JP2005333720A - 静電アクチュエータ - Google Patents

静電アクチュエータ Download PDF

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Publication number
JP2005333720A
JP2005333720A JP2004149105A JP2004149105A JP2005333720A JP 2005333720 A JP2005333720 A JP 2005333720A JP 2004149105 A JP2004149105 A JP 2004149105A JP 2004149105 A JP2004149105 A JP 2004149105A JP 2005333720 A JP2005333720 A JP 2005333720A
Authority
JP
Japan
Prior art keywords
drive
electrostatic actuator
power supply
actuator according
output voltage
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2004149105A
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English (en)
Japanese (ja)
Other versions
JP2005333720A5 (enExample
Inventor
Shinji Kaneko
新二 金子
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Olympus Corp
Original Assignee
Olympus Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Olympus Corp filed Critical Olympus Corp
Priority to JP2004149105A priority Critical patent/JP2005333720A/ja
Publication of JP2005333720A publication Critical patent/JP2005333720A/ja
Publication of JP2005333720A5 publication Critical patent/JP2005333720A5/ja
Pending legal-status Critical Current

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  • Control Of Stepping Motors (AREA)
JP2004149105A 2004-05-19 2004-05-19 静電アクチュエータ Pending JP2005333720A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2004149105A JP2005333720A (ja) 2004-05-19 2004-05-19 静電アクチュエータ

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2004149105A JP2005333720A (ja) 2004-05-19 2004-05-19 静電アクチュエータ

Publications (2)

Publication Number Publication Date
JP2005333720A true JP2005333720A (ja) 2005-12-02
JP2005333720A5 JP2005333720A5 (enExample) 2007-07-05

Family

ID=35487977

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2004149105A Pending JP2005333720A (ja) 2004-05-19 2004-05-19 静電アクチュエータ

Country Status (1)

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JP (1) JP2005333720A (enExample)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2018160969A (ja) * 2017-03-22 2018-10-11 シチズン時計株式会社 静電モータ

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0318287A (ja) * 1989-06-13 1991-01-25 Tokyo Koku Keiki Kk リニヤパルスモータ駆動制御装置
JPH05268781A (ja) * 1992-03-16 1993-10-15 Yaskawa Electric Corp 静電モータの位置検出方法
JPH07298679A (ja) * 1994-04-25 1995-11-10 Sony Corp モータの回転制御装置
JPH09117163A (ja) * 1995-10-18 1997-05-02 Kasei Optonix Co Ltd 静電アクチュエータ
JP2001320888A (ja) * 2000-05-08 2001-11-16 Canon Precision Inc 振動波モータ駆動制御装置、駆動制御方法、及び記憶媒体

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0318287A (ja) * 1989-06-13 1991-01-25 Tokyo Koku Keiki Kk リニヤパルスモータ駆動制御装置
JPH05268781A (ja) * 1992-03-16 1993-10-15 Yaskawa Electric Corp 静電モータの位置検出方法
JPH07298679A (ja) * 1994-04-25 1995-11-10 Sony Corp モータの回転制御装置
JPH09117163A (ja) * 1995-10-18 1997-05-02 Kasei Optonix Co Ltd 静電アクチュエータ
JP2001320888A (ja) * 2000-05-08 2001-11-16 Canon Precision Inc 振動波モータ駆動制御装置、駆動制御方法、及び記憶媒体

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2018160969A (ja) * 2017-03-22 2018-10-11 シチズン時計株式会社 静電モータ

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