JP2005279820A - Hard carbon film coated tool - Google Patents

Hard carbon film coated tool Download PDF

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JP2005279820A
JP2005279820A JP2004095518A JP2004095518A JP2005279820A JP 2005279820 A JP2005279820 A JP 2005279820A JP 2004095518 A JP2004095518 A JP 2004095518A JP 2004095518 A JP2004095518 A JP 2004095518A JP 2005279820 A JP2005279820 A JP 2005279820A
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film
hard carbon
carbon film
cutting edge
titanium compound
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Hirotoshi Ito
博俊 伊藤
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Kyocera Corp
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Kyocera Corp
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Abstract

<P>PROBLEM TO BE SOLVED: To provide a hard carbon film coated tool, accurately discriminating between a used cutting edge and an unused cutting edge, and enough exhibiting excellent performance of a hard carbon film. <P>SOLUTION: This hard carbon film coated tool 1 has a rake face 6 and a flank 7, wherein at least one layer of hard carbon film 3 is deposited on the surface of a substrate 2 having a cutting edge ridge 8 at the intersecting part of the rake face 6 and the flank 7. A titanium compound film 4 is deposited on the outermost surface of the hard carbon film coated tool 1, and at least the titanium compound film 4 of the cutting edge ridge 8 is removed to expose the hard carbon film 3. <P>COPYRIGHT: (C)2006,JPO&NCIPI

Description

本発明は、硬質炭素膜を表面に被覆した硬質炭素膜被覆工具に関し、特にアルミやチタン合金等の非鉄金属の加工に用いる切削工具として好適な硬質炭素膜被覆工具に関する。   The present invention relates to a hard carbon film-coated tool having a hard carbon film coated on its surface, and more particularly to a hard carbon film-coated tool suitable as a cutting tool used for processing non-ferrous metals such as aluminum and titanium alloys.

ダイヤモンド膜やダイヤモンドライクカーボン膜のような硬質炭素膜は、優れた摺動性、耐摩耗性を有するため、摺動部材や切削工具に用いられてきた(例えば、特許文献1参照)。   Hard carbon films such as diamond films and diamond-like carbon films have been used for sliding members and cutting tools because they have excellent slidability and wear resistance (see, for example, Patent Document 1).

また、特許文献2では、硬質炭素膜(ダイヤモンド膜)の表面に金属間化合物膜としてTiN膜とTiAlN膜を順次成膜することで鉄系材料を切削しても被削材とダイヤモンド膜とが接触して反応することなく、被覆膜の早期摩耗や早期剥離を防止できることが記載されている。   Further, in Patent Document 2, a TiN film and a TiAlN film are sequentially formed as an intermetallic compound film on the surface of a hard carbon film (diamond film), so that the work material and the diamond film are formed even if the iron-based material is cut. It is described that early wear and early peeling of the coating film can be prevented without contacting and reacting.

また、特許文献3には、一般的に可視光域において不透明で黒色、こげ茶色といった暗い色を呈している非晶質カーボン(ダイヤモンドライクカーボン)の色を可視光域において透明で干渉色を示す色とすることにより膜硬度と耐熱性を向上できることが記載されている。
特許第3339994号公報 特開2003−145309号公報 特開2003−62708号公報
Patent Document 3 shows the color of amorphous carbon (diamond-like carbon), which is generally opaque in the visible light region and has a dark color such as black or dark brown, and is transparent in the visible light region and shows an interference color. It is described that the film hardness and heat resistance can be improved by using a color.
Japanese Patent No. 3339994 JP 2003-145309 A JP 2003-62708 A

しかしながら、上記特許文献1の構成では、切削工具として用いた際に硬質炭素膜が暗い色を呈しているため、切刃を使用したかどうかがわかりづらく、使用済み工具と未使用工具の判別がつきにくいという問題があった。   However, in the configuration of Patent Document 1, since the hard carbon film has a dark color when used as a cutting tool, it is difficult to determine whether or not a cutting blade has been used. There was a problem that it was difficult to stick.

また、特許文献2に記載された硬質炭素膜の表面に窒化チタン(TiN)膜やTiAlN膜を被覆した構成の工具では、硬質炭素膜の低摩擦性という効果が損なわれてしまい、切削時に前記TiN膜やTiAlN膜と被削材とが接触することによる切削抵抗が大きくなってしまうため、硬質炭素膜の優れた摺動性が十分に発揮されない結果、切削抵抗により加工面粗度が悪かったり、切り屑が排出される際の摩擦抵抗が大きくて切り屑処理性が低下してしまうという問題点があった。   Moreover, in the tool of the structure which coat | covered the titanium nitride (TiN) film | membrane and the TiAlN film | membrane on the surface of the hard carbon film described in patent document 2, the effect of the low friction property of a hard carbon film | membrane will be impaired, and the said at the time of cutting The cutting resistance due to the contact between the TiN film or TiAlN film and the work material increases. As a result, the excellent slidability of the hard carbon film is not sufficiently exhibited. There is a problem that the chip has a high frictional resistance when the chips are discharged, and the chip disposal is deteriorated.

本発明の硬質炭素膜被覆工具は、上記の問題を解決するためのものであり、その目的は、使用切刃と未使用切刃の判別を容易にかつ正確に行えるとともに、硬質炭素膜の優れた摺動性能を十分に発揮することができる硬質炭素膜被覆工具を提供することである。   The hard carbon film-coated tool of the present invention is for solving the above-mentioned problems, and its purpose is to easily and accurately distinguish between used cutting blades and unused cutting blades. Another object of the present invention is to provide a hard carbon film-coated tool that can sufficiently exhibit the sliding performance.

本発明者は、上記問題に対して、硬質炭素膜を成膜した工具の最表面にチタン化合物膜を成膜し、使用するとチタン化合物膜が確実に消失して切刃の色が変化する構成とすることにより使用の有無を容易かつ正確に認識でき、かつ切削に関与する部分の前記硬質炭素膜を露出させることで、硬質炭素膜の優れた摺動性能を十分に発揮でき、優れた加工面粗度と切り屑処理性を有する工具となることを知見した。   In order to solve the above problems, the present inventor forms a titanium compound film on the outermost surface of a tool on which a hard carbon film is formed, and when used, the titanium compound film surely disappears and the color of the cutting edge changes. It is possible to easily and accurately recognize the presence or absence of use, and by exposing the hard carbon film of the part involved in cutting, the excellent sliding performance of the hard carbon film can be fully exhibited, and excellent processing It has been found that the tool has surface roughness and chip disposal.

すなわち、本発明の硬質炭素膜被覆工具は、すくい面と逃げ面を有し、すくい面と逃げ面との交線部に切刃稜を有する基体の表面に、ダイヤモンドおよび/または、ダイヤモンドライクカーボン(DLC)からなる硬質炭素膜を少なくとも1層成膜した硬質炭素膜被覆工具において、前記硬質炭素膜の表面にチタン化合物膜を成膜するとともに、少なくとも前記切刃稜では前記チタン化合物膜が除去されて前記硬質炭素膜が露出していることを特徴とする硬質炭素膜被覆工具である。   That is, the hard carbon film-coated tool of the present invention has a rake face and a flank face, and diamond and / or diamond-like carbon is formed on the surface of the substrate having a cutting edge at the intersection of the rake face and the flank face. In a hard carbon film coated tool in which at least one hard carbon film made of (DLC) is formed, a titanium compound film is formed on the surface of the hard carbon film, and at least the cutting edge ridge removes the titanium compound film The hard carbon film-coated tool is characterized in that the hard carbon film is exposed.

ここで、前記すくい面全面の前記チタン化合物膜を除去して前記硬質炭素膜が露出していることが、切り屑の排出経路であるすくい面上における摺動性が向上して切り屑の流れがスムーズになり、切り屑処理性が高まるため、更なる加工抵抗の低減による耐摩耗性の向上や切り屑を原因とするチッピングや欠損を抑えることができる点で望ましい。   Here, the titanium compound film on the entire surface of the rake face is removed and the hard carbon film is exposed. This improves the slidability on the rake face as a chip discharge path, and the flow of the chips. Is smooth and improves chip disposal, which is desirable in terms of further improving wear resistance by further reducing processing resistance and suppressing chipping and chipping caused by chips.

また、前記チタン化合物膜のJIS Z8729に基づいた色調表示にて、色度a:0〜10、b:20〜50、明度L:45〜80となることが、切刃を使用した際に前記切刃周辺のチタン化合物膜の変色がわかりやすくなり、切刃の使用、未使用の判別が容易になるため望ましい。 In addition, when the color tone display of the titanium compound film is based on JIS Z8729, the chromaticity a * : 0 to 10, b * : 20 to 50, and the lightness L * : 45 to 80 was used. At this time, the discoloration of the titanium compound film around the cutting edge becomes easy to understand, and it is desirable because it becomes easy to determine whether the cutting edge is used or not.

さらに、前記チタン化合物膜の膜質が窒化チタンからなることが、切刃を使用した際の変色がよりわかりやすくなるとともに、耐摩耗性、摺動性において優れた性能を発揮することができるため望ましい。   Furthermore, it is desirable that the film quality of the titanium compound film is made of titanium nitride because discoloration when using a cutting blade becomes easier to understand and can exhibit excellent performance in wear resistance and slidability. .

本発明の硬質炭素膜被覆工具は、基体の表面に、硬質炭素膜を少なくとも1層成膜した硬質炭素膜被覆工具において、前記硬質炭素膜の表面にチタン化合物膜を成膜するとともに、少なくとも前記切刃稜で前記チタン化合物膜が除去され、前記硬質炭素膜を露出させることで、切削に関する切刃稜にて硬質炭素膜が被削材に接触することができるために、硬質炭素膜の低い摩擦係数による優れた摺動性および硬質炭素膜の非常に高硬度による高い耐摩耗性等の優れた切削性能を十分に発揮することができるとともに、切刃付近のチタン化合物膜が黒く変色するために切刃の使用、未使用が容易に判別することができる。   The hard carbon film-coated tool of the present invention is a hard carbon film-coated tool in which at least one layer of a hard carbon film is formed on the surface of a substrate, a titanium compound film is formed on the surface of the hard carbon film, and at least the above-mentioned Since the titanium compound film is removed at the cutting edge and the hard carbon film is exposed, the hard carbon film can contact the work material at the cutting edge related to cutting. Excellent cutting performance such as excellent slidability due to friction coefficient and high wear resistance due to extremely high hardness of hard carbon film can be fully exhibited, and the titanium compound film near the cutting edge turns black. In addition, the use or non-use of the cutting blade can be easily determined.

本発明における硬質炭素膜被覆工具(以下、単に工具と略す。)1について、その一例についての概略斜視図である図1、および図1の工具の断面概略図である図2を用いて説明する。   A hard carbon film-coated tool (hereinafter simply referred to as a tool) 1 according to the present invention will be described with reference to FIG. 1 which is a schematic perspective view of an example thereof and FIG. 2 which is a schematic cross-sectional view of the tool of FIG. .

図1によれば、本発明の工具は、すくい面6と逃げ面7を有し、さらに、すくい面6と逃げ面7の交線部に切刃稜8を有する形状をなしている。   According to FIG. 1, the tool of the present invention has a shape having a rake face 6 and a flank face 7 and a cutting edge ridge 8 at the intersection of the rake face 6 and the flank face 7.

本発明によれば、工具1の基体2の表面に硬質炭素膜3を成膜するとともに、その最表面にチタン化合物膜4を成膜して、かつ、切刃稜8においてチタン化合物膜4を除去して、硬質炭素膜3を露出させることが大きな特徴であり、この構成によって、切削した際に切刃稜8の近傍に存在するチタン化合物膜4が加工時に切刃稜8部とともに、剥離や摩耗して消滅し硬質被覆膜が表面に露出することで変色するため、直接切刃稜8の観察はできなくても切削によって切刃と同じようにダメージを受けるそのすぐ近傍のチタン化合物膜4の状態を観察することにより、切刃稜8の損耗状態を判別することができて、切刃の使用、未使用が容易に判別することができる。さらに、切削抵抗に最も影響する切刃稜8において硬質炭素膜3が露出しているため、硬質炭素膜3が切削の際に被削材と接触することができ、硬質炭素膜3の低い摩擦係数による優れた摺動性と耐摩耗性を切削時に十分に発揮することができ、優れた加工面粗度と耐摩耗性を有する工具となる。   According to the present invention, the hard carbon film 3 is formed on the surface of the base 2 of the tool 1, the titanium compound film 4 is formed on the outermost surface, and the titanium compound film 4 is formed on the cutting edge ridge 8. The main feature is that the hard carbon film 3 is exposed to be removed, and with this configuration, the titanium compound film 4 existing in the vicinity of the cutting edge ridge 8 when being cut is peeled together with the cutting edge ridge 8 at the time of machining. The titanium compound in the immediate vicinity is damaged by cutting in the same way as the cutting edge even if the cutting edge ridge 8 cannot be observed directly because it discolors when it wears out and disappears and the hard coating film is exposed on the surface. By observing the state of the film 4, it is possible to determine the worn state of the cutting edge ridge 8 and to easily determine whether the cutting edge is used or not. Furthermore, since the hard carbon film 3 is exposed at the cutting edge 8 that most affects the cutting resistance, the hard carbon film 3 can come into contact with the work material during cutting, and the low friction of the hard carbon film 3 The excellent slidability and wear resistance due to the coefficient can be sufficiently exhibited during cutting, and the tool has excellent machined surface roughness and wear resistance.

すなわち、切刃稜8におけるチタン化合物膜4を除去し硬質炭素膜3を露出させていないと、切刃稜8の表面はチタン化合物膜4となり、切削の際に被削材と接触するのがチタン化合物膜4になってしまうため、切刃8の摩擦係数が高くなってしまい、切削抵抗が高くなるため工具1の加工面粗度や耐摩耗性が低下してしまう。   That is, if the titanium compound film 4 on the cutting edge 8 is removed and the hard carbon film 3 is not exposed, the surface of the cutting edge 8 becomes the titanium compound film 4 and comes into contact with the work material during cutting. Since the titanium compound film 4 is formed, the friction coefficient of the cutting edge 8 is increased, and the cutting resistance is increased, so that the machined surface roughness and wear resistance of the tool 1 are decreased.

一方、チタン化合物膜4を最表面に成膜しないと、最表面に存在する硬質炭素膜3およびその下部に存在する基体2が暗い色を呈しているため、切削を行っても硬質炭素膜3の損耗状態を含めた切刃8の状態が目視では確認しにくく、切刃8の使用、未使用が判別しにくくなってしまう。ここで、チタン化合物膜4の膜厚は、膜剥離の防止、および、明るい色を鮮明に出し、切刃8の使用、未使用を容易に判別できるようにする点で0.1〜2μmの範囲であることが望ましい。   On the other hand, if the titanium compound film 4 is not formed on the outermost surface, the hard carbon film 3 existing on the outermost surface and the base 2 existing below the outer surface exhibit a dark color. It is difficult to visually confirm the state of the cutting edge 8 including the worn state, and it is difficult to determine whether the cutting edge 8 is used or not. Here, the thickness of the titanium compound film 4 is 0.1 to 2 μm in terms of prevention of film peeling and a bright color so that the use and non-use of the cutting edge 8 can be easily distinguished. A range is desirable.

ここで、チタン化合物膜4は、JIS Z8729に基づく色調が、それぞれ色度a(赤方向):0〜10、特に0〜5、b(黄方向):20〜50、特に30〜40、明度L:45〜80、特に55〜70の範囲内であることが望ましく、この範囲内の色となることによって表面に存在するチタン化合物膜4の外観が鮮やかとなり、切刃を使用した際のチタン化合物膜4の消滅による色の変化がよりはっきりとわかることから、切刃の使用、未使用の判別が容易になるため望ましい。 Here, the titanium compound film 4 has chromaticity a * (red direction): 0 to 10, particularly 0 to 5, b * (yellow direction): 20 to 50, particularly 30 to 40, based on JIS Z8729. The brightness L * is preferably in the range of 45 to 80, and more preferably in the range of 55 to 70, and the appearance of the titanium compound film 4 existing on the surface becomes vivid by using a color within this range, and a cutting blade is used. Since the color change due to the disappearance of the titanium compound film 4 at this time can be clearly understood, it is desirable because it becomes easy to determine whether the cutting blade is used or not.

また、上記チタン化合物膜4としては、炭化チタン、窒化チタン、酸化チタン、炭窒化チタン、炭酸化チタン、酸窒化チタン、炭窒酸化チタン、または、(Ti1−x)(C1−y−z)(ただし、MはTi以外の周期律表4a、5aおよび6a族金属、Al、Siのうちの1種以上、0.4<x≦1、0≦y≦11、0≦z≦1)で表わされる化合物からなるあることが望ましい。中でも、明るい金色を呈するため、使用切刃の判別を容易にすることができる点で窒化チタンを使用することが望ましい。 In addition, as the titanium compound film 4, titanium carbide, titanium nitride, titanium oxide, titanium carbonitride, titanium carbonate, titanium oxynitride, titanium carbonitride, or (Ti x M 1-x ) (C 1- yz N y O z ) (where M is one or more of periodic group 4a, 5a and 6a metals other than Ti, Al, Si, 0.4 <x ≦ 1, 0 ≦ y ≦ 11) , 0 ≦ z ≦ 1). Among them, it is desirable to use titanium nitride because it exhibits a bright gold color and can easily identify the cutting edge used.

なお、本発明によれば、上記基体2の表面に成膜される硬質炭素膜3とは、多結晶ダイヤモンド膜や非晶質炭素膜(ダイヤモンドライクカーボン(DLC))さらにはテトラヘデラルアモルファスカーボン(TAC)等の高硬度炭素膜のことをさす。さらに、硬質炭素膜3の膜厚は、膜剥離の防止、耐摩耗性の維持の点から0.05〜1μm、特に0.1〜0.6μmであることが耐摩耗性、耐欠損性等の切削性能が高いため、望ましい。   According to the present invention, the hard carbon film 3 formed on the surface of the substrate 2 is a polycrystalline diamond film, an amorphous carbon film (diamond-like carbon (DLC)), or a tetrahedral amorphous carbon. It refers to a high-hardness carbon film such as (TAC). Further, the thickness of the hard carbon film 3 is 0.05 to 1 μm, particularly 0.1 to 0.6 μm from the viewpoint of preventing film peeling and maintaining wear resistance, and wear resistance, fracture resistance, etc. This is desirable because of its high cutting performance.

また、工具1における基体2は、炭化タングステン(WC)と、所望により周期律表第4a、5a、6a族金属の炭化物、窒化物、炭窒化物の群から選ばれる少なくとも1種からなる硬質相をコバルト(Co)および/またはニッケル(Ni)等の鉄属金属から成る結合相にて結合させた超硬合金、炭化チタン(TiC)や炭窒化チタン(TiCN)を主体として周期律表第4a、5a、6a族金属の炭化物、窒化物、炭窒化物の群から選ばれる少なくとも1種からなる硬質相をコバルト(Co)および/またはニッケル(Ni)等の鉄属金属からなる結合相にて結合させたサーメット、または、窒化珪素(Si)や酸化アルミニウム(Al)等を主体としたセラミック焼結体、さらには、立方晶窒化ホウ素(cBN)、および、多結晶ダイヤモンド(PCD)等を主体とした超硬質焼結体等の硬質材料、または高速度鋼等の金属からなるものである(図1では超硬合金を使用)。特に、基体2の材質として耐摩耗性、耐欠損性の点から、硬質材料を使用することが望ましい。 The base 2 in the tool 1 is a hard phase composed of tungsten carbide (WC) and, if desired, at least one selected from the group consisting of carbides, nitrides, and carbonitrides of Group 4a, 5a, and 6a metals of the periodic table. The periodic table 4a mainly composed of cemented carbide, titanium carbide (TiC), and titanium carbonitride (TiCN) bonded with a binder phase composed of an iron group metal such as cobalt (Co) and / or nickel (Ni). A hard phase composed of at least one selected from the group consisting of carbides, nitrides and carbonitrides of group 5a and 6a metals in a binder phase composed of an iron group metal such as cobalt (Co) and / or nickel (Ni) coupled to form the cermet, or silicon nitride (Si 3 N 4) and aluminum oxide (Al 2 O 3) ceramic sintered body consisting mainly of such news, cubic boron nitride (cBN), And, it is made of polycrystalline diamond (PCD) or the like hard material superhard sintered body consisting mainly of, or metal such as high speed steel, (using the cemented carbide in Figure 1). In particular, it is desirable to use a hard material as the material of the base body 2 in terms of wear resistance and chipping resistance.

さらに、耐摩耗性、および耐欠損性の向上のため、チタン化合物膜4と硬質炭素膜3の間に中間層(図示せず。)として4a、5a、6a族元素の炭化物、窒化物、炭窒化物、炭酸化物、酸窒化物、炭酸窒化物、およびTi、Siといった金属からなる膜を成膜してもよい。   Furthermore, in order to improve wear resistance and fracture resistance, carbides, nitrides, and charcoal of group 4a, 5a, and 6a elements are used as an intermediate layer (not shown) between the titanium compound film 4 and the hard carbon film 3. A film made of nitride, carbonate, oxynitride, carbonitride, and metal such as Ti or Si may be formed.

また、硬質炭素膜3と基体2との間に4a、5a、6a族元素の炭化物、窒化物、炭窒化物、炭酸化物、酸窒化物、炭酸窒化物、およびTi、Si等の金属からなる膜を下地層5として成膜することで硬質炭素膜3と基体2との密着性を向上させ、硬質炭素膜3の剥離を防止する点で望ましい。特に、炭化珪素(SiC)および/または窒化チタン(TiN)、さらには珪素(Si),チタン(Ti)の金属を用いることが基体2と硬質炭素膜3との付着力を高める点で望ましい。   Further, between the hard carbon film 3 and the substrate 2, it is made of carbides, nitrides, carbonitrides, carbonates, oxynitrides, carbonitrides, and metals such as Ti and Si. Forming the film as the underlayer 5 is desirable in terms of improving the adhesion between the hard carbon film 3 and the substrate 2 and preventing the hard carbon film 3 from peeling off. In particular, it is desirable to use silicon carbide (SiC) and / or titanium nitride (TiN), as well as silicon (Si) or titanium (Ti), in terms of enhancing the adhesion between the substrate 2 and the hard carbon film 3.

また、本発明によれば、すくい面6全面にわたってチタン化合物膜4を除去し、すくい面6に硬質炭素膜3を露出させる構成であってもよい。この構成によれば、すくい面6上での切り屑の流れがスムーズになり、切り屑処理性がさらに向上するため、切り屑が延びる加工の際には切削抵抗の更なる低減による耐摩耗性の向上や切り屑に起因する欠損、およびチッピング等の切刃8の損傷を抑えることができるため望ましい。ここで、逃げ面7におけるチタン化合物膜4を一部除去しても構わないが、逃げ面の切刃に近い部分のチタン化合物膜4は残しておくことが切刃の使用、未使用を判別しやすくなるため必要である。   Further, according to the present invention, the titanium compound film 4 may be removed over the entire rake face 6 and the hard carbon film 3 may be exposed on the rake face 6. According to this configuration, the flow of chips on the rake face 6 becomes smooth, and the chip disposability is further improved. Therefore, wear resistance due to a further reduction in cutting resistance when machining chips extend. It is desirable because damage to the cutting edge 8 such as chipping and chipping due to improvement of chips and chips can be suppressed. Here, a part of the titanium compound film 4 on the flank 7 may be removed, but it is discriminated whether the cutting blade is used or not used by leaving the titanium compound film 4 near the cutting edge of the flank. It is necessary because it becomes easy to do.

(製造方法)
上述した硬質炭素膜被覆工具1を製造するには、まず、上述した硬質材料を焼成によって形成しうる金属炭化物、窒化物、炭窒化物、酸化物等の無機物粉末に、金属粉末、カーボン粉末等を適宜添加、混合し、プレス成形、鋳込成形、押出成形、冷間静水圧プレス成形等の公知の成形方法によって所定の工具形状に成形した後、真空中または非酸化性雰囲気中にて焼成することによって上述した硬質合金からなる基体2を作製する。
(Production method)
In order to manufacture the hard carbon film-coated tool 1 described above, first, an inorganic powder such as a metal carbide, nitride, carbonitride, or oxide that can be formed by firing the hard material described above, a metal powder, a carbon powder, or the like. Are added and mixed as appropriate, and then molded into a predetermined tool shape by a known molding method such as press molding, cast molding, extrusion molding, or cold isostatic pressing, and then fired in a vacuum or non-oxidizing atmosphere. By doing so, the base body 2 made of the hard alloy described above is produced.

また、基体2がCoやNi等の鉄族金属を多く含有する硬質合金である場合、硬質炭素膜3の基体2との付着力が著しく低下するため、硫酸、塩酸、王水等の酸や、プラズマエッチング、または熱処理等によってエッチングを行って基体2の表面の鉄族金属を除去することが望ましい。もしくは、エッチングを行う代わりに基体2と硬質炭素膜3の間に下地層5をCVD法、プラズマCVD法等の化学蒸着法、または、アークイオンプレーティング法、イオンプレーティング法、スパッタリング等の物理蒸着法といった一般的な薄膜形成法によって成膜してもよい。   In addition, when the base 2 is a hard alloy containing a large amount of iron group metal such as Co or Ni, the adhesion of the hard carbon film 3 to the base 2 is remarkably reduced, so acids such as sulfuric acid, hydrochloric acid, aqua regia, etc. It is desirable to remove the iron group metal on the surface of the substrate 2 by performing etching by plasma etching or heat treatment. Alternatively, instead of performing etching, the base layer 5 is formed between the base 2 and the hard carbon film 3 by chemical vapor deposition such as CVD or plasma CVD, or physical such as arc ion plating, ion plating, or sputtering. The film may be formed by a general thin film forming method such as a vapor deposition method.

次に、上記基体2の表面を所望によって研磨加工した後、その表面に硬質炭素膜3を成膜する。硬質炭素膜3としてDLC膜を成膜する場合は、例えば炭化水素(CmHn:m、nは自然数)を雰囲気ガスとして用いたCVD法、プラズマCVD法、炭素を原料、炭化水素ガスを雰囲気とするスパッタリング法、真空アーク蒸着法が利用される。特にスパッタリング法、真空アーク蒸着法はさらに水素比率を制御でき摩擦係数を低減できるので望ましい。   Next, after polishing the surface of the base 2 as desired, a hard carbon film 3 is formed on the surface. When a DLC film is formed as the hard carbon film 3, for example, a CVD method using a hydrocarbon (CmHn: m, n is a natural number) as an atmosphere gas, a plasma CVD method, carbon as a raw material, and a hydrocarbon gas as an atmosphere Sputtering and vacuum arc deposition are used. In particular, the sputtering method and the vacuum arc deposition method are preferable because the hydrogen ratio can be further controlled and the friction coefficient can be reduced.

また、硬質炭素膜3としてダイヤモンド膜を使用する場合は、CVD法、PVD法、PCVD法、あるいはこれらを組み合わせた方法等、各種のダイヤモンド類薄層気相合成法を使用することができ、これらの中でも、通常、EACVD法を含めた各種の熱フィラメント法、熱プラズマ法を含めた各種の直流プラズマCVD法、熱プラズマ法を含めたマイクロ波プラズマCVD法等を好適に使用することができる。   Further, when a diamond film is used as the hard carbon film 3, various diamond thin layer vapor phase synthesis methods such as a CVD method, a PVD method, a PCVD method, or a combination thereof can be used. Of these, various hot filament methods including the EACVD method, various direct current plasma CVD methods including the thermal plasma method, and microwave plasma CVD methods including the thermal plasma method can be preferably used.

次に、チタン化合物膜4を成膜するには、CVD法、プラズマCVD法等の化学蒸着法、または、アークイオンプレーティング法、イオンプレーティング法、スパッタリング等の物理蒸着法によって成膜されるが、硬質炭素膜3を成膜した方法によって成膜することが製造工程を短縮させることができる点で望ましい。   Next, the titanium compound film 4 is formed by chemical vapor deposition such as CVD or plasma CVD, or physical vapor deposition such as arc ion plating, ion plating, or sputtering. However, it is desirable to form the film by the method of forming the hard carbon film 3 because the manufacturing process can be shortened.

最後に、切刃稜8およびすくい面6におけるチタン化合物膜4を除去する方法としては、弾性砥石、ブラシ、サンドブラスト等の研磨方法によって硬質炭素膜3が露出するまで研磨を行う。加工方法としては、すくい面形状が凹凸の大きな形状であっても研磨面の表面粗さを満遍なく滑らかに研磨することができるため特に、ブラシによる研磨が望ましい。   Finally, as a method for removing the titanium compound film 4 on the cutting edge ridge 8 and the rake face 6, polishing is performed until the hard carbon film 3 is exposed by a polishing method such as an elastic grindstone, a brush, or a sand blast. As a processing method, polishing with a brush is particularly preferable because the surface roughness of the polishing surface can be uniformly and smoothly polished even if the rake surface has a large unevenness.

なお、本発明は上記実施態様に限定されるものではなく、その他の成膜方法によって作製されたものであってもよい。   In addition, this invention is not limited to the said embodiment, The thing produced by the other film-forming method may be used.

平均粒径1.5μmのWC粉末を80.0質量%、平均粒径2μmのTiC粉末を3.0質量%、平均粒径2μmのTaC粉末を1.0質量%、平均粒径1.2μmのCo粉末を10.0質量%の割合で添加、混合して、プレス成形により切削工具形状に成形した後、脱バインダ処理を施し、0.01Paの真空中、1500℃で1時間焼成して超硬合金を作製した。さらに、作製した超硬合金にブラシ加工にて刃先処理(ホーニングR)を施した。また、表面のCoを除去するためにプラズマエッチングを1時間行い、超硬合金基体を作製した。   80.0% by mass of WC powder with an average particle size of 1.5 μm, 3.0% by mass of TiC powder with an average particle size of 2 μm, 1.0% by mass of TaC powder with an average particle size of 2 μm, and an average particle size of 1.2 μm After adding and mixing Co powder at a ratio of 10.0% by mass and forming it into a cutting tool shape by press molding, it was subjected to binder removal treatment and fired at 1500 ° C. for 1 hour in a vacuum of 0.01 Pa. A cemented carbide was produced. Further, the prepared cemented carbide was subjected to blade edge processing (Honing R) by brushing. Further, in order to remove Co on the surface, plasma etching was performed for 1 hour to produce a cemented carbide substrate.

上記超硬合金基体の表面に、プラズマCVD法にて下地層としてアモルファス炭化珪素(SiC)膜を0.1μmの膜厚で成膜した。   On the surface of the cemented carbide substrate, an amorphous silicon carbide (SiC) film having a thickness of 0.1 μm was formed as a base layer by plasma CVD.

さらに下地層の表面にダイヤモンドライクカーボン(DLC)膜をプラズマCVD法にてCガス流量150m/min、バイアス電圧600V、放電電流15A、基体温度450℃の条件で0.1μmの膜厚で成膜した後、その表面に上記DLCの成膜と同じプラズマCVD法にてチタン化合物層として窒化チタン(TiN)膜を0.1μmの膜厚で成膜した。 Further, a diamond-like carbon (DLC) film is formed on the surface of the underlayer by plasma CVD using a C 2 H 2 gas flow rate of 150 m / min, a bias voltage of 600 V, a discharge current of 15 A, and a substrate temperature of 450 ° C., and a film thickness of 0.1 μm. After that, a titanium nitride (TiN) film having a thickness of 0.1 μm was formed as a titanium compound layer on the surface by the same plasma CVD method as the DLC film.

次に、作製した硬質炭素膜被覆工具についてすくい面から切刃にかけてブラシを用いて研磨し、切刃稜の部分のTiN膜をDLC膜が露出するまで研磨した。また、すくい面のTiN膜は研磨された形で残存させた。   Next, the produced hard carbon film-coated tool was polished with a brush from the rake face to the cutting edge, and the TiN film at the edge of the cutting edge was polished until the DLC film was exposed. Also, the TiN film on the rake face was left in a polished form.

上記方法にて作製した硬質炭素膜被覆工具の逃げ面について表面に被覆されたTiN膜の部分について分光測色計を用いJIS Z8729に基づいて色度(a、b)および明度(L)を下記条件で測定した。 With respect to the flank face of the hard carbon film coated tool produced by the above method, the chromaticity (a * , b * ) and lightness (L * ) are measured based on JIS Z8729 for the portion of the TiN film coated on the surface . ) Was measured under the following conditions.

基準光源 :D65
波長範囲 :360〜740nm
視野 :10°
測定反射率 :全反射率
マスク :5×7mm(SAV)
また、硬質炭素膜被覆工具を以下の条件で切削試験を行った。
Reference light source: D65
Wavelength range: 360-740 nm
Field of view: 10 °
Measurement reflectance: Total reflectance mask: 5 × 7 mm (SAV)
Further, a cutting test was performed on the hard carbon film-coated tool under the following conditions.

<切削条件>
切削方法:ミリング
被削材 :ADC12
切削速度:300m/min
送り :0.15mm/rev
切込み:5mm
切削状態:湿式
切削長36mの時点での加工面粗度Ra(算術平均粗さ)を測定し、切刃およびすくい面の状態を顕微鏡で観察した。
<Cutting conditions>
Cutting method: Milling work material: ADC12
Cutting speed: 300 m / min
Feeding: 0.15mm / rev
Cutting depth: 5mm
Cutting state: The machined surface roughness Ra (arithmetic average roughness) at a wet cutting length of 36 m was measured, and the state of the cutting edge and the rake face was observed with a microscope.

切削試験の結果、被削材の加工面粗度Raは0.6μmと非常に滑らかな加工面粗度で、あった。また、切削後の切刃およびすくい面の状態は、すくい面に被削材の溶着が見られたが、チッピング等の損傷は見られなかった。さらに、TiN膜の分光測色計の測定ではa:8.7、b:29.8、L:56.3であり、切削後では切刃付近のTiN膜が剥離して黒く変色していたため、切刃を使用したことがはっきりと確認できた。 As a result of the cutting test, the machined surface roughness Ra of the work material was 0.6 μm, which was a very smooth machined surface roughness. Further, regarding the state of the cutting edge and the rake face after cutting, welding of the work material was observed on the rake face, but no damage such as chipping was observed. Further, the spectrocolorimeter of the TiN film measured a * : 8.7, b * : 29.8, L * : 56.3, and after cutting, the TiN film near the cutting edge peeled off and turned black. Therefore, it was clearly confirmed that the cutting blade was used.

すくい面と切刃稜のTiN膜を除去し、DLC膜を露出させたこと以外は実施例1と同様の硬質炭素膜被覆工具を作成し、実施例1と同様の切削試験を行った。また、実施例1と同様におこなったTiN膜の分光測色計の測定では、a:7.9、b:30.8、L:60.2であった。 A hard carbon film-coated tool similar to Example 1 was prepared except that the TiN film on the rake face and the edge of the cutting edge was removed and the DLC film was exposed, and the same cutting test as in Example 1 was performed. Moreover, in the spectrocolorimeter measurement of the TiN film | membrane performed similarly to Example 1, they were a * : 7.9, b * : 30.8, L * : 60.2.

切削試験の結果、被削材の加工面粗度Raは0.48μmと非常に滑らかな加工面粗度であった。また、切削後の切刃およびすくい面の状態は、被削材の溶着やチッピング等の損傷は見られず、クレータ摩耗もほとんどない状態であった。さらに、切刃付近のTiN膜が剥離して黒く変色していたため、切刃を使用したことがはっきりと確認できた。   As a result of the cutting test, the machined surface roughness Ra of the work material was 0.48 μm, which was a very smooth machined surface roughness. Further, the state of the cutting edge and the rake face after cutting was such that no damage such as welding or chipping of the work material was observed, and there was almost no crater wear. Furthermore, since the TiN film near the cutting edge peeled off and turned black, it was clearly confirmed that the cutting edge was used.

(比較例1)
硬質炭素膜被覆工具の最表面のTiN膜を全く除去しないこと以外は実施例1と同様の方法にて硬質炭素膜被覆工具を作製し、実施例1と同様に切削試験を行った。また、実施例1と同様に逃げ面のTiN膜の表面について分光測色計にて色の測定を行った。結果はa:6.9、b:33.0、L:57.3であった。
(Comparative Example 1)
A hard carbon film-coated tool was prepared in the same manner as in Example 1 except that the TiN film on the outermost surface of the hard carbon film-coated tool was not removed at all, and a cutting test was performed in the same manner as in Example 1. Similarly to Example 1, the color of the surface of the TiN film on the flank face was measured with a spectrocolorimeter. The results were a * : 6.9, b * : 33.0, and L * : 57.3.

切削試験の結果、切刃付近の窒化TiN膜が剥離して黒く変色していたため、切刃を使用したことは、はっきりと確認できたが、被削材の加工面粗度Raは1.2μmとやや粗雑な加工面粗度であった。また、切削後の切刃およびすくい面の状態は、すくい面に被削材の溶着が発生し、膜剥離やチッピング等の損傷がみられた。   As a result of the cutting test, the nitrided TiN film in the vicinity of the cutting edge peeled off and turned black, so it was clearly confirmed that the cutting edge was used, but the machined surface roughness Ra of the work material was 1.2 μm. The surface roughness was slightly rough. Further, regarding the state of the cutting edge and the rake face after cutting, welding of the work material occurred on the rake face, and damage such as film peeling and chipping was observed.

本発明の硬質炭素膜被覆工具の外観を示す概略斜視図である。It is a schematic perspective view which shows the external appearance of the hard carbon film coating tool of this invention. (a)は切刃のTiN膜のみを除去した本発明の硬質炭素膜被覆工具の概略断面図、 (b)は切刃とすくい面の窒化TiN膜のみを除去した本発明の硬質炭素膜被覆工具の概略断面図である(A) is a schematic cross-sectional view of the hard carbon film-coated tool of the present invention from which only the TiN film on the cutting edge is removed, and (b) is the hard carbon film coating of the present invention from which only the nitrided TiN film on the cutting edge and the rake face is removed. It is a schematic sectional drawing of a tool.

符号の説明Explanation of symbols

1:硬質炭素膜被覆工具
2:基体
3:硬質炭素膜
4:チタン化合物膜
5:下地層
6:すくい面
7:逃げ面
8:切刃稜
9:中間層
1: Hard carbon film coating tool 2: Substrate 3: Hard carbon film 4: Titanium compound film 5: Underlayer 6: Rake face 7: Relief face 8: Cutting edge 9: Intermediate layer

Claims (4)

すくい面と逃げ面を有し、すくい面と逃げ面との交線部に切刃稜を有する基体の表面に、硬質炭素膜を少なくとも1層成膜した硬質炭素膜被覆工具において、該硬質炭素膜被覆工具の最表面にチタン化合物膜を成膜するとともに、少なくとも前記切刃稜では前記チタン化合物膜が除去されて前記硬質炭素膜が露出していることを特徴とする硬質炭素膜被覆工具。 A hard carbon film-coated tool having a hard carbon film formed on a surface of a substrate having a rake face and a flank face, and having a cutting edge at the intersection of the rake face and the flank face. A hard carbon film-coated tool, wherein a titanium compound film is formed on the outermost surface of the film-coated tool, and the hard carbon film is exposed by removing the titanium compound film at least at the cutting edge. 前記すくい面全面の前記チタン化合物膜を除去して前記硬質炭素膜が露出していることを特徴とする請求項1に記載の硬質炭素膜被覆工具。 The hard carbon film-coated tool according to claim 1, wherein the hard carbon film is exposed by removing the titanium compound film on the entire surface of the rake face. 前記チタン化合物膜が、JIS Z8729に基づいた色調表示にて、色度a:0〜10、b:20〜50、明度L:45〜80となることを特徴とする請求項1または2に記載の硬質炭素膜被覆工具。 The titanium compound film has a chromaticity a * : 0 to 10, b * : 20 to 50, and a lightness L * : 45 to 80 in a color tone display based on JIS Z8729. 2. Hard carbon film-coated tool according to 2. 前記チタン化合物膜が窒化チタン膜からなることを特徴とする請求項1乃至3のいずれかに記載の硬質炭素膜被覆工具。 The hard carbon film-coated tool according to claim 1, wherein the titanium compound film is made of a titanium nitride film.
JP2004095518A 2004-03-29 2004-03-29 Hard carbon film coated tool Pending JP2005279820A (en)

Priority Applications (1)

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Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2007162613A (en) * 2005-12-15 2007-06-28 Mitsubishi Heavy Ind Ltd Rotary machine with surface smoothening film
JP2010520069A (en) * 2007-02-28 2010-06-10 エレメント シックス (プロダクション)(プロプライエタリィ) リミテッド Tool parts
JP2010520067A (en) * 2007-02-28 2010-06-10 エレメント シックス (プロダクション)(プロプライエタリィ) リミテッド Machining method of workpiece
JP2012152866A (en) * 2011-01-27 2012-08-16 Mitsubishi Materials Corp Cutting tool made of surface-coated cubic boron nitride based ultra-high pressure sintered material
WO2019065949A1 (en) * 2017-09-29 2019-04-04 三菱マテリアル株式会社 Diamond-coated rotation cutting tool

Cited By (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2007162613A (en) * 2005-12-15 2007-06-28 Mitsubishi Heavy Ind Ltd Rotary machine with surface smoothening film
JP2010520069A (en) * 2007-02-28 2010-06-10 エレメント シックス (プロダクション)(プロプライエタリィ) リミテッド Tool parts
JP2010520067A (en) * 2007-02-28 2010-06-10 エレメント シックス (プロダクション)(プロプライエタリィ) リミテッド Machining method of workpiece
JP2012152866A (en) * 2011-01-27 2012-08-16 Mitsubishi Materials Corp Cutting tool made of surface-coated cubic boron nitride based ultra-high pressure sintered material
WO2019065949A1 (en) * 2017-09-29 2019-04-04 三菱マテリアル株式会社 Diamond-coated rotation cutting tool
JP2019063904A (en) * 2017-09-29 2019-04-25 三菱マテリアル株式会社 Diamond-coated rotary cutting tool
CN111163890A (en) * 2017-09-29 2020-05-15 三菱综合材料株式会社 Diamond coated rotary cutting tool
CN111163890B (en) * 2017-09-29 2021-07-09 三菱综合材料株式会社 Diamond coated rotary cutting tool
US11878353B2 (en) 2017-09-29 2024-01-23 Mitsubishi Materials Corporation Diamond-coated rotary cutting tool

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