JP2005296813A - 超音波洗浄器 - Google Patents
超音波洗浄器 Download PDFInfo
- Publication number
- JP2005296813A JP2005296813A JP2004117112A JP2004117112A JP2005296813A JP 2005296813 A JP2005296813 A JP 2005296813A JP 2004117112 A JP2004117112 A JP 2004117112A JP 2004117112 A JP2004117112 A JP 2004117112A JP 2005296813 A JP2005296813 A JP 2005296813A
- Authority
- JP
- Japan
- Prior art keywords
- piezoelectric body
- columnar piezoelectric
- fiber reinforced
- cleaning tank
- ultrasonic cleaner
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000011347 resin Substances 0.000 claims abstract description 109
- 229920005989 resin Polymers 0.000 claims abstract description 109
- 238000004140 cleaning Methods 0.000 claims abstract description 102
- 239000000835 fiber Substances 0.000 claims abstract description 69
- 239000011230 binding agent Substances 0.000 claims abstract description 36
- 210000004177 elastic tissue Anatomy 0.000 claims description 24
- 239000002184 metal Substances 0.000 claims description 24
- 229910052751 metal Inorganic materials 0.000 claims description 24
- 238000005406 washing Methods 0.000 abstract description 8
- 239000007788 liquid Substances 0.000 description 17
- 239000000463 material Substances 0.000 description 5
- 238000004519 manufacturing process Methods 0.000 description 4
- 229920000049 Carbon (fiber) Polymers 0.000 description 3
- 239000004917 carbon fiber Substances 0.000 description 3
- 239000003822 epoxy resin Substances 0.000 description 3
- 239000011521 glass Substances 0.000 description 3
- 238000009434 installation Methods 0.000 description 3
- 239000011810 insulating material Substances 0.000 description 3
- 239000007769 metal material Substances 0.000 description 3
- 229920000647 polyepoxide Polymers 0.000 description 3
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 3
- 239000004696 Poly ether ether ketone Substances 0.000 description 2
- 239000003929 acidic solution Substances 0.000 description 2
- 239000012670 alkaline solution Substances 0.000 description 2
- 239000000919 ceramic Substances 0.000 description 2
- 230000005684 electric field Effects 0.000 description 2
- 238000009429 electrical wiring Methods 0.000 description 2
- VNWKTOKETHGBQD-UHFFFAOYSA-N methane Chemical compound C VNWKTOKETHGBQD-UHFFFAOYSA-N 0.000 description 2
- 238000012856 packing Methods 0.000 description 2
- 229920002530 polyetherether ketone Polymers 0.000 description 2
- 229910052573 porcelain Inorganic materials 0.000 description 2
- 239000004065 semiconductor Substances 0.000 description 2
- 238000004506 ultrasonic cleaning Methods 0.000 description 2
- 235000012431 wafers Nutrition 0.000 description 2
- 229910000906 Bronze Inorganic materials 0.000 description 1
- 239000004593 Epoxy Substances 0.000 description 1
- OAICVXFJPJFONN-UHFFFAOYSA-N Phosphorus Chemical compound [P] OAICVXFJPJFONN-UHFFFAOYSA-N 0.000 description 1
- 239000004952 Polyamide Substances 0.000 description 1
- 239000004962 Polyamide-imide Substances 0.000 description 1
- BZHJMEDXRYGGRV-UHFFFAOYSA-N Vinyl chloride Chemical compound ClC=C BZHJMEDXRYGGRV-UHFFFAOYSA-N 0.000 description 1
- 229920006231 aramid fiber Polymers 0.000 description 1
- 239000010974 bronze Substances 0.000 description 1
- 238000006243 chemical reaction Methods 0.000 description 1
- KUNSUQLRTQLHQQ-UHFFFAOYSA-N copper tin Chemical compound [Cu].[Sn] KUNSUQLRTQLHQQ-UHFFFAOYSA-N 0.000 description 1
- 230000007423 decrease Effects 0.000 description 1
- 230000005284 excitation Effects 0.000 description 1
- 230000001747 exhibiting effect Effects 0.000 description 1
- -1 fluororesin) Substances 0.000 description 1
- HFGPZNIAWCZYJU-UHFFFAOYSA-N lead zirconate titanate Chemical compound [O-2].[O-2].[O-2].[O-2].[O-2].[Ti+4].[Zr+4].[Pb+2] HFGPZNIAWCZYJU-UHFFFAOYSA-N 0.000 description 1
- 229910052451 lead zirconate titanate Inorganic materials 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 238000003801 milling Methods 0.000 description 1
- 239000003960 organic solvent Substances 0.000 description 1
- 230000002093 peripheral effect Effects 0.000 description 1
- 239000005011 phenolic resin Substances 0.000 description 1
- 229920002647 polyamide Polymers 0.000 description 1
- 229920006122 polyamide resin Polymers 0.000 description 1
- 229920002312 polyamide-imide Polymers 0.000 description 1
- 229920005668 polycarbonate resin Polymers 0.000 description 1
- 239000004431 polycarbonate resin Substances 0.000 description 1
- 229920001721 polyimide Polymers 0.000 description 1
- 239000009719 polyimide resin Substances 0.000 description 1
- HBMJWWWQQXIZIP-UHFFFAOYSA-N silicon carbide Chemical compound [Si+]#[C-] HBMJWWWQQXIZIP-UHFFFAOYSA-N 0.000 description 1
- 229910010271 silicon carbide Inorganic materials 0.000 description 1
- 229910052709 silver Inorganic materials 0.000 description 1
- 239000004332 silver Substances 0.000 description 1
- 239000000243 solution Substances 0.000 description 1
- 229910001220 stainless steel Inorganic materials 0.000 description 1
- 239000010935 stainless steel Substances 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- 229920003002 synthetic resin Polymers 0.000 description 1
- 239000000057 synthetic resin Substances 0.000 description 1
- 239000010409 thin film Substances 0.000 description 1
- 229920006337 unsaturated polyester resin Polymers 0.000 description 1
Images
Landscapes
- Cleaning By Liquid Or Steam (AREA)
- Apparatuses For Generation Of Mechanical Vibrations (AREA)
- Cleaning Or Drying Semiconductors (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2004117112A JP2005296813A (ja) | 2004-04-12 | 2004-04-12 | 超音波洗浄器 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2004117112A JP2005296813A (ja) | 2004-04-12 | 2004-04-12 | 超音波洗浄器 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JP2005296813A true JP2005296813A (ja) | 2005-10-27 |
| JP2005296813A5 JP2005296813A5 (https=) | 2007-05-31 |
Family
ID=35329007
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2004117112A Pending JP2005296813A (ja) | 2004-04-12 | 2004-04-12 | 超音波洗浄器 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP2005296813A (https=) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2008068221A (ja) * | 2006-09-15 | 2008-03-27 | Pre-Tech Co Ltd | 超音波洗浄装置 |
| CN103506348A (zh) * | 2013-03-26 | 2014-01-15 | 新能(张家港)能源有限公司 | 一种二甲醚取样器清洗装置 |
| CN113663980A (zh) * | 2021-08-20 | 2021-11-19 | 陕西师范大学 | 多方向振动的超声换能器、超声清洗装置和清洗方法 |
-
2004
- 2004-04-12 JP JP2004117112A patent/JP2005296813A/ja active Pending
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2008068221A (ja) * | 2006-09-15 | 2008-03-27 | Pre-Tech Co Ltd | 超音波洗浄装置 |
| CN103506348A (zh) * | 2013-03-26 | 2014-01-15 | 新能(张家港)能源有限公司 | 一种二甲醚取样器清洗装置 |
| CN113663980A (zh) * | 2021-08-20 | 2021-11-19 | 陕西师范大学 | 多方向振动的超声换能器、超声清洗装置和清洗方法 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| A521 | Written amendment |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20070404 |
|
| A621 | Written request for application examination |
Free format text: JAPANESE INTERMEDIATE CODE: A621 Effective date: 20070404 |
|
| A977 | Report on retrieval |
Free format text: JAPANESE INTERMEDIATE CODE: A971007 Effective date: 20090602 |
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| A131 | Notification of reasons for refusal |
Free format text: JAPANESE INTERMEDIATE CODE: A131 Effective date: 20090901 |
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| A02 | Decision of refusal |
Effective date: 20100105 Free format text: JAPANESE INTERMEDIATE CODE: A02 |