JP2005335385A - Cutting tool for glass or wafer - Google Patents

Cutting tool for glass or wafer Download PDF

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Publication number
JP2005335385A
JP2005335385A JP2005149876A JP2005149876A JP2005335385A JP 2005335385 A JP2005335385 A JP 2005335385A JP 2005149876 A JP2005149876 A JP 2005149876A JP 2005149876 A JP2005149876 A JP 2005149876A JP 2005335385 A JP2005335385 A JP 2005335385A
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glass
cutting
cutting tool
wafer
tool according
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Japanese (ja)
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Shoyo Chin
昇陽 陳
耀文 ▲よ▼
Yobun Yo
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KAHO SHIZEN KOGYO KOFUN YUGENK
KAHO SHIZEN KOGYO KOFUN YUGENKOSHI
SHIZEN GIJUTSU KENKYUSHO
YO KIBUN
Original Assignee
KAHO SHIZEN KOGYO KOFUN YUGENK
KAHO SHIZEN KOGYO KOFUN YUGENKOSHI
SHIZEN GIJUTSU KENKYUSHO
YO KIBUN
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Publication of JP2005335385A publication Critical patent/JP2005335385A/en
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    • CCHEMISTRY; METALLURGY
    • C03GLASS; MINERAL OR SLAG WOOL
    • C03BMANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
    • C03B33/00Severing cooled glass
    • C03B33/10Glass-cutting tools, e.g. scoring tools
    • C03B33/105Details of cutting or scoring means, e.g. tips
    • C03B33/107Wheel design, e.g. materials, construction, shape

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  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Organic Chemistry (AREA)
  • Processing Of Stones Or Stones Resemblance Materials (AREA)
  • Re-Forming, After-Treatment, Cutting And Transporting Of Glass Products (AREA)
  • Dicing (AREA)
  • Polishing Bodies And Polishing Tools (AREA)

Abstract

<P>PROBLEM TO BE SOLVED: To provide a cutting tool having a long service life and good cutting quality to be applied to cutting of glass or a wafer. <P>SOLUTION: The cutting tool of the invention is a disk-type tool having thickness, which comprises two circular annular faces, the outer circumferential edges of which are connected outward to concave cutting faces which mutually intersect to form an annular cutting edge. The annular cutting edge performs cutting of glass, a wafer, etc., thereby affording the cutting tool relatively long service life and good cutting quality. <P>COPYRIGHT: (C)2006,JPO&NCIPI

Description

本発明は一種の工具構造に係り、更に詳しくは、ガラス、ウエハの切削に応用され、その内凹曲率により切削品質と使用寿命を増すことができる切削工具に関する。   The present invention relates to a kind of tool structure, and more particularly to a cutting tool that can be applied to glass and wafer cutting and can increase cutting quality and service life due to its internal concave curvature.

一般に二酸化シリコンで形成されたガラス又はウエハは、その切削操作が特性の工具で行なわれ、ウエハの生産過程は高価であるため、切削時には切削により発生する損耗を防止して生産コストの増加を防止する必要があり、且つ切削により形成されるウエハ或いはガラス表面のクラック面積は制御が必要な重要な因子であり、なぜなら、過大なクラック面積は周囲のウエハ或いはガラスを利用不能とし、切削による損耗を形成し、且つ切削時に発生する縦方向クラックは、切削工具と非常に関係があるためである。   In general, glass or wafers made of silicon dioxide are cut with special tools, and the wafer production process is expensive. This prevents wear caused by cutting during cutting and prevents an increase in production costs. The crack area of the wafer or glass surface formed by cutting is an important factor that needs to be controlled, because an excessive crack area makes the surrounding wafer or glass unusable and reduces the wear caused by cutting. This is because the longitudinal cracks that are formed and generated during cutting are very related to the cutting tool.

周知のガラス又はウエハ用切削工具は、ガラスに切削線を形成するのに用いられ、その後、切削線に沿ってガラスが切断される。このような切削工具に関係する技術には例えば特許文献1に記載のものがある。図6、7は周知の技術のこのような切削工具90を示し、この切削工具90はディスク状を呈し、軸孔91と前後の二つの円形環面92、93を包含し、前、後環面92、93の外周エッジがそれぞれθ角度の径方向外向き面取りされて前、後環面92、93が合わさって2θ角度をなす切削環端94と該切削環端94の前後の二つの切面95、96が形成され、この切削環端94に固定ピッチで且つ相互に交替する凹、凸部97、98が設けられ、ガラスに対する切削に便利とされている。   Known glass or wafer cutting tools are used to form cutting lines in the glass, after which the glass is cut along the cutting lines. There exists a thing of patent document 1 in the technique relevant to such a cutting tool, for example. FIGS. 6 and 7 show such a cutting tool 90 of known technology, this cutting tool 90 being in the form of a disk, comprising a shaft hole 91 and two front and rear circular ring surfaces 92, 93, with front and rear rings. The outer peripheral edges of the surfaces 92 and 93 are chamfered radially outward by θ angles, and the front and rear ring surfaces 92 and 93 are combined to form a cutting ring end 94 that forms a 2θ angle, and two cut surfaces before and after the cutting ring end 94 95 and 96 are formed, and the cutting ring end 94 is provided with concave and convex portions 97 and 98 which are interchanged with each other at a fixed pitch, which is convenient for cutting glass.

前述の切削工具90の切削環端94は比較的大きな2θ角度及び共同で2θ角度をなす二つの径方向平面切面を有し、この比較的大きな角度により切削工具90の使用寿命が延長されるが、却って切削時にガラスの水平亀裂の問題を発生し、なぜなら材料がこの平面切面に押圧される問題が大きくなるためであり、このため切削品質不良の欠点を形成し、この欠点がウエハの切削に出現するならば、その形成する損失は更に厳重となる。このため周知のガラス又はウエハ用切削工具は最も良好な設計と良好な切削方式の解決手段ではなく、更なる研究、開発の必要がある。前述のガラス又はウエハ用切削工具におけるその切面角度が形成する使用寿命と切削品質が衝突する欠点及びその構造設計が未だ理想的なものでない事実を鑑み、比較的長い使用寿命を有すると共に切削品質が良好である切削工具が必要とされている。   The cutting ring end 94 of the above-described cutting tool 90 has a relatively large 2θ angle and two radial planar cut surfaces that jointly form a 2θ angle, and this relatively large angle extends the service life of the cutting tool 90. On the contrary, the problem of horizontal cracking of the glass occurs at the time of cutting, because the problem that the material is pressed against this plane cut surface becomes large, which forms a defect of poor cutting quality, and this defect is used for cutting of the wafer. If it appears, the loss it forms becomes even more severe. For this reason, the known glass or wafer cutting tools are not the best design and solution for the cutting method, but need further research and development. In view of the disadvantage that the cutting life angle formed by the cutting angle for the glass or wafer described above collides with the cutting quality and the fact that the structural design is not yet ideal, it has a relatively long working life and cutting quality. There is a need for cutting tools that are good.

台湾特許公告第308581号明細書Taiwan Patent Publication No. 308581 Specification

本発明の目的は、一種のガラス又はウエハ用切削工具を提供することにあり、それは切削工具が内凹曲率を具備し、これにより切削工具が比較的長い使用寿命を有し、ならびに切削時に材料に発生する押圧の現象を緩和し、これにより良好な切削品質を獲得できるものとする。   It is an object of the present invention to provide a kind of glass or wafer cutting tool, which has a relatively long service life, as well as a material when cutting. It is assumed that the phenomenon of pressing occurring in the case is relieved, and thereby good cutting quality can be obtained.

本発明の別の目的は、一種のガラス又はウエハ用切削工具を提供することにあり、それは切削工具が内凹曲率を具備し、これにより切削時の横方向圧力を低減して水平クラック程度を減少し、その使用寿命と切削品質のいずれもが考慮されたものとする。   Another object of the present invention is to provide a kind of cutting tool for glass or wafer, in which the cutting tool has an internal concave curvature, thereby reducing the lateral pressure during cutting and reducing the level of horizontal cracks. It is assumed that both the service life and cutting quality are taken into account.

上述の目的を達成するために採用する技術手段として、本発明は切削工具を具え、該切削工具は厚さを有するディスク形工具であり、それは前後の二つの円形環面を包含し、該環面の外周エッジが外向きに内凹切面に接続され、該内凹曲率が曲率半径Rを具え、該曲率半径Rは2〜200mmの間とされ、この環面外周エッジに接続された内凹切面が相互に交叉し切削環端を形成し、該切削環端がガラス、ウエハ等に対する切削に供される。   As technical means employed to achieve the above-mentioned object, the present invention comprises a cutting tool, which is a disc-shaped tool having a thickness, which includes two circular annulus front and rear, The outer peripheral edge of the surface is connected outwardly to the inner concave cut surface, the inner concave curvature has a curvature radius R, and the curvature radius R is between 2 and 200 mm. The cut surfaces cross each other to form a cutting ring end, and the cutting ring end is used for cutting glass, a wafer, and the like.

請求項1の発明は、ガラス又はウエハ用切削工具において、切削工具を包含し、該切削工具は厚さを有するディスク形工具であり、前後の二つの円形環面を包含し、この環面の外周エッジが外向きに内凹切面に接続され、この内凹切面が相互に交叉し切削環端を形成し、該切削環端がガラス、ウエハ等に対する切削に供されることを特徴とする、ガラス又はウエハ用切削工具としている。
請求項2の発明は、請求項1記載のガラス又はウエハ用切削工具において、切削工具が工具軸の挿通に供される軸孔を具えたことを特徴とする、ガラス又はウエハ用切削工具としている。
請求項3の発明は、請求項1記載のガラス又はウエハ用切削工具において、内凹切面が曲率半径Rを具えたことを特徴とする、ガラス又はウエハ用切削工具としている。
請求項4の発明は、請求項3記載のガラス又はウエハ用切削工具において、曲率半径Rが2〜200mmの間であることを特徴とする、ガラス又はウエハ用切削工具としている。
請求項5の発明は、請求項1記載のガラス又はウエハ用切削工具において、切削環端に規則性或いは不規則性の端面が設けられたことを特徴とする、ガラス又はウエハ用切削工具としている。
請求項6の発明は、請求項5記載のガラス又はウエハ用切削工具において、前記端面が複数の凹部と凸部を包含することを特徴とする、ガラス又はウエハ用切削工具としている。
請求項7の発明は、請求項6記載のガラス又はウエハ用切削工具において、前記端面が凹部と凸部が連続して交錯するよう組み合わされてなることを特徴とする、ガラス又はウエハ用切削工具としている。
請求項8の発明は、請求項6記載のガラス又はウエハ用切削工具において、前記端面が二つの凹部と一つの凸部が連続して交錯するよう組み合わされてなることを特徴とする、ガラス又はウエハ用切削工具としている。
請求項9の発明は、請求項6記載のガラス又はウエハ用切削工具において、前記凸部が平面凸部、三角形面凸部より選択されることを特徴とする、ガラス又はウエハ用切削工具としている。
請求項10の発明は、請求項6記載のガラス又はウエハ用切削工具において、前記凹部がU行凹部、V型凹部より選択されることを特徴とする、ガラス又はウエハ用切削工具としている。
請求項11の発明は、請求項2記載のガラス又はウエハ用切削工具において、切削工具が工具軸と一体成形されことを特徴とする、ガラス又はウエハ用切削工具としている。
The invention of claim 1 includes a cutting tool for a glass or wafer, the cutting tool being a disc-shaped tool having a thickness, including two front and rear circular annular surfaces, The outer peripheral edge is connected outwardly to the inner concave cut surface, the inner concave cut surfaces cross each other to form a cutting ring end, and the cutting ring end is subjected to cutting on glass, wafer, etc., It is a cutting tool for glass or wafer.
The invention according to claim 2 is the glass or wafer cutting tool according to claim 1, wherein the cutting tool has a shaft hole for insertion of the tool shaft. .
According to a third aspect of the present invention, there is provided the glass or wafer cutting tool according to the first aspect, wherein the inner concave cut surface has a radius of curvature R.
A fourth aspect of the present invention is the glass or wafer cutting tool according to the third aspect, wherein the radius of curvature R is between 2 and 200 mm.
The invention according to claim 5 is the glass or wafer cutting tool according to claim 1, wherein the cutting ring end is provided with a regular or irregular end face. .
A sixth aspect of the present invention is the glass or wafer cutting tool according to the fifth aspect, wherein the end face includes a plurality of concave portions and convex portions.
The glass or wafer cutting tool according to claim 6, wherein the end surfaces are combined so that the concave portion and the convex portion continuously intersect with each other. It is said.
The invention according to claim 8 is the glass or wafer cutting tool according to claim 6, wherein the end face is combined so that two concave portions and one convex portion are continuously crossed. It is a wafer cutting tool.
The invention according to claim 9 is the glass or wafer cutting tool according to claim 6, wherein the convex portion is selected from a plane convex portion and a triangular surface convex portion. .
A tenth aspect of the present invention is the glass or wafer cutting tool according to the sixth aspect, wherein the concave portion is selected from a U-row concave portion and a V-shaped concave portion.
The invention of claim 11 is the glass or wafer cutting tool according to claim 2, wherein the cutting tool is formed integrally with the tool shaft.

本発明は周知の技術のガラス又はウエハ用切削工具が切削時に形成する縦方向及び横方向の破壊面を形成する問題を解決する。切削工具の角度が大きくなるとその使用寿命は延長するが切削時の材料押圧の問題が大きくなり水平クラックが形成され、生産コストをアップさせる。ゆえに本発明は内凹曲率を具えた切削工具を提供し、切削材料押圧の問題を軽減し、横方向の圧力を同じ角度の周知の切削工具に較べて小さくし、水平クラックの程度を減らし、これにより良好な切削品質を獲得する。   The present invention solves the problem of forming longitudinal and transverse fracture surfaces formed by known glass or wafer cutting tools during cutting. When the angle of the cutting tool is increased, its service life is extended, but the problem of material pressing during cutting is increased and a horizontal crack is formed, which increases the production cost. Therefore, the present invention provides a cutting tool with an indented curvature, reduces the problem of cutting material pressing, reduces the lateral pressure compared to known cutting tools of the same angle, reduces the degree of horizontal cracks, This achieves good cutting quality.

図1、図2を参照されたい。本発明のガラス又はウエハ用切削工具は、切削工具10を具え、該切削工具10は厚さTを具えたディスク工具であり、それは軸孔12及び前、後円形環面14、16を包含する。該軸孔12は工具軸(図示せず)の挿通に供され、且つ工具軸はまた切削工具10と一体成形可能である。該前、後環面14、16の外周エッジ141、161は外向きに内凹切面18、20に接続され、該内凹切面18、20は内凹曲率半径Rを具え、該内凹曲率半径Rは2〜200mmの間とされ、さらに、該内凹切面18、20は相互に交叉して切削環端22を形成し、この切削環端22がガラス、ウエハに対して切削を行なう。   Please refer to FIG. 1 and FIG. The glass or wafer cutting tool of the present invention comprises a cutting tool 10, which is a disc tool having a thickness T, which includes a shaft hole 12 and front and rear circular annular surfaces 14,16. . The shaft hole 12 is used for insertion of a tool shaft (not shown), and the tool shaft can also be integrally formed with the cutting tool 10. The outer peripheral edges 141 and 161 of the front and rear ring surfaces 14 and 16 are connected outwardly to the inner concave cut surfaces 18 and 20, and the inner concave cut surfaces 18 and 20 have an inner concave curvature radius R, and the inner concave curvature radius R is between 2 and 200 mm, and the inner concave cut surfaces 18 and 20 cross each other to form a cutting ring end 22, which cuts the glass and wafer.

図3に示されるように、本発明が切削環端22により切削する時、該内凹切面18、20は内凹状の円弧斜面を具えるため、切削時に材料が内凹切面18、20に押圧される現象が軽減され、その横方向の圧力は周知の技術のθ角度を具えた平面型切面より小さく、大幅に切削時の材料押圧による水平クラックの拡張程度を減らすことができ、これにより良好で、精密な切削品質を獲得できる。これにより、本発明は周知の同じ角度のガラス又はウエハ用切削工具に近い寿命を有するが、小角度の切削工具の長所を有し、切削工具の使用寿命を延長すると共に切削品質を向上することができる。   As shown in FIG. 3, when the present invention cuts by the cutting ring end 22, the inner concave cut surfaces 18, 20 have an inner concave arcuate slope, so that the material presses against the inner concave cut surfaces 18, 20 during cutting. Phenomenon is reduced, and its lateral pressure is smaller than that of the plane type cut surface with the known θ angle, which can greatly reduce the extent of expansion of horizontal cracks due to material pressing during cutting. With it, you can get precise cutting quality. As a result, the present invention has a life similar to known glass or wafer cutting tools of the same angle, but has the advantages of a small angle cutting tool, extending the service life of the cutting tool and improving the cutting quality. Can do.

図3を参照されたい。その切削環端22には更に規則的或いは不規則な端面221が設けられ、該端面221は複数の凹部222と凸部223を包含する。図4に示されるように、該端面221は凹部222と凸部223が連続交錯するよう組み合わされたものとされるか、或いは図5に示されるように、二つの凹部222と一つの凸部223の連続交錯組合せとされ、そのうち該凹部222と凸部223は不特定形状に設置可能で(例えば平面凸部、三角形面凸部、U行凹部、V形凹部等)、切削環端22の切削力を増す。   Please refer to FIG. The cutting ring end 22 is further provided with a regular or irregular end surface 221, and the end surface 221 includes a plurality of concave portions 222 and convex portions 223. As shown in FIG. 4, the end surface 221 is combined so that the concave portion 222 and the convex portion 223 are continuously crossed or, as shown in FIG. 5, two concave portions 222 and one convex portion. 223, the concave portion 222 and the convex portion 223 can be installed in an unspecified shape (for example, a plane convex portion, a triangular surface convex portion, a U-row concave portion, a V-shaped concave portion, etc.) Increase cutting force.

ゆえに、本発明のガラス又はウエハ用切削工具は上述の構造設計により、該内凹切面が切削時の材料の押圧現象を軽減し、その横方向の圧力を周知の技術のθ角度を具えた平面型切面より小さくし、大幅に切削時の材料押圧による水平クラックの拡張程度を減らすことができ、これにより良好で、精密な切削品質を獲得でき、且つ、周知の同じ角度のガラス又はウエハ用切削工具に近い寿命を有すると共に、切削品質を向上することができる。   Therefore, the cutting tool for glass or wafer according to the present invention is a plane having the above-described structural design that reduces the pressure phenomenon of the material during cutting, and the lateral pressure has a θ angle of a well-known technique. It can be made smaller than the die cut surface, greatly reducing the extent of horizontal crack expansion due to material pressing during cutting, thereby obtaining good and precise cutting quality, and well-known glass or wafer cutting at the same angle It has a life close to that of a tool and can improve cutting quality.

以上の実施例は本発明の実施範囲を限定するものではなく、本発明に基づきなしうる細部の修飾或いは改変は、いずれも本発明の請求範囲に属するものとする。   The above embodiments do not limit the scope of the present invention, and any modification or alteration of details that can be made based on the present invention shall fall within the scope of the claims of the present invention.

本発明の正面図である。It is a front view of the present invention. 本発明の平面図である。It is a top view of the present invention. 本発明の切削環端構造表示図である。It is a cutting ring end structure display figure of this invention. 本発明の切削環端組合せ構造表示図である。It is a cutting ring end combination structure display figure of this invention. 本発明の別の切削環端組合せ構造表示図である。It is another cutting ring end combination structure display figure of this invention. 周知の構造の正面図である。It is a front view of a known structure. 周知の構造の平面図である。It is a top view of a known structure.

符号の説明Explanation of symbols

90 切削工具
91 軸孔
92、93 環面
94 切削環端
95、96 切面
97 凹部
98 凸部
10 切削工具
12 軸孔
14、16 環面
141、161 外周エッジ
18、20 内凹切面
22 切削環端
221 端面
222 凹部
223 凸部
90 Cutting tool 91 Shaft hole 92, 93 Ring surface 94 Cutting ring end 95, 96 Cut surface 97 Concave portion 98 Convex portion 10 Cutting tool 12 Shaft hole 14, 16 Ring surface 141, 161 Outer peripheral edge 18, 20 Inner concave cut surface 22 Cutting ring end 221 End face 222 Concave part 223 Convex part

Claims (11)

ガラス又はウエハ用切削工具において、切削工具を包含し、該切削工具は厚さを有するディスク形工具であり、前後の二つの円形環面を包含し、この環面の外周エッジが外向きに内凹切面に接続され、この内凹切面が相互に交叉し切削環端を形成し、該切削環端がガラス、ウエハ等に対する切削に供されることを特徴とする、ガラス又はウエハ用切削工具。   A cutting tool for glass or wafer, including a cutting tool, which is a disc-shaped tool having a thickness, including two circular annulus on the front and back, and an outer peripheral edge of the annulus facing outward. A cutting tool for glass or wafer, characterized in that it is connected to a concave cut surface, the inner concave cut surfaces cross each other to form a cutting ring end, and the cutting ring end is used for cutting glass, a wafer or the like. 請求項1記載のガラス又はウエハ用切削工具において、切削工具が工具軸の挿通に供される軸孔を具えたことを特徴とする、ガラス又はウエハ用切削工具。   The glass or wafer cutting tool according to claim 1, wherein the cutting tool comprises a shaft hole for insertion of a tool shaft. 請求項1記載のガラス又はウエハ用切削工具において、内凹切面が曲率半径Rを具えたことを特徴とする、ガラス又はウエハ用切削工具。   The glass or wafer cutting tool according to claim 1, wherein the inner concave cut surface has a radius of curvature R. 請求項3記載のガラス又はウエハ用切削工具において、曲率半径Rが2〜200mmの間であることを特徴とする、ガラス又はウエハ用切削工具。   The glass or wafer cutting tool according to claim 3, wherein the radius of curvature R is between 2 and 200 mm. 請求項1記載のガラス又はウエハ用切削工具において、切削環端に規則性或いは不規則性の端面が設けられたことを特徴とする、ガラス又はウエハ用切削工具。   The glass or wafer cutting tool according to claim 1, wherein a regular or irregular end face is provided at a cutting ring end. 請求項5記載のガラス又はウエハ用切削工具において、前記端面が複数の凹部と凸部を包含することを特徴とする、ガラス又はウエハ用切削工具。   6. The glass or wafer cutting tool according to claim 5, wherein the end surface includes a plurality of concave portions and convex portions. 請求項6記載のガラス又はウエハ用切削工具において、前記端面が凹部と凸部が連続して交錯するよう組み合わされてなることを特徴とする、ガラス又はウエハ用切削工具。   The glass or wafer cutting tool according to claim 6, wherein the end surfaces are combined so that the concave portion and the convex portion continuously intersect with each other. 請求項6記載のガラス又はウエハ用切削工具において、前記端面が二つの凹部と一つの凸部が連続して交錯するよう組み合わされてなることを特徴とする、ガラス又はウエハ用切削工具。   The glass or wafer cutting tool according to claim 6, wherein the end faces are combined so that two concave portions and one convex portion are continuously crossed. 請求項6記載のガラス又はウエハ用切削工具において、前記凸部が平面凸部、三角形面凸部より選択されることを特徴とする、ガラス又はウエハ用切削工具。   The glass or wafer cutting tool according to claim 6, wherein the convex portion is selected from a flat convex portion and a triangular convex portion. 請求項6記載のガラス又はウエハ用切削工具において、前記凹部がU行凹部、V型凹部より選択されることを特徴とする、ガラス又はウエハ用切削工具。   The glass or wafer cutting tool according to claim 6, wherein the concave portion is selected from a U-row concave portion and a V-shaped concave portion. 請求項2記載のガラス又はウエハ用切削工具において、切削工具が工具軸と一体成形されことを特徴とする、ガラス又はウエハ用切削工具。
The glass or wafer cutting tool according to claim 2, wherein the cutting tool is formed integrally with a tool shaft.
JP2005149876A 2004-05-28 2005-05-23 Cutting tool for glass or wafer Pending JP2005335385A (en)

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Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2010126387A (en) * 2008-11-26 2010-06-10 Japan Steel Works Ltd:The Cutter wheel
JP2012071459A (en) * 2010-09-28 2012-04-12 Mitsuboshi Diamond Industrial Co Ltd Scribing wheel
JP2016052795A (en) * 2013-05-24 2016-04-14 三星ダイヤモンド工業株式会社 Cutter wheel
US20160368810A1 (en) * 2015-06-17 2016-12-22 Boe Technology Group Co., Ltd. Cutting wheel for cutting brittle material
JP2022038435A (en) * 2020-08-26 2022-03-10 ファインテック株式会社 Scribing wheel for brittle material substrate and method for producing the same

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5409726B2 (en) * 2011-08-30 2014-02-05 三星ダイヤモンド工業株式会社 Scribing wheel

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2010126387A (en) * 2008-11-26 2010-06-10 Japan Steel Works Ltd:The Cutter wheel
JP2012071459A (en) * 2010-09-28 2012-04-12 Mitsuboshi Diamond Industrial Co Ltd Scribing wheel
KR101287785B1 (en) 2010-09-28 2013-07-19 미쓰보시 다이야몬도 고교 가부시키가이샤 Scribing wheel
JP2016052795A (en) * 2013-05-24 2016-04-14 三星ダイヤモンド工業株式会社 Cutter wheel
US20160368810A1 (en) * 2015-06-17 2016-12-22 Boe Technology Group Co., Ltd. Cutting wheel for cutting brittle material
JP2022038435A (en) * 2020-08-26 2022-03-10 ファインテック株式会社 Scribing wheel for brittle material substrate and method for producing the same

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