JP2005337959A5 - - Google Patents
Download PDFInfo
- Publication number
- JP2005337959A5 JP2005337959A5 JP2004159089A JP2004159089A JP2005337959A5 JP 2005337959 A5 JP2005337959 A5 JP 2005337959A5 JP 2004159089 A JP2004159089 A JP 2004159089A JP 2004159089 A JP2004159089 A JP 2004159089A JP 2005337959 A5 JP2005337959 A5 JP 2005337959A5
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Priority Applications (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2004159089A JP4256300B2 (ja) | 2004-05-28 | 2004-05-28 | 基板検査方法および基板検査装置 |
| US11/137,473 US7645988B2 (en) | 2004-05-28 | 2005-05-26 | Substrate inspection method, method of manufacturing semiconductor device, and substrate inspection apparatus |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2004159089A JP4256300B2 (ja) | 2004-05-28 | 2004-05-28 | 基板検査方法および基板検査装置 |
Related Child Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2008277011A Division JP4792074B2 (ja) | 2008-10-28 | 2008-10-28 | 基板検査方法および基板検査装置 |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2005337959A JP2005337959A (ja) | 2005-12-08 |
| JP2005337959A5 true JP2005337959A5 (ja) | 2006-11-24 |
| JP4256300B2 JP4256300B2 (ja) | 2009-04-22 |
Family
ID=35424161
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2004159089A Expired - Fee Related JP4256300B2 (ja) | 2004-05-28 | 2004-05-28 | 基板検査方法および基板検査装置 |
Country Status (2)
| Country | Link |
|---|---|
| US (1) | US7645988B2 (ja) |
| JP (1) | JP4256300B2 (ja) |
Families Citing this family (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP4578875B2 (ja) * | 2004-07-16 | 2010-11-10 | 株式会社荏原製作所 | 写像型電子顕微鏡 |
| JP4498185B2 (ja) * | 2005-03-23 | 2010-07-07 | 株式会社東芝 | 基板検査方法、半導体装置の製造方法および基板検査装置 |
| KR101487359B1 (ko) * | 2006-01-25 | 2015-01-29 | 가부시키가이샤 에바라 세이사꾸쇼 | 시료 표면 검사방법 및 검사장치 |
| EP2333808A1 (en) * | 2009-12-11 | 2011-06-15 | ICT Integrated Circuit Testing Gesellschaft für Halbleiterprüftechnik mbH | Charged particle beam device, method of operating a charged particle beam device |
| JP6677657B2 (ja) * | 2015-02-05 | 2020-04-08 | 株式会社荏原製作所 | 検査装置 |
| JP7017437B2 (ja) * | 2018-03-06 | 2022-02-08 | Ｔａｓｍｉｔ株式会社 | 反射電子のエネルギースペクトルを測定する装置および方法 |
Family Cites Families (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2810797B2 (ja) | 1991-01-11 | 1998-10-15 | 日本電子株式会社 | 反射電子顕微鏡 |
| JP3409909B2 (ja) | 1994-03-11 | 2003-05-26 | 株式会社東芝 | ウェーハパターンの欠陥検出方法及び同装置 |
| JPH11132975A (ja) | 1997-10-31 | 1999-05-21 | Toshiba Corp | 電子ビームを用いた検査方法及びその装置 |
| JPH11345585A (ja) | 1998-06-03 | 1999-12-14 | Nikon Corp | 電子ビームによる検査装置および検査方法 |
| EP1271605A4 (en) * | 2000-11-02 | 2009-09-02 | Ebara Corp | ELECTRON BEAM APPARATUS AND METHOD FOR MANUFACTURING SEMICONDUCTOR DEVICE COMPRISING SAID APPARATUS |
-
2004
- 2004-05-28 JP JP2004159089A patent/JP4256300B2/ja not_active Expired - Fee Related
-
2005
- 2005-05-26 US US11/137,473 patent/US7645988B2/en active Active