JP2005288582A - Covering member - Google Patents

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JP2005288582A
JP2005288582A JP2004104538A JP2004104538A JP2005288582A JP 2005288582 A JP2005288582 A JP 2005288582A JP 2004104538 A JP2004104538 A JP 2004104538A JP 2004104538 A JP2004104538 A JP 2004104538A JP 2005288582 A JP2005288582 A JP 2005288582A
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periodic table
covering member
group
film
oxygen
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Toshiyuki Watanabe
敏行 渡邊
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Tungaloy Corp
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Tungaloy Corp
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Abstract

<P>PROBLEM TO BE SOLVED: To provide a covering member having excellent lubricativeness to allow prolongation of the lifetime of machining tips, a machining tool such as drill, end mill, etc., and an anti-abrasive tool used in high-temperature environment and also sliding components and so on which are used under severe machining conditions such as in dry type machining, high-speed machining, etc. <P>SOLUTION: The covering member formed by putting a coating film on the surface of a base material to serve as a lubricating film in which at least one layer of the coating film consists of at least one of the elements belonging to the groups 1a and 2a according to the Periodic Table, at least one of the elements belonging to the group 7b according to the Periodic Table, and oxygen, has excellent lubricativeness. Therefore, this can prolong the lifetime of the machining tips used under severe machining conditions such as in dry type machining, high-speed machining, etc., machining tool such as drill, end mill, etc., and an anti-abrasive tool used in a high-temperature environment and also sliding components and so on. <P>COPYRIGHT: (C)2006,JPO&NCIPI

Description

本発明は、切削チップ、ドリル、エンドミルなどの切削工具、耐摩耗工具、摺動部品などに使用される被覆部材に関する。 The present invention relates to a covering member used for cutting tools such as cutting tips, drills, and end mills, wear resistant tools, sliding parts, and the like.

TiN,TiCN,TiC,(TiAl)N,Al23などの硬質膜を被覆した被覆部材が、切削工具、耐摩耗工具または摺動部品に使用され、これらの寿命延長に貢献している。しかし、切削油あるいは潤滑油を使用しないドライ条件では、摩擦に伴う応力や熱の発生によって硬質膜が剥離や酸化を起こすために、寿命延長が困難であると言う問題がある。そこで潤滑膜を被覆することにより、摩擦係数の低下させ、潤滑性、耐溶着性を付与して寿命延長を図る被覆部材がある。潤滑膜を被覆した被覆部材の従来技術としては、基材表面にフッ化カルシウムなどのフッ化物含有膜を被覆した被覆部材がある(例えば、特許文献1参照。)。 A covering member coated with a hard film such as TiN, TiCN, TiC, (TiAl) N, or Al 2 O 3 is used for a cutting tool, an abrasion resistant tool, or a sliding part, and contributes to extending the life of these members. However, under dry conditions in which no cutting oil or lubricating oil is used, there is a problem that it is difficult to extend the life because the hard film is peeled off or oxidized due to the generation of stress and heat accompanying friction. Therefore, there is a covering member that coats a lubricating film to reduce the coefficient of friction and provide lubricity and welding resistance to extend the life. As a conventional technique of a covering member coated with a lubricating film, there is a covering member in which a base material surface is coated with a fluoride-containing film such as calcium fluoride (see, for example, Patent Document 1).

特開2003−321763号公報JP 2003-321863 A

基材表面にフッ化カルシウムなどのフッ化物含有膜を被覆した被覆部材は、高温下での潤滑性に優れるものの、摩耗やすく、被削材の仕上げ面品位が劣るという問題がある。本発明は、こうした問題を解決するものであり、乾式切削加工、高速切削加工などの厳しい切削条件下で使用される切削チップ、ドリル、エンドミルなどの切削工具、高温環境で使用される耐摩耗工具、摺動部品等の寿命を延長させる潤滑性に優れた被覆部材の提供を目的とする。 A covering member in which a surface of a base material is coated with a fluoride-containing film such as calcium fluoride is excellent in lubricity at high temperatures, but has a problem that it is easy to wear and the finished surface quality of a work material is inferior. The present invention solves these problems, and cutting tools such as cutting tips, drills and end mills used under severe cutting conditions such as dry cutting and high-speed cutting, and wear-resistant tools used in high-temperature environments. An object of the present invention is to provide a covering member with excellent lubricity that extends the life of sliding parts and the like.

本発明者は、潤滑性にすぐれた被覆部材について研究を行った結果、基材の表面に被覆した周期律表1a、2a族元素のハロゲン化物膜に酸素を含有させると、耐摩耗性に優れ、切削工具として用いたとき被削材の仕上げ面に光沢が得られるという知見を得た。 As a result of researches on coated members with excellent lubricity, the present inventor has excellent wear resistance when oxygen is contained in the halide film of the periodic table 1a and 2a elements coated on the surface of the base material. The knowledge that gloss was obtained on the finished surface of the work material when used as a cutting tool was obtained.

すなわち、本発明は、基材の表面に被膜を被覆した被覆部材において、被膜の少なくとも1層は、周期律表1a,2a族元素の中から選ばれた少なくとも1種と、周期律表7b族元素の中から選ばれた少なくとも1種と、酸素とからなる潤滑膜である被覆部材である。 That is, according to the present invention, in the covering member in which the surface of the base material is coated, at least one layer of the coating includes at least one selected from the periodic table 1a and 2a group elements and the periodic table 7b group. It is a covering member which is a lubricating film comprising at least one selected from elements and oxygen.

本発明被覆部材の潤滑膜は、周期律表1a,2a族元素の中から選ばれた少なくとも1種と、周期律表7b族元素の中から選ばれた少なくとも1種と、酸素とからなる。周期律表1a,2a族元素のハロゲン化物は潤滑性に優れるが、これらのハロゲン化物に酸素を添加することによって潤滑性を低下させずに耐摩耗性を向上させることができた。酸素を添加することで潤滑膜結晶を微細化して耐チッピング性を向上させる効果もある。本発明被覆部材を切削工具として用いた場合、被削材の仕上げ面に光沢が見られる。これは、被削材表面と潤滑膜が反応もしくは潤滑膜に含まれる周期律表1a、2a族元素が被削材表面に拡散して被削材の快削性を向上させるためと考えられる。本発明の潤滑膜として具体的には、Li(F0.9,O0.10.9,Ca(F0.9,O0.11.9,Mg(F0.9,O0.11.9などを挙げることができる。本発明の潤滑膜の中でも、周期律表1a、2a族元素のハロゲン化物の中から選ばれた2種以上と、周期律表7b族元素の中の1種以上と、酸素とからなる潤滑膜は、基材または下地膜との密着性に優れるため好ましい。潤滑膜の平均膜厚は0.05〜5μmが好ましい。これは、0.05μm未満では潤滑性向上の効果が少なく、5μmを超えると剥離しやすくなるためである。 The lubricating film of the covering member of the present invention comprises oxygen and at least one selected from Group 1a and 2a elements of the periodic table, at least one selected from Group 7b of the periodic table, and oxygen. Although the halides of Group 1a and 2a elements of the periodic table are excellent in lubricity, the addition of oxygen to these halides can improve the wear resistance without reducing the lubricity. Addition of oxygen also has an effect of improving the chipping resistance by refining the lubricating film crystal. When the coated member of the present invention is used as a cutting tool, gloss is seen on the finished surface of the work material. This is presumably because the surface of the work material and the lubricating film react or the periodic table 1a and 2a elements contained in the lubricating film diffuse into the work material surface to improve the free-cutting property of the work material. Specific examples of the lubricating film of the present invention include Li (F 0.9 , O 0.1 ) 0.9 , Ca (F 0.9 , O 0.1 ) 1.9 , Mg (F 0.9 , O 0.1 ) 1.9, and the like. Among the lubricating films of the present invention, a lubricating film comprising two or more selected from the halides of the periodic table 1a and group 2a elements, one or more selected from the group 7b elements of the periodic table, and oxygen Is preferable because of its excellent adhesion to the substrate or the base film. The average film thickness of the lubricating film is preferably 0.05 to 5 μm. This is because if it is less than 0.05 μm, the effect of improving the lubricity is small, and if it exceeds 5 μm, it is easy to peel.

本発明被覆部材の潤滑膜をA(Hax,Oyzと表したとき、Aは周期律表1a,2a族元素の中から選ばれた少なくとも1種を表し、Haは周期律表7b族元素の中から選ばれた少なくとも1種を表し、Oは酸素を表し、xは周期律表7b族元素と酸素の合計に対する周期律表7b族元素の原子比を表し、yは周期律表7b族元素と酸素の合計に対する酸素の原子比を表し、zは周期律表1a,2a族元素に対する周期律表7b族元素と酸素の合計の原子比を表し、x、y、zは、それぞれ、x+y=1、0.80≦x≦0.95、0.05≦y≦0.20、0.8≦z≦2.0を満足すると好ましい。yが0.05以上になると酸素添加による耐摩耗性向上の効果が見られるが、yが0.20を超えると潤滑膜内にボイド(空隙)が発生して耐摩耗性を低下させる。zが0.8未満になると金属成分(A)と非金属成分(HaおよびO)との化学量論組成比から大きく外れて結晶性が低下して耐摩耗性を低下させ、zが2.0を超える被膜を作製することは実用上難しい。なお、Aが周期律表1a族を主成分とするときは0.8≦z≦1.0が好ましく、Aが周期律表2a族を主成分とするときは1.6≦z≦2.0が好ましい。 When the lubricating film of the coated member of the present invention is represented as A (Ha x , O y ) z , A represents at least one selected from the periodic table 1a and 2a group elements, and Ha represents the periodic table 7b. Represents at least one selected from group elements, O represents oxygen, x represents the atomic ratio of group 7b elements of the periodic table to the sum of group 7b elements and oxygen, and y represents the periodic table 7a represents the atomic ratio of oxygen to the total of group 7b elements and oxygen, z represents the atomic ratio of the total of group 7b elements and oxygen to periodic table 1a, 2a group elements, and x, y, z represent X + y = 1, 0.80 ≦ x ≦ 0.95, 0.05 ≦ y ≦ 0.20, 0.8 ≦ z ≦ 2.0 are satisfied. When y is 0.05 or more, the effect of improving the wear resistance by adding oxygen is seen. However, when y exceeds 0.20, voids (voids) are generated in the lubricating film and the wear resistance is lowered. When z is less than 0.8, the crystal component is greatly deviated from the stoichiometric composition ratio of the metal component (A) and the non-metal components (Ha and O), and the wear resistance is decreased. It is practically difficult to produce a film exceeding 0. In addition, when A has the periodic table group 1a as the main component, 0.8 ≦ z ≦ 1.0 is preferable, and when A has the periodic table group 2a as the main component, 1.6 ≦ z ≦ 2. 0 is preferred.

本発明被覆部材の潤滑膜は、立方晶からなる立方晶潤滑膜であり、X線回折測定における立方晶潤滑膜の(200)面のX線回折ピークの半価幅は、0.4〜1.8度であると好ましい。潤滑膜が立方晶からなる立方晶潤滑膜であると硬さが高く耐摩耗性に優れる。潤滑膜の酸素含有量を増加させると半価幅が増加する。半価幅が0.4度以上を示すように酸素を添加させると耐摩耗性を向上させ、半価幅が1.8度を超えるほど酸素を添加させると潤滑膜内にボイドが発生して耐摩耗性を低下させる。 The lubricating film of the coated member of the present invention is a cubic lubricating film made of cubic crystals, and the half width of the X-ray diffraction peak of the (200) plane of the cubic lubricating film in the X-ray diffraction measurement is 0.4 to 1. .8 degrees is preferable. If the lubricating film is a cubic lubricating film composed of cubic crystals, the hardness is high and the wear resistance is excellent. Increasing the oxygen content of the lubricating film increases the half width. When oxygen is added so that the half width is 0.4 degrees or more, wear resistance is improved, and when oxygen is added so that the half width exceeds 1.8 degrees, voids are generated in the lubricating film. Reduces wear resistance.

本発明被覆部材の被膜の少なくとも1層は、周期律表4a、5a、6a族元素、アルミニウム、シリコンの炭化物、窒化物、酸化物、硼化物およびこれらの相互固溶体の中から選ばれた少なくとも1種からなる硬質膜であると、耐摩耗性を高くできるため好ましい。硬質膜として具体的には、TiC、TiN、Ti(C,N)、Ti(C,N,O)、(Ti,Al)N、(Ti,Al)(C,N)、(Ti,Al)(C,N,O)、(Ti,Si)N、(Cr,Si)N、ZrN、HfN、VN、Al23、ZrO2などを挙げることができる。基材に近い内層を硬質膜、表面側の外層を潤滑膜とすると、被膜の耐摩耗性を向上させるため、さらに好ましい。硬質膜の平均膜厚が1μm未満のとき耐摩耗性を向上させる効果は小さく、逆に20μmを超えて厚くなると被膜が剥離しやすくなるとともに、被覆部材の強度を低下させる。そのため硬質膜の平均膜厚は、1〜20μmが好ましい。また潤滑膜と接する硬質膜は、面心立方構造であり、かつ、X線回折測定における面心立方構造の硬質膜の(111)面のX線回折強度Ih(111)に対する面心立方構造の硬質膜の(200)面のX線回折強度Ih(200)の強度比(Ih(200)/Ih(111))が2以上、実用上2〜30であると、硬質膜と潤滑膜との密着性が高くなるため、特に好ましい。 At least one layer of the coating of the covering member of the present invention is at least one selected from the group 4a, 5a and 6a elements of the periodic table, aluminum, silicon carbide, nitride, oxide, boride, and their mutual solid solutions. A hard film made of seeds is preferable because it can increase wear resistance. Specifically, as the hard film, TiC, TiN, Ti (C, N), Ti (C, N, O), (Ti, Al) N, (Ti, Al) (C, N), (Ti, Al ) (C, N, O), (Ti, Si) N, (Cr, Si) N, ZrN, HfN, VN, Al 2 O 3 , ZrO 2 and the like. If the inner layer close to the substrate is a hard film and the outer layer on the surface side is a lubricating film, it is more preferable because the wear resistance of the film is improved. When the average thickness of the hard film is less than 1 μm, the effect of improving the wear resistance is small, and conversely, when the thickness exceeds 20 μm, the coating is easily peeled off and the strength of the covering member is reduced. Therefore, the average film thickness of the hard film is preferably 1 to 20 μm. Further, the hard film in contact with the lubricating film has a face-centered cubic structure and has a face-centered cubic structure with respect to the X-ray diffraction intensity Ih (111) of the (111) plane of the hard film having the face-centered cubic structure in the X-ray diffraction measurement. When the intensity ratio (Ih (200) / Ih (111)) of the X-ray diffraction intensity Ih (200) of the (200) plane of the hard film is 2 or more and practically 2 to 30, the hard film and the lubricating film This is particularly preferable because of high adhesion.

本発明被覆部材の基材は、特に限定されないが、耐摩耗性を重視する用途には、耐摩耗性に優れた、WC−Co系,WC−(W,Ti,Ta)C−Co系,WC−TaC−Co系に代表される超硬合金、TiC−Mo−Ni系,TiCN−WC−TaC−Ni−Co系などのサーメット、Al23系,Al23−TiC系,Si34系などのセラミックス、立方晶窒化硼素焼結体、高速度鋼、工具鋼が好ましい。 The substrate of the coated member of the present invention is not particularly limited, but for applications in which wear resistance is important, WC-Co-based, WC- (W, Ti, Ta) C-Co-based, which has excellent wear resistance, cemented carbide represented by WC-TaC-Co based, TiC-Mo-Ni system, cermet such as TiCN-WC-TaC-Ni- Co -based, Al 2 O 3 system, Al 2 O 3 -TiC based, Si Ceramics such as 3 N 4 series, cubic boron nitride sintered body, high speed steel and tool steel are preferred.

本発明被覆部材の用途の一つとして、切削チップ、ドリル、エンドミルに代表される切削工具、耐摩耗工具、摺動部品などを挙げることができる。その中でも、本発明被覆部材を切削工具として用いると優れた潤滑性を示すため特に好ましい。焼結合金の切削加工などに利用されると非常に好ましい。 As one of the uses of the covering member of the present invention, cutting tools represented by cutting tips, drills, end mills, wear resistant tools, sliding parts and the like can be mentioned. Among these, it is particularly preferable to use the coated member of the present invention as a cutting tool because it exhibits excellent lubricity. It is very preferable when used for cutting a sintered alloy.

本発明被覆部材を切削工具として用いる場合には、切削工具の切れ刃稜線から1mm離れたすくい面における潤滑膜の平均膜厚をdrと表し、切削工具の切れ刃稜線から1mm離れた逃げ面における潤滑膜の平均膜厚をdfと表したとき、drに対するdfの膜厚比(df/dr)は0.05〜20であると好ましい。(df/dr)が0.05未満、または、(df/dr)が20を超えると、切削加工時に、膜厚が薄いすくい面または膜厚が薄い逃げ面において被膜の摩耗が進行し、逃げ面とすくい面のバランスの欠いた摩耗により溶着と欠損が著しくなるためである。 When the coated member of the present invention is used as a cutting tool, the average film thickness of the lubricating film on the rake face 1 mm away from the cutting edge of the cutting tool is represented by dr, and on the flank 1 mm away from the cutting edge of the cutting tool. When the average film thickness of the lubricating film is expressed as df, the film thickness ratio of df to dr (df / dr) is preferably 0.05 to 20. When (df / dr) is less than 0.05 or (df / dr) exceeds 20, the wear of the coating proceeds on the rake face having a small film thickness or the flank face having a thin film thickness during the cutting process, so This is because welding and chipping are remarkably caused by wear with a lack of balance between the surface and the rake face.

本発明被覆部材の製造方法としては、例えば、基材に物理蒸着法または化学蒸着法によって潤滑膜を被覆する方法を挙げることができる。物理蒸着法によって潤滑膜を被覆する方法として具体的には、アンバランスドマグネトロン装置を用いて、A(Hax,Oyzで示される金属化合物をターゲットとし、これに直流パルス電圧、高周波電圧、もしくはマイクロ波電圧を印加して潤滑膜を被覆する方法、または、AHazで示される金属化合物をターゲットとし、酸素ガスを供給しながら、ターゲットに直流パルス電圧、高周波電圧、もしくはマイクロ波電圧を印加して潤滑膜を被覆する方法を挙げることができる。内層として硬質膜、外層に潤滑膜を被覆する場合、連続プロセスで成膜すると密着性を高めるため好ましい。連続プロセスで成膜する装置として具体的には、真空槽に硬質膜を形成するためのアーク式イオンプレーティング装置と、潤滑膜を形成するためのアンバランスドマグネトロン装置の両方を備えた被覆装置を挙げることができる。 As a manufacturing method of this invention covering member, the method of coat | covering a lubricating film with a physical vapor deposition method or a chemical vapor deposition method can be mentioned, for example. Specifically, as a method of coating a lubricating film by physical vapor deposition, an unbalanced magnetron apparatus is used to target a metal compound represented by A (Ha x , O y ) z , and a direct current pulse voltage, high frequency voltage or a method for coating a lubricant film by applying a microwave voltage, or to target a metal compound represented by AHa z, while supplying oxygen gas, DC pulse voltage to the target, a high frequency voltage or microwave voltage, And a method of coating the lubricating film by applying. In the case where a hard film is coated as an inner layer and a lubricating film is coated on an outer layer, it is preferable to form the film by a continuous process because adhesion is improved. Specifically, as an apparatus for forming a film in a continuous process, a coating apparatus having both an arc type ion plating apparatus for forming a hard film in a vacuum chamber and an unbalanced magnetron apparatus for forming a lubricating film Can be mentioned.

本発明被覆部材は潤滑性と耐摩耗性に優れる。本発明被覆部材を切削工具として用いた場合、高速加工時でも潤滑性と耐摩耗性が低下しにくく、光沢のある被削材の仕上げ面を得ることができる。 The coated member of the present invention is excellent in lubricity and wear resistance. When the coated member of the present invention is used as a cutting tool, the lubricity and wear resistance are hardly lowered even during high-speed machining, and a glossy finished surface of the work material can be obtained.

基材として、市販の超硬合金製ソリッドドリル(φ8.0mm、P30相当、組成:WC−8wt%Co−10wt%(Ta、Ti)C,硬さ:HRA=91.5)を準備した。硬質膜と本発明の潤滑膜を被覆処理するため、硬質膜を被覆するアーク式イオンプレーティング法のターゲット2極を装備し、かつ本発明の潤滑膜を被覆するアンバランスドマグネトロン法のターゲット1極を装備した複合型PVD装置を用意した。 A commercially available solid drill (φ 8.0 mm, equivalent to P30, composition: WC-8 wt% Co-10 wt% (Ta, Ti) C, hardness: HRA = 91.5) was prepared as a base material. In order to coat the hard film and the lubricating film of the present invention, the target 1 of the unbalanced magnetron method equipped with the arc-type ion plating method target 2 covering the hard film and the lubricating film of the present invention is provided. A composite PVD apparatus equipped with a pole was prepared.

基材ドリルは、まず前処理として、スケールや汚れをブラシで除去した後、脱脂洗浄した。このドリルを清浄な治具に固定し、複合型PVD装置内に挿入して1×10-3Paまで予備排気し、真空中500℃に加熱して表面に付着した水分を除去した。さらにArガスを1Paまで導入し、ドリルに対し、−600Vのバイアス電圧をかけて30分間保持することにより、ドリルをスパッタエッチングして、表面を清浄化した。次いで、表1に示した被覆条件(ガス成分と流量,バイアス電圧,処理時間)でもって内層に硬質膜、外層に潤滑膜を順次被覆処理することよって、本発明品1〜3と比較品1〜3のドリルを得た。 The base material drill was first degreased and cleaned after removing scales and dirt with a brush as a pretreatment. This drill was fixed to a clean jig, inserted into a composite PVD apparatus, preliminarily evacuated to 1 × 10 −3 Pa, and heated to 500 ° C. in a vacuum to remove water adhering to the surface. Further, Ar gas was introduced up to 1 Pa, and a bias voltage of −600 V was applied to the drill and held for 30 minutes, whereby the drill was sputter etched to clean the surface. Subsequently, the present invention products 1 to 3 and the comparative product 1 are sequentially coated with a hard film on the inner layer and a lubricating film on the outer layer under the coating conditions (gas component and flow rate, bias voltage, treatment time) shown in Table 1. ~ 3 drills were obtained.

Figure 2005288582
Figure 2005288582

本発明品1〜3、比較品1〜3の外層潤滑膜をA(Hax、Oyz(ただし、x+y=1)と表したとき、EDX(X線エネルギー分散法)によって周期律表7b族元素(ハロゲン元素)と酸素の合計に対する酸素の原子比yと、金属成分(周期律表1a,2a族元素)に対する非金属成分(周期律表7b族元素と酸素)の原子比zを求めて、その値を表2に記載した。さらに本発明品1〜3、比較品1〜3について、切れ刃稜線から1mm離れたすくい面における硬質膜と潤滑膜の平均膜厚dを測定した。また、切れ刃稜線から1mm離れたにすくい面おける潤滑膜の膜厚drと逃げ面における潤滑膜の膜厚dfを測定して膜厚比(df/dr)を求めた。さらに、CuKα線を用いたX線回折測定を行い、潤滑膜の立方晶(200)面(2θ:44〜46度)の半価幅(度)を測定した。次いで硬質膜の立方晶(200)面のX線回折強度Ih(200)と立方晶(111)面のX線回折強度Ih(111)をそれぞれ測定して、強度比(Ih(200)/Ih(111))を求めた。これらの値は表2に記載した。 When the outer layer lubricating films of the present invention products 1 to 3 and comparative products 1 to 3 are expressed as A (Ha x , O y ) z (where x + y = 1), the periodic table is expressed by EDX (X-ray energy dispersion method). The atomic ratio y of oxygen with respect to the sum of the 7b group element (halogen element) and oxygen, and the atomic ratio z of the nonmetallic component (periodic table 7b group element and oxygen) with respect to the metal component (periodic table 1a, 2a group element) The values are shown in Table 2. Furthermore, about this invention products 1-3 and comparative products 1-3, the average film thickness d of the hard film | membrane and lubricating film in the rake face 1 mm away from the cutting edge ridgeline was measured. In addition, the film thickness ratio dr (dr / dr) was determined by measuring the film thickness dr of the lubricating film on the rake face 1 mm away from the cutting edge ridge line and the film thickness df of the lubricating film on the flank face. Furthermore, X-ray diffraction measurement using CuKα rays was performed, and the half width (degree) of the cubic (200) plane (2θ: 44 to 46 degrees) of the lubricating film was measured. Subsequently, the X-ray diffraction intensity Ih (200) of the cubic (200) plane of the hard film and the X-ray diffraction intensity Ih (111) of the cubic (111) plane were measured, respectively, and the intensity ratio (Ih (200) / Ih (111)). These values are listed in Table 2.

Figure 2005288582
Figure 2005288582

得られた本発明品1〜3と比較品1〜3のドリルを用いて、被削材:S45C,切削外周速度:100m/min,穴深さ:50mm,乾式加工の条件で穴明け加工を連続して行った。刃先のチッピング発生、折損あるいは切り屑詰まりによる急激なトルク上昇が発生するまでの加工可能な穴数を表3に示す。200穴加工まで正常であった場合には、刃先の平均逃げ面摩耗量を併記した。 Using the drills of the present invention products 1 to 3 and comparative products 1 to 3, drilling was performed under the conditions of work material: S45C, cutting peripheral speed: 100 m / min, hole depth: 50 mm, and dry machining. It went continuously. Table 3 shows the number of holes that can be processed until a sharp torque increase occurs due to chipping, breakage, or chip clogging. When it was normal up to 200 holes, the average flank wear amount of the cutting edge was also shown.

Figure 2005288582
Figure 2005288582

酸素の原子比yが0.02〜0.06の本発明品1〜3は、比較品1〜3に比較して加工可能な穴数が3〜13倍多い。 Inventive products 1 to 3 having an oxygen atomic ratio y of 0.02 to 0.06 have 3 to 13 times more holes that can be processed than comparative products 1 to 3.

Claims (7)

基材の表面に被膜を被覆した被覆部材において、被膜の少なくとも1層は、周期律表1a,2a族元素の中から選ばれた少なくとも1種と、周期律表7b族元素の中から選ばれた少なくとも1種と、酸素とからなる潤滑膜である被覆部材。 In the covering member in which the surface of the substrate is coated, at least one layer of the coating is selected from at least one selected from the elements of Group 1a and 2a of the periodic table and from element 7b of the periodic table. A covering member which is a lubricating film comprising at least one kind and oxygen. 潤滑膜は、A(Hax、Oyzと表され、Aは周期律表1a,2a族元素の中から選ばれた少なくとも1種を表し、Haは周期律表7b族元素の中から選ばれた少なくとも1種を表し、Oは酸素を表し、xは周期律表7b族元素と酸素の合計に対する周期律表7b族元素の原子比を表し、yは周期律表7b族元素と酸素の合計に対する酸素の原子比を表し、zは周期律表1a,2a族元素に対する周期律表7b族元素と酸素の合計の原子比を表し、x、y、zは、それぞれ、x+y=1、0.80≦x≦0.95、0.05≦y≦0.20、0.8≦z≦2.0を満足する請求項1に記載の被覆部材。 The lubricating film is represented as A (Ha x , O y ) z , A represents at least one selected from Group 1a and 2a elements of Periodic Table, and Ha represents Group 7b of Periodic Table Represents at least one selected, O represents oxygen, x represents the atomic ratio of the periodic table group 7b element to the sum of the periodic table group 7b element and oxygen, and y represents the periodic table group 7b element and oxygen. Represents the atomic ratio of oxygen to the sum of the elements, z represents the atomic ratio of the elements of the periodic table group 7b to the periodic table 1a, 2a group elements and oxygen, and x, y, z are x + y = 1, The covering member according to claim 1, wherein 0.80≤x≤0.95, 0.05≤y≤0.20, and 0.8≤z≤2.0 are satisfied. 潤滑膜は、立方晶潤滑膜であり、X線回折測定における立方晶潤滑膜の(200)面のX線回折ピークの半価幅は、0.4〜1.8度である請求項1または2に記載の被覆部材。 The lubricating film is a cubic lubricating film, and the half width of the X-ray diffraction peak of the (200) plane of the cubic lubricating film in the X-ray diffraction measurement is 0.4 to 1.8 degrees. The covering member according to 2. 被膜の少なくとも1層は、周期律表4a、5a、6a族元素、アルミニウム、シリコンの炭化物、窒化物、酸化物、硼化物およびこれらの相互固溶体の中から選ばれた少なくとも1種からなる硬質膜である請求項1〜3のいずれか1項に記載の被覆部材。 At least one layer of the film is a hard film composed of at least one selected from the group consisting of elements 4a, 5a and 6a of the periodic table, aluminum, silicon carbide, nitride, oxide, boride and their mutual solid solutions The covering member according to any one of claims 1 to 3. 基材は、超硬合金、サーメット、セラミックス、立方晶窒化硼素焼結体、高速度鋼および工具鋼の中から選ばれた1種からなる請求項1〜4のいずれか1項に記載の被覆部材。 The coating according to any one of claims 1 to 4, wherein the base material is one selected from cemented carbide, cermet, ceramics, cubic boron nitride sintered body, high-speed steel, and tool steel. Element. 被覆部材は、切削工具として用いられる請求項1〜5のいずれか1項に記載の被覆部材。 The covering member according to claim 1, wherein the covering member is used as a cutting tool. 切削工具の切れ刃稜線から1mm離れたすくい面における潤滑膜の平均膜厚をdrと表し、切削工具の切れ刃稜線から1mm離れた逃げ面における潤滑膜の平均膜厚をdfと表したとき、drに対するdfの膜厚比(df/dr)は0.05〜20である請求項6に記載の被覆部材。
When the average film thickness of the lubricating film on the rake face 1 mm away from the cutting edge of the cutting tool is represented by dr, and the average film thickness of the lubricating film on the flank 1 mm away from the cutting edge of the cutting tool is represented by df, The covering member according to claim 6, wherein a film thickness ratio (df / dr) of df to dr is 0.05 to 20.
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Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2008163413A (en) * 2006-12-28 2008-07-17 Hitachi Tool Engineering Ltd Nitride-containing target material
WO2008105519A1 (en) * 2007-02-28 2008-09-04 Kyocera Corporation Cutting tool and process for manufacturing the same

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2008163413A (en) * 2006-12-28 2008-07-17 Hitachi Tool Engineering Ltd Nitride-containing target material
WO2008105519A1 (en) * 2007-02-28 2008-09-04 Kyocera Corporation Cutting tool and process for manufacturing the same

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