JP2005302453A - Manufacturing method for contact sheet having spiral contact and manufacturing method for die for manufacturing contact sheet - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a die for manufacturing a contact sheet having a spiral contact allowing easy and low-cost manufacture. <P>SOLUTION: A resist layer 42 is formed on a base 41, and a spiral-shaped resist pattern 44 is formed by photolithography. A plating layer is then formed on the resist pattern 44, and finally, the base 41 and the resist layer 42 are removed by etching. <P>COPYRIGHT: (C)2006,JPO&NCIPI

Description

  The present invention relates to a contact sheet provided with a large number of spiral contacts that are in contact with an external contact such as an LGA or BGA provided on an electronic component such as an IC (integrated circuit), and in particular a spiral. The present invention relates to a method for manufacturing a contact sheet having a contact and a method for manufacturing a mold for manufacturing a contact sheet.

  For example, the following patent document 1 exists as prior art relating to the spiral contact, and FIGS. 37 to 40 of the patent document 1 disclose a method for manufacturing the spiral contact.

  FIG. 5 is a process diagram showing a manufacturing method described in FIG. 37 in Patent Document 1 as an example of a manufacturing method of a conventional spiral contactor.

  As shown in FIG. 5, in step a, copper plating 3 is applied to the SUS thin plate 2, and a resist film 5 is pasted thereon. In step b, baking and development are performed to form a concave groove portion imitating the shape of the spiral contact 1 on the resist film 5. In step c, nickel plating 6 is applied thereon. In step d, the resist film 5 is removed with a chemical (solvent). In step e, the resist film 5 is applied with a thickness of 50 μm. In step f, the resist film 5 is baked and developed to form the guide frame 7. In step g, after the SUS thin plate 2 is peeled off and removed, the copper plating 3 is removed by etching.

In the conventional manufacturing method, the spiral contact is manufactured through the steps a to g.
JP 2002-175859 A

  However, the conventional spiral contact manufacturing method requires other materials such as copper plating 3, resist film 5, solvent, and etching agent to form the spiral contact 1, thereby reducing the manufacturing cost. There is a problem that is difficult.

  Moreover, in the manufacturing method of the spiral contact, before the step c of forming the spiral contact 1 with the nickel plating 6, the step a of applying the copper plating 3 to the SUS thin plate 2 and attaching the resist film 5 thereon, It is necessary to perform the step b of forming a groove for forming the spiral contact 1 in the resist film 5 by baking and development. Moreover, after the step c, a step d for removing the resist film 5 with a chemical (solvent), a step g for removing the copper plating 3 by etching after peeling off the SUS thin plate 2, and the like are necessary. For this reason, the process for manufacturing the spiral contact 1 is complicated, and it is difficult to shorten the manufacturing time.

  Further, since the resist film 5 is baked and developed twice in the above manufacturing method, the guide frame 7 keeps the individual spiral contacts 1 in a normal state when a positional shift occurs during the baking process. There is a problem that it cannot be held.

  Therefore, using a holding sheet having a plurality of openings, the spiral contact 1 is arranged in the opening, and the edge of the spiral contact 1 is fixed to the edge of the opening with an adhesive. There has been proposed a contact sheet which is held in the manner described above.

  However, the spiral contact 1 has a minute structure including a support portion having a vertical and horizontal dimension of about 450 μm and a contact piece (spiral portion) having a width of about 15 μm to 60 μm provided in the support portion. . For this reason, there is a problem that it is difficult to arrange the spiral contacts with high accuracy in the vertical and horizontal directions so as to correspond to the openings of the holding sheet. Even if it can be arranged with high accuracy, if the holding sheet is placed on the spiral contact 1, the spiral contact will be reversed or displaced, so the spiral contact is fixed to the holding sheet in a normal state. It is difficult.

  The present invention is for solving the above-mentioned conventional problems, and can reduce the manufacturing cost, and also facilitates the manufacturing process and can be manufactured in a short time, and a method for manufacturing a contact sheet having a spiral contactor The purpose is to provide.

  The present invention also provides a method of manufacturing a contact sheet having a spiral contact in which a large number of spiral contacts can be arranged with high accuracy and each spiral contact is fixed to a holding sheet in a normal state. It is an object.

  It is another object of the present invention to provide a mold manufacturing method for manufacturing a contact sheet having the spiral contact.

The present invention relates to a spiral contact provided with a contact piece that spirally extends from the winding start end on the outer peripheral side toward the winding end on the inner peripheral side, and a support portion that continues to the winding start end at a position on the outer peripheral side of the contact piece. Is a method of manufacturing a contact sheet in which a plurality of are arranged,
(A) forming a release film on the spiral concavo-convex pattern formed on the surface of the mold;
(B) a step of integrally forming a plating layer formed on the concave portion of the concave-convex pattern and a plating layer formed on the convex portion by plating the surface of the release coating;
(C) peeling the plating layer from the mold;
(D) a step of fixing a holding sheet to one surface of the plating layer;
(E) a step of separating each spiral contact by polishing the other surface of the plating layer;
It is characterized by having.

  In the present invention, by using a mold that can be repeated, it is possible to eliminate the material that has been required to manufacture spiral contacts so far, so that the manufacturing cost can also be reduced. In addition, since the number of manufacturing steps can be reduced, it is possible to manufacture in a short time.

  Further, by using the mold, the spiral contacts can be arranged with high accuracy. Furthermore, since each spiral contactor is fixed to the holding sheet in a connected state and then separated for each spiral contactor, the spiral contactor in each opening is fixed in an abnormal state such as inversion or misalignment. Can be prevented.

  In the above, in the polishing in the step (e), it is preferable that the plating layer formed on the convex portion is removed.

  By the above means, the individual spiral contacts are separated and the contact piece is supported only by the support portion via the winding start end.

In the step (d), the edge of the opening of the holding sheet having a plurality of openings is fixed to the plating layer serving as the support.
For example, the plating layer can be formed by nickel plating.

Further, the present invention is a method of manufacturing a mold used for manufacturing a contact sheet having a spiral contact described in any of the above,
(F) a step of forming a resist layer on the surface of the substrate;
(G) A spiral resist pattern is formed in the resist layer by providing a photomask having at least one spiral through groove formed on the surface of the resist layer and performing exposure and development. Process,
(H) a step of forming a plating layer having a spiral concavo-convex pattern by plating the surface side of the substrate on which the resist pattern is formed;
(I) the step of removing the substrate and the resist pattern from the plating layer;
It has a spiral contact characterized by having.
For example, a Cu substrate can be used as the base material.

  In the step (i), after the base material is removed by etching, the resist layer remaining on the surface of the base material is removed by etching.

  In the said invention, the metal mold | die which can be used repeatedly can be manufactured simply and at low cost.

  In the present invention, by using a mold that can be used repeatedly, the spiral contacts can be arranged with high accuracy, and the manufacturing cost of the contact sheet can be reduced. Further, since the number of manufacturing steps can be reduced as compared with the conventional case, manufacturing time can be shortened.

  Furthermore, since each spiral contactor is fixed to the holding sheet and then separated into individual spiral contacts, the spiral contactors are held in an abnormal state in which they are reversed or misaligned. It can prevent sticking to the opening part of a sheet | seat.

  Moreover, the mold for manufacturing the spiral contactor can be manufactured easily and at a low manufacturing cost.

  FIG. 1 is a plan view showing a spiral contact manufactured using the method for manufacturing a spiral contact of the present invention, and FIG. 2 is a plan view showing a contact sheet provided with a number of spiral contacts.

  As shown in FIG. 1, the spiral contactor 11 manufactured in the description of FIG. 3 and subsequent figures has a substantially square shape, and a support part 11A that functions as an outer frame, and a spiral from the support part 11A toward the center. And a contact piece 11B extending in a shape. The contact piece 11B has a winding start end 11a continuous from the support portion 11A on the outer peripheral side, and a winding end 11b serving as a free end on the center side. The contact piece 11B is supported in a cantilevered state with respect to the support portion 11A so that the winding end 11b side can be elastically deformed in a normal direction perpendicular to the paper surface with the winding start end 11a as a fulcrum. .

  A contact sheet 20 shown in FIG. 2 is a structure in which a large number of spiral contacts 11 are fixedly arranged in a matrix (lattice or grid) on an insulating holding sheet 21 made of polyimide or the like. . The holding sheet 21 is formed with circular openings 22 arranged in a matrix, and the support portions 11A of the individual spiral contacts 11 are fixed to the edges of the openings 22 with an adhesive or the like. Each spiral contact 11 is fixed with high accuracy on the front surface side of the support portion 11 </ b> A on the back surface of the holding sheet 21, and the contact piece 11 </ b> B is mainly exposed through the opening 22 on the front surface side of the holding sheet 21. ing.

  The contact sheet 20 is mounted on, for example, an inspection device (not shown) for an electronic component such as a semiconductor and is arranged on the bottom surface of the electronic component, such as a spherical contact (BGA) or a cone-shaped contact (CGA). The electronic component and the inspection circuit provided outside the inspection apparatus are connected by being brought into contact with the external contact.

  FIG. 3 is a process diagram showing a method for manufacturing a spiral contact according to the present invention, wherein A is a process for forming a release film on a mold, B is a plating process for forming a plating layer on the mold, and C is a mold from the mold. A step of peeling the plating layer, D is a step of fixing the holding sheet, and E is a step of polishing the plating layer. However, FIG. 3 shows one of many spiral contacts 11 formed simultaneously.

  In the step shown in FIG. 3A, a conductive mold 30 is prepared in which a concavo-convex pattern 31 simulating the support portion 11A and the contact piece 11B of the spiral contactor 11 is formed. The release coating layer 32 is formed by applying an acid or the like.

  In the step shown in FIG. 3B, nickel plating is applied to the mold 30 by electroplating. In the electroplating, a nickel plating layer 34 is formed on the release film layer 32 laminated in the recesses of the uneven pattern 31 and on the surfaces of the protrusions. The plating at this time is formed in a state in which a plating layer 34A formed in the concave portion of the concavo-convex pattern 31 and a plating layer 34B protruding from the concave portion and formed in the convex portion are integrally continuous.

  Next, in the step shown in FIG. 3C, the plating layer 34 is peeled from the mold 30. In the step shown in FIG. 3D, the adhesive layer 23 of the holding sheet 21 is fixed to the lower surface (the surface on the peeling side) of the plating layer 34. The adhesive layer 23 is fixed to a portion of the plated layer 34 that becomes the support portion 11 </ b> A of the spiral contactor 11.

  In this process, since each spiral contact in the state in which the holding sheet 21 is connected can be fixed, the opening of the holding sheet 21 in an abnormal state in which the spiral contact 11 has been reversed or misaligned. It can prevent sticking to the edge part of 22. FIG.

  Finally, in the step shown in FIG. 3E, the contact sheet 20 is completed by performing a polishing operation. That is, the surface of the plating layer 34 (the surface on which the holding sheet 21 is not attached) is polished, and the plating layer 34B that connects the adjacent spiral contacts 11 is removed. By this polishing operation, the individual spiral contacts 11 are separated from each other, and the contact piece 11B can be elastically deformed with respect to the support portion 11A with the winding start end 11a as a fulcrum. 3E corresponds to a cross-sectional view taken along line EE in FIG.

  Next, the manufacturing method of the metal mold | die for manufacturing the contact sheet 20 which has the said spiral contactor is demonstrated.

  FIG. 4 shows a mold manufacturing method, wherein A is a resist process for forming a resist layer on a substrate, B is a photolithography process for forming a resist pattern, C is a plating process for forming a plating layer, and D is unnecessary. The etching process which removes a part is shown.

  In the step shown in FIG. 4A, a planar base material 41 made of a metal such as Cu is prepared, and a resist layer 42 is formed on the surface of the base material 41.

  In the step shown in FIG. 4B, a photomask (not shown) in which spiral through grooves are formed is prepared, UV light is exposed with the photomask placed on the surface of the resist layer 42, and then development processing is performed. Is done. By the exposure / current processing, a spiral resist pattern 44 is formed by the resist layer 42 remaining on the base material 41 and the portion from which the resist layer 42 has been removed.

  In the step shown in FIG. 4C, the mold 30 is formed by electroplating the resist pattern 44 by electroless plating or electroplating. At this time, the concave / convex pattern 31 to which the resist pattern 44 is transferred is formed on the mold 30. As a kind of plating at this time, any metal that is different from the base material 41 and can be plated may be used. For example, nickel (Ni) or a nickel alloy may be used.

  In the step shown in FIG. 4D, the base material 41 and the resist layer 42 are removed by etching. When the base material 41 is made of Cu, it can be dissolved and removed using a solvent such as a cupric chloride solution. Since the mold 30 and the base material 41 are different in metal type, the mold 30 is not dissolved or removed together with the base material 41 during the etching. The resist layer 42 can be dissolved and removed using a strong alkaline solution. Thus, the metal mold | die 30 which has the uneven | corrugated pattern 31 on one surface can be completed by removing the said base material 41 and the resist layer 42 from the state of FIG. 4C.

The top view which shows the spiral contactor manufactured using the manufacturing method of the spiral contactor of this invention, A plan view showing a contact sheet provided with a number of spiral contacts; It is process drawing which shows the manufacturing method of the spiral contactor of this invention, A is the process of forming a release film in a metal mold | die, B is the plating process of forming a plating layer in a metal mold | die, C is a plating layer from a metal mold | die. A step of peeling, D a step of fixing the holding sheet, E a step of polishing the plating layer, A method of manufacturing a mold, wherein A is a resist process for forming a resist layer on a substrate, B is a photolithography process for forming a resist pattern, C is a plating process for forming a plating layer, and D is an unnecessary part removal. An etching process, As an example of a conventional spiral contactor manufacturing method, a process diagram showing the manufacturing method described in FIG.

Explanation of symbols

DESCRIPTION OF SYMBOLS 11 Spiral contactor 11A Support part 11B Contact piece 11a Winding start end 11b Winding end point 20 Contact sheet 21 Holding sheet 22 Opening part 23 Adhesive layer 30 Mold 31 Concavity and convexity pattern 32 Release film layer 34 Plating layer 41 Base material 42 Resist layer 44 Resist pattern

Claims (7)

A plurality of spiral contacts each having a contact piece that spirally extends from the winding start end on the outer peripheral side toward the winding end on the inner peripheral side, and a support portion that is continuous with the winding start end at a position on the outer peripheral side of the contact piece. A contact sheet manufacturing method comprising:
(A) forming a release film on the spiral concavo-convex pattern formed on the surface of the mold;
(B) a step of integrally forming a plating layer formed on the concave portion of the concave-convex pattern and a plating layer formed on the convex portion by plating the surface of the release coating;
(C) peeling the plating layer from the mold;
(D) a step of fixing a holding sheet to one surface of the plating layer;
(E) a step of separating each spiral contact by polishing the other surface of the plating layer;
A method for producing a contact sheet having a spiral contact, characterized by comprising:   The method for manufacturing a contact sheet having a spiral contact according to claim 1, wherein the plating layer formed on the convex portion is removed in the polishing in the step (e).   The contact sheet having a spiral contact according to claim 1, wherein in the step (d), an edge of the opening of the holding sheet having a plurality of openings is fixed to a plating layer serving as the support. Method.   The method for producing a contact sheet having a spiral contact according to claim 1, wherein the plating layer is formed by nickel plating. A method for producing a mold used for producing a contact sheet having a spiral contact according to any one of claims 1 to 4,
(F) a step of forming a resist layer on the surface of the substrate;
(G) A spiral resist pattern is formed in the resist layer by providing a photomask having at least one spiral through groove formed on the surface of the resist layer and performing exposure and development. Process,
(H) a step of forming a plating layer having a spiral concavo-convex pattern by plating the surface side of the substrate on which the resist pattern is formed;
(I) the step of removing the substrate and the resist pattern from the plating layer;
A manufacturing method of a mold for manufacturing a contact sheet having a spiral contact.   The manufacturing method of the metal mold | die for contact sheet manufacture which has a spiral contact of Claim 5 using Cu board | substrate as said base material.   The contact having a spiral contact according to claim 5 or 6, wherein in the step (i), the resist layer remaining on the surface of the substrate is removed by etching after the substrate is removed by etching. A manufacturing method of a sheet manufacturing mold.

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