JP2005345826A - 光学素子、光学装置、成膜方法、成膜装置及びデバイス製造方法 - Google Patents

光学素子、光学装置、成膜方法、成膜装置及びデバイス製造方法 Download PDF

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Publication number
JP2005345826A
JP2005345826A JP2004166290A JP2004166290A JP2005345826A JP 2005345826 A JP2005345826 A JP 2005345826A JP 2004166290 A JP2004166290 A JP 2004166290A JP 2004166290 A JP2004166290 A JP 2004166290A JP 2005345826 A JP2005345826 A JP 2005345826A
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JP
Japan
Prior art keywords
thin film
film
optical element
fluoride
optical
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2004166290A
Other languages
English (en)
Japanese (ja)
Other versions
JP2005345826A5 (enExample
Inventor
Yoichi Yazaki
陽一 矢崎
Keisui Banno
渓帥 坂野
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Canon Inc
Original Assignee
Canon Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Canon Inc filed Critical Canon Inc
Priority to JP2004166290A priority Critical patent/JP2005345826A/ja
Priority to US11/144,168 priority patent/US7295367B2/en
Publication of JP2005345826A publication Critical patent/JP2005345826A/ja
Publication of JP2005345826A5 publication Critical patent/JP2005345826A5/ja
Pending legal-status Critical Current

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Classifications

    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C17/00—Surface treatment of glass, not in the form of fibres or filaments, by coating
    • C03C17/34—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions
    • C03C17/3411—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions with at least two coatings of inorganic materials
    • C03C17/3429—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions with at least two coatings of inorganic materials at least one of the coatings being a non-oxide coating
    • C03C17/3435—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions with at least two coatings of inorganic materials at least one of the coatings being a non-oxide coating comprising a nitride, oxynitride, boronitride or carbonitride
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C17/00—Surface treatment of glass, not in the form of fibres or filaments, by coating
    • C03C17/34—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions
    • C03C17/3411—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions with at least two coatings of inorganic materials
    • C03C17/3429—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions with at least two coatings of inorganic materials at least one of the coatings being a non-oxide coating
    • C03C17/3447—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions with at least two coatings of inorganic materials at least one of the coatings being a non-oxide coating comprising a halide
    • C03C17/3452—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions with at least two coatings of inorganic materials at least one of the coatings being a non-oxide coating comprising a halide comprising a fluoride
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B1/00—Optical elements characterised by the material of which they are made; Optical coatings for optical elements
    • G02B1/10—Optical coatings produced by application to, or surface treatment of, optical elements
    • G02B1/12—Optical coatings produced by application to, or surface treatment of, optical elements by surface treatment, e.g. by irradiation

Landscapes

  • Chemical & Material Sciences (AREA)
  • Materials Engineering (AREA)
  • Engineering & Computer Science (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • General Chemical & Material Sciences (AREA)
  • Geochemistry & Mineralogy (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Organic Chemistry (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Surface Treatment Of Optical Elements (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
  • Physical Vapour Deposition (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
JP2004166290A 2004-06-03 2004-06-03 光学素子、光学装置、成膜方法、成膜装置及びデバイス製造方法 Pending JP2005345826A (ja)

Priority Applications (2)

Application Number Priority Date Filing Date Title
JP2004166290A JP2005345826A (ja) 2004-06-03 2004-06-03 光学素子、光学装置、成膜方法、成膜装置及びデバイス製造方法
US11/144,168 US7295367B2 (en) 2004-06-03 2005-06-03 Optical element, optical apparatus, film forming method, film forming apparatus and device fabrication method

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2004166290A JP2005345826A (ja) 2004-06-03 2004-06-03 光学素子、光学装置、成膜方法、成膜装置及びデバイス製造方法

Publications (2)

Publication Number Publication Date
JP2005345826A true JP2005345826A (ja) 2005-12-15
JP2005345826A5 JP2005345826A5 (enExample) 2007-07-19

Family

ID=35448600

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2004166290A Pending JP2005345826A (ja) 2004-06-03 2004-06-03 光学素子、光学装置、成膜方法、成膜装置及びデバイス製造方法

Country Status (2)

Country Link
US (1) US7295367B2 (enExample)
JP (1) JP2005345826A (enExample)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2013082954A (ja) * 2011-10-06 2013-05-09 National Central Univ 純金属ターゲットで反応性スパッタリング方法を用いて作製されたフッ化物及びフッ素をドープした酸化物薄膜

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102006003847B4 (de) * 2006-01-26 2011-08-18 Siemens AG, 80333 Verfahren und Vorrichtung zum Herstellen eines polykristallinen Keramikfilms auf einem Substrat
EP1965229A3 (en) * 2007-02-28 2008-12-10 Corning Incorporated Engineered fluoride-coated elements for laser systems

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH11223707A (ja) 1998-02-06 1999-08-17 Nikon Corp 光学部材及びその製造方法
JP2001279437A (ja) 2000-03-28 2001-10-10 Nikon Corp 成膜方法、成膜装置、光学部材及び露光装置
JP2002040207A (ja) * 2000-07-27 2002-02-06 Canon Inc 光学付加膜及び光学素子

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2013082954A (ja) * 2011-10-06 2013-05-09 National Central Univ 純金属ターゲットで反応性スパッタリング方法を用いて作製されたフッ化物及びフッ素をドープした酸化物薄膜

Also Published As

Publication number Publication date
US7295367B2 (en) 2007-11-13
US20050270636A1 (en) 2005-12-08

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