JP4107433B2 - α-type aluminum oxide coated member - Google Patents
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- JP4107433B2 JP4107433B2 JP2004075549A JP2004075549A JP4107433B2 JP 4107433 B2 JP4107433 B2 JP 4107433B2 JP 2004075549 A JP2004075549 A JP 2004075549A JP 2004075549 A JP2004075549 A JP 2004075549A JP 4107433 B2 JP4107433 B2 JP 4107433B2
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- TWNQGVIAIRXVLR-UHFFFAOYSA-N oxo(oxoalumanyloxy)alumane Chemical compound O=[Al]O[Al]=O TWNQGVIAIRXVLR-UHFFFAOYSA-N 0.000 title claims description 87
- 238000002441 X-ray diffraction Methods 0.000 claims description 30
- 239000013078 crystal Substances 0.000 claims description 19
- 239000010936 titanium Substances 0.000 claims description 19
- 239000000758 substrate Substances 0.000 claims description 15
- 238000000576 coating method Methods 0.000 claims description 14
- 239000011248 coating agent Substances 0.000 claims description 12
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 claims description 8
- 229910052719 titanium Inorganic materials 0.000 claims description 8
- 150000004767 nitrides Chemical class 0.000 claims description 7
- 229910052751 metal Inorganic materials 0.000 claims description 6
- 239000002184 metal Substances 0.000 claims description 6
- 150000003609 titanium compounds Chemical class 0.000 claims description 6
- 230000000737 periodic effect Effects 0.000 claims description 5
- 150000001247 metal acetylides Chemical class 0.000 claims description 4
- 150000003755 zirconium compounds Chemical class 0.000 claims description 4
- 229910052804 chromium Inorganic materials 0.000 claims description 3
- 239000012535 impurity Substances 0.000 claims description 3
- 229910052742 iron Inorganic materials 0.000 claims description 3
- 229910052750 molybdenum Inorganic materials 0.000 claims description 3
- 229910052759 nickel Inorganic materials 0.000 claims description 3
- 229910052721 tungsten Inorganic materials 0.000 claims description 3
- 150000004649 carbonic acid derivatives Chemical class 0.000 claims description 2
- 239000010410 layer Substances 0.000 claims 3
- 239000002356 single layer Substances 0.000 claims 1
- 238000005520 cutting process Methods 0.000 description 52
- 239000007789 gas Substances 0.000 description 25
- 238000000034 method Methods 0.000 description 10
- 230000000052 comparative effect Effects 0.000 description 8
- ATJFFYVFTNAWJD-UHFFFAOYSA-N Tin Chemical compound [Sn] ATJFFYVFTNAWJD-UHFFFAOYSA-N 0.000 description 7
- 239000000463 material Substances 0.000 description 5
- 239000012159 carrier gas Substances 0.000 description 4
- 230000003746 surface roughness Effects 0.000 description 4
- 150000002739 metals Chemical class 0.000 description 3
- 230000008520 organization Effects 0.000 description 3
- 238000002230 thermal chemical vapour deposition Methods 0.000 description 3
- NRTOMJZYCJJWKI-UHFFFAOYSA-N Titanium nitride Chemical compound [Ti]#N NRTOMJZYCJJWKI-UHFFFAOYSA-N 0.000 description 2
- 230000015572 biosynthetic process Effects 0.000 description 2
- 229910002091 carbon monoxide Inorganic materials 0.000 description 2
- 238000005229 chemical vapour deposition Methods 0.000 description 2
- 239000002173 cutting fluid Substances 0.000 description 2
- 239000012530 fluid Substances 0.000 description 2
- 238000005259 measurement Methods 0.000 description 2
- 239000000203 mixture Substances 0.000 description 2
- 230000003287 optical effect Effects 0.000 description 2
- 239000002245 particle Substances 0.000 description 2
- MTPVUVINMAGMJL-UHFFFAOYSA-N trimethyl(1,1,2,2,2-pentafluoroethyl)silane Chemical compound C[Si](C)(C)C(F)(F)C(F)(F)F MTPVUVINMAGMJL-UHFFFAOYSA-N 0.000 description 2
- 229910016467 AlCl 4 Inorganic materials 0.000 description 1
- PNEYBMLMFCGWSK-UHFFFAOYSA-N Alumina Chemical class [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 description 1
- 229910004168 TaNb Inorganic materials 0.000 description 1
- 229910052782 aluminium Inorganic materials 0.000 description 1
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 1
- 238000003486 chemical etching Methods 0.000 description 1
- 239000000470 constituent Substances 0.000 description 1
- 238000001816 cooling Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000011156 evaluation Methods 0.000 description 1
- 230000002349 favourable effect Effects 0.000 description 1
- 229910052738 indium Inorganic materials 0.000 description 1
- 230000003647 oxidation Effects 0.000 description 1
- 238000007254 oxidation reaction Methods 0.000 description 1
- RVTZCBVAJQQJTK-UHFFFAOYSA-N oxygen(2-);zirconium(4+) Chemical compound [O-2].[O-2].[Zr+4] RVTZCBVAJQQJTK-UHFFFAOYSA-N 0.000 description 1
- 230000002093 peripheral effect Effects 0.000 description 1
- 238000000623 plasma-assisted chemical vapour deposition Methods 0.000 description 1
- 238000005498 polishing Methods 0.000 description 1
- 239000000843 powder Substances 0.000 description 1
- 239000002994 raw material Substances 0.000 description 1
- 102220005308 rs33960931 Human genes 0.000 description 1
- FOZHTJJTSSSURD-UHFFFAOYSA-J titanium(4+);dicarbonate Chemical compound [Ti+4].[O-]C([O-])=O.[O-]C([O-])=O FOZHTJJTSSSURD-UHFFFAOYSA-J 0.000 description 1
- 229910001928 zirconium oxide Inorganic materials 0.000 description 1
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- Cutting Tools, Boring Holders, And Turrets (AREA)
- Chemical Vapour Deposition (AREA)
Description
本発明は、耐摩耗性の優れたα型酸化アルミニウム被覆部材であり、主に切削工具等への適用に関する。 The present invention is an α-type aluminum oxide-coated member having excellent wear resistance, and mainly relates to application to a cutting tool or the like.
酸化アルミニウム被覆部材に関しては、耐摩耗性の課題を改良するために、特許文献1から特許文献4のような技術の開示がなされている。
特許文献1は、超硬合金製基体表面上にTi(CN)層を被覆し、同じ被覆処理工程中に、組織化係数TC(104)が1.5より大きいα型酸化アルミニウム層を被覆した酸化アルミニウム膜被覆工具について、(110)面のX線回折強度が強く、下地膜との密着性が優れるα型酸化アルミニウム膜被覆工具を、特許文献2は、組織化係数TC(012)が1.3より大きい酸化アルミニウム膜を、特許文献3は組織化係数TC(110)が1.5より大きい本質的にクーリングクラックが存在しない酸化アルミニウム膜を、特許文献4は、超硬合金製基体表面上に(110)面のX線回折強度が強く、下地膜との密着性が優れるα型酸化アルミニウムを主とする皮膜を被覆した工具が記載されている。しかし、(0,2,10)面についての考察は行なわれていない。
In Patent Document 1, a Ti (CN) layer is coated on the surface of a cemented carbide substrate, and an α-type aluminum oxide layer having an organization factor TC (104) of greater than 1.5 is coated during the same coating process. Regarding an aluminum oxide film-coated tool, an α-type aluminum oxide film-coated tool having a strong (110) plane X-ray diffraction intensity and excellent adhesion to a base film, Patent Document 2 has an organization factor TC (012) of 1. .3 is an aluminum oxide film, Patent Document 3 is an aluminum oxide film having an organization factor TC (110) greater than 1.5, and essentially no cooling cracks, and Patent Document 4 is a cemented carbide substrate surface. There is described a tool coated with a film mainly composed of α-type aluminum oxide having high (110) plane X-ray diffraction intensity and excellent adhesion to a base film. However, no consideration is given to the (0 , 2 , 10) plane.
本発明は、結晶粒径の小さいα型酸化アルミニウム膜を実現することにより、耐摩耗性、耐欠損性を改善したα型酸化アルミニウム被覆部材を提供することであり、例えば切削工具に適用した場合、耐久特性の優れたα型酸化アルミニウム被覆工具を得ることである。 The present invention is to provide an α-type aluminum oxide-coated member having improved wear resistance and fracture resistance by realizing an α-type aluminum oxide film having a small crystal grain size. For example, when applied to a cutting tool It is to obtain an α-type aluminum oxide coated tool having excellent durability characteristics.
本願発明は、基体の表面に周期律表の4a、5a、6a族金属の炭化物、窒化物、炭窒化物、酸化物、炭酸化物、窒酸化物および炭窒酸化物のいずれか1種の単層皮膜又は2種以上からなる多層皮膜、並びに少なくとも1層のα型酸化アルミニウムを主とする皮膜が形成されている被覆部材において、該α型酸化アルミニウムの皮膜の(0,2,10)面による等価X線回折強度比PR(0,2,10)が、1.3以上であることを特徴とするα型酸化アルミニウム被覆部材である。上記構成を採用することによって、結晶粒径の小さいα型酸化アルミニウム膜を実現する。即ち、α型酸化アルミニウムの(0,2,10)面の結晶配向性を示す等価X線回折強度比PR(0,2,10)を高めることによって、皮膜の結晶粒径が微細化し、α型酸化アルミニウムの表面の凹凸を小さくすることが可能になる。これにより、耐摩耗性、耐欠損性、耐クラック性を改善したα型酸化アルミニウム被覆部材を提供することが可能となる。例えば切削工具に適用した場合には、耐久特性の優れたα型酸化アルミニウム被覆工具を得ることができる。 According to the present invention, the surface of the substrate is made of any one of the carbides, nitrides, carbonitrides, oxides, carbonates, nitrides and carbonitrides of the 4a, 5a, and 6a group metals of the periodic table. (0 , 2 , 10) surface of the α-type aluminum oxide film in a coating member on which a layer film or a multilayer film composed of two or more types and a film mainly composed of at least one layer of α-type aluminum oxide are formed The α-type aluminum oxide-coated member is characterized in that the equivalent X-ray diffraction intensity ratio PR (0 , 2 , 10) by is 1.3 or more. By adopting the above configuration, an α-type aluminum oxide film having a small crystal grain size is realized. That is, by increasing the equivalent X-ray diffraction intensity ratio PR (0 , 2 , 10) indicating the crystal orientation of the (0 , 2 , 10) plane of α-type aluminum oxide, the crystal grain size of the film is refined, and α The unevenness on the surface of the type aluminum oxide can be reduced. As a result, it is possible to provide an α-type aluminum oxide-coated member with improved wear resistance, fracture resistance, and crack resistance. For example, when applied to a cutting tool, an α-type aluminum oxide-coated tool having excellent durability characteristics can be obtained.
本発明は、α型酸化アルミニウムを主とする皮膜表面の平均結晶粒径Dが、膜厚が2.5μm未満の時はD≦1μm、膜厚が2.5〜4.5μmの時はD≦2μm、膜厚が4.5μmを超えて大きい時はD≦3μm、である。このことによって皮膜内にクラックが進展し難くなる。α型酸化アルミニウムを主とする皮膜の内層側に炭窒化チタン膜を有し、該炭窒化チタン膜の(311)面又は(422)面による等価X線回折強度比PRが最大値を示すことによって、結晶粒径が小さく、柱状組織を有する皮膜となり、強靭性と耐摩耗性の優れた皮膜が得られる。本発明は、α型酸化アルミニウムを主とする皮膜より外層側にチタン化合物又はジルコニウム化合物の膜が形成されていることである。これは、被覆部材を例えば切削工具に適用した場合、工具の使用有無の識別が容易となる。基体は超硬合金であって、該超硬合金は周期律表の4a、5a、6a族金属の炭化物、窒化物、炭窒化物から選ばれる1種以上と、Fe、Ni、Co、W、Mo、Crから選ばれる1種以上と、残りがWC及び不可避不純物からなる超硬合金とすることによって、皮膜と基体との靭性、硬度、耐熱性のバランスが良くなる。 In the present invention, the average crystal grain size D on the surface of the film mainly composed of α-type aluminum oxide is D ≦ 1 μm when the film thickness is less than 2.5 μm, and D when the film thickness is 2.5 to 4.5 μm. ≦ 2 μm, and D ≦ 3 μm when the film thickness exceeds 4.5 μm. This makes it difficult for cracks to develop in the coating. It has a titanium carbonitride film on the inner layer side of the film mainly composed of α-type aluminum oxide, and the equivalent X-ray diffraction intensity ratio PR by the (311) face or (422) face of the titanium carbonitride film shows the maximum value. Thus, a film having a small crystal grain size and a columnar structure is obtained, and a film having excellent toughness and wear resistance can be obtained. The present invention is that a film of a titanium compound or a zirconium compound is formed on the outer layer side of a film mainly composed of α-type aluminum oxide. For example, when the covering member is applied to a cutting tool, for example, it is easy to identify whether the tool is used. The substrate is a cemented carbide, and the cemented carbide is one or more selected from carbides, nitrides, carbonitrides of metals 4a, 5a, and 6a of the periodic table, Fe, Ni, Co, W, By using a cemented carbide made of one or more selected from Mo and Cr and the balance of WC and inevitable impurities, the balance of toughness, hardness and heat resistance between the coating and the substrate is improved.
本発明は結晶粒径の小さいα型酸化アルミニウム膜を実現することにより、耐摩耗性、耐欠損性を改善したα型酸化アルミニウム被覆部材を提供することができた。本発明のα型酸化アルミニウム膜を切削工具に適用した場合、耐久特性の優れたα型酸化アルミニウム被覆工具を得ることができた。 The present invention has been able to provide an α-type aluminum oxide-coated member having improved wear resistance and fracture resistance by realizing an α-type aluminum oxide film having a small crystal grain size. When the α-type aluminum oxide film of the present invention was applied to a cutting tool, an α-type aluminum oxide-coated tool having excellent durability characteristics could be obtained.
本発明のα型酸化アルミニウムを主とする皮膜は、(0,2,10)面による等価X線回折強度比PR(0,2,10)が1.3以上であり、好ましくは1.5以上である。PR(0,2,10)が1.3以上の場合は、膜厚方向に対して結晶粒の傾きが少ないことから、最表面の凹凸が少なくなり、その結果、摺動性に優れる。強度比PR(0,2,10)が1.3未満の場合は、α型酸化アルミニウム皮膜の表面の凹凸が大きくなり、摺動性が悪くなるため不都合である。本発明のα型酸化アルミニウムを主とする皮膜表面のDは、膜厚が2.5μm未満の時はD≦1μm、膜厚が2.5〜4.5μmの時はD≦2μm、好ましくはD≦1.5μm、膜厚が4.5μmを超えて大きい時はD≦3μm、好ましくはD≦2.5μmと規定する。膜厚に対してD値の範囲を規定することは、皮膜表面の面粗さ制御のため重要である。皮膜表面のDを小さくすることにより、皮膜表面の面粗さが小さくなり、例えば切削工具に応用した場合、被削材との摩擦係数が小さくなり、耐摩耗性に優れる。更に皮膜内にクラックが進展し難くなることから、良好な切削耐久特性が実現される。
α型酸化アルミニウムを主とする皮膜の内層側に、(311)若しくは(422)面からの等価X線回折強度比PRが最大値を示す炭窒化チタン膜は、結晶粒径が小さい柱状組織であるため、強靭性と耐摩耗性を有する。α型酸化アルミニウムを主とする皮膜の内層側に炭窒化チタン膜を有する構成とすることで、炭窒化チタン膜の耐摩耗性、強靭性の特徴を生かし、耐熱性も向上させることができる。本発明のα型酸化アルミニウムを主とする皮膜の外層側にチタン化合物の膜又はジルコニウム化合物の膜を形成することが好ましい。外側側にチタン化合物の膜又はジルコニウム化合物の膜が形成されていることにより、使用の有無の識別が容易になる。本発明のα型酸化アルミニウム被覆部材は、超硬合金を基体とする。該超硬合金は、周期律表の4a、5a、6a族金属の炭化物、窒化物、炭窒化物の1種以上とFe、Ni、Co、W、Mo、Crから選ばれるの1種以上と、残りがWC及び不可避不純物からなる超硬合金である。該超硬合金を基体とすることにより本発明の皮膜と基体との靭性、硬度、耐熱性のバランスが良い。例えば被覆工具に適用した場合、良好な切削耐久特性が実現される。
The film mainly composed of α-type aluminum oxide of the present invention has an equivalent X-ray diffraction intensity ratio PR (0 , 2 , 10) by the (0 , 2 , 10) plane of 1.3 or more, preferably 1.5. That's it. When PR (0 , 2 , 10) is 1.3 or more, since the inclination of the crystal grains is small with respect to the film thickness direction, the unevenness on the outermost surface is reduced, and as a result, the slidability is excellent. If the strength ratio PR (0 , 2 , 10) is less than 1.3, the surface roughness of the α-type aluminum oxide film becomes large, which is inconvenient. D on the surface of the film mainly composed of α-type aluminum oxide of the present invention is D ≦ 1 μm when the film thickness is less than 2.5 μm, D ≦ 2 μm when the film thickness is 2.5 to 4.5 μm, preferably When D ≦ 1.5 μm and the film thickness exceeds 4.5 μm, D ≦ 3 μm, preferably D ≦ 2.5 μm. Defining the range of the D value with respect to the film thickness is important for controlling the surface roughness of the coating surface. By reducing D on the surface of the film, the surface roughness of the surface of the film is reduced. For example, when applied to a cutting tool, the coefficient of friction with the work material is reduced and the wear resistance is excellent. Furthermore, since it becomes difficult for a crack to progress in a film, a favorable cutting durability characteristic is implement | achieved.
The titanium carbonitride film having the maximum equivalent X-ray diffraction intensity ratio PR from the (311) or (422) plane on the inner layer side of the film mainly composed of α-type aluminum oxide has a columnar structure with a small crystal grain size. Therefore, it has toughness and wear resistance. By adopting a structure having a titanium carbonitride film on the inner layer side of the coating mainly composed of α-type aluminum oxide, the heat resistance can be improved by taking advantage of the wear resistance and toughness of the titanium carbonitride film. It is preferable to form a titanium compound film or a zirconium compound film on the outer layer side of the film mainly composed of α-type aluminum oxide of the present invention. Since the titanium compound film or the zirconium compound film is formed on the outer side, the presence or absence of use can be easily identified. The α-type aluminum oxide-coated member of the present invention uses a cemented carbide as a base. The cemented carbide comprises at least one selected from the group consisting of carbides, nitrides and carbonitrides of metals 4a, 5a and 6a of the periodic table, and at least one selected from Fe, Ni, Co, W, Mo and Cr. The remainder is a cemented carbide made of WC and inevitable impurities. By using the cemented carbide as a base, the balance of toughness, hardness and heat resistance between the coating of the present invention and the base is good. For example, when applied to a coated tool, good cutting durability characteristics are realized.
本発明のα型酸化アルミニウムを主とする皮膜は、必ずしも最外層である必要はなく、α型酸化アルミニウムを主とする皮膜の上に、更に少なくとも1層の、例えばTiN等のチタン化合物を被覆しても良い。この場合、α型酸化アルミニウムを主とする皮膜の粒径測定は、HF−HNO3溶液等によりチタン化合物膜を化学エッチングで除去することにより実施できる。
本発明の皮膜の被覆方法には、例えば、化学蒸着法(以下、熱CVD法と言う。)、プラズマを付加した化学蒸着法(以下、PACVD法と言う。)等を用いることができる。用途は切削工具に限るものではなく、α型酸化アルミニウムを主とする皮膜を含む単層或いは多層の硬質皮膜により被覆された耐摩耗材や金型、溶湯部品等でも良い。酸化膜はα型酸化アルミニウム単相に限るものではなく、α型酸化アルミニウムが主であれば、他の酸化物、例えばα型酸化アルミニウムとκ型酸化アルミニウムとの混合膜やγ型酸化アルミニウム、θ型酸化アルミニウム、δ型酸化アルミニウム、χ型酸化アルミニウム等、他の酸化アルミニウムとの混合膜或いはα型酸化アルミニウムと酸化ジルコニウム等他の酸化物との混合膜であっても同様の効果が得られる。本発明のα型酸化アルミニウムを主とする皮膜とは、皮膜のX線回折ピーク強度の総計の60%以上がα型酸化アルミニウムのX線回折ピークからなるものをいう。次に本発明のα型酸化アルミニウム被覆部材を実施例によって具体的に説明する。但し、本発明はこれら実施例の範囲に限定されるものでない。
The coating mainly composed of α-type aluminum oxide of the present invention is not necessarily the outermost layer, and at least one layer of a titanium compound such as TiN is coated on the coating mainly composed of α-type aluminum oxide. You may do it. In this case, the particle size of the film mainly composed of α-type aluminum oxide can be measured by removing the titanium compound film by chemical etching with an HF-HNO 3 solution or the like.
As the coating method of the film of the present invention, for example, a chemical vapor deposition method (hereinafter referred to as a thermal CVD method), a chemical vapor deposition method with plasma added (hereinafter referred to as a PACVD method), or the like can be used. The application is not limited to cutting tools, but may be wear-resistant materials, molds, molten metal parts and the like coated with a single or multilayer hard film including a film mainly composed of α-type aluminum oxide. The oxide film is not limited to the α-type aluminum oxide single phase. If α-type aluminum oxide is mainly used, other oxides such as a mixed film of α-type aluminum oxide and κ-type aluminum oxide, γ-type aluminum oxide, The same effect can be obtained with a mixed film of other aluminum oxides such as θ-type aluminum oxide, δ-type aluminum oxide, χ-type aluminum oxide, or a mixed film of α-type aluminum oxide and other oxides such as zirconium oxide. It is done. The film mainly composed of α-type aluminum oxide of the present invention means that 60% or more of the total X-ray diffraction peak intensity of the film is composed of the X-ray diffraction peak of α-type aluminum oxide. Next, the α-type aluminum oxide-coated member of the present invention will be specifically described with reference to examples. However, the present invention is not limited to the scope of these examples.
(実施例1)
重量%でWC:72%、TiC:8%、(TaNb)C:11%、Co:9%の組成よりなる超硬合金製テスト基板と超硬合金製インサート工具を熱CVD法による製膜装置内にセットし、その表面に、H2キャリアーガスとTiCl4ガスとN2ガスとを原料ガスに用い、0.3μm厚さのTiNを900度で形成し、H2キャリアーガスとTiCl4ガスとCH3CNガスとを原料ガスに用い、900度で6μm厚さのTi(CN)膜を形成した。950〜1020度でH2キャリヤーガスとTiCl4ガスとN2ガスをトータル2200(ml/分)を5〜120分間流してTiN膜を成膜した。連続して本構成ガスに更に2.2〜110(ml/分)のCO2とCOの混合ガスを追加して5〜30分間成膜することによりTi(NO)膜を作製した。続いてAl金属小片を詰め350度に保温した小筒中にH2ガスを流量310(ml/分)とHClガス130(ml/分)とを流すことにより発生させたAlCl3ガスとH2ガスを2(l/分)と、CO2とCOの混合ガス100〜400(ml/分)とを熱CVD法による製膜装置内に流し1000〜1100度で反応させることにより酸化アルミニウム膜を所定の厚さ成膜して、本発明例1から23を作製した。α型酸化アルミニウム膜の成膜時にH2Sガスは流さなかった。一方、PR(0,2,10)の差異によるα型酸化アルミニウムを主とする酸化膜の粒径及び切削特性への影響を明らかにするために、本発明例と同一の条件でTi(NO)膜までを成膜し、その後は成膜温度、AlCl4、CO、CO2比を変更した条件で、所定の厚さの酸化アルミニウム膜を成膜して、比較例24から27を作製した。更に、従来例28は本発明例と同様にTiN膜までを成膜した後、TiCl4ガスとN2ガスとを止め、H2キャリアーガスとCO2ガスとを流して1010度で15分間TiN膜を酸化させた後、1020度でH2ガス、AlCl3ガスおよびCO2ガスにより所定の厚さの酸化アルミニウム膜を成膜することにより作製した。
(Example 1)
Film forming apparatus using a thermal CVD method of a cemented carbide test substrate and a cemented carbide insert tool having a composition of WC: 72%, TiC: 8%, (TaNb) C: 11%, Co: 9% by weight% In the surface, H 2 carrier gas, TiCl 4 gas and N 2 gas are used as raw material gas, and 0.3 μm thick TiN is formed at 900 degrees, and H 2 carrier gas and TiCl 4 gas are formed on the surface. And CH 3 CN gas were used as source gases, and a 6 μm thick Ti (CN) film was formed at 900 degrees. A TiN film was formed by flowing H 2 carrier gas, TiCl 4 gas and N 2 gas in a total of 2200 (ml / min) for 5 to 120 minutes at 950 to 1020 degrees. A Ti (NO) film was prepared by adding 2.2 to 110 (ml / min) of a mixed gas of CO 2 and CO continuously to the constituent gas and forming a film for 5 to 30 minutes. Subsequently, AlCl 3 gas and H 2 gas generated by flowing H 2 gas at a flow rate of 310 (ml / min) and HCl gas 130 (ml / min) in a small tube filled with Al metal pieces and kept at 350 ° C. 2 (l / min) and a mixed gas of CO 2 and CO of 100 to 400 (ml / min) are allowed to flow in a film-forming apparatus by a thermal CVD method and react at 1000 to 1100 degrees to thereby form an aluminum oxide film. Inventive Examples 1 to 23 were prepared by forming a film having a thickness of 1 to 23 mm. No H 2 S gas was allowed to flow during the formation of the α-type aluminum oxide film. On the other hand, in order to clarify the influence of the difference in PR (0 , 2 , 10) on the grain size and cutting characteristics of an oxide film mainly composed of α-type aluminum oxide, Ti (NO ) A film was formed up to the film, and then an aluminum oxide film having a predetermined thickness was formed under the conditions of changing the film formation temperature and the AlCl 4 , CO, CO 2 ratio, and Comparative Examples 24 to 27 were produced. . Further, in the conventional example 28, up to the TiN film as in the present invention example, the TiCl 4 gas and the N 2 gas are stopped, the H 2 carrier gas and the CO 2 gas are flowed, and the TiN is flown at 1010 degrees for 15 minutes. After the film was oxidized, an aluminum oxide film having a predetermined thickness was formed by H 2 gas, AlCl 3 gas, and CO 2 gas at 1020 degrees.
図1は、超硬合金製テスト基板に成膜した本発明例1のX線回析パターンを示したものである。皮膜のX線回折は、X線回折装置(理学電気(株)製RUー300R型)を用いて2θ−θ法により2θが20〜90度の範囲で測定した。X線源には波長λ=0.154nmのCuのKα1線のみを用い、装置に内蔵されたソフトによりKα2線とノイズとを除去して測定した。本発明例1は、超硬合金基体表面に炭化チタン、炭窒化チタン、炭化チタン、炭酸化チタンを成膜し、その表面上にα型酸化アルミニウムを成膜したものである。図1より、本発明例1のα型酸化アルミニウム膜は、(0,2,10)面のX線回折強度が強いことがわかる。α型酸化アルミニウムの(0,2,10)面における2θ値は89.02度近傍である。表1にα型酸化アルミニウムの各結晶方位面に対する、面間距離d、2θ値、標準X線回折強度I0をまとめたものを示した。2θ値はCuのKα1線を用いた時に測定される値をd値から計算により求めた。d値とI0値は、ASTMファイル10−173に記載の値である。一方、表2は、Ti(CN)のd値、2θ値を示す。TiCのI0値はASTMファイルの番号29−1361に記載の値を、TiNのI0値はASTMファイル38−1420に記載の値を併記した。 FIG. 1 shows an X-ray diffraction pattern of Example 1 of the present invention formed on a cemented carbide test substrate. The X-ray diffraction of the film was measured using an X-ray diffraction apparatus (RU-300R type, manufactured by Rigaku Corporation) by the 2θ-θ method in the range of 2θ of 20 to 90 degrees. For the X-ray source, only the Cu Kα 1 line having a wavelength λ = 0.154 nm was used, and the Kα 2 line and noise were removed by the software built in the apparatus. In Invention Example 1, titanium carbide, titanium carbonitride, titanium carbide, and titanium carbonate are formed on the surface of the cemented carbide substrate, and α-type aluminum oxide is formed on the surface. As can be seen from FIG. 1, the α-type aluminum oxide film of Example 1 of the present invention has a strong X-ray diffraction intensity on the (0 , 2 , 10) plane. The 2θ value in the (0 , 2 , 10) plane of α-type aluminum oxide is around 89.02 degrees. Table 1 shows a summary of the inter-plane distance d, 2θ value, and standard X-ray diffraction intensity I0 for each crystal orientation plane of α-type aluminum oxide. The 2θ value was calculated from the d value, which was measured when using the Cu Kα 1 line. The d value and the I0 value are values described in the ASTM file 10-173. On the other hand, Table 2 shows the d value and 2θ value of Ti (CN). The TiC I0 value is the value described in ASTM file number 29-1361, and the TiN I0 value is the value described in ASTM file 38-1420.
本発明では、α型酸化アルミニウムの(012)面から(0,2,10)面までの配向を定量的に評価するため、次式の等価X線回折強度比PR(hkl)を(数1)で定義した。 In the present invention, in order to quantitatively evaluate the orientation of the α-type aluminum oxide from the (012) plane to the (0 , 2 , 10) plane, the equivalent X-ray diffraction intensity ratio PR (hkl) of the following equation is expressed as ).
ここで定義した等価X線回折強度比PR(hkl)は、I(hkl)、I0(hkl)は計算に用いられる結晶方位面として、α型酸化アルミニウムの(hkl)面からの実測X線回折強度であり、I0(hkl)はASTMファイル10−173に記載されている標準X線回折強度である。標準X線回折強度I0は、等方的に配向したα型酸化アルミニウム粉末粒子の(hkl)面からのX線回折強度を表す。(数1)で定義されたPR(hkl)は、α型酸化アルミニウム膜の(hkl)面からの実測X線回折ピーク強度の相対強度を示し、PR(hkl)値が大きい程(hkl)面からのX線回折ピーク強度が他のピーク強度よりも強いことす示す。この事は(hkl)面が膜厚方向に対して垂直な方向即ち、基体接線方向に配向していることを示す。表1、2に示す様に、Ti(CN)の(222)面の2θ値である76.96度とα型酸化アルミニウムの(1,0,10)面の2θ値である76.88度とは、その差が0.08度であり、両者のX線回折ピークを分離することは出来ない。このため、Ti(CN)の(222)面は(111)面と結晶構造上同一であることを用いて、Ti(CN)の(222)面のX線回折強度を(数2)により求め、(数3)により、この値を実測された76.9度近傍のX線回折強度I(76.9度)から差し引くことにより、α型酸化アルミニウムの(1,0,10)面のX線回折強度を求めた。 The equivalent X-ray diffraction intensity ratio PR (hkl) defined here is measured X-ray diffraction from the (hkl) plane of α-type aluminum oxide, where I (hkl) and I0 (hkl) are crystal orientation planes used for calculation. Intensity, and I0 (hkl) is a standard X-ray diffraction intensity described in ASTM file 10-173. The standard X-ray diffraction intensity I0 represents the X-ray diffraction intensity from the (hkl) plane of the isotropically oriented α-type aluminum oxide powder particles. PR (hkl) defined by (Equation 1) indicates the relative intensity of the measured X-ray diffraction peak intensity from the (hkl) plane of the α-type aluminum oxide film, and the higher the PR (hkl) value, the (hkl) plane. It shows that the X-ray diffraction peak intensity from is stronger than other peak intensities. This indicates that the (hkl) plane is oriented in the direction perpendicular to the film thickness direction, that is, in the tangential direction of the substrate. As shown in Tables 1 and 2, the 2θ value of Ti (CN) on the (222) plane is 76.96 degrees and the 2θ value of the (1 , 0 , 10) plane of α-type aluminum oxide is 76.88 degrees. The difference is 0.08 degrees, and the X-ray diffraction peaks of the two cannot be separated. Therefore, using the fact that the (222) plane of Ti (CN) is identical in crystal structure to the (111) plane, the X-ray diffraction intensity of the (222) plane of Ti (CN) is obtained by (Equation 2). By subtracting this value from the actually measured X-ray diffraction intensity I (76.9 degrees) in the vicinity of 76.9 degrees according to (Equation 3), X of the (1 , 0 , 10) plane of α-type aluminum oxide is obtained. The line diffraction intensity was determined.
ここで、Ti(CN)の標準X線回折強度I0(hkl)はTiCの値を採用した。TiNの標準X線回折強度I0(hkl)を採用した場合、Ti(CN)のI(222)はI(111)の12/72倍となり(数2)による計算値よりも大きく、α型酸化アルミニウムのI(1,0,10)は(数3)による計算値よりも小さくなる。(数2)、(数3)で求めたα型酸化アルミニウムのI(1,0,10)値は、小さいめに求めた値であることがわかる。 Here, the value of TiC was adopted as the standard X-ray diffraction intensity I0 (hkl) of Ti (CN). When the standard X-ray diffraction intensity I0 (hkl) of TiN is adopted, I (222) of Ti (CN) is 12/72 times that of I (111), which is larger than the calculated value by (Equation 2), and α-type oxidation I (1 , 0 , 10) of aluminum is smaller than the calculated value by (Equation 3). It can be seen that the I (1 , 0 , 10) value of α-type aluminum oxide obtained by (Equation 2) and (Equation 3) is a value obtained to be smaller.
図2は、本発明例1の皮膜表面を倍率5000倍で撮影したSEM写真を示す。各皮膜表面のDは、走査電子顕微鏡((株)日立製作所製S−2300型)の写真により測定した。Dの測定方法は、例えば倍率5000倍で撮影した略長方形のSEM写真を用いた場合、SEM写真の長辺方向と平行方向に略等間隔に引いた線分3本と対角線2本の合わせて5本を基準とし、各直線内にある結晶粒の数から、(数4)によりDを求めた。測定結果を表3、4に示す。 FIG. 2 shows an SEM photograph of the film surface of Example 1 of the present invention taken at a magnification of 5000 times. D on the surface of each film was measured by a photograph of a scanning electron microscope (S-2300, manufactured by Hitachi, Ltd.). For example, when a substantially rectangular SEM photograph taken at a magnification of 5000 times is used as a measuring method for D, three line segments drawn at approximately equal intervals in the direction parallel to the long side direction of the SEM photograph and two diagonal lines are combined. Using 5 as a reference, D was determined by (Equation 4) from the number of crystal grains in each straight line. The measurement results are shown in Tables 3 and 4.
皮膜の摺動性評価は、加熱型トライボメーター(CSM社製TRIBOMETER/HT型)を用いて、大気中:25度、周速:50mm/秒、軌道半径:3.0mm、荷重:5N、ボール:SUJ2製、φ6.0mm、乾式の条件で測定した。測定試料の基体は、実施例1と同じ組成の超硬合金製テスト基板を鏡面ラップしたものを用い、この上に評価対象の皮膜を被覆した。皮膜の膜厚は、各試料を10度傾けて斜め方向に研摩した面をレーザー顕微鏡により観察し、皮膜の間隔を測定することにより求めた。これらの結果、表3、4に併記した。 The slidability of the film was evaluated using a heated tribometer (TRIBOMETER / HT type manufactured by CSM) in the atmosphere: 25 degrees, peripheral speed: 50 mm / second, orbit radius: 3.0 mm, load: 5 N, ball : Measured under the conditions of SUJ2, manufactured by φ6.0 mm, dry method. The substrate of the measurement sample was a mirror-wrapped cemented carbide test substrate having the same composition as in Example 1, and the evaluation target film was coated thereon. The film thickness of the film was determined by observing the surface of each sample tilted by 10 degrees and polishing in an oblique direction with a laser microscope and measuring the distance between the films. These results are also shown in Tables 3 and 4.
表3より、本発明例1〜23の各α型酸化アルミニウムは、PR(0,2,10)が1.3以上である。実施例1に示した成膜条件を採用したことにより、α型酸化アルミニウムは(0,2,10)面が膜厚方向に対して垂直な方向即ち、基体接線方向に配向したため、微細結晶粒を有するα型酸化アルミニウム膜を得る事が出来た。比較例24〜27のPR(0,2,10)は1.3未満であり、膜厚2.5μmに対して、結晶粒径が3.0μm以上と大きかった。従来例28は、PR(0,2,10)が0.8であり、膜厚4.5μmに対して、結晶粒径が4.5μmと大きかった。
表3より、摩擦係数μは、PR(0,2,10)が1.3以上の場合、0.4以下と優れておりPR(0,2,10)が1.5以上の場合0.35以下と更に優れていた。比較例24から27の摩擦係数μはPR(0,2,10)が1.3以下の場合、0.5以上であり摺動性が劣っていた。
From Table 3, PR (0 , 2 , 10) of each α-type aluminum oxide of Invention Examples 1 to 23 is 1.3 or more. By adopting the film forming conditions shown in Example 1, the α-type aluminum oxide has the (0 , 2 , 10) plane oriented in the direction perpendicular to the film thickness direction, that is, the substrate tangential direction. An α-type aluminum oxide film having the following characteristics can be obtained. PR (0 , 2 , 10) of Comparative Examples 24-27 was less than 1.3, and the crystal grain size was as large as 3.0 μm or more with respect to the film thickness of 2.5 μm. In Conventional Example 28, PR (0 , 2 , 10) was 0.8, and the crystal grain size was as large as 4.5 μm with respect to the film thickness of 4.5 μm.
From Table 3, the friction coefficient μ is excellent when the PR (0 , 2 , 10) is 1.3 or more, 0.4 or less, and when the PR (0 , 2 , 10) is 1.5 or more, the friction coefficient μ is 0. It was further excellent at 35 or less. The friction coefficients μ of Comparative Examples 24 to 27 were 0.5 or more when PR (0 , 2 , 10) was 1.3 or less, and the slidability was poor.
(実施例2)
実施例1の条件で作製した本発明例1〜23、比較例24〜27、従来例28の切削工具各5個を用いて、切削試験1に示す条件で連続切削した。その後、工具の逃げ面の摩耗量を倍率200倍の光学顕微鏡により観察した。摩耗量が0.4mmに達した時点で切削寿命と判定した。
(切削試験1)
被削材:FCD600丸棒
工具形状:SMNN120408
切削速度:200m/min
送り:0.35mm/rev
切り込み:2.0mm
切削液:水溶性液を使用
表3に切削試験結果を併記した。
表3より、本発明例5〜23は、連続切削可能時間が20分以上と切削特性が優れていた。本発明例1〜4は、連続切削可能時間が36分以上となり、切削特性が更に優れていた。本発明例17〜19を比較すると、最大PR面を除いて他の特性が略同じとなっている場合、最大PR面が(0,2,10)の場合の方が、切削耐久特性がより優れていた。本発明例5〜7を比較すると、膜厚が4.6μmで同じであり、平均結晶粒径Dを除いて他の特性が略同じとなっている場合、Dが3μmと最も小さい方が、切削耐久特性がより優れていた。本発明例9〜14を比較すると、膜厚が2.5〜4.5μmの範囲である時、Dが2μm以下の方が、切削耐久特性がより優れていた。本発明例20〜23を比較すると、膜厚が2.5μm未満の範囲である時、Dが1μm以下の方が、切削耐久特性がより優れていた。本発明例12、15、16の切削試験結果から、PR(0,2,10)が1.3以上であり、Ti(CN)膜の最大PR面(311)(422)の時、切削耐久特性がより優れていた。このことは、本発明のα型酸化アルミニウムを主とする皮膜の等価X線回折強度比PR(0,2,10)が1.3以上、好ましくは1.5以上とすることにより、最表面の凹凸が少なく摺動性が改善されたためである。
更に、本発明例のα型酸化アルミニウムを主とする皮膜の結晶粒径が小さいことによって、皮膜の機械特性や切削特性が優れた。これは微小結晶粒化に伴い、膜表面の面粗さRaやRmaxが小さくなり、切削加工に適用した時に、被削材との摩擦が小さくなり、皮膜の摩耗や基体の脱粒が少なく、優れた機械特性を得ることが可能となったためである。比較例24〜27は皮膜の剥離が見られ、切削寿命も16分以下と切削工具として劣っていた。従来例28も8分間連続切削後に皮膜の剥離が見られ、切削工具として劣っていた。
(Example 2)
Using the cutting tools of Examples 1 to 23 of the present invention, Comparative Examples 24 to 27, and Conventional Example 28 manufactured under the conditions of Example 1, each of them was continuously cut under the conditions shown in Cutting Test 1. Thereafter, the wear amount of the flank face of the tool was observed with an optical microscope having a magnification of 200 times. When the amount of wear reached 0.4 mm, the cutting life was determined.
(Cutting test 1)
Work material: FCD600 round bar Tool shape: SMNN120408
Cutting speed: 200 m / min
Feed: 0.35mm / rev
Cutting depth: 2.0mm
Cutting fluid: Water-soluble fluid used Table 3 shows the results of the cutting test.
From Table 3, the inventive examples 5 to 23 were excellent in cutting characteristics with a continuous cutting time of 20 minutes or more. In Invention Examples 1 to 4, the continuous cutting time was 36 minutes or more, and the cutting characteristics were further excellent. When the inventive examples 17 to 19 are compared, when the other characteristics are substantially the same except for the maximum PR surface, the cutting durability characteristic is more when the maximum PR surface is (0 , 2 , 10). It was excellent. Comparing inventive examples 5 to 7, when the film thickness is 4.6 μm and the other characteristics are substantially the same except for the average crystal grain size D, the smallest D is 3 μm. Cutting durability characteristics were better. Comparing Invention Examples 9 to 14, when the film thickness was in the range of 2.5 to 4.5 μm, the cutting durability characteristics were more excellent when D was 2 μm or less. Comparing inventive examples 20 to 23, when the film thickness was in the range of less than 2.5 μm, the cutting durability characteristics were more excellent when D was 1 μm or less. From the cutting test results of Examples 12, 15, and 16 of the present invention, when PR (0 , 2 , 10) is 1.3 or more and the maximum PR surface (311) (422) of the Ti (CN) film is used, the cutting durability is obtained. The characteristics were better. This is because the equivalent X-ray diffraction intensity ratio PR (0 , 2 , 10) of the film mainly composed of α-type aluminum oxide of the present invention is 1.3 or more, preferably 1.5 or more, so that the outermost surface This is because the slidability is improved with less unevenness.
Furthermore, since the crystal grain size of the film mainly composed of α-type aluminum oxide of the present invention was small, the mechanical characteristics and cutting characteristics of the film were excellent. This is because the surface roughness Ra and Rmax of the film surface is reduced along with the microcrystallization, and when applied to the cutting process, the friction with the work material is reduced, the film wear and the substrate graining are reduced, and excellent. This is because it has become possible to obtain the required mechanical properties. In Comparative Examples 24-27, peeling of the film was observed, and the cutting life was 16 minutes or less, which was inferior as a cutting tool. Conventional Example 28 was also inferior as a cutting tool because peeling of the film was observed after continuous cutting for 8 minutes.
(実施例3)
実施例1で用いた成膜条件で酸化アルミニウム膜まで成膜した後、更に、H2ガス4(l/分)とTiCl4ガス50(ml/分)とN2ガス1.3(l/分)とを20分間流し、1020度で窒化チタン膜を形成して、本発明例29〜51、比較例52〜55、従来例56を作製した。最外層は窒化チタン膜である。上記の条件で作製した本発明例等の切削工具各5個を用いて、切削試験2に示す条件で連続切削した後に、工具の逃げ面の摩耗量を倍率200倍の光学顕微鏡により観察した、摩耗量が0.35mmに達した時点で切削寿命と判定した。
(切削試験2)
被削材:S50C丸棒(HB220)
工具形状:CMNN120412
切削条件:250m/min
送り:0.4mm/rev
切り込み:2.0mm
切削液:水溶性液を使用
表4に切削試験結果を併記した。
本発明例33〜51はPR(0,2,10)が1.3の場合であり、連続切削可能時間が40分以上を示した。これは、切削特性が比較例、従来例よりも優れる。本発明例29〜32はPR(0,2,10)が1.5以上の場合であり、連続切削可能時間が56分以上と切削特性が更に優れた。本発明例45〜47を比較すると、最大PR面を除いて他の特性が略同じとなっている場合、最大PR面が(0,2,10)の場合の方が、切削耐久特性がより優れていた。本発明例33から35を比較すると、膜厚が4.6μmで同じであり、平均結晶粒径Dを除いて他の特性が略同じとなっている場合、Dが3μmと最も小さい方が、切削耐久特性がより優れていた。本発明例37から42を比較すると、膜厚が2.5〜4.5μmの範囲である時、Dが2μm以下の方が、切削耐久特性がより優れていた。比較例52から55は皮膜の剥離が見られクレーター摩耗が大きく進行し、切削寿命も36分以下と切削工具として劣っていた。従来例56も28分間連続切削後に皮膜の剥離とクレーター摩耗の進行が見られ、切削工具として劣っていた。
(Example 3)
After the aluminum oxide film was formed under the film forming conditions used in Example 1, further, H 2 gas 4 (l / min), TiCl 4 gas 50 (ml / min), and N 2 gas 1.3 (l / min) were used. For 20 minutes, and a titanium nitride film was formed at 1020 degrees to produce Invention Examples 29 to 51, Comparative Examples 52 to 55, and Conventional Example 56. The outermost layer is a titanium nitride film. Using each of the five cutting tools such as the inventive examples prepared under the above conditions, after continuous cutting under the conditions shown in the cutting test 2, the amount of wear on the flank of the tool was observed with an optical microscope with a magnification of 200 times. When the amount of wear reached 0.35 mm, the cutting life was determined.
(Cutting test 2)
Work material: S50C round bar (HB220)
Tool shape: CMNN12041
Cutting conditions: 250 m / min
Feed: 0.4mm / rev
Cutting depth: 2.0mm
Cutting fluid: Water-soluble fluid used Table 4 shows the results of the cutting test.
Invention Examples 33 to 51 are cases where PR (0 , 2 , 10) is 1.3, and the continuous cutting time is 40 minutes or more. This is superior to the comparative example and the conventional example in cutting characteristics. Invention Examples 29 to 32 are cases where PR (0 , 2 , 10) is 1.5 or more, and the continuous cutting possible time is 56 minutes or more, and the cutting characteristics are further excellent. Comparing the inventive examples 45 to 47, when the other characteristics are substantially the same except for the maximum PR surface, the cutting durability characteristics are more when the maximum PR surface is (0 , 2 , 10). It was excellent. Comparing inventive examples 33 to 35, when the film thickness is the same at 4.6 μm and other characteristics are substantially the same except for the average crystal grain size D, the smaller D is 3 μm, Cutting durability characteristics were better. Comparing inventive examples 37 to 42, when the film thickness was in the range of 2.5 to 4.5 μm, the cutting durability characteristics were more excellent when D was 2 μm or less. In Comparative Examples 52 to 55, peeling of the film was observed, crater wear was greatly advanced, and the cutting life was 36 minutes or less, which was inferior as a cutting tool. The conventional example 56 was also inferior as a cutting tool because peeling of the film and progress of crater wear were observed after 28 minutes of continuous cutting.
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