイッチなどが挙げられるようになり、その駆動速度の向上が重要視されるようになってきている。   And as a use of such a MEMS actuator, a switch for switching connection of transmission / reception signals of a mobile phone has been mentioned, and improvement of the driving speed has been regarded as important.

しかしながら、静電式のアクチュエータは静電気により駆動アームを駆動するため、駆動アームがまっすぐに伸びた初期状態において最も静電用電極間の距離が大きくなることから、その高速化にあたっては初期駆動時に大きな静電気力を発生させなければならず、必然的に電圧が大きくなってしまうという問題を有していた。また、駆動アームを戻す際も、静電力を解除して駆動アームのバネ性により戻していたため、駆動の高速化が困難であった。   However, since the electrostatic actuator drives the drive arm by static electricity, the distance between the electrodes for electrostatic use is the largest in the initial state where the drive arm is extended straight. An electrostatic force has to be generated, and the voltage inevitably increases. Also, when the drive arm is returned, since the electrostatic force is released and the drive arm is returned by the spring property, it is difficult to increase the drive speed.

一方、圧電駆動によりアクチュエータを駆動する方法も提案されているが、これをスイッチに応用しようとすると、駆動アームを動かして、接触させた際に駆動アームがそのバネ性により振動し、ノイズを発生しやすいという課題があった。   On the other hand, a method of driving an actuator by piezoelectric drive has also been proposed, but if this is applied to a switch, when the drive arm is moved and brought into contact, the drive arm vibrates due to its springiness, generating noise. There was a problem that it was easy to do.

そこで本発明はこのような問題を解決し、低電圧で高速駆動が可能なアクチュエータおよびこれを用いたスイッチを提供するものである。   Therefore, the present invention solves such a problem and provides an actuator capable of high-speed driving at a low voltage and a switch using the same.

この目的を達成するために本発明は、特に、静電駆動方式のアクチュエータを構成する駆動アームに対して、圧電体層の上下面に電極を形成した圧電駆動電極と、圧電駆動電極を形成する電極に電圧を印加する電圧印加手段とを設けた構成としたものである。   In order to achieve this object, the present invention forms, in particular, a piezoelectric drive electrode having electrodes formed on the upper and lower surfaces of a piezoelectric layer and a piezoelectric drive electrode for a drive arm constituting an actuator of an electrostatic drive system. A voltage applying means for applying a voltage to the electrodes is provided.

この構成により、駆動アームに対する静電力の弱い初期駆動時に圧電駆動電極の撓み作用を加えることで駆動速度を向上できるとともに、アクチュエータの低電圧駆動ができ、消費電力を小さくできる。   With this configuration, it is possible to improve the driving speed by applying a bending action of the piezoelectric driving electrode during initial driving with a weak electrostatic force with respect to the driving arm, and it is possible to drive the actuator at a low voltage and reduce power consumption.

（実施の形態１）
以下、実施の形態１を用いて、本発明について説明する。 (Embodiment 1)
Hereinafter, the present invention will be described using the first embodiment.

図１は本発明に係るアクチュエータ１を用いたスイッチ２の斜視図であり、その基本構成は基板３と、一端が基板３に支持され基板３に平行に配置された板状の駆動アーム４と、この駆動アーム４の上面に設けられ、圧電体層５の上下面を電極６で挟み込んだ圧電駆動電極７と、基板３の上面および駆動アーム４の下面に設けられた静電用電極８とで構成されている。また、圧電駆動電極７を形成する電極６および静電用電極８には、それぞれ電圧印加用の電圧印加手段が接続されるものであるが、この電圧印加手段は一般的な電源回路を用いて適宜接続すれば良いものでこの図１においては特に図示していない。   FIG. 1 is a perspective view of a switch 2 using an actuator 1 according to the present invention. The basic configuration of the switch 2 is a substrate 3, and a plate-like drive arm 4 having one end supported by the substrate 3 and arranged parallel to the substrate 3. The piezoelectric drive electrode 7 provided on the upper surface of the drive arm 4 and sandwiching the upper and lower surfaces of the piezoelectric layer 5 between the electrodes 6, and the electrostatic electrode 8 provided on the upper surface of the substrate 3 and the lower surface of the drive arm 4. It consists of In addition, a voltage applying means for applying a voltage is connected to each of the electrode 6 and the electrostatic electrode 8 forming the piezoelectric drive electrode 7, and this voltage applying means is a general power supply circuit. What is necessary is just to connect suitably, and it does not illustrate in particular in this FIG.

なお、基板３や駆動アーム４の素材としてはシリコンを用いているが、基本的に表面が絶縁性を有するものであれば良く、金属板の表面に絶縁化処理を施したものでも代替え可能である。   Silicon is used as the material for the substrate 3 and the drive arm 4, but basically any material having an insulating surface can be used, and a metal plate with an insulating treatment can be substituted. is there.

そして、一方の静電用電極８に電圧印加手段により正電圧を印加し、もう一方の静電用電極８をグランド或いは負電圧に接続することで対向する静電用電極８間に静電気力が生じ、基板３に対して駆動アーム４を基板３に引き寄せるいわゆる静電駆動方式による駆動と、圧電駆動電極７を形成する電極６に電圧印加手段から電圧を印加することでその内層部に位置する圧電体層５が伸縮し、この伸縮により駆動アーム４を撓ませることにより、駆動アーム４を上下方向に駆動させ、その先端に設けられた接続電極９をもって隣り合う端子電極１０間の電気的接続を制御している。   Then, a positive voltage is applied to one electrostatic electrode 8 by a voltage applying means, and the other electrostatic electrode 8 is connected to the ground or a negative voltage, whereby an electrostatic force is generated between the opposing electrostatic electrodes 8. The drive arm 4 is driven against the substrate 3 by the so-called electrostatic drive method, and the voltage 6 is applied to the electrode 6 forming the piezoelectric drive electrode 7 so that the voltage is applied to the inner layer portion. The piezoelectric layer 5 expands and contracts, and the drive arm 4 is flexed by this expansion and contraction to drive the drive arm 4 in the vertical direction, and the electrical connection between the adjacent terminal electrodes 10 with the connection electrode 9 provided at the tip thereof. Is controlling.

そして、スイッチ２を形成するアクチュエータ１を図２に示すように、静電気力のみを用いたアクチュエータ１において駆動電圧が大きくなってしまう初期駆動部分を低電圧で機械的に駆動する圧電駆動方式Ａを主体的に活用し、撓み量が大きくなり駆動電圧が大きくなる静電用電極８が近接する部分においては、静電用電極８が近接することで有効に作用する静電駆動方式Ｂを主体的に活用するように制御することで、アクチュエータ１の高速駆動を実現できるとともにアクチュエータ１の駆動に伴う電圧が低減でき、特に携帯電話などの低電圧設計が望まれる分野において非常に有効となる。   Then, as shown in FIG. 2, the actuator 1 that forms the switch 2 has a piezoelectric drive system A that mechanically drives the initial drive portion where the drive voltage increases in the actuator 1 using only electrostatic force at a low voltage. In an area where the electrostatic electrode 8 is proximately utilized and the amount of deflection increases and the drive voltage increases, the electrostatic drive system B that works effectively by the proximity of the electrostatic electrode 8 is proactive. By controlling so that the actuator 1 can be used for the first time, the actuator 1 can be driven at a high speed and the voltage associated with the driving of the actuator 1 can be reduced. This is particularly effective in a field where a low voltage design such as a cellular phone is desired.

このようにすることにより、圧電駆動のみで構成した場合に発生する振動が、静電用電極８が近接することによって強くなった静電力によって抑えられ、ノイズを低減することができる。   By doing in this way, the vibration which generate | occur | produces only when comprised by a piezoelectric drive is suppressed by the electrostatic force which became strong when the electrode 8 for electrostatics adjoined, and noise can be reduced.

また、静電駆動のみの場合は、駆動アーム４が撓んだ状態から元の状態に戻す際には、静電力を解除し、駆動アーム４のバネ性のみで戻していたために、高速化には限界があった。これに対し本発明では、圧電駆動電極７を形成する電極６に、撓ませたときとは逆の電圧を印加することにより逆方向に撓ませ、高速での駆動が可能となる。   Further, in the case of only electrostatic driving, when the driving arm 4 is returned from the bent state to the original state, the electrostatic force is released and only the spring property of the driving arm 4 is returned, so that the speed is increased. There was a limit. On the other hand, in the present invention, the electrode 6 forming the piezoelectric drive electrode 7 is deflected in the opposite direction by applying a voltage opposite to that when it is bent, and can be driven at high speed.

図３は、本発明の一実施形態における別のアクチュエータを用いたスイッチの正面図であり、圧電駆動電極７を圧電体層５の上下に設けた電極６ａ、電極６ｂにより構成し、一方駆動アーム４の圧電駆動電極７とは反対の面に静電用電極８ａを設け、電極６ａと静電用電極８ａとを、駆動アーム４内に設けたスルーホール１３により電気的に接続したものである。また基板３側の静電用電極８ｂをグランドに接続する。ここで例えば圧電体層５は、電極６ａから電極６ｂに向かって電界がかかったときに、面方向に広がるように分極を施しておく。このように構成し、電極６ａおよび静電用電極８ａに正電圧を印加し、電極６ｂをグランドに落とすと、圧電体層５が広がり、駆動アーム４は、基板３側に撓む。同時に静電用電極８ａと静電用電極８ｂが引き合い、駆動アーム４の先端に設けられた接続電極９が、隣り合う端子電極１０間を電気的に接続させる。逆に、この電気的接続を切るためには、電極６ａおよび静電用電極８ａをグランドに落とし、電極６ｂに正電圧を印加する。このとき静電用電極８ａと静電用電極８ｂが引き合う力が解除され、一方圧電体層５が収縮し、これと駆動アーム４のバネ性により、駆動アーム４の先端が持ち上げられ、隣り合う端子電極１０間の電気的接続が解除される。   FIG. 3 is a front view of a switch using another actuator according to an embodiment of the present invention, in which the piezoelectric drive electrode 7 is composed of electrodes 6a and 6b provided above and below the piezoelectric layer 5, and one drive arm. 4 is provided with an electrostatic electrode 8a on the surface opposite to the piezoelectric drive electrode 7, and the electrode 6a and the electrostatic electrode 8a are electrically connected by a through hole 13 provided in the drive arm 4. . The electrostatic electrode 8b on the substrate 3 side is connected to the ground. Here, for example, the piezoelectric layer 5 is polarized so as to spread in the plane direction when an electric field is applied from the electrode 6a to the electrode 6b. When a positive voltage is applied to the electrode 6a and the electrostatic electrode 8a and the electrode 6b is dropped to the ground, the piezoelectric layer 5 spreads and the drive arm 4 bends toward the substrate 3 side. At the same time, the electrostatic electrode 8 a and the electrostatic electrode 8 b attract each other, and the connection electrode 9 provided at the tip of the drive arm 4 electrically connects the adjacent terminal electrodes 10. Conversely, in order to disconnect this electrical connection, the electrode 6a and the electrostatic electrode 8a are dropped to the ground, and a positive voltage is applied to the electrode 6b. At this time, the attracting force between the electrostatic electrode 8a and the electrostatic electrode 8b is released, while the piezoelectric layer 5 contracts, and due to this and the spring property of the drive arm 4, the tip of the drive arm 4 is lifted and adjacent. The electrical connection between the terminal electrodes 10 is released.

即ち、一つの制御信号と、これを反転させた信号を印加することにより、接続するときには、圧電駆動と静電駆動を、接続を解除するときには、圧電駆動とバネ性を利用して駆動するため、低電圧で高速なスイッチングが可能となる。   That is, by applying one control signal and a signal obtained by inverting it, the piezoelectric drive and electrostatic drive are used when connecting, and the piezoelectric drive and spring characteristics are used when releasing the connection. Fast switching at low voltage is possible.

また、この圧電駆動という点に着目すれば、駆動アーム４に対して圧電駆動電極７を複数形成することで駆動アーム４の駆動方法を自在に制御できるものである。その具体例として、図４に示されるように駆動アーム４の上面における延伸軸に対して略左右対称となるよう圧電駆動電極７を分割し圧電駆動電極７ａ，７ｂを形成し、それぞれの駆動電圧の印加を制御することで駆動アーム４を左右方向に駆動することが可能となる。よって、この圧電駆動電極７ａ，７ｂによる左右方向の駆動と圧電駆動電極７ｃによる先に述べた上下方向の駆動を併せることで、図５に示されるように３つの端子電極１０ａ，１０ｂ，１０ｃに対して端子電極１０ａ，１０ｂ間の接続や電極１０ｂ，１０ｃ間の接続といったことを自在に制御することが可能となる。   If attention is focused on this piezoelectric drive, the drive method of the drive arm 4 can be freely controlled by forming a plurality of piezoelectric drive electrodes 7 on the drive arm 4. As a specific example thereof, as shown in FIG. 4, the piezoelectric drive electrode 7 is divided so as to be substantially bilaterally symmetrical with respect to the extending axis on the upper surface of the drive arm 4 to form the piezoelectric drive electrodes 7a and 7b. It is possible to drive the drive arm 4 in the left-right direction by controlling the application of. Therefore, by combining the horizontal driving by the piezoelectric driving electrodes 7a and 7b and the vertical driving described above by the piezoelectric driving electrode 7c, the three terminal electrodes 10a, 10b, and 10c are formed as shown in FIG. On the other hand, the connection between the terminal electrodes 10a and 10b and the connection between the electrodes 10b and 10c can be freely controlled.

そして、このスイッチ２を用いた応用例としては、例えば欧州携帯電話通信システムにおけるＧＳＭとＤＣＳといった異なる２つの送受信システムに対応した、いわゆるデュアルバンド携帯電話に用いられるＳＰＤＴ（一極双投）型スイッチ回路で、図５に示す中央に位置する接続電極１０ｂをアンテナ端子とし、その両側に位置する端子電極１０ａ，１０ｃを送受信端子とすることで、１つのアンテナを用いて異なる送受信システムを切り換え接続することができる。   As an application example using this switch 2, for example, an SPDT (single pole double throw) type switch used for a so-called dual band mobile phone, which corresponds to two different transmission / reception systems such as GSM and DCS in a European mobile phone communication system. In the circuit, the connection electrode 10b located in the center shown in FIG. 5 is used as an antenna terminal, and the terminal electrodes 10a and 10c located on both sides thereof are used as transmission / reception terminals to switch and connect different transmission / reception systems using one antenna. be able to.

なお、このような高周波向けのスイッチ２においてはオフ時（端子電極間が非接続となる状態）におけるアイソレーション特性が必要となることから、端子電極間における寄生容量に対してインダクタを並列接続しその並列共振周波数をアイソレーションが必要となる周波数帯域に設定するなどの、この分野において通常なされている対策を実施することが望ましい。   Since such a high frequency switch 2 requires isolation characteristics when it is off (a state in which the terminal electrodes are not connected), an inductor is connected in parallel to the parasitic capacitance between the terminal electrodes. It is desirable to implement measures usually taken in this field, such as setting the parallel resonance frequency to a frequency band that requires isolation.

また、これと同様に端子電極１０の配置やスイッチ２の配置を適宜選ぶことによりＳＰ３Ｔ（一極三投）やＤＰＤＴ（二極双投）といったさらなるマルチバンド化も可能である。   Further, similarly to this, by further selecting the arrangement of the terminal electrode 10 and the arrangement of the switch 2, further multi-banding such as SP3T (single pole three throw) and DPDT (double pole double throw) is possible.

なお、この一実施形態においては駆動アーム４が基板に対して一端が支持されたいわゆる片持ち梁構造としているが、駆動アーム４の両端を支持するいわゆる両持ち梁構造としても同様の効果を奏することができる。   In this embodiment, the drive arm 4 has a so-called cantilever structure in which one end is supported with respect to the substrate. However, a so-called cantilever structure in which both ends of the drive arm 4 are supported has the same effect. be able to.

そして、このようなスイッチ２を形成するにあたっては、図６に示すごとく例えばシリコンからなる基板３上に静電用電極８や端子電極１０をスパッタ形成し、この基板３上に駆動アーム４の支持部分を除き二酸化珪素からなる犠牲層１１を設ける。そして、この犠牲層１１上にシリコンからなる駆動アーム４を形成し、この駆動アーム４上に圧電駆動電極７を形成する下側の電極６と、圧電体層５を形成するチタン酸ジルコン酸鉛（以下、ＰＺＴと称す）からなる圧電薄膜と、上側の電極６を形成する。その後、犠牲層１１を除去することにより基板３上に一端が支持された駆動アーム４を有するスイッチ２を形成することができるのである。   In forming such a switch 2, as shown in FIG. 6, for example, electrostatic electrodes 8 and terminal electrodes 10 are formed by sputtering on a substrate 3 made of silicon, and the drive arm 4 is supported on the substrate 3. A sacrificial layer 11 made of silicon dioxide is provided except for the portion. Then, the driving arm 4 made of silicon is formed on the sacrificial layer 11, the lower electrode 6 that forms the piezoelectric driving electrode 7 on the driving arm 4, and the lead zirconate titanate that forms the piezoelectric layer 5. A piezoelectric thin film made of (hereinafter referred to as PZT) and an upper electrode 6 are formed. Thereafter, by removing the sacrificial layer 11, the switch 2 having the drive arm 4 supported at one end on the substrate 3 can be formed.

また、圧電駆動電極７を駆動アーム４の下面に配置すれば、駆動アーム４の下面に圧電駆動電極７と静電用電極８および接続電極９が同一面内に形成できるので、電極形成において生産性を向上させることができる。   Further, if the piezoelectric drive electrode 7 is arranged on the lower surface of the drive arm 4, the piezoelectric drive electrode 7, the electrostatic electrode 8 and the connection electrode 9 can be formed on the same surface on the lower surface of the drive arm 4, so Can be improved.

なお、このスイッチ２にＳＡＷフィルタなどの耐熱性の低いデバイスを複合化するような場合であれば、ＰＺＴの形成に６００℃程度の熱処理が必要なため、先に述べた方法においてはデバイスを破壊する恐れがあるので、図７に示すごとくＰＺＴの形成を要する駆動アーム４部分の形成と、基板３および耐熱性の低いデバイス１２の実装を別工程で行い、最後に一体化するといった工法を用いることで、圧電体層５を有するスイッチ２に耐熱性の低いデバイス１２を複合化することが可能となる。   If the switch 2 is combined with a device having low heat resistance such as a SAW filter, the heat treatment at about 600 ° C. is required for forming PZT. Therefore, as shown in FIG. 7, a method is used in which the formation of the drive arm 4 that requires the formation of PZT and the mounting of the substrate 3 and the device 12 having low heat resistance are performed in separate steps, and finally integrated. As a result, the device 2 having low heat resistance can be combined with the switch 2 having the piezoelectric layer 5.

本発明にかかるアクチュエータおよびスイッチは、駆動電圧を低くし、高速駆動を可能とすることができるという効果を有し、特に高周波用途において有用である。   The actuator and the switch according to the present invention have an effect that the driving voltage can be lowered and high-speed driving can be performed, and are particularly useful in high frequency applications.

本発明の一実施形態におけるアクチュエータを用いたスイッチの斜視図The perspective view of the switch using the actuator in one Embodiment of this invention 同駆動アームの動作を示す正面図Front view showing the operation of the drive arm 本発明の一実施形態における別のアクチュエータを用いたスイッチの正面図The front view of the switch using another actuator in one embodiment of the present invention. 他の実施形態における駆動アームの上面図The top view of the drive arm in other embodiments 同駆動アームの動作を示す正面図Front view showing the operation of the drive arm アクチュエータの製造方法を示す図Diagram showing manufacturing method of actuator アクチュエータの他の製造方法を示す図The figure which shows the other manufacturing method of an actuator

符号の説明Explanation of symbols

１ アクチュエータ
２ スイッチ
３ 基板
４ 駆動アーム
５ 圧電体層
６ 電極
７ 圧電駆動電極
８ 静電用電極
９ 接続電極
１０ 端子電極 DESCRIPTION OF SYMBOLS 1 Actuator 2 Switch 3 Board | substrate 4 Drive arm 5 Piezoelectric layer 6 Electrode 7 Piezoelectric drive electrode 8 Electrostatic electrode 9 Connection electrode 10 Terminal electrode

Claims (16)

少なくとも表面が絶縁化された基板と、この基板に少なくとも１カ所が支持された駆動アームと、前記基板および前記駆動アームにそれぞれ対向する位置に設けられた静電用電極と、この静電用電極に電圧を印加する第１の電圧印加手段とを備え、前記駆動アームに対してさらに圧電体層の上下面に電極を有する圧電駆動電極を設け、この圧電駆動電極に電圧を印加する第２の電圧印加手段を設けたアクチュエータ。 A substrate having at least a surface insulated; a drive arm supported by at least one location on the substrate; an electrostatic electrode provided at a position facing the substrate and the drive arm; and the electrostatic electrode A first voltage applying means for applying a voltage to the driving arm, a piezoelectric driving electrode having electrodes on the upper and lower surfaces of the piezoelectric layer is further provided on the driving arm, and a second voltage is applied to the piezoelectric driving electrode. Actuator provided with voltage application means. 駆動電極を複数個設けた請求項１に記載のアクチュエータ。 The actuator according to claim 1, wherein a plurality of drive electrodes are provided. 圧電駆動電極を駆動アームの上面における延伸軸に対して略左右対称となるように設けた請求項２に記載のアクチュエータ。 The actuator according to claim 2, wherein the piezoelectric drive electrodes are provided so as to be substantially bilaterally symmetrical with respect to the extending axis on the upper surface of the drive arm. 圧電駆動電極を駆動アームの上面における延伸軸方向に複数個設けるとともに、前記複数個設けられた圧電駆動電極の少なくとも一つを延伸軸に対して略左右対称となるように分割した請求項２に記載のアクチュエータ。 3. The piezoelectric drive electrode according to claim 2, wherein a plurality of piezoelectric drive electrodes are provided in the direction of the extension axis on the upper surface of the drive arm, and at least one of the plurality of piezoelectric drive electrodes is divided so as to be substantially bilaterally symmetrical with respect to the extension axis. The actuator described. 圧電体層の上下面に設けた電極の一方と、駆動アームに設けた静電用電極と、を電気的に接続した請求項１に記載のアクチュエータ。 The actuator according to claim 1, wherein one of the electrodes provided on the upper and lower surfaces of the piezoelectric layer is electrically connected to an electrostatic electrode provided on the drive arm. 圧電体層の上下面に設けた電極のうち駆動アーム側の電極と、駆動アームに設けた静電用電極とを、前記駆動アームに設けたスルーホールを通して電気的に接続した請求項５に記載のアクチュエータ。 The electrode on the drive arm side among the electrodes provided on the upper and lower surfaces of the piezoelectric layer and the electrostatic electrode provided on the drive arm are electrically connected through a through hole provided in the drive arm. Actuator. 少なくとも表面が絶縁化された基板と、この基板に少なくとも１カ所が支持された駆動アームと、前記基板および前記駆動アームにそれぞれ対向する位置に設けられた静電用電極と、この静電用電極に電圧を印加する第１の電圧印加手段と、前記駆動アームに設けられた圧電体層の上下面に電極を有する圧電駆動電極と、この圧電駆動電極に電圧を印加する第２の電圧印加手段とを備え、前記駆動アームを撓ませ始める初期駆動にあたって、前記圧電駆動電極に前記第２の電圧印加手段から電圧を印加することによって生じる圧電駆動力を主として用いるアクチュエータの制御方法。 A substrate having at least a surface insulated; a drive arm supported by at least one location on the substrate; an electrostatic electrode provided at a position facing the substrate and the drive arm; and the electrostatic electrode First voltage applying means for applying a voltage to the electrode, piezoelectric driving electrodes having electrodes on the upper and lower surfaces of the piezoelectric layer provided on the driving arm, and second voltage applying means for applying a voltage to the piezoelectric driving electrode. And an actuator control method that mainly uses a piezoelectric driving force generated by applying a voltage to the piezoelectric driving electrode from the second voltage applying means in the initial driving for starting to bend the driving arm. 一対の静電用電極間が近接した状態において、駆動アームをさらに撓ませ始める初期駆動にあたっては、前記静電用電極に第１の電圧印加手段から電圧を印加することによって生じる静電駆動力を主として用いる請求項７に記載のアクチュエータの制御方法。 In the initial drive in which the drive arm begins to bend further in a state where the pair of electrostatic electrodes are close to each other, an electrostatic driving force generated by applying a voltage to the electrostatic electrode from the first voltage applying unit is used. The method for controlling an actuator according to claim 7 mainly used. 駆動アームが撓んだ状態を維持するにあたって、静電用電極に第１の電圧印加手段から電圧を印加することによって生じる静電気力を主として用いる請求項８に記載のアクチュエータの制御方法。 9. The method of controlling an actuator according to claim 8, wherein an electrostatic force generated by applying a voltage from the first voltage applying means to the electrostatic electrode is mainly used to maintain the driving arm in a bent state. 駆動アームを撓んだ状態から伸びた状態に戻すにあたって、圧電駆動電極に対して、第２の電圧印加手段から前記圧電駆動電極が逆向きに撓むよう電圧を印加する請求項７に記載のアクチュエータの制御方法。 8. The actuator according to claim 7, wherein when the drive arm is returned from the bent state to the extended state, a voltage is applied to the piezoelectric drive electrode from the second voltage applying unit so that the piezoelectric drive electrode is bent in the reverse direction. Control method. 圧電体層の上下面に設けた電極の一方の電極と、駆動アームに設けた静電用電極と、を同電位にする請求項７に記載のアクチュエータの制御方法。 The actuator control method according to claim 7, wherein one electrode of the electrodes provided on the upper and lower surfaces of the piezoelectric layer and the electrostatic electrode provided on the drive arm are set to the same potential. 圧電体層の上下面に設けた電極の一方の電極に電圧が印加されているときには、他方の電極には電圧が印加されていないようにする請求項７に記載のアクチュエータの制御方法。 8. The method of controlling an actuator according to claim 7, wherein when a voltage is applied to one of the electrodes provided on the upper and lower surfaces of the piezoelectric layer, no voltage is applied to the other electrode. 少なくとも表面が絶縁化された基板と、この基板に少なくとも１カ所が支持された駆動アームと、前記基板および前記駆動アームにそれぞれ対向する位置に設けられた静電用電極と、この静電用電極に電圧を印加する第１の電圧印加手段と、前記駆動アームに設けられた圧電体層の上下面に電極を有する圧電駆動電極と、この圧電駆動電極に電圧を印加する第２の電圧印加手段とを備えたアクチュエータと、このアクチュエータに設けられた前記駆動アームに接続電極を設け、前記駆動アームを駆動させることにより前記接続電極を用いて異なる端子電極間の接続を制御するスイッチ。 A substrate having at least a surface insulated; a drive arm supported by at least one location on the substrate; an electrostatic electrode provided at a position facing the substrate and the drive arm; and the electrostatic electrode First voltage applying means for applying a voltage to the electrode, piezoelectric driving electrodes having electrodes on the upper and lower surfaces of the piezoelectric layer provided on the driving arm, and second voltage applying means for applying a voltage to the piezoelectric driving electrode. And a switch for controlling connection between different terminal electrodes using the connection electrode by driving the drive arm by providing a connection electrode on the drive arm provided on the actuator. 駆動電極を複数個設けた請求項１３に記載のスイッチ。 The switch according to claim 13, wherein a plurality of drive electrodes are provided. 圧電駆動電極を駆動アームの上面における延伸軸方向に複数個設けるとともに、前記複数個設けられた圧電駆動電極の少なくとも一つを延伸軸に対して略左右対称となるように分割した請求項１４に記載のスイッチ。 15. The piezoelectric drive electrode according to claim 14, wherein a plurality of piezoelectric drive electrodes are provided in the extending axis direction on the upper surface of the drive arm, and at least one of the plurality of piezoelectric drive electrodes is divided so as to be substantially bilaterally symmetrical with respect to the extending axis. The listed switch. 圧電駆動電極、静電用電極および接続電極を駆動アームにおける同一主面上に形成した請求項１３に記載のスイッチ。 The switch according to claim 13, wherein the piezoelectric drive electrode, the electrostatic electrode, and the connection electrode are formed on the same main surface of the drive arm.
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Cited By (16)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2006346787A (en) * 2005-06-14 2006-12-28 Sony Corp Movable element, and semiconductor device, module and electronic equipment with the same
JP2008177074A (en) * 2007-01-19 2008-07-31 Fujitsu Ltd Microswitching element
JP2008268925A (en) * 2007-03-26 2008-11-06 Semiconductor Energy Lab Co Ltd Switching element, method for manufacturing the same, and display device having the switching element
JP2009537337A (en) * 2006-05-17 2009-10-29 ミクロガン ゲーエムベーハー Micromechanical actuators containing group III nitride semiconductors
US7623007B2 (en) * 2005-10-19 2009-11-24 Panasonic Corporation Device including piezoelectric thin film and a support having a vertical cross-section with a curvature
US7633213B2 (en) * 2005-03-15 2009-12-15 Panasonic Corporation Actuator, switch using the actuator, and method of controlling the actuator
US7755460B2 (en) 2006-12-07 2010-07-13 Fujitsu Limited Micro-switching device
US7755459B2 (en) 2007-01-18 2010-07-13 Fujitsu Limited Micro-switching device and method of manufacturing the same
WO2011006028A3 (en) * 2009-07-10 2011-04-21 Viking At, Llc Small scale smart material actuator and energy harvesting apparatus
WO2011006164A3 (en) * 2009-07-10 2011-04-28 Viking At, Llc Mountable arm smart material actuator and energy harvesting apparatus
US8022794B2 (en) 2006-04-28 2011-09-20 Panasonic Corporation Micromachine switch, filter circuit, duplexer circuit, and communication device
US8850892B2 (en) 2010-02-17 2014-10-07 Viking At, Llc Smart material actuator with enclosed compensator
JP2015515763A (en) * 2012-12-27 2015-05-28 インテル コーポレイション Hybrid radio frequency components
CN104919520A (en) * 2013-02-15 2015-09-16 富士胶片戴麦提克斯公司 PMUT array employing integrated MEMS switches
US10276776B2 (en) 2013-12-24 2019-04-30 Viking At, Llc Mechanically amplified smart material actuator utilizing layered web assembly
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Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH02248087A (en) * 1989-03-22 1990-10-03 Matsushita Electric Ind Co Ltd Ceramic actuator
JPH08506690A (en) * 1993-02-18 1996-07-16 シーメンス アクチエンゲゼルシャフト Micromechanical relay with hybrid drive
WO2001013457A1 (en) * 1999-08-18 2001-02-22 Marconi Caswell Limited Electrical switches
WO2002061781A1 (en) * 2001-01-30 2002-08-08 Advantest Corporation Switch and integrated circuit device
JP2003208770A (en) * 2000-07-04 2003-07-25 Matsushita Electric Ind Co Ltd Head actuator and hard disk drive using the same
WO2005022575A1 (en) * 2003-08-30 2005-03-10 Qinetiq Limited Micro electromechanical system switch.

Patent Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH02248087A (en) * 1989-03-22 1990-10-03 Matsushita Electric Ind Co Ltd Ceramic actuator
JPH08506690A (en) * 1993-02-18 1996-07-16 シーメンス アクチエンゲゼルシャフト Micromechanical relay with hybrid drive
WO2001013457A1 (en) * 1999-08-18 2001-02-22 Marconi Caswell Limited Electrical switches
JP2003208770A (en) * 2000-07-04 2003-07-25 Matsushita Electric Ind Co Ltd Head actuator and hard disk drive using the same
WO2002061781A1 (en) * 2001-01-30 2002-08-08 Advantest Corporation Switch and integrated circuit device
WO2005022575A1 (en) * 2003-08-30 2005-03-10 Qinetiq Limited Micro electromechanical system switch.

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* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
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JP2006346787A (en) * 2005-06-14 2006-12-28 Sony Corp Movable element, and semiconductor device, module and electronic equipment with the same
US7623007B2 (en) * 2005-10-19 2009-11-24 Panasonic Corporation Device including piezoelectric thin film and a support having a vertical cross-section with a curvature
US8022794B2 (en) 2006-04-28 2011-09-20 Panasonic Corporation Micromachine switch, filter circuit, duplexer circuit, and communication device
JP2009537337A (en) * 2006-05-17 2009-10-29 ミクロガン ゲーエムベーハー Micromechanical actuators containing group III nitride semiconductors
US7755460B2 (en) 2006-12-07 2010-07-13 Fujitsu Limited Micro-switching device
US7755459B2 (en) 2007-01-18 2010-07-13 Fujitsu Limited Micro-switching device and method of manufacturing the same
JP2008177074A (en) * 2007-01-19 2008-07-31 Fujitsu Ltd Microswitching element
JP2008268925A (en) * 2007-03-26 2008-11-06 Semiconductor Energy Lab Co Ltd Switching element, method for manufacturing the same, and display device having the switching element
KR101529944B1 (en) * 2007-03-26 2015-06-18 가부시키가이샤 한도오따이 에네루기 켄큐쇼 Switching element, method for manufaturing the same, and display device including the switching element
US8966731B2 (en) 2007-03-26 2015-03-03 Semiconductor Energy Laboratory Co., Ltd. Method for manufacturing a switching element
US8669691B2 (en) 2009-07-10 2014-03-11 Viking At, Llc Small scale smart material actuator and energy harvesting apparatus
US8669689B2 (en) 2009-07-10 2014-03-11 Viking At, Llc Mountable arm smart material actuator and energy harvesting apparatus
WO2011006164A3 (en) * 2009-07-10 2011-04-28 Viking At, Llc Mountable arm smart material actuator and energy harvesting apparatus
WO2011006028A3 (en) * 2009-07-10 2011-04-21 Viking At, Llc Small scale smart material actuator and energy harvesting apparatus
US8850892B2 (en) 2010-02-17 2014-10-07 Viking At, Llc Smart material actuator with enclosed compensator
US8879775B2 (en) 2010-02-17 2014-11-04 Viking At, Llc Smart material actuator capable of operating in three dimensions
JP2015515763A (en) * 2012-12-27 2015-05-28 インテル コーポレイション Hybrid radio frequency components
US9251984B2 (en) 2012-12-27 2016-02-02 Intel Corporation Hybrid radio frequency component
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JP2016513408A (en) * 2013-02-15 2016-05-12 フジフィルム ディマティックス， インコーポレイテッド Piezoelectric array using integrated MEMS switch
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