JP2005340677A - ワイヤボンダの押さえパーツおよび支持パーツ - Google Patents
ワイヤボンダの押さえパーツおよび支持パーツ Download PDFInfo
- Publication number
- JP2005340677A JP2005340677A JP2004160378A JP2004160378A JP2005340677A JP 2005340677 A JP2005340677 A JP 2005340677A JP 2004160378 A JP2004160378 A JP 2004160378A JP 2004160378 A JP2004160378 A JP 2004160378A JP 2005340677 A JP2005340677 A JP 2005340677A
- Authority
- JP
- Japan
- Prior art keywords
- wire
- support part
- pressing
- holding
- wire bonder
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Ceased
Links
Images
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L24/00—Arrangements for connecting or disconnecting semiconductor or solid-state bodies; Methods or apparatus related thereto
- H01L24/74—Apparatus for manufacturing arrangements for connecting or disconnecting semiconductor or solid-state bodies
- H01L24/78—Apparatus for connecting with wire connectors
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L2224/26—Layer connectors, e.g. plate connectors, solder or adhesive layers; Manufacturing methods related thereto
- H01L2224/31—Structure, shape, material or disposition of the layer connectors after the connecting process
- H01L2224/32—Structure, shape, material or disposition of the layer connectors after the connecting process of an individual layer connector
- H01L2224/321—Disposition
- H01L2224/32151—Disposition the layer connector connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive
- H01L2224/32221—Disposition the layer connector connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked
- H01L2224/32245—Disposition the layer connector connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked the item being metallic
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L2224/42—Wire connectors; Manufacturing methods related thereto
- H01L2224/47—Structure, shape, material or disposition of the wire connectors after the connecting process
- H01L2224/48—Structure, shape, material or disposition of the wire connectors after the connecting process of an individual wire connector
- H01L2224/4805—Shape
- H01L2224/4809—Loop shape
- H01L2224/48091—Arched
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L2224/42—Wire connectors; Manufacturing methods related thereto
- H01L2224/47—Structure, shape, material or disposition of the wire connectors after the connecting process
- H01L2224/48—Structure, shape, material or disposition of the wire connectors after the connecting process of an individual wire connector
- H01L2224/481—Disposition
- H01L2224/48151—Connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive
- H01L2224/48221—Connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked
- H01L2224/48245—Connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked the item being metallic
- H01L2224/48247—Connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked the item being metallic connecting the wire to a bond pad of the item
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L2224/42—Wire connectors; Manufacturing methods related thereto
- H01L2224/47—Structure, shape, material or disposition of the wire connectors after the connecting process
- H01L2224/48—Structure, shape, material or disposition of the wire connectors after the connecting process of an individual wire connector
- H01L2224/484—Connecting portions
- H01L2224/4847—Connecting portions the connecting portion on the bonding area of the semiconductor or solid-state body being a wedge bond
- H01L2224/48471—Connecting portions the connecting portion on the bonding area of the semiconductor or solid-state body being a wedge bond the other connecting portion not on the bonding area being a ball bond, i.e. wedge-to-ball, reverse stitch
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/73—Means for bonding being of different types provided for in two or more of groups H01L2224/10, H01L2224/18, H01L2224/26, H01L2224/34, H01L2224/42, H01L2224/50, H01L2224/63, H01L2224/71
- H01L2224/732—Location after the connecting process
- H01L2224/73251—Location after the connecting process on different surfaces
- H01L2224/73265—Layer and wire connectors
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/74—Apparatus for manufacturing arrangements for connecting or disconnecting semiconductor or solid-state bodies and for methods related thereto
- H01L2224/78—Apparatus for connecting with wire connectors
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/74—Apparatus for manufacturing arrangements for connecting or disconnecting semiconductor or solid-state bodies and for methods related thereto
- H01L2224/78—Apparatus for connecting with wire connectors
- H01L2224/7825—Means for applying energy, e.g. heating means
- H01L2224/783—Means for applying energy, e.g. heating means by means of pressure
- H01L2224/78301—Capillary
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/74—Apparatus for manufacturing arrangements for connecting or disconnecting semiconductor or solid-state bodies and for methods related thereto
- H01L2224/78—Apparatus for connecting with wire connectors
- H01L2224/787—Means for aligning
- H01L2224/78703—Mechanical holding means
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/80—Methods for connecting semiconductor or other solid state bodies using means for bonding being attached to, or being formed on, the surface to be connected
- H01L2224/85—Methods for connecting semiconductor or other solid state bodies using means for bonding being attached to, or being formed on, the surface to be connected using a wire connector
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/91—Methods for connecting semiconductor or solid state bodies including different methods provided for in two or more of groups H01L2224/80 - H01L2224/90
- H01L2224/92—Specific sequence of method steps
- H01L2224/922—Connecting different surfaces of the semiconductor or solid-state body with connectors of different types
- H01L2224/9222—Sequential connecting processes
- H01L2224/92242—Sequential connecting processes the first connecting process involving a layer connector
- H01L2224/92247—Sequential connecting processes the first connecting process involving a layer connector the second connecting process involving a wire connector
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/0001—Technical content checked by a classifier
- H01L2924/00014—Technical content checked by a classifier the subject-matter covered by the group, the symbol of which is combined with the symbol of this group, being disclosed without further technical details
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/01—Chemical elements
- H01L2924/01006—Carbon [C]
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/01—Chemical elements
- H01L2924/01033—Arsenic [As]
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/01—Chemical elements
- H01L2924/01082—Lead [Pb]
Landscapes
- Engineering & Computer Science (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Wire Bonding (AREA)
Abstract
【解決手段】押さえパーツ41の半導体装置の周辺を押さえる押圧部46に隣接する外側に中空となった中空部47を設けることで、ワイヤが長い場合や外周方向に移動する動作の設定角度が水平に近い場合でも、キャピラリの押さえパーツ41への衝突の発生を防止する。
【選択図】 図1
Description
12 半導体装置
13、41、54、61、111 押さえパーツ
22、80 支持パーツ
31 半導体チップ
32 端子
42、43、62、63、101、112、113 取り付け部
46、55、66 押圧部
47、56 中空部
50 連結部
51 ワイヤ
52 キャピラリ
53 バンプ
60 押さえパーツ本体部
67 可動部品
68、98 ねじ(締結手段)
81 上位部品
84 支持部
85 支持パーツ本体部
86 中間部品
117 穴
119 切欠部
Claims (4)
- ワイヤボンダに取り付けられる取り付け部と、半導体装置の周辺の1辺以上を押さえる押圧部と、前記押圧部に隣接する外側に設けられ、中空となった中空部とを備えたワイヤボンダの押さえパーツ。
- ワイヤボンダに取り付けられる取り付け部を有する本体部と、半導体装置の周辺の1辺以上を押さえる押圧部を有して前記本体部に対して位置変化可能な一つ以上の可動部品と、前記本体部に対して前記可動部品を締結する締結手段とを備えたワイヤボンダの押さえパーツ。
- ワイヤボンダに取り付けられる取り付け部を有する本体部と、半導体装置を支持する支持部を有して前記本体部に対して位置変化可能な一つ以上の可動部品と、前記本体部に対して前記可動部品を締結する締結手段とを備えたワイヤボンダの支持パーツ。
- ワイヤボンダに取り付けられる本体部に対して位置変化可能な可動部品が締結手段により固定されるワイヤボンダの支持パーツと、ワイヤボンダに取り付けた状態で前記支持パーツの位置調整ができるよう前記支持パーツの締結部の上方に対応する部分を中空とした押さえパーツとからなるパーツ位置調整機構。
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2004160378A JP2005340677A (ja) | 2004-05-31 | 2004-05-31 | ワイヤボンダの押さえパーツおよび支持パーツ |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2004160378A JP2005340677A (ja) | 2004-05-31 | 2004-05-31 | ワイヤボンダの押さえパーツおよび支持パーツ |
Publications (1)
Publication Number | Publication Date |
---|---|
JP2005340677A true JP2005340677A (ja) | 2005-12-08 |
Family
ID=35493863
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2004160378A Ceased JP2005340677A (ja) | 2004-05-31 | 2004-05-31 | ワイヤボンダの押さえパーツおよび支持パーツ |
Country Status (1)
Country | Link |
---|---|
JP (1) | JP2005340677A (ja) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR101562746B1 (ko) | 2014-09-03 | 2015-10-22 | 에스티에스반도체통신 주식회사 | 와이어 본더의 윈도우 클램프 및 이를 이용한 와이어 본딩 방법 |
Citations (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS62155526A (ja) * | 1985-12-27 | 1987-07-10 | Toshiba Corp | ワイヤボンデイング装置 |
JPS63188945U (ja) * | 1987-05-26 | 1988-12-05 | ||
JPH03152944A (ja) * | 1989-11-10 | 1991-06-28 | Oki Electric Ind Co Ltd | 電界効果型トランジスタのワイヤボンディング方法 |
JPH04294552A (ja) * | 1991-03-25 | 1992-10-19 | Matsushita Electron Corp | ワイヤーボンディング方法 |
JPH04352438A (ja) * | 1991-05-30 | 1992-12-07 | Mitsubishi Electric Corp | 半導体フレームの押圧方法及び押圧装置 |
JPH0520326U (ja) * | 1991-05-14 | 1993-03-12 | 金星エレクトロン株式会社 | リードフレームのインナーリードクランプ装置 |
JPH08124963A (ja) * | 1994-10-20 | 1996-05-17 | Hitachi Ltd | ボンディング装置 |
JPH08236572A (ja) * | 1995-02-22 | 1996-09-13 | Rohm Co Ltd | ワイヤボンダ |
-
2004
- 2004-05-31 JP JP2004160378A patent/JP2005340677A/ja not_active Ceased
Patent Citations (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS62155526A (ja) * | 1985-12-27 | 1987-07-10 | Toshiba Corp | ワイヤボンデイング装置 |
JPS63188945U (ja) * | 1987-05-26 | 1988-12-05 | ||
JPH03152944A (ja) * | 1989-11-10 | 1991-06-28 | Oki Electric Ind Co Ltd | 電界効果型トランジスタのワイヤボンディング方法 |
JPH04294552A (ja) * | 1991-03-25 | 1992-10-19 | Matsushita Electron Corp | ワイヤーボンディング方法 |
JPH0520326U (ja) * | 1991-05-14 | 1993-03-12 | 金星エレクトロン株式会社 | リードフレームのインナーリードクランプ装置 |
JPH04352438A (ja) * | 1991-05-30 | 1992-12-07 | Mitsubishi Electric Corp | 半導体フレームの押圧方法及び押圧装置 |
JPH08124963A (ja) * | 1994-10-20 | 1996-05-17 | Hitachi Ltd | ボンディング装置 |
JPH08236572A (ja) * | 1995-02-22 | 1996-09-13 | Rohm Co Ltd | ワイヤボンダ |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR101562746B1 (ko) | 2014-09-03 | 2015-10-22 | 에스티에스반도체통신 주식회사 | 와이어 본더의 윈도우 클램프 및 이를 이용한 와이어 본딩 방법 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
JP2006013501A (ja) | 成形リード構造体および方法 | |
KR100762208B1 (ko) | 반도체 장치 및 반도체 장치의 제조 방법과 반도체 장치의 실장 방법 | |
CN1424757A (zh) | 半导体器件及其制造方法 | |
KR20010062373A (ko) | 반도체장치 및 그 제조방법 | |
JP4615282B2 (ja) | 半導体パッケージの製造方法 | |
JP2581748B2 (ja) | リードワイヤボンディング装置及び方法 | |
JP2005340677A (ja) | ワイヤボンダの押さえパーツおよび支持パーツ | |
US20070094867A1 (en) | Bond Surface Conditioning System for Improved Bondability | |
JP4374040B2 (ja) | 半導体製造装置 | |
JP2008091418A (ja) | 半導体装置及びその製造方法 | |
JP3314663B2 (ja) | チップのボンディング装置 | |
US10195685B2 (en) | Capillary alignment jig for wire bonder | |
TWI718421B (zh) | 引線框架的製造方法和引線框架 | |
JPH08148623A (ja) | 半導体装置 | |
JP3211800B2 (ja) | 電子部品パッケージ組立体 | |
US20220336331A1 (en) | Electronic device with exposed tie bar | |
JP4316122B2 (ja) | Icチップ規正装置 | |
US6877649B2 (en) | Clamp post holder | |
KR100329398B1 (ko) | 리드프레임 도금 장치용 핀-구멍 정렬 장치 | |
KR101141704B1 (ko) | 리드 프레임의 제조방법 및 이에 적용되는 리드 프레임용프레스 가공장치 | |
JP3280815B2 (ja) | ワイヤボンディング方法 | |
JPH09283543A (ja) | ダイボンド装置 | |
KR0117800Y1 (ko) | 반도체 제조장비의 스팽킹(spanking)장치 | |
KR20050011421A (ko) | 비지에이 반도체 패키지의 솔더볼 부착장치 | |
JP2005159231A (ja) | フリップチップボンディング装置 |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
A621 | Written request for application examination |
Free format text: JAPANESE INTERMEDIATE CODE: A621 Effective date: 20061214 |
|
RD04 | Notification of resignation of power of attorney |
Free format text: JAPANESE INTERMEDIATE CODE: A7424 Effective date: 20080430 |
|
A977 | Report on retrieval |
Free format text: JAPANESE INTERMEDIATE CODE: A971007 Effective date: 20081209 |
|
A131 | Notification of reasons for refusal |
Free format text: JAPANESE INTERMEDIATE CODE: A131 Effective date: 20090811 |
|
A521 | Written amendment |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20091013 |
|
A131 | Notification of reasons for refusal |
Free format text: JAPANESE INTERMEDIATE CODE: A131 Effective date: 20091222 |
|
A521 | Written amendment |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20100222 |
|
A01 | Written decision to grant a patent or to grant a registration (utility model) |
Free format text: JAPANESE INTERMEDIATE CODE: A01 Effective date: 20100601 |
|
A045 | Written measure of dismissal of application |
Free format text: JAPANESE INTERMEDIATE CODE: A045 Effective date: 20101026 |