JP2005313253A - Cutting device - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a cutting device allowing easy opening and closing of an opening/closing cover to improve convenience. <P>SOLUTION: This cutting device is provided with a housing 12, holding means and cutting means provided within the housing 12, a housing opening part 40 provided at a position corresponding to the holding means and/or the cutting means, the opening/closing cover 50 to open/close the housing opening part 40, a second elastic member 53 mounted on a lower side of the housing opening part 40 to removably support the opening/closing cover 50 by locking a lower end part of the opening/closing cover 50 inserted from the above, and a lock means 70 for locking the opening/closing cover 50 in a closed state of the housing opening part 40. As a result, the opening/closing cover 50 can be easily opened/closed, and convenience can be improved since the opening/closing cover 50 can be removed at the time of a maintenance work. <P>COPYRIGHT: (C)2006,JPO&NCIPI

Description

  The present invention relates to a cutting apparatus, and more particularly, to an opening / closing cover for a cutting apparatus.

  A cutting apparatus for cutting a workpiece such as a semiconductor wafer includes a cutting means having a cutting blade mounted on a spindle, and a chuck table for holding the workpiece by suction, and the workpiece held on the chuck table. The workpiece is cut by cutting a cutting blade that rotates at high speed.

  In the cutting of such a cutting device, cutting water containing cutting debris or broken cutting blade fragments may scatter around. In order to prevent the cutting water and blade breakage pieces from scattering, an openable safety cover (hereinafter referred to as an openable cover) is provided around the chuck table and the cutting means (see, for example, Patent Document 1).

  For example, the open / close cover is provided on each of the front side and the side surface of the cutting apparatus. The front opening / closing cover is opened and closed when the cutting blade is replaced. On the other hand, the open / close cover on the side is opened and closed to clean the cutting waste and cutting water scattered around the chuck table. For example, in the case where cutting waste collecting means (so-called water case etc.) for collecting cutting waste etc. is disposed at both lower portions of the chuck table and its moving mechanism, in order to clean the cutting waste collecting means, The side cover is opened and closed.

  Such an open / close cover, particularly the open / close cover on the side, has been conventionally fixed to the cutting device main body by screws because the frequency of the open / close cover is low.

JP-A-10-116802

  However, when the opening / closing cover is screwed even though the opening / closing frequency is low as in the conventional cutting device, there is a problem that the opening / closing operation of the opening / closing cover takes much time and labor. For this reason, an open / close cover that can be easily opened and closed is highly desired.

  Therefore, the present invention has been made in view of the above problems, and an object of the present invention is to provide a new and improved device that can easily open and close the opening / closing cover and improve convenience. It is in providing the made cutting device.

  In order to solve the above-described problems, according to an aspect of the present invention, a housing; and a holding means that is provided in the housing and holds the workpiece; and a cutting that is provided in the housing and cuts the workpiece. Means; a housing opening provided at a position corresponding to the holding means and / or cutting means; an opening / closing cover for opening / closing the housing opening; An opening / closing cover mounting means having a support member for removably supporting the opening / closing cover by locking the lower end of the inserted opening / closing cover; and a locking means for locking the opening / closing cover in a state where the housing opening is closed; A cutting device is provided. Even with such a cutting device, the same effects as described above can be obtained.

  With this configuration, the open / close cover can be easily opened / closed simply by locking / unlocking the open / close cover with respect to the housing opening by the locking means, and the open / close cover is removed to clean and maintain the internal device. Can also be executed. Therefore, the convenience of the operator of the cutting device is improved.

  In order to solve the above-described problem, according to another aspect of the present invention, a housing; a holding means provided in the housing and holding the workpiece; and provided in the housing; A cutting means for cutting; a housing opening provided at a position corresponding to the holding means and / or the cutting means; an opening / closing cover for opening / closing the housing opening; an opening / closing cover mounting means for supporting the opening / closing cover; Locking means for locking the open / close cover in a state where the housing opening is closed, and the open / close cover mounting means automatically opens the open / close cover when the open / close cover is not locked by the lock means. A cutting device is provided, which is characterized in that it opens to the front.

  With this configuration, the opening / closing cover can be easily opened / closed simply by locking / unlocking the opening / closing cover with respect to the housing opening by the locking means. In addition, since the open / close cover is closed halfway, the open / close cover can be automatically opened largely when the lock by the locking means is incomplete. Therefore, the operator can visually recognize that the opening / closing cover is not closed. Therefore, the convenience of the operator of the cutting device is improved.

  The opening / closing cover mounting means removably supports the opening / closing cover by locking the lower end of the opening / closing cover. When the opening / closing cover is not locked by the locking means, the lower end of the opening / closing cover is provided. The opening / closing cover may be opened by rotating the opening / closing cover around the center. As a result, the opened opening / closing cover can be removed and the internal device can be cleaned and maintained. When the open / close cover is closed halfway and is not locked, the open / close cover is automatically opened wide by rotating the open / close cover away from the housing opening around the lower end of the open / close cover. Can be made.

  Further, the opening / closing cover attaching means engages an elastic member mounted on at least the left and right sides of the casing opening and a lower end of the opening / closing cover mounted on the lower side of the casing opening. And a support member that removably supports the opening / closing cover, and when the opening / closing cover is not locked by the locking means, the opening / closing cover may be pressed in the opening direction by the elastic member. As a result, the opening / closing cover can be supported and attached to the housing opening by a relatively simple structure of the support member. In addition, when the locking by the locking means is incomplete, the opening / closing cover can be pressed and rotated from the inside by a simple structure such as an elastic member so that it can be opened largely. Further, since the lower end portion of the opening / closing cover is sandwiched between the lower end portion of the elastic member and the support member, the opening / closing cover mounting means can stably support the attached opening / closing cover.

  Further, an elastic member may be attached so as to cover the support member. Alternatively, the support member itself may be formed of an elastic member.

The lock means is mounted on the opening / closing cover and is engaged with the engagement hole when inserted into the engagement hole provided in the housing; the engagement between the latch part and the engagement hole is released. A switch part to perform;
You may make it provide. As a result, when the operator pushes the opening / closing cover into the fully closed state, the latch portion of the locking means is inserted into the engagement hole of the housing and engages. Can lock. On the other hand, when opening the closed opening / closing cover, it is only necessary to press the switch part of the locking means. As a result, the engagement between the latch portion and the engagement hole is released and the lock of the open / close cover is released, so that the open / close cover is opened. Thus, the operator can conveniently open and close the open / close cover with one touch.

  As described above, according to the present invention, since the operator can easily open and close the opening / closing cover, convenience in performing various operations is improved.

  Hereinafter, preferred embodiments of the present invention will be described in detail with reference to the accompanying drawings. In the present specification and drawings, components having substantially the same functional configuration are denoted by the same reference numerals, and redundant description is omitted.

(First embodiment)
First, based on FIG. 1 and FIG. 2, the whole structure of the dicing apparatus 10 comprised as an example of the cutting apparatus concerning the 1st Embodiment of this invention is demonstrated. FIG. 1 is an overall perspective view showing a dicing apparatus 10 according to the present embodiment. FIG. 2 is a plan view showing a configuration around the cutting region of the dicing apparatus 10 according to the present embodiment, and the housing 12 is cut away.

  As shown in FIGS. 1 and 2, the dicing apparatus 10 includes, for example, a housing 12, a cutting unit 20 for cutting a workpiece such as a semiconductor wafer W, and a chuck table 30 for holding the workpiece. , Moving mechanisms 32 and 34 for moving the cutting unit 20 and the chuck table 30 relative to each other, cutting waste collecting means 36 for collecting cutting waste and cutting water generated by the cutting, and a housing opening provided in the housing 12 Main portions 40 and 42, and opening and closing covers 50 and 60 attached to the housing openings 40 and 42, respectively.

  The housing 12 is a box having, for example, a substantially rectangular parallelepiped shape made of, for example, metal. Various devices such as a cutting unit 20, a chuck table 30, and a moving mechanism, which will be described below, are disposed in the housing 12.

  The cutting unit 20 is configured as a cutting means according to the present embodiment, and cuts a workpiece such as the semiconductor wafer W. Specifically, the cutting unit 20 includes a cutting blade 22 mounted on a spindle 24, and cuts the semiconductor wafer W by cutting the semiconductor blade W while rotating the cutting blade 22 at a high speed. . The detailed configuration of the cutting unit 20 will be described later.

  The chuck table 30 is configured as a holding unit according to the present embodiment, and holds and fixes a workpiece such as the semiconductor wafer W by suction. The chuck table 30 has, for example, a vacuum chuck mechanism on its upper surface, and a semiconductor wafer W in a state of being supported on a frame (not shown) via a wafer tape (not shown), for example, It can be held by vacuum suction.

  Further, the moving mechanism includes, for example, a cutting unit moving mechanism 32 and a chuck table moving mechanism 34 as shown in FIG. Among these, the cutting unit moving mechanism 32 can move the cutting unit 20 in the horizontal direction (Y-axis direction) orthogonal to the cutting direction and align the cutting edge of the cutting blade 22 with each cutting line of the semiconductor wafer W. . The cutting unit moving mechanism 34 can also adjust the cutting depth of the cutting blade 22 with respect to the semiconductor wafer W by moving the cutting unit 20 in the vertical direction (Z-axis direction). On the other hand, the chuck table moving mechanism 34 can move the chuck table 30 and the semiconductor wafer W held by the chuck table 30 in the cutting direction (X-axis direction).

  The dicing apparatus 10 having such a configuration moves the cutting unit 20 and the chuck table 30 relative to each other in the cutting direction (X-axis direction) while cutting the cutting blade 22 that rotates at high speed into the semiconductor wafer W, thereby forming a plurality of cutting lines. By repeating the cutting, the semiconductor wafer W can be diced and divided into a plurality of semiconductor chips.

  Moreover, the cutting waste collection | recovery means 36 is comprised by the water case whose cross section is substantially U-shaped, for example. The cutting waste collecting means 36 is provided at the lower part on both sides of the chuck table 30 and the chuck table moving mechanism 34 for reciprocating the chuck table 30. The cutting waste collecting means 36 collects the cutting waste (including the end material of the semiconductor wafer W, fine cutting waste, etc.) and the cutting water generated by the cutting process.

  The housing 12 is provided with, for example, two housing openings 40 and 42 at positions corresponding to the cutting unit 20 and the chuck table 30. Among these, the housing opening 40 (hereinafter referred to as the side opening 40) provided on the side surface of the dicing apparatus 10 is, for example, inserted into the housing 12 from the side surface of the dicing apparatus 10 by an operator. , Provided for cleaning the cutting waste collecting means 36 and the like. On the other hand, the housing opening 42 (hereinafter referred to as the front opening 42) provided on the front (front) side of the dicing apparatus 10 is, for example, an operator placing a hand inside the housing 12 from the front side of the dicing apparatus 10. Inserted to replace the cutting blade 22 of the cutting unit 20. The operator can also perform various maintenance operations on the internal cutting unit 20, chuck table 30, moving mechanisms 32, 34, etc. by inserting a hand from the side opening 40 and the front opening 42.

  The side opening 40 and the front opening 42 are provided with opening and closing covers 50 and 60, respectively. The open / close covers 50 and 60 are, for example, safety covers that can be manually opened and closed by an operator. These opening / closing covers 50 and 60 are made of a material (for example, vinyl chloride, polycarbonate, etc.) that is transparent so that an operator can visually check the state of the inside of the apparatus and that can withstand the impact of scattered objects. Yes.

  Among these, the opening / closing cover 50 attached to the side surface opening 40 is a characteristic component according to the present embodiment, and is formed of, for example, a single substantially rectangular flat plate, and is opened and closed in a hinged door manner. The opening / closing cover 50 is detachably attached to the side opening 40. On the other hand, the opening / closing cover 60 attached to the front opening 42 is composed of, for example, two substantially rectangular flat plates and is opened and closed in a sliding door manner. An operator can open the open / close covers 50 and 60 to perform the cleaning operation, the blade replacement operation, the maintenance operation, and the like. The details of the opening / closing cover 50 attached to the side opening 40 will be described later.

  Next, based on FIG. 3, the configuration of the cutting unit 20 according to the present embodiment and aspects of blade breakage pieces, cutting water, and the like scattered from the cutting unit 20 will be described. FIG. 3 is a perspective view showing the cutting unit 20 according to the present embodiment.

  As shown in FIG. 3, the cutting unit 20 mainly includes, for example, a flange 21, a cutting blade 22, a spindle 24, a spindle housing 26, a cutting water supply nozzle 28, and a foil cover 29.

  The cutting blade 22 is, for example, an extremely thin cutting grindstone having a ring shape (so-called washer blade). The cutting blade 22 is pivotally attached to the spindle 24 while being sandwiched from both sides by the flange 21, for example. The spindle 24 is a rotating shaft for transmitting a rotational driving force such as a motor (not shown) to the cutting blade 22 and rotates the mounted cutting blade 22 at a high speed of, for example, 30,000 rpm. The spindle housing 26 is provided so as to cover the spindle 24, and supports the spindle 24 so as to be rotatable at high speed by an air bearing mechanism provided therein. Further, the cutting water supply nozzle 28 is configured as cutting water supply means for supplying cutting water near the processing point. The cutting water supply nozzle 28 is detachably provided on both sides of the lower side of the cutting blade 22, for example, and cools by cutting the cutting water toward the cutting blade 22 and the processing point. In FIG. 3, only the cutting water supply nozzle 28 disposed on one side (front side) of the cutting blade 22 is illustrated, but the other side (rear side) of the cutting blade 22 has a similar configuration. A supply nozzle is provided. Further, the foil cover 29 is provided so as to cover the outer periphery of the cutting blade 22 and can prevent scattering of cutting water and cutting waste to some extent.

  As shown in FIG. 3, the cutting unit 20 having such a configuration rotates the cutting blade 22 at a high speed by the rotational driving force of the spindle 24 and cuts the cutting blade 22 into the semiconductor wafer W, thereby processing the semiconductor wafer W. The surface can be cut to form an extremely thin kerf along the cutting line (street).

  In such a cutting process of the cutting unit 20, for example, blade breakage pieces, cutting water containing cutting debris, and the like are scattered at high speed around the cutting blade 22 due to the rotational force of the cutting blade 22 rotating at high speed. . The blade cover 29 can prevent the blade breakage pieces and the cutting water from scattering to some extent.

  However, the wheel cover 29 has a gap A (a portion surrounded by a broken line in FIG. 3) in part for convenience of maintenance, for example. For this reason, the blade breakage piece 222, the cutting water 224, and the like pass through the gap A of the wheel cover 29, and are scattered outside the wheel cover 29 at a high speed. In the dicing apparatus 10 according to the present embodiment, for example, the direction in which the gap A is provided is the side surface direction (X-axis negative direction) of the dicing apparatus 10. For this reason, the blade breakage piece 222 and the cutting water 224 that have passed through the gap A are scattered from the cutting unit 20 toward the opening / closing cover 50 and collide with the opening / closing cover 50.

  Therefore, if the opening / closing cover 50 is not completely closed during the cutting process, the cutting water 224 containing cutting waste scatters from the side opening 40 and contaminates the periphery of the dicing apparatus 10. , There is a risk that the blade breakage piece 222 may jump out of the side opening 40 and damage the operator. Further, in the opening / closing cover 50, there is a device (for example, the cutting unit 20 having the cutting blade 22 that rotates at high speed, the moving mechanism 32, the risk of causing injury to the operator (cutting or pinching of hands, fingers, etc.), 34). Therefore, in order to ensure the safety of the operator and prevent contamination around the apparatus, cutting must be performed with the open / close cover 50 being completely closed.

  In the above description, an example in which the cutting unit 20 is provided with the foil cover 29 and the blade breakage pieces 222, the cutting water 224, etc. scatter from the gap A of the foil cover 29 and collide with the opening / closing cover 50 has been described. However, the scattering mode of the blade breakage piece 222 or the like is not limited to such an example. For example, when the cutting unit 20 is not provided with the foil cover 29, more blade breakage pieces 222, cutting water 224, and the like collide with the opening / closing cover 50 from the vicinity of the processing point. Further, when the foil cover 29 having a shape different from that of the example of FIG. 3 is provided, the blade breakage piece 222, the cutting water 224, and the like may collide with the opening / closing cover 50 through portions other than the gap A. become. Further, the scattered blade broken pieces 222, cutting water 224, etc. not only directly reach the opening / closing cover 50 but also collide with the chuck table 30, chuck table moving mechanism 34, opening / closing cover 60, etc., and are reflected to open / close. The cover 50 may be reached.

  Next, based on FIG. 4, the opening / closing cover 50 and its attachment means, which are features according to the present embodiment, will be described in detail. FIG. 4 is a perspective view (a) and a side view (b) showing the configuration of the opening / closing cover 50 and its attaching means according to the present embodiment. However, in FIG. 4B, for convenience of explanation, the housing 12 is illustrated in a vertical section taken along line B-B ′ in FIG.

  As shown in FIG. 4, the side opening 40 provided on the side surface of the housing 12 is, for example, a rectangular (rectangular) opening having a long side in the horizontal direction (Y-axis direction). An opening / closing cover 50 is attached so as to cover the side opening 40. The opening / closing cover 50 is, for example, a flat safety cover having a substantially rectangular shape. As described above, the opening / closing cover 50 is made of a transparent material (for example, vinyl chloride, polycarbonate, or the like) that is strong enough to withstand an impact when the blade breakage piece 222 or the like collides. The shape and size of the opening / closing cover 50 are set according to the shape and size of the side opening 40. Specifically, the horizontal width (Y-axis direction) and vertical width (Z-axis direction) of the opening / closing cover 50 are set to be slightly larger than the horizontal width and vertical width of the side opening 40, respectively. The opening / closing cover 50 is attached to the side opening 40 so as to be openable / closable, and can open / close the side opening 40.

  In addition, for example, a first elastic member 51, a support member 52, and a second elastic member 53 attached to the support member 52 are provided around the side opening 40 (four sides). Of these, the first and second elastic members 51 and 53 are made of an elastic material such as rubber or synthetic resin, and the support member 52 is made of a metal such as stainless steel. The first elastic member 51 is fixed to the casing 12 around the side opening 40 with an adhesive or the like. Further, the support member 52 is, for example, a protruding portion having a substantially L-shaped cross section (a bowl shape), and is integrally formed with the housing 12 below the side surface opening 40. The second elastic member 53 is fixed to, for example, an end portion 52a of the support member 52 with an adhesive or the like, and has a substantially U-shaped cross section so as to cover the end portion of the support member 52. ing.

  The first elastic member 51, the support member 52, and the second elastic member 53 are configured as an opening / closing cover attaching means for attaching the opening / closing cover 50 to the side opening 40, and the opening / closing cover 50 can be removed. Can be supported. Below, the 1st elastic member 51, the support member 52, and the 2nd elastic member 53 are each demonstrated in detail. The first elastic member 51 is configured as “an elastic member mounted on at least the left and right sides of the housing opening” according to the present embodiment.

  The first elastic member 51 is formed, for example, in a “substantially U shape” along three sides (upper side, left side, and right side) excluding the lower side of the side opening 40. The first elastic member 51 is attached so as to surround the periphery (excluding the lower side) of the side opening 40. Specifically, the first elastic member 51 is disposed on the left, upper, and right housings 12 of the side opening 40 along the left side, upper side, and right side of the side opening 40. For this reason, when the opening / closing cover 50 is closed, the first elastic member 51 is in close contact with the three sides (upper side, left side, and right side) of the opening / closing cover 50. Therefore, the 1st elastic member 51 can seal the clearance gap between the housing | casing 12 and the opening-and-closing cover 50, and can prevent that cutting water etc. leak outside from this clearance gap. The first elastic member 51 also functions as a cushioning material when closing the opening / closing cover 50.

  It is to be noted that the first elastic member 51 is integrally formed in a substantially U shape as described above, and the effect of preventing the leakage of cutting water is higher. However, the first elastic member 51 is not limited to this example. It is also possible to form a substantially separate elastic member on the upper side, the left side, and the right side of the side opening 40, respectively. Further, the first elastic member 51 does not necessarily have to be mounted on the upper side of the side opening 40, and the first elastic member 51 may be mounted only on the left and right sides of the side opening 40. The first elastic member 51 is formed in a “substantially square shape” along the four sides (upper side, lower side, left side, and right side) of the side opening 40 so as to surround the entire periphery of the side opening 40. It may be arranged.

  Further, the support member 52 is, for example, a portion protruding in a bowl shape from the surface of the housing 12 such that the length in the longitudinal direction (Y-axis direction) is slightly longer than the lower side of the side opening 40. As shown in FIG. 4A, the support member 52 is provided substantially horizontally along the lower side of the side opening 40 on the lower side of the side opening 40. The left and right ends of the support member 52 are positioned outside the left side and the right side of the side opening 40, respectively. Further, for example, as shown in FIG. 4B, the support member 52 includes a horizontal portion 52b extending horizontally from the surface of the housing 12, and a vertical portion extending vertically upward from an end portion of the horizontal portion 52b. 52a. Further, the second elastic member 53 is mounted so as to cover the tip end portion (vertical portion 52a) of the support member 52.

  As shown in FIG. 4B, the support member 52 is disposed so that the lower end 50a of the opening / closing cover 50 can be inserted from above. Specifically, the support member 52 is a rail-like member disposed below the side opening 40, and a predetermined gap is generated between the vertical portion 52 a of the support member 52 and the housing 12. Yes. For this reason, the lower end part 50a of the opening / closing cover 50 can be inserted into the gap. The support member 52 can removably support the opening / closing cover 50 by engaging the lower end portion 50a of the opening / closing cover 50 inserted in this manner. Further, the second elastic member 53 having elasticity and a high friction coefficient covers the vertical portion 52a of the support member 52 that locks the opening / closing cover 50 in this way. For this reason, the second elastic member 53 functions as a cushioning material to prevent the opening / closing cover 50 from being damaged, and the second elastic member 53 becomes a non-slip to prevent the opening / closing cover 50 from falling.

  Further, both end portions of the support member 52 are formed at both end portions of the first elastic member 50 (the lower end portion 51b on the left side and the lower end portion 51b on the right side of the side opening 40). ) On the outer side (X-axis negative direction). More specifically, the arrangement of the first elastic member 51 and the support member 52 is adjusted so that the left and right ends of the vertical portion 52a of the support member 52 cover the outside of the lower end portion 51a of the first elastic member 51. ing. Accordingly, the lower end portion 50 a of the opening / closing cover 50 inserted into the support member 52 is sandwiched between the second elastic member 53 and the lower end portion 51 a of the first elastic member 51. For this reason, it is possible to more stably support the opening / closing cover 50 inserted into the support member 52 so as not to fall.

  By attaching the opening / closing cover 50 to the side opening 40 by the opening / closing cover attaching means comprising the first elastic member 51, the support member 52, and the second elastic member 53 having such a configuration, the opening / closing cover 50 will be described later. When not locked by the locking means 70, the upper side of the opening / closing cover 50 is open. That is, the opening / closing cover 50 rotates in a direction away from the side opening 40 around the lower end 50a, and is tilted by a predetermined angle with respect to the side opening 40 toward the near side (the negative direction in the X-axis direction). Become. The operator can easily remove the open / close cover 50 thus opened by pulling it out of the support member 52. By removing the opening / closing cover 50 in this manner, the operator can easily perform a cleaning operation or the like of the water case 36 by inserting a hand from the side opening 40.

  Further, a locking means 70 is attached to, for example, the upper end portion of the opening / closing cover 50. The locking means 70 engages with an engagement hole 72 provided on, for example, the upper side of the side opening 40 (for example, near the central portion of the upper side of the side opening 40), so It can be fixed to the body 12 and locked against opening. This locking means 70 can be constituted by, for example, a latch device having a button release function. Specifically, for example, ("Push latch" C-1213; manufactured by TAKIGEN) can be used.

  Here, based on FIG. 5, the lock | rock means 70 concerning this embodiment is demonstrated in detail. FIG. 5 is a cross-sectional view showing the configuration of the locking means 70 and the engagement hole 72 according to this embodiment.

  As shown in FIG. 5, the lock means 70 includes, for example, a latch part 70a and a switch part 70c. The latch portion 70 a protrudes from the side opening 40 side of the opening / closing cover 50 and can engage with the engagement hole 72. Specifically, an engagement protrusion 70 b is provided on one side of the latch portion 70 a so as to be able to protrude and retract. The engagement protrusion 70 b is engaged with a locking hole 72 a provided on a side surface in the engagement hole 72. Configured to match.

  The switch portion 70c protrudes from the side opening 40 and is connected to the latch portion 70a. The switch portion 70c is, for example, a lock release button, and releases the engagement between the latch portion 70a and the engagement hole 72 when pressed by an operator.

  The lock means 70 having such a configuration can lock / unlock the opening / closing cover 50 easily and preferably. Specifically, when the opening / closing cover 50 is pushed in the closing direction by the operator to close the opening / closing cover 50, the latch portion 70 a is inserted into the engagement hole 72. At this time, the engaging protrusion 70b comes into contact with the inlet portion of the engaging hole 72, and once it is buried in the main body of the latch portion 70a, the engaging protrusion 70b protrudes when reaching the position of the locking hole 72a. Mates with. The fitting state between the engaging protrusion 70b and the locking hole 72a is maintained until the switch portion 70c is pushed. In this manner, the engagement hole 72 and the latch portion 70a are preferably engaged with each other, so that the upper end portion of the opening / closing cover 50 is fixed to the housing 12 and locked in a state where the opening / closing cover 50 is closed.

  On the other hand, when opening the open / close cover 50 thus locked, the operator only has to press the switch portion 70c of the lock means 70. When the switch part 70c is pushed, the engagement protrusion 70b is buried in the latch part 70a, so that the engagement between the engagement hole 72 and the latch part 70a is released. As a result, the fixing of the upper end portion of the opening / closing cover 50 by the locking means 70 is released, so that the opening / closing cover 50 opens.

  As described above, by employing the locking means 70 according to the present embodiment, when the operator closes the opening / closing cover 50, the operator can easily lock the opening / closing cover 50 by pressing the opening / closing cover 50 against the side opening 40. When opening the cover 50, simply pressing the switch portion 70c can release the lock and open the opening / closing cover 50 with one touch. Therefore, the opening / closing operation of the opening / closing cover 50 can be greatly speeded up and simplified as compared with the conventional screwed opening / closing cover, and the convenience for the operator is improved.

  By the way, if the mounting mechanism of the opening / closing cover 50 is configured so that it can be easily opened / closed in this way, the opening / closing cover 50 cannot be closed firmly when the operator closes the opening / closing cover 50. Therefore, the locking means 70 locks the opening / closing cover 50. There may be cases where this is not done. If cutting is performed in a state where the opening / closing cover 50 is not completely closed, as described above, the blade breakage pieces 222 may be scattered outside the apparatus, which may cause a serious accident.

  Therefore, during the cutting process, from the viewpoint of safety to reliably protect the operator from the scattered blade broken piece 222, and from the viewpoint of preventing contamination of the periphery of the apparatus by the scattered cutting water 224 and the like, the opening / closing cover 50 The cutting process needs to be performed in a state in which is completely closed. Therefore, when the opening / closing cover 50 is not completely closed, it is necessary for the operator to recognize that fact.

  Therefore, the attachment means of the opening / closing cover 50 according to the present embodiment is configured to automatically open the opening / closing cover 50 when the opening / closing cover 50 is closed halfway and the lock is incomplete. Therefore, the operator can recognize that the opening / closing cover 50 is not completely closed.

  Here, the operation of automatically opening the opening / closing cover 50 will be described in detail with reference to FIG. FIG. 6 is a side view showing a state (a) in which the opening / closing cover 50 according to the present embodiment is completely closed and a state (b) in which the opening / closing cover 50 is closed halfway. However, in FIG. 6, for convenience of explanation, the housing 12 is illustrated in a vertical section taken along line B-B ′ in FIG.

  When the operator firmly presses the opening / closing cover 50 and the latch portion 70a of the locking means 70 is fully inserted into the engagement hole 72, the opening / closing cover 50 is completely closed as shown in FIG. It becomes a state. When the opening / closing cover 50 is completely closed as described above, the latch unit 70a and the engagement hole 72 are engaged with each other, whereby the lock means 70 completely locks the upper end portion of the opening / closing cover 50. The lower end 50 a of the opening / closing cover 50 is sandwiched and fixed by the lower end 51 a of the first elastic member 51 and the second elastic member 53. Thus, in a state where the opening / closing cover 50 is locked by the locking means 70, the opening / closing cover 50 is not opened until the lock is released by the operator. In such a state, since the opening / closing cover 50 and the first elastic member 51 and the second elastic member 53 are in close contact with each other, cutting waste, cutting water 224, and the like generated by the cutting work leak to the outside of the apparatus. You can avoid it.

  On the other hand, as shown by a broken line in FIG. 6B, when the opening / closing cover 50 is closed halfway without the operator fully pushing the opening / closing cover 50, the latch portion 70a is sufficiently placed in the engagement hole 72. Therefore, the latch portion 70a and the engagement hole 72 are not engaged with each other. Therefore, the opening / closing cover 50 is not locked by the locking means 70, and the opening / closing cover 50 is slightly opened.

  Thus, when the opening / closing cover 50 is closed halfway and is not locked, the first elastic member 51 presses the opening / closing cover 50 by its elastic force to open the opening / closing cover 50 automatically. Open widely. More specifically, as described above, the lower end portion 50a of the opening / closing cover 50 includes the second elastic member 53 inside the vertical portion 52a of the support member 52, and the lower end portion 51a of the first elastic member 51. It is inserted between. For this reason, the lower end portion 51 a of the first elastic member 51 is slightly inclined and elastically contracted by the lower end portion 50 a of the opening / closing cover 50, and the opening / closing cover 50 is always in contact with the opening / closing cover 50. The force which presses in the direction which opens the lower end part 50a of this is made to act.

  Due to the pressing force of the first elastic member 51, the opening / closing cover 50 closed at the halfway end rotates in a direction away from the side opening 40 with the lower end 50a as the center. Further, the opening / closing cover 50 rotated by being pressed in this way further rotates in the opening direction by its own weight. As a result, as shown by the solid line in FIG. This angle is determined according to, for example, the weight, thickness, width, opening / closing cover 50, rigidity of the first and second elastic members 51, 53, elastic modulus, and the like. That is, the opening / closing cover 50 is largely opened to a predetermined angle at which the pressing force and weight of the first elastic member 51 and the support force by the support member 52 via the second elastic member 53 are balanced. Thus, since the lower end portion 50a of the open / close cover 50 that is wide open is in contact with the first and second elastic members 51, 53 formed of rubber or the like having a large friction coefficient, the open / close cover 50 is supported. It does not fall off the member 52.

  As described above, according to the opening / closing cover mounting means according to the present embodiment, when the opening / closing cover 50 is closed halfway and the lock is incomplete, the opening / closing cover 50 remains in the position closed halfway. It opens automatically. For this reason, the operator can visually recognize that the opening / closing cover 50 is not completely closed by looking at the opening / closing cover 50 that is wide open. The mechanism for automatically opening the opening / closing cover 50 is realized by the first elastic member 51, the support member 52, and the second elastic member 53 having a relatively simple and inexpensive structure as described above. There is no need for a separate sensor or opening / closing drive device. For this reason, it is beneficial in terms of equipment cost.

  Heretofore, the cutting apparatus 10 according to the present embodiment, in particular, the attachment means for the opening / closing cover 50 has been described in detail. In the cutting apparatus 10 according to the present embodiment, the mounting mechanism of the opening / closing cover 50 with respect to the side opening 40 is changed to a mounting mechanism that can be opened / closed and removed with one touch instead of the conventional mounting mechanism using screws. doing. Therefore, the operator can easily open and close the open / close cover 50 and remove the open / close cover 50 when performing a cleaning operation or the like, which is very convenient.

  Further, when the operator closes the opening / closing cover 50 halfway and the opening / closing cover 50 is not completely locked by the locking means 70, the opening / closing cover 50 is automatically opened largely. For this reason, the operator can easily grasp visually that the opening / closing cover 50 is not closed, so that the opening / closing cover 50 can be reliably closed again before starting the cutting process. Accordingly, since it is possible to prevent the cutting process from being performed in a state where the opening / closing cover 50 is not closed, it is possible to ensure the safety of the operator, and it is also possible to prevent contamination around the apparatus due to scattering of cutting water or the like.

  As mentioned above, although preferred embodiment of this invention was described referring an accompanying drawing, it cannot be overemphasized that this invention is not limited to the example which concerns. It will be apparent to those skilled in the art that various changes and modifications can be made within the scope of the claims, and these are naturally within the technical scope of the present invention. Understood.

  For example, in the above-described embodiment, the opening / closing cover 50 and its attachment means (the first elastic member 51, the support member 52, and the second member) are provided for the housing opening (side opening 40) provided on the side surface of the main body of the cutting apparatus 10. However, the present invention is not limited to such an example. For example, the opening / closing cover 50 and the mounting means thereof include the front opening 42 provided on the front surface of the cutting device 10 main body, or the housing opening provided on the other side or back surface of the cutting device 10 main body. Applicable to open / close any housing opening, such as a section (not shown).

  Moreover, although the said embodiment demonstrated the example in which the housing | casing opening part 40 and the opening-and-closing cover 50 have both horizontally long substantially rectangular shapes, this invention is not limited to this example. The housing opening 40 may have an arbitrary shape such as a triangular shape, a square shape, a trapezoidal shape, a parallelogram shape, a polygonal shape of pentagon or more, a substantially circular shape, an elliptical shape, or a substantially semicircular shape. Further, the opening / closing cover 50 may have any shape such as a triangular shape, a square shape, a trapezoidal shape, a parallelogram shape, a pentagonal shape or more polygonal shape, or a substantially semicircular shape if the lower side is a substantially horizontal linear shape. May be. Further, the shape of the housing opening 40 and the shape of the opening / closing cover 50 may be different from each other.

  Further, the first elastic member 51 only needs to be provided at a position at which the opening / closing cover 50 can be pressed at least in the lower left and right sides of the housing opening 40, and all of the left side, upper side, and right side of the housing opening 40 are not necessarily required. For example, the first elastic member 51 may not be provided at a position corresponding to the upper side.

  Further, the support member 52 does not have to extend along the entire lower side of the housing opening 40 as long as it can removably support the opening / closing cover 50, and is disposed only on a part of the lower side. May be.

  Moreover, in the said embodiment, although the 2nd elastic member 53 was mounted | worn so that the front-end | tip part (vertical part 52a) of the support member 52 might be covered, this invention is not limited to this example. For example, the second elastic member 53 may be mounted so as to cover the entire support member 52 (vertical portion 52a and horizontal portion 52b), or may be provided so as to cover only the inside of the support member 52. .

  Moreover, in the said embodiment, although the opening / closing cover attaching means was comprised from the 1st elastic member 51, the supporting member 52, and the 2nd elastic member 53, this invention is not limited to this example. For example, if the opening / closing cover 50 is only detachably attached to the housing opening 40, the opening / closing cover attaching means may include at least the support member 52. Further, the opening / closing cover attaching means may not include the second elastic member 53, that is, the second elastic member 53 may not be attached to the support member 52.

  In the above embodiment, the locking means 70 is mounted on the upper end of the opening / closing cover 50 and is configured to fix the upper end of the opening / closing cover 50 to the casing 12 above the casing opening 40. The present invention is not limited to such an example. For example, the lock means 70 may be provided at the side end of the opening / closing cover 50 (for example, the center of the left side or the right side). In this case, an engagement hole 72 is provided at a position corresponding to the lock means 70. Further, a plurality of lock means 70 may be provided. Further, the locking means 70 may not be configured by the latch device (push latch) having the above-described button release function. For example, as long as the one end of the opening / closing cover 50 can be locked and locked, for example, You may comprise arbitrary locking mechanisms, such as a hook type and a clasp type locking mechanism.

  Moreover, in the said embodiment, although the supporting member 52 was comprised with the bowl-shaped member formed with the metal material, this invention is not limited to this example. For example, the support member 52 may be made of an elastic member made of an elastic material such as rubber.

  The present invention can be applied to an opening / closing cover of a cutting device, and in particular, can be applied to an opening / closing cover that can be easily opened and closed and is required to be securely closed during cutting.

1 is an overall perspective view showing a dicing apparatus according to a first embodiment of the present invention. It is a top view which shows the structure of the cutting area periphery of the dicing apparatus concerning the embodiment. It is a perspective view which shows the cutting unit concerning the embodiment. It is the perspective view (a) and side view (b) which show the structure of the opening / closing cover and its attachment means concerning the embodiment. It is a cross-sectional view which shows the structure of the locking means and engagement hole concerning the embodiment. It is a side view which shows the state (a) in which the opening-and-closing cover concerning the embodiment was completely closed, and the state (b) closed in the middle halfway.

Explanation of symbols

DESCRIPTION OF SYMBOLS 10 Dicing apparatus 20 Cutting unit 22 Cutting blade 24 Spindle 30 Chuck table 36 Cutting waste collection | recovery means 40 Side surface opening part 42 Front opening part 50 Opening / closing cover 50a Lower end part of an opening / closing cover 51 1st elastic member 51a Lower end of 1st elastic member Part 52 Support member 52a Vertical part 52b Horizontal part 53 Second elastic member 70 Locking means 70a Latch part 70b Engagement projection 70c Switch part 72 Engagement hole 72a Engagement hole

Claims (5)

A housing;
Holding means provided in the housing for holding a workpiece;
Cutting means provided in the housing for cutting the workpiece;
A housing opening provided at a position corresponding to the holding means and / or the cutting means;
An opening / closing cover for opening / closing the housing opening;
An opening / closing cover attaching means having a support member attached to the lower side of the housing opening and locking the lower end of the opening / closing cover inserted from above to removably support the opening / closing cover;
Locking means for locking the open / close cover in a state in which the housing opening is closed;
A cutting device comprising: A housing;
Holding means provided in the housing for holding a workpiece;
Cutting means provided in the housing for cutting the workpiece;
A housing opening provided at a position corresponding to the holding means and / or the cutting means;
An opening / closing cover for opening / closing the housing opening;
Open / close cover mounting means for supporting the open / close cover;
Locking means for locking the open / close cover in a state in which the housing opening is closed;
With
The opening / closing cover attaching means includes:
The cutting apparatus, wherein the opening / closing cover is automatically opened when the opening / closing cover is not locked by the locking means. The opening / closing cover attaching means includes:
By supporting the lower end of the opening / closing cover, the opening / closing cover is removably supported,
The open / close cover is opened by rotating the open / close cover about a lower end portion of the open / close cover when the open / close cover is not locked by the locking means. Cutting equipment. The opening / closing cover attaching means includes:
The elastic member mounted on at least the left and right sides of the casing opening and the lower end of the opening / closing cover mounted on the lower side of the casing opening are locked to remove the opening / closing cover. A support member that supports the
The cutting apparatus according to claim 3, wherein when the opening / closing cover is not locked by the locking means, the elastic member presses the opening / closing cover in the opening direction. The locking means includes
A latch portion which is attached to the opening / closing cover and engages with the engagement hole when inserted into the engagement hole provided in the housing;
A switch part for releasing engagement between the latch part and the engagement hole;
The cutting device according to claim 1, wherein the cutting device is provided.

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